Multi-degree-of-freedom compound motion magnetron device for magnetron sputtering equipment

Abstract

This application discloses a multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment, including a driving gear, a rotary drive mechanism, a magnet mounting frame, and at least two driven gears. These constitute an eccentric meshing transmission structure. After the rotary drive mechanism drives the driving gear to rotate, the driven gears mesh synchronously with the driving gear and the magnet mounting frame. Combined with the eccentric setting of the rotation center of the driving gear and the center of the magnet mounting frame, the magnet mounting frame can simultaneously rotate and eccentrically rotate. The rotation of the magnet mounting frame can dynamically adjust the magnetic field distribution rhythm, weaken the difference in magnetic field strength and scanning frequency between the center and edge of the target surface, and avoid local over-etching. At the same time, the eccentric rotation can break the limitation of a fixed circular trajectory, allowing the magnetic field to extend to the edge of the target material and the eccentric area, thereby effectively covering the weak central magnetic field area and the unscanned edge area.

Description

Technical Field

[0001] This application relates to the field of wafer manufacturing equipment technology, and in particular to a multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment. Background Technology

[0002] Magnetron sputtering technology is widely used in semiconductors, optical coatings, and other fields. Its core principle is to constrain the movement path of electrons through a magnetic field, thereby extending the collision time between electrons and gas molecules, increasing plasma density, and ultimately improving the sputtering efficiency of the target material. However, the planar magnet structure (such as a single-axis rotating magnet) in traditional magnetron sputtering equipment has many inherent defects, which seriously restrict the process quality and resource utilization.

[0003] First, there is the problem of uneven etching of the target material. Traditional magnets mostly rotate around a fixed center, and the trajectory is a regular circle. This results in a significant difference in the magnetic field strength and scanning frequency between the center and edge areas of the target surface, which can easily form a "racetrack effect" of local over-etching, directly affecting the uniformity of the coating layer.

[0004] Secondly, the target material utilization rate is low. Due to the limited coverage of the fixed magnetic field, the effective etching area of ​​the target surface accounts for only 20%-30%, and a large number of target materials in the edge and non-scanning areas cannot be effectively utilized.

[0005] In addition, the area corresponding to the center of the magnet often forms an incompletely etched "dead zone" due to the weak magnetic field strength and insufficient plasma density, which further reduces the utilization rate of the target material.

[0006] While existing improvement schemes attempt to expand the scanning range of the magnetic field, they still suffer from problems such as high repeatability of motion trajectories, inability to cover off-center areas, poor adjustment flexibility, and difficulty in adapting to the magnetic field distribution requirements of different processes. Summary of the Invention

[0007] The purpose of this application is to overcome the shortcomings of the prior art and provide a multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment.

[0008] This application provides a multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment, comprising: a driving gear and a rotary drive mechanism, the rotary drive mechanism being used to drive the driving gear to rotate; a magnet mounting frame for mounting magnets, the magnet mounting frame being arranged in a ring shape, with a ring of teeth on its inner ring surface, the driving gear being disposed in the inner ring cavity of the magnet mounting frame; at least two driven gears being disposed between the driving gear and the magnet mounting frame, and simultaneously meshing with the driving gear and the magnet mounting frame; wherein, the rotation center of the driving gear is offset from the center of the magnet mounting frame, and the magnet mounting frame is capable of simultaneously performing rotational and eccentric rotational motions under the drive of the driving gear and the driven gear.

[0009] Furthermore, there are three driven gears; of the three driven gears, two are of the same specification, and the third is of a different specification from the other two, and the three driven gears are distributed in an isosceles triangle.

[0010] Furthermore, the magnet mounting bracket is equipped with multiple magnets, which are irregularly and asymmetrically distributed.

[0011] Furthermore, the multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment also includes: a gear mounting plate, on which both the driving gear and the driven gear are rotatably mounted; and a translation drive mechanism for driving the gear mounting plate to reciprocate along a linear direction, thereby driving the driving gear, the driven gear, and the magnet mounting frame.

[0012] Furthermore, the translation drive mechanism includes: a slide plate connected to a gear mounting plate, the slide plate having a radially extending groove; a first rotating shaft rotatably mounted on the slide plate; a fixed shaft located on one side of the first rotating shaft and situated within the groove; a first connecting rod mounted on the first rotating shaft; and a second connecting rod mounted on the fixed shaft, the first connecting rod and the second connecting rod being hinged together. When the first rotating shaft rotates, it can drive the first connecting rod and the second connecting rod to swing, thereby driving the slide plate and the gear mounting plate to reciprocate and translate along the extension direction of the groove to move closer to or further away from the fixed shaft.

[0013] Furthermore, the installation position of the skateboard is determined based on the target radius, the effective working radius of the magnet mounting frame, the eccentricity, and the translational stroke, so that the effective working boundary of the magnet mounting frame when it moves to the limit position is close to the edge of the target.

[0014] Furthermore, the effective length of the chute is adjustable to adjust the translational stroke of the magnet mounting bracket.

[0015] Furthermore, the position of the fixed axis is adjustable to adjust the translation direction of the magnet mounting bracket.

[0016] Furthermore, the rotary drive mechanism includes a second rotating shaft, on which a drive gear is mounted; a first linkage gear is mounted on the first rotating shaft, and a second linkage gear is mounted on the second rotating shaft. The first linkage gear meshes with the second linkage gear, and through gear transmission, the rotation of the drive gear and the translation of the gear mounting plate can be realized simultaneously.

[0017] Furthermore, the first linkage gear and the second linkage gear constitute a gear transmission assembly, and the first connecting rod and the second connecting rod constitute a connecting rod transmission assembly; the gear transmission assembly and the connecting rod transmission assembly are arranged axially offset to avoid interference between the first connecting rod and the second connecting rod and the second rotating shaft during movement.

[0018] Furthermore, the gear mounting plate has an internal gear groove at its center, and the second rotating shaft passes through the internal gear groove and is connected to the driving gear; the second rotating shaft also has a third linkage gear, which meshes with the internal gear groove, so that the gear mounting plate can rotate around the second rotating shaft.

[0019] Furthermore, the transmission ratio between the third linkage gear and the internal gear slot is adjustable to change the rotational speed of the gear mounting plate.

[0020] This application provides a multi-degree-of-freedom composite motion magnetron sputtering device, comprising a drive gear, a rotary drive mechanism, a magnet mounting frame, and at least two driven gears. These constitute an eccentric meshing transmission structure. After the rotary drive mechanism drives the drive gear to rotate, the driven gears mesh synchronously with the drive gear and the magnet mounting frame. Combined with the eccentric setting of the rotation center of the drive gear and the center of the magnet mounting frame, the magnet mounting frame simultaneously rotates and rotates eccentrically. The rotation of the magnet mounting frame can dynamically adjust the magnetic field distribution rhythm, weaken the difference in magnetic field strength and scanning frequency between the center and edge of the target surface, and avoid local over-etching. At the same time, the eccentric rotation can break the limitations of a fixed circular trajectory, allowing the magnetic field to extend to the edge of the target material and the eccentric area, thereby effectively covering the weak area of ​​the central magnetic field and the unscanned area at the edge. The meshing of at least two driven gears ensures the stability and determinism of the motion, while avoiding problems such as jamming and severe stress in single-gear transmission. The non-repetitive magnetic field trajectory formed by the superposition of the two rotations can solve the defects of single trajectory and high overlap rate in existing improved solutions, fundamentally optimizing etching uniformity and target utilization. Attached Figure Description

[0021] Figure 1 A front structural schematic diagram of a multi-degree-of-freedom composite motion magnetron control device for magnetron sputtering equipment provided in this application;

[0022] Figure 2 for Figure 1 A schematic diagram of the back structure of a multi-degree-of-freedom composite motion magnetron control device for magnetron sputtering equipment is shown.

