Observation window and observation method for metallized semiconductor film

Abstract

The invention relates to the field of vacuum coating, and discloses an observation window for a metal-plated semiconductor film and an observation method.The observation window for the metal-plated semiconductor film comprises an observation window frame, an observation window gland is installed on one side of the observation window frame, and observation window glass is installed in the observation window frame; a mounting frame is fixedly connected to one side of the observation window frame, a driving structure is fixedly arranged in the mounting frame, a first winding roller is rotatably connected to one side of the mounting frame, a flexible baffle is fixedly connected to one side of the outer wall of the first winding roller, and a connecting plate is fixedly connected to the bottom of the flexible baffle. Installation is carried out through the observation window frame, all devices and structures are limited on the observation window frame through the installation frame, all the devices and structures are located in the film coating chamber or the devices, the interior of the film coating chamber or the interior of the devices is observed through the observation window glass, the two winding rollers are driven by the driving structure to rotate, and the flexible baffle or the connecting rope is wound and unfolded.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically to an observation window and observation method for depositing metal semiconductor films. Background Technology

[0002] In the field of vacuum coating, various functional thin films can be deposited on substrate surfaces through processes such as evaporation coating, sputtering coating, and ion plating, and are widely used in industries such as electronics, optics, and new energy. As the semiconductor industry develops towards higher precision and performance, the demand for depositing metal semiconductor thin films is increasing, placing higher demands on the observation and control precision of vacuum coating equipment.

[0003] In addition to depositing common transparent dielectric films, it also frequently deposits opaque metal / semiconductor material films. Especially in the field of infrared coating, evaporating opaque materials such as silicon / germanium / gold / silver can make the observation window glass opaque, preventing real-time observation of the vacuum chamber and making the production process uncontrollable, potentially leading to production accidents. For example, the light spot position may deflect, or the film evaporation rate may exceed expectations, causing splashing.

[0004] Currently, traditional observation windows for metal-plated semiconductor films typically consist of a circular metal baffle positioned within a vacuum chamber. The baffle's position is adjusted incrementally from outside the vacuum chamber via a shaft connection. Once the exposed observation window is coated with an opaque material, the metal baffle is rotated to the next position, allowing for continued observation. However, vacuum sealing rings must be installed on both sides of the connecting shaft. These rings are prone to leakage under high temperature or high vacuum conditions, leading to a decrease in vacuum performance. This is especially problematic when the shaft rotates frequently, significantly reducing its lifespan. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides an observation window and observation method for metal-plated semiconductor films, solving the problem that traditional observation windows for metal-plated semiconductor films are prone to air leakage in high-temperature or high-vacuum environments, leading to a decrease in vacuum performance, especially when the shaft needs to rotate frequently, resulting in a significantly reduced service life.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an observation window for metallized semiconductor films, comprising an observation window frame, an observation window cover mounted on one side of the observation window frame, an observation window glass mounted inside the observation window frame, a mounting frame fixedly connected to one side of the observation window frame, a driving structure fixedly disposed inside the mounting frame, a first take-up roller rotatably connected to one side of the mounting frame, a flexible baffle fixedly connected to one side of the outer wall of the first take-up roller, a connecting plate fixedly connected to the bottom of the flexible baffle, connecting ropes evenly fixedly connected to the bottom of the connecting plate, a cleaning structure disposed on the side of the connecting plate near the observation window glass, connecting structures symmetrically disposed on the outer wall of the first take-up roller, a second take-up roller disposed on one side of the connecting structure, the second take-up roller rotatably connected to the other side of the mounting frame, and one end of the connecting rope fixedly connected to one side of the outer wall of the second take-up roller.

[0007] By adopting the above technical solution, the observation window glass is securely installed and sealed using the observation window frame, observation window cover, and observation window sealing ring, preventing gas leakage and the entry of external impurities in the vacuum chamber. The drive structure within the mounting frame drives the first winding roller to rotate, and the connecting structure enables the second winding roller to rotate synchronously, achieving coordinated winding and unwinding of the flexible baffle and connecting rope. During coating, the observation window glass is shielded to prevent contaminant adhesion, and the shielding is removed during observation. Simultaneously, the cleaning structure moves with the connecting plate to clean the observation window glass. Without interrupting the coating process, the observation window glass is effectively protected, ensuring clear observation and improving the cleanliness and service life of the observation window. This solves the problem that traditional observation windows for metal-coated semiconductor films are prone to air leakage in high-temperature or high-vacuum environments, leading to a decrease in vacuum performance, especially when the shaft needs to rotate frequently, resulting in a significantly reduced service life.

