Sample carrier clamp, electron microscope bearing module and sample carrier mounting tool

Abstract

The invention provides a sample carrier clamp, an electron microscope bearing module and a sample carrier mounting tool, the sample carrier clamp comprises a first limiting piece and a second limiting piece, the first limiting piece limits a limiting area used for positioning a sample carrier, the observation direction of the sample carrier is defined as the axial direction, the two ends of the limiting area in the axial direction are open, and the second limiting piece is arranged in the limiting area. The second limiting piece is clamped with the first limiting piece, and the first limiting piece can press the second limiting piece from one side of the limiting area to the other side of the limiting area in the axial direction, so that the second limiting piece and the first limiting piece clamp the sample carrier in the axial direction. An operator can carry the sample carrier through the sample carrier clamp, so that direct contact with the sample carrier is avoided, the risk that the sample carrier is damaged or polluted in the carrying process is reduced, and the quality of a supporting film is improved.

Description

Technical Field

[0001] This application relates to the field of electron microscopy inspection, and in particular to a sample carrier clamp, an electron microscope support module, and a sample carrier mounting tool. Background Technology

[0002] Transmission electron microscopy (TEM) is used in many fields such as materials, physics, and biochemistry to observe submicroscopic or ultramicroscopic structures.

[0003] In the process of sample analysis using cryo-electron microscopy, a support membrane is typically placed over the electron microscope grid to prepare a sample carrier for holding samples such as biological single particles. The sample carrier is then attached to a sample transfer device, such as a sample holder, which is used to place the sample into the electron microscope.

[0004] When the support membrane is attached to the carrier mesh, it is easy to contaminate the support membrane. At the same time, it is difficult to ensure the flatness of the support membrane during attachment. In addition, the carrier mesh may also have poor flatness, which will lead to poor flatness of the support membrane covering the carrier mesh. Ultimately, the quality of the support membrane will be reduced, which is not conducive to the observation of the sample.

[0005] To address these issues, related technologies have proposed substrate-based sample carriers. The supporting film is formed on the substrate surface using semiconductor processing technology, resulting in high flatness and resistance to contamination. However, sample carriers are still susceptible to damage or contamination during handling and transfer, which hinders sample observation.

[0006] In some related technologies, such as US11373840B1, elastic retaining rings are often used to clamp and fix the sample carrier to the fixture to facilitate the handling of the sample carrier. However, the current retaining ring design is only suitable for thin sample carriers, such as sample carriers that support film to be coated on a carrier mesh. It is difficult to effectively clamp and fix thicker substrates, so it cannot be applied to substrate-based sample carriers. Summary of the Invention

[0007] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a sample carrier clamp, an electron microscope support module, and a sample carrier mounting tool. The sample carrier clamp can be used to transport sample carriers, which helps to improve the quality of the support membrane.

[0008] According to the sample carrier clamp provided in this application, a sample carrier is used for mounting a sample carrier. The sample carrier clamp includes a first limiting member and a second limiting member. The first limiting member defines a limiting area for placing the sample carrier. The observation direction of the sample carrier is defined as the axial direction. The limiting area is open at both ends of the axial direction. The second limiting member engages with the first limiting member. The first limiting member can press the second limiting member from one side of the limiting area to the other side of the limiting area in the axial direction, so that the second limiting member and the first limiting member clamp the sample carrier in the axial direction.

[0009] The sample carrier clamp provided in this application has at least the following technical effects: when the sample carrier is placed in the limiting area, the first limiting member and the second limiting member press the two sides of the sample carrier from the axial direction, thereby clamping the sample carrier. The operator can use the sample carrier clamp to move the sample carrier, thereby avoiding direct contact with the sample carrier and reducing the risk of damage or contamination of the sample carrier during the handling process. The sample carrier clamp can be used to move the sample carrier, which helps to improve the quality of the support membrane.

[0010] According to some embodiments of this application, the first limiting member and / or the second limiting member can deform to expand and shrink radially to allow the second limiting member to enter the limiting region along the axial direction past the first engaging portion of the first limiting member when engaged, the radial direction being perpendicular to the axial direction.

[0011] According to some embodiments of this application, the second limiting member includes a retaining ring that is circumferentially encircled and not closed, so as to contract inward when compressed.

[0012] According to some embodiments of this application, the retaining ring is used to abut against the first engaging portion on one side along the axial direction, and the retaining ring is used to abut against the sample carrier on the other side along the axial direction.

[0013] According to some embodiments of this application, the first limiting member includes a first engaging plate, which is closed around the circumference to define the limiting area. The first engaging plate extends inward on both sides of the axial direction in a direction inclined to the axial direction, wherein one side is used to engage with the retaining ring and the other side is used to abut against the sample carrier.

[0014] According to some embodiments of this application, the second limiting member is capable of bending and deforming about the radial direction as the axis of rotation.

[0015] According to some embodiments of this application, the second limiting member includes a second pressure plate and a plurality of second engaging plates disposed around the outer periphery of the second pressure plate, wherein the second pressure plate and the second engaging plates are capable of bending and deforming about the radial direction as an axis of rotation.

[0016] According to some embodiments of this application, in the engaged state, the deformation of the second engaging plate is greater than that of the second pressure plate.

[0017] According to some embodiments of this application, the second snap-fit ​​plate is formed with perforations to increase its deformability.

[0018] According to some embodiments of this application, two second locking plates are respectively disposed on both sides of the second pressure plate, and the two second locking plates extend outward from the edge of the second pressure plate in opposite directions.

[0019] According to some embodiments of this application, three or more second locking plates are arranged at equal intervals around the second pressure plate, and each of the second locking plates extends outward.

[0020] According to some embodiments of this application, the first limiting member includes a first pressure plate and a first engaging plate, the first engaging plate being disposed around the edge of the first pressure plate, and the first engaging plate and the first pressure plate defining the limiting area.

[0021] According to some embodiments of this application, the first locking plate extends inward, and the first locking plate and the second locking plate engage with each other.

[0022] According to some embodiments of this application, the first limiting member has a first window, the second limiting member has a second window, and the first window, the second window, and the imaging window of the sample carrier are at least partially aligned in the axial direction to expose the sample located on the sample carrier.

[0023] According to some embodiments of this application, the first limiting member includes a first positioning part and / or the second limiting member includes a second positioning part, the first positioning part and / or the second positioning part being used to contact and position the sample carrier in the radial direction.

[0024] According to some embodiments of this application, the second positioning portion is arranged around the second window.

[0025] According to some embodiments of this application, the second positioning portion extends from the edge of the second window toward the first limiting member.

[0026] According to some embodiments of this application, the first limiting member and / or the second limiting member are made of conductive materials.

