Liquid supply system, control method of liquid supply system and semiconductor process equipment

Abstract

The invention provides a liquid supply system, a control method of the liquid supply system and semiconductor process equipment. The system comprises a heater, a controller, a first pipeline, a second pipeline, a first valve arranged on the first pipeline and a second valve arranged on the second pipeline. The two ends of the first pipeline are connected with the liquid supply port and the input end of the heater correspondingly, and the first valve is used for being opened when the liquid supply system works normally so as to conduct the first pipeline and supply liquid to the heater. The two ends of the second pipeline are connected with the liquid supply port and the input end of the heater respectively, and when the liquid supply system works normally, the second valve is closed, so that the second pipeline is disconnected; and the controller is used for responding to an abnormal signal of the liquid supply system, controlling the first valve and the heater to be closed and controlling the second valve to be opened, so that the heated liquid retained in the heater is discharged from the output end of the heater under the action of the liquid provided by the liquid supply port. Therefore, the safety of the liquid supply system is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a liquid supply system, a control method for the liquid supply system, and semiconductor process equipment. Background Technology

[0002] In semiconductor manufacturing processes, a liquid supply system is required to supply heated liquid to the reaction chambers of semiconductor equipment. Current liquid supply systems input room-temperature liquid from the supply port into a heater, which heats the flowing liquid. Through continuous circulation and heating, the liquid is heated to a set temperature before being supplied to the reaction chambers.

[0003] In the existing technology, when an abnormal signal occurs in the liquid supply system, an emergency power cut will be performed, causing the heated liquid to remain in the heater. Since the liquid does not flow, the liquid remaining in the heater will continue to be heated by the residual heat of the heating wire in the heater, generating bubbles in the pipeline, increasing the pipeline pressure, and eventually causing the pipeline to rupture, which is a low safety issue. Summary of the Invention

[0004] This invention provides a liquid supply system, a control method for the liquid supply system, and semiconductor process equipment to solve the problem of low safety in existing liquid supply systems.

[0005] To solve the above problems, the present invention is implemented as follows:

[0006] In a first aspect, embodiments of the present invention provide a liquid supply system, comprising:

[0007] Heater, controller, first pipeline, second pipeline, first valve installed on the first pipeline and second valve installed on the second pipeline;

[0008] The first pipeline is connected to the liquid supply port and the input end of the heater respectively at both ends. The first valve is used to open when the liquid supply system is working normally to open the first pipeline and supply liquid to the heater. The second pipeline is connected to the liquid supply port and the input end of the heater respectively at both ends. When the liquid supply system is working normally, the second valve is closed to disconnect the second pipeline.

[0009] The controller is used to respond to an abnormal signal from the liquid supply system by controlling the first valve and the heater to close, and controlling the second valve to open, so that the heated liquid remaining in the heater is discharged from the output end of the heater under the action of the liquid supplied from the liquid supply port.

[0010] In a second aspect, embodiments of the present invention provide a control method for a liquid supply system, applied to a controller in the liquid supply system described in the first aspect, the method comprising:

[0011] Detect abnormal signals from the liquid supply system;

[0012] In response to an abnormal signal from the liquid supply system, the first valve and the heater are closed, and the second valve is opened, so that the heated liquid remaining in the heater is discharged from the output end of the heater under the action of the liquid supplied from the liquid supply port.

[0013] Thirdly, embodiments of the present invention provide a semiconductor process apparatus, the semiconductor process apparatus including the liquid supply system described in the first aspect above.

[0014] In this embodiment of the invention, a second pipeline is provided in the liquid supply system, with both ends of the second pipeline connected to the liquid supply port and the input end of the heater, respectively. The controller, in response to an abnormal signal from the liquid supply system, controls the opening of a second valve. Since the second pipeline connects the liquid supply port and the input end of the heater, when the second valve is open, the liquid supplied by the liquid supply port flows into the heater through the second pipeline and exits from the heater's output end. This displaces the heated liquid remaining in the heater with the liquid supplied by the liquid supply port, allowing the heater to be filled with unheated liquid supplied by the liquid supply port. This prevents the liquid remaining in the heater from being further heated by residual heat, which could lead to pipeline rupture, thus improving the safety of the liquid supply system. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of a liquid supply system provided in an embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of another liquid supply system provided in an embodiment of the present invention;

[0018] Figure 3 This is a schematic diagram of an abnormal power failure logic provided in an embodiment of the present invention;

[0019] Figure 4 This is a schematic diagram of a valve power supply provided in an embodiment of the present invention;

[0020] Figure 5This is another schematic diagram of valve power supply provided in an embodiment of the present invention;

[0021] Figure 6 This is a schematic diagram of another liquid supply system provided in an embodiment of the present invention;

[0022] Figure 7 This is a schematic diagram of the steps of a control method for a liquid supply system provided in an embodiment of the present invention.

[0023] Figure label:

[0024] 101-Heater, 102-First Pipeline, 103-Second Pipeline, 104-First Valve, 105-Second Valve, 106-Storage Tank, 107-Third Valve, 108-Third Pipeline, 109-Fourth Valve, 110-Liquid Circulation Pipeline, 111-Booster Pump, 112-Sixth Valve, 113-Pressure Relief Pipeline, 114-Fifth Valve. Detailed Implementation

[0025] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0026] First, the application scenario of this invention will be described. In this application scenario, the semiconductor process equipment can specifically be a wet cleaning device, which is used in semiconductor manufacturing to remove contaminants from the wafer surface through a wet cleaning process. Wet cleaning is a key process in semiconductor manufacturing. In wet cleaning, chemical solutions and deionized water are used to remove contaminants from the wafer surface, such as photoresist residue, particles, organic matter, and metal residues. After cleaning, a drying solvent is used to dry any remaining liquid on the wafer surface. For the various liquids used in the wet cleaning device, a liquid supply system supplies liquid to the reaction chamber of the wet cleaning device. The wafer is placed in the reaction chamber, and after connecting the reaction chamber to the liquid supply system, the liquid supplied by the liquid supply system enters the reaction chamber. In some application scenarios, the liquid supply system first heats the liquid to provide the reaction chamber with a high-temperature liquid.

[0027] Taking liquid as the drying solvent as an example, the liquid supply system is used to provide the drying solvent, such as isopropanol (IPA), to the wet cleaning equipment. Correspondingly, the liquid supply system can also be called an IPA supply module. Wet cleaning equipment has modular configuration capabilities, allowing the configuration of an IPA supply module to provide IPA to the reaction chamber. During the drying process, the liquid generates surface tension, which pulls on the patterns on the wafer. When the surface tension exceeds the stability of the pattern structure, it leads to pattern collapse. As wafers have evolved from traditional planar transistor structures to FinFET structures, the feature dimensions of devices on the wafer (e.g., the gate length of transistors) are continuously decreasing, and the aspect ratio of patterns on the wafer is continuously increasing. This makes the stability of the patterns more susceptible to the influence of the manufacturing process. After drying the wafer with a drying solvent, the phenomenon of pattern collapse on the wafer becomes increasingly severe, and room-temperature IPA can no longer meet the requirements of advanced processes. Therefore, a heater is installed in the liquid supply system to heat the IPA at room temperature. The heated IPA has lower surface tension, resulting in less stretching of the pattern during drying and effectively preventing pattern collapse. This has become an important technical means in advanced manufacturing processes. Devices and patterns are microstructures formed on the wafer surface. Devices are microscopic electronic components with specific functions, such as transistors, diodes, capacitors, and resistors. Patterns refer to the designs formed on the wafer surface through photolithography, which define the shape and layout of the devices.