[0008] Preferably, the mounting frame has an internal cavity, the inner wall of the mounting frame has symmetrically formed sliding grooves, and the observation window glass has an observation window sealing ring installed on the side away from the observation window cover.

[0009] Preferably, the flexible baffle can be wound up by a first take-up roller, and the flexible baffle is one of stainless steel foil, molybdenum foil, tungsten foil, polyimide film, and zirconium oxide fiber cloth.

[0010] Preferably, the connecting rope can be wound by a second take-up roller, and the connecting rope is one of stainless steel wire rope, shape memory alloy wire rope, tungsten wire rope, molybdenum wire rope, and polytetrafluoroethylene fiber rope.

[0011] Preferably, the drive structure includes a vacuum motor, one side of which is fixedly disposed inside the mounting frame. A worm gear is fixedly connected to the output end of the vacuum motor. One end of the worm gear is rotatably connected to one side of the inner wall of the mounting frame. A worm wheel is meshed with the tooth end of the worm gear. The middle part of the worm wheel is fixedly connected to one side of the outer wall of the first take-up roller.

[0012] Preferably, the drive structure further includes an electromagnetic coil, the top of which is mounted inside the mounting frame, and a magnetic stator is mounted inside the electromagnetic coil, with the middle part of the magnetic stator mounted on one side of the outer wall of the first take-up roller.

[0013] Preferably, the cleaning structure includes a cleaning brush, one side of which is disposed on the side of the connecting plate near the observation window glass, and both ends of the connecting plate are fixedly connected to sliders, the two ends of which are slidably connected in the grooves of the mounting frame.

[0014] Preferably, the connection structure includes two first sprockets, which are symmetrically fixedly connected to the outer wall of the first take-up roller, and the tooth ends of the first sprockets are provided with chains.

[0015] Preferably, a second sprocket is provided on one side of the chain, and the middle part of the second sprocket is fixedly connected to the outer wall of the second take-up roller.

[0016] A method for observing a metallized semiconductor film observation window, applied to the aforementioned metallized semiconductor film observation window, includes the following steps:

[0017] S1. In use, the observation window is installed on one side of the vacuum coating chamber or equipment through the observation window frame. The operation of the drive structure drives the first take-up roller to rotate forward or backward, thereby causing the first sprocket to rotate.

[0018] S2. The chain drives the second sprocket and the second take-up roller to rotate synchronously with the first take-up roller, so that the flexible baffle is wound up by the first take-up roller and the connecting rope is driven to unfold, or the connecting rope is wound up and the flexible baffle is driven to unfold.

[0019] S3. During the coating process, the flexible baffle is unfolded and the connecting rope is rolled up to block the observation window glass. When observation is needed, the connecting rope is unfolded and the flexible baffle is rolled up so that the flexible baffle no longer blocks the observation window glass, allowing observation to be made through the observation window glass.

[0020] S4. When the connecting plate is driven by the flexible baffle and the connecting rope, it drives the cleaning brush to move up and down, so that the cleaning brush cleans the observation window glass, and the mounting frame limits each piece of equipment and structure on the observation window frame, so that they are all located in the coating chamber or inside the equipment.

[0021] Working Principle: In use, the observation window is installed on one side of the vacuum coating chamber or equipment via the observation window frame. The observation window glass is confined inside the observation window frame by the observation window cover. The vacuum motor drives the worm gear to rotate forward or reverse, causing the worm wheel and the first take-up roller to rotate forward or reverse. Alternatively, by energizing the electromagnetic coil, it drives the magnetic stator to rotate inside. Adjusting the current flow adjusts the rotation of the magnetic stator, causing the first take-up roller to rotate forward or reverse, which in turn rotates the first sprocket. The chain drives the second sprocket and the second take-up roller to rotate synchronously with the first take-up roller. This causes the flexible baffle to be wound up by the first take-up roller, and the connecting rope to be unwound, or vice versa. Thus, during coating, the flexible baffle is... The baffle unfolds and the connecting rope retracts, allowing the flexible baffle to shield the observation window glass. This prevents contaminants such as metal, semiconductor particles, and vapor generated during the coating process from adhering to the surface of the glass, thus avoiding a decrease in light transmittance and affecting the observation effect. When observation is needed, the connecting rope unfolds and the flexible baffle retracts, removing the baffle from the observation window glass and allowing observation through it. As the connecting plate is moved by the flexible baffle and connecting rope, it drives the cleaning brush to move up and down, cleaning the observation window glass and improving its cleanliness and lifespan. The mounting frame is then fixed to the observation window frame, confining all equipment and structures within the coating chamber or equipment area, further extending the lifespan of the observation window.

