Light source device

Abstract

A light source device according to one embodiment of the present invention is a light source device for generating wavelength scanning light, and is provided with a pulse light source, a pulse expander, and an air blowing device. The pulsed light source generates pulsed light including a continuous spectrum. The pulse expander is configured so as to extend the pulsed light on a time axis and generate the wavelength-scanned light. The air supply device supplies air to the pulse expander. As a result, it is possible to suppress temperature changes in the pulse expander and to stably output wavelength-scanned light.

Description

Technical Field

[0001] This invention relates to a light source device. Background Technology

[0002] Spectroscopic analysis is widely used in the compositional analysis and inspection of objects. In spectroscopic analysis, the object is illuminated with light, and the spectrum of the object's light obtained from the illumination is measured. Furthermore, optical properties such as reflection characteristics (wavelength dependence) or transmission characteristics can be obtained based on the relationship between the spectrum of the object's light and the spectrum of the illuminating light.

[0003] As one method for measuring optical properties, wavelength scanning spectrometry is known. In a wavelength scanning spectrometer, wavelength scanning light that varies with time is generated and irradiated onto the object being inspected. The wavelength scanning light is a pulse or pulse train with a one-to-one relationship between time and wavelength. The time waveform of the light obtained by irradiating the object with wavelength scanning light is detected by a photodetector. The output waveform of the photodetector represents the spectrum corresponding to the time axis and wavelength.

[0004] Wavelength scanning type spectrophotometers are disclosed in Patent Documents 1 and 2.

[0005] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2020-159971 Patent Document 2: Japanese Patent Application Publication No. 2020-159973 Summary of the Invention

[0006] The technical problem that the invention aims to solve In wavelength scanning spectrophotometers, it is important to stably output wavelength scanning light.

[0007] In view of the above, the object of the present invention is to provide a light source device capable of stably outputting wavelength scanning light.

[0008] Means for solving technical problems To achieve the above objectives, one aspect of the light source device of the present invention is a light source device for generating wavelength scanning light, comprising a pulse light source, a pulse expander, and an air supply device.

[0009] The pulsed light source generates pulsed light containing a continuous spectrum.

[0010] The pulse expander is configured to elongate the pulse light along the time axis to generate the wavelength scanning light.

[0011] The air supply device supplies air to the pulse expander.

[0012] In this light source device, air is supplied to the pulse expander via an air supply device. This suppresses temperature variations in the pulse expander and enables stable output of wavelength scanning light.

[0013] Alternatively, the light source device may also include a housing portion having an inlet for air to flow in and an outlet for air to flow out, housing the pulse expander within an internal space. In this case, the air supply device may also supply air to the internal space via the inlet.

[0014] The housing portion may also house the pulsed light source within the internal space.

[0015] Alternatively, the pulse expander may be positioned upstream of the pulse light source relative to the flow path of the air flowing in from the inlet.

[0016] The internal space of the housing may have a multi-layered structure consisting of multiple levels. In this case, the pulse light source and the pulse expander may be respectively disposed in any one of the multiple levels.

[0017] Alternatively, the air supply device may supply air to the level where the pulse expander is configured.

[0018] Alternatively, the pulsed light source and the pulse expander may be configured in different layers of the plurality of layers.

[0019] Alternatively, the layer containing the pulsed light source and the layer containing the pulse expander may be spatially continuous. In this case, the air supply device may supply air to either the layer containing the pulse expander or the layer containing the pulsed light source.

[0020] The multi-layer structure can also be a structure in which multiple layers are stacked along the height direction of the light source device.

[0021] The inlet is positioned higher than the outlet in the height direction of the light source device.

[0022] The housing portion may also have an uppermost surface forming the topmost layer of the canopy at the highest position among the multiple layers. In this case, the inlet may also be formed on the uppermost surface. Alternatively, the air supply device may supply air downwards in the vertical direction via the inlet.

[0023] The air supply device may also be configured on the uppermost surface.

[0024] The pulse expander can also be configured on the topmost layer. In this case, the pulse light source can also be configured on the next level below the topmost layer. Alternatively, the topmost layer and the next level below it can be spatially continuous.

[0025] The light source device may also include an air conditioner that generates temperature-regulated control air. In this case, the air supply device may also supply the control air to the pulse expander.

[0026] The internal space of the housing may have a multi-layered structure consisting of multiple levels. In this case, the pulse light source, the pulse expander, and the air conditioner may be respectively disposed in different levels of the multiple levels.

[0027] The multi-layered structure can also be a structure in which multiple layers are stacked along the height direction of the light source device. In this case, the air conditioner can also be positioned at a lower level than the pulsed light source and the pulse expander in the height direction of the light source device.

[0028] The air conditioner may also have a temperature sensor located near the inlet.

[0029] The temperature sensor is positioned closer to the pulse expander than the pulse light source.

[0030] The internal space of the shell portion can also be configured as a heat-insulating space.

[0031] The air supply device can also supply a mixture of air flowing from the outlet and control air to the pulse expander.

[0032] The air volume of the air supply device can be greater than that of the air conditioner.

[0033] Alternatively, the air discharged from the pulse light source may be discharged to the outside of the housing without passing through the layer configured with the pulse expander.

[0034] The air supply device can also be a fan filter unit.

[0035] The pulse expander may also include: an arrayed waveguide diffraction grating that spatially divides the pulsed light emitted from the pulsed light source into multiple beams according to wavelength; and multiple optical fibers corresponding to the multiple beams, with different optical path lengths.

[0036] Furthermore, solutions that arbitrarily combine the above-mentioned constituent elements, or solutions that interchange the constituent elements or are manifested in methods, apparatus, systems, etc., are also valid as solutions of this invention or this disclosure. Moreover, since the description of this item (means for solving the problem) does not describe all the essential features of this invention, sub-combinations of these described features can also constitute this invention.

[0037] Invention Effects As described above, according to the present invention, wavelength scanning light can be stably output. Furthermore, the effects described herein are not necessarily limiting and may include any effects described in this disclosure. Attached Figure Description

[0038] Figure 1 This is a schematic diagram illustrating the general structure of a wavelength scanning spectrophotometer.

[0039] Figure 2 This is a schematic diagram showing a specific structural example of a spectrophotometer.

[0040] Figure 3 It is a diagram representing the wavelength of scanned light.

[0041] Figure 4 It is used for explanation Figure 2 The diagram shows a spectrophotometer.

[0042] Figure 5 This is a block diagram illustrating a basic structural example of a light source device in one embodiment.

[0043] Figure 6 This is a perspective view of the light source device illustrated as structural example 1.

[0044] Figure 7 This is a perspective view of the light source device illustrated as structural example 2.

[0045] Figure 8 This is a perspective view of the light source device illustrated as structural example 3.

[0046] Figure 9 This is a perspective view of the light source device illustrated as structural example 4.

[0047] Figure 10 This is a perspective view of the light source device illustrated as structural example 5.

[0048] Figure 11 This is a perspective view of the light source device illustrated as structural example 6. Detailed Implementation

[0049] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0050] [Overview of Wavelength Scanning Spectrophotometer] Figure 1 This is a schematic diagram illustrating the general structure of a wavelength scanning spectrophotometer. Spectrophotometers are sometimes also called spectrometers, spectrophotometers, or spectrophotometer inspection devices.

[0051] Figure 1 The spectrophotometer 1 shown has a light source 2, a spectrophotometer 3, and a processing unit 4.

[0052] Light source device 2 generates wavelength scanning light L1. Wavelength scanning light L1 is guided to beam splitter 3. Irradiation optical system 5 of beam splitter 3 irradiates wavelength scanning light L1 onto sample 6. First photodetector 7 detects light (object light) L2 obtained by irradiating sample 6 with wavelength scanning light L1. Object light L2 can be reflected light or transmitted light from sample 6.

