Wafer CV transmission alcohol spraying and air drying device and operation method

Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to a wafer CV transmission alcohol spraying and air-drying device and an operation method.The wafer CV transmission alcohol spraying and air-drying device comprises a spraying bin and an air-drying bin integrally connected with the spraying bin, a transmission mechanism is arranged in the spraying bin and the air-drying bin, and Z sets of guide mechanisms are arranged on the transmission mechanism in a crossed mode; spraying mechanisms are arranged in the spraying bin and located above and below the conveying mechanism, a scanning instrument is further arranged in the spraying bin and located in front of the spraying mechanisms, M sets of air drying mechanisms are arranged in the air drying bin and located above and below the conveying mechanism, and N sets of recycling mechanisms are further arranged on one side of the air drying bin; through the design of the transmission mechanism, the spraying mechanism, the air-drying mechanism, the guide mechanism, the recovery mechanism and the scanning instrument, self-adaptive adjustment of precise cleaning and traceless air-drying can be carried out according to wafers of different sizes and shapes, the cleaning effect of the wafers can be improved, meanwhile, the alcohol utilization rate is increased, the wafers are conveyed safely and neatly, and the production efficiency is improved. And taking is convenient.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a wafer CV transmission alcohol spraying and air drying device and operation method. BACKGROUND

[0002] In the semiconductor manufacturing process, the cleaning, transmission and drying of wafers are crucial links that directly affect the accuracy of subsequent CV testing and the final quality of wafers.

[0003] At present, the existing wafer transmission spraying and air drying device has many shortcomings, for example:

[0004] In terms of cleaning, there is a lack of accurate detection of the wafer surface state, and the spraying mechanism often uses fixed spraying parameters, which cannot be cleaned according to the size and surface contamination of the wafer, resulting in incomplete cleaning of some areas or waste of alcohol;

[0005] In the air drying link, the angle adjustment of the traditional air drying mechanism is not flexible, and it is difficult to achieve multi-angle and omnidirectional air drying of the wafer, which may cause incomplete air drying in some areas, and the residual alcohol may affect the performance of the wafer;

[0006] At the same time, the recycling rate of alcohol is low, and the waste liquid after spraying and the alcohol vapor volatilized in the air drying process are often directly discharged, which not only wastes resources but also pollutes the environment;

[0007] In addition, the existing device cannot ensure the wafer output to be in order, and the wafer may shift or shake during transmission, which not only affects the uniformity of air drying but also may cause damage to the wafer edge and surface due to collision and friction, especially for wafers with high brittleness, which increases the risk of damage and may reduce the overall production efficiency. SUMMARY

[0008] The present application aims to overcome the above-mentioned problems in the prior art and provide a wafer CV transmission alcohol spraying and air drying device and operation method that can achieve accurate cleaning, stable transmission, efficient recycling and ensure wafer output in order.

[0009] To achieve the above-mentioned purposes, the technical solutions adopted by the present application are as follows:

[0010] The utility model provides a kind of wafer CV transmission alcohol spraying and air drying device, it is installed in cleaning machine body, including spraying storehouse and with the spraying storehouse integral connection's air drying storehouse, the spraying storehouse with air drying storehouse is provided with transmission mechanism, the transmission mechanism is provided with Z group guiding mechanism, the spraying storehouse is located above and below transmission mechanism and is provided with spraying mechanism, the spraying storehouse is located before the spraying mechanism and is further provided with scanning instrument, the air drying storehouse is located above and below transmission mechanism and is provided with M group air drying mechanism, the air drying storehouse side is further provided with N group recovery mechanism.

[0011] Preferably, the transmission mechanism includes a transmission motor disposed on one side of the spraying storehouse or the air drying storehouse, the transmission motor is rotatably connected to a first rotating rod, a plurality of first bearings are sleeved on the first rotating rod, a first connecting plate is fixedly connected to the outer side of the first bearings, the first connecting plate is fixedly connected to the same side of the spraying storehouse and the air drying storehouse, a plurality of first gears are tightly sleeved on the first rotating rod, the first gears are vertically engaged with a first transmission gear, one end of a main transmission rod is fixedly connected to the inner side of the first transmission gear, the main transmission rod is rotatably arranged through the two sides of the spraying storehouse and the air drying storehouse, and the other end of the main transmission rod is sleeved with a second transmission gear fixedly connected thereto, the second transmission gear is vertically engaged with a second gear, the second gear is tightly sleeved on a second rotating rod, a plurality of second bearings are sleeved on the second rotating rod, a second connecting plate is fixedly connected to the outer side of the second bearings, and the second connecting plate is fixedly connected to the other side of the spraying storehouse and the air drying storehouse; a plurality of left gears are tightly sleeved on the first rotating rod on one side of the air drying mechanism, the left gears are vertically engaged with a left transmission gear, one end of a left transmission rod is fixedly connected to the inner side of the left transmission gear, and the left transmission rod is rotatably arranged through one side of the spraying storehouse; a plurality of right gears are tightly sleeved on the second rotating rod on the other side of the air drying mechanism, the left gears are vertically engaged with a right transmission gear, one end of a right transmission rod is fixedly connected to the inner side of the right transmission gear, and the right transmission rod is rotatably arranged through the other side of the spraying storehouse.

[0012] Preferably, a plurality of rubber washers are tightly sleeved on the main transmission rod, rubber bolts are tightly sleeved on the rubber washers, and nuts are screwed tightly on the rubber bolts.

[0013] Preferably, the spraying mechanism comprises an upper spraying assembly and a lower spraying assembly arranged in the spraying bin above and below the main transmission rod; the upper spraying assembly comprises a plurality of upper supporting columns fixedly connected with the top of the spraying bin, the upper supporting columns are fixedly connected with an upper spraying plate, the upper surface of the upper spraying plate is provided with a plurality of upper spraying pipes, one side of the upper spraying pipe is correspondingly provided with an upper control valve for controlling the opening and closing of the upper spraying pipe, and the lower surface of the upper spraying plate is provided with upper nozzles communicated with the upper spraying pipes; the lower spraying assembly comprises a plurality of lower supporting columns fixedly connected with the bottom of the spraying bin, the lower supporting columns are fixedly connected with a lower spraying plate, the lower surface of the lower spraying plate is provided with a plurality of lower spraying pipes, one side of the lower spraying pipe is correspondingly provided with a lower control valve for controlling the opening and closing of the lower spraying pipe, and the lower surface of the lower spraying plate is provided with lower nozzles communicated with the lower spraying pipes.

[0014] Preferably, the guiding mechanism comprises a plurality of supporting rods fixedly connected with the bottom of the air-drying bin, the supporting rods are fixedly connected with a guiding plate at the top, the top of the guiding plate is provided with a plurality of guiding rods, the guiding rods are sleeved with guiding bearings, and the guiding rods are vertically crossed with the main transmission rod.