[0027] The electron microscope support module provided in this application includes a sample carrier and a sample carrier fixture provided in this application. The sample carrier includes a substrate and a support film covering the substrate.

[0028] According to some embodiments of this application, the substrate has at least one through imaging window formed along the axial direction, the support film covers the imaging window, the support film has at least one through object-carrying hole, and the projection of the object-carrying hole on the substrate is located within the imaging window.

[0029] According to some embodiments of this application, the sample carrier includes a radially outwardly extending flange, the radial direction being perpendicular to the axial direction, and the first limiting member and the second limiting member clamping the flange.

[0030] According to some embodiments of this application, the sample carrier includes a mesh covering the substrate, the mesh including a first joint extending outward from the edge of the substrate along the radial direction, the first joint serving as the flange.

[0031] According to some embodiments of this application, the substrate includes a carrier portion and a second bonding portion, the carrier portion being used to support the support film, the second bonding portion surrounding the carrier portion circumferentially, the thickness of the second bonding portion being less than the thickness of the carrier portion, and the second bonding portion serving as the flange.

[0032] According to some embodiments of this application, the support film is a nickel-titanium film or a silicon nitride film, and the nickel-titanium film is in contact with the first limiting member and / or the second limiting member.

[0033] According to some embodiments of this application, the sample carrier includes a conductive film covering the substrate, the conductive film being in contact with the support film, and the conductive film being in contact with the first limiting member and / or the second limiting member, wherein the conductivity of the conductive film is greater than that of the support film.

[0034] The sample carrier installation tool provided in this application is used to assemble the sample carrier fixture provided in this application. The sample carrier installation tool includes a clamping sleeve and a push rod. The clamping sleeve has a through clamping hole along its own axial direction. In the radial direction, the size of the clamping hole is less than or equal to the size of the opening of the limiting area. The push rod is used to push the second limiting member into the clamping hole and push the second limiting member out of the clamping hole.

[0035] According to some embodiments of this application, the clamping sleeve has a positioning hole, the positioning hole is connected to one end of the clamping hole, the positioning hole is coaxially arranged with the clamping hole, and the positioning hole is used to accommodate and position the first limiting member.

[0036] According to some embodiments of this application, the push rod includes a first push rod and a second push rod, wherein the first push rod is used to push the second limiting member in, and the second push rod is used to push the second limiting member out.

[0037] According to some embodiments of this application, the end face of the first push rod is formed with a positioning protrusion, which is used to insert into the second window of the second limiting member to position the second limiting member.

[0038] According to some embodiments of this application, the projection of the end face of the first push rod falls within the range of the second pressure plate.

[0039] According to some embodiments of this application, the second push rod includes a limiting structure for limiting the push stroke of the second push rod.

[0040] According to some embodiments of this application, the second push rod includes a rod body and a handle, the rod body is mounted on the handle, and the step portion between the rod body and the handle serves as the limiting structure.

[0041] According to some embodiments of this application, the sample carrier mounting tool includes a fixing base, and the first push rod is mounted on the fixing base.

[0042] According to some embodiments of this application, the fixing seat has a first countersunk hole, the first push rod is installed in the first countersunk hole, the diameter of the first countersunk hole matches the outer diameter of the clamping sleeve, and the first countersunk hole is used to guide the first push rod to be inserted into the clamping hole.

[0043] According to some embodiments of this application, the fixing seat has a second countersunk hole, the diameter of which matches the outer diameter of the clamping sleeve. The second countersunk hole is used to place the first limiting member containing the sample carrier and to guide the first limiting member to be pressed into the positioning hole.

[0044] The electron microscope support module of this application includes the sample carrier clamp of this application, and the sample carrier mounting tool of this application is used to install the sample carrier clamp of this application. Therefore, it has the beneficial effects provided by the sample carrier clamp, which will not be described in detail here. Attached Figure Description

[0045] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0046] Figure 1 This is an exploded structural diagram of the sample carrier fixture according to an embodiment of the first aspect of this application;

[0047] Figure 2 This is a cross-sectional view of the sample carrier fixture according to an embodiment of the first aspect of this application;

[0048] Figure 3This is a cross-sectional view of the sample carrier fixture according to an embodiment of the first aspect of this application;

[0049] Figure 4 This is an exploded view of the sample carrier fixture according to an embodiment of the second aspect of this application;

[0050] Figure 5 This is an exploded structural diagram of the sample carrier fixture according to an embodiment of the third aspect of this application;

[0051] Figure 6 This is an exploded view of the sample carrier fixture according to an embodiment of the fourth aspect of this application;

[0052] Figure 7 This is a schematic diagram illustrating the principle of using a sample carrier mounting tool to mount a sample carrier in an embodiment of the second aspect of this application;

[0053] Figure 8 This is a schematic diagram illustrating the principle of using a sample carrier mounting tool to mount a sample carrier in an embodiment of the second aspect of this application;

[0054] Figure 9 This is a schematic diagram illustrating the principle of using a sample carrier mounting tool to mount a sample carrier in an embodiment of the second aspect of this application;

[0055] Figure 10 This is a schematic diagram illustrating the principle of using a sample carrier mounting tool to mount a sample carrier in an embodiment of the second aspect of this application.

[0056] Figure label:

[0057] Sample carriers 1100, 2100, 3100; substrates 1110, 2110, 3110; support portion 1111; second bonding portion 1112; support films 1120, 2120, 3120; mesh 1130; first bonding portion 1131;

[0058] First limiting components 1200, 2200, 3200, 4200; First pressure plate 2210, 3210, 4210; First window 1220, 2220, 3220, 4220; First locking plate 1230, 2230, 3230, 4230;

[0059] Second limiting components 1300, 2300, 3300, 4300; Second windows 1310, 2310, 3310, 4310; Retaining ring 1320; Second locking plates 2320, 3320, 4320; Hollow hole 2340; Second positioning plate 3350; Second pressure plate 2360, 3360, 4360;

[0060] Clamping sleeve 2410; clamping hole 2411; positioning hole 2412; first push rod 2420; positioning protrusion 2421; second push rod 2430; rod body 2431; handle 2432; fixing seat 2440; first countersunk hole 2441; second countersunk hole 2442. Detailed Implementation

[0061] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0062] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0063] In the description of this application, "several" means one or more, "more than" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0064] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0065] Cryo-electron microscopy requires placing the sample on a sample carrier. The sample carrier holds the sample through a supporting membrane. When used for cryo-electron microscopy imaging, the supporting membrane has multiple pores. First, a solution carrying the sample is titrated onto the supporting membrane, causing the solution to form a liquid film in the pores. Then, the solution is frozen to a glassy state, and the sample in the pores is observed through an electron microscope.