[0028] However, IPA itself is flammable and explosive. For example, in existing technology, when the controller in the liquid supply system detects an abnormal signal, it will cut off the power to the entire liquid supply system to ensure its safety. In this case, the booster pump and heater on the pipeline where the heater is located will stop working directly. The high-temperature IPA in the pipeline of the liquid supply system cannot be circulated by the booster pump. At this time, some of the high-temperature IPA in the liquid supply system will remain in the heater. The heater will not cool down immediately after the power is cut off. Since the liquid is not flowing, the high-temperature IPA remaining in the heater will continue to be heated by the residual heat of the heating wire in the heater. This will cause the IPA near the heating wire to heat up locally. When the temperature rises to above 82°C, reaching the boiling point of IPA, it will cause a large number of bubbles to be generated in the pipeline, increasing the pipeline pressure and causing the pipeline to rupture, resulting in a safety accident.

[0029] Therefore, improving the safety of the liquid supply system is of paramount importance. To this end, embodiments of the present invention provide a liquid supply system. The liquid supply system will now be described in detail.

[0030] Figure 1 This is a schematic diagram of a liquid supply system provided in an embodiment of the present invention, as shown below. Figure 1As shown, the system includes: a controller (not shown in the figure), a heater 101, a first pipeline 102, a second pipeline 103, a first valve 104 disposed on the first pipeline 102, and a second valve 105 disposed on the second pipeline 103.

[0031] The first pipeline 102 is connected to the liquid supply port and the input terminal of the heater 101 at both ends, respectively. The first valve 104 is used to open the first pipeline 102 to supply liquid to the heater 101 when the liquid supply system is working normally. The second pipeline 103 is connected to the liquid supply port and the input terminal of the heater 101 at both ends, respectively. When the liquid supply system is working normally, the second valve 105 is closed to disconnect the second pipeline 103. The controller is used to respond to abnormal signals from the liquid supply system, control the first valve 104 and the heater 101 to close, and control the second valve 105 to open, so that the heated liquid remaining in the heater 101 is discharged from the output terminal of the heater 101 under the action of the liquid supplied from the liquid supply port.

[0032] In normal operation, the controller opens the first valve 104 and the heater 101, and closes the second valve 105. The piping in the liquid supply system uses high-performance fluoropolymer materials, such as perfluoroalkoxyalkane (PFA). PFA possesses high chemical stability, low pollution, high-temperature resistance, good mechanical properties, and excellent electrical insulation. Therefore, it ensures the stability of the liquid supply system to a certain extent. The liquid supply port is the port for plant-level liquid supply, referring to the liquid supplied by the plant's management department. The supply port can be an output port on the plant-level liquid supply pipeline. The heater 101 includes a heating wire and converts electrical energy into heat energy to heat the liquid flowing through it. The controller operates a control system, housed in an electrical box, and is electrically connected to various sensors, valves, and the heater 101 in the liquid supply system.

[0033] Abnormal signals are predefined signals used to characterize safety risks in the liquid supply system. For example, abnormal signals include: leakage signals, door opening signals, Emergency Machine Off (EMO) trigger signals, exhaust over-limit alarm signals, and heater alarm signals. The liquid supply system may also be equipped with leakage sensors, which can be located on the outside of the pipelines in the system. If liquid is detected, the leakage sensor reports a leakage signal to the controller. The equipment door of the liquid supply system is equipped with a door open / close sensor, a device used to detect the open / closed state of the door. When the equipment door is open, the door open / close sensor reports a door opening signal to the controller. The liquid supply system is equipped with an EMO button, which can be activated by the operator in an emergency. Accordingly, when the EMO button is activated, the EMO module reports an EMO trigger signal to the controller. Furthermore, the liquid supply system is equipped with an exhaust module. When the exhaust volume exceeds the set safety limit, or when the pressure sensor of the exhaust module detects that the pressure difference between the inside and outside of the equipment exceeds the upper limit, the exhaust module reports an exhaust over-limit alarm signal to the controller. When the heater 101 malfunctions or the temperature detected by the temperature sensor inside the heater 101 exceeds the set upper temperature limit, the heater 101 reports a heater alarm signal to the controller.

[0034] If the controller detects any of the abnormal signals, it determines that the liquid supply system is malfunctioning and poses a high risk. Accordingly, to ensure the safety of the liquid supply system, the controller will shut down the entire system, meaning all other electrical components in the system will be de-energized. This power-down will cause the heater 101 to lose power and the first valve 104 to open. To avoid the safety hazard caused by the residual heat of the heating wire in the heater 101 continuing to heat the remaining liquid after the power is cut off, this embodiment of the invention adds a second pipeline 103 to the original liquid supply system. When the controller detects an abnormal signal, it controls the second valve 105 to open, allowing liquid supplied through the second pipeline 103 to flow through the heater 101 and displace the heated liquid remaining in the heater 101.

[0035] In this embodiment of the invention, a second pipeline 103 is provided in the liquid supply system, with both ends of the second pipeline 103 connected to the liquid supply port and the input end of the heater 101, respectively. The controller, in response to an abnormal signal from the liquid supply system, controls the second valve 105 to open. Since the second pipeline 103 connects the liquid supply port and the input end of the heater 101, when the second valve 105 is open, the liquid supplied by the liquid supply port flows into the heater 101 through the second pipeline 103 and flows out from the output end of the heater 101. This displaces the heated liquid remaining in the heater 101 with the liquid supplied by the liquid supply port, allowing the heater 101 to flow with unheated liquid supplied by the liquid supply port. This prevents the liquid remaining in the heater 101 from being further heated by residual heat, which could lead to pipeline rupture, thus improving the safety of the liquid supply system.

[0036] Specifically, the input end of the second pipe 103 can be directly connected to the liquid supply port, or it can be connected to the liquid supply port through the first pipe 102. (Refer to...) Figure 2 Optionally, the liquid supply system further includes: a storage tank 106 and a third valve 107 disposed on the first pipeline 102; the first valve 104 is located between the third valve 107 and the first input end of the storage tank 106; the second pipeline 103 is connected to the first pipeline 102, and the connection point between the second pipeline 103 and the first pipeline 102 is located between the first valve 104 and the third valve 107. The controller is also used to control the third valve 107 to open in response to an abnormal signal. That is, in response to an abnormal signal, the second valve 105 and the third valve 107 are opened.