[0015] Preferably, the air-drying mechanism comprises two mounting racks mounted on the machine body, the top of each mounting rack is provided with a mounting plate, one end of each mounting plate penetrates the air-drying bin and is hingedly connected to one end of a transmission plate, the other end of each transmission plate is hingedly connected to a rotating plate, both ends of the rotating plate are provided with rotating frames, the rotating shaft of a rotating motor is rotatably connected to the top of each rotating frame, and the top of the rotating motor is fixedly connected to the top of the spraying bin; the outer sides of each rotating frame are further provided with an upper long slot and a lower long slot, each upper long slot is tightly connected to an upper plate through a bolt, the facing side of each upper plate is provided with a rotatable upper air baffle, the opposite side of each upper plate is provided with a rotatable upper block, the upper and lower surfaces of each upper plate are provided with two symmetrically arranged upper arc-shaped slots, and the side of the upper air baffle facing the upper plate is provided with two upper guide rods slidingly fitted through the two upper arc-shaped slots; each lower long slot is tightly connected to a lower plate through a bolt, the facing side of each lower plate is provided with a rotatable lower air baffle, the opposite side of each upper plate is provided with a rotatable lower block, the upper and lower surfaces of each lower plate are provided with two symmetrically arranged lower arc-shaped slots, and the side of the lower air baffle facing the lower plate is provided with two lower guide rods slidingly fitted through the two lower arc-shaped slots; the two sides of the upper air baffle are further provided with an upper air pipe, the bottom of the upper air baffle is provided with an upper air inlet in communication with the upper air pipe, the two sides of the lower air baffle are further provided with a lower air pipe, the top of the lower air baffle is provided with a lower air inlet in communication with the lower air pipe, the upper air inlet and the lower air inlet are arranged to face each other, the top of each rotating frame is provided with a plurality of L-shaped connecting plates, each L-shaped connecting plate is tightly connected to a connecting block, the bottom of each connecting block is provided with an abutting piece, one end of the bottom of the abutting piece is hingedly connected to a rubber-coated bearing, the rubber-coated bearing is obliquely arranged relative to the guide bearing, the top of each rotating frame is provided with an L-shaped fixing plate, the L-shaped fixing plate is tightly connected to a fixing block, the bottom of the fixing block is connected to a fixing rod, the bottom of the fixing rod is connected to a nitrogen plate, the bottom of the nitrogen plate is provided with a nitrogen hole, and the side of the nitrogen plate is provided with a nitrogen pipe in communication with the nitrogen hole; the top of each rotating plate is further provided with a plurality of support plates, one end of each support plate is provided with a left support vertical plate, the top end of each left support vertical plate is provided with a left support grab plate that can be adjusted up and down, the top of each left support grab plate is provided with a left grab hand, the inner wall of the left grab hand is provided with a bearing and is sleeved to one end of a left transmission rod; the other end of each support plate is provided with a right support vertical plate, the top end of each right support vertical plate is provided with a right support grab plate that can be adjusted up and down, the top of each right support grab plate is provided with a right grab hand, the inner wall of the right grab hand is provided with a bearing and is sleeved to one end of a right transmission rod; the top of each support plate is further provided with a vertical plate, the top end of each vertical plate is provided with a peripherally adjustable abutting block, one side of each abutting block is tightly connected to an abutting pin, and one end of the abutting pin relative to the abutting block is sleeved to a rotatable abutting bearing.

[0016] Preferably, the abutting piece comprises an abutting rod that is threadedly connected to the connecting block, the bottom of the abutting rod is sleeved to a limiting rod that can move up and down, one end of the bottom of the limiting rod is hingedly connected to a rubber-coated bearing, the abutting rod is internally provided with a limiting cavity, and a return spring is arranged in the limiting cavity and abuts against the top of the limiting cavity and one end of the limiting rod.

[0017] Preferably, the recovery mechanism comprises a recovery hopper in communication with one side of the air drying bin, a recovery air pipe connected to the top of the recovery hopper, a recovery air bin connected to the top of the recovery air pipe, a recovery air fan arranged in the recovery air bin, a switch panel arranged on the top of the recovery air bin for opening and closing the recovery air fan, and a recovery pipe arranged on the top of the recovery air bin and connected to an alcohol recovery tank through a pipeline.

[0018] Preferably, the spray bin is further provided with a recovery port, an intercepting net is arranged on the recovery port, and the recovery port is connected to the alcohol recovery tank through a pipeline.

[0019] A running method of a wafer CV transmission alcohol spraying and air drying device comprises the following steps:

[0020] Step S01: The transmission mechanism transports the wafer to a scanning instrument in the spraying bin, and the scanning instrument scans the wafer surface to obtain the size and surface state data of the wafer.

[0021] Meanwhile, based on the scanning data, the external control system presets the transmission speed of the transmission mechanism, the spraying amount of the spraying mechanism, and the operation parameters of the air drying mechanism.

[0022] Step S02: The transmission mechanism transports the wafer to the region where the spraying mechanism is located at the preset speed.

[0023] According to the size and surface state data of the wafer, the upper control valve and the lower control valve corresponding to the upper spraying assembly and the lower spraying assembly are opened, and the upper nozzle and the lower nozzle spray alcohol from the upper and lower sides of the wafer respectively to clean the wafer surface.

[0024] Step S03: The transmission mechanism sends the sprayed wafer into the air drying bin, starts the rotating motor to drive the rotating frame to rotate slightly, and simultaneously, high-temperature dust-free gas is supplied to the upper air plate and the lower air plate.

[0025] During the wafer transmission process, the rubber-coated bearing of the abutting piece abuts against the wafer to drive the wafer to align to the side of the guide bearing, so that the sent wafers are arranged in order and kept in elastic abutment under the action of the return spring, so as to ensure that the wafers will not be damaged by hard pressure, in addition, the nitrogen holes of the nitrogen plate supply nitrogen to form a nitrogen protection atmosphere to prevent the wafer surface from being oxidized.

[0026] Step S04: During the air drying process, the recovery air fan of the recovery mechanism is started, the alcohol vapor in the air drying bin is collected through the recovery hopper, and is transported to the recovery pipe through the recovery air pipe and the recovery air bin to become liquid alcohol by being connected to the external cooling device, and then flows to the alcohol recovery tank, meanwhile, the alcohol in the spraying bin flows into the recovery port and then flows to the alcohol recovery tank for recovery.

[0027] Step S05: The recovered alcohol is proportioned to realize the recycling of the alcohol.