[0066] A support mesh is typically a porous metal sheet, made of materials such as Cu, Ni, Mo, Au, and nylon, which reinforces and supports the sample and the supporting membrane. In some related techniques, the prepared supporting membrane is first floated on the water surface, and then retrieved using a support mesh, allowing the supporting membrane to adhere to the mesh.

[0067] Individual support membranes are thin and fragile, requiring manual handling during retrieval, which is difficult and costly, hindering mass production. Furthermore, manual handling is prone to inconsistencies and contamination, resulting in poor imaging quality and hindering sample observation. In addition, the grid may have unevenness, leading to unevenness of the support membrane covering it, reducing film quality and making it difficult to accurately control the liquid film thickness, further complicating sample observation.

[0068] In addition, operators may come into contact with the support membrane when retrieving it or handling sample carriers (through tools or direct hand contact), which can damage or contaminate the support membrane.

[0069] Therefore, this application provides a sample carrier clamp for the installation and handling of sample carriers.

[0070] Reference Figure 1 , Figure 2 and Figure 3 According to an embodiment of the first aspect of this application, the sample carrier fixture includes a first limiting member 1200 and a second limiting member 1300. The first limiting member 1200 defines a limiting area for placing the sample carrier 1100, and the observation direction of the sample carrier 1100 is defined as the axial direction (i.e., Figure 1 (in the Z direction), the limiting area is open at both ends of the axial direction, the second limiting member 1300 engages with the first limiting member 1200, the first limiting member 1200 can press the second limiting member 1300 from one side of the limiting area to the other side of the limiting area in the axial direction, so that the second limiting member 1300 and the first limiting member 1200 clamp the sample carrier 1100 in the axial direction.

[0071] According to the sample carrier clamp provided in the embodiments of this application, the limiting region is open at both ends in the axial direction, thereby forming two openings for exposing the sample carrier 1100 during observation. The opening located at the same end as the first limiting member 1200 is also used to insert the sample carrier 1100. In use, the sample carrier 1100 is first inserted into the limiting region through the opening. Then, the second limiting member 1300 is engaged with the first limiting member 1200. The first limiting member 1200 and the second limiting member 1300 respectively press down on both sides of the sample carrier 1100 in the axial direction, thereby clamping the sample carrier 1100. The operator can use the sample carrier clamp to move the sample carrier 1100, thereby avoiding direct contact with the sample carrier 1100 and reducing the risk of damage or contamination of the sample carrier 1100 during handling. The sample carrier clamp can be used to move the sample carrier 1100, which helps to improve the quality of the support membrane.

[0072] Understandably, the first limiting member 1200 also needs to form an opening to expose the sample carrier 1100, as detailed in the following reference. Figure 1 The first limiting member 1200 forms a first window 1220, and the two first windows 1220 are located on both sides of the axial direction of the limiting area, respectively. The second limiting member 1300 forms a second window 1310. The first window 1220 and the second window 1310 are at least partially aligned in the axial direction to expose the sample located on the sample carrier 1100.

[0073] The sample carrier fixture is typically used in conjunction with the sample carrier 1100. Therefore, this application also provides an electron microscope carrier module, which includes the sample carrier 1100 and the sample carrier fixture of this application. The sample carrier 1100 includes at least a support membrane 1120. The electron microscope carrier module correspondingly has the beneficial effects provided by the sample carrier fixture, which will not be elaborated further here.

[0074] Returning to the sample carrier fixture, it can be understood that the first limiting member 1200 applies a resultant force along the axial direction and towards the other side of the limiting area to the second limiting member 1300 through compression deformation upon contact, achieving a clamping effect. The part of the first limiting member 1200 that contacts and applies the compression force to the second limiting member 1300 can be defined as the first engaging part, and the corresponding part on the second limiting member 1300 can be defined as the second engaging part. As long as the normal direction of the first engaging part is towards the other side of the limiting area (inclined to the axial direction, preferably perpendicular to the axial direction), the requirement for applying force can be met. Therefore, the specific arrangement position of the first engaging part on the first limiting member 1200 can be adjusted according to the design of the second limiting member 1300. For example, the first engaging part can be located inside or outside the limiting area.

[0075] For example, refer to Figure 1 , Figure 2 and Figure 3 When the sample carrier 1100 is pressed, the second limiting member 1300 can enter the limiting area as a whole. At this time, the first engaging part is also the inner surface of the limiting area, that is, the first engaging part is located within the limiting area.

[0076] On the one hand, achieving contact between the first engaging portion and the second limiting member 1300 requires the projected portions of the first engaging portion and the second limiting member 1300 to overlap. On the other hand, for the second limiting member 1300 to enter the limiting region as a whole, the projected area of ​​the second limiting member 1300 must fall within the opening range of the limiting region. Therefore, the sample carrier fixture can be further designed such that the first limiting member 1200 and / or the second limiting member 1300 can deform to expand and shrink radially, allowing the second limiting member 1300 to cross the first engaging portion axially and enter the limiting region during engagement, with the radial direction perpendicular to the axial direction.

[0077] In other words, by changing the shape, the projection areas of the first limiting member 1200 and / or the second limiting member 1300 change during the stages of inserting the second limiting member 1300 and engaging the second limiting member 1300, thereby satisfying the different requirements of the two stages.

[0078] Exemplarily, the second limiting member 1300 is capable of radially contracting and deforming inward. Alternatively, the second limiting member 1300 can be constructed using an open-loop design. (Refer to...) Figure 1 , Figure 2 and Figure 3 The second limiting member 1300 may include a retaining ring 1320, which is circumferential and not closed (i.e., an open-loop design) to deform inward when compressed. Alternatively, the retaining ring 1320 may be made of an elastically deformable material, thereby giving the retaining ring 1320 the ability to deform.

[0079] Specifically, one side of the retaining ring 1320 along the axial direction is used to abut against the first limiting member 1200, and the other side of the retaining ring 1320 along the axial direction is used to abut against the sample carrier 1100.

[0080] When the second limiting member 1300 is placed, the second limiting member 1300 (e.g., retaining ring 1320) contracts and deforms, causing the projection area to move inward. This allows the second limiting member 1300 to sequentially pass over the opening of the limiting area and the first engaging part in the axial direction, moving from the side of the first engaging part away from the sample carrier 1100 to the side of the first engaging part facing the sample carrier 1100. Next, the second limiting member 1300 returns to its original shape, causing its projection area to move outward. The second limiting member 1300 contacts the surface of the first engaging part facing the sample carrier 1100, generating a force that presses against the sample carrier 1100.

