Micro-ring resonator, optoelectronic computing neural network chip and optoelectronic computing method

Abstract

The present disclosure provides a microring resonator, an optoelectronic computing neural network chip and an optoelectronic computing method, and relates to the technical field of optoelectronics. A microring resonator comprises: a multimode optical input port for inputting a multimode optical signal containing multiple modes; a straight waveguide connected to the multimode optical input port for transmitting the multimode optical signal; an adjustable coupler located between the straight waveguide and a microring waveguide for adjusting the coupling strength of the multimode optical signal between the straight waveguide and the microring waveguide; the microring waveguide is connected to the adjustable coupler for resonating the optical signal meeting the target resonance condition; a mode decomposer located at the output position of the straight-through port and the output port for decomposing and transmitting the input optical signal of different modes to different output waveguides. Thus, through the adjustable coupler and the mode decomposer, the flexibility and efficiency of optical signal processing are significantly improved, and the performance and stability of the optoelectronic computing neural network chip are improved.

Description

Technical Field

[0001] This disclosure relates to the field of optoelectronic technology, and in particular to a microring resonator, an optoelectronic computing neural network chip, and an optoelectronic computing method. Background Technology

[0002] Currently, network throughput is increasing daily, especially with the rapid development of artificial intelligence (AI) technology, leading to an explosive growth in data volume. In the communications field, optoelectronic bandwidth technology is in a phase of rapid development, but it still faces the challenge of ever-increasing bandwidth demands. With the widespread adoption of applications such as artificial intelligence, cloud computing, and ultra-high-definition video, traditional optical communication technologies are struggling to meet future data transmission needs, necessitating further improvements in bandwidth capabilities.

[0003] To meet the ever-increasing demands for data transmission and processing, the speed of existing optoelectronic communication chips needs to be further improved. Current optoelectronic communication chips typically use add-drop microring resonators for wavelength division multiplexing (WDM) or cascaded multiple microring resonators. However, the former requires precise control of the coupling region and loss structure; otherwise, performance degradation may occur. Furthermore, it is sensitive to environmental disturbances, requiring additional thermal tuning structures to maintain resonant wavelength stability. Its ability to process multiple wavelengths simultaneously is limited, and it lacks multi-mode parallel processing capabilities. The latter, with its multiple microring resonators, is difficult to tune, and once the device is fabricated, its adjustability is very low, making it difficult to achieve device or chip reconfigurability and limiting its application scope. Summary of the Invention

[0004] This disclosure provides a microring resonator, a photoelectric computing neural network chip, and a photoelectric computing method to at least solve the above-mentioned technical problems existing in the prior art.

[0005] According to a first aspect of this disclosure, a microring resonator is provided, comprising: a multimode optical input port for inputting a multimode optical signal containing multiple modes; a straight waveguide connected to the multimode optical input port for transmitting the multimode optical signal; an adjustable coupler located between the straight waveguide and the microring waveguide for adjusting the coupling strength of the multimode optical signal between the straight waveguide and the microring waveguide; a microring waveguide connected to the adjustable coupler for resonating an optical signal that satisfies a target resonance condition; and a mode resolver located at the output positions of the through port and the output port for decomposing the input optical signals of different modes and transmitting them to different output waveguides.

[0006] In one embodiment, the multimode optical signal includes optical signals with multiple orthogonal modes and optical signals with multiple wavelengths.

[0007] In one embodiment, the through port is used to output an optical signal that does not meet the target resonance condition; the output port is used to output an optical signal processed by the micro-ring waveguide.

[0008] In one embodiment, the waveguide materials of the straight waveguide and the micro-ring waveguide are Si, Si3N4, InGaAsP, and polymers; the polymers include at least one of polymethyl methacrylate, polyimide, polycarbonate, polystyrene, polytetrafluoroethylene, and polyethylene terephthalate.

[0009] In one embodiment, the width of the straight waveguide and the micro-ring waveguide is 200nm~2000nm, and the thickness is 0.2μm~0.5μm or 2.5μm~3.5μm.

[0010] In one embodiment, the width of the straight waveguide is 200nm~2000nm, the width of the micro-ring waveguide is 200nm~1800nm, and the spacing between the straight waveguide and the micro-ring waveguide is 30nm~1900nm.

[0011] In one embodiment, the substrate material of the straight waveguide and the micro-ring waveguide is InP or Si; the cladding material of the straight waveguide and the micro-ring waveguide is at least one of SiO2, InP, Si3N4, Al2O3 and polymers.

[0012] In one embodiment, the diameter of the microring waveguide is 5 μm to 130 μm.

[0013] In one embodiment, the adjustable coupler includes an insulating isolation layer and a thermally adjustable electrode layer, the insulating isolation layer being in contact with the straight waveguide and the micro-ring waveguide, and the thermally adjustable electrode layer being located above the insulating isolation layer.

[0014] In one embodiment, the thickness of the insulating layer is 500nm to 5000nm; the thickness of the thermally modulated electrode layer is 20nm to 1000nm.

[0015] In one embodiment, the insulating layer is made of at least one of SiO2, Si3N4, Al2O3, and polymers.

[0016] In one embodiment, the insulating isolation layer includes a plurality of isolation gratings, the height of the isolation gratings being 50nm~350nm, and the distance between the isolation gratings and the straight waveguide and the micro-ring waveguide being 100nm~500nm.

[0017] In one embodiment, the microring resonator further includes a processing module connected to the mode resolver, used for timing processing, logic operations, and mode conversion of the optical signal output by the mode resolver.

[0018] In one possible implementation, the mode conversion is used to convert the result of a logic operation into a fundamental mode form, and the result of the logic operation in the fundamental mode form is transmitted in a single-mode waveguide.