[0023] Figure 3 for Figure 2 The diagram shown is a structural schematic of a multi-degree-of-freedom composite motion magnetron sputtering device, omitting the first and second links.

[0024] Figure 4 for Figure 3 The diagram shows the structure of the magnetron sputtering equipment after the multi-degree-of-freedom composite motion magnetron control device has been translated along the slide.

[0025] Figure 5 for Figure 1 The diagram shows a three-dimensional structure of the multi-degree-of-freedom composite motion magnetron sputtering device from another angle. Detailed Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0027] This application provides a multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment, comprising: a driving gear 1 and a rotary drive mechanism, the rotary drive mechanism being used to drive the driving gear 1 to rotate; a magnet mounting frame 3 for mounting magnets, the magnet mounting frame 3 being arranged in a ring shape, with a ring of teeth on its inner ring surface, the driving gear 1 being disposed in the inner ring cavity of the magnet mounting frame 3; at least two driven gears 2 being disposed between the driving gear 1 and the magnet mounting frame 3, and simultaneously meshing with the driving gear 1 and the magnet mounting frame 3; wherein, the rotation center of the driving gear 1 is offset from the center of the magnet mounting frame 3, and the magnet mounting frame 3 is able to simultaneously perform rotational and eccentric rotational motions under the drive of the driving gear 1 and the driven gears 2.

[0028] For details, please refer to Figure 1 In the illustrated embodiment, the driving gear 1, driven gear 2, and magnet mounting frame 3 are arranged in a coaxial nested structure, forming a typical planetary gear spatial layout. The magnet mounting frame 3, as a ring-shaped internal gear ring, is horizontally arranged, with continuous and uniform teeth machined on its inner ring surface. It is the outer peripheral output component of the entire transmission system and also the supporting base for the magnet. The driving gear 1 corresponds to the sun gear in the planetary gear mechanism, located in the inner ring cavity of the magnet mounting frame 3. Its axis has a preset eccentricity with the center of the magnet mounting frame 3 (i.e., the rotation center of the driving gear 1 deviates from the center of the magnet mounting frame 3), and it is the core of the system's power input. The driven gears 2 correspond to the planetary gears in the planetary gear mechanism, totaling three, and are spaced apart within the annular gap between the driving gear 1 and the magnet mounting frame 3, forming a stable triangular arrangement. This ensures both spatial symmetry and the mechanical stability of subsequent transmission.

[0029] It needs to be explained that a single driven gear 2 cannot maintain stable meshing with both the driving gear 1 and the magnet mounting bracket 3 simultaneously. During rotation, the backlash and errors in the gear meshing can cause the mechanism to jam, or the motion to become unstable and unpredictable, making it impossible to achieve the complex and smooth trajectory required by the design. A single driven gear 2 also cannot provide sufficient constraint to stabilize the entire planetary gear system, causing the system to become a statically indeterminate structure or have zero degrees of freedom, rendering it unable to move. Furthermore, with only a single driven gear 2, all the transmission and reaction forces are concentrated on this single driven gear 2, leading to a sharp acceleration of wear, a shortened lifespan, and even tooth breakage failure.

[0030] Therefore, at least two driven gears 2 are needed to share the load and maintain the stability and motion determinism of the entire planetary gear mechanism.

[0031] In other embodiments, only two passive gears 2 (distributed symmetrically in the radial direction) may be provided, or four or more passive gears 2 (distributed at equal intervals) may be provided.

[0032] The driving gear 1, the driven gear 2, and the magnet mounting bracket 3 achieve transmission through gear meshing. (Continue referring to...) Figure 1 Both the driving gear 1 and the driven gear 2 are external gears, with the driving gear 1 meshing with each of the driven gears 2 one by one. Simultaneously, each driven gear 2 meshes with the teeth on the inner ring surface of the magnet mounting frame 3, forming a two-stage meshing transmission chain: "driving gear 1 → driven gear 2 → magnet mounting frame 3". The rotation center of the driving gear 1 is located below the center of the magnet mounting frame 3, with an eccentricity between them. The three driven gears 2 are radially constrained by the gear mounting plate 4, allowing the driven gears 2 to drive the magnet mounting frame 3 to simultaneously generate both rotational and eccentric rotational motions while rotating around their own axes.

[0033] In use, the permanent magnet is placed on the magnet mounting bracket 3, which is positioned above the target material. The rotary drive mechanism (such as a rotary cylinder, motor, etc.) is activated, causing the drive gear 1 to rotate at high speed around its own axis. The drive gear 1 drives the three passive gears 2 to rotate synchronously through tooth meshing. The passive gears 2 drive the magnet mounting bracket 3 to rotate through tooth meshing and to rotate eccentrically around the drive gear 1.

[0034] It needs to be explained that eccentric rotation refers to the circular motion of the center of the magnet mounting bracket 3 around the rotation center of the drive gear 1. Its function is to overcome the limitations of magnetic field coverage in traditional fixed-center rotation. The magnetic field trajectory of a traditional single-axis rotating magnet is a fixed circle, which can only cover the central area of ​​the target material, resulting in a large amount of target material at the edge being idle and forming a "dead zone". However, the eccentric revolution of the magnet mounting bracket 3 can drive the magnet on it to scan along the eccentric trajectory, so that the magnetic field range extends to the edge of the target material. In actual equipment, by adjusting the eccentric distance, it can also target areas that cannot be reached by traditional structures, effectively reducing the unetched area at the edge of the target material, reducing the "dead zone" area, and improving the utilization rate of the target material.

[0035] The purpose of rotation is to optimize the uniformity of the magnetic field scanning on the target surface. It's easy to understand that if only eccentric revolution exists, the polarity of the magnets on the magnet mount 3 will always face a fixed direction, easily creating directional differences in magnetic field strength on the target surface, and potentially leaving behind the "racetrack effect" of localized over-etching. Adding rotation allows the polarity of the magnets to continuously change with rotation, making the frequency of the magnetic field action at each point on the target surface more consistent, reducing the etching rate differences caused by the directional distribution of the magnetic field, and disrupting the fixed distribution pattern of the magnetic field, thus improving the uniformity of the coating thickness.

[0036] When eccentric rotation and rotation occur simultaneously, their trajectories form an asymmetrical and non-repetitive superposition effect. At this time, each magnet on the magnet mounting bracket 3 will leave a complex curved trajectory on the target surface that combines the orbital trajectory and the rotational offset, completely breaking the repetitiveness of the trajectory of traditional single-axis rotation or simple planetary motion.

[0037] This allows the magnet to perform complex trajectories and composite movements. On the one hand, it can expand the coverage of the magnetic field, covering most of the target surface from the center to the edge, and increase the effective etching ratio of the target material. On the other hand, it can make the magnetic field scanning frequency and intensity distribution in each area of ​​the target surface more uniform, completely eliminating the "runway effect" and edge "dead zones", and significantly improving the uniformity and consistency of the coating layer.

[0038] Taking the silicon dioxide optical coating process of a 4-inch silicon wafer as an example, the process is carried out using a magnetron sputtering device containing the magnetron device provided in this application.