[0081] Since the second limiting member 1300 adopts an inwardly contracting deformation design and is located within the limiting area, correspondingly, the first limiting member 1200 may include a first engaging plate 1230. The first engaging plate 1230 is closed around the circumference to define the limiting area. The two sides of the first engaging plate 1230 extend inward in a direction inclined to the axial direction, with one side used to engage with the retaining ring 1320 and the other side used to abut against the sample carrier 1100. That is, the first engaging part is located at the edge of one side of the first engaging plate 1230, and the edge of the other side of the first engaging plate 1230 contacts and positions itself against the sample carrier 1100.

[0082] Based on the same principle, the first limiting member 1200 can also be designed to expand and deform radially outward. For example, the first locking plate 1230 can be designed as an open-loop structure or made of an elastic and deformable material, allowing the projected area of ​​the first locking plate 1230 to expand outward and simultaneously increasing the opening of the limiting area to meet the requirements for inserting the second limiting member 1300. The sample carrier fixture can also be designed so that both the first limiting member 1200 and the second limiting member 1300 can deform radially, which will not be elaborated further here.

[0083] It should be noted that, in the embodiment of the first aspect, the second limiting member 1300 enters the limiting region as a whole, thus requiring the deformation of the first limiting member 1200 and / or the second limiting member 1300 to reach a level that allows the second limiting member 1300 to cross the opening of the limiting region.

[0084] In some other embodiments, the second limiting member 1300 may also be designed to partially enter the limiting region, with the portion of the second limiting member 1300 within the limiting region used to contact the sample carrier 1100, and the portion of the second limiting member 1300 outside the limiting region used to contact the first engaging portion.

[0085] In this embodiment, the contact area between the first engaging portion and the second limiting member 1300 is located outside the limiting region. Although the sample carrier fixture still needs to be designed so that the first limiting member 1200 and / or the second limiting member 1300 can deform radially, the radial deformation of the first limiting member 1200 and / or the second limiting member 1300 only needs to be sufficient to allow the second limiting member 1300 to pass over the first engaging portion; it is not necessary to deform the second limiting member 1300 to enter the limiting region. Furthermore, since there is no spatial constraint from the limiting region, the shapes of the first engaging portion of the first limiting member 1200 and the second engaging portion of the second limiting member 1300 can be designed more flexibly.

[0086] Although handling the sample carrier 1100 using a sample carrier clamp can avoid contact damage to the support membrane during transport, there is still a risk of contact with the support membrane 1120 when it is retrieved using a carrier net, leading to damage or contamination. Furthermore, to suit electron microscopy observation, the support membrane 1120 is generally small in size, typically around 3 mm in diameter. Therefore, preparing the support membrane 1120 by retrieval is not conducive to accurately controlling its coverage, and the consistency between different batches of support membrane 1120 is difficult to guarantee.

[0087] Therefore, referring to Figure 2 and Figure 3In the electron microscope support module corresponding to the embodiment of the first aspect, the sample carrier 1100 further includes a substrate 1110, and a support film 1120 covers the substrate 1110.

[0088] Understandably, the substrate 1110 is used as a base for depositing materials. Since the substrate 1110 supports the support film 1120, the support film 1120 can be directly formed on the surface of the substrate 1110 through a deposition process (e.g., photolithography). This avoids the step of using a screen to retrieve the support film 1120 in related technologies, preventing damage to the support film 1120 during fabrication. Furthermore, the deposition process improves the thickness uniformity and surface flatness of the support film 1120, contributing to higher quality electron microscopy observations. The deposition process also facilitates the mass production of the sample carrier 1100.

[0089] To observe the sample through the substrate 1110, the substrate 1110 also needs to have at least one through-hole imaging window formed along the axial direction. A support film 1120 covers the imaging window and has at least one through-hole for carrying the sample. The projection of the through-hole onto the substrate 1110 lies within the imaging window. During electron microscopy experiments, the through-hole forms a liquid film, the sample is located within the liquid film, and the electron beam passes through the imaging window and the through-hole to image the sample. Understandably, the opening in the limiting region exposes both the imaging window and the through-hole.

[0090] The imaging principle of electron microscopy is to emit an electron beam to the sample for imaging. During the imaging process, charge accumulates on the sample carrier 1100. In cryo-electron microscopy experiments, the samples are usually proteins or other biological materials, and the charge can easily cause sample damage. Therefore, the charge on the sample carrier 1100 can be removed using a sample carrier clamp, thereby avoiding the accumulation of charge.

[0091] Charge can be discharged in various ways, such as by designing a dedicated discharge structure, like a conductive circuit, on the sample carrier fixture. However, this complicates the sample carrier fixture and increases manufacturing difficulty. A more convenient approach is to use conductive materials for the first limiting member 1200 and / or the second limiting member 1300, thereby achieving conductivity.

[0092] Provided that the strength requirements of the compressed sample carrier 1100 are met, the specific specifications of the conductive material can be determined according to actual needs. For example, materials such as gold and titanium, which have good conductivity, good biocompatibility and stability, can be selected.

[0093] The support membrane 1120 can be made of nickel-titanium film, silicon nitride film or other film materials. In order to accelerate the discharge of charge from the support membrane 1120 to the sample carrier fixture, the support membrane 1120 is preferably made of nickel-titanium film. The nickel-titanium film is in contact with the first limiting member 1200 and / or the second limiting member 1300.

[0094] "NiTi film" refers to a thin film made of nickel-titanium alloy. NiTi film has poor protein adsorption; ideally, it does not adsorb proteins. Therefore, protein samples tend to aggregate in the liquid film formed by the support film 1120, rather than remaining on the surface of the support film 1120. This increases the sample distribution density in the liquid film and improves the observation effect. NiTi film also has good conductivity, so the charge generated during observation can be promptly discharged through the NiTi film, making it difficult for it to accumulate in the liquid film. This effectively avoids sample quality degradation and sample damage, further improving the observation effect.

[0095] However, due to the limitations of the support film 1120 in terms of sample carrying capacity, it is difficult to use a material with better conductivity for the support film 1120. In order to further accelerate the discharge of charge from the support film 1120 to the sample carrier fixture, the sample carrier 1100 may also include a conductive film, which covers the substrate 1110, contacts the support film, and contacts the first limiting member 1200 and / or the second limiting member 1300. The conductivity of the conductive film is greater than that of the support film 1120.

[0096] In order to clamp and fix the sample carrier 1100 having substrate 1110, the sample carrier 1100 may optionally include a radially outwardly extending flange, the radial direction being perpendicular to the axial direction, and a first limiting member 1200 and a second limiting member 1300 clamping the flange.