[0028] Compared with the prior art, the beneficial effects are as follows:

[0029] The present application can realize self-adaptive adjustment of precise cleaning and traceless air drying according to wafers of different sizes and shapes, improve the cleaning effect of wafers, improve the utilization rate of alcohol, and conveniently take the wafers arranged in a safe and orderly manner. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0031] Figure 1 It is a whole plane schematic view of the wafer CV transmission alcohol spraying and air drying device of the present application;

[0032] Figure 2 It is a partial sectional view schematic view of the spraying bin of the wafer CV transmission alcohol spraying and air drying device of the present application;

[0033] Figure 3 It is a partial structure schematic view in the air drying bin of the wafer CV transmission alcohol spraying and air drying device of the present application;

[0034] Figure 4 It is an enlarged schematic view of A of Figure 3

[0035] Figure 5 It is an enlarged schematic view of B of Figure 3

[0036] Figure 6 It is an enlarged schematic view of C of Figure 3

[0037] Figure 7 It is a structure exploded schematic view of the rubber gasket, rubber-coated bolt and nut of the wafer CV transmission alcohol spraying and air drying device of the present application;

[0038] Figure 8 It is a structure schematic view of the air drying mechanism of the wafer CV transmission alcohol spraying and air drying device of the present application;

[0039] Figure 9 It is an enlarged schematic view of D of Figure 8

[0040] Figure 10 ​​​​It is a nitrogen plate and nitrogen pipe structure schematic view of a wafer CV transmission alcohol spraying and air drying device of the application;

[0041] Figure 11 It is a upper and lower air plate structure schematic view of a wafer CV transmission alcohol spraying and air drying device of the application;

[0042] Figure 12 It is a section view schematic view of an abutting piece of a wafer CV transmission alcohol spraying and air drying device of the application;

[0043] Figure 13 It is a first and second spacing plate structure schematic view of a wafer CV transmission alcohol spraying and air drying device of the application;

[0044] Figure 14 It is a partial structure schematic view of an air drying mechanism of a wafer CV transmission alcohol spraying and air drying device of the application;

[0045] Figure 15 It is a structure schematic view of a guiding mechanism of a wafer CV transmission alcohol spraying and air drying device of the application;

[0046] Figure 16 It is a side view schematic view of a recycling mechanism of a wafer CV transmission alcohol spraying and air drying device of the application;

[0047] Figure 17 It is a working principle schematic view of a wafer CV transmission alcohol spraying and air drying device of the application.

[0048] Mark in the figure:

[0049] 1, spraying warehouse;

[0050] 2, air drying warehouse;

[0051] 11, transmission mechanism; 111, transmission motor; 112, first rotating rod; 1121, left gear; 1122, left transmission gear; 1123, left transmission rod; 113, first bearing; 114, first connecting plate; 115, first gear; 116, first transmission gear; 117, main transmission rod; 118, second transmission gear; 119, second gear; 120, second rotating rod; 1201, right gear; 1202, right transmission gear; 1203, right transmission rod; 121, second bearing; 122, second connecting plate; 123, rubber gasket; 124, rubber bolt; 125, nut;

[0052] 3, spraying mechanism; 31, upper spraying assembly; 311, upper support column; 312, upper spraying plate; 313, upper spraying pipe; 314, upper control valve; 315, upper nozzle; 32, lower spraying assembly; 321, lower support column; 322, lower spraying plate; 323, lower spraying pipe; 324, lower control valve; 325, lower nozzle;

[0053] 4, air-drying mechanism; 41, mounting rack; 42, mounting plate; 43, transmission plate; 44, rotating plate; 441, support plate; 4411, left support vertical plate; 4412, left support grab plate; 4413, left grab hand; 4414, right support vertical plate; 4415, right support grab plate; 4416, right grab hand; 4417, vertical plate; 4418, abutting block; 4419, abutting pin; 4420, abutting bearing; 45, rotating frame; 451, upper long slot; 452, upper plate; 453, upper air plate; 4531, upper air pipe; 4532, upper air outlet; 454, upper block; 455, upper arc slot; 456, upper guide rod; 457, lower long slot; 458, lower plate; 459, lower air plate; 4591, lower air pipe; 4592, lower air outlet; 460, lower block; 461, lower arc slot; 462, lower guide rod; 463, L-shaped connecting plate; 464, connecting block; 465, abutting member; 4651, abutting rod; 4652, limiting rod; 4653, limiting cavity; 4654, return spring; 466, rubber-coated bearing; 467, L-shaped fixing plate; 468, fixing block; 469, fixing rod; 470, nitrogen plate; 471, nitrogen hole; 472, nitrogen pipe; 46, rotating motor;

[0054] 5, recycling mechanism; 51, recycling hopper; 52, recycling air pipe; 53, recycling air chamber; 531, switch panel; 54, recycling pipe;

[0055] 6, guiding mechanism; 61, support rod; 62, guiding plate; 63, guiding rod; 64, guiding bearing;

[0056] 7, recycling port; 71, intercepting net; 8, scanning instrument; 91, first spacing plate; 92, second spacing plate; 93, transmission port; 10, wafer. DETAILED DESCRIPTION

[0057] In order to facilitate the understanding of the present application, a more comprehensive description of the present application will be given below with reference to the relevant drawings. The preferred embodiments of the present application are shown in the drawings. However, the present application can be realized in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the content of the present application more thorough and comprehensive.

[0058] It should be noted that the relational terms herein, such as first and second, and the like, are used solely to distinguish one from another entity or action without necessarily requiring or implying any actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process or method that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process or method.

[0059] Without further limitation, an element defined by the phrase "comprising a..." does not exclude the presence of additional identical elements in the composition or device including the element. The words "connected" or "coupled" and like-minded terms are not limited to a physical or mechanical connection, but can include an electrical connection, whether direct or indirect. "Up", "down", "left", "right" and the like are used only to indicate relative positional relationship, when the absolute position of the described object changes, the relative positional relationship also changes accordingly.

[0060] Referring to Figures 1-3 The wafer 10CV transmission alcohol spraying and air drying device provided by the application comprises a spraying bin 1 and an air drying bin 2 connected with the spraying bin 1 integrally, a transmission mechanism 11 is arranged in the spraying bin 1 and the air drying bin 2, the transmission mechanism 11 is cross arranged with three groups of guide mechanisms 6, a spraying mechanism 3 is arranged above and below the transmission mechanism 11 in the spraying bin 1, a scanning instrument 8 is further arranged before the spraying mechanism 3 in the spraying bin 1, two groups of air drying mechanisms 4 are arranged above and below the transmission mechanism 11 in the air drying bin 2, the two groups of air drying mechanisms 4 are arranged in the air drying bin 2 at intervals, two groups of recycling mechanisms 5 are further arranged on one side of the air drying bin 2, and the two groups of recycling mechanisms 5 are arranged on one side of the air drying bin 2 at intervals; the spraying bin 1 and the air drying bin 2 form a continuous processing space, the spraying bin 1 is used for scanning and alcohol spraying cleaning of the wafer 10, the air drying bin 2 is used for air drying treatment of the wafer 10, and the wafer 10 is convenient for continuous transmission and processing;

[0061] If necessary, referring to Figure 1 , Figure 2 and Figure 13As shown, a first partition plate 91 is installed between the spraying chamber 1 and the air-drying chamber 2, and a second partition plate 92 is arranged behind the scanning device of the spraying chamber 1. The first partition plate 91 and the second partition plate 92 have the same structure, and a transmission port 93 for passing the wafer 10 is arranged on each of the first partition plate 91 and the second partition plate 92. The first partition plate 91 is used to separate the spraying chamber 1 and the air-drying chamber 2, so as to avoid the spraying alcohol liquid from splashing into the spraying chamber 1 and affecting the air-drying work. The second partition plate 92 is used to separate the spraying mechanism 3 and the scanning device 8, so as to avoid the spraying alcohol liquid from splashing into the scanning device 8 and affecting the scanning work. The recycling mechanism 5 is responsible for recycling the alcohol, so as to realize the recycling of the alcohol.

