Ultrapure water manufacturing system and method

Abstract

The invention provides an ultrapure water manufacturing system and method.The ultrapure water manufacturing system comprises a raw water tank, a raw water pump, a germicidal lamp, a filter, a reverse osmosis device, a pure water tank, a detection device and a PID controller, and the raw water pump is connected with a water outlet of the raw water tank; the sterilization lamp is arranged at the rear stage of the raw water pump, the filter is arranged at the rear stage of the sterilization lamp, the reverse osmosis device is arranged at the rear stage of the filter, the pure water tank is arranged at the rear stage of the reverse osmosis device, and the detection device is arranged between the filter and the reverse osmosis device. The filter is arranged on the sterilization lamp and used for detecting the microorganism concentration of raw water discharged by the filter and forming a real-time concentration value, and the PID controller is arranged on the sterilization lamp and used for receiving the real-time concentration value and regulating and controlling the irradiance of the sterilization lamp based on the real-time concentration value and a PID algorithm so as to control the sterilization lamp to be in an energy-saving state or a normal working state. According to the ultrapure water manufacturing system, the irradiance of the germicidal lamp can be adjusted in a self-control manner according to the concentration of microorganisms, so that the energy consumption of the system is reduced.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor integrated circuit manufacturing, and relates to an ultrapure water manufacturing system and method. BACKGROUND

[0002] In the field of pure water preparation, 254nm ultraviolet (UV) germicidal lamps are currently recognized as a key disinfection means. The sterilization mechanism is that the 254nm ultraviolet light is absorbed by the nucleic acid of microorganisms, triggering a photochemical reaction, prompting adjacent pyrimidine bases to form dimers, blocking DNA replication and transcription, and thus causing microorganisms to be inactivated. However, in the existing industrial ultrapure water system, the UV device usually works in a single mode of 24h continuous operation, lacking a mechanism for starting and stopping on demand or power regulation, resulting in high energy consumption.

[0003] Therefore, how to provide an ultrapure water manufacturing system capable of automatically adjusting the irradiance of the germicidal lamp according to the concentration of microorganisms, thereby reducing the energy consumption of the system, has become an important problem to be solved by those skilled in the art.

[0004] It should be noted that the above introduction to the technical background is only to facilitate the clear and complete description of the technical scheme of the present application, and to facilitate the understanding of those skilled in the art. The above technical scheme cannot be considered as known to those skilled in the art merely because it is described in the background section of the present application. SUMMARY

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide an ultrapure water manufacturing system and method to solve the problem that the ultraviolet germicidal lamp cannot automatically adjust the irradiance in the prior art, resulting in high energy consumption of the ultrapure water system.

[0006] To achieve the above-mentioned purpose and other related purposes, the present application provides an ultrapure water manufacturing system, comprising:

[0007] A raw water tank and a raw water pump, wherein the raw water pump is connected to the water outlet of the raw water tank;

[0008] A germicidal lamp arranged at the rear stage of the raw water pump to sterilize the raw water discharged by the raw water pump;

[0009] A filter arranged at the rear stage of the germicidal lamp to filter the water treated by the germicidal lamp;

[0010] A reverse osmosis device arranged at the rear stage of the filter to remove impurities in the water discharged by the filter;

[0011] A pure water tank is arranged at a rear stage of the reverse osmosis device to receive and store the water discharged by the reverse osmosis device; a detection device is arranged between the filter and the reverse osmosis device to detect the microbial concentration of the water discharged by the filter and form a real-time concentration value;

[0012] A PID controller is arranged on the germicidal lamp to receive the real-time concentration value, and the PID controller regulates the irradiance of the germicidal lamp based on the real-time concentration value and a PID algorithm to control the germicidal lamp to be in an energy-saving state or a normal working state.

[0013] Optionally, the germicidal lamp comprises a driving circuit connected to the output end of the PID controller, and the driving circuit receives the control signal and converts the control signal into a circuit signal to adjust the irradiance of the germicidal lamp.

[0014] Optionally, when the target concentration value is greater than or equal to the real-time concentration value and the concentration difference value is greater than or equal to 250 CFU / mL, the PID controller controls the germicidal lamp to enter the energy-saving state.

[0015] Optionally, when the germicidal lamp enters the energy-saving state, the irradiance of the germicidal lamp is less than or equal to 30 mW / cm 2 .