[0019] In one embodiment, the microring resonator includes one or more microring waveguides and one or more tunable couplers, the number of microring waveguides being the same as the number of tunable couplers.

[0020] In one embodiment, the wavelengths of the optical signals transmitted in different micro-ring waveguides are different, and multiple orthogonal modes of optical signals can be transmitted in the same micro-ring waveguide.

[0021] According to a second aspect of this disclosure, an optoelectronic computing neural network chip is provided, comprising: a plurality of microring resonators as described in the fundamental disclosure.

[0022] According to a third aspect of this disclosure, a photoelectric computing method is provided, applied to the photoelectric computing neural network chip described in this disclosure. The method includes: receiving an input multimode optical signal; the multimode optical signal includes optical signals with multiple orthogonal modes and optical signals with multiple wavelengths; adjusting the coupling strength of the multimode optical signal entering a microring waveguide based on an adjustable coupler; receiving an optical signal that resonates with the microring waveguide to satisfy a target resonance condition; and decomposing the resonant optical signal through a mode decomposer and transmitting it to different output waveguides.

[0023] In one possible implementation, after the optical signal that satisfies the target resonance condition based on the micro-ring waveguide resonance, the method further includes: transmitting the optical signal that does not satisfy the target resonance condition to the mode resolver of the through port; and decomposing the optical signal that does not satisfy the target resonance condition based on the mode resolver of the through port and transmitting it to different output waveguides corresponding to the mode resolver of the through port.

[0024] In one embodiment, the step of decomposing the resonant optical signal through a mode decomposer and transmitting it to different output waveguides includes: decomposing the resonant optical signal through a mode decomposer at the output port and transmitting it to different output waveguides corresponding to the mode decomposer at the output port.

[0025] This disclosure discloses a microring resonator, an optoelectronic computing neural network chip, and an optoelectronic computing method. The microring resonator includes a multimode optical input port for inputting multimode optical signals containing multiple modes; a straight waveguide connected to the multimode optical input port for transmitting the multimode optical signals; an adjustable coupler located between the straight waveguide and the microring waveguide for adjusting the coupling strength of the multimode optical signals between the two; a microring waveguide connected to the adjustable coupler for resonating optical signals that meet the target resonance condition; and a mode resolver located at the output positions of the through port and the output port for decomposing the input optical signals of different modes and transmitting them to different output waveguides. Therefore, through the adjustable coupler and the mode resolver, the flexibility and efficiency of optical signal processing are significantly improved, enabling precise control and efficient resonance of multimode optical signals, optimizing the signal transmission path, enhancing the computing power density of the optoelectronic computing neural network chip, and improving the performance and stability of the optoelectronic computing neural network chip.

[0026] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this disclosure, nor is it intended to limit the scope of this disclosure. Other features of this disclosure will become readily apparent from the following description. Attached Figure Description

[0027] The above and other objects, features, and advantages of this disclosure will become readily apparent from the following detailed description of exemplary embodiments, taken in conjunction with the accompanying drawings. Several embodiments of this disclosure are illustrated in the drawings by way of example and not limitation, in which:

[0028] In the accompanying drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

[0029] Figure 1 A schematic diagram of the structure of a microring resonator according to an embodiment of this disclosure is shown. Figure 1 ;

[0030] Figure 2 A structural side view of the adjustable coupler in an embodiment of this disclosure is shown;

[0031] Figure 3 A schematic diagram of the structure of a microring resonator according to an embodiment of this disclosure is shown. Figure 2 ;

[0032] Figure 4 A schematic diagram of the structure of an optoelectronic computing neural network chip according to an embodiment of the present disclosure is shown;

[0033] Figure 5 A schematic diagram of the structure of a photoelectric computing method according to an embodiment of the present disclosure is shown. Detailed Implementation

[0034] To make the objectives, features, and advantages of this disclosure more apparent and understandable, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0035] Figure 1 A schematic diagram of the structure of a microring resonator according to an embodiment of this disclosure is shown. Figure 1 ,like Figure 1 As shown, a microring resonator includes:

[0036] Multimode optical input port, used to input multimode optical signals containing multiple modes;

[0037] A straight waveguide, connected to the multimode optical input port, is used to transmit multimode optical signals;

[0038] An adjustable coupler, located between a straight waveguide and a micro-ring waveguide, is used to adjust the coupling strength of multimode optical signals between the straight waveguide and the micro-ring waveguide;

[0039] A micro-ring waveguide, connected to a tunable coupler, is used to resonate an optical signal that satisfies the target resonance condition.

[0040] The mode decomposer, located at the output positions of the through port and the output port, is used to decompose the input optical signals of different modes and transmit them to different output waveguides.

[0041] In this embodiment, the multimode optical input port is the input terminal of the microring resonator, used to receive multimode optical signals. Multimode optical signals contain multiple modes, such as... (Transverse Electric mode) (Transverse magnetic mode, etc.) These modes represent different distributions of electric and magnetic fields as light propagates in a waveguide. The input of multimode optical signals provides a rich information carrier for the microring resonator, enabling subsequent resonance and mode selection. The multimode optical input port can be a multimode fiber, used to transmit optical signals containing multiple modes into the microring resonator.

[0042] In this embodiment, the straight waveguide serves as the channel connecting the multimode optical input port and the tunable coupler. Its function is to efficiently transmit the input multimode optical signal to the coupling region of the microring resonator. The straight waveguide needs to minimize optical signal loss during transmission while maintaining the integrity of different optical signal modes. The straight waveguide can be single-mode or multimode, depending on the system design requirements. For example, the straight waveguide can be manufactured using silicon-based materials to achieve low-loss and high-efficiency optical transmission.