[0062] Specifically, the top of the air-drying chamber 2 and the spraying chamber 1 can be opened, so as to facilitate the disassembly, installation and maintenance of the device.

[0063] With reference to Figures 3-7 As shown, the transmission mechanism 11 comprises a transmission motor 111 arranged on one side of the spraying chamber 1. The transmission motor 111 is rotationally connected with a first rotating rod 112. The first rotating rod 112 is sleeved with a plurality of first bearings 113. The outer side of the first bearings 113 is fixedly connected with a first connecting plate 114. The first connecting plate 114 is fixedly connected with the same side of the spraying chamber 1 and the air-drying chamber 2. A plurality of first gears 115 are fastened on the first rotating rod 112 by bolts. The first gears 115 are vertically engaged with a first transmission gear 116. The inner side of the first transmission gear 116 is fastened with one end of a main transmission rod 117 by a bolt. The main transmission rod 117 is rotatably arranged through the two sides of the spraying chamber 1 and the air-drying chamber 2. The other end of the main transmission rod 117 is sleeved with a fastened second transmission gear 118. The second transmission gear 118 is vertically engaged with a second gear 119. The second gear 119 is fastened on a second rotating rod 120 by a bolt. The second rotating rod 120 is sleeved with a plurality of second bearings 121. The outer side of the second bearings 121 is fixedly connected with a second connecting plate 122. The second connecting plate 122 is fixedly connected with the other side of the spraying chamber 1 and the air-drying chamber 2. The first rotating rod 112 is fixed on the same side of the spraying chamber 1 and the air-drying chamber 2 by the first connecting plate 114. The second rotating rod 120 is fixed on the opposite side of the spraying chamber 1 and the air-drying chamber 2 by the second connecting plate 122. The first rotating rod 112 is driven to rotate by the transmission motor 111. The rotation of the first rotating rod 112 drives the first gears 115 to engage and the first transmission gear 116 to drive, so as to drive the main transmission rod 117 to rotate. The main transmission rod 117 drives the second gear 119 to engage and the first transmission gear 116 to drive, so as to drive the second rotating rod 120 to rotate, thereby realizing the synchronous rotation of the first rotating rod 112, the second rotating rod 120 and the main transmission rod 117.

[0064] In addition, the first rotating rod 112 is located on one side of the air-drying mechanism 4 and is fastened with a plurality of left gears 1121, the left gears 1121 are vertically engaged with left transmission gears 1122, the inner side of the left transmission gears 1122 is fastened with one end of a left transmission rod 1123 through bolts, and the left transmission rod 1123 is rotatably arranged through the other side of the spray bin 1; the second rotating rod 120 is located on the other side of the air-drying mechanism 4 and is fastened with a plurality of right gears 1201, the right gears 1201 are vertically engaged with right transmission gears 1202, the inner side of the right transmission gears 1202 is fastened with one end of a right transmission rod 1203 through bolts, and the right transmission rod 1203 is rotatably arranged through the other side of the spray bin 1; a plurality of left transmission rods 1123 are gradually arranged in a decreasing manner along the edge of the air-drying mechanism 4, and a plurality of right transmission rods 1203 are gradually arranged in an increasing manner along the edge of the air-drying mechanism 4; the synchronous rotation of the first rotating rod 112, the second rotating rod 120 and the main transmission rod 117 is driven by the rotation of the transmission motor 111, the first rotating rod 112 drives the rotation of the left transmission rod 1123 through the transmission connection of the left gears 1121 and the left transmission gears 1122, the main transmission rod 117 drives the synchronous rotation of the second rotating rod 120, and the second rotating rod 120 drives the rotation of the right transmission rod 1203 through the transmission connection of the right gears 1201 and the right transmission gears 1202, so as to realize the synchronous rotation of the first rotating rod 112, the second rotating rod 120 and the main transmission rod 117, and also drive the synchronous rotation of the left transmission rod 1123 and the right transmission rod 1203.

[0065] Further description, a plurality of rubber pads 123 are fitted on the main transmission rod 117, the rubber pads 123 are fitted with rubber-coated bolts 124, the rubber-coated bolts 124 are screwed with nuts 125, the rubber pads can increase the contact friction force with the rubber-coated bolts 124, avoid the deviation of the rubber-coated bolts 124, at the same time, the rubber-coated bolts 124 have rubber wheels for abutting and driving the transmission of the wafer 10, in combination with the rubber pads 123, the pressure applied by the spray mechanism 3 and the air-drying mechanism 4 on the surface of the wafer 10 can be buffered, the local wear of the wafer 10 caused by hard pressure can be avoided, and the safe transmission of the wafer 10 can be effectively ensured.

[0066] The transmission motor 111 is electrically connected with an external control console (not shown in the figure), the external control console is electrically connected with the scanning instrument 8, the size and surface state difference of the wafer 10 are obtained through the scanning instrument 8, the rotating speed of the transmission motor 111 is controlled, so as to safely send out the wafer 10, and the quality of the wafer 10 can be effectively ensured.

[0067] Referring to Figure 2 As shown in the figure, the spray mechanism 3 includes an upper spray assembly 31 and a lower spray assembly 32 which are installed in the spray bin 1 and located above and below the main transmission rod 117;

[0068] The upper spraying assembly 31 comprises a plurality of upper supporting columns 311 fixedly connected with the top of the spraying chamber 1, a plurality of upper spraying plates 312 fixedly connected with the upper supporting columns 311, a plurality of upper spraying pipes 313 arranged in a rectangular array on the upper surface of the upper spraying plate 312, and an upper control valve 314 installed on one side of the upper spraying pipe 313 for controlling the opening and closing of the upper spraying pipe 313; and the lower surface of the upper spraying plate 312 is threadedly connected with an upper nozzle 315 communicating with the lower spraying pipe 323.

[0069] The lower spraying assembly 32 comprises a plurality of lower supporting columns 321 fixedly connected with the bottom of the spraying chamber 1, a lower spraying plate 322 fixedly connected with the lower supporting columns 321, a plurality of lower spraying pipes 323 arranged in a rectangular array on the lower surface of the lower spraying plate 322, and a lower control valve 324 installed on one side of the lower spraying pipe 323 for controlling the opening and closing of the lower spraying pipe 323; and the lower surface of the lower spraying plate 322 is threadedly connected with a lower nozzle 325 communicating with the lower spraying pipe 323.