[0022] This invention provides an observation window and observation method for depositing metal semiconductor films. It has the following beneficial effects:

[0023] 1. This invention uses an observation window frame for installation. The mounting frame confines various devices and structures to the observation window frame, placing them all within the coating chamber or equipment. Observation of the coating chamber or equipment is achieved through the observation window glass. A drive structure rotates two winding rollers, causing the flexible baffle or connecting rope to wind up and unwind, facilitating observation. This eliminates physical contact with the observation window and eliminates the need for sealing rings, preventing disruption of the vacuum environment and reducing the risk of external impurities entering. This allows for protection of the observation window glass without interrupting the coating process, improving the cleanliness and lifespan of the observation window.

[0024] 2. This invention drives the first take-up roller to rotate through a driving structure, and enables the second take-up roller to rotate synchronously through a connecting structure, thereby achieving the coordinated unfolding and retraction of the flexible baffle and the connecting rope. During the coating process, the flexible baffle unfolds to cover the observation window glass, preventing the adhesion of contaminants such as metal, semiconductor particles and vapor. When observation is required, the flexible baffle is rolled up to ensure a clear field of view, allowing operators to keep track of the situation inside the coating room at any time.

[0025] 3. This invention allows for real-time cleaning of the observation window glass by moving the cleaning structure along with the connecting plate. This reduces the damage to the glass caused by the accumulation of contaminants, improves the cleanliness of the observation window, and indirectly extends its service life. It also avoids the damage to the vacuum environment and the introduction of external impurities caused by frequent disassembly and cleaning of traditional observation windows. This reduces damage to the observation window and related sealing components, further extending the overall service life of the observation window. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural schematic diagram of an observation window for a metal-plated semiconductor film proposed in this invention;

[0027] Figure 2 This is a partial structural diagram of the flexible baffle after the winding of the connecting rope of the observation window for a metal-plated semiconductor film proposed in this invention.

[0028] Figure 3 This is a schematic diagram of the internal structure of the mounting frame after the winding of the connecting rope for the observation window of a metal-plated semiconductor film proposed in this invention.

[0029] Figure 4 This is a partial structural diagram of the connecting rope of the observation window for a metallized semiconductor film proposed in this invention after it has been wound up.

[0030] Figure 5 This is a partial structural diagram of the observation window glass after the flexible baffle of the observation window for a metal-coated semiconductor film proposed in this invention is rolled up.

[0031] Figure 6 This is a partial structural diagram of the mounting frame after the flexible baffle of the observation window for a metal-plated semiconductor film proposed in this invention is rolled up.

[0032] Figure 7 This is a partial structural diagram of the flexible baffle of the observation window for a metal-plated semiconductor film proposed in this invention after being rolled up.

[0033] Figure 8 This is a partial structural diagram of the electromagnetic coil for an observation window for a metal-plated semiconductor film proposed in this invention.

[0034] Figure 9 This is a flowchart of an observation method for an observation window used in the present invention for a metallized semiconductor film.

[0035] The components include: 1. Observation window frame; 2. Observation window glass; 3. Observation window cover; 4. Mounting frame; 5. Flexible baffle; 6. Cavity; 7. Connecting plate; 8. Connecting rope; 9. Chain; 10. Slider; 11. First winding roller; 12. First sprocket; 13. Second winding roller; 14. Vacuum motor; 15. Worm gear; 16. Worm wheel; 17. Cleaning brush; 18. Second sprocket; 19. Observation window sealing ring; 20. Slide groove; 21. Electromagnetic coil; 22. Magnetic stator. Detailed Implementation