[0039] Specifically, a high-purity silicon target with a diameter of 100mm is selected as the target material, and the outer diameter of the magnet mounting frame 3 is 80mm. The driving gear 1 (sun gear) has 20 teeth and is located in the inner ring cavity of the magnet mounting frame 3, with a 15mm eccentricity between the rotation center of the driving gear 1 and the center of the magnet mounting frame 3. Three evenly distributed driven gears 2 are provided between the driving gear 1 and the magnet mounting frame 3, and the driven gears 2 mesh with both the driving gear 1 and the magnet mounting frame 3. Six neodymium iron boron permanent magnets are irregularly arranged along the circumference of the magnet mounting frame 3 to form a dynamic magnetic field gradient.

[0040] After the coating process is started, the rotary drive mechanism (using a motor) drives the drive gear 1 to rotate around its own axis at a speed of 150 r / min. Since the drive gear 1 meshes with the inner ring teeth of the magnet mounting frame 3 through the driven gear 2, and the drive gear 1 has an eccentric setting, under the synergistic effect of gear transmission, the magnet mounting frame 3 simultaneously generates two compound rotational motions. One is an eccentric rotation around the rotation center of the drive gear 1 at a speed of about 30 r / min, that is, the geometric center of the magnet mounting frame 3 makes a circular motion around the rotation center of the drive gear 1 with a radius of 15 mm. The other is a rotation around its own center at a speed of about 25 r / min, which drives the magnets on it to continuously change the polarity orientation.

[0041] The rotation of the magnet mounting bracket 3 can dynamically adjust the magnetic field scanning rhythm of each area of ​​the target surface, weaken the difference in magnetic field strength between the target center and the edge, reduce the depth difference of local over-etching, and significantly improve the uniformity of the coating layer. In response to the problem of low target utilization, the eccentric rotation breaks the limitation of the fixed circular trajectory, driving the magnet to extend to the edge and weak central area of ​​the target, which can effectively expand the effective coverage of the magnetic field, thereby eliminating the unetched "dead zone" formed in the center and edge of the target due to the weak magnetic field.

[0042] In summary, in the multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment provided in this application, the driving gear 1, at least two driven gears 2, and the annular magnet mounting frame 3 with inner ring teeth constitute an eccentric meshing transmission structure. After the rotary drive mechanism drives the driving gear 1 to rotate, the driven gears 2 mesh synchronously with the driving gear 1 and the magnet mounting frame 3. Combined with the eccentric setting of the rotation center of the driving gear 1 and the center of the magnet mounting frame 3, the magnet mounting frame 3 can simultaneously rotate and eccentrically rotate. The rotation of the magnet mounting frame 3 can dynamically adjust the rhythm of the magnetic field distribution, weakening the magnetic field distribution between the target center and the magnetic field. The difference in magnetic field strength and scanning frequency at the edge avoids local over-etching; at the same time, the eccentric rotation can break the limitation of the fixed circular trajectory, allowing the magnetic field to extend to the edge of the target and the eccentric area, thereby effectively covering the weak central magnetic field area and the unscanned edge area; the meshing of at least two passive gears 2 ensures the stability and determinism of the motion, while avoiding the jamming and severe stress problems of single gear transmission; the non-repetitive magnetic field trajectory formed by the superposition of the two rotations solves the defects of the existing improved schemes of single trajectory and high overlap rate, fundamentally optimizing the etching uniformity and target utilization rate.

[0043] In one specific embodiment, the number of passive gears 2 is three, and the three passive gears 2 are arranged in a triangular pattern.

[0044] From the perspective of motion determinism, the coaxial nested gear system of this application belongs to the planetary gear mechanism. The driving gear 1 is the sun gear, the magnet mounting bracket 3 is the internal gear ring, and the driven gear 2 is the planet gear. At this time, the mechanism needs to meet the condition of 1 degree of freedom in order to achieve stable transmission.

[0045] The three passive gears 2 can precisely balance the transmission relationship between the active gear 1 and the magnet mounting frame 3 through evenly distributed meshing constraints, avoiding motion distortion caused by meshing backlash or assembly errors, and ensuring that the magnet mounting frame 3 can simultaneously complete the composite motion of rotation and eccentric rotation, completely avoiding motion jamming and trajectory disorder that may occur with a single or two passive gears 2.

[0046] From the perspective of mechanical balance and stability, a triangle is the most stable geometric shape. When the three driven gears 2 are distributed in a triangular pattern, the torque transmitted by the driving gear 1 and the reaction force of the magnet mounting bracket 3 can be evenly distributed to the three meshing points. This distribution method ensures that the gear system experiences completely symmetrical forces during operation, thereby offsetting the radial load generated by eccentric transmission, preventing the magnet mounting bracket 3 from wobbling, tilting, or rubbing against other components, and thus improving the stability of the device under high speed and long-term operation.

[0047] Furthermore, the three driven gears 2 can share the load during transmission, reducing the force on each gear by approximately 30% compared to two driven gears 2, which helps reduce the wear rate of the gear teeth and the risk of fatigue damage. At the same time, the multi-point meshing support structure formed by the triangular distribution can enhance the overall rigidity of the gear system, reduce elastic deformation during transmission, extend the service life of key components such as gears and bearings, and better meet the industrial requirements of continuous operation in magnetron sputtering processes.

[0048] Optionally, of the three driven gears 2, two driven gears 2 have the same specifications, and the other one has different specifications from the other two, and the three driven gears 2 are distributed in an isosceles triangle.

[0049] For details, please refer to Figure 1 In the illustrated embodiment, all three driven gears 2 are external meshing spur gears. The two driven gears 2 located at the bottom have the same key parameters such as module, number of teeth, and tip circle diameter, and belong to the same specification gears; the above-mentioned specifications of the third driven gear 2 located at the top are clearly different from the former two.

[0050] Continue to refer to Figure 1 Three driven gears 2 are arranged in an isosceles triangle within the annular gap between the driving gear 1 and the magnet mounting bracket 3. Two identical driven gears 2 are located at the two ends of the base of the isosceles triangle; the third driven gear 2 of a different specification is located at the vertex of the isosceles triangle, forming a symmetrical angle with the two identical gears at the base. Simultaneously, all three driven gears 2 are rotatably mounted on the gear mounting plate 4 via bearings, and always maintain a double meshing state with the driving gear 1 and the magnet mounting bracket 3, forming a complete transmission closed loop.

[0051] This configuration enables the construction of asymmetrical and nonlinear motion trajectories, thus overcoming the limitations of traditional trajectories. Specifically, due to the different specifications of the three passive gears 2, their meshing transmission ratios with the driving gear 1 and the magnet mounting frame 3 are different, resulting in slight differences in the rotational speed and revolution rhythm of each passive gear 2. These differences, transmitted to the magnet mounting frame 3 through meshing, disrupt the regular trajectory formed by symmetrical gear transmissions, causing the rotation and eccentric rotation of the magnet mounting frame 3 to form a non-periodic superposition. At this point, the motion trajectory of the magnet mounting frame 3 is no longer a simple circular or near-circular trajectory, but a complex and non-repeatable curved trajectory. This trajectory can precisely cover the "dead zones" on the target material that are difficult to reach with traditional structures, fundamentally reducing the localized over-etching caused by the "racetrack effect"—an effect that a single gear or two symmetrical gears cannot achieve.