[0097] The flange can be constructed from the substrate 1110, exemplarily, referring to Figure 2 The substrate 1110 may include a support portion 1111 and a second bonding portion 1112. The support portion 1111 supports the support film 1120, and the second bonding portion 1112 surrounds the support portion 1111 circumferentially. The thickness of the second bonding portion 1112 is less than the thickness of the support portion 1111, and the second bonding portion 1112 serves as a flange. In this case, the sample carrier 1100 may not have a mesh.

[0098] However, such a design would complicate the processing of substrate 1110 and significantly increase the processing cost of substrate 1110. If the cutting accuracy is not high, it may also lead to unstable installation of sample carrier 1100.

[0099] The flange can also be constructed from a carrier net, for example, see reference. Figure 3The sample carrier 1100 may include a mesh 1130 covering the substrate 1110. The mesh 1130 includes a first joint 1131 extending radially outward from the edge of the substrate 1110, serving as a flange. In this case, the mesh can be bonded to the support film 1120 or the substrate 1110 after the support film 1120 is formed.

[0100] The carrier mesh 1130 can be bonded to the substrate 1110 or the support film 1120 by either adhesive bonding or snap-fit. Adhesive bonding is a common bonding method between the carrier mesh 1130 and the support film 1120 in related technologies where the carrier mesh 1130 lifts up the support film 1120. This method can ensure the stability of the bond, but the adhesive used in adhesive bonding may contaminate the support film 1120. Snap-fit ​​involves designing a snap-fit ​​structure on the substrate 1110 to snap into the carrier mesh 1130. Snap-fit ​​requires higher processing precision for both the substrate 1110 and the carrier mesh 1130; otherwise, the connection may be too tight or too loose, which will increase the processing difficulty of the sample carrier 1100 and reduce its processing efficiency.

[0101] The reason for the above problems is that in the first embodiment, the second limiting member 1300 uses a retaining ring 1320, which achieves engagement through radial shrinkage deformation. On the one hand, the retaining ring 1320 is relatively large in axial direction, occupying a relatively large space. On the other hand, the substrate 1110 needs to have a certain thickness to ensure the support effect on the support film 1120. Therefore, the substrate 1110 either needs to be thinned at the edges (that is, processed to form a flange) before it can be inserted between the first limiting member 1200 and the second limiting member 1300 for clamping, or it needs to indirectly form a flange through the carrier mesh 1130.

[0102] To avoid machining problems caused by flanges, refer to... Figure 4 According to an embodiment of the second aspect of this application, the sample carrier fixture includes a first limiting member 2200 and a second limiting member 2300. Unlike the embodiment of the first aspect, in the embodiment of the second aspect, the second limiting member 2300 is capable of bending and deforming about the radial axis of rotation (that is, the direction of the torque is radial).

[0103] For example, the second limiting member 2300 includes a second pressure plate 2360 and a plurality of second engaging plates 2320 disposed around the outer periphery of the second pressure plate 2360, the second pressure plate 2360 and the second engaging plates 2320 being capable of bending and deforming about the radial axis of rotation.

[0104] Understandably, in order to provide radial deformation capability, the second limiting member 2300 (e.g., the combination of the second pressure plate 2360 and the second locking plate 2320) has a smaller axial dimension (defined as thickness) compared to the retaining ring 1320. This reduces the space occupied by the limiting member, allowing the substrate 2110 to be clamped by the first limiting member 2200 and the second limiting member 2300 without thinning. Therefore, the sample carrier 2100 can be installed without flanges, thus overcoming the problems of increased processing difficulty and easy contamination of the support film 2120 caused by flanges.

[0105] The second locking plate 2320 is used for locking, and the second pressure plate 2360 is used for clamping. In use, the sample carrier 2100 is first placed into the limiting area; then the second limiting member 2300 is bent so that the second limiting member 2300 protrudes axially and retracts radially inward to fit into the limiting area; finally, the bending is released, so that the second limiting member 2300 springs back under its own elastic force, the second locking plate 2320 contacts the first limiting member 2200, and the second pressure plate 2360 contacts the sample carrier 2100.

[0106] Optionally, in Figure 4 In this configuration, two second engaging plates 2320 are respectively disposed on both sides of the second pressure plate 2360, and the two second engaging plates 2320 extend radially outward from the edge of the second pressure plate 2360 in opposite directions. Of course, the extension direction of the second engaging plates 2320 is not limited to radial, as long as the second engaging plates 2320 are inclined axially, so that the force generated between the first engaging part and the second engaging part can be decomposed into an axial component force for pressing the sample carrier 2100.

[0107] Because the thickness of the second limiting member 2300 is reduced, the space for the sample carrier 2100 to move within the limiting area is increased. The sample carrier 2100 is prone to move within the limiting area, which may cause attitude deviation (that is, deviation of the actual axis from the ideal axis), negatively affecting the observation effect of the sample.

[0108] Therefore, we will continue to refer to Figure 4 The first limiting member 2200 may include a first pressure plate 2210. The second pressure plate 2360 and the first pressure plate 2210 respectively contact the end faces of the sample carrier 2100 on both sides in the axial direction to position the placement posture of the sample carrier 2100, thereby obtaining a better positioning effect.

[0109] Understandably, the first pressure plate 2210 can be designed as Figure 4The first pressure plate 2210 extends radially, and the entire first pressure plate 2210 positions the sample carrier 2100 through surface contact. Alternatively, the surface of the first pressure plate 2210 may have protrusions for positioning, with at least three protrusions, to position the sample carrier 2100 by determining the plane using three points. Other possible designs for the first pressure plate 2210 can be found in related technologies involving end-face positioning, and will not be elaborated here.

[0110] Of course, the first limiting member 2200 also includes the first engaging plate 2230, which is arranged around the edge of the first pressure plate 2210. The first engaging plate 2230 and the first pressure plate 2210 define the limiting area, and the first engaging part is located at the end of the first engaging plate 2230 away from the first pressure plate 2210.

[0111] In order to achieve the engagement of the first engaging plate 2230 and the second engaging plate 2320, the first engaging plate 2230 is inclined in a direction relative to the axial direction (e.g., Figure 4 It extends inward along the radial direction. It can be understood that the first locking plate 2230 and the second locking plate 2320 first extend towards each other, so that they can be locked together. At the same time, since the extension direction is inclined to the axial direction, an axial component force can be generated to achieve the squeezing effect.

[0112] In the second embodiment, since the sample carrier fixture is installed by pressing the sample carrier 2100 on both ends in the axial direction, the shape requirements and machining accuracy requirements of the sample carrier 2100 are further relaxed.