[0036] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] Please see the appendix Figure 1 - Appendix Figure 7 This invention provides an observation window for metallized semiconductor films, including an observation window frame 1, an observation window cover 3 installed on one side of the observation window frame 1, an observation window glass 2 installed inside the observation window frame 1, a mounting frame 4 fixedly connected to one side of the observation window frame 1, a driving structure fixedly installed inside the mounting frame 4, a first take-up roller 11 rotatably connected to one side of the mounting frame 4, a flexible baffle 5 fixedly connected to one side of the outer wall of the first take-up roller 11, a connecting plate 7 fixedly connected to the bottom of the flexible baffle 5, connecting ropes 8 evenly fixedly connected to the bottom of the connecting plate 7, a cleaning structure provided on the side of the connecting plate 7 near the observation window glass 2, a connecting structure symmetrically provided on the outer wall of the first take-up roller 11, a second take-up roller 13 provided on one side of the connecting structure, the second take-up roller 13 rotatably connected to the other side of the mounting frame 4, and one end of the connecting rope 8 fixedly connected to one side of the outer wall of the second take-up roller 13.

[0038] Specifically, the observation window is installed on one side of the vacuum coating chamber or equipment via the observation window frame 1. The observation window cover 3 limits the observation window glass 2 inside the observation window frame 1. The installation of the observation window glass 2 facilitates observation inside the coating chamber or equipment. The operation of the drive structure drives the first winding roller 11 to rotate forward or backward on one side of the mounting frame 4, thereby winding or unfolding the flexible baffle 5 and driving the cleaning structure to move and clean the observation window glass 2 on the observation window frame 1.

[0039] The first take-up roller 11 and the second take-up roller 13 are connected by a connecting structure. When the first take-up roller 11 rotates, it synchronously drives the second take-up roller 13 to rotate forward or backward on the other side of the mounting frame 4. The flexible baffle 5 is connected to the connecting rope 8 through the connecting plate 7. Thus, the flexible baffle 5 can be wound up by the first take-up roller 11 and the connecting rope 8 can be driven to unfold, or the connecting rope 8 can be wound up and the flexible baffle 5 can be driven to unfold. Thus, during the coating process, by unfolding the flexible baffle 5 and winding up the connecting rope 8, the flexible baffle 5 can block the observation window glass 2, preventing contaminants such as metal, semiconductor particles, and vapor generated during the coating process from adhering to the surface of the observation window glass 2, avoiding a decrease in glass transmittance that affects the observation effect, and preventing the accumulation of contaminants that affects the stability of the coating process. When observation is needed, the connecting rope 8 can be unfolded and the flexible baffle 5 can be wound up, so that the flexible baffle 5 no longer blocks the observation window glass 2, and observation can be made through the observation window glass 2.

[0040] The device is fixed to the observation window frame 1 via the mounting frame 4, thereby confining all equipment and structures within the observation window frame 1 and placing them inside the coating chamber or equipment. This avoids the vacuum environment damage caused by frequent disassembly and cleaning of the observation window in traditional structures, reduces the risk of external impurities entering, and achieves efficient protection of the observation window glass without interrupting the coating process, ensuring clear and continuous observation. At the same time, by integrating a cleaning function, the cleanliness and service life of the observation window are further improved. This solves the problem that traditional observation windows for metal-plated semiconductor films are prone to air leakage in high-temperature or high-vacuum environments, which reduces vacuum performance, especially when the shaft needs to rotate frequently, resulting in a significantly reduced service life.

[0041] Please see the appendix Figure 2 Appendix Figure 3 Appendix Figure 5 Appendix Figure 6 The mounting frame 4 has a cavity 6 inside, and the inner wall of the mounting frame 4 has symmetrical grooves 20. The observation window glass 2 is equipped with an observation window sealing ring 19 on the side away from the observation window cover 3.

[0042] Specifically, the cavity 6 inside the mounting frame 4 provides space for the installation of various components. The sliding groove 20 allows the connecting plate 7 to slide inside the mounting frame 4 via the slider 10. The observation window sealing ring 19 seals the observation window glass 2, preventing gas leakage from the vacuum chamber and avoiding the entry of external air, dust, and other impurities into the vacuum coating chamber. This ensures a high vacuum and cleanliness of the coating environment and prevents high-temperature gases and steam generated during the coating process from corroding the gap between the observation window frame and the glass, ensuring the reliability of the sealing structure under long-term high-temperature and high-vacuum conditions.