[0052] Meanwhile, the isosceles triangle is the optimal geometric shape that combines stability and asymmetry. On the one hand, the natural rigidity of the triangle ensures that the three passive gears 2 maintain a stable meshing position during high-speed transmission, avoiding the swaying or tilting of the magnet mounting bracket 3 caused by radial off-center load due to eccentric motion, thus solving the problem of force imbalance that may be caused by asymmetrical gears. On the other hand, the isosceles layout, through the symmetrical support of the two gears of the same specification at the base, can provide a stable foundation for the trajectory disturbance of gears of different specifications at the vertices, so that complex motion can be flexibly changed without falling into disorder or jamming, which is more suitable for the long-term continuous operation requirements of magnetron sputtering process.

[0053] Although the layout and specifications of the three driven gears 2 are asymmetrical, their isosceles distribution still effectively distributes the load. The torque transmitted by the driving gear 1 and the reaction force of the magnet mounting bracket 3 are evenly distributed to the three meshing points. Even if the gears at the apex have different specifications, the load they bear is only about 1 / 3 of that of a single gear transmission, significantly reducing the wear rate of the teeth and the risk of fatigue damage. At the same time, the multi-point support structure of double meshing reduces the contact stress of individual gears, avoiding failure problems such as tooth breakage and tooth surface spalling, and helping to improve the durability of the device.

[0054] Optionally, the magnet mounting bracket 3 is provided with multiple magnets, which are irregularly and asymmetrically distributed.

[0055] Traditional symmetrically distributed magnets tend to form a magnetic field with a fixed intensity gradient, leading to an over-etching "racetrack effect" on the target surface along a fixed trajectory. However, the irregular and asymmetrical distribution makes the position of the magnetic field source on the magnet mounting bracket 3 unpredictable. Combined with the rotation and eccentric rotation of the magnet mounting bracket 3, a dynamically changing magnetic field intensity distribution can be formed on the target surface, avoiding over-etching in local areas due to continuous magnetic field concentration.

[0056] Meanwhile, the "dead zones" such as the center and edges of the target material, which are difficult to reach by traditional symmetrical magnetic fields, can be supplemented by targeted magnetic fields through asymmetrically distributed magnets. The magnetic fields formed by magnets in different positions during movement can superimpose and compensate each other, so that the originally weak magnetic field areas on the target surface can obtain effective magnetic field coverage, thereby significantly reducing the area of ​​unetched areas and improving the effective utilization rate of the target material.

[0057] Asymmetrically distributed magnets can also generate non-uniform magnetic fields, thereby lengthening the path of electrons near the target surface, increasing the collision frequency between electrons and gas molecules, and making the plasma density distribution more uniform. At the same time, the randomly varying magnetic field can prevent plasma from accumulating along a fixed path, which helps to reduce the thickness difference of the coating layer.

[0058] The rotation and eccentric rotation of the magnet mount 3 can already form complex motion trajectories, and the asymmetrically distributed magnets can further increase the diversity and non-repetitiveness of the magnetic field trajectory. Even if the motion trajectory of the magnet mount 3 overlaps locally, the magnetic field generated by the magnets at different positions can still form a differentiated effect, ensuring that the etching intensity of each area of ​​the target surface is consistent.

[0059] In one specific embodiment, one of the three passive gears 2 has a different specification from the other two gears. The asymmetrical gear drive can achieve a complex motion trajectory. Furthermore, in conjunction with the irregular magnet arrangement on the magnet mounting bracket 3, a dynamically changing magnetic field intensity gradient can be formed on the target surface.

[0060] In this embodiment, the alternating strength of the magnetic field at different locations can prolong the movement path of electrons on the target surface, increase the uniformity of plasma density, and change the target etching from local concentration to full coverage, ultimately achieving the dual technical effects of improving target utilization and optimizing the uniformity of coating thickness.

[0061] In another specific embodiment, a ring-shaped magnet mounting bracket 3 with a diameter of 80 mm is provided with six NdFeB permanent magnets of the same size (20 mm long, 8 mm wide, and 5 mm thick). These magnets are distributed at intervals along the annular surface of the magnet mounting bracket 3, with at least some magnets having different distances from the center. The central angles between adjacent magnets are 40°, 55°, 30°, 65°, 45°, and 125°, respectively. The polarity orientation of the six magnets is asymmetrical, with the N poles of the first, third, and sixth magnets facing the center of the target material, and the S poles of the second, fourth, and fifth magnets facing the center of the target material. In the combined motion of the magnet mounting bracket 3's rotation (25 r / min) and eccentric rotation (30 r / min), the magnetic field generated by the six magnets forms a non-repeating dynamic scanning trajectory on the target surface, which can accurately cover the center and edge areas of the 100 mm diameter silicon target. Combined with the gear-driven combined motion, the etching uniformity error of the target material can be controlled within ±1.2%.

[0062] Optionally, the multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment provided in this application further includes: a gear mounting plate 4, on which both the driving gear 1 and the driven gear 2 are rotatably mounted; and a translation drive mechanism for driving the gear mounting plate 4 to drive the driving gear 1, the driven gear 2 and the magnet mounting frame 3 to reciprocate in a linear direction.

[0063] For details, please refer to Figures 2 to 4 In the illustrated embodiment, the gear mounting plate 4 serves as a load-bearing base, providing stable mounting and movement support for the driving gear 1 and the driven gear 2. Both the driving gear 1 and the driven gear 2 are rotatably mounted on the front side (facing the target material) of the gear mounting plate 4 via bearings. The back side of the gear mounting plate 4 is connected to a translation drive mechanism, which can be any linear drive structure such as a pneumatic cylinder or an electric cylinder. When the translation drive mechanism is activated, it drives the gear mounting plate 4 to move the driving gear 1, driven gear 2, and magnet mounting frame 3 as a whole in a translational manner. The meshing transmission relationship and rotational / revolutionary motion of the driving gear 1, driven gear 2, and magnet mounting frame 3 are unaffected by the translation, maintaining stable power transmission at all times.

[0064] It is easy to understand that although the eccentric rotation of the magnet mounting bracket 3 can expand the magnetic field coverage, it is still limited by the fixed eccentricity between the driving gear 1 and the magnet mounting bracket 3, and often cannot reach the extreme areas of the target edge. However, the linear reciprocating motion can make the entire planetary gear mechanism translate along a preset direction, pushing the eccentric rotation trajectory towards the edge of the target.

[0065] In practical applications, for targets of different diameters, there is no need to replace the core components. Simply by adjusting the stroke of the translation drive mechanism, the reciprocating range of the magnet mounting bracket 3 can be changed, allowing the magnetic field coverage to precisely match the target size. Compared to a fixed structure, this adjustability significantly improves the device's adaptability to different sputtering processes.

[0066] Furthermore, the composite motion of the magnet mounting bracket 3, involving rotation, eccentric rotation, and linear reciprocating motion, creates a complex curve on the target surface where rotational trajectories are superimposed with linear displacements, completely eliminating the trajectory repetition problem that may occur with single rotational motion. Even if there is local overlap in the eccentric rotational trajectories, the linear reciprocating motion will make the magnetic field scanning frequency in the overlapping areas tend to be consistent, avoiding local over-etching caused by trajectory overlap and further optimizing etching uniformity.

[0067] To optimize the spatial layout, in one specific embodiment, the translation drive mechanism includes: a slide plate 31 connected to the gear mounting plate 4, the slide plate 31 having a radially extending groove; a first rotating shaft 32 rotatably mounted on the slide plate 31; a fixed shaft 33 located on one side of the first rotating shaft 32 and situated in the groove; a first connecting rod 34 mounted on the first rotating shaft 32; and a second connecting rod 35 mounted on the fixed shaft 33, the first connecting rod 34 and the second connecting rod 35 being hinged together. When the first rotating shaft 32 rotates, it can drive the first connecting rod 34 and the second connecting rod 35 to swing, thereby driving the slide plate 31 and the gear mounting plate 4 to reciprocate and translate along the extension direction of the groove, moving closer to or away from the fixed shaft 33.