[0113] For example, the sample carrier 2100 can be designed in a prism shape, such as Figure 4 The substrate 2110 is a cuboid, rather than the circular wafer commonly used in related technologies. Since the material of the substrate 2110 can be silicon or silicide, the substrate 2110 can be prepared with reference to the wafer dicing process in the semiconductor processing field. The cuboid substrate 2110 is easy to process, which not only improves the processing speed but also reduces the loss of raw materials of the substrate 2110.

[0114] Additionally, refer to Figure 4 The first pressure plate 2210 also forms a first window 2220, and the second pressure plate 2360 also forms a second window 2310. The first window 2220, the second window 2310 and the imaging window of the sample carrier 2100 are at least partially aligned in the axial direction to expose the sample located on the sample carrier 2100, so as to prevent the first pressure plate 2210 and the second pressure plate 2360 from blocking the end face of the sample carrier 2100 and affecting the observation.

[0115] Optionally, the second limiting member 2300 may also have a perforated hole 2340 for increasing the deformation capacity, making the installation of the second limiting member 2300 easier.

[0116] Even after the bend is released, the first clamping plate 2230 continues to exert a compressive force on the second clamping plate 2320. Therefore, the shape of the second pressure plate 2360 may not be able to return to its initial planar state, resulting in insufficient contact between the second pressure plate 2360 and the sample carrier 2100. Although protrusions can be designed on the second pressure plate 2360 to ensure effective contact, this would increase the rigidity of the second pressure plate 2360 and make deformation more difficult.

[0117] Therefore, it can be further specified that, in the engaged state, the deformation of the second engaging plate 2320 is greater than that of the second pressure plate 2360. This will further concentrate the deformation on the second engaging plate 2320 and further reduce the deformation of the second pressure plate 2360. In other words, when pressing down on the sample carrier 2100, the strain of the second pressure plate 2360 should be less than the strain of the second pressure plate 2360.

[0118] For example, refer to Figure 4 The hollow hole 2340 can be designed on the second snap plate 2320 (that is, the second snap plate 2320 forms a hollow hole 2340), so that the hollow hole 2340 has a stronger weakening effect on the rigidity of the second snap plate 2320 than on the second pressure plate 2360, thereby reducing the deformation of the second pressure plate.

[0119] In the second aspect of the embodiments, other technical details of the sample carrier fixture not mentioned can be referred to the first aspect of the embodiments, such as the design of the first locking plate 1230 (which may be closed or not), the position design of the contact part between the first limiting member 2200 and the second limiting member 2300 (which may be within or outside the limiting area), the charge discharge design of the sample carrier 3100 (including the substrate 3110 and the support film 3120), etc., which will not be repeated here.

[0120] It should be noted that, although in the second aspect embodiment, the second pressure plate 2360 and the second engaging plate 2320 extend in the same direction, the second engaging plate 2320 may also adopt other structures under the premise of engaging with the first engaging plate 2230. For example, the extension direction may be different from that of the second pressure plate 2360, and the number of second engaging plates 2320 may be further increased.

[0121] For example, refer to Figure 5According to an embodiment of the third aspect of this application, the sample carrier fixture includes a first limiting member 3200 and a second limiting member 3300. The second limiting member 3300 also includes a second pressure plate 3360 and a second engaging plate 3320. However, unlike the embodiment of the second aspect, the second engaging plate 3320 first extends axially from the edge of the second pressure plate 3360 to be axially offset from the second pressure plate 3360, and then extends radially outward to reach into 3230 to achieve engagement.

[0122] Optionally, the second limiting member 3300 has three second engaging plates 3320, which are equidistantly spaced around the second pressure plate 3360, and each second engaging plate 3320 extends outward. Increasing the number of second engaging plates 3320 can also help reduce the strain of the second pressure plate 3360 to some extent. Of course, the number of second engaging plates 3320 can also be set to more than three, which will not be elaborated here.

[0123] It is understandable that, since the first pressure plate 2210 and the second pressure plate 2360 can only serve as axial positioning, in the second aspect embodiment, the sample carrier 2100 may be misaligned due to lack of radial positioning, resulting in unsatisfactory observation results (e.g., non-centered imaging).

[0124] Therefore, we will continue to refer to Figure 5 For example, the second limiting member 3300 may include a second positioning plate 3350 for radially contacting and positioning the sample carrier 3100.

[0125] The second positioning plate 3350 protrudes from the second pressure plate 3360, thereby achieving a contact positioning effect. At least three second positioning plates 3350 are arranged around the second window 3310, thereby fully constraining the radial freedom of movement of the sample carrier 3100, ensuring that the imaging window of the sample carrier 3100 is accurately aligned with the second window 3310. When the second limiting member 3300 bends and deforms, the second positioning plate 3350 can also radially clamp the sample carrier 3100.

[0126] To facilitate processing, sheet metal processing can be used to form the second pressure plate 3360 and the second snap-fit ​​plate 2320 through steps such as punching and bending. At this time, the second positioning plate 3350 can be designed to extend from the edge of the second window 3310 toward the first limiting member 1200, so that the second positioning plate 3350 can also be formed by bending.

[0127] Of course, it is also possible that a first positioning plate is provided on the first limiting member 3200 to play a radial positioning role similar to that of the second positioning plate 3350. Alternatively, a first positioning plate can be provided on the first limiting member 3200 and a second positioning plate 3350 can be provided on the second limiting member 3300.

[0128] In the third aspect of the embodiment, the remaining technical details of the sample carrier fixture not mentioned can be referred to the second aspect of the embodiment, such as the design of the first pressure plate 3210 and the first locking plate 3230, the design of the first window 3220 and the second window 3310, the design of the sample carrier 3100 (including the substrate 3110 and the support film 3120), etc., which will not be repeated here.

[0129] It should be noted that in the embodiments of the second and third aspects, the sample carrier clamp is engaged by the deformation of the second limiting member. However, as mentioned above, the sample carrier clamp can also be engaged by the deformation of the first limiting member.

[0130] For example, refer to Figure 6 According to an embodiment of the fourth aspect of this application, the sample carrier fixture includes a first limiting member 4200 and a second limiting member 4300. The first limiting member 4200 also includes a first pressure plate 4210 and a first engaging plate 4230. However, unlike the embodiment of the third aspect, the first engaging plate 4230 is not closed in the circumferential direction. Instead, multiple first engaging plates 4230 are arranged at intervals around the first pressure plate 4210, thereby allowing the first engaging plate 4230 to deform.

[0131] In other words, when installing the second limiting member 4300, the second limiting member 4300 can be allowed to enter the limiting area by bending and deformation, or the second limiting member 4300 can be allowed to enter the limiting area by deformation of the first limiting member 4200 (spreading open the first locking plate 4230).