[0053] In the illumination optical system 5, a portion of the wavelength scanning light L1 is branched into a reference light L3. The second photodetector 8 measures the reference light L3.

[0054] The first detection signal S1 generated by the first photodetector 7 and the second detection signal S2 generated by the second photodetector 8 are provided to the arithmetic processing unit 4.

[0055] The object light L2 and the reference light L3 inherit the one-to-one time-wavelength correspondence of the wavelength scanning light L1. Therefore, the time waveform of the first detection signal S1 can be converted into the spectrum of the object light L2 by converting the time axis into wavelength.

[0056] Similarly, the time waveform of the second detection signal S2 can be transformed into the spectrum of the reference light L3 by converting the time axis into wavelength. The processing device 4 calculates, for example, the ratio of the object light L2 to each corresponding wavelength of the reference light L3, and measures the spectroscopic characteristics (reflectivity, transmittance, etc.) of the sample 6.

[0057] [Example of the specific structure of a spectrophotometer] Figure 2 This is a schematic diagram showing a specific configuration example of a spectrophotometer. Figure 2 The spectrophotometer 10 shown includes a light source device 11, an illumination optical system 12, a light receiving device 13, and a processing device 14.

[0058] The light source device 11 generates a wavelength scanning light L1 whose wavelength varies with time. The time and wavelength of the wavelength scanning light L1 are established in a one-to-one correspondence. This is referred to as the wavelength scanning light L1 having "uniqueness of wavelength".

[0059] The light source device 11 includes a pulse light source 15 and a pulse expander 16.

[0060] The pulsed light source 15 emits a broadband pulsed light L1a with a continuous spectrum. The spectrum of the broadband pulsed light L1a is, for example, continuous across a wavelength region of at least 10 nm, preferably 50 nm, and more preferably 100 nm, in the range of 900 nm to 1300 nm. The width of the wavelength region of the broadband pulsed light L1a is only required to cover the wavelength region required for spectral dispersion.

[0061] For example, the pulsed light source 15 may include an ultrashort pulse laser and a nonlinear element. Examples of ultrashort pulse lasers include gain-switched lasers, microchip lasers, fiber lasers, etc.

[0062] Nonlinear elements further extend the spectral width of ultrashort pulses generated by ultrashort pulse lasers through nonlinear phenomena. Optical fibers are preferred as nonlinear elements; for example, photonic crystal fibers or other nonlinear fibers can be used. Single-mode fibers are preferred as the fiber mode, but even multimode fibers can be used as long as they exhibit sufficient nonlinearity.

[0063] The broadband pulsed light L1a output from the nonlinear element has a pulse width in the femtosecond to nanosecond range. Alternatively, other broadband pulsed light sources such as SLD (Superluminescent Diode) light sources can also be used as the pulsed light source 15.

[0064] The pulse expander 16 extends the pulse width of the broadband pulsed light L1a, outputting a wavelength scanning light L1. The pulse expander 16 includes a splitter (wave divider) 17, a delay line 18, and a coupler 19.

[0065] The splitter 17 divides the broadband pulsed light L1a into multiple n (n≥2) beams according to the wavelength. The structure of the splitter 17 is not particularly limited; for example, it can be constructed from an arrayed waveguide diffraction grating (AWG). Alternatively, a wavelength-selective filter can be inserted between the splitter 17 and the pulsed light source 15. This wavelength-selective filter selects the wavelength band used for beam splitting from the spectral components contained in the broadband pulsed light L1a.

[0066] Delay line 18 imparts different delays to light from multiple paths (segmented light). For example, delay line 18 includes multiple optical fibers FB1~FBn with different optical path lengths.

[0067] Assume that the broadband pulsed light L1a before splitting is a positively chirped pulse (up-frequency pulse) whose frequency increases with time (wavelength decreases). In this case, the leading edge of the pulse contains the component with the longest wavelength λ1, and the trailing edge of the pulse contains the component with the shortest wavelength λn.

[0068] Multiple optical fibers FB1 to FBn have different optical path lengths l1 to ln. When λ1 is the longest wavelength and λn is the shortest wavelength, in order to set the wavelength-scanned light L1 to the same positive chirped pulse as the broadband pulsed light L1a, it is sufficient to satisfy the relationship l1 < l2 < … < ln. As an example, in the case of n = 20, the optical path lengths l1 to l20 of the 20 optical fibers FB can also be increased in units of 1 m to 1 m to 20 m.

[0069] The optical fibers FB1 to FBn do not need to have group delay characteristics that are different for each wavelength, and the same optical fiber (optical fiber with the same core / cladding material) can be used. In this sense, the optical fiber FB can use a multimode optical fiber, which is advantageous in terms of being able to prevent unwanted nonlinear optical effects.

[0070] The coupler 19 recouples multiple light beams that have been given different delays by the delay line 18. For example, the coupler 19 can also be an AWG that multiplexes n light beams. Alternatively, as the delay line 18, a bundled optical fiber or a multi-core optical fiber can also be used. The spatially recoupled light is emitted as the wavelength-scanned light L1.

[0071] In the present embodiment, the splitter 17 is configured as an embodiment of the arrayed waveguide grating of the present invention that spatially splits the pulsed light emitted from the pulse light source into multiple light beams according to wavelength. In addition, the multiple optical fibers FB1 to FBn are configured as an embodiment of the multiple optical fibers of the present invention that correspond to the multiple light beams and have different optical path lengths.

[0072] Figure 3 It is a diagram showing the wavelength-scanned light L1. Figure 3 The upper part shows the intensity (time waveform) IWS(t) of the wavelength-scanned light L1, and the lower part shows the time variation of the wavelength λ of the wavelength-scanned light L1.

[0073] In this example, the wavelength-scanned light L1 is a single pulsed light. At the leading edge, the main wavelength is λ1, and at the trailing edge, the main wavelength is λn. Within one pulse, the wavelength varies with time between λ1 and λn. In this example, the wavelength-scanned light L1 is a positive chirped pulse (λ1 > λn) whose frequency increases with time. In other words, the wavelength becomes shorter with time.

[0074] In addition, the wavelength-scanned light L1 can also be a negative chirped pulse (λ1 < λn) whose wavelength becomes longer with time. The wavelength-scanned light L1 can also be a pulse train composed of pulses (light beams) that are isolated in time for each wavelength.

[0075] Return Figure 2 . The irradiation optical system 12 irradiates the specimen 6 with the wavelength-scanned light L1. The irradiation optical system 12 and the light source device 11 can also be fiber-coupled.

[0076] The illumination optical system 12 includes a lens optical system 20, a beam splitter 21, and a reflector 22. The lens optical system 20 focuses the wavelength scanning light L1 onto the surface (sample surface) of the sample 6 with an appropriate beam size.

[0077] Beam splitter 21 directs a portion of the wavelength scanning light L1 toward the sample 6. Additionally, beam splitter 21 extracts a portion of the wavelength scanning light L1 as reference light L3. Reflector 22 directs the reference light L3 toward the light-receiving device 13.

[0078] The light-receiving device 13 includes a first light receiver 23, a second light receiver 24, and an A / D converter 25 and 26. The first light receiver 23 detects the object light L2 obtained by irradiating the sample 6 with wavelength scanning light L1. The object light L2 can be reflected light or transmitted light.

