Mechanical arm and detection device and detection method for detecting physical characteristics of micro-nano element

Abstract

The invention provides a mechanical arm, and a detection device and a detection method for detecting physical characteristics of a micro-nano element. The mechanical arm comprises a positioning adjusting assembly which comprises a sliding rail assembly. The sliding rail assembly comprises a sliding rail top cover and an elastic element, a sliding rail of the sliding rail top cover is contained in a sliding groove of a sliding rail base, and the two ends of the elastic element are fixed to the sliding rail base and the sliding rail top cover respectively. The mechanical arm further comprises a hand wheel assembly, a cantilever piece connected to the positioning and adjusting assembly and a clamping piece with a hole. The hand wheel assembly can make contact with the sliding rail top cover, and a connecting piece is contained in the inner groove of the cantilever piece. The mechanical arm has the multi-axis direction adjusting capacity and has good clamping stability, so that the operation of the detection device is more flexible and convenient, and the accuracy of a measurement result is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of micro-nano detection technology, and in particular to a mechanical arm, a detection device for detecting physical characteristics of micro-nano components, and a detection method. BACKGROUND

[0002] Probes are often used in the manufacturing and analysis processes of semiconductor components, and are often used to detect the structure, size, material characteristics, or possible defects of components such as chips, wafers, transistors, integrated circuit boards, or other micro-nano electronic components. Different technical fields may have different detection needs, such as structural analysis or electrical testing. For example, an electron beam can be used to scan the surface of the object to be detected, and the surface characteristics of the object to be detected, such as the shape of the concave and convex, are detected by observing the reflected light or transmitted light, so as to detect the surface characteristics of the object to be detected. With the development of technology, the application of semiconductors is becoming more and more widespread, and the demand for semiconductor parts is also increasing day by day. The manufacturing process of semiconductors is particularly strict in terms of precision control, so probes are particularly important in the semiconductor industry.

[0003] In known detection techniques, the probe usually has a certain length, and the length is maintained after being installed in the detection device. However, the height or thickness of each object to be detected is different, and the position of the surface of the object to be detected that the tip of the probe needs to touch is also different, so the length of the probe directly affects the distance of the tip into the object to be detected. If the length of the probe is too short, the probe cannot fully contact the surface of the object to be detected; on the contrary, if the length of the probe is too long, the tip of the probe may penetrate the surface of the object to be detected, which may damage the probe and the object to be detected.

[0004] For the same reason, the adjustability of the detection device for holding the probe is also very important. However, known detection devices for micro-nano components often have limitations due to the direction of the shaft or the connection relationship between the components, so that certain specific components (for example, the component holding the probe and the cantilever of the mechanical arm) cannot move relative to each other, thus resulting in insufficient adjustability of the detection device. Since the probe of the micro-nano component detection device often needs to be adjusted in a small range, the precision is also strictly required, so the operability in multiple axes is crucial for such equipment. In addition, if the probe cannot be stably held or installed in the detection device, it will greatly affect the accuracy of the semiconductor manufacturing or analysis process.

[0005] In summary, how to accurately adjust the distance between the probe and the object to be detected, and how to increase the adjustability of the detection device while keeping the probe stable, so as to have more accurate measurement results, are technical problems that need to be solved in this technical field. SUMMARY

[0006] This invention primarily provides a robotic arm, a detection device for detecting the physical characteristics of micro- and nano-sized components, and a detection method. The robotic arm possesses multi-axis adjustment capabilities and excellent clamping stability, thereby making the operation of the detection device more flexible and convenient, and improving the accuracy of the measurement results.

[0007] In some embodiments, this disclosure provides a robotic arm including a positioning adjustment assembly disposed on a positioning adjustment base. The positioning adjustment assembly includes a slide rail assembly comprising a slide rail cover and an elastic element. A slide rail of the slide rail cover is slidably received in a groove of the slide rail base, and both ends of the elastic element are respectively fixed to the slide rail base and the slide rail cover. Furthermore, the robotic arm further includes a handwheel assembly, a cantilever member connected to the positioning adjustment assembly, and a clamping member with a hole. The handwheel assembly can contact the slide rail cover, and the clamping member is received within a groove in the cantilever member.

[0008] In some embodiments, this disclosure provides a detection device for detecting the physical characteristics of micro / nano components, which includes a robotic arm disclosed herein, a probe holder disposed between the aperture of the clamping member, and a probe engaged with one end of the probe holder.

[0009] In some embodiments, this disclosure provides a detection method for detecting the physical characteristics of micro / nano components, comprising: placing a detection device disclosed herein on a substrate surface; having a probe of the detection device approach or contact the surface of the object to be tested; providing a light source to illuminate the surface of the micro / nano component to obtain an optical signal; and receiving and processing the optical signal to obtain information related to the physical characteristics of the micro / nano component.

[0010] The foregoing has provided a fairly broad overview of the technical features of the invention, enabling a better understanding of the detailed description that follows. Other technical features constituting the subject matter of the claims will be described below. Those skilled in the art to which this invention pertains will understand that the concepts and specific embodiments disclosed below can be readily utilized to modify or design other structures or processes to achieve the same purpose as this invention. Those skilled in the art will also understand that such equivalent constructions cannot depart from the spirit and scope of the invention as defined in the appended claims. Attached Figure Description