[0016] Optionally, the number of the germicidal lamps is one or more.

[0017] Optionally, the maximum value of the irradiance of the germicidal lamp is 100 mW / cm 2 .

[0018] Optionally, the germicidal lamp comprises an ultraviolet germicidal lamp.

[0019] Optionally, the detection device comprises a microbial sensor.

[0020] The application further provides an ultrapure water manufacturing method, which at least comprises the following steps:

[0021] The ultrapure water manufacturing system of any one of the above is provided;

[0022] The raw water to be treated is subjected to sterilization treatment, filtration treatment and reverse osmosis treatment to obtain ultrapure water;

[0023] The ultrapure water is stored in the pure water tank.

[0024] Optionally, in the sterilization treatment, the PID controller regulates the irradiance of the germicidal lamp based on the real-time concentration value of the microorganism in the water and a PID algorithm, which comprises the following steps:

[0025] a target concentration value is set, and a concentration difference between the target concentration value and a real-time concentration value is calculated;

[0026] According to the concentration difference, a control amount is obtained by using a PID calculation formula, and the PID calculation formula is:

[0027]

[0028] In the formula, u(t) is the control amount output by the PID calculation formula, e(t) is the difference between the target concentration value and the real-time concentration value, Kp is a proportional coefficient, Ki is an integral coefficient, and Kd is a differential coefficient. p i d

[0029] The control amount is used as a control signal to adjust the irradiance of the germicidal lamp.

[0030] As described above, the ultrapure water manufacturing system of the present application comprises a raw water tank, a raw water pump, a germicidal lamp, a filter, a reverse osmosis device, a pure water tank, a detection device, and a PID controller, wherein the raw water pump is connected to the water outlet of the raw water tank; the germicidal lamp is arranged at the rear stage of the raw water pump to sterilize the raw water discharged by the raw water pump; the filter is arranged at the rear stage of the germicidal lamp to filter the water treated by the germicidal lamp; the reverse osmosis device is arranged at the rear stage of the filter to remove impurities in the water discharged by the filter; the pure water tank is arranged at the rear stage of the reverse osmosis device to receive and store the water discharged by the reverse osmosis device; the detection device is arranged between the filter and the reverse osmosis device to detect the microbial concentration of the raw water discharged by the filter and form a real-time concentration value; and the PID controller is arranged on the germicidal lamp to receive the real-time concentration value, and the PID controller regulates the irradiance of the germicidal lamp based on the real-time concentration value and a PID algorithm to control the germicidal lamp to be in an energy-saving state or a normal working state. The ultrapure water manufacturing system of the present application can automatically control and adjust the irradiance of the germicidal lamp according to the microbial concentration, thereby reducing the energy consumption of the system. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 The figure shows the structure of the ultrapure water manufacturing system of the present application.

[0032] REFERENCE NUMERALS

[0033] 1 raw water tank

[0034] 2 raw water pump

[0035] 3 germicidal lamp

[0036] 4 filter

[0037] 5 reverse osmosis device

[0038] 6 pure water tank​​​

[0039] 7 detection device

[0040] 8 PID controller DETAILED DESCRIPTION

[0041] In the existing industrial ultrapure water system, the low-pressure ultraviolet germicidal lamp is usually operated continuously for 24 hours. If the power of the germicidal lamp is kept at 40 W and the electricity price is 0.8 yuan per kilowatt hour (kWh), then the daily power consumption of the low-pressure ultraviolet germicidal lamp is 0.96 kWh, the monthly power consumption is 28.8 kWh, and the monthly electricity bill is 23.04 yuan. Therefore, the energy consumption of the existing industrial ultrapure water system is high, and the cost of the germicidal lamp applied in industry is high.

[0042] To this end, the applicant of the present application proposes an ultrapure water manufacturing system, which can reduce the energy consumption of the system by realizing self-control adjustment of the irradiance of the germicidal lamp according to the concentration of microorganisms.

[0043] The specific embodiments of the present application are described below, and those skilled in the art can easily understand other advantages and effects of the present application from the disclosure of the present specification. The present application can also be implemented or applied in other different specific embodiments, and various modifications or changes can be made to the details in the present specification based on different views and applications without departing from the spirit of the present application.

[0044] It should be emphasized that the term "comprises / comprising" as used herein refers to the presence of a feature, item, step or component, but does not exclude the presence or addition of one or more other features, items, steps or components.