[0079] A / D converter 25 converts the output signal S1 of the first light receiver 23 into a digital signal D1. The second light receiver 24 detects the reference light L3. A / D converter 26 converts the output signal S2 of the second light receiver 24 into a digital signal D2. The time waveform IOBJ(t) of the object light L2 shown in digital signal D1 and the time waveform IREF(t) of the reference light L3 shown in digital signal D2 are input into the arithmetic processing device 14.

[0080] In wavelength scanning spectrophotometry, there is a one-to-one correspondence between the time and wavelength in the wavelength scanning light L1. This correspondence is also present in the reference light L3 and is inherited by the object light L2.

[0081] Using this correspondence between time and wavelength, the processing unit 14 converts the time waveform IOBJ(t) of the object light L2 into the frequency domain spectrum IOBJ(λ). Furthermore, the processing unit 14 calculates the reference spectrum IEF(λ) by converting the time waveform IEF(t) of the reference light L3 into a spectrum and appropriately scaling it.

[0082] The processing of the computational processing device 14 is not particularly limited. As an example, the computational processing device 14 can calculate the transmittance T(λ) or reflectance R(λ) of the object OBJ (sample 6) based on the reference spectrum IREF(λ) and the spectrum IOBJ(λ) of the object light L2.

[0083] T(λ) = IOBJ(λ) / IREF(λ) R(λ) = IOBJ(λ) / IREF(λ) Figure 4 It is used for explanation Figure 2The diagram shows a spectroscopic measurement device 10. As described above, the time t of the wavelength scanning light L1 corresponds one-to-one with the wavelength λ. Therefore, the time waveform IREF(t) of the wavelength scanning light L1 can be converted into the frequency domain spectrum IREF(λ).

[0084] The time waveform IOBJ(t) of the object light L2 is also a waveform in which time t and wavelength λ correspond one-to-one. Therefore, the processing unit 14 can convert the waveform IOBJ(t) of the object light L2 represented by the output of the light receiving unit 13 into the spectrum IOBJ(λ) of the object light L2.

[0085] The processing unit 14 is able to calculate the transmission spectrum T(λ) of the object OBJ (sample 6) based on the ratio of the two spectra IOBJ(λ) to IREF(λ) / IREF(λ).

[0086] The relationship between time t and wavelength λ in the wavelength scanning light L1 is represented by a function of λ = f(t). In its simplest form, wavelength λ changes linearly with respect to time t as a linear function. When the time waveform IOBJ(t) of object light L2 decreases at a certain moment tx, it means that the transmission spectrum T(λ) has an absorption spectrum at wavelength λx = f(tx).

[0087] Furthermore, the processing in the arithmetic processing unit 14 is not limited to this. Alternatively, after calculating the ratio T(t) = IOBJ(t) / IREF(t) of the two time waveforms IOBJ(t) and IIREF(t), the variable t of the time waveform T(t) can be transformed into λ, thereby calculating the transmission spectrum T(λ).

[0088] [Examination of stable output of wavelength scanning light L1] The inventor has made a new discovery. Figure 1 as well as Figure 2 The measurement accuracy of the illustrated spectrophotometers 1 and 10 is strongly affected by the variation of the wavelength scanning light L1 output by the light source devices 2 and 11.

[0089] That is, the inventors have discovered that in the spectrophotometers 1 and 10, by suppressing the variation of the wavelength scanning light L1 output by the light source devices 2 and 11, the wavelength scanning light L1 can be stably output, thereby improving the measurement accuracy.

[0090] Furthermore, the inventors have conducted repeated research in order to achieve a stable output of the wavelength scanning light L1 from the light source devices 2 and 11.

[0091] Figure 2 The pulsed light source 15 shown is typically constructed by housing the components of the pulsed light source 15 within a single housing (see reference). Figure 6The pulsed light source 15). On the other hand, typically, the components of the pulse expander 16 (divider 17, delay line 18, coupler 19, etc.) are mounted on the support member 40 (see reference 15). Figure 6 On top. The support component 40 can also be, for example, an optical platform.

[0092] The inventors studied the pulse extender 16 mounted on the support component 40 and found that if the alignment is deviated due to temperature changes, it will have a significant impact on the intensity, spectrum, and delay of each wavelength of the wavelength scanning light L1.

[0093] Furthermore, the inventors have newly discovered that by suppressing temperature changes in the pulse expander 16, variations in the characteristics of the pulse expander 16 can be suppressed, thereby suppressing variations in the intensity, amplitude spectrum, phase spectrum, etc., of the wavelength scanning light L1. In other words, it has been newly discovered that by suppressing temperature changes in the pulse expander 16, stable output of the wavelength scanning light L1 can be achieved.

[0094] The following is a detailed description of the light source device of the present invention, which was newly designed based on the above-described research results of the inventors.

[0095] [Basic Structure of a Light Source Device] Figure 5 This is a block diagram illustrating a basic structural example of a light source device 28 according to one embodiment of the present invention. The light source device 28 is a light source device that generates wavelength scanning light L1, and in addition to the pulse light source 15 and the pulse expander 16, it also has an air supply device 29.

[0096] As described above, the pulsed light source 15 generates a broadband pulsed light L1a with a continuous spectrum. Furthermore, the pulse expander 16 is configured to stretch the broadband pulsed light L1a along the time axis to generate a wavelength scanning light L1.

[0097] The air supply device 29 supplies air to the pulse expander 16. This suppresses temperature changes in the pulse expander 16 and enables stable output of the wavelength scanning light L1.

[0098] For example, an FFU (Fan Filter Unit) can be used as the air supply device 29. The FFU has a built-in filter and fan, which can remove debris, dust, etc. contained in the air and supply clean air (clean air) to the pulse expander 16. Of course, the specific structure of the air supply device 29 is not limited, and any structure different from the FFU can be adopted.

[0099] The air supplied to the pulse expander 16 by the air supply device 29 can, for example, be air from outside the light source device 28 (the air in the environment where the light source device 28 is located). For example, the light source device 28 is located in a clean room or the like where the air cleanliness and temperature are adjusted. In this case, air with adjusted air cleanliness and temperature can be supplied to the pulse expander 16 by the air supply device 29.

[0100] Of course, supplying air from an environment where the cleanliness and temperature of the air are not adjusted to the pulse expander 16 can also suppress temperature changes in the pulse expander 16.

[0101] In addition, an air conditioner capable of generating temperature-adjusted control air is prepared and connected to the air supply device 29. Furthermore, the air supply device 29 can also supply temperature-adjusted control air to the pulse expander 16. This improves the effect of suppressing temperature changes in the pulse expander 16.

[0102] In addition, it is also possible to supply the pulse expander 16 with air containing a specified type of gas, or air with adjusted composition.

[0103] [Specific structural example of a light source device] Examples 1 to 6 of the specific structures of the light source device 28 will be used to describe the light source devices 28A to 28F.

[0104] (Structure Example 1) Figure 6 This is a perspective view of the light source device 28A, which is illustrated as structural example 1. In the figure, the dashed arrows schematically represent the flow of air, and the solid arrows schematically represent the light path.

[0105] The light source device 28A includes a pulse light source 15, a pulse expander 16, an FFU 31 that functions as an air supply device 29, and a housing 32.

[0106] like Figure 6 As shown, the housing portion 32 has a generally rectangular shape. The housing portion 32 has a lowermost surface 33a and an uppermost surface 33b opposite the lowermost surface 33a in the height direction (vertical direction in the figure) of the light source device 28A. Additionally, the housing portion 32 has four side surfaces 33c to 33f.

[0107] The lowest surface 33a is the lowest side surface in the height direction of the light source device 28A, and becomes the surface closest to the mounting surface when the light source device 28A is mounted. The highest surface 33b is the highest side surface in the height direction of the light source device 28A.