[0011] Figure 1 This is a three-dimensional structural diagram of the robotic arm in this invention; Figure 2 yes Figure 1 A three-dimensional exploded diagram of a robotic arm; Figure 3 yes Figure 1A side view of the robotic arm, with the first slide rail cover in a neutral position; Figure 4 yes Figure 1 A side view of the robotic arm, in which the top cover of the first slide rail contacts the first handwheel assembly and moves downward; Figure 5 yes Figure 1 A side view of the robotic arm, in which the top cover of the first slide rail contacts the first handwheel assembly and moves upward; Figure 6 yes Figure 1 Another three-dimensional exploded view of the robotic arm; Figure 7 yes Figure 1 A side view of the robotic arm, with the second slide rail cover in a neutral position; Figure 8 yes Figure 1 A side view of the robotic arm, in which the second slide rail top cover contacts the second handwheel assembly and moves to the right; Figure 9 yes Figure 1 A side view of the robotic arm, in which the second slide rail cover contacts the second handwheel assembly and is displaced to the left; Figure 10 yes Figure 1 A third type of three-dimensional exploded diagram of the robotic arm; Figure 11 yes Figure 1 A side view of the robotic arm, with the third slide rail cover in a neutral position; Figure 12 yes Figure 1 A side view of the robotic arm, in which the top cover of the third slide rail contacts the third handwheel assembly and moves to the right; Figure 13 yes Figure 1 A side view of the robotic arm, in which the top cover of the third slide rail contacts the third handwheel assembly and is displaced to the left; Figure 14 yes Figure 1 A side view of a robotic arm, in which the connector is received in a groove in the cantilever; Figure 15 yes Figure 1 A side view of the robotic arm, in which one end of the connector rotates counterclockwise; Figure 16 yes Figure 1 A magnified view of a portion of the robotic arm, showing the gripper in a neutral position; Figure 17 yes Figure 1 A close-up view of the robotic arm, showing the gripper rotating clockwise; Figure 18 yesFigure 1 A magnified view of a portion of the robotic arm, showing that the first positioning plate and the second positioning plate of the gripper are separated; Figure 19 This is a three-dimensional structural diagram of the detection device in this invention; Figure 20 yes Figure 19 A schematic diagram of the structure of the detection device during the detection process. Figure label: 1: Robotic arm 1132b: Fourth locking device 10: Positioning adjustment component 1133b: Second elastic element 11: Slide rail assembly 1123b: Slide rail 11a: First slide rail assembly; 1141b: Slide groove 111a: First slide rail connecting plate; 11c: Third slide rail assembly 111b: Second slide rail connecting plate; 114c: Third slide rail top cover 112a: First slide rail base; 112c: Third slide rail base 1121a: First handwheel connecting bracket; 1121c: Third handwheel connecting bracket 1122a: First guide element; 1122c: Third guide element 113a: Displacement adjustment component 113c: Displacement adjustment component 114a: First slide rail top cover; 1131c: Fifth locking fastener 1131a: First firmware lock; 1132c: Sixth firmware lock 1132a: Second locking element; 1133c: Third elastic element 1133a: First elastic element; 1123c: Slide rail 1123a: Slide rail; 1141c: Slide groove 1141a: Slide groove 12: Handwheel assembly 1142a: Cantilever fixing plate; 12a: First handwheel assembly 11b: Second slide rail assembly; 121a: Handwheel section 114b: Second slide rail top cover; 122a: Screw 112b: Second slide rail base; 12b: Second handwheel assembly 1121b: Second handwheel connecting bracket; 121b: Handwheel section 1122b: Second guide component; 122b: Screw 113b: Displacement adjustment assembly; 12c: Third handwheel assembly 1131b: Third locking component; 121c: Handwheel section 122c: Screw; 163: Protrusion 13: Positioning and Adjustment Base; 164: First Positioning Plate 14: Cantilever component 165: Second positioning plate 141: Cantilever connecting plate; 166: Distance adjustment component 142: Groove 17: Elastic element 143: Height adjustment knob 18: Cable clamp 1431: Knob section 2: Probe holder 1432: Screw 3: Probe 144: First anchoring element 4: Test object 15: Connector BS: Base surface 151: First end H: Hole 152: Second end S: Light source 16: Clamping component L: Beam 161: First end L': Reflected beam 162: Second anchoring element D: Detection device R: Receiver; CA: Central axis. Detailed Implementation

[0012] For ease of description, spatial relative terms (such as "below," "under," "down," "above," "upper," "above," and the like) are used herein to describe the relationship between one element or component and another element(s), as shown in the figures. In addition to the orientations depicted in the figures, spatial relative terms are also intended to cover different orientations of the device during use or operation. Furthermore, relative direction terms such as "X-axis," "Y-axis," and "Z-axis" are used herein to describe the relationship between one element or component and another element(s). It should be understood that these terms are used for embodiments and not limitations; elements or components may be oriented in other ways (rotated 90 degrees or otherwise), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0013] Those skilled in the art will understand that, for the sake of simplicity and clarity, the figures in this disclosure are not necessarily drawn to scale. For example, the dimensions of some elements in the figures may be exaggerated relative to other elements to aid in the understanding of various aspects of the art.

[0014] As used herein, the terms “approximately,” “substantial,” “substantial,” and “substantively” are used to describe and consider minor variations. When used in conjunction with an event or situation, these terms may mean that the event or situation has clearly occurred or that the event or situation is very close to occurring.

[0015] Figure 1The diagram disclosed is a structural schematic of a robotic arm according to an embodiment of the present invention. The robotic arm 1 includes a positioning and adjustment assembly 10, which includes at least one slide rail assembly 11, and the positioning and adjustment assembly 10 is connected to a positioning and adjustment base 13. In some embodiments of the present invention, the slide rail assembly 11 may include a first slide rail assembly 11a, a second slide rail assembly 11b, and a third slide rail assembly 11c. In some embodiments of the present invention, a first handwheel assembly 12a may cooperate with the first slide rail assembly 11a to enable the cantilever 14 to move along the X-axis; a second handwheel assembly 12b may cooperate with the second slide rail assembly 11b to enable the cantilever 14 to move along the Y-axis; and a third handwheel assembly 12c may cooperate with the third slide rail assembly 11c to enable the cantilever 14 to move along the Z-axis.

[0016] In some embodiments, the position of the handwheel assembly 12 can be configured differently according to the user's preference. For example, in Figure 1 The third handwheel assembly 12c shown is located on the left side of the positioning adjustment assembly 10, but it can be located on the right side of the positioning adjustment assembly 10 according to the user's needs (e.g., the user's dominant hand). Furthermore, the handwheel portion of the handwheel assembly 12 (e.g., Figure 2 The handwheel portion 121a of the first handwheel component 12a shown may be provided with grooves or scales (not shown) to facilitate the user's rotation operation.

[0017] One end of the cantilever component 14 is connected to the positioning and adjustment assembly 10 via the cantilever connecting plate 141. For example... Figure 1 As shown, the cantilever connecting plate 141 has multiple holes, which can be used to fix the cantilever connecting plate 141 to the positioning and adjustment assembly 10 using screws or other locking methods. In this way, the cantilever component 14 can be detachably mounted on one side of the positioning and adjustment assembly 10 via the cantilever connecting plate 141, allowing the user to quickly replace the cantilever component 14 of the robotic arm 1 according to actual usage needs. In some embodiments, the cantilever component 14 can also be integrally formed with the cantilever connecting plate 141. In other embodiments, multiple cantilever components 14 can be provided on the surface of the cantilever connecting plate 141. These cantilever components 14 can be respectively positioned at different locations and have the same or different lengths, thereby allowing each of the multiple cantilever components 14 to be configured with one or more clamping members 16.