[0037] The storage tank 106 is used to store the liquid supplied by the supply port when the liquid supply system is working normally. A liquid level sensor is installed in the storage tank 106 to detect the liquid level. A leakage sensor may also be installed on the outside of the storage tank 106 to detect leakage signals. Specifically, the first pipeline 102 includes pipelines from the supply port to point a, from point a to point b, and from point b to the input end of the heater 101. The second pipeline 103 includes pipelines from point a clockwise direction to the input end of the second valve 105 (i.e.,...). Figure 2 The pipeline from point f to the input end of heater 101. With the first valve 104 and the third valve 107 open, the portion of the first pipeline 102 that supplies liquid to the storage tank 106 is open, and the liquid supplied from the supply port flows from the first input end (i.e., Figure 2Point b) flows into the storage tank 106. With the third valve 107 and the second valve 105 open, the liquid supplied by the supply port flows through the portion of the first pipeline 102 from the supply port to point a and the second pipeline 103, then flows into the input end of the heater 101, and then through the heater 101, causing the heated liquid retained in the heater 101 to be discharged from the output end of the heater 101. The second valve 105 and the first valve 104 are mutually exclusive. This prevents the first valve 104 from opening when the heated liquid in the heater 101 is being replaced, thus preventing liquid from being injected into the storage tank 106, and also prevents liquid from flowing into the heater 101 through the second pipeline 103 when liquid is being injected into the storage tank 106.

[0038] In normal operation, the user can preset the liquid level on the control interface of the liquid supply system. After the user inputs a start command on the control interface, a liquid inlet signal is generated. In response to this signal, the controller opens the first valve 104 and the third valve 107 to supply liquid to the storage tank 106. When the preset liquid level is reached, the liquid level sensor sends liquid level information to the controller. Upon receiving this information, the controller stops the liquid inlet and closes the first valve 104 and the third valve 107.

[0039] In this embodiment of the invention, by setting a third valve 107 and placing the connection point between the second pipeline 103 and the first pipeline 102 between the first valve 104 and the third valve 107, the controller can conveniently control the liquid supply to the storage tank 106 and the liquid replacement of the heater 101 by controlling the opening and closing of the first valve 104, the third valve 107, and the second valve 105. Furthermore, this method only requires adding a branch pipeline from point a to the input end of the heater 101 to the existing first pipeline 102, which enables liquid replacement of the heater 101 when the liquid supply system malfunctions, resulting in lower modification costs.

[0040] Reference Figure 2 Optionally, the liquid supply system further includes: a third pipeline 108 and a fourth valve 109 disposed on the third pipeline 108; the input end of the third pipeline 108 is connected to the output end of the heater 101, and the output end of the third pipeline 108 is connected to a preset drain pipe (not shown in the figure); the controller is also configured to, in response to an abnormal signal, control the fourth valve 109 to open, so that the heated liquid retained in the heater 101 is discharged through the third pipeline 108 to the preset drain pipe. That is, in response to an abnormal signal, the third valve 107, the second valve 105, and the fourth valve 109 are opened.

[0041] The pre-installed wastewater discharge pipe is an existing pipe in the plant system used for discharging waste liquid. The diameter and material of the pre-installed wastewater discharge pipe meet the plant system's requirements for waste liquid pipes. The output end of the third pipe 108 can be connected to one of the input ends of the pre-installed wastewater discharge pipe. When the controller detects an abnormal signal and shuts off the entire machine, it can control the opening of the third valve 107, the second valve 105, and the fourth valve 109. This allows the room-temperature liquid supplied from the liquid supply port to pass sequentially through the section of the first pipe 102 where the third valve 107 is located, the second pipe 103 where the second valve 105 is located, the heater 101, and the third pipe 108, displacing the residual high-temperature liquid inside the heater 101 and discharging it into the pre-installed wastewater discharge pipe. The portion of the first pipeline 102 containing the third valve 107, the second pipeline 103, and the third pipeline 108 constitute the heater flushing pipeline. Specifically, the heater flushing pipeline includes the pipeline from the liquid supply port to point a, clockwise from point a to point f, from point f to the input end of the heater 101, and from the input end of the heater 101 to the preset drain pipe. The temperature of the room temperature liquid can be the same as room temperature.

[0042] In this embodiment of the invention, by setting a third pipeline 108, which is connected to the output end of the heater 101 and a preset drain pipe, the third valve 107, the second valve 105 and the fourth valve 109 are opened when an abnormal signal is detected, so that the heated liquid retained in the heater 101 is directly discharged into the preset drain pipe. In this way, the existing preset drain pipe is reused to treat the replaced liquid, which can reduce the modification cost of the liquid supply system to a certain extent.

[0043] It should be noted that in practical applications, the output end of the third pipeline 108 can also be connected to a preset liquid collection container, which is a container capable of storing flammable and explosive liquids. In this way, when the controller detects an abnormal signal, it controls the opening of the third valve 107, the second valve 105, and the fourth valve 109, so that the displaced liquid is collected into the preset liquid collection container.

[0044] Reference Figure 2 Optionally, the liquid supply system further includes: a liquid circulation pipeline 110 and a booster pump 111 disposed on the first pipeline 102, and a heater 101 disposed on the first pipeline 102. The input end of the liquid circulation pipeline 110 is connected to the output end of the heater 101; the output end of the liquid circulation pipeline 110 is connected to the second input end of the storage tank 106 (i.e., Figure 2 Point e) in the diagram connects to the liquid circulation line 110, which includes a line running counterclockwise from the output of the heater 101 to the second input of the storage tank 106. The input of the booster pump 111 is connected to the output of the storage tank 106 (i.e., Figure 2Point c) is connected, and the output end of the booster pump 111 is connected to the input end of the heater 101 on the first pipeline 102.

[0045] Reference Figure 2 Optionally, the liquid supply system further includes: a sixth valve 112 disposed on the liquid circulation pipeline 110; a booster pump 111 disposed between the input end of the heater 101 and the output end of the storage tank 106, and the sixth valve 112 disposed between the output end of the heater 101 and the second input end of the storage tank 106. The liquid circulation pipeline 110 is also connected to the liquid supply pipeline of the reaction chamber, and the connection point between the liquid circulation pipeline 110 and the liquid supply pipeline (i.e. Figure 2 Point d in the diagram is located between the output end of the sixth valve 112 and the heater 101. The liquid supply line is the line from point d to the reaction chamber.

[0046] The controller is also used to: control the first valve 104 and the third valve 107 to open and the second valve 105, the fourth valve 109 and the sixth valve 112 to close in response to the liquid inlet signal of the liquid supply system; control the sixth valve 112, the booster pump 111 and the heater 101 to open in response to the heating signal of the liquid supply system; and control the opening degree of the sixth valve 112 and the output power of the booster pump 111 and the heater 101 respectively according to the current pressure of the liquid circulation pipeline 110; wherein the output power and the opening degree of the sixth valve 112 are positively correlated with the current pressure of the liquid circulation pipeline 110.