[0068] For details, please refer to Figure 2 and Figure 3 In the illustrated embodiment, the slide plate 31 is a long strip-shaped plate structure with rounded ends. The slide plate 31 is horizontally arranged above the back of the gear mounting plate 4 and connected to the gear mounting plate 4 (in the figure, the slide plate 31 is connected to the gear mounting plate 4 through the second rotating shaft 36). The slide plate 31 is provided with an oblong groove extending along its length direction. The groove extends radially relative to the rotation center of the drive gear 1 and penetrates through the thickness direction of the slide plate 31 to provide a guide path for translational motion.

[0069] Combined with reference Figure 5 The first rotating shaft 32 is a cylindrical drive shaft. The first rotating shaft 32 is perpendicular to the surface of the slide plate 31 and is rotatably mounted on the slide plate 31 through bearings. The upper end of the first rotating shaft 32 extends to the outside of the slide plate 31 and is linked with the drive source (such as a rotary cylinder, motor, etc.). The first connecting rod 34 is sleeved on the first rotating shaft 32.

[0070] Continue to refer to Figure 5 The fixed shaft 33 is a fixed fulcrum component. It is vertically fixed to the equipment frame (for example, the magnetic control device provided in this application is installed above the target material and outside the process cavity; a dust cover is often installed on the top of the cavity corresponding to the target material, and the fixed shaft 33 can be fixedly connected to the dust cover), and slidably disposed within the slide groove. The fixed shaft 33 is located on one side of the first rotating shaft 32, maintaining a parallel and spaced relative position to the first rotating shaft 32. The fixed shaft 33 does not move with the movement of the slide plate 31.

[0071] Continue to refer to Figure 2 and Figure 5 Both the first connecting rod 34 and the second connecting rod 35 are elongated strip-shaped plate structures with rounded ends, and their lengths are designed to meet transmission requirements. One end of the first connecting rod 34 is fixedly connected to the first rotating shaft 32 by a flat key or set screw, and can rotate synchronously with the first rotating shaft 32; one end of the second connecting rod 35 is rotatably sleeved on the fixed shaft 33 by a bearing; the other ends of the two connecting rods are hinged by a pin, forming a foldable and swingable transmission connecting rod assembly.

[0072] The components of the translation drive mechanism work together to form a crank-connecting rod structure, and the motion accuracy is ensured by the guiding constraints of the slide groove and the fixed shaft 33.

[0073] Specifically, when the first rotating shaft 32 rotates around its own axis under the action of the drive source, it will drive the first connecting rod 34 connected to it to swing in a circle with the axis of the first rotating shaft 32 as the center; the swing of the first connecting rod 34 is transmitted to the second connecting rod 35 through the hinge point, so that the second connecting rod 35 swings synchronously with the axis of the fixed shaft 33 as the center; at this time, the included angle between the two connecting rods will continue to change with the rotation.

[0074] Since the fixed shaft 33 is stationary and passes through the slide groove, the limiting effect of the slide groove and the fixed shaft 33 can constrain the swing motion of the connecting rod to the linear motion of the slide plate 31 along the radial direction of the slide groove; when the included angle of the two connecting rods changes, it will generate a pulling or pushing force on the slide plate 31 along the extension direction of the slide groove, ultimately realizing the reciprocating translation of the slide plate 31 driving the gear mounting plate 4 and the planetary gear mechanism on it to move closer to or away from the fixed shaft 33. Figure 3 This represents the farthest limit position of the planetary gear mechanism away from the fixed shaft 33. Figure 4 (This refers to the closest extreme position of the planetary gear mechanism near the fixed shaft 33).

[0075] Compared to linear drive structures such as cylinders and electric cylinders, which require separate axial or radial space, the crank-connecting rod structure can integrate the drive components and load-bearing components on the back of the gear mounting plate 4 through a compact "rotation-oscillation-translation" conversion, without the need to additionally expand the horizontal volume of the equipment.

[0076] Specifically, the installation position of the slide plate 31 is determined based on the target radius, the effective working radius of the magnet mounting frame 3, the eccentricity, and the translational stroke, so that the effective working boundary of the magnet mounting frame 3 when it moves to the limit position is close to the edge of the target.

[0077] It is easy to understand that the installation position of the slide plate 31 directly determines the starting reference for the movement of the magnet mounting bracket 3 and the magnet on it. Whether the magnet can scan the maximum range of the target material is essentially a matching problem between the spatial envelope boundary of the magnet's movement and the physical boundary of the target material.

[0078] The target radius, the effective radius of the magnet mounting frame 3, the eccentricity, and the translational stroke are the four parameters that define the core variables of the spatial envelope boundary of the magnet's motion. Among them, the target radius is the target boundary, which determines the maximum range that the effective magnetic field of the magnet needs to cover, and is the final reference standard for optimizing the position of the slide plate 31; the effective radius of the magnet mounting frame 3 is the basis for magnetic field coverage, which refers to the radius that the effective magnetic field generated by the magnet can reach, and is the key superposition quantity for calculating the displacement of the magnet center and the distance to the target edge; the eccentricity is the maximum offset in the rotation direction, that is, the radius of the revolution of the center of the magnet mounting frame 3 around the eccentric point (i.e., the rotation center of the drive gear 1), which determines the maximum distance that the rotational motion can drive the magnet to extend towards the target center; the translational stroke is the maximum offset in the straight line direction, that is, the total distance that the slide plate 31 drives the magnet mounting frame 3 to move along the slide groove, which determines the coverage range that can be supplemented in the straight line direction.

[0079] These four parameters are interrelated and together constitute the critical condition of "magnet center displacement + effective magnetic field radius ≥ target radius". Therefore, they can be used to accurately anchor the installation reference of the slide plate 31 and ensure that the magnetic field coverage is adapted to the target boundary.

[0080] The systematic approach, which combines coordinate system establishment, orientation optimization, position calculation, and simulation verification, is specifically determined as follows:

[0081] S1. Establishing the coordinate system and defining parameters

[0082] A two-dimensional coordinate system is established with the center of the target surface as the absolute origin, and the initial eccentric direction of the center of the magnet mounting bracket 3 (i.e. the direction of the line connecting the center of the magnet mounting bracket 3 and the rotation center of the drive gear 1) is defined as the positive direction of the X-axis.

[0083] Pre-measured or set parameters: target radius (R_target), effective radius of magnet (R_eff), eccentricity (e), translational stroke (L_slide).

[0084] S2. Determine the direction of the chute.

[0085] Based on the principle of translation to compensate for insufficient rotation, the extension direction of the chute is set to be perpendicular to the initial eccentric direction (i.e., the Y-axis direction). The rotational motion forms maximum coverage in the X-axis direction through the eccentricity, and the translation in the Y-axis direction can expand the "ring-shaped coverage area" formed by rotation into a "surface coverage area", thus achieving the superposition effect of rotational coverage length and translational coverage width.

[0086] S3. Calculate the critical position for installing the sliding plate 31.

[0087] By establishing the equation "the furthest coverage boundary of the magnet = the edge of the target material", it can be seen that the sum of the maximum displacement (eccentricity + translation) of the center of the magnet mounting bracket 3 and the effective radius of action must be equal to or slightly greater than the radius of the target material.

[0088] If the equation does not hold true, the center distance or translation stroke must be adjusted before recalculation.