[0018] A recess 142 is provided within the cantilever member 14, and the interior of the recess 142 can accommodate a connector 15. One end of the connector 15 is pivotally connected to the interior of the recess 142, and the other end is configured to connect with the clamping member 16. Furthermore, the clamping member 16 has a hole H, which can accommodate a probe holder 2 or other components, and the probe holder 2 can be used to hold various tools such as probes 3 (see reference). Figure 19In some embodiments, a magnetic material or a contour-fitting material may be disposed on a specific area of ​​the inner diameter surface of the aperture H to make the element housed in the aperture H more stable. Thus, the user can adjust the position of the probe 3 by operating the robotic arm 1 to detect the physical characteristics of the object under test (such as micro / nano components). The projected area of ​​the probe holder 2 may be within the cantilever 14, and in other embodiments, the number of clamps 16 may be multiple and located outside the projected area of ​​the cantilever 14. These clamps 16 are used to mount at least one probe 3, a probe array, at least one probe card, or a combination thereof.

[0019] The following describes how the robotic arm 1 of the present invention, through the mutual cooperation between each handwheel assembly 12 and the corresponding slide rail assembly 11, causes the cantilever 14 to move along the X-axis, Y-axis and Z-axis directions.

[0020] Please refer to Figure 2 The diagram shows an exploded perspective view of a robotic arm according to an embodiment of the present invention. A first slide rail connecting plate 111a of the first slide rail assembly 11a is connected to the second slide rail assembly 11b via a second slide rail connecting plate 111b, while a first slide rail base 112a is further locked onto the first slide rail connecting plate 111a, thereby creating an integral connection between the first slide rail base 112a and the second slide rail assembly 11b, the third slide rail assembly 11c, and the positioning and adjusting base 13. A first handwheel connecting frame 1121a may be provided on the first slide rail base 112a, and a first guide member 1122a may be disposed in the first handwheel connecting frame 1121a. The first handwheel connecting frame 1121a can be fixed to the first slide rail base 112a by locking or other means, or it can be integrally formed with the first slide rail base 112a. In this way, the screw 122a of the first handwheel assembly 12a can be connected to the first handwheel connecting frame 1121a through the through hole passing through the first guide 1122a, and can move relative to the first handwheel connecting frame 1121a by rotational locking.

[0021] Specifically, the screw 122a of the first handwheel assembly 12a has an external thread (not shown), while the through hole in the first guide member 1122a has an internal thread (not shown) corresponding to the external thread of the screw 122a. Therefore, when the user rotates the handwheel portion 121a of the first handwheel assembly 12a, the screw 122a rotates accordingly, causing the external thread on the screw 122a to engage with the internal thread of the through hole in the first guide member 1122a. In this way, the first handwheel assembly 12a can be locked by rotation, allowing it to move relative to the first handwheel connecting bracket 1121a of the first slide rail assembly 11a.

[0022] In some embodiments, the first slide rail assembly 11a may not include the first handwheel connecting bracket 1121a, and the first guide member 1122a may be directly provided on the surface of the first slide rail assembly 11a. In this way, the first handwheel assembly 12a can be directly rotated and locked into the through hole of the first guide member 1122a provided on the surface of the first slide rail assembly 11a.

[0023] The first slide rail assembly 11a further includes at least one set of displacement adjustment components 113a (two sets are shown in the figure) and a first slide rail top cover 114a. Each set of displacement adjustment components 113a includes a first locking fastener 1131a connected to the first slide rail base 112a, a second locking fastener 1132a connected to the first slide rail top cover 114a, and a first elastic element 1133a disposed between the first locking fastener 1131a and the second locking fastener 1132a. One end of the first elastic element 1133a is sleeved on the first locking fastener 1131a and thereby fixed to the first slide rail base 112a; while the other end of the first elastic element 1133a is sleeved on the second locking fastener 1132a and thereby fixed to the first slide rail top cover 114a. The slide rail 1123a on the first slide rail base 112a has an outer contour corresponding to the slide groove 1141a in the first slide rail top cover 114a, so that the slide rail 1123a can slide inside the slide groove 1141a. In this way, the first slide rail top cover 114a can move relative to the first slide rail base 112a.

[0024] Please also refer to Figure 1 and Figures 2 to 5 The figure illustrates the interaction between the first slide rail assembly 11a and the first handwheel assembly 12a. Figure 3The first slide rail top cover 114a shown is in a neutral position. The first handwheel assembly 12a is connected to the first slide rail assembly 11a through the through holes in the first handwheel connecting bracket 1121a and the first guide member 1122a, and the screw 122a of the first handwheel assembly 12a abuts against the surface of the first slide rail top cover 114a. In some embodiments of the present invention, the screw 122a abuts against the surface of the slide groove 1141a. When the user rotates the handwheel portion 121a of the first handwheel assembly 12a, the screw 122a will rotate and move downward accordingly; at this time, since one end of the first elastic element 1133a is fixed to the first slide rail base 112a and the first slide rail connecting plate 111a by the first locking fastener 1131a and is integrally connected to the second slide rail assembly 11b, while its other end is fixed to the first slide rail top cover 114a by the second locking fastener 1132a. Therefore, when the screw 122a rotates, one end of the first elastic element 1133a fixed on the first slide rail base 112a remains stationary, while the other end fixed on the first slide rail top cover 114a moves with the compression and stretching of the first elastic element 1133a, thereby causing the first slide rail top cover 114a to move relative to the first slide rail base 112a.

[0025] In detail, such as Figure 4 As shown, when the user rotates the handwheel 121a clockwise, the screw 122a rotates clockwise accordingly and presses downwards against the first slide rail top cover 114a along the X-axis. This compresses and deforms the first elastic element 1133a, causing the first slide rail top cover 114a to move downwards relative to the first slide rail base 112a. Conversely, as... Figure 5 As shown, when the user rotates the handwheel 121a counterclockwise, the screw 122a will rotate counterclockwise and move upward. At this time, the first elastic element 1133a pushes the first slide rail top cover 114a with the restoring force (elastic force) generated by the deformation, so that it continues to press against the screw 122a, thereby causing the first slide rail top cover 114a to move upward relative to the first slide rail base 112a.

[0026] like Figures 2 to 5 As shown, the cantilever 14 is fixed to the cantilever fixing plate 1142a via the cantilever connecting plate 141, and thereby connected to the first slide rail top cover 114a of the first slide rail assembly 11a. Therefore, when the first slide rail top cover 114a moves up or down with the first handwheel assembly 12a, the cantilever 14 of the robotic arm 1 will move accordingly, thereby realizing the coordinate adjustment of the cantilever 14 along the X-axis.