[0047] In normal operation, users can preset the target temperature and pressure threshold on the control interface of the liquid supply system. Upon receiving liquid level information, the controller triggers a heating signal. In response to this signal, the sixth valve 112, booster pump 111, and heater 101 are opened. At this time, booster pump 111 draws liquid from the storage tank 106 and circulates it in the liquid circulation pipeline 110. Specifically, after passing through booster pump 111, the liquid is heated by heater 101, and the heated liquid flows back to the storage tank 106 after passing through the sixth valve 112. As booster pump 111 continues to operate, the liquid in storage tank 106 gradually heats up during circulation until it reaches the preset target temperature.

[0048] The liquid feeding operation and heating process can also be performed simultaneously, and this embodiment of the invention does not limit this. For example, after the first valve 104 and the third valve 107 have been open for a preset time, a heating signal is generated to start circulating heating. After reaching the preset target temperature, the controller can continue to control the temperature and / or flow rate of the liquid circulating in the liquid circulation pipeline 110, so that the temperature of the circulating liquid is maintained at the preset target temperature, ensuring that a stable liquid temperature is provided to the reaction chamber. In normal operation, the liquid circulation loop in the liquid circulation pipeline 110 is always present. When the reaction chamber needs to use the liquid supplied by the liquid supply system in the process formula, the controller controls the liquid supply valve (not shown in the figure) on the liquid supply pipeline to open. When the liquid is not needed, the liquid supply valve on the liquid supply pipeline is controlled to close. If the controller of the liquid supply system detects an abnormal signal, it can also control the liquid supply valve on the liquid supply pipeline to close, so as to stop the continued supply of liquid to the process chamber.

[0049] Under normal circumstances, when the liquid supply system receives a shutdown signal, it will first shut down the heater 101, and then the booster pump 111 will continue to work, allowing the liquid in the liquid circulation pipeline 110 to continue circulating. Normal power-off will occur when the temperature of the liquid in the liquid circulation pipeline 110 drops below a preset safe temperature, for example, below 50°C. In other words, under normal power-off conditions, heated liquid will not remain in the heater 101, thus ensuring the safety of the liquid supply system.

[0050] In practical applications, the liquid circulation pipeline 110 can be connected to the supply pipelines of multiple reaction chambers. At any given time, the more reaction chambers whose supply valves are open, the lower the current pressure within the liquid circulation pipeline 110. Conversely, the fewer reaction chambers whose supply valves are open, the higher the current pressure within the liquid circulation pipeline 110. Furthermore, the temperature of the circulating liquid within the liquid circulation pipeline 110, the opening degree of the sixth valve 112, and the output power of the booster pump 111 also affect the current pressure within the pipeline. Higher temperatures of the circulating liquid, a larger opening degree of the sixth valve 112, and a higher output power of the booster pump 111 all result in a higher current pressure within the liquid circulation pipeline 110. In other words, the pressure within the liquid circulation pipeline 110 changes dynamically.

[0051] Therefore, the controller can also make dynamic adjustments based on a pressure feedback mechanism. Specifically, based on the current pressure of the liquid circulation pipeline 110, the controller controls the opening degree of the sixth valve 112 and the output power of the booster pump 111 and the heater 101. Specifically, the controller can calculate the pressure difference obtained by subtracting a preset pressure threshold from the current pressure as the target pressure difference. The larger the target pressure difference, the greater the output power of the booster pump 111 and the heater 101, and the larger the opening degree of the sixth valve 112. The preset pressure threshold is used to characterize the normal pressure within the liquid circulation pipeline 110, and the preset pressure threshold can be pre-input by the user through the settings interface.

[0052] For example, a pre-set correspondence between pressure difference and the output power of the booster pump, the output power of the heater, and the opening degree of the sixth valve can be established. The booster pump output power, heater output power, and sixth valve opening degree corresponding to the currently calculated target pressure difference are then retrieved from this correspondence. The booster pump 111 is then controlled to operate at the retrieved booster pump output power, the heater 101 is controlled to operate at the retrieved heater output power, and the sixth valve 112 is controlled to open to the retrieved opening degree. The sixth valve 112 can be a back pressure valve, allowing for convenient adjustment of its opening degree. In this embodiment of the invention, by dynamically adjusting the opening degree of the sixth valve 112 and the respective output powers of the booster pump 111 and the heater 101 based on the current pressure of the liquid circulation pipeline 110, a reasonable pressure is maintained within the liquid circulation pipeline 110, thereby preventing the liquid circulation pipeline 110 from rupturing and causing a safety accident.

[0053] A flow sensor can also be installed inside the liquid circulation pipeline 110. The controller can increase the output power of the booster pump 111 if the flow rate reported by the flow sensor is less than a preset flow threshold, ensuring that the flow rate of the circulating liquid in the liquid circulation pipeline 110 reaches the preset flow threshold and providing a stable flow of liquid to the reaction chamber. The preset flow threshold is set by the user through a settings interface. The flow sensor can also output an alarm when the current flow rate exceeds the preset flow threshold, indicating an abnormal flow in the liquid circulation pipeline 110. In response to this alarm, the controller reduces the output power of the booster pump 111.

[0054] Alternatively, in one implementation, the output of the second valve 105 is connected to the input of the heater 101. Figure 2 (The connection method shown in the figure). In this method, when the controller detects an abnormal signal, it controls the third valve 107, the second valve 105 and the fourth valve 109 to open. The liquid supplied by the liquid supply port flows directly into the heater 101 from the second pipeline 103 and is finally discharged to the preset drain pipe through the fourth valve 109. Therefore, the efficiency of flushing and replacing the residual heated liquid is higher.

[0055] In another implementation, the output of the second valve 105 can also be connected to the input of the booster pump 111. In this method, when the controller detects an abnormal signal, it controls the third valve 107, the second valve 105, and the fourth valve 109 to open. The liquid supplied from the supply port flows through the second pipeline 103, first into the booster pump 111, and then into the heater 101. This allows residual heated liquid in the booster pump 111 to be flushed out, thereby reducing the probability of damage to the components in the booster pump 111.

[0056] Optionally, the liquid supply system further includes: a first power supply circuit, a second power supply circuit, and a third power supply circuit; the first power supply circuit is used to supply power to electrical components in the liquid supply system other than the controller, the third valve 107, the second valve 105, and the fourth valve 109; the second power supply circuit is connected to the third valve 107, the second valve 105, and the fourth valve 109, and the third power supply circuit is connected to the controller; the controller is also used to disconnect the second power supply circuit and maintain the first and third power supply circuits when the liquid supply system is working normally; and to disconnect the first power supply circuit and maintain the second and third power supply circuits in response to an abnormal signal.

