Vacuum magnetic field annealing furnace

Abstract

The vacuum magnetic field annealing furnace comprises a sample taking and placing part, the sample taking and placing part is of a hollow shell structure, and the sample taking and placing part is externally connected with a driving part, a sample transferring part and an annealing part; the driving part comprises a supporting rod of a rotary lifting structure, the supporting rod is movably connected with the sample taking and placing part, and a sample support is arranged on the part, located in the sample taking and placing part, of the supporting rod; the sample transferring part comprises a sample transferring rod which is arranged in an axial sliding manner relative to the sample taking and placing part, and a sample bin is arranged at one end, close to the sample taking and placing part, of the sample transferring rod; the sample transferring rod is matched with the mechanical clamping jaw to perform multiple times of sample taking and placing without damaging the vacuum condition, so that a plurality of products can be continuously annealed, the sample can rotate in the magnetic field, and multi-angle adjustment of the position of the sample relative to the magnetic field is realized; the capability of continuously annealing multiple samples at different magnetic field angles is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum magnetic field annealing, in particular to a vacuum magnetic field annealing furnace. BACKGROUND

[0002] With the development of microelectronics, semiconductors and other fields, higher requirements are put forward for the magnetic properties, electrical properties and structural stability of thin film materials. During the preparation of thin films, defects such as lattice distortion and uneven impurity distribution may exist in the thin films due to factors such as deposition rate and temperature. Vacuum magnetic field annealing can repair these defects and improve the magnetic properties of the thin films through heat treatment and magnetic field induction. For example, through magnetic field annealing, the magnetization direction of the thin film can be induced to be consistent with the direction of the applied magnetic field, and the magnetic anisotropy can be enhanced. In addition, the microstructure of the thin film can be changed, thereby optimizing the magnetoresistance effect. In addition, the annealing process can promote the crystallization of the thin film, convert the thin film from an amorphous state to a crystalline state, and reduce the defects and stress in the thin film, thereby improving the uniformity and stability of the thin film.

[0003] Through vacuum magnetic field annealing, the magnetic properties and electrical properties of thin film materials can be significantly improved. However, in actual use, the traditional magnetic field annealing device provides a magnetic field through electromagnets or permanent magnets, and the direction of the magnetic field is fixed. The direction of the magnetic field is adjusted by adjusting the placement position of the sample. In the annealing process of different samples at different magnetic field angles, the direction of the magnetic field needs to be adjusted by adjusting the position of the sample after breaking the vacuum, which is troublesome and time-consuming. In addition, the traditional magnetic field annealing device generally determines the relative position of the sample and the magnetic field through mechanical limiting, and usually makes the magnetic field parallel or perpendicular to the surface of the sample, which results in a single adjustable magnetic field angle and makes it difficult to adjust the direction of the sample and the magnetic field.

[0004] In summary, vacuum magnetic field annealing has a significant effect on the improvement of the magnetic properties and electrical properties of thin film materials, but the traditional magnetic field annealing device has a single adjustable magnetic field direction and is difficult to adjust. The demand for continuous annealing of multiple samples at different magnetic field angles cannot be met. SUMMARY

[0005] The present application aims to provide a vacuum magnetic field annealing furnace to solve the problems raised in the background.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solutions:

[0007] A vacuum magnetic field annealing furnace, comprising a sample taking and placing part, the sample taking and placing part being a hollow shell structure, the sample taking and placing part being connected to an external drive part, a sample transferring part and an annealing part;

[0008] The driving part comprises a support rod of a rotating lifting structure, the support rod is movably connected with the sample taking and placing part, and a sample holder is arranged on the part of the support rod in the sample taking and placing part;

[0009] The sample transferring part comprises a sample transferring rod arranged in axial sliding with the sample taking and placing part, and a sample storage is arranged on one end of the sample transferring rod close to the sample taking and placing part;

[0010] The annealing part comprises an annealing cavity and a magnet.

[0011] As a further scheme of the present application, the sample taking and placing part is provided with a mechanical gripper, the driving part is coaxially arranged with the annealing part, the axis of the driving part and the axis of the sample transferring part are arranged to intersect with the axis of the mechanical gripper, and the axis of the driving part, the axis of the sample transferring part and the axis of the mechanical gripper intersect at one point.