[0045] Features described and / or illustrated with respect to one embodiment can be used in the same or similar manner in one or more other embodiments, in combination with features in other embodiments, or in place of features in other embodiments.

[0046] As in the detailed description of the embodiments of the present application, the schematic diagrams showing the structure of the device are partially enlarged without general proportion for the convenience of illustration, and the schematic diagrams are only examples, which should not limit the scope of protection of the present application here. In addition, three-dimensional spatial dimensions including length, width and depth should be included in actual manufacture.

[0047] For ease of description, spatially relative terms, such as "beneath", "below", "lower", "under", "above", "upper", and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. For example, if a layer is referred to as being "below" or "beneath" another layer, it can be "directly below" or "directly beneath" the other layer, or there can be one or more intervening layers. Moreover, a layer described as being "between" two layers can be the only layer between the two layers or can be one of two or more intervening layers between the two layers.

[0048] In the context of the present application, a structure described as being "on" a second feature "over" a first feature can include embodiments in which the first and second features are in direct contact, and can also include embodiments in which additional features are formed between the first and second features, such that the first and second features can not be in direct contact.

[0049] Need to be explained, the embodiment provided in the figure only in a schematic way illustrates the basic idea of the present application, so the figure shows only the relevant components in the present application, not the number of components, shape and size drawn according to the actual implementation, the actual implementation of each component type, quantity and ratio can be a kind of arbitrary change, and its component layout type can be more complex.

[0050] Embodiment one

[0051] In the embodiment, a kind of ultrapure water manufacturing system is provided, please refer to Figure 1 , it is shown as the structure schematic diagram of the ultrapure water manufacturing system of the present application, the ultrapure water manufacturing system includes raw water tank 1, raw water pump 2, germicidal lamp 3, filter 4, reverse osmosis device 5, pure water tank 6, detection device 7 and PID controller 8, wherein, the raw water pump 2 is connected with the water outlet of the raw water tank 1, the germicidal lamp 3 is arranged in the rear stage of the raw water pump 2, to carry out sterilization treatment to the raw water discharged by the raw water pump 2, the filter 4 is arranged in the rear stage of the germicidal lamp 3, to carry out filtration treatment to the water after sterilization treatment, the reverse osmosis device 5 is arranged in the rear stage of the filter 4, to remove the impurities in the water discharged by the filter 4, the pure water tank 6 is arranged in the rear stage of the reverse osmosis device 5, to receive and store the water discharged by the reverse osmosis device 5, the detection device 7 is arranged between the filter 4 and the reverse osmosis device 5, for detecting the microorganism concentration of the water discharged by the filter 4 and forming real-time concentration value, the PID controller 8 is arranged on the germicidal lamp 3, for receiving the real-time concentration value, and the PID controller 8 controls the irradiance of the germicidal lamp 3 based on the real-time concentration value and PID algorithm, to control the germicidal lamp 3 to be in energy-saving state or normal working state.

[0052] Specifically, the step of regulating the irradiance of the germicidal lamp 3 by the PID controller 8 based on the real-time concentration value and the PID algorithm comprises:

[0053] (1) setting a target concentration value, and calculating a concentration difference between the target concentration value and the real-time concentration value;

[0054] (2) obtaining a control amount by using a PID calculation formula according to the concentration difference, wherein the PID calculation formula is:

[0055]

[0056] wherein u(t) is the control amount output by the PID calculation formula, e(t) is the difference between the target concentration value and the real-time concentration value, Kp is a proportional coefficient, Ki is an integral coefficient, and Kd is a differential coefficient; p i d

[0057] (3) taking the control amount as a control signal to adjust the irradiance of the germicidal lamp 3.