[0108] Side 33c Figure 6The middle side is the frontal side, and hereinafter, the same reference numeral is sometimes used to refer to it as near the front 33c. Side 33d is... Figure 6 The middle section refers to the left side, and below, the same reference numeral is sometimes used to refer to the left side as 33d.

[0109] Side 33e Figure 6 The inner side is referred to as 33e, sometimes using the same reference numeral 33f. The side surface 33f is... Figure 6 The middle part is the right side surface, which is sometimes referred to as right surface 33f in the following figures.

[0110] The interior space 34 is formed inside the lowermost surface 33a, the uppermost surface 33b, and the four sides 33c to 33f of the shell part 32.

[0111] Furthermore, in this embodiment, the housing portion 32 is composed of a heat-insulating component (heat-insulating material), and the internal space 34 of the housing portion 32 is configured as a heat-insulating space.

[0112] like Figure 6 As shown, in this embodiment, the internal space 34 of the housing 32 has a multi-layer structure consisting of multiple levels 35 (35a, 35b). In this embodiment, a partition plate 36 is formed approximately orthogonally to the height direction at the approximate center of the internal space 34 in the height direction of the light source device 28A. The partition plate 36 divides the internal space 34 into a lower side level 35a and an upper side level 35b. Alternatively, the multi-layer structure may also be referred to as a hierarchical structure.

[0113] The lower side layer 35a corresponds to the lowest layer among the multiple layers 35. The lowest surface 33a of the housing portion 32 becomes the bottom surface of the lower side layer 35a, and the partition plate 36 forms the roof of the lower side layer 35a.

[0114] The upper side layer 35b corresponds to the topmost layer among the multiple layers 35. The partition plate 36 forms the bottom surface of the upper side layer 35b, and the uppermost surface 33b forms the ceiling of the upper side layer 35b.

[0115] Furthermore, the housing portion 32 has an inlet 37 for air to flow in and an outlet for air to flow out. In this embodiment, the inlet 37 is formed on the uppermost surface 33b of the housing portion 32, that is, at the top of the upper side layer 35b. The outlet 38 is formed on the right surface 33f at a position constituting the lower side layer 35a. That is, the inlet 37 is configured at a position higher than the outlet 38 in the height direction of the light source device 28A.

[0116] Additionally, the partition plate 36 has a through hole (not shown), and the lower side layer 35a and the upper side layer 35b are spatially continuous. For example... Figure 6 As shown, air A1 is supplied to the internal space 34 via inlet 37. The supplied air A1 is discharged to the outside of the light source device 28A through outlet 38 via upper side layer 35b and lower side layer 35a. The air discharged from outlet 38 is referred to as air A2.

[0117] The pulsed light source 15 is constructed by housing its constituent elements within a housing. The pulsed light source 15 is housed within the internal space 34 of the housing portion 32. Specifically, the pulsed light source 15 is disposed in the lower side layer 35a of the internal space 34.

[0118] During the operation of the light source device 28A, the pulsed light source 15 becomes a heat source. In this embodiment, as... Figure 6 As shown, a laser exhaust port 39 is formed at the position of the lower side layer 35a of the right surface 33f. The heated air A3 discharged from the pulse light source 15 is not discharged into the internal space 34 of the housing 32, but is discharged to the outside of the light source device 28A through the laser exhaust port 39.

[0119] That is, in the light source device 28A, the air A3 discharged from the pulse light source 15 is discharged to the outside of the housing 32 without passing through the lower side layer 35a and the upper side layer 35b.

[0120] The components of the pulse expander 16 (splitter 17, delay line 18, coupler 19, etc.) are mounted on the support member 40. The support member 40 may also be, for example, an optical platform.

[0121] like Figure 6 As shown, the pulse expander 16 is housed in the internal space 34 of the housing portion 32. Specifically, the pulse expander 16 is disposed in the upper side layer 35b of the internal space 34.

[0122] The pulse expander 16 is positioned below the air inlet 37 formed on the uppermost surface 33b. Conversely, it can also be said that the inlet 37 is formed above the pulse expander 16 positioned on the upper side layer 35b.

[0123] The FFU31, which functions as an air supply device 29, is formed on the uppermost surface 33b of the housing 32. The FFU31 has a built-in filter and fan to remove debris, dust and other contaminants from the air outside the light source device 28A, and to supply clean air A1 to the interior space 34 of the housing 32 through the inlet 37.

[0124] Thus, the internal space 34 of the housing portion 32 of the light source device 28A in this embodiment has a multi-layer structure in which multiple layers 35 are stacked along the height direction of the light source device 28A. Moreover, the pulse light source 15 and the pulse expander 16 are respectively disposed in different layers 35 of the multiple layers 35.

[0125] Specifically, a pulse expander 16 is disposed in the upper side layer 35b, and a pulse light source 15 is disposed in the lower side layer 35a. That is, in the height direction of the light source device 28A, the pulse light source 15 is disposed in a lower layer than the pulse expander 16.

[0126] An inlet 37 is formed on the upper side of the pulse expander 16 on the uppermost surface 33b. Clean air A1 is supplied to the upper layer 35b, where the pulse expander 16 is located, via the inlet 37 through the FFU 31 provided on the uppermost surface 33b.

[0127] Clean air A1 flowing in from inlet 37 is first supplied to pulse expander 16 disposed on upper side layer 35b. Then, clean air A1 is supplied to pulse light source 15 disposed on lower side layer 35a through through hole (not shown) in partition plate 36, and discharged from outlet 38 to the outside of housing 32 (air A2).

[0128] That is, in the light source device 28A of this embodiment, the pulse expander 16 is positioned upstream of the pulse light source 15 relative to the flow path of the air A1 flowing in from the inlet 37.

[0129] In the light source device 28A of this embodiment, the pulsed light source 15 and the pulse expander 16 are housed in the same housing 32. Furthermore, clean air A1 is supplied to the internal space 34 of the housing 32 via the FFU 31.

[0130] Therefore, temperature changes in the pulse expander 16 can be suppressed, and variations in its characteristics can be suppressed. That is, variations in the intensity, amplitude spectrum, and phase spectrum of the wavelength scanning light L1 can be suppressed, and stable output of the wavelength scanning light L1 can be achieved.

[0131] Furthermore, it can suppress temperature changes in the pulsed light source 15 and fluctuations in its output intensity. As a result, it can improve the measurement accuracy of the spectrophotometer. Additionally, it can improve measurement stability.

[0132] The inventors studied the prototypes and found that the output stability of the pulse light source 15 was ±1% / ℃, and the output stability of the pulse expander 16 was ±2.5% / ℃. When the divider 17 of the pulse expander 16 is composed of an AWG, the focusing position from the pulse light source 15 deviates from the incident position of the AWG by only μm, resulting in a decrease in output.

[0133] In this way, the pulse expander 16 is relatively susceptible to temperature changes, and the structure in which the pulse expander 16 is positioned in the upper side layer 35b near the inlet 37 and the pulse light source 15 is positioned in the lower side layer 35a away from the inlet 37 is very effective.

[0134] That is, by placing the pulse expander 16, which is relatively susceptible to temperature changes, in the upstream side of the flow path of the clean air A1 flowing in from the inlet 37, the temperature of the pulse expander 16 can be stabilized preferentially, thereby stabilizing the overall characteristics of the light source device 28A.

[0135] For example, when using a modular, commercially available product as the pulse light source 15, the pulse expander 16 mounted on the support member 40 is more susceptible to temperature fluctuations than the pulse light source 15. Therefore, by prioritizing the stabilization of the temperature of the pulse expander 16, the overall performance of the light source device 28A can be improved.