[0057] Specifically, after the power supplied by the plant system is introduced into the liquid supply system, it can be divided into multiple power supply circuits: a first power supply circuit, a second power supply circuit, and a third power supply circuit. The second power supply circuit supplies power to the third valve 107, the second valve 105, and the fourth valve 109; the third power supply circuit supplies power to the controller of the liquid supply system; and the first power supply circuit supplies power to all electrical components in the liquid supply system except for the controller, the third valve 107, the second valve 105, and the fourth valve 109. The first power supply circuit can be considered the main power supply circuit; for example, it supplies power to the aforementioned booster pump 111, heater 101, and other valves besides the third valve 107, the second valve 105, and the fourth valve 109. When the controller detects an abnormal signal, it can cut off the power to the first power supply circuit, thereby shutting down the heater 101. Specifically, the first valve 104 and the sixth valve 112 are automatic reset valves; after a power outage, the first valve 104 and the sixth valve 112 will automatically return to their default closed state.

[0058] In the event of an abnormal signal, to ensure system safety, the controller will directly cut off the power to the first power supply circuit, thereby closing the heater 101, booster pump 111, first valve 104, and sixth valve 112. In this situation, since the heater 101 and booster pump 111 are directly shut off, heated liquid will remain in the heater 101. Therefore, in this embodiment of the invention, a second pipeline 103 is added to replace the heated liquid remaining in the heater 101, thus eliminating the safety hazard of pipeline rupture caused by the residual heat continuing to heat the remaining heated liquid. Of course, if the first valve 104 and the sixth valve 112 are not automatic reset valves, they can be closed before disconnecting the first power supply circuit.

[0059] Specifically, if the first valve 104 is in the closed state, the operation of sending a control signal is not executed, and the first valve 104 can be controlled to close; if the first valve 104 is in the open state, a control signal is sent to control the first valve 104 to close. If the sixth valve 112 is a valve with a minimum opening degree, controlling the sixth valve 112 to close will still maintain the minimum opening degree.

[0060] Branch switches are installed on the first, second, and third power supply circuits. When the controller detects an abnormal signal, it triggers a safety interlock. At this time, the controller disconnects the branch switch on the first power supply circuit, maintaining power supply to the second and third power supply circuits. For example, Figure 3 This is a schematic diagram of an abnormal power failure logic provided in an embodiment of the present invention, such as... Figure 3 As shown, in the event of any one of the following signals detected—leakage signal, door opening signal, EMO trigger signal, exhaust over-limit alarm signal, and heater alarm signal—the entire unit is powered off while the heater flushing pipeline remains powered on. Powering off the entire unit means disconnecting the first power supply circuit, while maintaining power to the heater flushing pipeline means maintaining the second power supply circuit to continue supplying power to the third valve 107, the second valve 105, and the fourth valve 109. Specifically, in this embodiment, the controller responds to an abnormal signal by powering off the entire unit, at which point the booster pump 111 stops operating. Because a second pipeline 103 is added to the liquid supply system, connecting the liquid supply port to the heater 101, in response to an abnormal signal, the controller simultaneously opens the third valve 107, the second valve 105, and the fourth valve 109, allowing ambient temperature IPA to flow to the heater 101 under plant pressure, and then be discharged into a pre-set drain pipe after passing through the heater 101.

[0061] Specifically, maintaining power to the second power supply circuit means keeping the branch switches on the second power supply circuit continuously open; maintaining power to the third power supply circuit means keeping the branch switches on the third power supply circuit continuously open. Alternatively, if an uninterruptible power supply (UPS) is installed on the third power supply circuit, the branch switches on the third power supply circuit are disconnected, and the controller is powered by the UPS battery, thus maintaining power to the third power supply circuit. The third power supply circuit can be a time-delay power supply circuit, providing a low-voltage 24V power supply to the controller. Based on the third power supply circuit, power outages to the controller can be delayed. Specifically, when the power input from the plant system is normal, the UPS regulates the voltage and supplies it to the controller, while simultaneously charging the UPS battery. When the branch switches on the third power supply circuit are disconnected, the controller is powered by the battery.

[0062] In this embodiment of the invention, by setting up multiple power supply circuits, when an abnormal signal occurs, disconnecting the first power supply circuit can promptly cut off power to other electrical components, thereby reducing the probability of component damage. Simultaneously, maintaining power to the second and third power supply circuits ensures that the controller can control the third valve 107, the second valve 105, and the fourth valve 109. This ensures timely control of the heated liquid supplied from the liquid supply port to the replacement heater 101, mitigating the safety risk of residual liquid in the heater 101 being further heated by residual heat, potentially causing pipe rupture, as in existing methods.

[0063] Figure 4 This is a schematic diagram of a valve power supply provided in an embodiment of the present invention, such as... Figure 4 As shown, the third, second, and fourth valves are classified as solenoid valve group 1, and the valves in the liquid supply system other than the third, second, and fourth valves are classified as solenoid valve group 2. Under normal operating conditions, solenoid valve group 1 and solenoid valve group 2 are powered normally, enabling normal control of the third, second, fourth, and other valves. Figure 5 This is another schematic diagram of valve power supply provided in an embodiment of the present invention, such as... Figure 5 As shown, when the triggering condition is met, i.e. an abnormal signal is detected, the safety interlock is triggered, and the branch switch on the first power supply circuit is opened to cut off the power supply to the solenoid valve group 2 while retaining the power supply to the solenoid valve group 1.

[0064] In this embodiment of the invention, the third valve 107, the second valve 105, and the fourth valve 109 can share a single control valve island, or each can use its own control valve island. The control valve islands for the third valve 107, the second valve 105, and the fourth valve 109 are powered separately by a second power supply circuit. When the entire machine is powered off, the second power supply circuit is retained, allowing the controller to control the opening of the third valve 107, the second valve 105, and the fourth valve 109 to flush the heater 101. Specifically, the third valve 107, the second valve 105, and the fourth valve 109 can be driven by corresponding electromagnetic mechanisms. The controller can control the electromagnetic mechanisms to open and close the valves via the control valve islands.

[0065] In one implementation of this invention, the third valve 107, the second valve 105, and the fourth valve 109 can be valves with fixed opening degrees. That is, the third valve 107, the second valve 105, and the fourth valve 109 only have two states: open and closed, and do not support adjusting the valve opening degree. For example, the third valve 107, the second valve 105, and the fourth valve 109 can be pneumatic valves. In this approach, the controller only needs to control the third valve 107, the second valve 105, and the fourth valve 109 to open. Each time they are opened, it is equivalent to controlling the third valve 107, the second valve 105, and the fourth valve 109 to reach their maximum valve opening degree. The control logic is simpler, and the valve cost is lower.