[0089] If the equation holds true, with the bullseye as a reference, the midpoint of the slide travel is initially set to align with the bullseye. At this time, the initial installation position of the slide plate 31 is based on "the midpoint of the travel aligning with the bullseye".

[0090] S4. Optimize skateboard installation location

[0091] To avoid wasted motion or insufficient coverage, an offset d (the offset distance between the midpoint of the slide stroke and the target center) is introduced, offsetting in the opposite direction of the initial eccentricity (negative X-axis direction), so that the center of the magnet mounting bracket 3 is close to the edge of the target material at the beginning of the translation.

[0092] The offset d must be set to satisfy: (e-d+L_slide / 2)+R_eff=R_target. The specific value of d can be solved by this formula, and then the final installation position of the slide plate 31 relative to the target can be determined.

[0093] S5. Simulation Verification

[0094] Input the parameters into simulation software such as SolidWorksMotion to establish a motion model of "slide 31-gear mounting plate 4-magnet mounting bracket 3", simulate the trajectory of the eccentric rotation and Y-axis translation of the center of magnet mounting bracket 3, and generate the envelope of the magnetic field.

[0095] If the envelope does not cover the corner of the target or extends too far beyond the target surface, fine-tune the offset d or the position of the groove until the envelope precisely fits the edge of the target, and finally determine the installation position of the slide plate 31.

[0096] Determining the installation position of the slide plate 31 based on the above parameters maximizes target coverage, eliminates edge dead zones, and increases the effective utilization area of ​​the target material. It also prevents the magnet from moving beyond the target surface, avoiding wasted power and time, and reducing energy loss caused by magnetic field idling. For targets of different sizes, the installation position of the slide plate 31 can be recalculated by adjusting the parameters, eliminating the need to replace the slide plate 31 or gear assembly, thus improving the device's versatility.

[0097] Optionally, the effective length of the slide is adjustable to adjust the translational stroke of the magnet mounting bracket 3.

[0098] It needs to be explained that within the slide groove, the area that the fixed shaft 33 can reach is the effective length area. Along the length of the slide groove, if there is a portion of the area that is blocked, preventing the fixed shaft 33 from entering that area, that area is the non-effective length area.

[0099] By adjusting the effective length of the slide, the maximum moving distance of the slide plate 31 can be changed, thereby precisely controlling the translational stroke of the magnet mounting bracket 3, and thus adapting to different process requirements and target specifications.

[0100] The adjustment of the effective length of the slide groove serves three main purposes: First, it adapts to targets of different radii. By increasing or decreasing the effective length, the translation range can be changed, allowing the magnetic field of the magnet to accurately cover the edge of targets ranging from small (e.g., 4 inches) to large (e.g., 8 inches). Second, it optimizes the coverage efficiency of the magnetic field, avoiding excessive travel that causes the magnet to move beyond the target surface, resulting in wasted power, or insufficient travel that leaves uncovered dead corners. Third, it allows for flexible matching of process parameters, enabling fine-tuning of the translation amplitude according to the uniformity requirements of the coating thickness, thus compensating for the coverage deviation caused by rotational motion.

[0101] In one embodiment, the end of the slide plate 31 is provided with a threaded hole, which extends along the length of the slide plate 31 and connects to the slide groove. When the effective length of the slide plate 31 needs to be shortened by screwing the bolt into the threaded hole, the bolt is screwed into the slide groove. The bolt can form a limiting point to prevent the slide plate 31 from moving further. The translational stroke is shortened as the bolt is screwed in deeper. If the effective length of the slide plate 31 needs to be extended, the bolt is screwed out in the opposite direction to reduce the length of the bolt inserted into the slide groove or to completely remove the bolt, thereby releasing the slide groove space and increasing the translational stroke.

[0102] This method eliminates the need to disassemble structural components and allows for rapid on-site adjustments using tools, adapting to the need for quick switching between different target materials in mass production.

[0103] In another embodiment, the slide plate 31 is configured as a pull-out structure with an outer sleeve and an inner rod nested together. Pulling the inner rod out from the outer sleeve can extend the slide groove, and pushing the inner rod into the outer sleeve can shorten the slide groove.

[0104] This application does not limit the specific form of the slide length adjustment.

[0105] Optionally, the position of the fixed shaft 33 is adjustable in order to adjust the translation direction of the magnet mounting bracket 3.

[0106] By adjusting the position of the fixed shaft 33, its installation reference relative to the target material can be changed, thereby changing the guiding direction of the slide groove on the slide plate 31, and finally realizing flexible control of the translation direction of the magnet mounting bracket 3.

[0107] The function of adjusting the position of the fixed shaft 33 is mainly reflected in three aspects: First, it adapts to targets of different shapes or irregular shapes (such as rectangular and fan-shaped targets) and adjusts the translation direction to ensure that the magnetic field accurately covers the edge area; Second, it compensates for the assembly error of the equipment. If there is a positional deviation when assembling components such as gear mounting plate 4 and slide plate 31, the translation direction can be corrected by finely adjusting the position of the fixed shaft 33 to ensure that the magnetic field coverage is aligned with the center of the target; Third, it optimizes the magnetic field distribution of complex processes. For scenarios such as multi-layer coating that require differentiated magnetic field scanning, the superposition method of the magnetic field trajectory can be changed by switching the translation direction to further improve the coating uniformity.

[0108] In one embodiment, multiple sets of coaxial screw hole arrays are pre-set at different angles (e.g., 0°, 30°, 45°, 90°) in the mounting area corresponding to the target material. The line connecting each set of screw holes to the center of the target material represents a translation direction. The bottom of the fixed shaft 33 is provided with a flange, and the mounting holes on the flange are adapted to the screw holes on the target material or cavity cover. When it is necessary to adjust the translation direction, the fixing bolts on the flange are removed, the fixed shaft 33 is moved as a whole to the screw hole set at the target angle, the mounting holes are aligned, and the bolts are retightened to achieve fixation.

[0109] In another embodiment, an arc-shaped, waist-shaped hole centered on the target is formed on the mounting surface above the target. The edge of the waist-shaped hole is engraved with angle graduations from 0° to 180°. The bottom flange of the fixed shaft 33 is slidably connected to the waist-shaped hole via T-bolts. During adjustment, the T-bolts are loosened, and the fixed shaft 33 is moved along the arc-shaped trajectory of the waist-shaped hole. It is adjusted to the target angle (e.g., from 0° to 60°) according to the graduations. At this time, the guiding direction of the slide groove deflects as the position of the fixed shaft 33 changes. After the angle is calibrated, the T-bolts are tightened to lock the position. This method allows for stepless adjustment of the translation direction, adapting to the magnetic field scanning requirements at any angle.

[0110] This application does not limit the specific method of adjusting the position of the fixed axis 33.

[0111] In one embodiment, the magnetic control device includes two independently configured drive motors, one of which drives the drive gear 1 to rotate, and the other drive motor is used in conjunction with the crank-connecting rod structure to realize the translation of the magnet mounting bracket 3.

[0112] In another embodiment, the rotary drive mechanism includes a second rotating shaft 36, and a drive gear 1 is disposed on the second rotating shaft 36; a first linkage gear is disposed on the first rotating shaft 32, and a second linkage gear is disposed on the second rotating shaft 36. The first linkage gear meshes with the second linkage gear, and through gear transmission, the rotation of the drive gear 1 and the translation of the gear mounting plate 4 can be realized simultaneously.