[0070] The upper and lower spraying pipes 323 are communicated with an alcohol pump (not shown in the figure) through a pipeline, and alcohol in an alcohol use tank (not shown in the figure) is drawn to the upper and lower spraying pipes 323 through the alcohol pump; the upper and lower control valves 324 can independently control the opening and closing of the corresponding upper and lower spraying pipes 323; the upper and lower control valves 324 are electrically connected with an external control console (external control system), the external control console is electrically connected with a scanning instrument 8, the scanning instrument 8 can scan the shape of the wafer 10, and the size and surface state difference of the wafer 10 are obtained through the scanning instrument 8; the upper and lower control valves 324 are controlled to open and close the corresponding upper and lower spraying pipes 323, so that the corresponding upper and lower nozzles 325 of the upper and lower spraying pipes 323 can efficiently and accurately spray and clean the wafer 10 according to the size and surface state difference of the wafer 10, and the waste of resources is effectively reduced.

[0071] Specifically, the upper nozzle 315 and the lower nozzle 325 are oppositely arranged to spray and clean the upper and lower surfaces of the wafer 10, and the cleaning effect is good.

[0072] Referring to Figure 3 , Figures 8-12As shown, the two groups of air-drying mechanisms 4 are arranged at intervals, and the air-drying mechanism 4 comprises two mounting racks 41 mounted obliquely on the machine body, the top of each mounting rack 41 is provided with a mounting plate 42, the opposite end of each mounting plate 42 penetrates the air-drying bin 2 and is hingedly connected with one end of a transmission plate 43, the other end of the transmission plate 43 is hingedly connected with a rotating plate 44, the two ends of the rotating plate 44 are provided with a rotating frame 45, the top of the rotating frame 45 is rotatably connected with the rotating shaft of a rotating motor 46, and the top of the rotating motor 46 is fixedly connected with the top of the spraying bin 1; the rotating motor 46 drives the rotating frame 45 to rotate slightly left and right, thereby realizing the blow-drying of the wafer 10 at different angles.

[0073] The rotating frame 45 is further provided with two upper long grooves 451 and two lower long grooves 457 on the two sides thereof;

[0074] The two upper long grooves 451 are fixedly connected with two upper plates 452 through bolts, the opposite side of each upper plate 452 is provided with a rotatable upper air plate 453, and the opposite side of each upper plate 452 is provided with a rotatable upper block 454; the upper and lower surfaces of each upper plate 452 are provided with two upper arc grooves 455 arranged symmetrically, and the side of each upper air plate 453 facing the upper plate 452 is provided with two upper guide rods 456 slidingly fitted through the two upper arc grooves 455;

[0075] The two lower long grooves 457 are fixedly connected with two lower plates 458 through bolts, the opposite side of each lower plate 458 is provided with a rotatable lower air plate 459, and the opposite side of each upper plate 452 is provided with a rotatable lower block 460; the upper and lower surfaces of each lower plate 458 are provided with two lower arc grooves 461 arranged symmetrically, and the side of each lower air plate 459 facing the lower plate 458 is provided with two lower guide rods 462 slidingly fitted through the two lower arc grooves 461;

[0076] The rotating frame 45 is further provided with an upper scale and a lower scale, the upper block 454 is further provided with a pointer pointing to the upper scale, and the lower block 460 is further provided with a pointer pointing to the lower scale; the scale is used to record the height position of the upper plate 452 and the lower plate 458, thereby recording the height position of the upper air plate 453 and the lower air plate 459; the edge of the upper long groove 451 and the lower long groove 457 is further provided with a scale, and the upper guide rod 456 and the lower guide rod 462 are provided with a pointer pointing to the scale; the scale is used to record and observe the rotation angle of the upper block 454 and the lower block 460, thereby recording the rotation angle of the upper air plate 453 and the lower air plate 459; specifically, the rotation between the upper air plate 453 and the upper block 454 and the rotation between the lower air plate 459 and the lower block 460 are connected by a rotating pin;

[0077] It should be noted that the upper block 454 and the upper air plate 453, and the lower block 460 and the lower air plate 459 can be manually adjusted to be fixed and not to rotate, or can be driven to rotate by an external motor.

[0078] The upper wind plate 453 is further provided with upper wind pipes 4531 on both sides, and the bottom of the upper wind plate 453 is provided with upper air inlets 4532 which are internally connected to the upper wind pipes 4531. The lower wind plate 459 is further provided with lower wind pipes 4591 on both sides, and the top of the lower wind plate 459 is provided with lower air inlets 4592 which are internally connected to the lower wind pipes 4591. The upper and lower air inlets 4592 are oppositely arranged, which is helpful for the air blowing and drying of the wafer 10;

[0079] The rotating frame 45 is provided with a plurality of L-shaped connecting plates 463 on the top, and the L-shaped connecting plates 463 are fastened with connecting blocks 464. The bottom of the connecting block 464 is provided with an abutting piece 465, and one end of the bottom of the abutting piece 465 is hinged with a rubber-coated bearing 466. The rubber-coated bearing 466 is obliquely arranged with the guide bearing 64. The rubber-coated bearing 466 can move the wafer 10 towards the direction of the guide mechanism 6, which has a guiding effect. The top of the rotating frame 45 is provided with an L-shaped fixed plate 467, and the L-shaped fixed plate 467 is fastened with a fixed block 468. The bottom of the fixed block 468 is connected with a fixed rod 469, and the bottom of the fixed rod 469 is connected with a nitrogen plate 470. The bottom of the nitrogen plate 470 is provided with a nitrogen hole 471, and one side of the nitrogen plate 470 is provided with a nitrogen pipe 472 which is connected to the nitrogen hole 471. Nitrogen has antioxidant properties, which can prevent the oxidation of the surface of the wafer 10, effectively improving the drying quality of the wafer 10;

[0080] In addition, the upper and lower wind pipes 4591 and the nitrogen pipe 472 are pressurized by corresponding external fans (not shown in the figure). The external fan is electrically connected with an external control console, and the external control console is electrically connected with the scanning instrument 8. The size and surface state difference of the wafer 10 obtained by the scanning instrument 8 can control the air volume of the upper and lower wind pipes 4591 and the nitrogen pipe 472, so as to realize the control of the air volume of the corresponding upper and lower wind pipes 4591 and the nitrogen pipe 472 according to the size and surface state difference of the wafer 10, which can efficiently and accurately dry the wafer 10, while effectively saving the waste of electricity;

[0081] Further, the air blown by the upper and lower wind pipes 4591 is hot air with a temperature of 40-50 degrees Celsius, which is helpful for the rapid evaporation of alcohol;

[0082] Specifically, the abutting piece 465 comprises an abutting rod 4651 screwed with the connecting block 464, a limiting rod 4652 movably arranged at the bottom of the abutting rod 4651, an encapsulated bearing 466 hinged at the bottom end of the limiting rod 4652 and connected with the inclined guide mechanism 6, a limiting cavity 4653 arranged in the abutting rod 4651, and a return spring 4654 arranged in the limiting cavity 4653 and abutting against the top of the limiting cavity 4653 and the bottom end of the limiting rod 4652, so that the hard pressure and the buffering effect of the contact with the wafer 10 can be avoided, and the wafer 10 is guided and protected,

[0083] It should be noted that: the L-shaped connecting plate 463 and the L-shaped fixing plate 467 are both provided with a strip-shaped slot, the rotating frame 45 is connected through the strip-shaped slot by screwing, the scale block is installed at the top end of the rotating frame 45 and located between the L-shaped connecting plate 463 and the L-shaped fixing plate 467, and the pointer is arranged on one side of the L-shaped connecting plate 463 and the L-shaped fixing plate 467 and points to the scale block, so that the up-down height of the L-shaped connecting plate 463 and the L-shaped fixing plate 467 can be adjusted through the strip-shaped slot, and the specific height position of the adjustment can be recorded through the scale of the scale block.