[0136] In addition, such as Figure 6 As shown, in the light source device 28A, the air A3 discharged from the pulse light source 15 is discharged to the outside of the housing 32 without passing through the lower side layer 35a where the pulse light source 15 is disposed and the upper side layer 35b where the pulse expander 16 is disposed.

[0137] The pulsed light source 15 can be considered a heat source, and the temperature of the air A3 discharged from the pulsed light source 15 is generally higher than the temperature of the internal space 34 of the housing 32. Therefore, by directly discharging the air A3 discharged from the pulsed light source 15 to the outside, the temperature stability of the internal space 34 can be further improved.

[0138] In addition, such as Figure 6 As shown, in the light source device 28A, the pulse light source 15, the pulse expander 16, and the FFU 31 can be arranged in the height direction, i.e., the vertical direction, of the light source device 28A. This reduces the bottom space of the light source device 28A (the space required to assemble the light source device 28A).

[0139] Of course, using the housing 32 to integrally form the pulse light source 15, pulse expander 16 and FFU 31 also helps to reduce the bottom space of the light source device 28A.

[0140] In addition, as with housing 32 in this embodiment, the housing portion that can arrange the components of the light source device 28A (pulse light source 15, pulse expander 16, FFU 31) in the longitudinal direction can be called a tower-shaped housing portion.

[0141] exist Figure 6 In the shell section 32 shown, the internal space 34 is divided into two levels: a lower side level 35a and an upper side level 35b. Alternatively, the space above the uppermost surface 33b can be considered a level, and the shell section 32 can be viewed as a tower-shaped shell section with three levels. In this case, the level 41 above the uppermost surface 33b can be referred to as the outermost layer or roof layer.

[0142] In this disclosure, "multiple layers" refers to multiple layers 35 formed within the internal space 34. That is, in Figure 6 In the light source device 28A shown, the lower side layer 35a and the upper side layer 35b constitute one embodiment of the "multiple layers" of the present invention.

[0143] Furthermore, the upper side layer 35b is one embodiment of the "uppermost layer in the highest position among multiple layers" of the present invention. Additionally, the lower side layer 35a is one embodiment of the "lowest layer in the lowest position among multiple layers" and the "layer following the uppermost layer". Furthermore, the uppermost surface 33b is one embodiment of the "uppermost surface" of the present invention.

[0144] In addition, such as Figure 6 As shown, in the light source device 28A, an inlet 37 is formed on the uppermost surface 33b and is positioned at a higher position in the internal space 34 of the housing portion 32. On the other hand, an outlet 38 is positioned at a lower position in the internal space 34 of the housing portion 32.

[0145] Therefore, a downward airflow (downward flow) can be generated in the internal space 34 of the housing 32. As a result, particle accumulation on the support member 40 and unit of the pulse expander 16 can be suppressed. In addition, it is possible to prevent particles from adhering to the optical components in the laser optical path, and to prevent the deterioration of the optical components (including laser-based sintering) and the resulting reduction in output power.

[0146] In this embodiment, air A1 is supplied to the lower part of the light source device 28A via the inlet 37 through the FFU 31 in the height direction, thus fully utilizing the effect of the downward flow. Of course, the inlet 37 can also be configured on the side 33c to 33f of the housing 32 as long as it is higher than the outlet 38.

[0147] For example, the inlet 37 can be provided at a position 37a that is higher than the highest component among the components of the pulse light source 15 and the pulse expander 16. In this case, the FFU 31 can be installed at position 37a. Furthermore, even if the direction in which air A1 flows in through the FFU 31 is not downward but horizontal or inclined, a downward flow effect can still be obtained.

[0148] (Structure Example 2) Figure 7 This is a perspective view showing the light source device 28B, which is illustrated as structural example 2. Figure 7 In the light source device 28B shown, the internal space 34 of the housing portion 32 is not configured as a multi-layer structure. For example... Figure 7 As shown, the pulse light source 15 and the pulse expander 16 are arranged side by side on the lowest surface 33a of the housing 32.

[0149] An inlet 37 and an FFU 31 are formed on the uppermost surface 33b of the housing 32. The inlet 37 is formed above the pulse expander 16. Purified air A1 is supplied to the interior space 34 of the housing 32 via the FFU 31 and the inlet 37. The supplied purified air A1 is discharged (air A2) to the outside of the light source device 28B from the outlet 38, which is formed at a position lower than the inlet 37.

[0150] Therefore, temperature changes in the pulse expander 16 can be suppressed, enabling stable output of the wavelength scanning light L1. Furthermore, temperature changes in the pulse light source 15 and variations in its output intensity can also be suppressed. As a result, the measurement accuracy of the spectrophotometer can be improved.

[0151] exist Figure 7 In the light source device 28B shown, the pulsed light source 15 and the pulse expander 16 are arranged side by side on the lowermost surface 33a. Therefore, with Figure 6 Compared to the light source device 28A shown, the bottom space is larger. On the other hand, compared to... Figure 6 Compared to the light source device 28A shown, the size in the height direction can be reduced.

[0152] (Structure Example 3) Figure 8 This is a perspective view of the light source device 28C, which is illustrated as structural example 3. Figure 8 In addition to the pulse light source 15, pulse expander 16, and FFU31, the light source device C shown also has an air conditioner 43.

[0153] like Figure 8As shown, the internal space 34 of the housing portion 32 in this embodiment has a multi-layer structure consisting of three levels 44a to 44c. In this embodiment, two partition plates 36a and 36b are formed in the internal space 34 at approximately equal intervals along the height direction of the light source device 28C.

[0154] The space from the bottom surface 33a to the lower partition 36a is the lowest level 44a, corresponding to the lowest level among the three levels 44a-44c. The space from the lower partition 36a to the upper partition 36b is the middle level 44b, corresponding to the middle level among the three levels 44a-44c. The space from the upper partition 36b to the top surface 33b is the top level 44c, corresponding to the highest level among the three levels 44a-44c.

[0155] The upper partition 36b has a through hole (not shown), and the intermediate level 44b and the top level 44c are spatially continuous. These intermediate levels 44b and the top level 44c form the space that should be air-conditioned (hereinafter referred to as the air-conditioned space) 45.

[0156] like Figure 8 As shown, the pulsed light source 15 is disposed in the intermediate layer 44b. The pulse expander 16 is disposed in the uppermost layer 44c. In addition, an inlet 37 and an FFU 31 are formed on the uppermost surface 33b of the housing portion 32. An outlet 38 is formed on the right surface 33f of the housing portion 32 at the position that constitutes the intermediate layer 44b.

[0157] Air conditioner 43 is located on the lowest level 44a. That is, air conditioner 43 is located on a lower level than pulse light source 15 and pulse expander 16 in the height direction of light source device 28C.

[0158] Air conditioner 43 produces controlled air A4 with regulated temperature. Air conditioner 43 includes a temperature sensor 46, a controller 47, a temperature regulating device 48, and a fan 49.

[0159] Temperature sensor 46 is externally mounted on the main body of air conditioner 43. Specifically, temperature sensor 46 is disposed in the air-conditioned space 45 (top layer 44c and middle layer 44b) where pulse expander 16 and pulse light source 15 are provided.

[0160] The controller 47 provides feedback control to the temperature regulating device 48 to ensure that the temperature sensor 46 detects a value close to the target temperature. The fan 49 delivers the controlled air A4, whose temperature is controlled by the temperature regulating device 48, into the FFU 31 via the thermally insulated air passage 50.

[0161] FFU31 has a built-in filter and fan to remove debris, dust, and other contaminants from the controlled air A4, and deliver clean air A1 into the air-conditioned space 45.