[0113] For details, please refer to Figures 2 to 5In the illustrated embodiment, the first rotating shaft 32 is a power input shaft with a crank-connecting rod structure, vertically mounted on the surface of the slide plate 31, and rotatably mounted on the slide plate 31 via bearings. The second rotating shaft 36 is the power transmission shaft of the driving gear 1, vertically passing through the gear mounting plate 4 and connected to the driving gear 1, and rotatably mounted on the gear mounting plate 4 via bearings; the lower end of the second rotating shaft 36 is connected to the driving gear 1, and the upper end passes through the gear mounting plate 4 and the slide plate 31, and is fitted with a second linkage gear (external gear); the second rotating shaft 36 is parallel to the first rotating shaft 32 as a whole. The linkage gear includes a first linkage gear and a second linkage gear, both of which are compatible in specifications and at the same horizontal height, enabling power transmission.

[0114] During operation, the drive source starts, causing the first rotating shaft 32 to rotate around its own axis. The first rotating shaft 32 synchronously drives the first linkage gear to rotate with the shaft. Through meshing with the second linkage gear, the power is transmitted to the second rotating shaft 36, causing the second rotating shaft 36 to rotate synchronously with the first rotating shaft 32 at a speed that is in a fixed proportion, thereby driving the drive gear 1 to rotate. At the same time, the first connecting rod 34 swings with the first rotating shaft 32. Through the hinged engagement with the second connecting rod 35, under the guidance of the fixed shaft 33 and the slide groove, it drives the slide plate 31 and the gear mounting plate 4 to reciprocate in a straight line.

[0115] Compared to the above embodiment with two independent drive motors, the single drive source linkage method results in a more compact device structure, which can be adapted to the limited installation space on the top of the process cavity of the magnetron sputtering equipment. At the same time, the control is simpler, requiring only a single motor to synchronously drive the rotation and translational motion. This avoids the problem of coordinating the speed and phase of the two motors through a complex control system, which is required in the dual-motor scheme. It eliminates the magnetic field trajectory disorder caused by motor synchronization deviation from the root, and improves process stability.

[0116] As is easily imagined, when a drive mechanism via a linkage gear simultaneously rotates the first shaft 32 (which drives the crank-connecting rod structure to translate the gear mounting plate 4) and the second shaft 36 (which drives the drive gear 1 to rotate continuously), the first connecting rod 34 needs to rotate a full 360° to ensure the continuous rotation of the drive gear 1. Since the second shaft 36 is parallel to and adjacent to the first shaft 32, the two connecting rods will inevitably collide mechanically with the second shaft 36 when they rotate to a certain angle.

[0117] To address the interference problem, in one embodiment, the first linkage gear and the second linkage gear constitute a gear transmission assembly, and the first connecting rod 34 and the second connecting rod 35 constitute a connecting rod transmission assembly. The gear transmission assembly and the connecting rod transmission assembly are arranged axially offset to avoid interference between the first connecting rod 34 and the second connecting rod 35 and the second rotating shaft 36 during movement.

[0118] It should be explained that axial misalignment refers to setting the first rotating shaft 32 and the second rotating shaft 36 at different heights along the direction perpendicular to the slide plate 31 and the gear mounting plate 4, so that the linkage gear and connecting rod form a spatial layout with upper and lower staggered layers.

[0119] Specifically, along the axial direction, the first rotating shaft 32 is higher than the second rotating shaft 36, the first connecting rod 34 and the second connecting rod 35 are both in a motion plane higher than the first rotating shaft 32, while the first linkage gear and the second linkage gear are both in a motion plane lower than the first connecting rod 34. In this way, when the first connecting rod 34 rotates a full circle, the gears will sweep over the first connecting rod 34 without colliding or interfering with it.

[0120] In another embodiment, instead of the traditional straight-rod type first rotating shaft 32, the first rotating shaft 32 is configured as a bent shape, such that the middle part of the first rotating shaft 32 has an arc-shaped curved arm that is recessed away from the inner second rotating shaft 36; the first connecting rod 34 is disposed on the arc-shaped curved arm. During rotation, when the first connecting rod 34 rotates toward the second rotating shaft 36, it will pass through the recess of the arc-shaped curved arm without colliding or interfering with the first connecting rod 34.

[0121] In this embodiment, the two linkage gears can be positioned above the connecting rod, or they can be positioned above the connecting rod, so that the gear transmission assembly and the connecting rod transmission assembly can be arranged in layers along the axial direction.

[0122] In another embodiment, instead of the traditional straight rod type second pivot 36, the middle part of the second pivot 36 is provided with an arc-shaped curved arm that is recessed in the direction away from the first pivot 32. The recessed design of the second pivot 36 can also avoid the first connecting rod 34 that rotates out.

[0123] Optionally, the gear mounting plate 4 has an internal gear groove at its center, and the second rotating shaft 36 passes through the internal gear groove and is connected to the driving gear 1; the second rotating shaft 36 is also provided with a third linkage gear, which meshes with the internal gear groove, so that the gear mounting plate 4 can rotate around the second rotating shaft 36.

[0124] For details, please refer to Figure 5 In the illustrated embodiment, the gear mounting plate 4 is shaped like an isosceles triangle, the inner gear groove is opened at the geometric center of the gear mounting plate 4, and a circular groove is provided that penetrates the thickness of the gear mounting plate. The inner wall of the groove is machined with continuous and uniform teeth; the lower end of the second rotating shaft 36 passes through the inner gear groove and is connected to the driving gear 1.

[0125] The third linkage gear is an external meshing spur gear, coaxially fixed to the central area of ​​the second rotating shaft 36 by a flat key or set screw. The third linkage gear is located in the internal gear, and the outer diameter of the third linkage gear is adapted to the inner diameter of the internal gear groove to ensure stable meshing. The third linkage gear is located on the back side of the gear mounting plate 4 and will not cause spatial interference with the driving gear 1 or the driven gear 2.

[0126] The second rotating shaft 36 serves as the core power input carrier, with one end connected to the driving gear 1, the third linkage gear mounted in the middle, and the second linkage gear mounted at the other end. When the second rotating shaft 36 rotates around its own axis under the transmission of the linkage gear, it synchronously drives the third linkage gear to rotate coaxially at the same speed. Since the external teeth of the third linkage gear and the internal teeth of the internal gear groove always maintain meshing, and the gear mounting plate 4 can rotate relative to the second rotating shaft 36 through bearings, the rotational force of the third linkage gear is converted into torque that drives the internal gear groove to rotate, thereby driving the entire gear mounting plate 4 to rotate circumferentially around the axis of the second rotating shaft 36. At this time, the driven gear 2 carried on the gear mounting plate 4 will rotate synchronously around the second rotating shaft 36, forming a superimposed transmission of the rotation of the driving gear 1 and the revolution of the gear mounting plate 4.

[0127] By having the gear mounting plate 4 revolve around the second axis 36, an additional degree of freedom of motion is added, completely breaking the repetitiveness of the trajectory. Specifically, based on the original "rotation of the driving gear 1 → rotation of the magnet mounting frame 3 + eccentric rotation + translation", the revolution of the gear mounting plate 4 adds a rotational degree of freedom around the second axis 36, making the final motion trajectory of the magnet mounting frame 3 a four-fold superposition curve of "rotation + eccentric rotation + translation + revolution". This completely avoids the trajectory overlap problem that may exist in single or multiple movements, and can in particular cover areas that are difficult to reach by traditional structures, such as the edges and corners of the target material, further reducing the "dead zone" area.

[0128] Optionally, the transmission ratio between the third linkage gear and the internal gear slot can be adjusted to change the rotational speed of the gear mounting plate 4.