[0066] Optionally, in this embodiment of the invention, the controller is further configured to determine a target duration based on the current temperature of the heater 101; the target duration is positively correlated with the current temperature of the heater 101. Specifically, the controller can use the most recently uploaded temperature value from the temperature sensor in the heater 101 as the current temperature of the heater 101. The higher the current temperature, the longer the target duration is determined. The target duration characterizes the rinsing time of the heater 101. For example, the actual time required to cool the heating wire in the heater 101 to below a preset safe temperature using liquid supplied from the liquid supply port at different temperatures can be pre-tested, and the rinsing time corresponding to that temperature can be generated based on this actual time. For example, a safety redundancy of 10 minutes can be added to the actual time as the rinsing time corresponding to that temperature. The correspondence between different temperatures and rinsing times is pre-stored in the controller. Accordingly, the controller can find the rinsing time corresponding to the temperature closest to the current temperature in the correspondence and use it as the target duration.

[0067] After the target duration is reached, the valves on the heater flushing pipeline can be closed. Specifically, the controller is also used to close the third valve 107, the second valve 105, and the fourth valve 109 when the opening duration of the third valve 107, the second valve 105, and the fourth valve 109 reaches the target duration. Since a large amount of heated liquid remains in the liquid circulation pipeline 110 where the heater 101 is located, if the heated liquid in the heater 101 is replaced, the remaining liquid in the liquid circulation pipeline 110 will re-enter the heater 101. In this embodiment of the invention, based on the positive correlation between the target duration and the current temperature of the heater 101, the target duration is adaptively determined according to the current temperature of the heater 101. When the opening duration of the third valve 107, the second valve 105, and the fourth valve 109 reaches the target duration, the third valve 107, the second valve 105, and the fourth valve 109 are controlled to close, so that the room temperature liquid supplied by the liquid supply port can continuously flush the heater 101, ensuring that the liquid in the heater 101 can be fully replaced and the heater 101 can be effectively cooled, thereby eliminating safety hazards to a greater extent.

[0068] Since the highest temperature of the liquid in the liquid circulation line 110 is the preset target temperature, it is also possible to test in advance, using the liquid supplied from the liquid supply port, the actual time required to cool the heating wire in the heater 101 to below the preset safe temperature at the preset target temperature. Based on this actual time, a fixed flushing time is generated, and this fixed flushing time is directly used as the target time. For example, assuming the diameter of the second line 103 is 3 / 4 inch, the liquid flow rate of the heater flushing line is 15 liters per minute (LPM), and it takes 10 minutes to cool the heating wire to below 50°C, then the fixed flushing time can be set to 20 minutes. Subsequently, during flushing, a 20-minute flushing time is set to ensure that the liquid in the heater 101 can be fully displaced and the heater 101 is effectively cooled.

[0069] In one implementation, the third valve 107, the second valve 105, and the fourth valve 109 can be valves with variable opening degrees. For example, the third valve 107, the second valve 105, and the fourth valve 109 can be pressure control valves, which support the adjustment of valve opening degrees.

[0070] Optionally, in this embodiment of the invention, the controller is further configured to determine the target opening degree of the third valve 107, the second valve 105 and the fourth valve 109 according to the current temperature of the heater 101; the target opening degree is positively correlated with the current temperature; the controller is further configured to control the third valve 107, the second valve 105 and the fourth valve 109 to open to their respective target opening degrees.

[0071] Specifically, the higher the current temperature, the larger the target opening degree. For example, the user can pre-write a correspondence between temperature and a first opening degree for the controller. The controller can find the first opening degree corresponding to the temperature closest to the current temperature in this correspondence and use it as the target opening degree. The target opening degrees for the third valve 107, the second valve 105, and the fourth valve 109 are the same. Alternatively, a correspondence between temperature and a first opening degree can be set for each of the third valve 107, the second valve 105, and the fourth valve 109, so the target opening degrees for the third valve 107, the second valve 105, and the fourth valve 109 can be different; this embodiment of the invention does not limit this.

[0072] When controlling the opening of the third valve 107, the second valve 105, and the fourth valve 109, specifically, the third valve 107, the second valve 105, and the fourth valve 109 are controlled to open to the target opening degree. For example, assuming the target opening degree is 90%, the controller can control the third valve 107, the second valve 105, and the fourth valve 109 to all open to 90%. In this embodiment of the invention, by using valves with variable opening degrees as the third valve 107, the second valve 105, and the fourth valve 109, the controller can flexibly control the opening degrees of the third valve 107, the second valve 105, and the fourth valve 109 based on the current temperature of the heater 101 when the entire system is powered off, thus improving the flexibility of the liquid supply system.

[0073] Optionally, a pressure valve (not shown in the figure) is also provided on the first pipeline 102; the pressure valve is located between the liquid supply port and the third valve 107, and the pressure valve is in a normally open state. The pressure valve is a valve that maintains a fixed opening. Alternatively, the pressure valve is a valve with a variable opening, and the controller is also used to control the opening of the pressure valve based on the current temperature of the heater 101 in response to an abnormal signal; the opening of the pressure valve is positively correlated with the current temperature of the heater 101.

[0074] The pressure of the liquid output from the supply port is the plant supply pressure, which is determined by the plant system. The plant supply pressure is relatively high. Therefore, a pressure valve is installed between the supply port and the third valve 107. This pressure valve reduces the pressure of the liquid output from the supply port before it enters the supply system, ensuring the safety of the supply system. This pressure valve is normally open. Therefore, when liquid needs to be supplied to the storage tank 106, only the first valve 104 and the third valve 107 need to be opened. When flushing the heater 101, only the third valve 107, the second valve 105, and the fourth valve 109 need to be opened, making control more convenient.

[0075] Specifically, the pressure valve can be a valve with a fixed opening, meaning it does not support adjusting the valve opening. Thus, by opening the pressure valve, it can be made to maintain a fixed opening, achieving a normally open pressure valve.

[0076] Furthermore, the pressure valve can also be a variable-opening valve, meaning it supports adjusting the valve opening; this pressure valve can also be called a pressure control valve. The controller is also used to control the opening of the pressure valve to be larger when an abnormal signal is detected, provided the current temperature is higher. For example, the user can pre-write a correspondence between temperature and a second opening degree for the controller. The controller finds the second opening degree corresponding to the temperature closest to the current temperature in the correspondence. The opening of the pressure valve is increased to the found second opening degree. The lowest opening degree included in the temperature-second opening degree correspondence is greater than the valve opening degree of the pressure valve in its normally open state. In this embodiment of the invention, the controller can flexibly control the opening of the pressure valve based on the current temperature of the heater 101 when the entire unit is powered off, improving the flexibility of the liquid supply system.

[0077] It should be noted that, under normal operating conditions, when the pressure valve opening is variable, the controller can adjust the pressure valve to the user-specified opening and then maintain the pressure valve opening at the user-specified opening, thus achieving a normally open state.