[0043] In this embodiment, the tunable coupler is a key component in the microring resonator, allowing dynamic adjustment of the coupling strength of optical signals from the straight waveguide to the microring waveguide. This adjustment is achieved by changing the physical or optical properties of the coupler, such as through thermo-optic or electro-optic effects. The tunable coupler enables the system to selectively couple optical signals of specific wavelengths or modes as needed, thereby achieving precise control over the resonance conditions. For example, by changing the temperature of the coupler, its refractive index can be adjusted, thus changing the coupling efficiency. The tunable coupler changes the effective resonance conditions of the microring waveguide by adjusting the refractive index (thermo-optic / electro-optic effect) of the coupling region, thereby filtering optical signals of specific wavelengths into the microring waveguide. In a multimode waveguide, different modes (such as...) The coupling efficiency varies, and the adjustable coupler can specifically enhance the coupling strength of the target mode and suppress the non-target mode.

[0044] In this embodiment, the micro-ring waveguide (such as...) Figure 1 In The microring waveguide is the core component of a microring resonator, connected to a tunable coupler to form a closed loop. Microring waveguides can resonate with optical signals that meet specific conditions, typically related to the wavelength of the light, the physical dimensions of the microring, and the refractive index of the material. The resonant characteristics of microring waveguides make them important for applications in optical communication and optical information processing. For example, microring waveguides can be designed to have the lowest loss at a specific wavelength, thereby achieving selective enhancement of optical signals at that wavelength.

[0045] In this embodiment, the mode resolver is located at the output of the microring resonator, and its function is to decompose the multimode optical signal processed by the microring waveguide into different modes (such as...). Figure 1 The system can classify optical signals into modes 1, 2, ..., N, and transmit them to different output waveguides. Mode demultiplexers are crucial for mode multiplexing and demultiplexing, allowing the system to independently control and process the optical signal of each mode. The design of a mode demultiplexer needs to accurately distinguish between different modes of optical signals and effectively separate them. For example, mode demultiplexers can employ structures such as gratings or mode selectors to achieve selective output of optical signals of different modes.

[0046] In this disclosure, the microring resonator can receive optical signals of multiple modes, dynamically adjust the coupling strength through an adjustable coupler, resonate optical signals under specific conditions using a microring waveguide, and separate and transmit different modes of optical signals to different output waveguides through a mode decomposer. This not only improves the flexibility and efficiency of optical signal processing, but also achieves precise control and efficient resonance of multimode optical signals, optimizes the signal transmission path, enhances the computing power density of the optoelectronic computing neural network chip, and improves the performance and stability of the optoelectronic computing neural network chip.

[0047] In another embodiment, the multimode optical signal includes optical signals with multiple orthogonal modes and optical signals with multiple wavelengths.

[0048] In this embodiment, in the fields of optical communication and optical information processing, orthogonal modes refer to optical signal modes that propagate independently in a waveguide and do not interfere with each other. These modes can be TE (transverse electric) modes, TM (transverse magnetic) modes, or other modes defined based on waveguide structure and material properties. The existence of orthogonal modes allows multiple signals to be transmitted simultaneously in the same waveguide, thereby improving the transmission capacity and efficiency of the system; multi-wavelength optical signals refer to optical signals containing different wavelength components in the same optical signal, which is the basis of wavelength division multiplexing (WDM) technology. WDM technology increases the bandwidth of a communication system by simultaneously transmitting multiple optical signals of different wavelengths in the same optical fiber. In a microring resonator, the ability to handle multi-wavelength optical signals means that different wavelengths of light can be selectively resonated and separated, which is crucial for achieving efficient optical signal routing and processing. For example, a multimode fiber can transmit optical signals containing multiple wavelengths of light. , as well as , These are optical signals in various modes, and they may also contain components of different wavelengths, such as 1310nm and 1550nm.

[0049] In another embodiment, the through port is used to output an optical signal that does not meet the target resonance condition; the output port is used to output an optical signal processed by the micro-ring waveguide.

[0050] In this embodiment, the through port (T-port) is a key output point in the microring resonator design. Its function is to output optical signals that do not resonate in the microring waveguide. These optical signals may be directly output from the through port without being processed by the microring waveguide because their wavelength, mode, or other parameters do not meet the resonance conditions of the microring resonator. This design allows the microring resonator to filter the input multimode optical signals, guiding only those that meet specific resonance conditions to the microring waveguide for further processing, while other optical signals are directly transmitted.

[0051] In this embodiment, the output port (D port, Drop port) is another key output point of the microring resonator. Its function is to output the optical signals that have already resonated and been processed in the microring waveguide. These optical signals may have undergone amplitude, phase, or frequency modulation, or may be used to perform specific optoelectronic computing tasks.

[0052] In this disclosure, the design of the through port and output port enables the microring resonator to effectively filter and process the input multimode optical signals, separating optical signals that do not meet the resonance conditions from the optical signals processed by the microring waveguide for output. This design not only improves the flexibility and efficiency of optical signal processing but also makes it possible to realize more complex optical communication systems and optical information processing tasks. In this way, the microring resonator can play a greater role in the transmission, routing, separation, and processing of optical signals, thereby improving the performance and reliability of the entire optical communication system.

[0053] In another embodiment, the waveguide materials for the straight waveguide and the micro-ring waveguide are Si, Si3N4, InGaAsP, and polymers; the polymers include at least one of polymethyl methacrylate, polyimide, polycarbonate, polystyrene, polytetrafluoroethylene, and polyethylene terephthalate.

[0054] In this embodiment, silicon (Si) is a widely used semiconductor material with good optical transparency and mechanical strength. Silicon nitride (Si3N4) is characterized by low loss and high thermal stability. Indium gallium arsenide phosphide (InGaAsP) is a compound semiconductor material used in high-speed optical communication, exhibiting excellent optoelectronic properties. Polymers are considered for waveguide materials due to their flexibility and cost-effectiveness.