[0027] As previously described, rotating the first handwheel assembly 12a adjusts the displacement of the first slide rail top cover 114a, and the maximum displacement that can be adjusted by the first handwheel assembly 12a depends on the length of the screw 122a. Specifically, when the end of the screw 122a moves upward until it is fully embedded in the through hole of the first guide member 1122a, if the end of the screw 122a is flush with the bottom surface of the guide member, it is no longer possible to continue rotating the first handwheel assembly 12a to move the first slide rail top cover 114a upward. Similarly, when the bottom surface of the handwheel portion 121a contacts the top surface of the first handwheel connecting bracket 1121a, it is no longer possible to continue rotating the first handwheel assembly 12a to move the first slide rail top cover 114a downward. However, at this time, the first elastic element 1133a can still be further compressed by applying an external force, thereby driving the first slide rail top cover 114a and the cantilever member 14 to continue to move downward. In a preferred embodiment, by rotating the first handwheel assembly 12a, the first slide rail top cover 114a can be moved from the neutral position (e.g., ...). Figure 3 (As shown) it can move about ±10mm along the X-axis; in other words, the first slide rail top cover 114a can be moved up or down about 10mm from the neutral position.

[0028] In some embodiments, the robotic arm 1 may not include either the cantilever connecting plate 141 or the cantilever fixing plate 1142a. In other words, one end of the cantilever 14 can be directly connected to the first slide rail top cover 114a, or integrally formed with the first slide rail top cover 114a, thereby achieving connection with the positioning adjustment assembly 10.

[0029] Please see Figure 6 The diagram shows another exploded perspective view of a robotic arm according to an embodiment of the present invention. The second slide rail connecting plate 111b of the second slide rail assembly 11b is connected to the first slide rail assembly 11a via the first slide rail connecting plate 111a. The second slide rail top cover 114b of the second slide rail assembly 11b is locked to the bottom surface of the second slide rail connecting plate 111b, while the second slide rail base 112b is locked to the third slide rail top cover 114c of the third slide rail assembly 11c. Thus, while the second slide rail assembly 11b is connected to the first slide rail assembly 11a, its bottom surface is also integrally connected to the third slide rail assembly 11c and the positioning adjustment base 13.

[0030] Similar to the first slide rail base 112a, the second slide rail base 112b may be provided with a second handwheel connecting bracket 1121b, and a second guide member 1122b is disposed in the second handwheel connecting bracket 1121b. The second handwheel connecting bracket 1121b can be fixed to the second slide rail base 112b by locking or other means, or it can be integrally formed with the second slide rail base 112b. Thus, the second handwheel assembly 12b can pass through the through hole of the second guide member 1122b to connect to the second handwheel connecting bracket 1121b, and can move relative to the second handwheel connecting bracket 1121b by rotation locking. In addition, the second slide rail assembly 11b also includes at least one set of displacement adjustment components 113b. Each set of displacement adjustment components 113b includes a third locking fastener 1131b connected to the second slide rail base 112b, a fourth locking fastener 1132b connected to the second slide rail top cover 114b, and a second elastic element 1133b. One end of the second elastic element 1133b is fitted onto the third locking fastener 1131b and thus fixed to the second slide rail base 112b; the other end of the second elastic element 1133b is fitted onto the fourth locking fastener 1132b and thus fixed to the second slide rail top cover 114b. Similarly, the slide rail 1123b on the second slide rail base 112b has an external contour corresponding to the groove 1141b in the second slide rail top cover 114b, allowing the slide rail 1123b to slide within the groove 1141b. In this way, the second slide rail top cover 114b can move relative to the second slide rail base 112b.

[0031] In some embodiments, the second slide rail assembly 11b may not include the second handwheel connecting bracket 1121b, and the second guide member 1122b may be directly provided on the surface of the second slide rail assembly 11b. In this way, the second handwheel assembly 12b can be directly rotated and locked into the through hole of the second guide member 1122b provided on the surface of the second slide rail assembly 11b.

[0032] Figures 7 to 9 The diagram illustrates the interaction between the second slide rail assembly 11b and the second handwheel assembly 12b. Figure 7The second slide rail top cover 114b shown is in a neutral position. The second handwheel assembly 12b is connected to the second slide rail assembly 11b through through holes in the second handwheel connecting bracket 1121b and the second guide member 1122b, and the screw 122b of the second handwheel assembly 12b abuts against the surface of the second slide rail top cover 114b. In some embodiments of the present invention, the screw 122b abuts against the surface of the slide groove 1141b. When the user rotates the handwheel portion 121b of the second handwheel assembly 12b, the screw 122b will rotate and move to the right. At this time, since one end of the second elastic element 1133b is fixed to the second slide rail base 112b and the third slide rail top cover 114c by the third fastener 1131b and is connected to the third slide rail assembly 11c and the positioning adjustment base 13 as a whole, while the other end is fixed to the second slide rail top cover 114b and the second slide rail connecting plate 111b by the fourth fastener 1132b, when the screw 122b rotates, the end of the second elastic element 1133b fixed to the second slide rail base 112b remains stationary, while the other end fixed to the second slide rail top cover 114b will move with the compression and stretching of the second elastic element 1133b, thereby causing the second slide rail top cover 114b to move relative to the second slide rail base 112b.

[0033] In detail, such as Figure 8 As shown, when the user rotates the handwheel 121b clockwise, the screw 122b rotates clockwise accordingly, pushing the second slide rail cover 114b to the right along the Y-axis. This compresses and deforms the second elastic element 1133b, causing the second slide rail cover 114b to move to the right relative to the second slide rail base 112b. Conversely, as... Figure 9 As shown, when the user rotates the handwheel 121b counterclockwise, the screw 122b will rotate counterclockwise and move to the left. At this time, the second elastic element 1133b will push the second slide rail top cover 114b with the restoring force (elastic force) generated by the deformation, so that it continues to press against the screw 122b, thereby causing the second slide rail top cover 114b to move to the left relative to the second slide rail base 112b.

[0034] like Figures 6 to 9As shown, the second slide rail assembly 11b is interconnected with the first slide rail connecting plate 111a of the first slide rail assembly 11a via the second slide rail connecting plate 111b, and thus is integrally interconnected with the first slide rail assembly 11a and the cantilever member 14. Therefore, when the second slide rail top cover 114b moves to the right or left with the second handwheel assembly 12b, the first slide rail assembly 11a and the cantilever member 14 of the robotic arm 1 will move accordingly, thereby realizing the coordinate adjustment of the cantilever member 14 along the Y-axis direction. Furthermore, similar to the first handwheel assembly 12a, the maximum displacement that can be adjusted by the second handwheel assembly 12b depends on the length of the screw 122b. In a preferred embodiment, by rotating the second handwheel assembly 12b, the second slide rail top cover 114b can be moved from a neutral position (e.g., Figure 7 (As shown) it can move about ±10mm along the Y-axis; in other words, the second slide rail top cover 114b can be displaced about 10mm to the right or left from the neutral position.