[0078] During normal operation of the liquid supply system, human error or malfunction of the machine's valves may occur, such as a sudden closure of the open circuit on the liquid supply line to all reaction chambers, causing a sudden increase in pressure within the liquid circulation line 110. This could impact the heater 101 or the pipeline, posing a safety risk. (Refer to...) Figure 2 Optionally, the liquid supply system further includes: a pressure relief line 113 and a fifth valve 114 disposed on the pressure relief line 113; the input end of the pressure relief line 113 is connected to the output end of the booster pump 111, and the output end of the pressure relief line 113 is connected to the third input end of the liquid storage tank 106.

[0079] Specifically, the pressure relief line 113 runs clockwise from the output end of the booster pump 111 to the third input end (i.e., Figure 2 The annular pipeline at point g) provides a pressure relief port by adding a pressure relief pipeline 113, so that a portion of the liquid coming out of the booster pump 111 in the liquid circulation pipeline 110 can be directly diverted back to the storage tank 106 for circulation pressure relief of the liquid circulation pipeline 110.

[0080] In this way, in the event of a sudden pressure increase in the liquid circulation pipeline 110, the added pressure relief pipeline 113 can promptly release pressure, thereby reducing the safety risk of impact on the heater 101 or pipelines and ensuring stable system operation. Furthermore, connecting the input end of the pressure relief pipeline 113 to the output end of the booster pump 111 prevents the heated liquid from being diverted, thus avoiding any impact on heating efficiency. Connecting the output end of the pressure relief pipeline 113 to the third input end of the storage tank 106 allows the diverted liquid to flow back into the storage tank 106, forming a self-circulation and preventing a reduction in the total liquid volume in the supply system. Simultaneously, as the liquid in the pressure relief pipeline 113 flows into the storage tank 106 from the third input end, it increases the fluidity of the liquid in the storage tank 106, resulting in a more uniform liquid temperature.

[0081] Reference Figure 6 The connection point between the second pipeline 103 and the heater 101 is the input end of the heater 101, and the connection point between the pressure relief pipeline 113 and the booster pump 111 is the output end of the booster pump 111. It should be noted that when the heater 101 has multiple input ends, the output ends of the second pipeline 103 and the first pipeline 102 can each be connected to one input end of the heater 101. When the heater 101 has only one input end, a Y-type adapter can be connected to that input end of the heater 101, and the output ends of the second pipeline 103 and the first pipeline 102 can each be connected to one input end of the Y-type adapter. When the heater 101 has multiple output ends, the input end of the third pipeline 108 and the pipeline between the heater 101 and the sixth valve 112 are each connected to one output end of the heater 101. When the heater 101 itself has only one output end, a Y-type adapter can be connected to the output end of the heater 101. The input end of the third pipeline 108 and the pipeline between the heater 101 and the sixth valve 112 are respectively connected to one output end of the Y-type adapter.

[0082] Furthermore, when the booster pump 111 has multiple output terminals, the input terminal of the pressure relief line 113 and the line between the booster pump 111 and the heater 101 are respectively connected to one output terminal of the booster pump 111. When the booster pump 111 has only one output terminal, a Y-type adapter can be connected to that output terminal of the booster pump 111, and the input terminal of the pressure relief line 113 and the line between the booster pump 111 and the heater 101 are respectively connected to one output terminal of the Y-type adapter.

[0083] Optionally, the fifth valve 114 is a valve that maintains a fixed opening; or, the fifth valve 114 is a valve with a variable opening, and the controller is further configured to control the opening of the fifth valve 114 based on a target pressure difference; the opening of the fifth valve 114 is positively correlated with the target pressure difference, the target pressure difference being the difference between the current pressure of the liquid circulation pipeline 110 and a preset pressure threshold, the preset pressure threshold being used to characterize the normal pressure within the liquid circulation pipeline 110.

[0084] Specifically, the fifth valve 114 can be a valve with a fixed opening, meaning that the fifth valve 114 does not support adjusting the valve opening. In this way, by opening the fifth valve 114, it can be made to maintain a fixed opening. Alternatively, the fifth valve 114 can be a valve with a variable opening, meaning that the fifth valve 114 supports adjusting the valve opening; this fifth valve 114 can also be called a pressure control valve.

[0085] Optionally, the fifth valve 114 can be in a normally open state. If the opening degree of the fifth valve 114 is fixed, it is opened by default. If the opening degree of the fifth valve 114 is variable, it is adjusted to the user-specified opening degree by default and then maintained at that degree, thus keeping the fifth valve 114 normally open. In this way, after the booster pump 111 is turned on, liquid circulation is established in the pressure relief pipeline 113. Setting the fifth valve 114 to be normally open adds an extra layer of protection to the liquid supply system. If a sudden pressure abnormality occurs in the liquid circulation pipeline 110, the pressure abnormality alarm will fail. Due to the existence of the pressure relief pipeline 113, the liquid circulation pipeline 110 can be directly depressurized, preventing safety accidents caused by excessive pressure and reducing the probability of damage to components installed in the liquid circulation pipeline 110, thus improving safety. At the same time, after an emergency power outage, although the booster pump 111 is shut down, the liquid circulation pipeline 110 may be under high pressure due to the abnormal situation. At this time, since the fifth valve 114 is normally open, the pressure of the liquid circulation pipeline 110 where the heater 101 is located can be released at the same time, thereby reducing the risk of pipeline rupture and improving the safety of the liquid supply system.

[0086] Of course, the fifth valve 114 can also be opened when an abnormal pressure alarm is received. This can avoid the problem of the liquid circulation pipeline 110 being diverted due to the presence of the pressure relief pipeline 113 under normal working conditions, thereby reducing the heating efficiency.

[0087] Furthermore, the fifth valve 114 is selected as a valve that supports intelligent control. For example, the fifth valve 114 can be a back pressure valve. When the fifth valve 114 is a valve with a variable opening, the controller is also used to control the opening of the fifth valve 114 based on the target pressure difference. Specifically, when the pressure sensor in the liquid circulation pipeline 110 exceeds a preset pressure threshold, it outputs a pressure anomaly alarm to indicate that there is a pressure anomaly in the liquid circulation pipeline 110. In response to this pressure anomaly alarm, the controller controls the opening of the fifth valve 114 based on the target pressure difference. The method for calculating the target pressure difference can be referred to the foregoing description and will not be repeated here. For example, the user can pre-write a correspondence between pressure difference and third opening for the controller. The controller finds the third opening corresponding to the pressure difference closest to the target pressure difference in the correspondence. The controller increases the opening of the fifth valve 114 to the found third opening. The lowest opening included in the correspondence between pressure difference and third opening is greater than the valve opening of the fifth valve 114 in its normally open state. The larger the opening degree of the fifth valve 114, the greater the flow rate of the pressure relief pipeline 113. In this embodiment of the invention, the controller can flexibly control the opening degree of the fifth valve 114 based on the current target pressure difference, thereby flexibly controlling the flow rate of the pressure relief pipeline 113 and improving the flexibility of the liquid supply system.