[0055] In this embodiment, polymethyl methacrylate (PMMA) is commonly used in optical components due to its good optical transparency and ease of processing. Polyimide (PI) is suitable for high-temperature environments due to its excellent thermal stability and mechanical properties. Polycarbonate (PC) has good transparency and impact toughness, making it suitable for optical components requiring high impact resistance. Polystyrene (PS) has high transparency and is easy to process, but its thermal stability is relatively poor. Polytetrafluoroethylene (PTFE) has extremely low refractive index and good chemical stability, making it suitable for waveguide applications requiring low loss and high chemical stability. Polyethylene terephthalate (PET) is a common plastic material with good optical and mechanical properties, suitable for manufacturing flexible waveguides. In one example, if the microring resonator needs to operate in a high-temperature environment, polyimide might be chosen as the waveguide material. If high transparency and ease of processing are required, PMMA might be chosen.

[0056] This disclosure provides a diverse range of material choices for both the straight waveguide and the waveguide material of the microring resonator. This diversity allows the microring resonator to select the most suitable material according to specific application requirements, thereby optimizing device performance.

[0057] In another embodiment, the width of the straight waveguide and the micro-ring waveguide is 200nm~2000nm, and the thickness is 0.2μm~0.5μm or 2.5μm~3.5μm.

[0058] In this embodiment, the widths of the straight waveguides and micro-ring waveguides range from 200 nm to 2000 nm. Waveguide width is one of the key parameters affecting optical signal transmission modes and efficiency. Wider waveguides can support more modes, but may increase material consumption and manufacturing complexity. Within the 200 nm to 2000 nm width range, waveguides can be designed as single-mode or multi-mode to suit different application requirements. For example, for applications requiring multi-mode transmission, a width closer to 2000 nm might be chosen to allow simultaneous transmission of multiple optical signal modes.

[0059] In this embodiment, the thickness of the straight waveguide and the micro-ring waveguide (e.g.) Figure 2 In The thickness of a waveguide, ranging from 0.2μm to 0.5μm or 2.5μm to 3.5μm, significantly impacts the transmission characteristics of optical signals, including the degree of light confinement and propagation loss. Thinner waveguides (0.2μm to 0.5μm) may be suitable for applications requiring high light confinement and low loss, while thicker waveguides (2.5μm to 3.5μm) may be better suited for applications requiring higher mechanical strength or specific optical properties. For example, thinner waveguides may be used in high-speed optical communication systems to reduce signal propagation loss, while thicker waveguides may be used in applications requiring higher mechanical stability, such as high-power optical processing applications.

[0060] This disclosure provides flexibility in the design of microring resonators by specifying the width and thickness ranges of straight waveguides and microring waveguides, enabling them to adapt to different application requirements. By precisely controlling the waveguide geometry, the transmission efficiency and quality of optical signals can be optimized, thereby improving the overall performance of the microring resonator.

[0061] In another embodiment, the width of the straight waveguide is 200nm~2000nm, the width of the micro-ring waveguide is 200nm~1800nm, and the spacing between the straight waveguide and the micro-ring waveguide is 30nm~1900nm.

[0062] In this embodiment, the width of the straight waveguide (e.g.) Figure 2 In The width of a straight waveguide, ranging from 200nm to 2000nm, directly affects the transmission mode and efficiency of optical signals. Within this width range, straight waveguides can support multimode transmission, allowing multiple modes of optical signals to propagate simultaneously within the waveguide. This multimode transmission capability is crucial for improving the capacity and flexibility of optical communication systems.

[0063] In this embodiment, the width of the micro-ring waveguide (e.g.) Figure 2 In The width of a microring waveguide, ranging from 200nm to 1800nm, determines the number of modes it can support and the resonant characteristics of the optical signal. Wider microring waveguides can support more modes but may increase coupling loss with straight waveguides. Within this 200nm–1800nm ​​range, microring waveguides can be designed as single-mode or multi-mode to accommodate different resonance and filtering requirements. For example, a 1000nm wide microring waveguide may exhibit optimal resonant characteristics at a specific wavelength.

[0064] In this embodiment, the spacing between the straight waveguide and the micro-ring waveguide (e.g.) Figure 2 In The spacing, ranging from 30nm to 1900nm, is crucial for controlling the coupling efficiency of optical signals from the straight waveguide to the microring waveguide. Smaller spacing can enhance coupling but may increase the difficulty of the manufacturing process and the requirements for alignment accuracy. Larger spacing may reduce coupling efficiency but helps simplify the manufacturing process. For example, a design with a spacing of 100nm may provide strong coupling, while a design with a spacing of 500nm may be easier to manufacture.

[0065] This disclosure provides detailed dimensional parameters for the design of microring resonators by specifying the widths of straight waveguides and microring waveguides, as well as the spacing between them. Precise control of these parameters is crucial for achieving efficient optical signal coupling and transmission. By optimizing these dimensional parameters, the performance of the microring resonator can be improved, including resonant efficiency, mode selectivity, and signal transmission quality. This enables microring resonators to be used more effectively in various applications such as optical communication, optical information processing, and optical sensing, thereby improving the performance and reliability of the entire optoelectronic system.

[0066] In another embodiment, the substrate material of the straight waveguide and the micro-ring waveguide is InP or Si; the cladding material of the straight waveguide and the micro-ring waveguide is at least one of SiO2, InP, Si3N4, Al2O3 and polymers.

