Graphite heat exchanger feeding connection structure and method for producing electronic grade hydrochloric acid

Abstract

The invention discloses a graphite heat exchanger feeding connection structure and method for electronic grade hydrochloric acid production, the graphite heat exchanger feeding connection structure comprises a heat exchanger body, the heat exchanger body is provided with two sets of mounting plates, the two sets of mounting plates are symmetrically arranged up and down, and four sets of protection plates are arranged on the periphery of the heat exchanger body; two groups of fluid pipelines are arranged on the protective plate, a connecting plate is further arranged on the protective plate, two groups of connecting flange plates with elastic structures are symmetrically arranged on the connecting plate, the two groups of connecting flange plates are matched with the two groups of fluid pipelines in position, and a connecting assembly is further arranged on the connecting plate; the device has the beneficial effects that the connecting plate bears the connecting flange plate and is matched with the connecting assembly to be in positioning fit with the protective plate and the mounting plate, so that indirect connection between the connecting flange plate and the fluid pipeline is achieved, and direct butt joint between the electronic-grade hydrochloric acid feeding pipeline and the fluid pipeline made of graphite is avoided; and the damage risk caused by direct stress and assembly impact of the graphite pipeline is effectively avoided.

Description

TECHNICAL FIELD

[0001] The application relates to a graphite heat exchanger feeding connection structure and method for electronic-grade hydrochloric acid production. BACKGROUND

[0002] Electronic-grade hydrochloric acid is a key chemical material in the high-end manufacturing field of semiconductors, electronic components and the like, and the production process has extremely high requirements on the corrosion resistance, sealing performance and structural stability of the equipment. The graphite heat exchanger has excellent strong acid corrosion resistance and good heat conduction performance, and becomes the core equipment for realizing the heat exchange process in the production of electronic-grade hydrochloric acid.

[0003] In the feeding connection link of the graphite heat exchanger, the traditional method is to directly connect the feeding pipeline and the graphite fluid pipeline of the heat exchanger body through flanges and other rigid connecting pieces. However, due to the brittleness and poor impact resistance of graphite, when the feeding pipeline and the graphite fluid pipeline are directly connected, the external force impact in the assembly process and the stress of the connected pipeline will be directly transmitted to the graphite pipeline, which can easily cause the pipeline to crack and break, seriously affect the service life of the heat exchanger and increase the maintenance cost. Moreover, the pipeline installation in the production site of electronic-grade hydrochloric acid is prone to positional deviation, and the traditional rigid connection has strict requirements on the assembly accuracy, and the graphite pipeline or the feeding pipeline needs to be additionally cut and corrected, which is complicated and has poor adaptability, and reduces the production efficiency. In view of this, the application provides a graphite heat exchanger feeding connection structure and method for electronic-grade hydrochloric acid production to solve the above problems. SUMMARY

[0004] The application aims to provide a graphite heat exchanger feeding connection structure and method for electronic-grade hydrochloric acid production to solve the problems in the background.

[0005] To achieve the above-mentioned purpose, the application provides the following technical scheme. A graphite heat exchanger feeding connection structure for electronic-grade hydrochloric acid production, comprising a heat exchanger body, the heat exchanger body is provided with two groups of mounting plates, the two groups of mounting plates are symmetrically arranged up and down, and the periphery of the heat exchanger body is provided with four groups of protective plates. Two groups of fluid pipelines are arranged on the protective plates, a connecting plate is further arranged on the protective plate, two groups of connecting flanges with elastic structures are symmetrically arranged on the connecting plate, the two groups of connecting flanges are matched with the two groups of fluid pipelines in position, the connecting flanges are in communication with the inner cavities of the fluid pipelines, and a connecting assembly is further arranged on the connecting plate, the connecting assembly is matched with the protective plate and the mounting plate, so that the connecting flanges are positioned on the fluid pipelines.

[0006] As an improvement of the above-mentioned technical scheme, two groups of connecting sleeves are arranged on the connecting plate, and the two groups of connecting sleeves are matched with the two groups of fluid pipelines in position. The connecting sleeve is provided with a contact ring, the contact ring is provided with a contact groove for placing a fluid pipe, and the connecting flange plate is arranged in the contact groove of the contact ring.

