Waste rubber softening and utilizing device for rubber rings for semiconductors

Abstract

The invention relates to the field of rubber softening and utilization, in particular to a waste rubber softening and utilizing device for rubber rings for semiconductors, which comprises a box body, two shaft tubes are horizontally and rotatably connected in the box body in parallel, a plurality of circular cutters are axially and uniformly arranged on the outer surfaces of the two shaft tubes, and the circular cutters on the two shaft tubes are in one-to-one contact and correspond to each other. A plurality of plate cutters are evenly arranged on the outer surfaces of the two shaft pipes in the circumferential direction, and when the two shaft pipes rotate relatively, the plate cutters make contact with and correspond to each other in sequence. A heating granulation mechanism is arranged at the lower end of the box body and is used for heating, softening and granulating crushed materials; according to the rubber ring cutting device, the problem that part of rubber is not effectively cut off due to slipping caused by uneven stress when a rubber ring is cut can be solved.

Description

TECHNICAL FIELD

[0001] The application relates to the field of rubber softening utilization, and particularly relates to a waste rubber softening utilization device for rubber rings for semiconductors. BACKGROUND

[0002] The rubber ring for semiconductors is a sealing element used in semiconductor equipment and manufacturing processes, and the main component is rubber, and a small amount of specific components are added to improve performance, such as a small amount of polyethylene and polypropylene, which can improve hardness, wear resistance and processability. During the maintenance, replacement or decommissioning of semiconductor manufacturing equipment, invalid, expired or no longer used semiconductor rubber rings are generated, and the softening utilization of the waste semiconductor rubber rings can realize raw material recycling. At present, when the waste semiconductor rubber rings are softened and utilized, the semiconductor rubber rings need to be shredded to facilitate heating and softening. However, due to the high elasticity and toughness of the rubber ring, the existing softening utilization device is prone to "slipping" due to uneven stress when cutting the rubber ring, resulting in that part of the rubber is not effectively cut off, affecting the cutting effect of the rubber ring and further affecting the heating and softening of the rubber particles. SUMMARY

[0003] In view of the problem that the existing technology is prone to "slipping" due to uneven stress when cutting the rubber ring, resulting in that part of the rubber is not effectively cut off, the application provides a waste rubber softening utilization device for rubber rings for semiconductors.

[0004] The application adopts the following technical scheme: A waste rubber softening utilization device for rubber rings for semiconductors, comprising a box body, two shaft pipes are horizontally and parallel connected in the box body, a plurality of ring knives are uniformly arranged on the outer surfaces of the two shaft pipes in the axial direction, the ring knives on the two shaft pipes are in one-to-one contact with each other, a plurality of plate cutters are uniformly arranged on the outer surfaces of the two shaft pipes in the circumferential direction, and the plate cutters on the two shaft pipes are in turn in contact with each other when the two shaft pipes rotate relative to each other; a heating and granulating mechanism is arranged at the lower end of the box body and used for heating, softening and granulating the crushed materials; the plurality of ring knives and the plurality of plate cutters on the two shaft pipes intersect to form a grid-shaped knife edge on the surface of the shaft pipe, the cutting is completed by the relative rolling contact and pressing of the grid-shaped knife edges on the surfaces of the two shaft pipes when the two shaft pipes rotate relative to each other, the cutting efficiency is greatly improved, and the problem that part of the rubber is not effectively cut off due to uneven stress and "slipping" is greatly avoided.

[0005] Preferably, the box body comprises a shell pipe which is sleeved outside the two shaft pipes, the two ends of the shell pipe are fixed with circular side plates for supporting the rotation of the shaft pipes, the same side ends of the two shaft pipes are fixed with worm gears, the circular side plates on the corresponding sides of the worm gears are rotatably provided with worms, and the worms are located between the two worm gears and simultaneously meshing transmission; when the worm rotates, the two worm gears are relatively rotated through the simultaneous meshing transmission, and then the two shaft pipes are relatively rotated synchronously to complete the cutting.