[0132] In the fourth aspect of the embodiments, the remaining technical details of the sample carrier fixture not mentioned can be referred to the embodiments of the second and third aspects, such as the design of the second pressure plate 4360 and the second locking plate 4320, the design of the first window 4220 and the second window 4310, the design of the sample carrier (including the substrate and the support film), etc., which will not be repeated here.

[0133] Sample carriers used for electron microscopy are relatively small, and the corresponding sample carrier clamps are also small, making it inconvenient to deform the sample carrier clamps using tools such as tweezers in practical use. Therefore, this application also provides a sample carrier mounting tool, which is suitable for assembling sample carrier clamps with a second limiting member capable of radially inward contraction and deformation.

[0134] For example, refer to Figure 4 and Figure 7 Taking the sample carrier fixture of the second aspect embodiment as an example, the sample carrier installation tool includes a clamping sleeve 2410 and a push rod. The clamping sleeve 2410 has a through clamping hole 2411 along its own axial direction. In the radial direction, the size of the clamping hole 2411 is less than or equal to the size of the opening of the limiting area. The push rod is used to push the second limiting member 2300 into the clamping hole 2411 and push the second limiting member 2300 out of the clamping hole 2411.

[0135] It is understood that the radial dimension refers to the projected dimension on the radial plane. In the second aspect embodiment, the opening of the limiting region is the first window 2220. The size of the clamping hole 2411 being less than or equal to the size of the opening 2230 of the limiting region means that the projection of the clamping hole 2411 can fall within the range of the first window 2220 (and is also located inside the circumference of the first locking plate 2230).

[0136] In use, the second limiting member 2300 is first placed into the clamping hole 2411, which allows the second limiting member 2300 to be compressed and deformed and kept in a compressed state. Next, the clamping hole 2411 is aligned with the first window 2220, and the second limiting member 2300 is pushed out using a push rod, so that the second limiting member 2300 moves towards the limiting area in a compressed state. After entering the limiting area, the second limiting member 2300 loses the constraint of the clamping hole 2411 and rebounds, thereby expanding outward, so that the projection area of ​​the second limiting member 2300 partially overlaps with the projection area of ​​the first locking plate 2230.

[0137] The clamping hole 2411 can stably maintain the second limiting member 2300 in a compressed state, and the sample carrier installation tool can push the second limiting member 2300 in a compressed state. Therefore, the sample carrier installation tool is easy to use and helps to simplify the operation steps of the sample carrier fixture.

[0138] To facilitate accurate alignment of the clamping hole 2411 and the first window 2220 during pushing, the clamping sleeve 2410 may further be provided with a positioning hole 2412. The positioning hole 2412 is connected to one end of the clamping hole 2411 and is arranged coaxially with the clamping hole 2411. The positioning hole 2412 is used to accommodate and position the first limiting member 2200.

[0139] The positioning hole 2412 can be used to position the first limiting member 2200 within the positioning hole 2412 via a radial sidewall or an additional axially provided protruding positioning post, as long as the positioning method does not interfere with the pushing path of the second limiting member 2300. Positioning the first limiting member 2200 and the second limiting member 2300 using the same reference (i.e., the clamping sleeve 2410) ensures more accurate positioning and avoids pushing failures due to misalignment.

[0140] The positioning hole 2412 and the clamping hole 2411 can be manufactured in the same machining process to further improve their coaxiality.

[0141] Optionally, refer to Figure 8 The push rod can be divided into a first push rod 2420 and a second push rod 2430. The first push rod 2420 is used to push in the second limiting member 2300, and the second push rod 2430 is used to push out the second limiting member 2300. This allows for the design of first push rods 2420 and second push rods 2430 with different shapes according to different requirements during pushing in and pushing out.

[0142] For the first push rod 2420, for example, the end face of the first push rod 2420 may be formed with a positioning protrusion 2421, which is used to insert into the second window 2310 of the second limiting member 2300 to position the second limiting member 2300. The positioning protrusion 2421 is designed to prevent the second limiting member 2300 from deviating during compression deformation.

[0143] Additionally, it is understood that the projection of the end face of the first push rod 2420 needs to fall within the range of the second limiting member 2300, so as to facilitate the compression deformation of the second limiting member 2300. For the second limiting member 2300 with a second pressure plate, as exemplified by the embodiment of the second aspect, the projection of the end face of the first push rod 2420 preferably falls within the range of the second pressure plate 2360.

[0144] For the second push rod 2420, exemplarily, the second push rod 2430 may include a limiting structure for limiting the extension stroke of the second push rod 2430, so as to prevent the second push rod 2430 and the second limiting member 2300 from compressing and damaging the sample carrier 3100.

[0145] Specific reference Figure 7 The second push rod 2430 may include a rod body 2431 and a handle 2432. The rod body 2431 is mounted on the handle 2432, and the stepped portion between the rod body 2431 and the handle 2432 serves as a limiting structure. Of course, the limiting structure can also have other construction methods, such as opening a guide groove on the second push rod 2430 to limit the stroke range.

[0146] Optionally, the sample carrier mounting tool includes a fixing base 2440, on which the first push rod 2420 is mounted. Clearly, the fixing base 2440 is larger than the first push rod 2420. Therefore, the fixing base 2440 allows the first push rod 2420 to be stably positioned, facilitating the placement of the first limiting member 2200 on the first push rod 2420, and also makes it easier for the operator to hold and use the first push rod 2420.

[0147] To enhance the functionality of the mounting bracket 2440 and facilitate the use of the sample carrier mounting tool, refer to... Figure 8 and Figure 9 The fixing base 2440 may also have a first countersunk hole 2441. The diameter of the first countersunk hole 2441 matches the outer diameter of the clamping sleeve 2410. The first push rod 2420 is installed in the first countersunk hole 2441. The first countersunk hole 2441 is used to guide the first push rod 2420 into the clamping hole 2411.

[0148] Additionally, refer to Figure 9 and Figure 10 The fixing base 2440 may also have a second countersunk hole 2442. The diameter of the second countersunk hole 2442 matches the outer diameter of the clamping sleeve 2410. The second countersunk hole 2442 is used to place the first limiting member 2200 containing the sample carrier 2100. The second countersunk hole 2442 is used to guide the first limiting member 2200 to be pressed into the positioning hole 2412.

[0149] In order to make full use of the space of the fixing base 2440, the first countersunk hole 2441 and the second countersunk hole 2442 can be located on both sides of the fixing base 2440 respectively.

[0150] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0151] In some alternative embodiments, the functions / operations mentioned in the block diagrams may not occur in the order shown in the operation diagrams. For example, depending on the functions / operations involved, two consecutively shown blocks may actually be executed substantially simultaneously, or the blocks may sometimes be executed in reverse order. Furthermore, the embodiments presented and described in the flowcharts of this application are provided by way of example to provide a more comprehensive understanding of the technology. The disclosed methods are not limited to the operations and logic flows presented herein. Alternative embodiments are contemplated in which the order of various operations is changed and sub-operations described as part of a larger operation are executed independently.