[0007] As an improvement of the above technical scheme, the contact ring is provided with an extension pipe, the extension pipe is arranged in the inner cavity of the fluid pipe, the extension pipe is in contact sealing with the inner wall of the fluid pipe, and the contact ring, the extension pipe and the fluid pipe are made of the same material; The contact ring is further provided with an elastic pipe, and the connecting flange plate is arranged on the elastic pipe, so that the connecting flange plate can be adjusted in any direction.

[0008] As an improvement of the above technical scheme, the connecting sleeve is provided with a first positioning pipe, and the connecting flange plate is provided with a second positioning pipe, the first positioning pipe and the second positioning pipe are arranged on the outer wall of the elastic pipe; An adjusting gap is arranged between the first positioning pipe and the second positioning pipe, and a limiting sleeve is further arranged between the first positioning pipe and the second positioning pipe.

[0009] As an improvement of the above technical scheme, the limiting sleeve comprises a first limiting ring pipe and a second limiting ring pipe, and the first limiting ring pipe and the second limiting ring pipe are rotatably connected; The first limiting ring pipe is threadedly connected with the outer wall of the first positioning pipe, and the second limiting ring pipe is threadedly connected with the outer wall of the second positioning pipe.

[0010] As an improvement of the above technical scheme, the mounting plate is provided with four groups of mounting fixed plates, and the four groups of mounting fixed plates are positionally matched with four groups of protection plates; The connecting assembly is arranged between the mounting fixed plate and the protection plate, so that the connecting flange plate is positioned on the fluid pipe.

[0011] As an improvement of the above technical scheme, the connecting assembly comprises two groups of connecting positioning plates, a reinforcing plate is arranged between the connecting positioning plate and the connecting plate, the two groups of connecting positioning plates are symmetrically arranged on two sides of the connecting plate, and the two groups of connecting positioning plates are positionally matched with the two groups of mounting plates; The connecting positioning plate is matched with the protection plate and the mounting fixed plate.

[0012] As an improvement of the above technical scheme, a plurality of protection through holes are formed in the protection plate, a plurality of fixed through holes are formed in the mounting fixed plate, and the plurality of protection through holes are positionally matched with the plurality of fixed through holes; A plurality of connecting screws are arranged on the connecting positioning plate, the plurality of connecting screws are positionally matched with the plurality of fixed through holes, and the connecting screws are arranged between the positionally matched fixed protection through holes and fixed through holes.

[0013] As the improvement of the above technical scheme, the connecting screw is provided with a first connecting nut and a second connecting nut, and the first connecting nut and the second connecting nut are in threaded cooperation with the connecting screw. The first connecting nut is in contact with the connecting positioning plate but is not connected, and the second connecting nut is in contact with the mounting fixed plate but is not connected.

[0014] A method for using a graphite heat exchanger feed connection structure for producing electronic-grade hydrochloric acid, comprising the following steps: Step S1, corrosion-resistant pre-sealing adaptation: The contact ring made of the same material as the fluid pipe is positioned and embedded in the fluid pipe on the protection plate through the contact groove, so that the extension pipe on the contact ring extends axially into the inner cavity of the fluid pipe, forming an initial sealing cooperation, and adapting to the strong corrosive environment of the electronic-grade hydrochloric acid; Step S2, elastic adjustment assembly: The connecting sleeve is sleeved on the outer wall of the contact ring, and the elastic pipe is placed inside the first positioning pipe and the second positioning pipe, and an adjustable gap is reserved therebetween, and the basic buffer towards adjustment is constructed by the deformation allowance of the elastic pipe, so that the connecting flange plate and the connecting sleeve remain in an elastic state; Step S3, two-way threaded limiting: The first limiting ring pipe of the limiting sleeve is screwed with the outer wall of the first positioning pipe, and the second limiting ring pipe is screwed with the outer wall of the second positioning pipe, and the connecting flange plate and the connecting sleeve are kept in a fixed state by the threaded cooperation; Step S4, layered positioning structure pre-installation: The connecting positioning plates on both sides of the connecting plate are rigidly fixed with the connecting plate through the reinforcing plate, so that the connecting screws on the connecting positioning plates correspondingly pass through the protection through-holes of the protection plate and the fixed through-holes of the mounting fixed plate on the mounting plate, forming a three-layer positioning frame of the protection plate, the connecting plate and the mounting fixed plate; Step S5, double-nut progressive fastening: The first connecting nut is first pre-tightened to the connecting positioning plate on the connecting screw, and then the second connecting nut is tightened to tightly cooperate with the mounting fixed plate, so as to eliminate the assembly gap by the progressive locking of the first connecting nut and the second connecting nut, realize high-precision positioning and fixing of the connecting flange plate on the fluid pipe, and finally connect the electronic-grade hydrochloric acid feed pipe through the connecting flange plate; Step S6, elastic adjustment: When the connecting flange plate is connected to the electronic-grade hydrochloric acid feed pipe, the first limiting ring pipe and the second limiting ring pipe are rotated until the second limiting ring pipe is separated from the second positioning pipe, so that the connecting flange plate and the connecting sleeve remain in an elastic state, and then the connecting flange plate is adjusted to align with the electronic-grade hydrochloric acid feed pipe.