[0035] Please see Figure 10 The diagram shows a third exploded perspective view of a robotic arm according to an embodiment of the present invention. The third slide rail top cover 114c of the third slide rail assembly 11c is connected to the second slide rail assembly 11b via the second slide rail base 112b. The third slide rail base 112c of the third slide rail assembly 11c is locked to the top surface of the third slide rail connecting plate 111c, which in turn locks the positioning adjustment base 13. Thus, the third slide rail assembly 11c is connected to the second slide rail assembly 11b while simultaneously being connected to the positioning adjustment base 13 via the third slide rail connecting plate 111c. In some embodiments, the third slide rail assembly 11c may not include the third slide rail connecting plate 111c, but instead be directly connected to the positioning adjustment base 13 via the third slide rail base 112c.

[0036] Similar to the first slide rail assembly 11a and the second slide rail assembly 11b, the third slide rail assembly 11c may have a third handwheel connecting bracket 1121c mounted on its third slide rail base 112c, and the third handwheel connecting bracket 1121c may contain a third guide member 1122c. The third handwheel connecting bracket 1121c can be fixed to the third slide rail base 112c by locking or other means, or it can be integrally formed with the third slide rail base 112c. Thus, the third handwheel assembly 12c can pass through the through hole of the third guide member 1122c to connect to the third handwheel connecting bracket 1121c, and can move relative to the third handwheel connecting bracket 1121c by rotational locking. Furthermore, the third slide rail assembly 11c also includes at least one set of displacement adjustment components 113c. Each displacement adjustment assembly 113c includes a fifth locking fastener 1131c connected to the third slide rail base 112c, a sixth locking fastener 1132c connected to the third slide rail top cover 114c, and a third elastic element 1133c. One end of the third elastic element 1133c is fitted onto the fifth locking fastener 1131c and thus fixed to the third slide rail base 112c; the other end of the third elastic element 1133c is fitted onto the sixth locking fastener 1132c and thus fixed to the third slide rail top cover 114c. Similarly, the slide rail 1123c on the slide rail base 112c has an external contour corresponding to the groove 1141c in the slide rail top cover 114c, allowing the slide rail 1123c to slide within the groove 1141c. In this way, the slide rail top cover 114c can move relative to the slide rail base 112c.

[0037] In some embodiments, the third slide rail assembly 11c may not include the third handwheel connecting bracket 1121c, but instead the third guide member 1122c may be directly provided on the surface of the third slide rail assembly 11c. In this way, the third handwheel assembly 12c can be directly rotated and locked into the through hole of the third guide member 1122c provided on the surface of the third slide rail assembly 11c.

[0038] Figures 11 to 13 The interaction between the third slide rail assembly 11c and the third handwheel assembly 12c is demonstrated. Figure 11The third slide rail top cover 114c shown is in a neutral position. The third handwheel assembly 12c is connected to the third slide rail assembly 11c through the through holes in the third handwheel connecting bracket 1121c and the third guide member 1122c, and the screw 122c of the third handwheel assembly 12c abuts against the surface of the slide rail top cover 114c. In some embodiments of the present invention, the screw 122c abuts against the surface of the slide groove 1141c. When the user rotates the handwheel portion 121c of the third handwheel assembly 12c, the screw 122c will rotate and move to the right. At this time, since one end of the third elastic element 1133c is fixed to the third slide rail base 112c and the third slide rail connecting plate 111c by the fifth fastener 1131c and is connected to the positioning adjustment base 13 as a whole, while the other end is fixed to the third slide rail top cover 114c and the second slide rail base 112b by the sixth fastener 1132c, when the screw 122c rotates, the end of the third elastic element 1133c fixed to the third slide rail base 112c remains stationary, while the other end fixed to the third slide rail top cover 114c will move with the compression and stretching of the third elastic element 1133c, thereby causing the third slide rail top cover 114c to move relative to the third slide rail base 112c.

[0039] In detail, such as Figure 12 As shown, when the user rotates the handwheel 121c clockwise, the screw 122c rotates clockwise accordingly, pushing the third slide rail cover 114c to the right along the Z-axis. This compresses and deforms the third elastic element 1133c, causing the third slide rail cover 114c to move to the right relative to the third slide rail base 112c. Conversely, as... Figure 9 As shown, when the user rotates the handwheel 121c counterclockwise, the screw 122c will rotate counterclockwise and move to the left. At this time, the third elastic element 1133c will push the third slide rail top cover 114c with the restoring force (elastic force) generated by the deformation, so that it continues to press against the screw 122c, thereby causing the third slide rail top cover 114c to move to the left relative to the third slide rail base 112c.

[0040] like Figures 10 to 13As shown, the third slide rail assembly 11c is interconnected with the second slide rail base 112b of the second slide rail assembly 11b via the third slide rail top cover 114c, and thus is integrally interconnected with the second slide rail assembly 11b, the first slide rail assembly 11a, and the cantilever 14 (not shown). Therefore, when the third slide rail top cover 114c moves to the right or left with the third handwheel assembly 12c, the cantilever 14 of the robotic arm 1 will move accordingly, thereby achieving coordinate adjustment of the cantilever 14 along the Z-axis. Furthermore, similar to the first handwheel assembly 12a and the second handwheel assembly 12b, the maximum displacement that can be adjusted by the third handwheel assembly 12c depends on the length of the screw 122c. In a preferred embodiment, by rotating the third handwheel assembly 12c, the third slide rail top cover 114c can be moved from a neutral position (e.g., Figure 11 (As shown) it can move about ±10mm along the Z-axis; in other words, the third slide rail top cover 114c can be displaced about 10mm to the right or left from the neutral position.

[0041] The following describes how the robotic arm 1 of the present invention achieves rotation of the connector 15 in the XZ plane by adjusting the height adjustment knob 143, thereby adjusting the probe 3 (see reference). Figure 19 The coordinate adjustment of the needle tip 16 in the X-axis direction.

[0042] Please refer to Figure 1 and Figures 14 to 15 , Figure 14 The connector 15 is shown, which is accommodated in the groove 142 of the cantilever 14. Figure 15 This demonstrates the state in which connector 15 rotates counterclockwise around its first end 151. For example... Figure 14 As can be seen in the best view, the cantilever 14 is provided with a groove 142, the interior of which can accommodate the connector 15. The first end 151 of the connector 15 is positioned inside the groove 142 and is pivotally connected to the cantilever 14 by bolts and nuts.

[0043] The robotic arm 1 further includes a gripper 16, the first end 161 of which has an external contour feature complementary to the second end 152 of the connector 15, and is engaged with the second end 152 of the connector 15 by means of locking or the like. Furthermore, as... Figure 1 As shown, the clamping member 16 has a hole H, which can accommodate the probe holder 2 of the detection device D, and the probe holder 2 can be further used to hold various detection tools such as probe 3 (please refer to...). Figure 19 Therefore, the user can adjust the position of the probe 3 by operating the gripper 16 of the robotic arm 1, thereby detecting the physical characteristics of the object to be tested (e.g., micro / nano components).