[0067] In this embodiment, the substrate material for both the straight waveguide and the micro-ring waveguide is InP or Si. InP (indium phosphide) and Si are two commonly used semiconductor materials. InP is often used in high-speed optoelectronic devices due to its excellent electron mobility and low loss characteristics; while Si is widely used in integrated circuits and optoelectronic devices due to its mature manufacturing process and good thermal stability. Choosing InP or Si as the substrate material ensures the mechanical stability and optical performance of the waveguide, while also taking into account manufacturing costs and process compatibility.

[0068] In this embodiment, the cladding material for the straight waveguide and the microring waveguide is at least one of SiO2, InP, Si3N4, Al2O3, and polymers. The choice of cladding material is crucial for protecting the waveguide structure, controlling the propagation of optical signals, and improving the overall performance of the device. SiO2 (silicon dioxide) is a commonly used cladding material due to its good chemical stability and low-loss characteristics. InP and Si3N4 can also be used as cladding materials, providing additional mechanical protection and optical isolation. Al2O3 is considered due to its high refractive index and good thermal stability. Polymer materials are favored for their flexibility and cost-effectiveness, and can be used to fabricate flexible or low-cost optoelectronic devices. For example, if a microring resonator with high thermal stability and low loss is required, InP might be chosen as the substrate material, and SiO2 as the cladding material.

[0069] This disclosure provides a diverse range of material choices for the design of microring resonators by specifying the substrate and cladding materials for straight waveguides and microring waveguides. This diversity allows the microring resonator to select the most suitable material based on specific application requirements and manufacturing conditions, thereby optimizing device performance.

[0070] In another embodiment, the diameter of the microring waveguide is 5 μm to 130 μm.

[0071] In this embodiment, the diameter of the micro-ring waveguide (e.g.) Figure 1In this context, R represents the radius of the microring waveguide (ranging from 5 μm to 130 μm). The diameter of the microring waveguide directly affects the resonant wavelength and the quality factor (Q factor), thus influencing the filtering characteristics and selectivity of the device. A smaller diameter may result in a higher Q factor and narrower bandwidth, suitable for applications requiring high selectivity; while a larger diameter may result in a lower Q factor and wider bandwidth, suitable for applications requiring wide bandwidth. The diameter of the microring waveguide determines the physical dimensions of the resonant cavity, which in turn affects the propagation time and phase change of the optical signal within the microring. These factors collectively determine which wavelengths of optical signal will form a stable resonance within the microring. For example, a microring with a diameter of 10 μm may have a high Q factor at a specific wavelength, making it suitable for use as a high-selectivity filter; while a microring with a diameter of 100 μm may have a lower Q factor, making it suitable for use as a wide-bandwidth optical signal processor.

[0072] This disclosure provides key dimensional parameters for the design of microring resonators by specifying a range of microring waveguide diameters. These parameters are crucial for achieving specific resonant characteristics and optimizing device performance. By precisely controlling the diameter of the microring waveguide, the resonant wavelength and quality factor can be adjusted, thereby enabling precise control and processing of optical signals.

[0073] Figure 2 A structural side view of the adjustable coupler in an embodiment of this disclosure is shown, as follows: Figure 2 As shown, the adjustable coupler includes an insulating isolation layer and a thermally adjustable electrode layer. The insulating isolation layer is in contact with the straight waveguide and the micro-ring waveguide, and the thermally adjustable electrode layer is located above the insulating isolation layer.

[0074] In this embodiment, the adjustable coupler includes an insulating isolation layer and a thermally adjustable electrode layer. The insulating isolation layer physically isolates the thermally adjustable electrode layer from the straight waveguide and the micro-ring waveguide, preventing current from directly passing through the optical waveguide and reducing interference of the thermally adjustable electrode layer on the optical signal. The insulating isolation layer is in direct contact with the straight waveguide and the micro-ring waveguide, ensuring electrical isolation between the thermally adjustable electrode layer and the optical waveguide, while also providing stable support for the thermally adjustable electrode layer.

[0075] In this embodiment, the thermally tunable electrode layer is located above the insulating layer. The thermally tunable electrode layer is typically made of materials with good thermo-optical effects, such as titanium, nickel, or other metals. These materials change their refractive index with temperature variations, thereby altering the coupling efficiency of the optical signal in the coupler. For example, when it is necessary to adjust the coupling strength, the temperature of the thermally tunable electrode layer can be changed by altering the current applied to it, thus changing the coupling coefficient of the coupler. This adjustment mechanism allows the microring resonator to dynamically respond to different operating conditions, enabling flexible control of the optical signal.

[0076] In another embodiment, the thickness of the insulating layer is 500nm~5000nm; the thickness of the thermally modulated electrode layer is 20nm~1000nm.

[0077] In this embodiment, the thickness of the insulating layer (e.g.) Figure 2 In The thickness of the insulating isolation layer, ranging from 500nm to 5000nm, is crucial for ensuring electrical isolation between the thermally tunable electrode layer and the straight and micro-ring waveguides. This thickness range is large enough to prevent current from flowing directly through the waveguide, thus avoiding interference with the optical signal. Simultaneously, this thickness range also considers the feasibility and cost-effectiveness of the manufacturing process. For example, an insulating isolation layer with a thickness of 1000nm can provide good isolation while being easily implemented in existing semiconductor manufacturing processes.

[0078] In this embodiment, the thickness of the thermally adjustable electrode layer is (e.g.) Figure 2 In The thickness of the thermally modulated electrode layer (20nm~1000nm) affects its response speed to temperature changes and its thermal impact on the optical waveguide. Thinner electrode layers (e.g., 20nm) may be more sensitive to temperature changes, thus providing faster modulation speeds, but may require more precise manufacturing processes. Thicker electrode layers (e.g., 1000nm) may provide stronger thermal effects, but modulation speeds may be slower. For example, a 100nm thick thermally modulated electrode layer may offer a good balance between modulation speed and manufacturing process requirements.