[0006] Preferably, the upper side of the shell pipe is fixed with a feeding pipe, and the lower side of the shell pipe is provided with a screen.

[0007] Preferably, the inner sides of the two circular side plates are coaxially rotatably provided with transmission rings, the two transmission rings are fixed with a push plate which is in sliding contact with the inner wall of the shell pipe, and the two circular side plates are rotatably penetrated with a power shaft which is simultaneously in transmission connection with the two transmission rings; through the reciprocating swing of the push plate below the shell pipe, the rubber particles can be pushed again to the upper side between the two shaft pipes for re-cutting.

[0008] Preferably, the heating and granulating mechanism comprises a heating box which is fixed at the lower end of the shell pipe corresponding to the screen, the heating box is provided with a heating pipe which extends on one side, the end of the heating pipe away from the heating box is provided with a granulating mechanism, and the heating box and the heating pipe are rotatably provided with a spiral frame.

[0009] Preferably, the granulating mechanism comprises a buckle pipe which is sleeved at the end of the heating pipe, the buckle pipe is fixed with a hole plate, the upper end of the hole plate is fixed with a track frame, the track frame is slidably provided with a cutter holder, and the cutter holder is fixed with a blade which is attached to the hole plate; the softened rubber is extruded from the through hole of the hole plate, is cut by the reciprocating sliding of the blade on the outer side of the hole plate, and is obtained again as rubber particles.

[0010] Preferably, the cutter holder is fixed with a long hole plate along the direction of the heating pipe, the upper end of the heating pipe is rotatably provided with a rotating disc, the eccentric position of the rotating disc is fixed with an eccentric pin which is slidably arranged in the long hole of the long hole plate; the rotating disc drives the eccentric pin to rotate, pushes the long hole plate to drive the cutter holder to reciprocate on the track frame, and then drives the blade to reciprocate on the outer side of the hole plate.

[0011] Preferably, the intersection interval regions of the adjacent two circular ring knives and the adjacent two plate cutters are provided with air holes corresponding to the shaft pipes, and the two shaft pipes are slidably provided with pistons; through the axial reciprocating movement of the pistons in the shaft pipes, the particles in the intersection interval regions of the adjacent two circular ring knives and the adjacent two plate cutters during cutting can be blown out, so that the particles are prevented from remaining in the regions and affecting the continuous cutting.

[0012] Preferably, the two pistons are fixed with a connecting frame to enable the two pistons to slide synchronously.

[0013] Preferably, the connecting frame and the corresponding circular side plate are provided with an electric telescopic rod.

[0014] The beneficial effects of the present application are: 1. By intersecting multiple circular knives with multiple plate cutters to form a grid-shaped blade on the surface of the shaft tube, the cutting efficiency is greatly improved when the two shaft tubes rotate relative to each other, and the problem of uneven stress causing "slippage" and resulting in some rubber not being effectively cut is greatly avoided.

[0015] 2. By reciprocating the push plate below the inside of the shell tube, the rubber particles can be moved again to the upper part between the two shaft tubes for re-cutting, ensuring that the rubber particles can all pass through the screen holes on the screen.

[0016] 3. The particles entering the adjacent two circular knives and the adjacent two plate cutters during cutting can be blown out, avoiding the particles remaining in the area and affecting continuous cutting. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 and Figure 2 is a structural schematic view of a waste rubber softening utilization device for a rubber ring for semiconductors; Figure 3 is a sectional view of a waste rubber softening utilization device for a rubber ring for semiconductors; Figure 4 is a partial sectional view of a shell tube, a screen, a heating box, and a heating tube; Figure 5 is a schematic view of the internal structure of the box; Figure 6 is a schematic view of the structure of the shaft tube, the circular knife, and the plate cutter; Figure 7 is a schematic view of the structure of the piston and the connecting frame; Figure 8 is a schematic view of the structure of the transmission ring and the push plate; Figure 9 and Figure 10 is a schematic view of the structure of the granulating mechanism.