[0015] Compared with the prior art, the beneficial effects of the present invention are: By using a connecting plate to support the connecting flange and cooperating with the connecting components, protective plate, and mounting plate for positioning, an indirect connection between the connecting flange and the fluid pipeline is achieved. This avoids the direct connection between the electronic-grade hydrochloric acid feed pipeline and the graphite fluid pipeline, effectively mitigating the risk of damage to the graphite pipeline caused by direct force and assembly impact, and extending the service life of the heat exchanger body. The connecting flange adopts a flexible structure design, which can effectively adapt to the installation position deviation of the electronic grade hydrochloric acid feed pipe. There is no need to make additional processing and correction to the graphite fluid pipe or feed pipe of the heat exchanger body, which reduces the assembly accuracy requirements and significantly improves the convenience of assembly operation and the assembly adaptability under different working conditions. Of course, the elastic structure can absorb the stress generated by assembly impact, vibration or thermal expansion and contraction of the pipeline through its own deformation during assembly and subsequent use, avoiding the direct transmission of stress to the graphite fluid pipeline under the rigid connection method, effectively avoiding the risk of cracking and damage to the graphite fluid pipeline due to stress concentration, ensuring the structural integrity of the 10 core components of the heat exchanger body, and extending the overall service life of the equipment. The elastic structure allows for slight deformation to compensate for minor unevenness of the mating surfaces when the connecting flange is connected to the feed pipe flange, improving the fit of the flange mating surfaces. At the same time, during use, the elastic deformation can offset the effects of vibration and deformation on the sealing surface, avoiding leakage of electronic-grade hydrochloric acid caused by misalignment of the sealing surface, ensuring the sealing reliability of highly corrosive media transportation, and ensuring production safety and the continuous and stable operation of the heat exchange process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 For the present invention Figure 1 Enlarged structural diagram at point A; Figure 3 This is a schematic diagram of the connecting plate of the present invention; Figure 4 This is a schematic diagram of the structure of the protective plate of the present invention; Figure 5 This is a structural schematic diagram of the connecting plate of the present invention from another angle; Figure 6 For the present invention Figure 5 Enlarged structural diagram at point B; Figure 7 This is a schematic diagram of the back structure of the connecting plate of the present invention; Figure 8 For the present invention Figure 7 Sectional view of CC; Figure 9 For the present invention Figure 8An enlarged structural schematic view at D; Figure 10 For the application Figure 8 An enlarged structural schematic view at F; Figure 11 An enlarged structural schematic view at D; Figure 12 For the application Figure 11 An enlarged structural schematic view at E.

[0017] In the figure: 10, heat exchanger body; 11, mounting plate; 12, mounting fixed plate; 121, fixed through hole; 13, protective plate; 14, fluid pipeline; 15, protective through hole; 20, connecting plate; 21, connecting sleeve; 22, contact groove; 23, contact ring; 24, extension pipeline; 30, connecting flange; 40, connecting assembly; 41, reinforcing plate; 42, connecting positioning plate; 43, connecting screw; 44, first connecting nut; 45, second connecting nut; 50, limiting sleeve; 51, first limiting ring tube; 52, second limiting ring tube; 60, first positioning pipeline; 70, second positioning pipeline; 80, elastic pipeline; 90, adjustment gap. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0019] Embodiment: As Figures 1-12 shown, the embodiment provides a graphite heat exchanger feed connecting structure for electronic-grade hydrochloric acid production, which comprises a heat exchanger body 10, the heat exchanger body 10 is provided with two groups of mounting plates 11, the two groups of mounting plates 11 are symmetrically arranged up and down, and the periphery of the heat exchanger body 10 is provided with four groups of protective plates 13; Two groups of fluid pipelines 14 are arranged on the protective plates 13, a connecting plate 20 is further arranged on the protective plates 13, two groups of connecting flanges 30 with elastic structure are symmetrically arranged on the connecting plate 20, the two groups of connecting flanges 30 are positionally matched with the two groups of fluid pipelines 14, the connecting flanges 30 are in communication with the inner cavities of the fluid pipelines 14, and a connecting assembly 40 is further arranged on the connecting plate 20, the connecting assembly 40 cooperates with the protective plates 13 and the mounting plates 11 to position the connecting flanges 30 on the fluid pipelines 14.