[0079] This disclosure provides detailed parameter guidance for the design of tunable couplers for microring resonators by specifying the exact thickness ranges of the insulating isolation layer and the thermally adjustable electrode layer. This detailed parameter setting helps optimize coupler performance, ensuring effective electrical isolation and precise thermal regulation capabilities. By precisely controlling the thickness of these layers, the adjustment accuracy and response speed of the microring resonator can be improved, thereby enhancing its performance in optical communication and optical information processing applications.

[0080] In another embodiment, the insulating layer is made of at least one of SiO2, Si3N4, Al2O3, and polymers. For example, if the microring resonator needs to operate at high temperatures, Si3N4 or Al2O3 might be chosen as the insulating layer material because of their excellent thermal stability. If good chemical stability and lower processing costs are required, SiO2 might be chosen.

[0081] In another embodiment, the insulating isolation layer includes multiple isolation gratings, the height of which is 50nm~350nm, and the distance between the isolation gratings and the straight waveguide and the micro-ring waveguide is 100nm~500nm.

[0082] In this embodiment, the insulating isolation layer includes multiple isolation gratings. The function of the isolation gratings is to further enhance the insulation performance, prevent the thermally tunable electrode layer from interfering with the optical signals in the straight waveguide and micro-ring waveguide, and also help maintain the optical characteristics of the waveguide. The height of the isolation grating (e.g., Figure 2 In The isolation grating, ranging from 50nm to 350nm, affects its isolation effect on optical signals and its support for the thermally modulated electrode layer. A lower height may help reduce scattering and absorption of optical signals by the grating, while a higher height may provide better mechanical support and more stable insulation. For example, if minimizing optical signal loss is required, a height close to 50nm might be chosen; if stronger mechanical support is needed, a height close to 350nm might be chosen. The distance between the isolation grating and the straight waveguide and micro-ring waveguide (e.g., ...) is also a factor. Figure 2 In The distance is 100nm to 500nm. This distance is crucial for ensuring effective insulation and reducing the interaction between the optical signal and the electrode layer. A closer distance helps improve insulation but may increase the difficulty of the manufacturing process. For example, a design with a distance of 100nm may provide strong insulation, while a design with a distance of 500nm may be easier to manufacture.

[0083] This disclosure provides finer control over the design of microring resonators by specifying the height of the isolation grating within the insulating isolation layer and its distance from the waveguide. This design helps improve the insulation performance and optical stability of the microring resonator, thereby ensuring the integrity and accuracy of optical signals during transmission and processing. By optimizing the size and position of the isolation grating, optical signal loss and interference can be reduced, improving the overall performance of the microring resonator.

[0084] Figure 3 A schematic diagram of the structure of a microring resonator according to an embodiment of this disclosure is shown. Figure 2 ,like Figure 3 As shown, a microring resonator further includes a processing module connected to a mode resolver, used for timing processing, logic operations, and mode conversion of the optical signal output by the mode resolver.

[0085] In this embodiment, the microring resonator further includes a processing module connected to a mode decomposer. After the mode decomposer separates optical signals of different modes, these signals are transmitted to the processing module for subsequent processing, such as timing processing, logic operations, and mode conversion.

[0086] Timing processing is used to adjust the timing characteristics of optical signals, such as delay and pulse width adjustment, to meet specific timing requirements; logic operations are used to perform optical logic operations, such as AND, OR, NOT, etc., which are the foundation of optical computing and optical information processing; mode conversion is used to convert optical signals from one mode to another, which may involve changing the propagation characteristics of the optical signal or converting its propagation mode in the waveguide.

[0087] In another embodiment, mode conversion is used to convert the result of a logic operation into a fundamental mode form, which is then transmitted in a single-mode waveguide.

[0088] In this embodiment, mode conversion is used to convert the result of a logical operation into its fundamental mode form. In optical communication and optical information processing, the fundamental mode typically refers to the lowest-order mode propagating in a waveguide, possessing the smallest propagation constant and optimal transmission efficiency. Converting the logical operation result into its fundamental mode form helps ensure signal stability and low loss during subsequent transmission. The logical operation result in its fundamental mode form is transmitted in a single-mode waveguide, which is a waveguide that only supports fundamental mode propagation. This reduces mode dispersion and mode interference, thereby improving the quality and reliability of signal transmission and making it suitable for long-distance transmission. Transmitting the logical operation result in its fundamental mode form in a single-mode waveguide optimizes signal propagation characteristics and reduces signal attenuation and distortion during transmission.

[0089] In another embodiment, the microring resonator includes one or more microring waveguides and one or more tunable couplers, the number of microring waveguides being the same as the number of tunable couplers.

[0090] In this embodiment, the microring resonator includes one or more microring waveguides. Multiple microring waveguides can be used to implement more complex optical signal processing functions, such as simultaneously processing optical signals of multiple wavelengths or modes, or to construct more advanced photonic integrated circuits. The microring resonator also includes one or more tunable couplers. The number of tunable couplers can be adjusted as needed to adapt to different optical signal coupling and separation requirements. Multiple tunable couplers can provide finer control, allowing independent adjustment of optical signals in different microring waveguides. The number of microring waveguides is the same as the number of tunable couplers, ensuring that each microring waveguide can be independently controlled through its corresponding tunable coupler.

[0091] In another embodiment, the wavelengths of the optical signals transmitted in different micro-ring waveguides are different, and multiple orthogonal modes of optical signals can be transmitted in the same micro-ring waveguide.

[0092] In this embodiment, the optical signals transmitted within the micro-ring waveguides have different wavelengths; that is, each micro-ring waveguide can be independently designed to transmit optical signals of different wavelengths. This design allows the micro-ring resonators to operate simultaneously at multiple wavelengths, thereby enabling simultaneous processing of multi-wavelength signals. This is particularly important for wavelength division multiplexing (WDM) systems, as WDM systems require the simultaneous transmission of multiple optical signals of different wavelengths within the same optical fiber.