[0043] Please see the appendix Figure 2 - Appendix Figure 7 The flexible baffle 5 can be wound by the first take-up roller 11. The flexible baffle 5 is one of stainless steel foil, molybdenum foil, tungsten foil, polyimide film, and zirconium oxide fiber cloth. The connecting rope 8 can be wound by the second take-up roller 13. The connecting rope 8 is one of stainless steel wire rope, shape memory alloy wire rope, tungsten wire rope, molybdenum wire rope, and polytetrafluoroethylene fiber rope.

[0044] Specifically, the flexible baffle 5 can be wound up by the first take-up roller 11, allowing for flexible adjustment of the obstruction state of the observation window glass 2 according to different stages of the coating process. When stainless steel foil is used for the flexible baffle 5, its thickness is generally between 0.05-0.2mm. During installation, one end of the stainless steel foil is firmly fixed to the first take-up roller 11, which can be done by welding or high-strength adhesive. During the coating process, when it is necessary to obstruct the observation window glass 2, the drive structure drives the first take-up roller 11 to reverse. The stainless steel foil, due to its flexibility and strength, unfolds smoothly under tension and covers the observation window glass 2. Because the stainless steel foil has good sputtering resistance, it can effectively block metal particles and high-temperature steam generated during the coating process, preventing them from adhering to the observation window glass 2. When it is necessary to observe the situation inside the coated room, the first take-up roller 11 is driven to rotate forward, and the stainless steel foil is evenly wound onto the first take-up roller 11. During the winding process, anti-slip textures can be provided on the surface of the first take-up roller 11 to prevent the stainless steel foil from slipping during winding.

[0045] When molybdenum foil is used as the flexible baffle 5, its thickness is typically 0.02-0.1 mm. Due to its excellent high-temperature resistance, it is suitable for high-temperature coating processes. Similarly, one end of the molybdenum foil is fixed to the first winding roller 11, allowing it to maintain stable physical properties even at high temperatures. During unfolding, because the molybdenum foil is relatively hard, guide rollers can be installed within the mounting frame 4 to guide its smooth unfolding. During winding, constant tension control technology can be used to prevent wrinkles and ensure uniform winding force. Simultaneously, the edges of the molybdenum foil require special treatment, such as laser cutting and rounding, to prevent sharp edges from cutting themselves or other components during winding.

[0046] Tungsten foil typically has a thickness between 0.02 and 0.1 mm and exhibits extremely high temperature resistance. During implementation, the tungsten foil is fixed to the first take-up roller 11. In ultra-high temperature coating environments, the tungsten foil effectively resists high temperatures and sputtering. To ensure the stability of the tungsten foil during winding and unwinding, multiple support rollers can be installed within the mounting frame 4 to reduce the span of the tungsten foil and decrease its sag under gravity. Furthermore, due to the high hardness of the tungsten foil, the design of the first take-up roller 11 must ensure a sufficiently large diameter to reduce bending stress on the tungsten foil and extend its service life.

[0047] The polyimide film has a thickness between 12.5 and 50 μm, is soft in texture, and possesses good temperature resistance and low gas exudation. One end of the polyimide film is fixed to the first winding roller 11, allowing it to be easily unwound and wound up during the coating process. To prevent the polyimide film from being affected by the adsorption of metal particles during long-term use, a nano-scale silica anti-stick coating can be applied to its surface. During winding, due to the thinness of the film, a tension sensor can be used to monitor the tension in real time to prevent excessive tension from causing the film to break.

[0048] The zirconia fiber cloth has a thickness of 0.3-0.5 mm, is resistant to high temperatures and molten metal sputtering. One end is fixed to the first take-up roller 11, and during unwinding, its good flexibility allows it to naturally cover the observation window glass 2. To enhance its thermal shock resistance, a nano-alumina coating can be applied to the surface. During the winding process, due to the elasticity of the fiber cloth, an elastic pressure roller can be installed on the first take-up roller 11 to ensure that the fiber cloth adheres tightly to the roller and prevents it from loosening.