[0018] In the drawings: Shell tube 1; screen 2; heating box 3; heating tube 4; feed tube 5; circular side plate 6; shaft tube 7; circular knife 8; plate cutter 9; worm gear 10; worm 11; piston 12; connecting frame 13; electric telescopic rod 14; transmission ring 15; push plate 16; power shaft 17; hole plate 18; buckle tube 19; rail frame 20; blade 21; rotating disc 22; long hole plate 23; eccentric pin 24. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all.

[0020] Referring to Figures 1-6 A waste rubber ring softening device for semiconductor rubber ring, comprising a box, two shaft pipes 7 are horizontally and parallel connected in the box, a plurality of ring knives 8 are uniformly arranged on the outer surface of each shaft pipe 7 in the axial direction, the ring knives 8 on the two shaft pipes 7 are in one-to-one contact, a plurality of plate knives 9 are uniformly arranged on the outer surface of each shaft pipe 7 in the circumferential direction, and the plate knives 9 on the two shaft pipes 7 are in turn in contact when the two shaft pipes 7 rotate relative to each other; a heating and granulating mechanism is arranged at the lower end of the box for heating, softening and granulating the crushed materials.

[0021] When in use, the waste rubber ring is placed at the upper end between the two shaft pipes 7. The plurality of ring knives 8 on the two shaft pipes 7 intersect with the plurality of plate knives 9 to form a grid-shaped knife edge on the surface of the shaft pipe 7. The ring knives 8 on the two shaft pipes 7 are in one-to-one correspondence, and the plurality of plate knives 9 on the two shaft pipes 7 are in turn in contact when the two shaft pipes 7 rotate relative to each other. The grid-shaped knife edges on the surfaces of the two shaft pipes 7 are in relative rolling contact and are tightly pressed against each other to complete the cutting, greatly improving the cutting efficiency. At the same time, the grid-shaped knife edges in relative rolling contact greatly avoid uneven stress and the problem of "slipping" that causes part of the rubber to be not effectively cut.

[0022] Further, The box comprises an outer shell pipe 1 which is parallelly sleeved outside the two shaft pipes 7. Circular side plates 6 are fixed at both ends of the outer shell pipe 1 for supporting the rotation of the shaft pipes 7. Worm wheels 10 are fixed at the same side ends of the two shaft pipes 7. Worms 11 are rotatably arranged on the circular side plates 6 corresponding to the worm wheels 10. The worms 11 are located between the two worm wheels 10 and simultaneously meshing transmission.

[0023] A first motor is installed on the circular side plate 6 to drive the worm 11. When the worm 11 rotates, the two worm wheels 10 rotate relative to each other through the meshing transmission of the worm 11, thereby driving the two shaft pipes 7 to rotate synchronously relative to each other to complete the cutting.

[0024] Further, The upper side of the outer shell pipe 1 is fixed with a feeding pipe 5, and the lower side of the outer shell pipe 1 is provided with a screen 2.

[0025] The waste rubber ring is added into the outer shell pipe 1 through the feeding pipe 5, and then falls onto the upper part between the two shaft pipes 7 to complete the cutting. The screen 2 is used for screening the cut rubber particles, so that the qualified rubber particles can fall into the heating and granulating mechanism through the screen holes of the screen 2 for further processing, and the unqualified ones remain in the outer shell pipe 1.

[0026] Further, referring to Figure 5 and Figure 8 : Two transmission rings 15 are coaxially arranged on the inner sides of the two circular side plates 6, a push plate 16 is fixed between the two transmission rings 15, the push plate 16 is in sliding contact with the inner wall of the shell pipe 1, and a power shaft 17 penetrates and rotates between the two circular side plates 6 and is in transmission connection with the two transmission rings 15.