[0093] In this embodiment, multiple orthogonal optical modes can be transmitted within the same micro-ring waveguide, meaning that multiple orthogonal optical modes can be transmitted within the same micro-ring waveguide. Orthogonal modes refer to optical modes that propagate independently in the waveguide and do not interfere with each other. This capability allows the micro-ring resonator to process multimode signals at the same wavelength, increasing the system's flexibility and data processing capabilities.

[0094] Figure 4 A schematic diagram of the structure of a photoelectric computing neural network chip according to an embodiment of the present disclosure is shown, as follows: Figure 4 As shown, a photoelectric computing neural network chip includes: a plurality of micro-ring resonators as disclosed in this disclosure.

[0095] In this embodiment, the optoelectronic computing neural network chip may include multiple microring resonators. The optoelectronic computing neural network chip allows the system to enhance its functionality and performance by processing multiple microring resonators in parallel. For example, if the system needs to process optical signals of various wavelengths and modes, this can be achieved by integrating multiple microring resonators. Each microring resonator can specialize in processing one or more specific wavelengths and modes, thereby improving the overall system's processing power and flexibility. Furthermore, the integration of multiple microring resonators can improve the system's reliability and fault tolerance, because even if one microring resonator fails, the others can still continue to operate.

[0096] Figure 5 A schematic diagram of the structure of a photoelectric computing method according to an embodiment of the present disclosure is shown, as follows: Figure 5 As shown, a photoelectric computing method, applied to the photoelectric computing neural network chip of this disclosure, includes:

[0097] Step S101: Receive the input multimode optical signal.

[0098] In this embodiment, the multimode optical signal not only includes multiple orthogonal modes, such as , Furthermore, it contains optical signals of various wavelengths. This multimode and multiwavelength characteristic allows the signal to carry richer information, providing a foundation for subsequent optoelectronic computing.

[0099] Step S102: Adjust the coupling strength of the multimode optical signal entering the micro-ring waveguide based on the adjustable coupler.

[0100] In this embodiment, by changing the coupling strength through an adjustable coupler, optical signals of a specific wavelength or mode can be selectively coupled into the micro-ring waveguide, thereby achieving precise control of the optical signal.

[0101] Step S103: Optical signal that satisfies the target resonance condition based on micro-ring waveguide resonance.

[0102] In this embodiment, the design of the micro-ring waveguide enables it to resonate with optical signals of a specific wavelength or mode, which is a key step in realizing optoelectronic computing and signal processing.

[0103] Step S104: The resonant optical signal is decomposed by a mode decomposer and transmitted to different output waveguides.

[0104] In this embodiment, the mode decomposer decomposes the optical signal after micro-ring waveguide resonance processing into different modes and transmits them to the corresponding output waveguides.

[0105] In this disclosure, multimode optical signals are received, processed using a tunable coupler and a microring waveguide, and finally transmitted via a mode resolver. This method can not only handle complex optical signals containing multiple orthogonal modes and wavelengths, but also achieve precise control and processing of optical signals of specific wavelengths or modes through the selective resonance characteristics of the microring resonator. In this way, optoelectronic computing neural network chips can provide more powerful computing capabilities and more flexible signal processing functions.

[0106] In one possible implementation, after the optical signal based on the micro-ring waveguide resonance satisfying the target resonance condition is received, the method further includes:

[0107] The optical signal that does not meet the target resonance condition is transmitted to the mode resolver at the through port;

[0108] Based on the through-port mode resolver, optical signals that do not meet the target resonance condition are decomposed and transmitted to different output waveguides corresponding to the through-port mode resolver.

[0109] In this embodiment, not all input optical signals in the microring resonator will match the resonance condition of the microring waveguide. Optical signals that do not meet the resonance condition are transmitted to the mode resolver at the through port, thus ensuring that all input optical signals, whether they meet or not, are properly processed.

[0110] In this embodiment, optical signals that do not meet the resonance condition are decomposed into different modes in the mode resolver at the through port and transmitted to the corresponding output waveguides. This processing allows the system to route optical signals of different modes to different paths, thereby enabling more complex optical signal management and control.

[0111] In one possible implementation, the resonant optical signal is decomposed by a mode resolver and transmitted to different output waveguides, including:

[0112] The resonant optical signal is decomposed by the mode resolver at the output port and transmitted to the different output waveguides corresponding to the mode resolver at the output port.

[0113] In this embodiment, optical signals that meet the resonance condition are resonated in the micro-ring waveguide within the micro-ring resonator, and then these signals are transmitted to the mode resolver at the output port. Here, the mode resolver decomposes the resonant optical signals into different modes and transmits them to different output waveguides for subsequent processing or transmission, thereby ensuring that the resonant optical signals can be effectively decomposed and transmitted, achieving precise control and routing of the optical signals.

[0114] It should be understood that the various forms of processes shown above can be used to rearrange, add, or delete steps. For example, the steps described in this disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this disclosure can be achieved, and this is not limited herein.

[0115] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this disclosure, "a plurality of" means two or more, unless otherwise explicitly specified.