[0049] The connecting rope 8 can be wound up by the second take-up roller 13, thus achieving coordinated movement with the flexible baffle 5. During the coating process, it works in conjunction with the flexible baffle 5 to precisely control the obstruction and exposure state of the observation window. When the flexible baffle 5 unfolds to obstruct the observation window glass 2, the second take-up roller 13 simultaneously winds up the connecting rope 8, ensuring that the connecting rope 8 is taut and providing stable tensile support for the flexible baffle 5, allowing it to flatly cover the observation window and preventing incomplete obstruction due to slack. This effectively resists contaminants such as metal / semiconductor particles and high-temperature steam generated during the coating process. When observation is required, the first take-up roller 11 takes up the flexible baffle 5, while the second take-up roller 13 simultaneously unfolds the connecting rope 8, releasing the tension of the flexible baffle 5. This ensures that the flexible baffle 5 can be smoothly and evenly wound onto the first take-up roller 11, and that the connecting rope 8 will not become tangled or knotted during unfolding. This ensures that the observation window quickly restores a clear field of vision. At the same time, by precisely controlling the speed and tension of the winding and unfolding of the connecting rope 8, the operational stability and reliability of the entire observation window system can be further optimized, reducing the risk of failure caused by uncoordinated movement of components.

[0050] When stainless steel wire rope (such as 316L, 7×7 strands) is used for the connecting rope 8, its diameter is generally between 0.5-1mm. One end of the stainless steel wire rope is fixed to the second winding roller 13, and a secure connection can be ensured by crimping stainless steel terminals. During the synchronous rotation of the first winding roller 11 and the second winding roller 13, the stainless steel wire rope, due to its high strength and corrosion resistance, can stably wind and unwind. To prevent damage to the stainless steel wire rope from friction with other components during operation, a smooth guide pulley can be installed inside the mounting frame 4 to change its running direction.

[0051] The shape memory alloy wire rope (such as nickel-titanium alloy) has a diameter between 0.3-0.6 mm. One end is fixed to the second take-up roller 13. Under normal operating conditions, it can be wound and unwound like a regular rope. In special circumstances, such as power outages or abnormal temperatures, its shape memory effect can be activated by heating, causing it to automatically tighten or return to a preset shape, ensuring the stability of the entire device. During installation, a threaded structure can be provided on the second take-up roller 13 to facilitate fine-tuning of the tension of the shape memory alloy wire rope.

[0052] The tungsten wire rope has a diameter between 0.2-0.8 mm and exhibits excellent high-temperature resistance. With one end fixed to the second winding roller 13, it maintains good strength and stability even in high-temperature coating environments. To prevent wire breakage during long-term use, the tungsten wire rope can be inspected regularly, using visual monitoring or a tension sensor for early warning. During winding, a gradual winding method can be employed to prevent the tungsten wire rope from breaking due to sudden excessive stress.

[0053] The molybdenum wire rope has a diameter between 0.2-0.8 mm and also features high temperature resistance and a low coefficient of linear expansion. The molybdenum wire rope is fixed to the second winding roller 13. During winding and unwinding, due to the relatively hard nature of the molybdenum wire rope, a buffer device can be installed within the mounting frame 4 to reduce collisions with other components. Simultaneously, to improve the wear resistance of the molybdenum wire rope, its surface can be chemically nickel-plated.

[0054] The PTFE fiber rope, with a diameter between 0.8-1.5 mm, possesses advantages such as corrosion resistance and a low coefficient of friction. One end is fixed to the second take-up roller 13; during operation, its smooth surface facilitates smooth winding and unwinding. To prevent fiber fraying, both ends can be heat-sintered into a spherical shape. The guide pulleys within the mounting frame 4 can have a smooth ceramic surface to further reduce frictional resistance.

[0055] Please see the appendix Figure 3 Appendix Figure 4 Appendix Figure 7 The drive structure includes a vacuum motor 14, one side of which is fixedly mounted inside the mounting frame 4. A worm gear 15 is fixedly connected to the output end of the vacuum motor 14, and one end of the worm gear 15 is rotatably connected to the inner wall of the mounting frame 4. A worm wheel 16 is meshed with the tooth end of the worm gear 15, and the middle part of the worm wheel 16 is fixedly connected to the outer wall of the first take-up roller 11.

[0056] Specifically, by fixing the vacuum motor 14 to the mounting frame 4, the vacuum motor 14 is mounted on the mounting frame 4. The operation of the vacuum motor 14 drives the worm gear 15 to rotate, which in turn drives the worm wheel 16 to rotate, thereby causing the first take-up roller 11 to rotate on one side of the mounting frame 4. Thus, the operation of the vacuum motor 14 drives the first take-up roller 11 to rotate forward or backward.