[0129] It is easy to understand that the internal gear slot at the center of the gear mounting plate 4 is a fixed structure, and its parameters such as the number of teeth and module have been set according to the basic process requirements when the equipment leaves the factory (e.g., the number of teeth in the internal gear slot is fixed at Z1=60). The formula for calculating the transmission ratio i is i=number of teeth in the internal gear slot Z1 / number of teeth in the third linkage gear Z2. Therefore, the core of adjusting the transmission ratio lies in replacing the third linkage gear with a different number of teeth Z2.

[0130] Optionally, the third linkage gear and the second rotating shaft 36 are detachably connected by using a keyed engagement for axial positioning.

[0131] Specifically, a standard keyway is pre-set in the middle of the second rotating shaft 36, and a matching flat key is machined into the inner hole of the third linkage gear. During assembly, torque is transmitted through the flat key, while axial positioning is achieved through the shaft shoulder and the lock nut. To adjust the transmission ratio, the axial positioning is released and the third linkage gear is replaced.

[0132] The adjustment of the transmission ratio is essentially achieved by changing the rotational speed of the gear mounting plate 4 (the rotational speed n of the gear mounting plate 4 = the rotational speed N of the second shaft 36 / transmission ratio i), thereby adapting to the different requirements of magnetic field scanning rhythm for different magnetron sputtering processes.

[0133] It is easy to understand that the sputtering yield and etching rate of different target materials (such as silicon targets, titanium targets, and alumina targets) vary significantly. For example, silicon targets have a fast etching rate, requiring the gear mounting plate 4 to rotate at a lower speed (such as 1 r / min) to maintain a uniform magnetic field on the target surface through slow revolution, thus avoiding local over-etching. On the other hand, metal targets (such as titanium targets) have a slow etching rate, so the transmission ratio can be reduced (such as i decreasing from 3 to 2, and the rotation speed increasing from 1 r / min to 1.5 r / min). By accelerating the revolution, the magnetic field scanning frequency can be increased, thereby shortening the etching time of a single area and meeting the high-efficiency requirements of metal coating.

[0134] For coating processes with different thickness requirements, adjusting the transmission ratio can precisely match the magnetic field scanning intensity. For example, when preparing ultrathin coatings (such as below 10nm), high-frequency magnetic field scanning is required to ensure film density. This can be achieved by reducing the number of teeth on the third linkage gear (e.g., changing Z2 from 20 to 15, i from 3 to 4, and increasing the rotation speed), allowing the gear mounting plate 4 to revolve rapidly, thus creating a densely superimposed magnetic field trajectory on the target surface. When preparing thick films (such as above 1μm), the scanning frequency needs to be reduced to avoid uneven film accumulation. This can be achieved by increasing the number of teeth on the third linkage gear (e.g., changing Z2 from 20 to 25, i from 3 to 2.4, and decreasing the rotation speed), and balancing the film growth rate through slow revolve.

[0135] Similarly, for targets with different diameters such as 4 inches and 6 inches, adjusting the transmission ratio can also coordinate the revolution speed with translational and rotational motion. For example, for a large 6-inch target, the edge area needs longer magnetic field coverage, so the transmission ratio can be increased (e.g., i=4, rotation speed=0.8r / min) to allow the gear mounting plate to rotate slowly, ensuring that the edge area is fully scanned; for a small 4-inch target, which does not need to stay for too long, the transmission ratio can be decreased (e.g., i=2.5, rotation speed=1.2r / min) to improve the overall coating efficiency through faster revolution.

[0136] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment, characterized in that, include: A drive gear (1) and a rotary drive mechanism, the rotary drive mechanism being used to drive the drive gear (1) to rotate; A magnet mounting bracket (3) is used to mount magnets. The magnet mounting bracket (3) is arranged in a ring shape, and a ring of teeth is provided on its inner ring surface. The drive gear (1) is located in the inner ring cavity of the magnet mounting bracket (3). At least two passive gears (2) are disposed between the active gear (1) and the magnet mounting bracket (3) and simultaneously mesh with the active gear (1) and the magnet mounting bracket (3); Gear mounting plate (4), on which both the driving gear (1) and the driven gear (2) are rotatably mounted; The translation drive mechanism is used to drive the gear mounting plate (4) to drive the driving gear (1), the driven gear (2) and the magnet mounting bracket (3) to reciprocate in a straight line direction; The rotation center of the drive gear (1) is offset from the center of the magnet mounting bracket (3), and the magnet mounting bracket (3) can simultaneously rotate and eccentrically rotate under the drive of the drive gear (1) and the driven gear (2). The number of the passive gears (2) is three; Of the three passive gears (2), two of the passive gears (2) have the same specifications, and the other one has different specifications from the other two. The three passive gears (2) are distributed in an isosceles triangle. The translation drive mechanism includes: The slide plate (31) is connected to the gear mounting plate (4), and the slide plate (31) is provided with radially extending grooves; The first pivot (32) is rotatably mounted on the slide plate (31); A fixed shaft (33) is located on one side of the first rotating shaft (32) and is situated in the groove; The first connecting rod (34) is mounted on the first rotating shaft (32); The second link (35) is mounted on the fixed shaft (33), and the first link (34) is hinged to the second link (35); When the first rotating shaft (32) rotates, it can drive the first connecting rod (34) and the second connecting rod (35) to swing, thereby driving the slide plate (31) and the gear mounting plate (4) to reciprocate along the extension direction of the slide groove to move closer to or away from the fixed shaft (33).

2. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 1, characterized in that, The magnet mounting bracket (3) is provided with multiple magnets, which are irregularly and asymmetrically distributed.

3. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 1, characterized in that, The installation position of the slide plate (31) is determined based on the target radius, the effective radius of the magnet mounting bracket (3), the eccentricity and the translational stroke, so that the effective boundary of the magnet mounting bracket (3) when it moves to the limit position is close to the edge of the target.

4. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 1 or 3, characterized in that, The effective length of the slide is adjustable so as to adjust the translational stroke of the magnet mounting bracket (3).

5. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 1 or 3, characterized in that, The position of the fixed shaft (33) is adjustable so as to adjust the translation direction of the magnet mounting bracket (3).

6. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 1, characterized in that, The rotary drive mechanism includes a second rotating shaft (36), and the drive gear (1) is disposed on the second rotating shaft (36); The first rotating shaft (32) is provided with a first linkage gear, and the second rotating shaft (36) is provided with a second linkage gear. The first linkage gear meshes with the second linkage gear. Through gear transmission, the rotation of the driving gear (1) and the translation of the gear mounting plate (4) can be realized simultaneously.

7. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 6, characterized in that, The first linkage gear and the second linkage gear constitute a gear transmission assembly, and the first connecting rod (34) and the second connecting rod (35) constitute a connecting rod transmission assembly; The gear transmission assembly and the connecting rod transmission assembly are arranged axially offset to avoid interference between the first connecting rod (34) and the second connecting rod (35) and the second rotating shaft (36) during movement.

8. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 6, characterized in that, The gear mounting plate (4) has an internal gear groove at its center, and the second rotating shaft (36) passes through the internal gear groove and is connected to the driving gear (1); The second rotating shaft (36) is also provided with a third linkage gear, which meshes with the internal gear groove, so that the gear mounting plate (4) can rotate around the second rotating shaft (36).

9. The multi-degree-of-freedom composite motion magnetic control device for magnetron sputtering equipment according to claim 8, characterized in that, The transmission ratio between the third linkage gear and the internal gear groove is adjustable to change the rotational speed of the gear mounting plate (4).

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