[0044] like Figure 14 and15 As shown, the cantilever 14 further includes a height adjustment knob 143, which is disposed adjacent to the second end 152 of the connector 15. The structure of the height adjustment knob 143 is similar to that of the handwheel assembly 12, and it may include a knob portion 1431 and a screw 1432 with external threads (not shown). In addition, the outer surface of the knob portion 1431 may be provided with grooves (not shown) to facilitate rotation by the user. The cantilever 14 is provided with a through hole (not shown) at the position corresponding to the screw 1432. The through hole has an internal thread corresponding to the shape of the external thread of the screw 1432, thereby allowing the height adjustment knob 143 to be connected to the cantilever 14 via the screw 1432 and to be rotatably locked with the cantilever 14.

[0045] The robotic arm 1 further includes an elastic element 17, with its two ends fixed to the cantilever member 14 and the gripper member 16, respectively. Specifically, the cantilever member 14 may have a first anchor 144 on its top surface near the end of the gripper member 16, while the gripper member 16 may have a second anchor 162 on its top surface away from the cantilever member 14. The two ends of the elastic element 17 may be fixed to the first anchor 144 of the cantilever member 14 and the second anchor 162 of the gripper member 16, respectively. In addition, the distance between the first anchor 144 and the second anchor 162 can be adjusted according to design requirements. For example, to match the elastic coefficient of the elastic element 17, a protrusion 163 may be designed in the gripper member 16, and the second anchor 162 may be disposed on the top surface of the protrusion 163, thereby shortening the distance between the first anchor 144 and the second anchor 162.

[0046] In the configuration of the above embodiment, the height adjustment knob 143 is located adjacent to the second end 152 of the connector 15, while its opposite first end 151 is pivotally connected to the cantilever 14. Therefore, when the user rotates the knob portion 1431 of the height adjustment knob 143 clockwise, it will cause the screw 1432 to rotate clockwise and move downward, causing the end of the screw 1432 to press against and push the connector 15. At this time, since the first end 151 of the connector is pivotally connected to the cantilever 14, it cannot move in the X and Y axis directions. Therefore, when the screw 1432 pushes the connector 15 downward, the connector 15 will rotate in the XY plane with its first end 151 as the axis (more precisely, with the position where the connector 15 is pivotally connected to the cantilever 14 as the axis).

[0047] When the user rotates the knob 1431 clockwise, the screw 1432 continuously presses downward against the connector 15, causing the second end 152 of the connector 15 to rotate downward. At this time, the elastic element 17 is stretched and deformed, thereby providing a restoring force (elastic force) between the cantilever 14 and the clamping member 16. When the user rotates the knob 1431 of the height adjustment knob 143 counterclockwise, the screw 1432 moves upward, and at this time, the restoring force (elastic force) generated by the deformation of the elastic element 17 forces the clamping member 16 to return to its initial position (e.g., Figure 14 (As shown).

[0048] like Figure 15 As shown, by rotating the height adjustment knob 143, the connector 15 can be rotated in the XY plane with its first end 151 as the axis, thereby adjusting the included angle φ between the connector 15 and the Y-axis. The range of the included angle φ that can be adjusted by rotating the height adjustment knob 143 depends on the length of the screw 1432. In a preferred embodiment, the included angle φ can be between approximately 0 and 10 degrees.

[0049] The second end 152 of the connector 15 actually rotates in the XY plane. Since the first end 161 of the clamping member 16 is connected to the second end 152 of the connector 15, when the second end 152 of the connector 15 rotates downwards, it simultaneously drives the clamping member 16 to rotate as well. However, when the clamping member 16 clamps the probe holder 2 and further secures the probe 3 (see reference...), Figure 19 The slight displacement of the probe tip in the Y-axis direction caused by the rotation of the clamping member 16 is negligible. Therefore, when the probe 3 is mounted on the probe holder 2 and the probe holder 2 is clamped in the clamping member 16, rotating the height adjustment knob 143 can be regarded as adjusting the angle φ between the connecting member 15 and the Y-axis to precisely fine-tune the coordinate position of the probe tip in the X-axis.

[0050] With the configuration described in the above embodiment, the connecting member 15 can be rotated in the XY plane with its first end 151 by operating the height adjustment knob 143, thereby adjusting the displacement of the clamping member 16 in the X-axis direction. This allows for fine-tuning of the probe tip coordinates, improving the operational flexibility and measurement accuracy of the detection device D. Furthermore, the elastic element 17 provides cushioning and shock absorption when the probe 3 contacts the object to be measured, enhancing the stability of the probe 3 and further improving the accuracy of the detection device D during detection.

[0051] The following describes how the robotic arm of the present invention adjusts the position of the probe 3 on the YZ plane by adjusting the angle between the clamping member 16 and the connecting member 15.

[0052] Please refer to Figures 14 to 17 , Figure 16This shows that the clamping component 16 is in a neutral position, while Figure 17 The image shows the clamping member 16 rotating clockwise in the YZ plane. The first end 161 of the clamping member 16 is pivotally connected to the second end 152 of the connecting member 15 by a bolt and nut, thus allowing the clamping member 16 to rotate relative to the second end 152 of the connecting member 15. When the user rotates the clamping member 16 (e.g....), Figure 17 As shown, the angle θ between the central axis CA of the hole H of the clamping member 16 and the connecting member 15 can be adjusted. The angle θ between the central axis CA and the connecting member 15 can be between approximately 0 degrees and ±30 degrees, and in a preferred embodiment, the angle θ can be between approximately 0 degrees and ±70 degrees. In other words, the clamping member 16 can rotate to the left and right sides relative to the second end 152 of the connecting member 15, so that the angle θ between the central axis CA and the connecting member 15 is approximately 0 degrees to 70 degrees.

[0053] Since the probe 3 can be mounted on the robotic arm 1 via the probe holder 2 and the clamping member 16, the configuration of the above embodiment allows the coordinates of the probe 3 on the YZ plane to be adjusted by rotating the clamping member 16, thereby improving the flexibility of the detection device D during the detection process.

[0054] Please refer to Figure 16 and Figure 18 . Figure 18 The first positioning plate 164 and the second positioning plate 165 are shown in a separated state. The clamping member 16 may include the first positioning plate 164 and the second positioning plate 165, and in the embodiment shown in the figure, the first positioning plate 164 and the second positioning plate 165 are located on the upper and lower sides, respectively.

[0055] The hole H of the clamping member 16 can be formed between the first positioning plate 164 and the second positioning plate 165. Specifically, the first positioning plate 164 and the second positioning plate 165 can each have corresponding, generally arched semi-holes, the shapes of which correspond to the upper and lower half-profiles of the probe holder 2, respectively. When the first positioning plate 164 and the second positioning plate 165 approach each other, the two arched semi-holes will form a complete hole H that can accommodate the probe holder 2.