[0027] The second motor installed on one of the circular side plates 6 drives the power shaft 17 to reciprocate, so that the power shaft 17 reciprocally drives the two transmission rings 15 to rotate on the inner sides of the two circular side plates 6, thereby driving the push plate 16 to reciprocally swing below the inside of the shell pipe 1, so as to push the rubber particles accumulated in the shell pipe 1 to both sides. When the push plate 16 rotates above the shaft pipe 7, the push plate 16 is in an inclined state, and the end close to the inner wall of the shell pipe 1 is higher than the end close to the shaft pipe 7. At this time, the rubber particles pushed up by the push plate 16 will slide downward along the push plate 16 under the influence of its own gravity, and then fall again to the upper side between the two shaft pipes 7 for re-cutting, so as to ensure that the rubber particles can all pass through the screen holes on the screen 2.

[0028] Further, referring to Figures 3-4 The heating and granulating mechanism comprises a heating box 3 fixed at the lower end of the shell pipe 1 corresponding to the screen 2, a heating pipe 4 extending from one side of the heating box 3, a granulating mechanism provided at the end of the heating pipe 4 away from the heating box 3, and a spiral frame 18 rotating between the heating box 3 and the heating pipe 4.

[0029] The heating box 3 is used for collecting the rubber particles falling from the screen 2 and heating the rubber particles. Meanwhile, a third motor is installed at the side end of the heating box 3 for driving the spiral frame 18. The spiral frame 18 spirally pushes the rubber particles in the heating box 3 into the heating pipe 4, and the heating pipe 4 continuously heats the rubber particles until the softened rubber is extruded to the granulating mechanism for storage. It should be noted that the lower part of the heating box 3 is provided with a resistance heating plate, and the inner wall of the heating pipe 4 is provided with a resistance heating plate.

[0030] Further, referring to Figures 9-10 The granulating mechanism comprises a buckle pipe 19 sleeved on the end of the heating pipe 4, a hole plate 18 fixed on the buckle pipe 19, a track frame 20 fixed on the upper end of the hole plate 18, a knife seat sliding in the track frame 20, and a blade 21 fixed on the knife seat and abutting on the hole plate 18.

[0031] The softened rubber is spirally pushed by the spiral frame 18 to the hole plate 18 and extruded from the through hole of the hole plate 18. Meanwhile, the transmission knife seat drives the blade 21 to reciprocally slide on the outer side of the hole plate 18, so as to cut the rubber strip extruded from the through hole of the hole plate 18, and obtain rubber particles again.

[0032] ​​It should be noted that in the softening utilization of waste rubber, the waste rubber cut into particles is heated and softened to form a plastic state "regenerated rubber", which can be mixed with other raw materials for processing other rubber products. The scheme of the present application is to granulate again, which is convenient for storage and next processing and use.

[0033] Further: The long-hole plate 23 is fixed on the cutter seat in the direction of the heating pipe 4, the upper end of the heating pipe 4 rotates the rotating disc 22, the eccentric pin 24 is fixed at the eccentric position of the rotating disc 22, and the eccentric pin 24 slides in the long hole of the long-hole plate 23.

[0034] The upper end of the heating pipe 4 is fixed with a motor mounting plate, a third motor is mounted on the motor mounting plate, the third motor drives the rotating disc 22 to rotate the eccentric pin 24, so that the eccentric pin 24 reciprocatingly slides in the long hole of the long-hole plate 23, and at the same time, the long-hole plate 23 drives the cutter seat to reciprocatingly slide on the track frame 20, and then drives the cutter blade 21 to reciprocatingly slide on the outer side of the hole plate 18.

[0035] Referring to Figures 6-7 The adjacent two circular ring knives 8 and the adjacent two plate cutters 9 intersecting interval regions correspond to the shaft pipes 7, and the two shaft pipes 7 slidingly have the pistons 12.

[0036] Through the axial reciprocating movement of the pistons 12 in the shaft pipes 7, air will be reciprocatingly sucked at the air holes, and then the particles entering the intersection interval region of the adjacent two circular ring knives 8 and the adjacent two plate cutters 9 during cutting can be blown out, avoiding the particles staying in the region and affecting continuous cutting.