[0020] In the case, the fluid pipe 14 is made of graphite material, and the fluid pipe 14 is the pipe for fluid flow through the heat exchanger body 10 to complete the heat exchange process.

[0021] In the embodiment, when the connecting flange plate 30 accesses the electronic grade hydrochloric acid feeding pipe, first, the connecting plate 20 is placed on the protection plate 13, and the two connecting flange plates 30 and the two groups of fluid pipes 14 are aligned, then the connecting assembly 40 is connected and matched with the protection plate 13 and the mounting plate 11, the connecting flange plate 30 is positioned on the fluid pipe 14, then the connecting flange plate 30 is connected with the flange of the electronic grade hydrochloric acid feeding pipe, avoiding direct connection with the fluid pipe 14. By bearing the connecting flange plate 30 through the connecting plate 20 and cooperating with the connecting assembly 40 to position and match with the protection plate 13 and the mounting plate 11, indirect connection of the connecting flange plate 30 and the fluid pipe 14 is realized, avoiding direct connection of the electronic grade hydrochloric acid feeding pipe with the graphite material fluid pipe 14, effectively avoiding the damage risk of the graphite pipe caused by direct stress and assembly impact, prolonging the service life of the heat exchanger body 10. The connecting flange plate 30 adopts an elastic structure design, which can effectively adapt to the installation position deviation of the electronic grade hydrochloric acid feeding pipe, without the need for additional processing and correction of the graphite fluid pipe 14 or the feeding pipe of the heat exchanger body 10, reducing the assembly precision requirement, and significantly improving the convenience of assembly operation and assembly adaptability under different working conditions. Of course, the elastic structure can absorb the stress generated by assembly impact, vibration or pipe thermal expansion and contraction during assembly docking and subsequent use through its own deformation, avoiding direct stress transmission to the graphite material fluid pipe 14 in the rigid connection mode, effectively avoiding the cracking and damage risk of the graphite fluid pipe 14 caused by stress concentration, protecting the structural integrity of the core components of the heat exchanger body 10, and prolonging the overall service life of the equipment. The elastic structure can compensate for the slight unevenness of the docking surface through slight deformation when the connecting flange plate 30 is docked with the feeding pipe flange, improving the fit of the flange docking surface; at the same time, the influence of vibration and deformation on the sealing surface can be offset through elastic deformation during use, avoiding electronic grade hydrochloric acid leakage caused by misalignment of the sealing surface, protecting the sealing reliability of the strong corrosive medium transportation, ensuring production safety and continuous and stable heat exchange process.

[0022] Specifically, the connecting plate 20 is provided with two groups of connecting sleeves 21, and the two groups of connecting sleeves 21 are positionally matched with the two groups of fluid pipes 14. The connecting sleeve 21 is provided with a contact ring 23, the contact ring 23 is provided with a contact groove 22 for placing the fluid pipe 14, and the connecting flange plate 30 is arranged in the contact groove 22 of the contact ring 23.

[0023] In this embodiment, through the position matching design of the connecting sleeve 21 and the fluid pipeline 14, and the contact groove 22 structure on the contact ring 23 adapting to the fluid pipeline 14, the fluid pipeline 14 can be precisely embedded in the contact groove 22, directly ensuring the axial coincidence of the contact ring 23, the connecting flange 30 and the fluid pipeline 14, effectively avoiding the problems of fluid flow path deviation and local turbulence caused by radial deviation during assembly, providing positioning basis for the stable conveying of electronic-grade hydrochloric acid in the pipeline and the efficient performance of the subsequent heat exchange process.