[0084] Referring to Figure 14 The rotating plate 44 is further provided with a plurality of support plates 441, one end of each support plate 441 is provided with a left support vertical plate 4411, the top end of the left support vertical plate 4411 is provided with a left support grab plate 4412 which is adjustable up and down, the top of the left support grab plate 4412 is provided with a left grab hand 4413, the inner wall of the left grab hand 4413 is provided with a bearing and is sleeved with one end of a left transmission rod 1123, and the left transmission rod 1123 is rotatable on the left grab hand 4413, the other end of each support plate 441 is provided with a right support vertical plate 4414, the top end of the right support vertical plate 4414 is provided with a right support grab plate 4415 which is adjustable up and down, the top of the right support grab plate 4415 is provided with a right grab hand 4416, the inner wall of the right grab hand 4416 is provided with a bearing and is sleeved with one end of a right transmission rod 1203, and the right transmission rod 1203 is rotatable on the right grab hand 4416, the left support vertical plate 4411 and the right support vertical plate 4414 play a supporting role for the left transmission rod 1123 and the right transmission rod 1203, so as to ensure the stability of the work.

[0085] Specifically, the number of the plurality of support plates 441 is determined by the number of one group of the left transmission rod 1123 and the right transmission rod 1203.

[0086] The top of the support plate 441 is further provided with a vertical plate 4417, the top end of the vertical plate 4417 is provided with a periphery adjustable abutting block 4418, one side of the abutting block 4418 is fastened with an abutting pin 4419, the abutting pin 4419 is sleeved with a rotatable abutting bearing 4420 at one end relative to the abutting block 4418, the height and abutting position of the abutting pin 4419 can be adjusted through the abutting block 4418, the position (vacant position) that is not provided by the transmission rod can be supplemented, the transmission work of the wafer 10 can be ensured, and certain practicality is also provided.

[0087] Referring to Figures 1-3 As shown in FIGS. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 and 14, the 3 sets of guiding mechanisms 6 are arranged at intervals between the 2 sets of air drying mechanisms 4, the guiding mechanism 6 comprises a plurality of support rods 61 fixedly connected with the bottom of the air drying bin 2, the top of the plurality of support rods 61 is fixedly connected with a guiding plate 62, a plurality of guiding rods 63 are arranged at equal intervals on the top of the guiding plate 62, the guiding rod 63 is sleeved with a guiding bearing 64, the guiding rod 63 is arranged perpendicularly intersecting with the main transmission rod 117, the guiding bearing 64 is made of rubber material, can abut against the wafer 10 without trace, and can guide the wafer 10 together with the guiding shaft, so that the wafers 10 are arranged neatly, and are convenient for manual final taking, and the work efficiency is effectively improved;

[0088] Referring to Figure 1 and 16 As shown in FIGS. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 and 14, the 2 sets of recovery mechanisms 5 are arranged at intervals on one side of the air drying bin 2, the recovery mechanism 5 comprises a recovery bent hopper 51 communicated with one side of the air drying bin 2, a recovery air pipe 52 connected with the top of the recovery bent hopper, a recovery air bin 53 connected with the top of the recovery air pipe 52, a recovery air fan arranged in the recovery air bin 53, a switch panel 531 arranged on the top of the recovery air bin 53 and used for opening and closing the recovery air fan, and a recovery pipe 54 arranged on the top of the recovery air bin 53 and communicated with an alcohol recovery tank (not shown in the figure) through a pipeline; the alcohol vapor in the air drying bin 2 is collected through the recovery bent hopper, the evaporated alcohol is cooled to become liquid alcohol through the recovery pipe 54 connected with an external cooling device, and finally flows to the alcohol recovery tank for recovery;

[0089] Meanwhile, the bottom of the spraying bin 1 is further provided with a recovery port 7, the recovery port 7 is covered with an intercepting net 71, the recovery port 7 is communicated with the alcohol recovery tank (not shown in the figure) through a pipeline, and the intercepting net 71 is used for intercepting the sediment and ash generated in the wafer 10 cleaning process, so as to avoid the impurities flowing into the alcohol recovery tank.

[0090] Based on the above-mentioned wafer 10 CV transmission alcohol spraying and air drying device, the present application further provides an operation method, which specifically comprises the following steps:

[0091] Step S01: the conveying mechanism 11 conveys the wafer 10 to the scanning instrument 8 in the spraying cabin 1, the scanning instrument 8 scans the surface of the wafer 10 to obtain the size and surface state data of the wafer 10;

[0092] Meanwhile, based on the scanning data, the external control system presets the conveying speed of the conveying mechanism 11, the spraying amount of the spraying mechanism 3 and the operation parameters of the air-drying mechanism 4.

[0093] Step S02: the conveying mechanism 11 conveys the wafer 10 to the region where the spraying mechanism 3 is located at the preset speed;

[0094] According to the size and surface state data of the wafer 10, the upper control valve 314 and the lower control valve 324 corresponding to the upper spraying assembly 31 and the lower spraying assembly 32 are opened, and the upper nozzle 315 and the lower nozzle 325 respectively spray alcohol from the upper and lower sides of the wafer 10 to clean the surface of the wafer 10;

[0095] Step S03: the conveying mechanism 11 sends the sprayed wafer 10 into the air-drying cabin 2, the rotating motor 46 is started to drive the rotating frame 45 to rotate slightly, and at the same time, the upper air plate 453 and the lower air plate 459 are supplied with high-temperature dust-free gas,

[0096] During the conveying of the wafer 10, the encapsulated bearing 466 of the abutting piece 465 abuts against the wafer 10 to drive the wafer 10 to align to one side of the guide bearing 64, so that the conveyed wafers 10 are arranged in order and elastically abut against the reset spring 4654, so that the wafer 10 cannot be pressed hard and broken, in addition, the nitrogen holes 471 of the nitrogen plate 470 are supplied with nitrogen to form a nitrogen protection atmosphere to prevent the wafer 10 from being oxidized on the surface;

[0097] Step S04: during the air-drying process, the recovery fan of the recovery mechanism 5 is started, the alcohol steam in the air-drying cabin 2 is collected through the recovery bucket, is conveyed to the recovery pipe 54 through the recovery air pipe 52 and the recovery air cabin 53, is changed into liquid alcohol by being connected to the external cooling device, and then flows to the alcohol recovery tank, at the same time, the alcohol in the spraying cabin 1 flows into the recovery port 7 and then flows to the alcohol recovery tank for recovery;

[0098] Step S05: the recovered alcohol is proportioned to realize the recycling of the alcohol.