[0152] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A sample carrier clamp, characterized in that, The sample carrier clamp is used to mount a sample carrier, and the sample carrier clamp includes: A first limiting member defines a limiting area for placing the sample carrier, and the observation direction of the sample carrier is defined as the axial direction, with the limiting area open at both ends of the axial direction. The second limiting member engages with the first limiting member, and the first limiting member can press the second limiting member from one side of the limiting region to the other side of the limiting region in the axial direction, so that the second limiting member and the first limiting member clamp the sample carrier in the axial direction.

2. The sample carrier clamp according to claim 1, characterized in that, The first limiting member and / or the second limiting member are deformable to expand and shrink radially, thereby allowing the second limiting member to pass over the first engaging portion of the first limiting member along the axial direction and enter the limiting region when engaged, the radial direction being perpendicular to the axial direction; Preferably, the first limiting member and / or the second limiting member are made of conductive material.

3. The sample carrier clamp according to claim 2, characterized in that, The second limiting member includes a retaining ring that is circumferentially encircled and not closed, so as to contract inward when compressed; Preferably, one side of the retaining ring along the axial direction is used to abut against the first engaging portion, and the other side of the retaining ring along the axial direction is used to abut against the sample carrier; Preferably, the first limiting member includes a first engaging plate, which is closed around the circumference to define the limiting area. The first engaging plate extends inward on both sides of the axial direction in a direction inclined to the axial direction, with one side for engaging with the retaining ring and the other side for abutting against the sample carrier.

4. The sample carrier clamp according to claim 2, characterized in that, The second limiting member is capable of bending and deforming about the radial direction as the axis of rotation; Preferably, the second limiting member includes a second pressure plate and a plurality of second engaging plates arranged around the outer periphery of the second pressure plate, wherein the second pressure plate and the second engaging plates are capable of bending and deforming about the radial direction as the axis of rotation; Preferably, in the engaged state, the deformation of the second engaging plate is greater than that of the second pressure plate; Preferably, the second snap-fit ​​plate has perforated holes to increase its deformability; Preferably, the two second locking plates are respectively disposed on both sides of the second pressure plate, and the two second locking plates extend outward from the edge of the second pressure plate in opposite directions; Preferably, three or more second locking plates are arranged at equal intervals around the second pressure plate, and each second locking plate extends outward. Preferably, the first limiting member includes a first pressure plate and a first engaging plate, the first engaging plate being disposed around the edge of the first pressure plate, and the first engaging plate and the first pressure plate defining the limiting area; Preferably, the first locking plate extends inward, and the first locking plate and the second locking plate engage with each other.

5. The sample carrier clamp according to claim 1, characterized in that, The first limiting member has a first window, the second limiting member has a second window, and the first window, the second window, and the imaging window of the sample carrier are at least partially aligned in the axial direction to expose the sample located on the sample carrier. Preferably, the first limiting member includes a first positioning plate and / or the second limiting member includes a second positioning plate, the first positioning plate and / or the second positioning plate being used to contact and position the sample carrier in the radial direction; Preferably, the second positioning plate is arranged around the second window; Preferably, the second positioning plate extends from the edge of the second window toward the first limiting member.

6. An electron microscope support module, characterized in that, The electron microscope support module includes a sample carrier and a sample carrier fixture as described in any one of claims 1 to 5, wherein the sample carrier includes a substrate and a support film covering the substrate; Preferably, the substrate has at least one through imaging window formed along the axial direction, the support film covers the imaging window, the support film has at least one through object-carrying hole, and the projection of the object-carrying hole on the substrate is located within the imaging window; Preferably, the support film is a nickel-titanium film or a silicon nitride film, and the nickel-titanium film is in contact with the first limiting member and / or the second limiting member; Preferably, the sample carrier includes a conductive film that covers the substrate, the conductive film is in contact with the support film, and the conductive film is in contact with the first limiting member and / or the second limiting member, wherein the conductivity of the conductive film is greater than that of the support film.

7. The electron microscope support module according to claim 6, characterized in that, The sample carrier includes a radially outwardly extending flange, the radial direction being perpendicular to the axial direction, and the first limiting member and the second limiting member clamping the flange; Preferably, the sample carrier includes a mesh covering the substrate, the mesh including a first joint extending outward from the edge of the substrate along the radial direction, the first joint serving as the flange; Preferably, the substrate includes a support portion and a second bonding portion, the support portion being used to support the support film, the second bonding portion surrounding the support portion circumferentially, the thickness of the second bonding portion being less than the thickness of the support portion, and the second bonding portion serving as the flange.

8. A sample carrier mounting tool, characterized in that, The sample carrier mounting tool is used to assemble the sample carrier fixture according to claim 4, and the sample carrier mounting tool includes: A clamping sleeve has a through clamping hole along its own axial direction, and in the radial direction, the size of the clamping hole is smaller than or equal to the size of the opening of the limiting area; A push rod, the push rod being used to push the second limiting member into the clamping hole and to push the second limiting member out of the clamping hole.

9. The sample carrier mounting tool according to claim 8, characterized in that, The clamping sleeve has a positioning hole, which is connected to one end of the clamping hole. The positioning hole is coaxially arranged with the clamping hole and is used to accommodate and position the first limiting member. Preferably, the push rod includes a first push rod and a second push rod, wherein the first push rod is used to push the second limiting member in, and the second push rod is used to push the second limiting member out; Preferably, the end face of the first push rod is formed with a positioning protrusion, which is used to insert into the second window of the second limiting member to position the second limiting member; Preferably, the projection of the end face of the first push rod falls within the range of the second pressure plate; Preferably, the second push rod includes a limiting structure for limiting the push stroke of the second push rod; Preferably, the second push rod includes a rod body and a handle, the rod body is mounted on the handle, and the step portion between the rod body and the handle serves as the limiting structure.

10. The sample carrier mounting tool according to claim 9, characterized in that, The sample carrier mounting tool includes a fixing base, and the first push rod is mounted on the fixing base; Preferably, the fixing seat has a first countersunk hole, the first push rod is installed in the first countersunk hole, the diameter of the first countersunk hole matches the outer diameter of the clamping sleeve, and the first countersunk hole is used to guide the first push rod to be inserted into the clamping hole; Preferably, the fixing seat has a second countersunk hole, the diameter of which matches the outer diameter of the clamping sleeve. The second countersunk hole is used to place the first limiting member containing the sample carrier and to guide the first limiting member to be pressed into the positioning hole.

Images