[0058] When the ultrapure water production system is running, the detection device 7 is set to detect the microbial concentration of the raw water at intervals, for example, once per minute, to ensure timely feedback. After the detection device 7 feeds back the real-time concentration value to the PID controller 8, the PID controller 8 calculates the concentration difference and obtains the control amount by the PID calculation formula, thereby converting the control amount into the control signal, realizing the real-time linkage between the detection device 7 and the germicidal lamp 3, and being able to automatically adjust the irradiance of the germicidal lamp 3 according to the microbial concentration, so as to reduce the energy consumption of the system. The control amount is not the irradiance of the germicidal lamp 3 itself, but the driving intensity to which the germicidal lamp 3 should be adjusted. For example, in the present embodiment, the target concentration value is set to 1050 CFU / mL, the initial microbial concentration of the raw water discharged by the filter 4 is 1000 CFU / mL, and the initial irradiance of the germicidal lamp 3 is 50 mW / cm 2 . After the pollution rises, the microbial concentration of the raw water becomes 1500 CFU / mL, the concentration difference is -450 CFU / mL, the PID controller 8 brings the concentration difference into the calculation formula, and gradually increases the irradiance of the germicidal lamp 3 to 80 mW / cm 2 according to the obtained control amount, so that the germicidal lamp 3 is in a normal working state. After the pollution decreases, the microbial concentration of the raw water becomes 800 CFU / mL, the concentration difference is 250 CFU / mL, the PID controller 8 brings the concentration difference into the calculation formula, and gradually reduces the irradiance of the germicidal lamp 3 to 30 mW / cm 2 ​​​This allows the germicidal lamp 3 to operate in an energy-saving state. In other embodiments, the target concentration value is set as a range, specifically between 900 CFU / mL and 1200 CFU / mL. Correspondingly, a dead zone is added to the PID controller 8, set at 150 CFU / mL. When the raw water is in a stable state, the microbial concentration of the raw water remains at 1000 CFU / mL, within the dead zone. The PID controller 8 then stops operating, thereby maintaining the irradiance of the germicidal lamp 3 at 60 mW / cm². 2 This ensures that the germicidal lamp 3 is in normal working condition.

[0059] As an example, the germicidal lamp 3 includes a drive circuit connected to the output terminal of the PID controller 8. The drive circuit receives the control signal and converts the control signal into a circuit signal to adjust the irradiance of the germicidal lamp 3.

[0060] As an example, when the target concentration value is greater than or equal to the real-time concentration value and the concentration difference is greater than or equal to 250 CFU / mL, the PID controller 8 controls the germicidal lamp 3 to enter an energy-saving state, thereby reducing the energy consumption of the system.

[0061] As an example, when the germicidal lamp 3 enters the energy-saving state, the irradiance of the germicidal lamp 3 is less than or equal to 30mW / cm². 2 .

[0062] As an example, the number of germicidal lamps 3 is one or more.

[0063] As an example, the maximum irradiance of the germicidal lamp 3 is 100 mW / cm². 2 .

[0064] As an example, the germicidal lamp 3 includes an ultraviolet germicidal lamp.

[0065] As an example, the reverse osmosis unit 5 includes a spiral wound reverse osmosis unit.

[0066] As an example, the detection device 7 includes a microbial sensor.

[0067] The ultrapure water production system of this embodiment is used for ultrapure water production. The system includes a raw water tank, a raw water pump, a germicidal lamp, a filter, a reverse osmosis device, a pure water tank, a detection device, and a PID controller. Based on the real-time microbial concentration value of the water to be treated and the PID algorithm, the irradiance of the germicidal lamp can be automatically adjusted, thereby reducing the energy consumption of the system.

[0068] Example 2

[0069] This embodiment provides a method for producing ultrapure water, which includes at least the following steps:

[0070] (1) Provide the ultrapure water manufacturing system described in Example 1;

[0071] (2) The raw water to be treated is subjected to sterilization, filtration and reverse osmosis treatment to obtain ultrapure water;

[0072] (3) Store the ultrapure water in the pure water tank 6.

[0073] Specifically, in the sterilization process, the PID controller 8 adjusts the irradiance of the germicidal lamp 3 based on the real-time concentration of the microorganisms in the water and the PID algorithm, including the following steps:

[0074] (1) Set a target concentration value and calculate the concentration difference between the target concentration value and the real-time concentration value;

[0075] (2) Based on the concentration difference, the control quantity is obtained using the PID calculation formula, which is:

[0076]

[0077] In the formula: u(t) is the control quantity output by the PID calculation formula, e(t) is the difference between the target concentration value and the real-time concentration value, and K p K is the proportionality coefficient. i K is the integral coefficient. d These are the differential coefficients;

[0078] (3) Use the control quantity as a control signal to adjust the irradiance of the germicidal lamp 3.

[0079] For specific details, please refer to the above description of the operation of the PID controller 8 in the ultrapure water manufacturing system, as both operate on the same principle.