[0099] In order to better understand the working principle of the device, as shown in the accompanying drawings, Figure 17 The working principle of the wafer 10 CV conveying alcohol spraying and air-drying device is as follows:

[0100] First, when the wafer 10 passes through the spraying mechanism 3, the alcohol is extracted by the alcohol pump using internal alcohol (alcohol with a good proportion) to reach the upper and lower spraying pipes 323 of the spraying mechanism 3, and the upper and lower spraying pipes 323 are opened by controlling the upper and lower control valves 324 to realize spraying of the wafer 10.

[0101] Subsequently, the sprayed alcohol solution flows to the recycling port 7 at the bottom of the spraying bin 1, flows to the alcohol recycling tank through the recycling port 7, and flows to the alcohol recycling tank through the recycling mechanism arranged on the outer side of the air drying bin 2 to cool the evaporated alcohol, so as to achieve the purpose of alcohol recycling.

[0102] Finally, the alcohol in the alcohol recycling tank is added with high-purity alcohol to change into the concentration alcohol used for spraying, and then the alcohol recycling tank is opened to make the alcohol with a good proportion in the alcohol recycling tank flow into the alcohol using tank, so as to achieve the effect of cyclic use.

[0103] The above-described embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the scope of the patent. It should be pointed out that for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A wafer CV transfer alcohol spraying and drying device, installed inside a cleaning machine, characterized in that, It includes a spray chamber (1) and a drying chamber (2) integrally connected to the spray chamber (1). A transmission mechanism (11) is provided in the spray chamber (1) and the drying chamber (2). Z sets of guiding mechanisms (6) are arranged in the transmission mechanism (11). A spray mechanism (3) is arranged above and below the transmission mechanism (11) in the spray chamber (1). A scanning device (8) is also arranged in front of the spray mechanism (3) in the spray chamber (1). M sets of drying mechanisms (4) are arranged above and below the transmission mechanism (11) in the drying chamber (2). N sets of recycling mechanisms (5) are also arranged on one side of the drying chamber (2).

2. The wafer CV transfer alcohol spraying and drying device according to claim 1, characterized in that, The transmission mechanism (11) includes a transmission motor (111) disposed on one side of the spray chamber (1) or the drying chamber (2). The transmission motor (111) is rotatably connected to a first rotating rod (112). A plurality of first bearings (113) are sleeved on the first rotating rod (112). A first connecting plate (114) is fixedly connected to the outer ring of the first bearings (113). The first connecting plate (114) is fixedly connected to the same side of the spray chamber (1) and the drying chamber (2). A plurality of first gears (115) are also fastened on the first rotating rod (112). The first gears (115) are perpendicularly meshed with a first transmission gear (116). The inner ring of the first transmission gear (116) is... One end of the main transmission rod (117) is fastened to the main transmission rod (117), which can rotatably pass through both sides of the spray chamber (1) and the drying chamber (2). The other end of the main transmission rod (117) is fitted with a second transmission gear (118) that is fastened to the main transmission rod (118). The second transmission gear (118) is vertically meshed with a second gear (119). The second gear (119) is fastened to the second rotating rod (120). The second rotating rod (120) is fitted with several second bearings (121). The outer ring of the second bearing (121) is fixedly connected to a second connecting plate (122). The second connecting plate (122) is fixedly connected to the other side of the spray chamber (1) and the drying chamber (2). The first rotating rod (112) is located on one side of the drying mechanism (4) and is fastened with several left gears (1121). The left gears (1121) are vertically meshed with the left transmission gear (1122). The inner ring of the left transmission gear (1122) is fastened to one end of the left transmission rod (1123). The left transmission rod (1123) can rotatably pass through one side of the spray chamber (1). The second rotating rod (120) is located on the other side of the drying mechanism (4) and is fastened with several right gears (1201). The left gear (1121) is vertically meshed with the right transmission gear (1202). The inner ring of the right transmission gear (1202) is fastened to one end of the right transmission rod (1203). The right transmission rod (1203) can rotatably pass through the other side of the spray chamber (1).

3. The wafer CV transfer alcohol spraying and drying device according to claim 2, characterized in that, The main transmission rod (117) is fitted with several rubber gaskets (123) with an interference fit. The rubber gaskets (123) are fitted with rubber-coated bolts (124) with an interference fit. The rubber-coated bolts (124) are threaded with nuts (125).

4. The wafer CV transfer alcohol spraying and drying device according to claim 1, characterized in that, The spraying mechanism (3) includes an upper spraying assembly (31) and a lower spraying assembly (32) located above and below the main transmission rod (117) within the spraying chamber (1); The upper spray assembly (31) includes several upper support columns (311) fixedly connected to the top of the spray chamber (1), and an upper spray plate (312) fixedly connected to the several upper support columns (311). Several upper spray pipes (313) are provided on the upper surface of the upper spray plate (312). An upper control valve (314) for controlling the opening and closing of the upper spray pipe (313) is installed on one side of the upper spray pipe (313). An upper nozzle (315) communicating with the upper spray pipe (313) is provided on the lower surface of the upper spray plate (312). The lower spray assembly (32) includes several lower support columns (321) fixedly connected to the bottom of the spray chamber (1), and several lower support columns (321) are fixedly connected to a lower spray plate (322). Several lower spray pipes (323) are provided on the lower surface of the lower spray plate (322). A lower control valve (324) for controlling the opening and closing of the lower spray pipe (323) is installed on one side of the lower spray pipe (323). A lower nozzle (325) communicating with the lower spray pipe (323) is provided on the lower surface of the lower spray plate (322).

5. The wafer CV transfer alcohol spraying and drying device according to claim 1, characterized in that, The guiding mechanism (6) includes several support rods (61) fixedly connected to the bottom of the drying chamber (2). The top of the several support rods (61) is fixedly connected to a guide plate (62). The top of the guide plate (62) is provided with several guide rods (63). The guide rods (63) are fitted with guide bearings (64). The guide rods (63) are perpendicularly intersecting with the main transmission rod (117).