[0162] In this embodiment, the air conditioner 43 is disposed on a different layer than the pulse light source 15 and the pulse expander 16. More preferably, the air conditioner 43 is disposed on a layer lower than the pulse light source 15 and the pulse expander 16.

[0163] Therefore, the air conditioner 43 has a drainage system, which can prevent damage to the pulse light source 15 and the pulse expander 16 in the event of a leak. In addition, the air conditioner 43 is heavy and vibrates during operation, so from a rigidity point of view, it is preferable to position it at a lower position in the housing 32.

[0164] like Figure 8 As shown, the air conditioner 43 is disposed in the lowest level 44a, which is the lowest layer. A pulse light source 15 and a pulse expander 16 are provided in the air-conditioned space 45, which includes the intermediate level 44b and the uppermost level 44c. In addition, an FFU 31 is provided in the level 41 above the uppermost surface 33b of the housing 32.

[0165] In this embodiment, it is preferable that the air-conditioning space 45 is insulated, and the size of the air-conditioning space 45 is narrower than the overall size of the intermediate layer 44b and the uppermost layer 44c. By minimizing the size of the air-conditioning space 45, temperature stability can be improved. In addition, the internal space 34 of the housing portion 32 can be configured as an insulated space as a whole, and the air-conditioning space 45 within the internal space 34 can also be configured as an insulated space partially.

[0166] The air inlet 37 of the purified air A1 in the air-conditioned space 45 is positioned higher than the pulse light source 15 and the pulse expander 16. In this embodiment, the FFU 31 is positioned on the layer 41 above the uppermost surface 33b, and the air inlet 37 is positioned on the uppermost surface 33b of the air-conditioned space 45.

[0167] Furthermore, the air inlet 37 for the purified air A1 can also be located on the side of the air-conditioned space 45. In this case, the air inlet 37 can be positioned at a location 37a higher than the highest component of the pulse light source 15 and the pulse expander 16. In this case, the FFU 31 can be installed at location 37a.

[0168] In the air-conditioned space 45, an outlet 38 is provided at a position lower than the inlet 37. The air A2 discharged from the outlet 38 returns to the FFU 31 as return air A5 via the thermally insulated air duct 51. The FFU 31 mixes the control air A4 from the air conditioner 43 and the return air A5 discharged from the outlet 38 and supplies it to the air-conditioned space 45.

[0169] The airflow of FFU31 is determined based on the size of the air-conditioned space 45 to ensure that air reaches every corner of the space. On the other hand, the airflow of air conditioner 43 can be less than that of FFU31. That is, the airflow of FFU31 can be greater than that of air conditioner 43. This difference in airflow is provided by the air A2 discharged from outlet 38 (return air A5).

[0170] The pulsed light source 15 is a heat source. The heated air A3 discharged from the pulsed light source 15 is not discharged into the air-conditioned space 45, but is discharged from the laser exhaust port 39 to the outside of the housing 32. That is, the air A3 does not return to the FFU 31.

[0171] Temperature sensor 46 is located near the inlet 37 of the purified air A1. It can be said that the temperature of the air circulating in the light source device 28C is most stable near the inlet 37 (i.e., upstream of the air flow), and the closer it is to the outlet 38, the further it is from the target value.

[0172] That is, if we compare the intermediate layer 44b with the top layer 44c, we can say that the temperature of the top layer 44c is more stable. Therefore, the one of the pulse light source 15 and the pulse expander 16 that is relatively susceptible to temperature changes can be placed in the layer near the inlet 37 (top layer 44c), and the other one that is relatively less susceptible to temperature changes can be placed in the layer near the outlet 38 (intermediate layer 44b).

[0173] As described above, the inventors studied the prototype and found that the output stability of the pulse light source 15 was ±1% / ℃, and the output stability of the pulse expander 16 was ±2.5% / ℃. When the divider 17 of the pulse expander 16 is composed of an AWG, the focusing position from the light source deviates from the incident position of the AWG by only a few micrometers, resulting in a decrease in output.

[0174] Therefore, the pulse expander 16 is relatively susceptible to temperature changes. The pulse expander 16 is located in the uppermost layer 44c near the inlet 37, while the pulse light source 15 is located in the middle layer 44b away from the inlet 37.

[0175] Focusing on temperature sensor 46, it can be said that temperature sensor 46 is positioned near the one of the pulse light source 15 and pulse expander 16 that is relatively more susceptible to temperature changes. In this embodiment, temperature sensor 46 is positioned closer to pulse expander 16 than pulse light source 15.

[0176] In the light source device 28C of this embodiment, the pulse light source 15 and the pulse expander 16 are housed in the same housing 32, and the temperature of the air-conditioned space 45 inside the housing 32 is managed and regulated by the air conditioner 43.

[0177] Therefore, fluctuations in the output intensity of the pulsed light source 15 can be suppressed, as can fluctuations in the characteristics of the pulse expander 16. This also suppresses fluctuations in the intensity, amplitude spectrum, and phase spectrum of the wavelength scanning light. Furthermore, by arranging the air conditioner 43, the pulsed light source 15, and the pulse expander 16 longitudinally, the bottom space of the light source device 28C can be reduced.

[0178] In addition, by placing the pulse expander 16, which is relatively susceptible to temperature changes, close to the inlet 37 in the pulse light source 15 and the pulse expander 16, the temperature of the pulse expander 16 can be stabilized preferentially, thereby stabilizing the overall characteristics of the light source device 28C.

[0179] For example, when using a modular, commercially available product as the pulse light source 15, the pulse expander 16 mounted on the support member 40 is more susceptible to temperature fluctuations than the pulse light source 15. Therefore, by placing the temperature sensor 46 close to the pulse expander 16, the temperature of the pulse expander 16 can be stabilized preferentially, thereby improving the overall performance of the light source device 28C.

[0180] Furthermore, the control air approaches the target temperature further upstream and deviates further downstream. Therefore, by positioning the pulse expander 16 upstream of the target temperature, the temperature of the pulse expander 16 can be preferentially stabilized.

[0181] Furthermore, by placing the inlet 37 at a higher position in the air-conditioned space 45 and the outlet 38 at a lower position in the air-conditioned space 45, a downward airflow (descending flow) can be generated inside the housing 32.

[0182] This prevents particle accumulation on the support member 40 or unit of the pulse expander 16. Furthermore, it prevents particles from adhering to optical components in the laser path, thus preventing degradation of the optical components (including laser-based sintering) and the resulting reduction in output power.

[0183] The larger the air-conditioned space 45, the more difficult it is to adjust the temperature to every corner, which may damage the temperature uniformity within the space or create areas with unstable temperatures. Therefore, it is necessary to supply air to the air-conditioned space 45 with an airflow rate appropriate to the size of the space 45.

[0184] Here, if only air supplied to the air-conditioned space 45 is supplied by air conditioner 43, a large air conditioner 43 would be required. According to the light source device 28C of this embodiment, the air A2 (return air A5) discharged from the air-conditioned space 45 can be returned to the FFU31, which is the air supply device 29, and mixed with control air A4 before being supplied to the air-conditioned space 45. As a result, the air-conditioned space 45 can be heated to all corners without requiring a large air conditioner 43, and the uniformity and stability of the temperature within the air-conditioned space 45 can be improved.

[0185] The pulsed light source 15 can be considered a heat source, and the temperature of the air A3 discharged from it is higher than the temperature inside the air-conditioned space 45. Therefore, by directly discharging the air A3 discharged from the pulsed light source 15 to the outside, the temperature stability inside the air-conditioned space 45 can be further improved.