[0080] The ultrapure water manufacturing method in this embodiment utilizes the ultrapure water manufacturing system in Embodiment 1, which can also reduce the energy consumption of the pure water manufacturing system, thereby saving the manufacturing cost of ultrapure water.

[0081] In summary, the ultrapure water production system of the present invention includes a raw water tank, a raw water pump, a germicidal lamp, a filter, a reverse osmosis unit, a pure water tank, a detection device, and a PID controller. The raw water pump is connected to the outlet of the raw water tank. The germicidal lamp is located after the raw water pump to sterilize the raw water discharged from the pump. The filter is located after the germicidal lamp to filter the sterilized water. The reverse osmosis unit is located after the filter to remove impurities from the water discharged from the filter. The pure water tank is located after the reverse osmosis unit to receive and store the water discharged from the reverse osmosis unit. The detection device is located between the filter and the reverse osmosis unit to detect the microbial concentration of the raw water discharged from the filter and generate a real-time concentration value. The PID controller is located on the germicidal lamp to receive the real-time concentration value, and the PID controller adjusts the irradiance of the germicidal lamp based on the real-time concentration value and a PID algorithm to control the germicidal lamp to be in an energy-saving state or a normal operating state. The ultrapure water production system of the present invention can automatically adjust the irradiance of the germicidal lamp according to the microbial concentration, thereby reducing the system's energy consumption. Therefore, this invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0082] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. An ultrapure water production system, characterized in that, include: Raw water tank and raw water pump, wherein the raw water pump is connected to the outlet of the raw water tank; A germicidal lamp is installed after the raw water pump to sterilize the raw water discharged by the raw water pump. A filter is installed after the germicidal lamp to filter the water that has undergone sterilization. A reverse osmosis device is installed downstream of the filter to remove impurities from the water discharged from the filter; A pure water tank is installed after the reverse osmosis unit to receive and store the water discharged from the reverse osmosis unit. A detection device is installed between the filter and the reverse osmosis device to detect the microbial concentration in the water discharged from the filter and generate a real-time concentration value. A PID controller is installed on the germicidal lamp to receive the real-time concentration value. The PID controller adjusts the irradiance of the germicidal lamp based on the real-time concentration value and the PID algorithm to control the germicidal lamp to be in an energy-saving state or a normal working state.

2. The ultrapure water production system according to claim 1, characterized in that: The germicidal lamp includes a drive circuit connected to the output of the PID controller. The drive circuit receives the control signal and converts the control signal into a circuit signal to adjust the irradiance of the germicidal lamp.

3. The ultrapure water production system according to claim 1, characterized in that: When the target concentration value is greater than or equal to the real-time concentration value and the concentration difference is greater than or equal to 250 CFU / mL, the PID controller controls the germicidal lamp to enter the energy-saving state.

4. The ultrapure water production system according to claim 1, characterized in that: When the germicidal lamp enters energy-saving mode, the irradiance of the germicidal lamp is less than or equal to 30mW / cm². 2 .

5. The ultrapure water production system according to claim 1, characterized in that: The number of germicidal lamps is one or more.

6. The ultrapure water production system according to claim 1, characterized in that: The maximum irradiance of the germicidal lamp is 100 mW / cm². 2 .

7. The ultrapure water production system according to claim 1, characterized in that: The germicidal lamp includes an ultraviolet germicidal lamp.

8. The ultrapure water production system according to claim 1, characterized in that: The detection device includes a microbial sensor.

9. A method for producing ultrapure water, characterized in that, At least the following steps are included: Provide an ultrapure water production system as described in any one of claims 1-8; The raw water to be treated is subjected to sterilization, filtration, and reverse osmosis to obtain ultrapure water; The ultrapure water is stored in the pure water tank.

10. The method for producing ultrapure water according to claim 9, characterized in that, In the sterilization process, the PID controller adjusts the irradiance of the germicidal lamp based on the real-time concentration of the microorganisms in the water and the PID algorithm, including the following steps: Set a target concentration value and calculate the concentration difference between the target concentration value and the real-time concentration value; Based on the concentration difference, the control quantity is obtained using a PID calculation formula, which is: In the formula: u(t) is the control quantity output by the PID calculation formula, e(t) is the difference between the target concentration value and the real-time concentration value, and K p K is the proportionality coefficient. i K is the integral coefficient. d These are the differential coefficients; The control quantity is used as a control signal to adjust the irradiance of the germicidal lamp.

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