[0037] The air holes are not shown in the figure.

[0038] Further: The two pistons 12 are fixed with the connecting frame 13; through the setting of the connecting frame 13, the two pistons 12 can be synchronously slid, and then the air holes on the two shaft pipes 7 are synchronously blown and sucked; The connecting frame 13 and the corresponding circular side plate 6 are installed with the electric telescopic rod 14, and through the extension and contraction of the electric telescopic rod 14, the two pistons 12 can be synchronously driven through the connecting frame 13.

[0039] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.​

Claims

1. A device for softening and utilizing waste rubber from semiconductor rubber rings, comprising a housing, characterized in that, The box body has two horizontally parallel rotating shaft tubes (7). The outer surfaces of the two shaft tubes (7) are axially uniformly provided with multiple circular blades (8), and the circular blades (8) on the two shaft tubes (7) are in contact with each other. The outer surfaces of the two shaft tubes (7) are circumferentially uniformly provided with multiple plate cutters (9). When the two shaft tubes (7) rotate relative to each other, the plate cutters (9) contact each other in sequence. The lower end of the box body is provided with a heating granulation mechanism for heating, softening and granulating the crushed material.

2. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 1, characterized in that, The housing includes an outer shell tube (1) that is sleeved parallel to the outside of the two shaft tubes (7). Both ends of the outer shell tube (1) are fixed with round side plates (6) for supporting the rotation of the shaft tubes (7). Both ends of the two shaft tubes (7) are fixed with worm gears (10). A worm (11) rotates on the round side plate (6) on the corresponding side of the worm gear (10). The worm (11) is located between the two worm gears (10) and engages with them for transmission.

3. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 2, characterized in that, A feed pipe (5) is fixed on the upper side of the outer shell tube (1), and a screen (2) is provided on the lower side of the outer shell tube (1).

4. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 3, characterized in that, The inner sides of the two circular side plates (6) are coaxially rotated with transmission rings (15), and a lever plate (16) is fixed between the two transmission rings (15). The lever plate (16) slides in contact with the inner wall of the outer casing tube (1). A power shaft (17) rotates through the two circular side plates (6), and the power shaft (17) is simultaneously connected to the two transmission rings (15).

5. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 3, characterized in that, The heating granulation mechanism includes a heating box (3) fixed at the lower end of the outer shell tube (1) corresponding to the screen (2), a heating tube (4) extending on one side of the heating box (3), a granulation mechanism at the end of the heating tube (4) away from the heating box (3), and a screw frame (18) rotating between the heating box (3) and the heating tube (4).

6. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 5, characterized in that, The granulation mechanism includes a buckle tube (19) sleeved on the end of the heating tube (4), a perforated plate (18) fixed on the buckle tube (19), a track frame (20) fixed on the upper end of the perforated plate (18), a knife holder sliding inside the track frame (20), and a blade (21) fixed on the knife holder and attached to the perforated plate (18).

7. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 6, characterized in that, The tool holder is fixed with a long hole plate (23) along the direction of the heating tube (4). A rotating disk (22) rotates at the upper end of the heating tube (4). An eccentric pin (24) is fixed at the eccentric part of the rotating disk (22). The eccentric pin (24) slides in the long hole of the long hole plate (23).

8. The device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 2, characterized in that, Air holes are provided at the corresponding shaft tubes (7) in the intersecting interval area between two adjacent circular cutters (8) and two adjacent plate cutters (9), and pistons (12) slide inside both shaft tubes (7).

9. A device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 8, characterized in that, Connecting brackets (13) are fixed on the two pistons (12).

10. A device for softening and utilizing waste rubber of semiconductor rubber rings according to claim 9, characterized in that, An electric telescopic rod (14) is installed between the connecting frame (13) and the corresponding circular side plate (6).

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