[0057] Please see the appendix Figure 8 The drive structure also includes an electromagnetic coil 21, the top of which is installed inside the mounting frame 4, and a magnetic stator 22 is installed inside the electromagnetic coil 21. The middle part of the magnetic stator 22 is installed on one side of the outer wall of the first take-up roller 11.

[0058] Specifically, by energizing the electromagnetic coil 21, the magnetic stator 22 is driven to rotate inside it, thereby causing the first take-up roller 11 to rotate inside the mounting frame 4. By adjusting the current flow direction, the magnetic stator 22 is adjusted to rotate forward or backward, thereby causing the first take-up roller 11 to rotate forward or backward.

[0059] Please see the appendix Figure 4 Appendix Figure 6 Appendix Figure 7 The cleaning structure includes a cleaning brush 17, one side of which is located on the side of the connecting plate 7 near the observation window glass 2. Both ends of the connecting plate 7 are fixedly connected to sliders 10, and both ends of the sliders 10 are slidably connected in the grooves 20 of the mounting frame 4.

[0060] Specifically, the cleaning brush 17 is installed via the connecting plate 7. When the connecting plate 7 is driven by the flexible baffle 5 and the connecting rope 8, it drives the cleaning brush 17 to move up and down, thereby cleaning the observation window glass 2 and improving the cleanliness and service life of the observation window. When the connecting plate 7 is driven, it is fixed to the slider 10, which synchronously drives the slider 10 to slide in the groove 20 of the mounting frame 4, thereby enhancing the stability of the movement of the connecting plate 7.

[0061] Please see the appendix Figure 2 - Appendix Figure 7 The connecting structure includes two first sprockets 12, which are symmetrically fixedly connected to the outer wall of the first take-up roller 11. The tooth ends of the first sprockets 12 are provided with chains 9. A second sprocket 18 is provided on one side of the chain 9, and the middle part of the second sprocket 18 is fixedly connected to the outer wall of the second take-up roller 13.

[0062] Specifically, by fixing the first sprocket 12 to the first take-up roller 11, when the first take-up roller 11 rotates, it drives the first sprocket 12 to rotate. Thus, through the setting of the chain 9, the second sprocket 18 is driven to rotate synchronously, thereby causing the second take-up roller 13 to rotate synchronously with the first take-up roller 11. Thus, when the first take-up roller 11 rotates, it synchronously drives the second take-up roller 13 to rotate forward or backward on the other side of the mounting frame 4.

[0063] A method for observing a metallized semiconductor film observation window, applied to the aforementioned metallized semiconductor film observation window, includes the following steps:

[0064] S1. In use, the observation window is installed on one side of the vacuum coating chamber or equipment through the observation window frame 1. The operation of the drive structure drives the first take-up roller 11 to rotate forward or reverse, thereby causing the first sprocket 12 to rotate.

[0065] S2. The chain 9 drives the second sprocket 18 and the second take-up roller 13 to rotate synchronously with the first take-up roller 11, so that the flexible baffle 5 is wound up by the first take-up roller 11 and the connecting rope 8 is driven to unfold, or the connecting rope 8 is wound up and the flexible baffle 5 is driven to unfold.

[0066] S3. When coating, the flexible baffle 5 is unfolded and the connecting rope 8 is rolled up so that the flexible baffle 5 blocks the observation window glass 2. When observation is needed, the connecting rope 8 is unfolded and the flexible baffle 5 is rolled up so that the flexible baffle 5 no longer blocks the observation window glass 2, so that observation can be made through the observation window glass 2.

[0067] S4. When the connecting plate 7 is driven by the flexible baffle 5 and the connecting rope 8, it drives the cleaning brush 17 to move up and down, so that the cleaning brush 17 cleans the observation window glass 2, and the mounting frame 4 limits each piece of equipment and structure to the observation window frame 1, so that they are all located in the coating chamber or inside the equipment.