[0116] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A microring resonator, characterized in that, include: Multimode optical input port, used to input multimode optical signals containing multiple modes; A straight waveguide, connected to the multimode optical input port, is used to transmit the multimode optical signal; An adjustable coupler, located between the straight waveguide and the micro-ring waveguide, is used to adjust the coupling strength of the multimode optical signal between the straight waveguide and the micro-ring waveguide; the adjustable coupler is used to selectively couple optical signals of a specific wavelength or mode. A micro-ring waveguide, connected to the tunable coupler, is used to resonate an optical signal that satisfies the target resonance condition. The mode decomposer, located at the output positions of the through port and the output port, is used to decompose the input optical signals of different modes and transmit them to different output waveguides; The multimode optical signal includes optical signals with multiple orthogonal modes and optical signals with multiple wavelengths; The through port is used to output optical signals that do not meet the target resonance condition; The output port is used to output the optical signal processed by the micro-ring waveguide. The width of the straight waveguide and the micro-ring waveguide is 200nm~2000nm; The adjustable coupler includes an insulating isolation layer and a thermally adjustable electrode layer. The insulating isolation layer is in contact with the straight waveguide and the micro-ring waveguide, and the thermally adjustable electrode layer is located above the insulating isolation layer. The temperature of the thermally adjustable electrode layer is changed by changing the current applied to the thermally adjustable electrode layer, and the coupling coefficient of the adjustable coupler is changed based on the change in the temperature of the thermally adjustable electrode layer. The insulating isolation layer includes multiple isolation gratings, the height of which is 50nm~350nm, and the distance between which the isolation gratings and the straight waveguide and micro-ring waveguide is 100nm~500nm. The microring resonator includes one or more microring waveguides and one or more tunable couplers, wherein the number of microring waveguides and tunable couplers is the same. The wavelengths of the optical signals transmitted in different micro-ring waveguides are different, and multiple orthogonal modes of optical signals can be transmitted in the same micro-ring waveguide.

2. The microring resonator according to claim 1, characterized in that, The waveguide materials for the straight waveguide and the micro-ring waveguide are Si, Si3N4, InGaAsP, and polymers; the polymers include at least one of polymethyl methacrylate, polyimide, polycarbonate, polystyrene, polytetrafluoroethylene, and polyethylene terephthalate.

3. The microring resonator according to claim 1, characterized in that, The thickness of the straight waveguide and the micro-ring waveguide is 0.2μm~0.5μm or 2.5μm~3.5μm.

4. The microring resonator according to claim 3, characterized in that, The width of the straight waveguide is 200nm~2000nm, the width of the micro-ring waveguide is 200nm~1800nm, and the spacing between the straight waveguide and the micro-ring waveguide is 30nm~1900nm.

5. The microring resonator according to claim 1, characterized in that, The substrate material of the straight waveguide and the micro-ring waveguide is InP or Si; the cladding material of the straight waveguide and the micro-ring waveguide is at least one of SiO2, InP, Si3N4, Al2O3 and polymers.

6. The microring resonator according to claim 1, characterized in that, The diameter of the micro-ring waveguide is 5μm to 130μm.

7. The microring resonator according to claim 1, characterized in that, The thickness of the insulating layer is 500nm~5000nm; the thickness of the thermally modulated electrode layer is 20nm~1000nm.

8. The microring resonator according to claim 1, characterized in that, The insulating layer is made of at least one of SiO2, Si3N4, Al2O3, and polymers.

9. The microring resonator according to claim 1, characterized in that, The microring resonator further includes a processing module connected to the mode resolver, used for timing processing, logic operations, and mode conversion of the optical signal output by the mode resolver.

10. The microring resonator according to claim 9, characterized in that, The mode conversion is used to convert the result of the logic operation into the fundamental mode form, and the result of the logic operation in the fundamental mode form is transmitted in the single-mode waveguide.

11. A photoelectric computing neural network chip, characterized in that, include: Multiple microring resonators according to any one of claims 1-10.

12. A photoelectric computing method, characterized in that, The method, applied to the photoelectric computing neural network chip according to claim 11, comprises: Receives input multimode optical signals; the multimode optical signals include optical signals with multiple orthogonal modes and optical signals with multiple wavelengths; The coupling strength of the multimode optical signal entering the microring waveguide is adjusted using a tunable coupler; the tunable coupler is used to selectively couple optical signals of specific wavelengths or modes. The optical signal based on the micro-ring waveguide resonance satisfies the target resonance condition; The resonant optical signal is decomposed by a mode decomposer and transmitted to different output waveguides; The method further includes, after the optical signal based on the micro-ring waveguide resonance satisfying the target resonance condition, the method also includes: The optical signal that does not meet the target resonance condition is transmitted to the mode resolver at the through port; Based on the through port mode resolver, optical signals that do not meet the target resonance condition are decomposed and transmitted to different output waveguides corresponding to the through port mode resolver. The step of decomposing the resonant optical signal using a mode decomposer and transmitting it to different output waveguides includes: The resonant optical signal is decomposed by the mode decomposer at the output port and transmitted to the different output waveguides corresponding to the mode decomposer at the output port. The multimode optical signal is input to the tunable coupler through a straight waveguide, and the width of the straight waveguide and the micro-ring waveguide is 200nm~2000nm. The adjustable coupler includes an insulating isolation layer and a thermally adjustable electrode layer. The insulating isolation layer is in contact with the straight waveguide and the micro-ring waveguide, and the thermally adjustable electrode layer is located above the insulating isolation layer. The temperature of the thermally adjustable electrode layer is changed by changing the current applied to the thermally adjustable electrode layer, and the coupling coefficient of the adjustable coupler is changed based on the change in the temperature of the thermally adjustable electrode layer. The insulating isolation layer includes multiple isolation gratings, the height of which is 50nm~350nm, and the distance between which the isolation gratings and the straight waveguide and micro-ring waveguide is 100nm~500nm. The microring resonator in the optoelectronic computing neural network chip includes one or more microring waveguides and one or more tunable couplers, wherein the number of microring waveguides and tunable couplers is the same. The wavelengths of the optical signals transmitted in different micro-ring waveguides are different, and multiple orthogonal modes of optical signals can be transmitted in the same micro-ring waveguide.

Images