6. The wafer CV transfer alcohol spraying and drying device according to claim 1, characterized in that, The air-drying mechanism (4) includes two mounting brackets (41) installed off-center on the machine body. Two mounting plates (42) are respectively provided on the top of the two mounting brackets (41). One end of the two mounting plates (42) passes through the air-drying chamber (2) and is respectively hinged to one end of two transmission plates (43). The other end of the two transmission plates (43) is respectively hinged to a rotating plate (44). Rotating frames (45) are installed at both ends of the rotating plate (44). The rotating frame (45) is rotatably connected to the top of the rotating motor (46). The top of the rotating motor (46) is fixedly connected to the top of the spray chamber (1). The rotating frame (45) also has two upper elongated slots (451) and two lower elongated slots (457) on its outer sides. The two upper elongated slots (451) are fastened to two upper plates (452) by bolts. A rotatable upper wind plate (453) is provided on the opposite side of the two upper plates (452). A rotatable upper block (454) is provided on the opposite side of the two upper plates (452). The upper and lower surfaces of the upper plates (452) are respectively provided with two symmetrically arranged upper arc-shaped slots (455). The side of the upper wind plate (453) facing the upper plate (452) has a groove that passes through the two upper arc-shaped slots. The groove (455) has two upper guide rods (456) that slide together; the two lower elongated grooves (457) are respectively fastened to two lower plates (458) by bolts. The two lower plates (458) have a rotatable lower wind plate (459) on one side facing each other. The two upper plates (452) have a rotatable lower block (460) on one side facing each other. The upper and lower surfaces of the lower plates (458) are respectively provided with two symmetrically arranged lower arc grooves (461). The side of the lower wind plate (459) facing the lower plate (458) has two lower guide rods (462) that slide together through the two lower arc grooves (461). The upper wind plate (453) is provided with upper wind pipes (4531) on both sides. The bottom of the upper wind plate (453) is provided with an upper wind port (4532) that internally connects to the upper wind pipes (4531). The lower wind plate (459) is provided with lower wind pipes (4591) on both sides. The top of the lower wind plate (459) is provided with a lower wind port (4592) that internally connects to the lower wind pipes (4591). The upper wind port (4532) and the lower wind port (4592) are arranged facing each other. The top of the rotating frame (45) is provided with several L-shaped connecting plates (463). The L-shaped connecting plates (463) are tightly fitted with connecting blocks (464). The bottom of the connecting blocks (464) is... The part is provided with abutting part (465), and a rubber-coated bearing (466) is hinged to one end of the bottom of the abutting part (465). The rubber-coated bearing (466) is obliquely guided by a bearing (64). An L-shaped fixing plate (467) is provided on the top of the rotating frame (45). A fixing block (468) is fastened to the L-shaped fixing plate (467). A fixing rod (469) is connected to the bottom of the fixing block (468). A nitrogen plate (470) is connected to the bottom of the fixing rod (469). A nitrogen hole (471) is opened at the bottom of the nitrogen plate (470). A nitrogen pipe (472) communicating with the nitrogen hole (471) is provided on one side of the nitrogen plate (470). The top of the rotating plate (44) is also provided with several support plates (441). One end of the support plate (441) is provided with a left support vertical plate (4411). The top of the left support vertical plate (4411) is provided with a left support gripping plate (4412) that can be adjusted up and down. The top of the left support gripping plate (4412) has a left gripper (4413). The inner wall of the left gripper (4413) is provided with a bearing and is sleeved on one end of the left transmission rod (1123). The other end of the support plate (441) is provided with a right support vertical plate (4414), the top of the right support vertical plate (4414) is provided with a right support gripper (4415) that can be adjusted up and down, the top of the right support gripper (4415) has a right gripper (4416), the inner wall of the right gripper (4416) is provided with a bearing and is sleeved on one end of the right transmission rod (1203); The support plate (441) is also provided with a vertical plate (4417) at the top. The top of the vertical plate (4417) is provided with an adjustable abutment block (4418) on all four sides. An abutment pin (4419) is tightly attached to one side of the abutment block (4418). A rotatable abutment bearing (4420) is sleeved on one end of the abutment pin (4419) relative to the abutment block (4418).

7. The wafer CV transfer alcohol spraying and drying device according to claim 6, characterized in that, The abutment member (465) includes an abutment rod (4651) threadedly connected to the connecting block (464). A limit rod (4652) that can move up and down is sleeved at the bottom of the abutment rod (4651). A rubber-coated bearing (466) is hinged to one end of the bottom of the limit rod (4652). The abutment rod (4651) has a limit cavity (4653) inside. A return spring (4654) is provided in the limit cavity (4653). The return spring (4654) abuts against the top of the limit cavity (4653) and one end of the limit rod (4652).

8. The wafer CV transfer alcohol spraying and drying device according to claim 1, characterized in that, The recycling mechanism (5) includes a recycling hopper (51) connected to one side of the drying chamber (2). A recycling air pipe (52) is connected to the top of the recycling hopper. A recycling air chamber (53) is connected to the top of the recycling air pipe (52). A recycling fan is installed inside the recycling air chamber (53). A switch panel (531) for opening and closing the recycling fan is installed on the top of the recycling air chamber (53). A recycling pipe (54) is also installed on the top of the recycling air chamber (53). The recycling pipe (54) is connected to an alcohol recycling tank through a pipeline.

9. The wafer CV transfer alcohol spraying and drying device according to claim 1, characterized in that, The bottom of the spray chamber (1) is also provided with a recovery port (7), and an interception net (71) is provided on the recovery port (7). The recovery port (7) is connected to an alcohol recovery tank through a pipe.

10. A method for operating a wafer CV transfer alcohol spraying and drying device, characterized in that, Includes the following steps: Step S01: The transfer mechanism (11) transports the wafer (10) to the scanning device (8) in the spray chamber (1). The scanning device (8) scans the surface of the wafer (10) to obtain the size and surface condition data of the wafer (10). Meanwhile, based on the scan data, the external control system presets the transmission speed of the transmission mechanism (11), the spray volume of the spray mechanism (3), and the operating parameters of the drying mechanism (4). Step S02: The transfer mechanism (11) transports the wafer (10) to the area where the spray mechanism (3) is located at a preset speed; According to the size and surface condition data of the wafer (10), the upper control valve (314) and lower control valve (324) of the upper spray assembly (31) and the lower spray assembly (32) are opened, and the upper nozzle (315) and the lower nozzle (325) spray alcohol from the upper and lower parts of the wafer (10) respectively to clean the surface of the wafer (10); Step S03: The transfer mechanism (11) sends the sprayed wafer (10) into the drying chamber (2), starts the rotating motor (46), drives the rotating frame (45) to rotate slightly, and at the same time, high-temperature dust-free gas is introduced into the upper air plate (453) and the lower air plate (459). During the transfer of the wafer (10), the rubber-coated bearing (466) of the abutment (465) abuts against the wafer (10) and drives the wafer (10) to move towards the guide bearing (64) side, so that the delivered wafer (10) is arranged neatly. Under the action of the reset spring (4654), it maintains elastic contact to ensure that the wafer (10) will not be hard crushed. In addition, nitrogen gas is introduced into the nitrogen gas hole (471) of the nitrogen plate (470) to form a nitrogen protective atmosphere to prevent oxidation of the wafer (10) surface. Step S04: During the air drying process, the recovery fan of the recovery mechanism (5) is started, and the alcohol vapor in the air drying chamber (2) is collected through the recovery bend bucket. It is then transported through the recovery air pipe (52) and the recovery air chamber (53) to the recovery pipe (54) and connected to the external cooling device to become liquid alcohol. It then flows to the alcohol recovery tank. At the same time, the alcohol in the spray chamber (1) flows into the recovery port (7) and flows to the alcohol recovery tank for recovery. Step S05: Mix the recovered alcohol to achieve alcohol recycling.

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