[0012] As a further scheme of the present application, the sample taking and placing part comprises a main cylindrical hollow shell, the driving part and the annealing part are connected to two ends of the main cylindrical hollow shell through flanges, the mechanical gripper is arranged on the side of the main cylindrical hollow shell, a secondary cylindrical hollow shell is vertically arranged on one side of the main cylindrical hollow shell, and the sample transferring part is connected to the end of the secondary cylindrical hollow shell.

[0013] As a further scheme of the present application, the side wall of the main cylindrical hollow shell is further provided with an observation window and a reserved interface, and the side wall of the main cylindrical hollow shell or the secondary cylindrical hollow shell is arranged with a vacuumizing device, a quick opening door and a vacuum measuring device.

[0014] As a further scheme of the present application, the mechanical gripper comprises a gripper rod reciprocating linearly with the sample taking and placing part, and the gripper is arranged on one end of the gripper rod close to the sample taking and placing part.

[0015] As a further scheme of the present application, the driving part comprises a bottom plate, a guide rail is arranged on the bottom plate, a sliding support is slidably connected to the guide rail, a fixed block is fixedly connected to the sliding support, a rotary motor is arranged on the fixed block, and the output shaft of the rotary motor is power-connected with the support rod.

[0016] As a further scheme of the present application, a screw rod is threadedly connected to the sliding support, the screw rod is arranged in parallel with the guide rail, and a lifting motor is arranged on the bottom plate to drive the screw rod to rotate.

[0017] As a further scheme of the present application, a support block is fixedly connected to one end of the bottom plate close to the sample taking and placing part, the support block is fixedly connected with the sample taking and placing part through a connecting flange, the support rod passes through the connecting flange on one side of the support block, and a bellows is sleeved on the support rod.

[0018] As a further scheme of the present application: the sample transmission part comprises a lumen fixedly connected with the sample taking and placing part, the sample transmission rod is slidingly connected in the lumen, and the lumen is provided with a support bearing assembly for supporting the sample transmission rod at one end close to the sample taking and placing part.

[0019] As a further scheme of the present application: the annealing cavity is in a hollow cylindrical structure, a heater is arranged concentrically in the annealing cavity, the annealing cavity is provided with a vacuum feedthrough and a temperature measurement feedthrough at an end away from the sample taking and placing part, the magnet is a circular ring magnet and is sleeved outside the annealing cavity, and the outer wall of the annealing cavity is provided with a water-cooling interlayer, and the water-cooling interlayer is connected with water inlets and outlets.

[0020] Compared with the prior art, the present application has the following beneficial effects:

[0021] 1. The vacuum cavity of the present application is connected with a sample transmission mechanism, the sample transmission rod is integrated with a sample bin for storing samples, and the sample transmission rod cooperates with a mechanical clamp jaw to take and place samples multiple times without destroying the vacuum condition, so that multiple products can be continuously annealed;

[0022] 2. The sample holder of the present application is driven by a servo motor, and the sample can rotate in the magnetic field to realize multi-angle adjustment of the position of the sample relative to the magnetic field;

[0023] 3. The multiple sample taking and placing and multi-angle adjustment of the position of the magnetic field can complete the annealing process in a continuous magnetic field with different sample and different magnetic field angles.

[0024] 4. The device as a whole adopts a general interface, and the components are basically standard components, so the compatibility is high and the maintenance is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the embodiment;

[0026] Figure 2 It is a schematic diagram of the continuous annealing process of the embodiment;

[0027] Figure 3 It is a schematic diagram of the structure of the sample in the magnetic field of the embodiment;

[0028] Figure 4 It is a schematic diagram of the principle of different magnetic field angles of the embodiment;

[0029] Figure 5 It is a schematic diagram of the structure of the annealing cavity of the embodiment;

[0030] Figure 6 It is a schematic diagram of the structure of the driving assembly of the embodiment;

[0031] Figure 7 It is a schematic diagram of the sample transmission assembly structure of the embodiment.

[0032] In the figure:

[0033] 1- sample taking and placing part, 11- mechanical gripper, 12- observation window, 13- vacuum pumping device, 14- reserved interface, 15- quick opening door, 16- vacuum measurement device;

[0034] 2- driving part, 21- support rod, 22- sample holder, 23- support block, 24- guide rail, 25- slide block support, 26- lead screw, 27- fixed block, 28- bellows, 29- bottom plate, 210- lifting motor, 211- rotary motor;

[0035] 3- sample transmission part, 31- sample transmission rod, 32- sample chamber, 33- lumen, 34- driving block, 35- support bearing assembly;

[0036] 4- annealing part, 41- annealing cavity, 42- magnet, 43- heater, 44- vacuum feedthrough, 45- temperature measurement feedthrough. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0038] Please refer to Figure 1 In the embodiments of the present application, a vacuum magnetic field annealing furnace includes a sample taking and placing part 1, a driving part 2, a sample transmission part 3, and an annealing part 4.