[0186] (Structure Example 4) Figure 9 This is a perspective view of the light source device 28D, as illustrated in structural example 4. Figure 9 In the light source device 28D shown, the internal space 34 of the housing 32 is configured into a multi-layer structure by partition plates 36, and is divided into a lower side layer 53a and an upper side layer 53b.

[0187] like Figure 9 As shown, an air conditioner 43 is arranged in the lower side layer 53a. The upper side layer 53b constitutes an air-conditioned space, and a pulse light source 15 and a pulse expander 16 are arranged side by side.

[0188] An inlet 37 and an FFU 31 are formed on the uppermost surface 33b of the housing portion 32. The inlet 37 is formed on the upper side of the pulse expander 16.

[0189] Temperature-controlled air A4 is supplied from air conditioner 43 to FFU 31 via insulated air duct 50. Additionally, air A2 discharged from outlet 38 returns to FFU 31 as return air A5 via insulated air duct 51.

[0190] FFU31 mixes control air A4 from air conditioner 43 with air A5 discharged from outlet 38 and supplies it to the upper side layer 53b.

[0191] like Figure 9 As shown, in the upper side layer 53b, the pulse expander 16, which is relatively susceptible to temperature changes, is positioned near the inlet 37, while the pulse light source 15, which is not easily affected by temperature changes, is positioned near the outlet 38.

[0192] In the light source device 28D, temperature changes in the pulse expander 16 can also be suppressed, enabling stable output of the wavelength scanning light L1. Furthermore, temperature changes in the pulse light source 15 and variations in its output intensity can also be suppressed. As a result, the measurement accuracy of the spectrophotometer can be improved.

[0193] exist Figure 9 In the light source device 28D shown, with Figure 8 Compared to the light source device 28C shown, the bottom space is larger, and on the other hand, the size in the height direction can be reduced.

[0194] (Example 5) Figure 10 This is a perspective view of the light source device 28E, which is illustrated as structural example 5.

[0195] exist Figure 8 In the light source device 28C shown, the air A3 discharged from the air-conditioned space 45 returns to the FFU31, mixes with the control air A4, and is supplied to the air-conditioned space 45.

[0196] And in Figure 10 In the light source device 28E shown, the air duct 51 is omitted, and the air inside the air-conditioned space 45 is discharged to the outside through the outlet 38. For example, if the volume of the air-conditioned space 45 is not too large, a structure can be adopted in which only the control air A4 generated by the air conditioner 43 is supplied from the FFU 31 to the air-conditioned space 45.

[0197] In the light source device 28E, temperature changes in the pulse expander 16 can also be suppressed, enabling stable output of the wavelength scanning light L1. Furthermore, temperature changes in the pulse light source 15 can also be suppressed, as can variations in the output intensity of the pulse light source 15. As a result, the measurement accuracy of the spectrophotometer can be improved.

[0198] (Example 6) Figure 11 This is a perspective view of the light source device 28F, which is illustrated as structural example 6.

[0199] exist Figure 6 and Figure 7 In the example shown, the pulse light source 15 and the pulse expander 16 are housed in the internal space 34 of the housing 32. Additionally, in... Figures 8-10 In the example shown, the pulse light source 15, the pulse expander 16, and the air conditioner 43 are housed in the internal space 34 of the housing 32.

[0200] And in Figure 11 In the light source device 28F shown, only the pulse expander 16 is housed in the internal space 34 of the housing 32.

[0201] An inlet 37 and an FFU 31 are formed on the uppermost surface 33b of the housing 32. The inlet 37 is located above the pulse expander 16. Purified air A1 is supplied to the interior space 34 of the housing 32 via the FFU 31 and the inlet 37. The supplied purified air A1 is discharged (air A2) to the outside of the light source device 28F from the outlet 38, which is located at a position lower than the inlet 37.

[0202] exist Figure 11 In the light source device 28F shown, temperature changes in the pulse expander 16 can also be suppressed, enabling a stable output of the wavelength scanning light L1. As a result, the measurement accuracy of the spectrophotometer can be improved.

[0203] Furthermore, the air supplied to the pulse expander 16 by the FFU31 can be, for example, air from outside the light source device 28F (the air in the environment where the light source device 28F is located). Alternatively, by preparing an air conditioner and connecting it to the FFU31, temperature-adjusted control air can also be supplied to the pulse expander 16. This improves the effect of suppressing temperature changes in the pulse expander 16.

[0204] In the light source devices 28A-28F of this embodiment, air is supplied to the pulse expander 16 via the FFU31, which functions as an air supply device 29. This suppresses temperature variations in the pulse expander 16 and enables stable output of the wavelength scanning light L1. Furthermore, the various effects described above are achieved in the light source devices 28A-28F.

[0205] <Other Implementation Methods> The present invention is not limited to the embodiments described above, and can be implemented in various other ways.

[0206] In the above examples, a structure in which the pulse expander 16 is positioned higher than the pulse light source 15 in the height direction of the light source devices 28A to 28F is illustrated, as well as a structure in which the pulse expander 16 is positioned parallel to the pulse light source 15 at the same height. Additionally, a structure in which the pulse expander 16 is positioned upstream of the pulse light source 15 relative to the flow path of the air A1 flowing in from the inlet 37 is illustrated.

[0207] The structure is not limited to this. As long as the air A1 supplied by the air supply device 29 (FFU31) reaches the pulse expander 16, the structure can also be adopted in which the pulse light source 15 is arranged at a higher position than the pulse expander 16, or the pulse light source 15 is arranged at a position upstream of the pulse expander 16 relative to the flow path of the air A1 flowing in from the inlet 37.

[0208] For example, in Figure 6In the example shown, a pulse expander 16 can also be configured in the lower side layer 35a, and a pulse light source 15 can be configured in the upper side layer 53b. Additionally, in Figure 8 and Figure 10 In the example shown, a pulse extender 16 can also be configured in the intermediate layer 44b, and a pulse light source 15 can be configured in the top layer 44c. Furthermore, air A1 can be supplied to the layer where the pulse light source 15 is configured via an air supply device 29 (FFU31).

[0209] If air A1 reaches the pulse expander 16, it can suppress the temperature change of the pulse expander 16, enabling a stable output of the wavelength scanning light L1. As a result, the measurement accuracy of the spectrophotometer can be improved.

[0210] Furthermore, depending on the respective structures of the pulse light source 15 and the pulse expander 16, there may be a situation where the pulse light source 15 is more susceptible to temperature variations than the pulse expander 16. In this case, it is effective to position the pulse light source 15 near the inlet 37 (or at a level close to the inlet 37) and the pulse expander 16 near the outlet 38 (or at a level close to the outlet 38).

[0211] Alternatively, the air conditioner 43 can be positioned higher than the pulse light source 15 and the pulse extender 16.

[0212] exist Figure 6 , Figure 8 , Figure 10 In the example shown, within the tower-shaped housing 32, the pulsed light source 15 and the pulse expander 16 are respectively disposed in different layers of multiple layers. On the other hand, in Figure 9 In the example shown, the pulse light source 15 and the pulse expander 16 are respectively arranged at the same level in the tower-shaped housing 32. In this way, the arrangement structure of the pulse light source 15 and the pulse expander 16 relative to the multiple levels is not limited, and any structure in which the pulse light source 15 and the pulse expander 16 are arranged at any level of the multiple levels can be adopted.

[0213] In the above description, the multi-layered structure of the internal space 34 of the housing 32 is exemplified by a structure in which multiple layers are stacked along the height direction of the light source device. The height direction of the light source device may be, for example, the vertical direction, but is not limited to this.