[0024] Specifically, the contact ring 23 is provided with an extension pipeline 24, which is arranged in the inner cavity of the fluid pipeline 14, and the extension pipeline 24 is in contact and sealed with the inner wall of the fluid pipeline 14. The contact ring 23, the extension pipeline 24 and the fluid pipeline 14 are made of the same material. The contact ring 23 is also provided with an elastic pipeline 80, and the connecting flange 30 is arranged on the elastic pipeline 80, so that the connecting flange 30 can be adjusted in any direction.

[0025] In this embodiment, the contact ring 23, the extension pipeline 24 and the fluid pipeline 14 made of graphite material are made of the same material, which can effectively avoid the sealing failure caused by electrochemical corrosion, material expansion coefficient difference or insufficient chemical compatibility when different materials are in contact, adapt to the strong corrosive conveying environment of electronic-grade hydrochloric acid, and also avoid the hard contact between the connecting sleeve 21 and the fluid pipeline 14, which may cause damage to the fluid pipeline 14. Moreover, the extension pipeline 24 extends into the inner cavity of the fluid pipeline 14 and is in contact and sealed with the inner wall, forming a double-sealing barrier of the outer wall of the contact ring 23 and the inner wall of the extension pipeline 24, directly blocking the penetration path of electronic-grade hydrochloric acid from the contact gap, significantly improving the sealing reliability of medium conveying, ensuring production safety, and the extension pipeline 24 is coaxially arranged in the inner cavity of the fluid pipeline 14 and can serve as a guide reference for fluid conveying, ensuring the stable flow of electronic-grade hydrochloric acid along the axis in the pipeline, avoiding local turbulence and uneven flow caused by radial deviation or gap at the pipeline connection part; at the same time, the close fit of the extension pipeline 24 and the inner wall of the fluid pipeline 14 can reduce the dead angle of medium retention at the connection part, reduce the risk of impurity deposition, and provide stable fluid working condition support for the efficient heat exchange of the heat exchanger body 10. The elastic pipeline 80 on the contact ring 23 provides a deformable support basis for the connecting flange 30, and through the flexible deformation allowance of the elastic pipeline 80, the connecting flange 30 can be adjusted in multiple dimensions in any direction, which can flexibly adapt to the installation position deviation of the electronic-grade hydrochloric acid feeding pipeline, without the need for additional cutting and correction machining of the graphite fluid pipeline 14 or the feeding pipeline of the heat exchanger body 10, greatly reducing the assembly precision requirement and improving the assembly adaptability and operation convenience in different installation scenarios.

[0026] Specifically, the first positioning pipe 60 is arranged on the connecting sleeve 21, and the second positioning pipe 70 is arranged on the connecting flange plate 30; the first positioning pipe 60 and the second positioning pipe 70 are sleeved on the outer wall of the elastic pipe 80. An adjusting gap 90 is arranged between the first positioning pipe 60 and the second positioning pipe 70, and a limiting sleeve 50 is further arranged between the first positioning pipe 60 and the second positioning pipe 70.

[0027] In this embodiment, the adjusting gap 90 arranged between the first positioning pipe 60 and the second positioning pipe 70 provides a controllable activity space for the flexible deformation of the elastic pipe 80; when the connecting flange plate 30 needs to adapt to the installation angle deviation of the electronic-grade hydrochloric acid feeding pipe, the second positioning pipe 70 can produce a small displacement relative to the first positioning pipe 60 relying on the adjusting gap 90, drive the corresponding flexible deformation of the elastic pipe 80, and then realize the multi-dimensional orientation adjustment of the connecting flange plate 30; this design can flexibly compensate for the assembly deviation without additional cutting and correction processing of the graphite fluid pipe 14 or the feeding pipe of the heat exchanger body 10, greatly reduces the assembly precision requirement, and improves the assembly adaptability and operation convenience under different working conditions. Specifically, the limiting sleeve 50 includes a first limiting ring pipe 51 and a second limiting ring pipe 52, and the first limiting ring pipe 51 and the second limiting ring pipe 52 are rotationally connected. The first limiting ring pipe 51 is threadedly connected with the outer wall of the first positioning pipe 60, and the second limiting ring pipe 52 is threadedly connected with the outer wall of the second positioning pipe 70.