[0056] One or more distance adjustment members 166 can be further provided between the first positioning plate 164 and the second positioning plate 165. These distance adjustment members 166 are used to adjust the distance between the first positioning plate 164 and the second positioning plate 165, thereby further adjusting the size of the hole H. Figures 16 to 18As shown, in some embodiments, the distance adjustment element 166 can be configured by the interlocking of bolts and nuts. When the probe holder 2 is installed in the hole H, the user can rotate the distance adjustment element 166 to adjust the distance between the first positioning plate 164 and the second positioning plate 165, thereby locking or releasing the clamping of the probe holder 2.

[0057] In other embodiments, the distance adjustment member 166 may be composed of other elements, such as elastic elements. In this case, when the user pulls the second positioning plate 165 to separate it from the first positioning plate 164, the distance adjustment member 166 deforms and provides a restoring force (elastic force) between the first positioning plate 164 and the second positioning plate 165, thereby pulling the second positioning plate 165 back to its initial position (e.g., Figure 16 (As shown). In this way, the probe holder 2 can be securely clamped in the hole H.

[0058] Furthermore, it should be understood that when the outer contour size of the probe holder 2 is exactly equal to or smaller than the size of the hole H, the clamping member 16 can clamp the probe holder 2 in the presence of the first positioning plate 164 and the second positioning plate 165 in contact with each other; while when the outer contour size of the probe holder 2 is larger than the size of the hole H, the clamping member 16 can clamp the probe holder 2 in the presence of the first positioning plate 164 and the second positioning plate 165 without contacting each other, and at this time at least a portion of the outer contour of the probe holder 2 will conform to the peripheral wall of the hole H.

[0059] With the configuration of the above embodiments, probe holders 2 of different sizes can be replaced according to the user's operating needs, and the probe holders 2 can be firmly clamped in the clamping member 16, thereby improving the stability of the detection device D during the detection process.

[0060] The above describes the movement of robotic arm 1 in the XY plane (e.g.) Figures 14 to 15 (as shown) and the movement of robotic arm 1 in the YZ plane (such as...) Figures 16 to 18 The following will be described separately (as shown). However, it should be understood that these adjustments on different coordinate planes can be made simultaneously. For example, the connector 15 can be rotated downwards at its first end 151 (as shown). Figure 15 As shown), while simultaneously rotating the clamping member 16 clockwise relative to the connecting member 15 (as shown), Figure 17 (As shown).

[0061] Please see Figure 19 The illustration shows a detection device D equipped with the robotic arm 1 disclosed herein. The detection device D, which can be used to detect the physical characteristics of micro / nano components, includes the robotic arm 1, a probe holder 2, and a probe 3. The structure of the robotic arm 1 and the connections between its components have been described in detail above and will not be repeated here.

[0062] The probe holder 2 of the detection device D can be accommodated in the hole H of the clamping member 16 of the robotic arm 1, and one end of the probe holder 2 can be used to engage the probe 3, thereby holding the probe 3 therein. In other embodiments, the probe holder 2 can be used to clamp optical path correction accessories, semiconductor detection consumables, integrated circuit detection consumables, rigid wires, cables, or electrodes, and other components. In practical applications, the probe 3 can be a micro probe, nano probe, angstrom probe, or other probes used to detect micro- and nano-scale components. Furthermore, the probe 3 can be a straight needle-like object, or it can be bent to have a bending section (e.g., Figure 19 (As shown). In some embodiments, at least one probe holder 2 may be configured to be received in the hole H of the gripper 16 of the robotic arm 1, and one end of the probe holder 2 may be used to engage a plurality of probe arrays spaced apart on a carrier. In other embodiments, at least one probe 3 or probe card may be disposed within the gripping area of ​​the hole H of the gripper.

[0063] One end of the probe holder 2 is engaged with the probe 3, while its opposite end can be electrically connected to a cable (not shown). The cable can be a conductive wire, communication wire, data transmission wire, or other wire with similar functions. Therefore, during the testing process, electrical signals can be received and transmitted via the cable.

[0064] like Figure 19 As shown, the robotic arm 1 of the detection device D may further include a cable clamp 18, which is disposed on the positioning adjustment assembly 10. In some embodiments, the cable clamp 18 may be disposed on the top of the positioning adjustment assembly 10, i.e., on the second slide rail connecting plate 111b, and fixed by means of locking or the like. The cable clamp 18 is configured so that the cable can be threaded through it. In other embodiments, the cable clamp 18 may be disposed at any position of the robotic arm 1, such as the middle section of the positioning adjustment assembly 10 or the positioning adjustment base 13, and may be designed to be integrally formed with the robotic arm 1. With the configuration of the above embodiments, the cable (not shown) can be neatly stored in the cable clamp 18, thereby avoiding interference with the normal operation of the detection device D during the detection process.

[0065] Please refer to Figure 20 This demonstrates the state of the detection device D during the detection process. In practical applications, the detection device D can be placed on the substrate surface BS (see [link]). Figure 20The substrate surface BS can be a flat surface, a curved surface, an irregular non-flat surface, or a groove or protrusion structure relative to the surrounding environment. The substrate surface BS can be made of flexible material, non-flexible material, or a combination thereof. On the other hand, the robotic arm 1 can be positioned on the substrate surface BS by adjusting the positioning adjustment base 13. The bottom surface of the positioning adjustment base 13 can be a flat surface, a curved surface, an irregular non-flat bottom surface, or a surface complementary to the shape characteristics of the substrate surface BS. In some embodiments, the positioning adjustment base 13 can be magnetic and able to be attracted to the substrate surface BS, thereby improving the stability of the detection device D during the detection process.

[0066] The present invention also provides a method for detecting the physical characteristics of micro / nano components, comprising providing a detection device D with a robotic arm 1 disposed on a substrate surface BS. The structure of the robotic arm 1 and the detection device D, and the connection relationships between their components, have been described in detail above and will not be repeated here.

[0067] During the detection process, the detection device D is placed on the substrate surface BS to detect the physical characteristics of the test object 4. The test object 4 can be a chip, wafer, transistor, integrated circuit, or other micro / nano-scale electronic component. During the detection process, one or more visible light and / or invisible light sources S, and one or more signal transceivers can be provided to collect information about the physical characteristics of the test object 4.