[0068] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An observation window for depositing a metal semiconductor film, comprising an observation window frame (1), characterized in that: An observation window cover (3) is installed on one side of the observation window frame (1). An observation window glass (2) is installed inside the observation window frame (1). An installation frame (4) is fixedly connected to one side of the observation window frame (1). A driving structure is fixedly installed inside the installation frame (4). A first take-up roller (11) is rotatably connected to one side of the installation frame (4). A flexible baffle (5) is fixedly connected to one side of the outer wall of the first take-up roller (11). A connecting plate (7) is fixedly connected to the bottom of the flexible baffle (5). A connecting rope (8) is evenly fixedly connected to the bottom of the connecting plate (7). A cleaning structure is provided on the side of the connecting plate (7) near the observation window glass (2). A connecting structure is symmetrically provided on the outer wall of the first take-up roller (11). A second take-up roller (13) is provided on one side of the connecting structure. The second take-up roller (13) is rotatably connected to the other side of the installation frame (4). One end of the connecting rope (8) is fixedly connected to one side of the outer wall of the second take-up roller (13).

2. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The mounting frame (4) has a cavity (6) inside, and the inner wall of the mounting frame (4) has symmetrical grooves (20). The observation window glass (2) is equipped with an observation window sealing ring (19) on the side away from the observation window cover (3).

3. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The flexible baffle (5) can be wound up by the first take-up roller (11), and the flexible baffle (5) is one of stainless steel foil, molybdenum foil, tungsten foil, polyimide film, and zirconium oxide fiber cloth.

4. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The connecting rope (8) can be wound up by the second winding roller (13), and the connecting rope (8) is one of stainless steel wire rope, shape memory alloy wire rope, tungsten wire rope, molybdenum wire rope, and polytetrafluoroethylene fiber rope.

5. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The drive structure includes a vacuum motor (14), one side of which is fixedly installed inside the mounting frame (4). The output end of the vacuum motor (14) is fixedly connected to a worm (15). One end of the worm (15) is rotatably connected to one side of the inner wall of the mounting frame (4). The tooth end of the worm (15) is meshed with a worm wheel (16). The middle part of the worm wheel (16) is fixedly connected to one side of the outer wall of the first take-up roller (11).

6. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The drive structure also includes an electromagnetic coil (21), the top of which is installed inside the mounting frame (4), and a magnetic stator (22) is installed inside the electromagnetic coil (21), with the middle part of the magnetic stator (22) installed on one side of the outer wall of the first take-up roller (11).

7. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The cleaning structure includes a cleaning brush (17), one side of which is located on the side of the connecting plate (7) near the observation window glass (2). Both ends of the connecting plate (7) are fixedly connected to sliders (10), and both ends of the sliders (10) are slidably connected in the grooves (20) of the mounting frame (4).

8. The observation window for a metallized semiconductor film according to claim 1, characterized in that: The connection structure includes two first sprockets (12), which are symmetrically fixed to the outer wall of the first take-up roller (11), and the tooth ends of the first sprockets (12) are provided with chains (9).

9. The observation window for a metallized semiconductor film according to claim 8, characterized in that: A second sprocket (18) is provided on one side of the chain (9), and the middle part of the second sprocket (18) is fixedly connected to the outer wall of the second take-up roller (13).

10. A method for observing a metallized semiconductor film through an observation window, characterized in that: An observation window for a metal-plated semiconductor film as described in any one of claims 1-9 comprises the following steps: S1. In use, the observation window is installed on one side of the vacuum coating chamber or equipment through the observation window frame (1). The first take-up roller (11) is driven to rotate forward or backward through the operation of the drive structure, thereby causing the first sprocket (12) to rotate. S2. The chain (9) drives the second sprocket (18) and the second take-up roller (13) to rotate synchronously with the first take-up roller (11), so that the flexible baffle (5) is wound up by the first take-up roller (11) and the connecting rope (8) is driven to unfold, or the connecting rope (8) is wound up and the flexible baffle (5) is driven to unfold. S3. When coating, unfold the flexible baffle (5) and roll up the connecting rope (8) so that the flexible baffle (5) blocks the observation window glass (2). When observation is required, unfold the connecting rope (8) and roll up the flexible baffle (5) so that the flexible baffle (5) no longer blocks the observation window glass (2) so that observation can be made through the observation window glass (2). S4. When the connecting plate (7) is driven by the flexible baffle (5) and the connecting rope (8), it drives the cleaning brush (17) to move up and down, so that the cleaning brush (17) cleans the observation window glass (2), and the mounting frame (4) limits each device and structure to the observation window frame (1), so that they are all located in the coating chamber or inside the equipment.

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