[0039] The sample taking and placing part 1 is a hollow shell structure. The sample taking and placing part 1 includes a main cylindrical hollow shell, and a secondary cylindrical hollow shell is vertically arranged on one side of the main cylindrical hollow shell. The driving part 2 and the annealing part 4 are connected to both ends of the main cylindrical hollow shell through flanges. The sample taking and placing part 1 is provided with a mechanical gripper 11 on one side. The mechanical gripper 11 includes a gripper rod that reciprocates linearly with the sample taking and placing part 1. The gripper is located at one end of the gripper rod close to the sample taking and placing part 1. The mechanical gripper 11 is located on the side of the main cylindrical hollow shell. The sample transmission part 3 is connected to the end of the secondary cylindrical hollow shell. The sidewall of the main cylindrical hollow shell is further provided with an observation window 12 and a reserved interface 14. The sidewall of the main cylindrical hollow shell or the secondary cylindrical hollow shell is arranged with a vacuum pumping device 13, a quick opening door 15, and a vacuum measurement device 16.

[0040] In the embodiment, the pick-and-place sample part 1 body is a reversed "T" type metal cylindrical cavity, which is provided with metal flange connecting ports in six directions of front, back, left, right, up and down. The front first connecting port is connected with a mechanical gripper 11 for grabbing samples. The second connecting port is obliquely above the first connecting port and is connected with an observation window 12. The third connecting port at the back is connected with a vacuum pumping device 13. The fourth connecting port at the leftmost end is connected with a sample transmission part 3. The right side is a reserved interface 14. The sixth connecting port at the upper end is connected with an annealing part 4. The lower end is connected with a driving part 2.

[0041] The flange connecting port is a knife-edge flange and can be used for vacuum sealing.

[0042] The mechanical gripper 11 is a long rod capable of reciprocating linear motion and is sealed and welded on the metal flange through a vacuum bellows. The long rod main body part is a magnetic coupling structure and the long rod head is a claw. The claw is close to and away from the sample by controlling the movement of the long rod. The sample is clamped and released by controlling the contraction of the claw. The mechanical gripper has a certain swing angle due to the certain stretching and deforming ability of the vacuum bellows.

[0043] The vacuum pumping device 13 is a combination of front and rear stage vacuum pumps. In the embodiment, the front stage uses a turbo molecular pump and the rear stage uses a mechanical pump.

[0044] The left cavity is connected with a quick opening door 15 for quickly picking and placing samples in an atmospheric environment. The eighth connecting port at the rear of the cavity extension part is used for connecting a vacuum measuring device 16.

[0045] The reserved interface 14 is a standard vacuum flange interface, which can make the vacuum annealing equipment as a part and be connected with other vacuum equipment.

[0046] The vacuum measuring device 16 provides the overall vacuum degree of the cavity. The measurement value can be used to control the start and stop time of the front and rear stage vacuum pumps in the vacuum pumping device 13.

[0047] The driving part 2 is coaxially arranged with the annealing part 4. The axis of the driving part 2 and the axis of the sample transmission part 3 are intersectingly arranged with the axis of the mechanical gripper 11. The axes of the driving part 2, the sample transmission part 3 and the mechanical gripper 11 intersect at a point, as shown in Figure 2 The sample transmission part 3, the mechanical gripper 11 and the driving part 2 are respectively located on the "X, Y, Z axes" of the pick-and-place sample cavity 1 and can do telescopic linear motion. Any two or three telescopic linear motions can intersect at the position A.