[0028] In this embodiment, through the threaded connection structure of the limiting sleeve 50 and the first positioning pipe 60 and the second positioning pipe 70, a dual function of being able to be unlocked and adjusted and being able to be locked and positioned is constructed; when the connecting flange plate 30 needs to be adjusted, the first limiting ring pipe 51 and the second limiting ring pipe 52 can be loosened in reverse direction to release the locking of the first positioning pipe 60 and the second positioning pipe 70, so that the adjusting gap 90 recovers the activity allowance, and the adjustment operation is ensured to be smooth. When the fluid flow is large, the first limiting ring pipe 51 and the second positioning pipe 70 are threadedly fixed, and the second limiting ring pipe 52 and the second positioning pipe 70 are threadedly fixed, and the relative position of the first positioning pipe 60 and the second positioning pipe 70 can be accurately locked by using the rotationally connected characteristics of the two, so that the elastic pipe 80 remains in a preset deformation state, and the unexpected displacement of the connecting flange plate 30 during the equipment operation is avoided.

[0029] Specifically, the mounting plate 11 is provided with four groups of mounting fixed plates 12, and the four groups of mounting fixed plates 12 are positionally matched with four groups of protection plates 13. The connecting assembly 40 is arranged between the mounting fixed plate 12 and the protection plate 13, so that the connecting flange plate 30 is positioned on the fluid pipeline 14.

[0030] Specifically, the connecting assembly 40 includes two groups of connecting positioning plates 42, the connecting positioning plates 42 are provided with reinforcing plates 41 between the connecting plate 20, the two groups of connecting positioning plates 42 are symmetrically arranged on both sides of the connecting plate 20, and the two groups of connecting positioning plates 42 are positionally matched with the two groups of mounting plates 11. The connecting positioning plate 42 cooperates with the protection plate 13 and the mounting fixed plate 12.

[0031] In the embodiment, the four groups of mounting fixed plates 12 on the mounting plate 11 are positionally matched with the four groups of protection plates 13, which provides a clear spatial positioning reference for the connecting assembly 40; meanwhile, the two groups of connecting positioning plates 42 in the connecting assembly 40 are positionally matched with the two groups of mounting plates 11 and symmetrically distributed on both sides of the connecting plate 20, forming a multi-level positioning link of the mounting plate 11, the mounting fixed plate 12, the protection plate 13, the connecting positioning plate 42 and the connecting plate 20.

[0032] The link can directly anchor the positioning reference of the connecting flange plate 30 to the axis of the fluid pipeline 14 through the positional matching relationship of the components, effectively avoiding the radial deviation and axial misalignment of the connecting flange plate 30 and the fluid pipeline 14 caused by the absence of the positioning reference during assembly, ensuring the coaxiality of the two, providing pre-positioning guarantee for the sealing of the extended pipeline 24 and the inner wall of the fluid pipeline 14 and the stable connection of the elastic pipeline 80 and the contact ring 23, and avoiding poor fluid flow or sealing failure caused by alignment deviation.

[0033] Specifically, a plurality of protection through holes 15 are formed in the protection plate 13, and a plurality of fixed through holes 121 are formed in the mounting fixed plate 12, and the plurality of protection through holes 15 are positionally matched with the plurality of fixed through holes 121. A plurality of connecting screws 43 are arranged on the connecting positioning plate 42, the plurality of connecting screws 43 are positionally matched with the plurality of fixed through holes 121, and the connecting screw 43 is arranged between the positionally matched fixed protection through hole 15 and fixed through hole 121.

[0034] In this embodiment, the protective through hole 15 on the protective plate 13, the fixing through hole 121 on the mounting fixed plate 12 and the connecting screw 43 on the connecting positioning plate 42 are matched in position to form a penetrating positioning link of the connecting screw 43, the protective through hole 15 and the fixing through hole 121, which can directly anchor the relative positions of the connecting positioning plate 42, the protective plate 13 and the mounting fixed plate 12, avoid the radial deviation and axial misalignment of the connecting flange plate 30 and the fluid pipeline 14 caused by the displacement of components during assembly, ensure the coaxiality of the connecting flange plate 30 and the fluid pipeline 14, and provide a precise positioning basis for the contact sealing butt joint of the extension pipeline 24 and the inner wall of the fluid pipeline 14, thereby avoiding the risk of fluid flow obstruction or sealing failure caused by alignment deviation.