[0068] Specifically, when probe 3 approaches or contacts the surface of the object under test 4, the light source S can be operated to emit a light beam L, which illuminates the surface of the object under test 4 and generates a reflected light beam L'. At this time, the receiver R in the transceiver is set to receive the reflected light beam L', thereby obtaining an optical signal related to the object under test 4. Then, the receiver R can transmit the received optical signal to an electronic device (such as a mobile terminal, tablet computer, desktop computer, or any other electronic device capable of performing data processing) through the transmitter of the transceiver for processing, thereby obtaining information related to the physical characteristics of the object under test 4.

[0069] Furthermore, despite Figure 20 In the illustrated embodiment, the test object 4 and the detection device D are placed on the same plane, but the test object 4 and the detection device D can also be placed on two separate surfaces, which can be located at different heights or positions.

[0070] In some embodiments, the detection device D can be a non-destructive detection tool, including but not limited to the following devices: atomic force microscope (AFM), transmission electron microscope (TEM), focused ion beam microscope (FIB), scanning probe microscope (SPM), electrostatic force microscope (EFM), scanning capacitance microscope (SCM), and scanning ion conductance microscope (SICM).

[0071] The features of several embodiments have been summarized above to enable those skilled in the art to better understand the nature of this disclosure. Those skilled in the art should understand that this disclosure can be readily used as a basis for designing or modifying other programs and structures to achieve the same purpose and / or attain the same advantages of the embodiments introduced herein. Those skilled in the art should also recognize that such equivalent constructions should not depart from the spirit and scope of this disclosure, and that various changes, substitutions, and modifications can be made to this document.

Claims

1. A robotic arm, characterized in that, include: A positioning adjustment component is disposed on a positioning adjustment base, the positioning adjustment component comprising: A first slide rail assembly, disposed within the positioning adjustment assembly, the first slide rail assembly comprising: A first slide rail cover, wherein a slide rail of a first slide rail base is slidably received in a groove of the first slide rail cover generally along a first direction: And a first elastic element, the two ends of which are respectively fixed to the first slide rail base and the first slide rail top cover; A first handwheel assembly having a screw that can contact the top cover of the first slide rail; A cantilever component, one end of which is connected to the positioning and adjustment assembly, and the cantilever component has a groove for accommodating a connector. And a clamping member with a hole, a first end of the clamping member being configured to engage with the connector.

2. The robotic arm as described in claim 1, characterized in that, The first slide rail base is provided with a first handwheel connecting frame, the first handwheel connecting frame is provided with a first guide member, and the screw of the first handwheel assembly can be locked into a through hole of the first guide member.

3. The robotic arm as described in claim 1, characterized in that, The positioning adjustment assembly further includes: a second slide rail assembly, which includes a second slide rail connecting plate connected to the first slide rail assembly; a second slide rail top cover, wherein a slide groove of the second slide rail top cover slidably accommodates a slide rail of a second slide rail base in a generally second direction; and a second elastic element, the two ends of which are respectively fixed to the second slide rail base and the second slide rail top cover; and the robotic arm further includes a second handwheel assembly, which has a screw that can contact the second slide rail top cover, wherein the second direction is generally perpendicular to the first direction.

4. The robotic arm as described in claim 3, characterized in that, The second slide rail base is provided with a second handwheel connecting frame, the second handwheel connecting frame is provided with a second guide member, and the screw of the second handwheel assembly can be locked into a through hole of the second guide member.

5. The robotic arm as described in claim 3, characterized in that, The positioning adjustment assembly further includes: a third slide rail assembly, which includes a third slide rail top cover connected to the second slide rail assembly, a groove of the third slide rail top cover being slidably accommodated in a slide rail of a third slide rail base along a third third direction, and the third slide rail base being disposed on one side of the positioning adjustment base; and a third elastic element, the two ends of which are respectively fixed between the third slide rail base and the third slide rail top cover; and the robotic arm further includes a third handwheel assembly, which has a screw that can contact the third slide rail top cover, wherein the third third direction is substantially perpendicular to the first direction and the second direction.

6. The robotic arm as described in claim 5, characterized in that, The third slide rail base is provided with a third handwheel connecting frame, the third handwheel connecting frame is provided with a third guide member, and the screw of the third handwheel assembly can be locked into a through hole of the third guide member.

7. The robotic arm as described in claim 1, characterized in that, The first slide rail top cover can move ±10mm relative to the first slide rail base along the first direction.

8. The robotic arm as described in claim 1, characterized in that, The cantilever further includes a cantilever connecting plate, and one end of the cantilever is fixed to the positioning adjustment assembly via the cantilever connecting plate.

9. The robotic arm as described in claim 1, characterized in that, The first end of the connector is positioned inside the groove of the cantilever and pivotally connected to the cantilever, thereby allowing the connector to rotate relative to the cantilever on a first plane formed by a first direction and a second direction, with the first end as the axis.

10. The robotic arm as described in claim 9, characterized in that, The connector is rotatable by 10 degrees on the first plane.

11. The robotic arm as described in claim 9, characterized in that, The cantilever further includes a height adjustment knob disposed adjacent to a second end of the connector relative to the first end.

12. The robotic arm as described in claim 11, characterized in that, The robotic arm further includes an elastic element located between the cantilever and the clamping member, with both ends of the elastic element located between the cantilever and the clamping member respectively fixed to a first anchoring member positioned on the cantilever and a second anchoring member positioned on the clamping member.

13. The robotic arm as described in claim 12, characterized in that, The second anchor is disposed on a protrusion of the clamping member.

14. The robotic arm as described in claim 1, characterized in that, The first end of the clamping member is movably pivotally connected to a second end of the connector relative to the first end, thereby allowing the clamping member to move relative to the second end of the connector in a second plane formed by a second direction and a third direction.

15. The robotic arm as described in claim 14, characterized in that, The clamping member is rotatable ±70 degrees on the second plane.

16. The robotic arm as described in claim 1, characterized in that, The hole of the clamping member is formed between a first positioning plate and a second positioning plate, and one or more distance adjustment members are provided between the first positioning plate and the second positioning plate.

17. The robotic arm as claimed in claim 1, characterized in that, The robotic arm further includes a cable clamp disposed on the positioning adjustment assembly.

18. The robotic arm as described in claim 1 or 16, characterized in that, The positioning adjustment base is magnetic.

19. A detection device for detecting the physical characteristics of micro / nano components, characterized in that, include: A robotic arm as described in any one of claims 1 to 18; A probe holder, which is received between the holes of the clamping member; At least one probe is engaged with one end of the probe holder.

20. A method for detecting the physical characteristics of micro / nano components, characterized in that, include: The detection device as described in claim 19 is disposed on a substrate surface; The probe of the detection device approaches or contacts the surface of the object to be tested; A light source is provided to illuminate the surface of the micro / nano element, thereby obtaining an optical signal; And receive and process the optical signal to obtain at least one piece of information related to the physical characteristics of the micro / nano element.

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