[0048] As shown in the accompanying Figure 1 , the accompanying Figure 2 and the accompanying Figure 6As shown, the drive unit 2 includes a support rod 21 with a rotating and lifting structure. The support rod 21 is movably connected to the sample pick-and-place unit 1. A sample holder 22 is provided on the portion of the support rod 21 located inside the sample pick-and-place unit 1. The drive unit 2 includes a base plate 29. A guide rail 24 is provided on the base plate 29. A sliding support 25 is slidably connected to the guide rail 24. A fixing block 27 is fixedly connected to the sliding support 25. A rotary motor 211 is provided on the fixing block 27. The output shaft of the rotary motor 211 is poweredly connected to the support rod 21. A lead screw 26 is threadedly connected to the sliding support 25. The lead screw 26 is arranged parallel to the guide rail 24. A lifting motor 210 for driving the lead screw 26 to rotate is provided on the base plate 29. The base plate 29 is close to the sample pick-and-place unit. One end of the support rod 21 is fixedly connected to a support block 23. The support block 23 is fixedly connected to the sample taking and placing part 1 through a connecting flange. The support rod 21 passes through the connecting flange on one side of the support block 23. A bellows 28 is sleeved on the support rod 21. The bellows 28 is concentrically vacuum-sealed to the support rod 21. The support rod 21 is entirely inside the bellows 28. The bellows 28 has knife-edge connecting flanges at both ends and a retractable corrugated structure in the middle. When the support rod 21 moves upward (or downward), the bellows 28 is compressed (or stretched).

[0049] As attached Figure 1 Appendix Figure 2 and attached Figure 7 As shown, the sample transfer unit 3 includes a cavity 33 fixedly connected to the sample taking and placing unit 1 and a sample transfer rod 31 axially slidably arranged with the sample taking and placing unit 1. The sample transfer rod 31 is slidably connected in the cavity 33. A support bearing assembly 35 for supporting the sample transfer rod 31 is provided at one end of the cavity 33 near the sample taking and placing unit 1. A drive block 34 for driving the sample transfer rod 31 to reciprocate within the cavity 33 is sleeved on the outside of the cavity 33. A sample chamber 32 is provided at one end of the sample transfer rod 31 near the sample taking and placing unit 1.

[0050] In this embodiment, the drive block 34 can move back and forth on the outer wall of the cavity 33, and drive the sample transfer rod 31 to move back and forth through magnetic coupling. The drive block 34 has an embedded iron block that can attract each other with the magnet fixed to the sample transfer rod 31, forming a magnetic coupling structure. Since there is a magnetic attraction between the drive block 34 and the magnet, the movement of the drive block 34 drives the sample transfer rod 31 to move.

[0051] As attached Figure 1 Appendix Figure 2 and attached Figure 5 As shown, the annealing section 4 includes an annealing chamber 41 and a magnet 42. The annealing chamber 41 has a hollow cylindrical structure. A heater 43 is concentrically arranged inside the annealing chamber 41. A vacuum feedthrough 44 and a temperature measurement feedthrough 45 are provided at the end of the annealing chamber 41 away from the sample taking and placing section 1. The magnet 42 is a ring magnet and is sleeved on the outside of the annealing chamber 41. A water-cooling jacket is provided on the outer wall of the annealing chamber 41, and inlet and outlet water ports are connected to the water-cooling jacket.

[0052] In this embodiment, the annealing chamber 41 is cylindrical in shape. A heater 43 is concentrically arranged and fixed inside the chamber. The heater is heated by current fed through a vacuum feedthrough 44, providing the required annealing temperature to the chamber. A magnet 42 is threadedly fixed to the outside of the chamber, with the chamber located at the center of the magnet 42. The magnet 42 provides the required magnetic field inside the annealing chamber 41. A knife-edge flange is provided at the upper end of the annealing chamber 42 to connect the vacuum feedthrough 44 and the temperature measuring feedthrough 45.

[0053] The magnet 42 is a ring structure, which is composed of multiple magnetic blocks with different magnetic field strength directions. The magnetic blocks with different field strength directions are arranged in a "Haelbeck array" to make the magnetic field inside the ring magnet 42 parallel. In addition, the magnet 42 can also be replaced by an electrically induced magnetic field or a superconducting induced magnetic field.

[0054] The annealing chamber 41 has a double-layer structure with an inner and outer layer. The interlayer between the inner and outer layers serves as a water channel. The upper and lower ends of the outer chamber wall have water inlet and outlet ports 411 that are connected to the interlayer water channel. The annealing chamber 41 is cooled by circulating water from both ends, which prevents the chamber from heating up due to the internal heater 43 and the temperature from being conducted to the magnet 42, thus affecting its magnetism.

[0055] The vacuum feedthrough 44 feeds in the heating current under vacuum conditions; the temperature feedthrough 45 connects to a thermocouple to provide real-time feedback of the annealing temperature under vacuum conditions.

[0056] When using this invention, as shown in the appendix Figure 1 Appendix Figure 2 As shown, the process for continuous annealing of multiple samples is as follows:

[0057] The sample transfer unit 3 reciprocates horizontally in the X-axis direction of the sample pick-and-place cavity, the mechanical gripper 11 reciprocates horizontally in the Y-axis direction of the sample pick-and-place cavity, and the drive unit 2 reciprocates vertically in the Z-axis direction of the sample pick-and-place cavity. Any two to three linear reciprocating motions can intersect at position A.