[0035] Specifically, the connecting screw 43 is provided with a first connecting nut 44 and a second connecting nut 45, both of which are in threaded cooperation with the connecting screw 43. The first connecting nut 44 is in contact with the connecting positioning plate 42 but not connected, and the second connecting nut 45 is in contact with the mounting fixed plate 12 but not connected.

[0036] In this embodiment, the structure that the first connecting nut 44 is in contact with the connecting positioning plate 42, the second connecting nut 45 is in contact with the mounting fixed plate 12 and both are in threaded cooperation with the connecting screw 43 forms a double-nut progressive locking mode. During assembly, the first connecting nut 44 can be pre-tightened to make the connecting positioning plate 42 adhere to the protective plate 13, and the gap between the connecting positioning plate 42 and the protective plate 13 is preliminarily eliminated; then the second connecting nut 45 is tightened to make the mounting fixed plate 12 tightly adhere to the protective plate 13, and the gap between the protective plate 13 and the mounting fixed plate 12 is further eliminated. This progressive locking mode can completely avoid the assembly gap between multiple connection components, ensure that the connecting flange plate 30 is stably positioned at the preset position of the fluid pipeline 14 through the connecting plate 20 and the connecting assembly 40, avoid the radial deviation or axial misalignment of the connecting flange plate 30 caused by the gap, and guarantee the coaxiality of the connecting flange plate 30 and the fluid pipeline 14, thereby laying a foundation for the precise butt joint of the sealing cooperation of the extension pipeline 24 and the inner wall of the fluid pipeline 14.

[0037] A method for using a graphite heat exchanger feed connection structure for the production of electronic-grade hydrochloric acid, comprising the following steps: Step S1, corrosion-resistant pre-sealing adaptation: The contact ring 23 made of the same material as the fluid pipeline 14 is positioned and embedded in the fluid pipeline 14 on the protective plate 13 through the contact groove 22, so that the extension pipeline 24 on the contact ring 23 axially extends into the inner cavity of the fluid pipeline 14 to form an initial sealing cooperation, which is adapted to the strong corrosive environment of electronic-grade hydrochloric acid. Step S2, elastic adjustment assembly: The connecting sleeve 21 is sleeved on the outer wall of the contact ring 23, and the elastic pipe 80 is arranged inside the first positioning pipe 60 and the second positioning pipe 70, and an adjustable gap 90 is reserved therebetween, and the elastic state between the connecting flange plate 30 and the connecting sleeve 21 is maintained by the deformation allowance of the elastic pipe 80 to build a basic buffer towards adjustment; Step S3, bidirectional threaded limiting: The first limiting ring pipe 51 of the limiting sleeve 50 is screwed with the outer wall of the first positioning pipe 60, and the second limiting ring pipe 52 is screwed with the outer wall of the second positioning pipe 70, and the fixed state between the connecting flange plate 30 and the connecting sleeve 21 is maintained by the threaded cooperation; Step S4, preloading of layered positioning structure: The connecting positioning plates 42 on both sides of the connecting plate 20 are rigidly fixed with the connecting plate 20 through the reinforcing plates 41, the connecting screws 43 on the connecting positioning plates 42 are correspondingly arranged in the protective through holes 15 of the protective plates 13 and the fixed through holes 121 of the mounting fixed plates 12 on the mounting plates 11, and a three-layer positioning frame of the protective plates 13, the connecting plate 20 and the mounting fixed plates 12 is formed; Step S5, progressive fastening of double nuts: The first connecting nut 44 is first pre-tightened to abut against the connecting positioning plate 42 on the connecting screw 43, and then the second connecting nut 45 is tightened to tightly cooperate with the mounting fixed plate 12, the assembly gap is eliminated through the progressive locking of the first connecting nut 44 and the second connecting nut 45, the high-precision positioning and fixing of the connecting flange plate 30 on the fluid pipe 14 is realized, and finally the connecting flange plate 30 is connected to the electronic-grade hydrochloric acid feeding pipe; Step S6, elastic adjustment: When the connecting flange plate 30 is connected to the electronic-grade hydrochloric acid feeding pipe, the first limiting ring pipe 51 and the second limiting ring pipe 52 are rotated until the second limiting ring pipe 52 is separated from the second positioning pipe 70, so that the elastic state between the connecting flange plate 30 and the connecting sleeve 21 is maintained, and then the connecting flange plate 30 is adjusted to be aligned with the electronic-grade hydrochloric acid feeding pipe by being poked.