[0214] Furthermore, the direction in which multiple layers are stacked is not limited to the height direction of the light source device. For example, a multi-layer structure with multiple layers stacked in the horizontal or inclined direction can also be adopted. For example, the internal space 34 of the housing 32 is divided into multiple layers by one or more partitions extending in a direction orthogonal to the mounting surface of the light source device. Moreover, pulse light sources, pulse extenders, air conditioners, etc. can be arranged in each layer.

[0215] exist Figure 6 , Figures 8-10 In the illustrated tower-shaped shell section 32, the lowest level can be designated as the first level, and the levels above it can be sequentially called the second level, the third level, and so on. In this case, the level numbering can also include the level 41 on the uppermost surface 33. For example, in... Figure 8 In the light source device 28C shown, the lowest layer 44a can also be called the first layer, the middle layer 44b can be called the second layer, the highest layer 44c can be called the third layer, and the layer 41 above the uppermost surface 33 can be called the fourth layer.

[0216] The embodiments of this disclosure have been described using specific terminology, but this description is merely illustrative to aid understanding and does not limit the scope of this disclosure or the claims. The scope of this invention is defined by the claims; therefore, any embodiments, examples, or modifications not described herein are also included within the scope of this invention.

[0217] The embodiments described above are not intended to limit disclosure but are illustrative. All features and combinations thereof described in the embodiments are not necessarily the essential content of the disclosure. In addition, the dimensions (thickness, length, width, etc.) of the various components shown in the drawings are sometimes appropriately enlarged or reduced for ease of understanding. Furthermore, the dimensions of multiple components do not necessarily indicate their size relationship. In the drawings, even if a component A is depicted as thicker than other components B, component A may still be thinner than component B.

[0218] The spectrophotometer, light source device, pulsed light source, pulse expander, air conditioner, transmitting device (FFU), etc., described with reference to the accompanying drawings, the sample measurement method, and the scanning wavelength scanning light generation method are merely one embodiment and can be arbitrarily modified without departing from the spirit of the present invention. That is, other arbitrary structures, processing flows, algorithms, etc., for implementing the present invention can be adopted.

[0219] In this disclosure, terms such as "generally" and "roughly" are used appropriately for ease of understanding. However, the use and non-use of these terms are not intended to establish a clear distinction. That is, in this disclosure, concepts such as "center," "central," "equal," "identical," "orthogonal," and "parallel," which define shape, size, positional relationship, and state, include concepts such as "substantially center," "substantially central," "substantially equal," "substantially identical," "substantially orthogonal," and "substantially parallel."

[0220] In this disclosure, expressions using "compared to" such as "greater than A" and "smaller than A" broadly encompass both concepts that include those equal to A and those that do not. For example, "greater than A" is not limited to excluding those equal to A, but also includes "above A". Furthermore, "smaller than A" is not limited to "less than A", but also includes "less than A". In implementing this invention, to achieve the effects described above, specific settings can be appropriately adopted based on the concepts included in "greater than A" and "smaller than A".

[0221] In the above-described features according to the present technology, at least two features can be combined. That is, the various features described in each embodiment can also be arbitrarily combined without distinguishing between embodiments. In addition, the various effects described above are merely illustrative and are not limited thereto; other effects may also be achieved.

[0222] Symbol Explanation A1 Purified air flowing into the inlet A2 Air flowing out of the outlet A3 Air discharged from the pulsed light source A4 Control Air A5 Return Air L1 wavelength scanning light L1a Broadband Pulsed Light L2 object light L3 reference light 1. 10 Spectrophotometer 2, 11, 28 (28A~28F) Light source devices 15 Pulse Light Source 16 Pulse Expander 17 Dividers 18 delay lines 19 Coupler 29. Air supply device 31 FFU 32. Shell section 33a Lowest surface 33b Top surface 33c-33f Side View 33a Lowest surface 35 levels 35a, 53a Lower side layer Upper side layer of 35b and 53b 37 Inlet 38 Outlet 43 Air conditioner 44a Lowest level 44b Intermediate level 44c Top level 44b Intermediate level

Claims

1. A light source device for generating wavelength scanning light, comprising: A pulsed light source generates pulsed light containing a continuous spectrum; A pulse expander configured to elongate the pulsed light along the time axis to generate the wavelength scanning light; and An air supply device supplies air to the pulse expander.

2. The light source device according to claim 1, wherein, The light source device also includes a housing portion having an inlet for the air to flow in and an outlet for the air to flow out, and the pulse expander is housed within the internal space. The air supply device supplies air to the interior space through the inlet.

3. The light source device according to claim 2, wherein, The housing portion contains the pulsed light source within the internal space.

4. The light source device according to claim 3, wherein, The pulse extender is positioned upstream of the pulse light source relative to the flow path of the air flowing in from the inlet.

5. The light source device according to claim 3, characterized in that, The internal space of the shell portion has a multi-layered structure consisting of multiple levels. The pulsed light source and the pulse expander are respectively configured in any one of the plurality of layers. The air supply device supplies air to the level where the pulse expander is configured.

6. The light source device according to claim 5, characterized in that, The pulsed light source and the pulse expander are respectively configured in different layers of the plurality of layers.

7. The light source device according to claim 6, wherein, The layers containing the pulsed light source and the layers containing the pulse expander are spatially continuous. The air supply device supplies air to the level equipped with the pulse expander or the level equipped with the pulse light source.

8. The light source device according to claim 5, wherein, The multi-layer structure is a structure in which multiple layers are stacked along the height direction of the light source device.

9. The light source device according to claim 2, wherein, The inlet is positioned higher than the outlet in the height direction of the light source device.

10. The light source device according to claim 2, wherein, The housing portion has an uppermost surface, which forms the canopy of the uppermost layer in the plurality of layers, located at the highest position. The inlet is formed on the uppermost surface. The air supply device supplies air downwards in the vertical direction via the inlet.

11. The light source device according to claim 10, wherein, The air supply device is formed on the uppermost surface.

12. The light source device according to claim 10, wherein, The pulse expander is configured in the uppermost layer. The pulsed light source is located at the next level below the topmost layer. The topmost layer and the next layer below it are spatially continuous.

13. The light source device according to claim 2, characterized in that, It also has an air conditioner that generates and regulates the temperature of the air. The air supply device supplies the control air to the pulse expander.

14. The light source device according to claim 13, wherein, The internal space of the shell portion has a multi-layered structure consisting of multiple levels. The pulsed light source, the pulse expander, and the air conditioner are respectively configured in different layers of the plurality of layers.

15. The light source device according to claim 14, wherein, The multi-layer structure is a structure in which multiple layers are stacked along the height direction of the light source device. The air conditioner is positioned at a lower level than the pulse light source and the pulse expander in the height direction of the light source device.

16. The light source device according to claim 13, wherein, The air conditioner has a temperature sensor located near the inlet.

17. The light source device according to claim 16, wherein, The temperature sensor is positioned closer to the pulse expander than the pulse light source.

18. The light source device according to claim 2, wherein, The internal space of the shell portion is configured as a heat-insulating space.

19. The light source device according to claim 13, wherein, The air supply device supplies a mixture of air flowing from the outlet and control air to the pulse expander.

20. The light source device according to claim 19, wherein, The air volume of the air supply device is greater than that of the air conditioner.

21. The light source device according to claim 5, wherein, The air discharged from the pulsed light source is discharged to the outside of the housing without passing through the layer where the pulse expander is configured.

22. The light source device according to claim 1, wherein, The air supply device is a fan filter unit.

23. The light source device according to claim 1, wherein, The pulse expander has: An arrayed waveguide diffraction grating spatially divides the pulsed light emitted from the pulsed light source into multiple beams according to wavelength; and Multiple optical fibers, corresponding to the multiple light beams, have different optical path lengths.

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