[0058] The sample placement process is as follows: The sample transfer unit 3 extends to the right with the sample to position A and stops. The mechanical gripper 11 moves forward to position A, opens its head claw, approaches the sample, and closes the claw to clamp the sample. After the operator confirms through the observation window 12 that the sample is stably held by the mechanical gripper 11 and will not fall off, the mechanical gripper 11 returns to its initial position with the sample in its grip. The sample transfer unit 3 also returns to its original position to the left. Then, the drive unit 2 rises to position A, the mechanical gripper 11 moves forward to transfer the sample to the drive unit 2, and then the drive unit 2 continues to rise until the sample enters the annealing unit 4.

[0059] The sample annealing process is the reverse of the sample annealing process. The sample annealed in the magnetic field is removed from the annealing cavity 4 by the driving part 2 and transferred to the sample transfer part 3 by the mechanical gripper 11.

[0060] The sample transfer part 3 is provided with a sample bin 32 at the end, which can accommodate multiple samples at a time. After the sample annealing process is completed, it can be stored back to the original position. During the multi-sample magnetic annealing process, the cavity is saved from frequent vacuum breaking and the time for sample taking and placing is saved.

[0061] The driving part 2 is driven by a motor and has the functions of lifting and rotating.

[0062] In a preferred embodiment, as shown in Figs. 1-3, the principle of annealing at different magnetic field angles is as follows: Figure 1 Figure 2 Figure 3 The principle of continuous annealing of multiple samples at different magnetic field angles is as follows:

[0063] The magnet 42 provides a one-way parallel magnetic field inside the annealing cavity 41. The sample is lifted to the inside of the annealing cavity 41 by the support rod 21 on the driving part 2 and remains stable. The sample is completely wrapped in the parallel magnetic field. The support rod 21 on the driving part 2 is driven by a motor and can rotate around its central axis. The angle between the sample and the magnetic field strength direction is defined as the magnetic angle θ. Since the sample can rotate 360° with the support rod 21 on the driving part 2 and stop at any angle position, the magnetic angle can be selected as any angle between 0 and 360°. Although the external magnet 42 does not change, the magnetic angle B changes by changing the angle of the sample relative to the magnetic field.

[0064] In a preferred embodiment, as shown in Figs. 1-3, the principle of annealing at different magnetic field angles is as follows: Figure 1 Figure 2 Figure 3 Figure 4 The principle of continuous annealing of multiple samples at different magnetic field angles is as follows:

[0065] According to the above sample annealing process, a single sample A in the sample bin on the sample transfer part 3 can be removed by the mechanical gripper 11 and placed on the sample holder 22 of the driving part 2. Then the sample is sent into the annealing cavity 41 by the driving part 2, and the magnetic angle θ of the sample A is adjusted to the required angle 1 by rotating the sample A by the driving part 2. Then the heater 43 is heated to complete the annealing in the magnetic field. After annealing, according to the above sample annealing process, the sample A is removed from the annealing part 4 by the driving part 2 and transferred back to the sample bin 32 of the sample transfer part 3 by the mechanical gripper 11, completing the magnetic annealing process of the sample A.

[0066] ​​​​​Sample A can be taken out of sample bin 32 and placed into sample holder 22 on driving part 2 by mechanical gripper 11, and then sample B can be taken out of sample bin 32 and placed into sample holder 22 on driving part 2 by mechanical gripper 11, and then sample B can be sent into annealing cavity 41 by driving part 2, and the magnetic clamping angle θ of sample B can be adjusted to the required angle 2, and after the annealing process is completed, sample B can be taken out of annealing cavity 41 and placed into sample bin 32.

[0067] Similarly, sample 3 in sample bin 32 can be taken out and annealed at the required angle 3 by adjusting the magnetic clamping angle θ. Multiple samples can be annealed at different magnetic field angles without breaking the vacuum during the taking and placing operations.

[0068] It should be particularly noted that the required angles 1, 2, 3 and the magnetic clamping angles θ that can be generated can have the same or different θ values, and only vary with the required magnetic field strength for annealing.

[0069] It is obvious to those skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be considered as limiting the claims to which they relate.