[0088] It should be noted that the fifth valve 114 can also be a needle valve, which can be adjusted by manual rotation. This can prevent the fifth valve 114 from being accidentally controlled, resulting in excessive flow in the pressure relief line 113, which in turn causes insufficient flow in the liquid circulation line 110, making it impossible to supply liquid to the reaction chamber normally.

[0089] Figure 7 This is a schematic diagram illustrating the steps of a control method for a liquid supply system provided in an embodiment of the present invention. This method can be applied to the controller in the aforementioned liquid supply system and may include:

[0090] Step 201: Detect abnormal signals in the liquid supply system.

[0091] Step 202: In response to the abnormal signal of the liquid supply system, control the first valve 104 and the heater 101 to close, and control the second valve 103 to open, so that the heated liquid retained in the heater 101 is discharged from the output end of the heater 101 under the action of the liquid supplied by the liquid supply port.

[0092] Optionally, embodiments of the present invention further include the following steps:

[0093] Step 301: Determine the target duration based on the current temperature of the heater 101; the target duration is positively correlated with the current temperature of the heater 101.

[0094] Step 302: When the opening duration of the third valve 107, the second valve 105 and the fourth valve 109 reaches the target duration, control the third valve 107, the second valve 105 and the fourth valve 109 to close.

[0095] Optionally, embodiments of the present invention further include the following steps:

[0096] Step 401: Determine the target opening degree of the third valve 107, the second valve 105 and the fourth valve 109 according to the current temperature of the heater 101; the target opening degree is positively correlated with the current temperature.

[0097] Step 402: Control the third valve 107, the second valve 105 and the fourth valve 109 to open to their respective target opening degrees.

[0098] Optionally, embodiments of the present invention further include the following steps:

[0099] Step 501: In response to the abnormal signal, control the opening degree of the pressure valve based on the current temperature of the heater 101; the opening degree of the pressure valve is positively correlated with the current temperature of the heater 101, and the pressure valve is located between the liquid supply port and the third valve 107.

[0100] The specific implementation methods and technical effects of the above control methods can be found in the aforementioned descriptions, and will not be repeated here.

[0101] This invention also provides a semiconductor process apparatus, which includes the above-mentioned liquid supply system and reaction chamber, wherein the liquid supply system supplies liquid to the reaction chamber.

[0102] The terms "first," "second," etc., used in the specification and claims of this invention are used to distinguish similar objects and are not used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the invention can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, the first object can be one or more.

[0103] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0104] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.

Claims

1. A liquid supply system, characterized in that, The system includes: Heater, controller, first pipeline, second pipeline, first valve installed on the first pipeline and second valve installed on the second pipeline; The first pipeline is connected to the liquid supply port and the input end of the heater respectively at both ends. The first valve is used to open when the liquid supply system is working normally to open the first pipeline and supply liquid to the heater. The second pipeline is connected to the liquid supply port and the input end of the heater respectively at both ends. When the liquid supply system is working normally, the second valve is closed to disconnect the second pipeline. The controller is used to respond to an abnormal signal from the liquid supply system by controlling the first valve and the heater to close, and controlling the second valve to open, so that the heated liquid remaining in the heater is discharged from the output end of the heater under the action of the liquid supplied from the liquid supply port.

2. The system according to claim 1, characterized in that, The liquid supply system also includes: a third pipeline and a fourth valve installed on the third pipeline; The input end of the third pipeline is connected to the output end of the heater, and the output end of the third pipeline is connected to a preset sewage discharge pipeline; The controller is also configured to respond to the abnormal signal by controlling the fourth valve to open, so that the heated liquid remaining in the heater is discharged through the third pipeline to the preset sewage pipe.

3. The system according to claim 1 or 2, characterized in that, The liquid supply system also includes: The third valve and the liquid storage tank are installed on the first pipeline; The first valve is located between the third valve and the first input end of the liquid storage tank, the second pipeline is connected to the first pipeline, and the connection point between the second pipeline and the first pipeline is located between the first valve and the third valve; The controller is also configured to control the third valve to open in response to the abnormal signal.

4. The system according to claim 3, characterized in that, The liquid supply system also includes: Liquid circulation pipeline and booster pump installed on the first pipeline; The input end of the liquid circulation pipeline is connected to the output end of the heater, and the output end of the liquid circulation pipeline is connected to the second input end of the liquid storage tank. The output end of the second valve is connected to the input end of the heater, or the output end of the second valve is connected to the input end of the booster pump.

5. The system according to claim 4, characterized in that, The liquid supply system further includes: a first power supply circuit, a second power supply circuit, and a third power supply circuit; The first power supply circuit is used to supply power to the electrical components in the liquid supply system other than the controller, the third valve, the second valve and the fourth valve; The second power supply circuit is connected to the third valve, the second valve, and the fourth valve, and the third power supply circuit is connected to the controller; The controller is also configured to disconnect the second power supply circuit and maintain the first power supply circuit and the third power supply circuit when the liquid supply system is working normally; and to disconnect the first power supply circuit and maintain the second power supply circuit and the third power supply circuit in response to the abnormal signal.

6. The system according to claim 4, characterized in that, The liquid supply system also includes: Pressure relief pipeline and a fifth valve installed on the pressure relief pipeline; The input end of the pressure relief pipeline is connected to the output end of the booster pump, and the output end of the pressure relief pipeline is connected to the third input end of the liquid storage tank.

7. A control method for a liquid supply system, applied to a controller in the liquid supply system according to any one of claims 1 to 6, characterized in that, The method includes: Detect abnormal signals from the liquid supply system; In response to an abnormal signal from the liquid supply system, the first valve and the heater are closed, and the second valve is opened, so that the heated liquid remaining in the heater is discharged from the output end of the heater under the action of the liquid supplied from the liquid supply port.

8. The method according to claim 7, characterized in that, The method further includes: The target duration is determined based on the current temperature of the heater; the target duration is positively correlated with the current temperature of the heater. When the opening duration of the third valve, the second valve, and the fourth valve reaches the target duration, the third valve, the second valve, and the fourth valve are controlled to close.

9. The method according to claim 8, characterized in that, The method further includes: Based on the current temperature of the heater, the target opening degree of each of the third valve, the second valve, and the fourth valve is determined; the target opening degree is positively correlated with the current temperature. Control the third valve, the second valve and the fourth valve to open to their respective target opening degrees.

10. The method according to claim 8 or 9, further comprising: In response to the abnormal signal, the opening degree of the pressure valve is controlled based on the current temperature of the heater; The opening degree of the pressure valve is positively correlated with the current temperature of the heater, and the pressure valve is located between the liquid supply port and the third valve.

11. A semiconductor process apparatus, characterized in that, The semiconductor process equipment includes a liquid supply system and a reaction chamber as described in any one of claims 1 to 6, wherein the liquid supply system supplies liquid to the reaction chamber.

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