[0070] Furthermore, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the present specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A vacuum magnetic field annealing furnace, comprising a sample taking and placing section (1), characterized in that, The sampling and placement section (1) is a hollow shell structure. The sampling and placement section (1) is connected to the external drive section (2), sample transfer section (3), and annealing section (4). The drive unit (2) includes a support rod (21) with a rotating lifting structure. The support rod (21) is movably connected to the sample taking and placing unit (1). The portion of the support rod (21) located inside the sample taking and placing unit (1) is provided with a sample holder (22). The sample transfer unit (3) includes a sample transfer rod (31) that is axially slidably arranged with the sample taking and placing unit (1), and a sample chamber (32) is provided at one end of the sample transfer rod (31) near the sample taking and placing unit (1); The annealing section (4) includes an annealing cavity (41) and a magnet (42).

2. The vacuum magnetic field annealing furnace according to claim 1, characterized in that, A mechanical gripper (11) is provided on one side of the sample taking and placing part (1). The driving part (2) and the annealing part (4) are arranged coaxially. The axis of the driving part (2) and the axis of the sample transfer part (3) are arranged to intersect with the axis of the mechanical gripper (11). The axis of the driving part (2), the axis of the sample transfer part (3) and the axis of the mechanical gripper (11) intersect at one point.

3. The vacuum magnetic field annealing furnace according to claim 2, characterized in that, The sample taking and placing part (1) includes a main cylindrical hollow shell, the driving part (2) and the annealing part (4) are connected to the two ends of the main cylindrical hollow shell through flanges, the mechanical gripper (11) is located on the side of the main cylindrical hollow shell, a secondary cylindrical hollow shell is vertically arranged on one side of the main cylindrical hollow shell, and the sample transfer part (3) is connected to the end of the secondary cylindrical hollow shell.

4. A vacuum magnetic field annealing furnace according to claim 3, characterized in that, The main cylindrical hollow shell is also provided with an observation window (12) and a reserved interface (14) on its side wall. The main cylindrical hollow shell or the secondary cylindrical hollow shell is provided with a vacuum pumping device (13), a quick-opening door (15), and a vacuum measuring device (16) on its side wall.

5. A vacuum magnetic field annealing furnace according to claim 2, characterized in that, The mechanical gripper (11) includes a gripper bar that reciprocates linearly with the sample pick-and-place section (1), and the gripper is located at one end of the gripper bar near the sample pick-and-place section (1).

6. A vacuum magnetic field annealing furnace according to claim 1, characterized in that, The drive unit (2) includes a base plate (29), a guide rail (24) is provided on the base plate (29), a sliding support (25) is slidably connected on the guide rail (24), a fixing block (27) is fixedly connected on the sliding support (25), a rotary motor (211) is provided on the fixing block (27), and the output shaft of the rotary motor (211) is poweredly connected to the support rod (21).

7. A vacuum magnetic field annealing furnace according to claim 6, characterized in that, The sliding support (25) is threadedly connected to a lead screw (26), which is arranged parallel to the guide rail (24). The base plate (29) is provided with a lifting motor (210) for driving the lead screw (26) to rotate.

8. A vacuum magnetic field annealing furnace according to claim 6, characterized in that, A support block (23) is fixedly connected to one end of the base plate (29) near the sampling section (1). The support block (23) is fixedly connected to the sampling section (1) through a connecting flange. The support rod (21) passes through the connecting flange on one side of the support block (23). A corrugated pipe (28) is sleeved on the support rod (21).

9. A vacuum magnetic field annealing furnace according to claim 1, characterized in that, The sample transfer unit (3) includes a cavity (33) fixedly connected to the sample taking and placing unit (1), and the sample transfer rod (31) is slidably connected in the cavity (33). A support bearing assembly (35) for supporting the sample transfer rod (31) is provided at one end of the cavity (33) near the sample taking and placing unit (1). A drive block (34) for driving the sample transfer rod (31) to reciprocate in the cavity (33) is sleeved on the outside of the cavity (33).

10. A vacuum magnetic field annealing furnace according to claim 1, characterized in that, The annealing chamber (41) has a hollow cylindrical structure. A heater (43) is concentrically arranged inside the annealing chamber (41). A vacuum feedthrough (44) and a temperature measurement feedthrough (45) are provided at one end of the annealing chamber (41) away from the sample taking and placing part (1). The magnet (42) is a ring magnet and is sleeved on the outside of the annealing chamber (41). The outer wall of the annealing chamber (41) is provided with a water-cooled jacket, and the water-cooled jacket is connected to an inlet and outlet.

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