[0038] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid, characterized by: Including heat exchanger body (10), the heat exchanger body (10) is provided with two sets of mounting plate (11), two sets of the mounting plate (11) are symmetrically arranged, the periphery of the heat exchanger body (10) is provided with four sets of protective plate (13); Two sets of fluid ducts (14) are arranged on the protective plate (13), a connecting plate (20) is further arranged on the protective plate (13), two sets of connecting flanges (30) with elastic structure are symmetrically arranged on the connecting plate (20), two sets of the connecting flanges (30) are matched with two sets of fluid ducts (14), the connecting flanges (30) are communicated with the inner cavities of the fluid ducts (14), a connecting assembly (40) is further arranged on the connecting plate (20), the connecting assembly (40) is matched with the protective plate (13) and the mounting plate (11), so that the connecting flanges (30) are positioned on the fluid ducts (14).

2. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 1, characterized in that: Two sets of connecting sleeves (21) are arranged on the connecting plate (20), and the two sets of connecting sleeves (21) are matched with the two sets of fluid ducts (14) in position; A contact ring (23) is arranged in the connecting sleeve (21), the contact ring (23) is provided with a contact groove (22) for placing the fluid duct (14), and the connecting flange (30) is arranged in the contact groove (22) of the contact ring (23).

3. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 2, characterized in that: The contact ring (23) is provided with an extension duct (24), the extension duct (24) is arranged in the inner cavity of the fluid duct (14), the extension duct (24) is in contact sealing with the inner wall of the fluid duct (14), and the contact ring (23), the extension duct (24) and the fluid duct (14) are made of the same material; The contact ring (23) is further provided with an elastic duct (80), and the connecting flange (30) is arranged on the elastic duct (80), so that the connecting flange (30) can be adjusted in any direction.

4. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 3, characterized in that: A first positioning duct (60) is arranged on the connecting sleeve (21), a second positioning duct (70) is arranged on the connecting flange (30), and the first positioning duct (60) and the second positioning duct (70) are sleeved on the outer wall of the elastic duct (80); An adjusting gap (90) is arranged between the first positioning duct (60) and the second positioning duct (70), and a limiting sleeve (50) is further arranged between the first positioning duct (60) and the second positioning duct (70).

5. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 4, characterized in that: The limiting sleeve (50) comprises a first limiting ring tube (51) and a second limiting ring tube (52), and the first limiting ring tube (51) and the second limiting ring tube (52) are rotatably connected; The first limiting ring tube (51) is threadedly matched with the outer wall of the first positioning duct (60), and the second limiting ring tube (52) is threadedly matched with the outer wall of the second positioning duct (70).

6. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 1, characterized in that: Four sets of mounting fixed plates (12) are arranged on the mounting plate (11), and the four sets of mounting fixed plates (12) are matched with the four sets of protective plates (13) in position; The connecting assembly (40) is arranged between the mounting fixed plate (12) and the protection plate (13), so that the connecting flange plate (30) is positioned on the fluid pipeline (14).

7. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 6, characterized in that: The connecting assembly (40) comprises two groups of connecting positioning plates (42), and a reinforcing plate (41) is arranged between the connecting positioning plates (42) and the connecting plate (20), the two groups of connecting positioning plates (42) are symmetrically arranged on the two sides of the connecting plate (20), and the two groups of connecting positioning plates (42) are positionally matched with the two groups of mounting plates (11). The connecting positioning plate (42) cooperates with the protection plate (13) and the mounting fixed plate (12).

8. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 7, characterized in that: A plurality of protection through holes (15) are formed in the protection plate (13), and a plurality of fixed through holes (121) are formed in the mounting fixed plate (12), and the plurality of protection through holes (15) are positionally matched with the plurality of fixed through holes (121). A plurality of connecting screws (43) are arranged on the connecting positioning plate (42), the plurality of connecting screws (43) are positionally matched with the plurality of fixed through holes (121), and the connecting screw (43) is arranged between the positionally matched fixed protection through hole (15) and fixed through hole (121).

9. The graphite heat exchanger feed connection structure for the production of electronic grade hydrochloric acid according to claim 8, characterized in that: First and second connecting nuts (44) and (45) are arranged on the connecting screw (43) and are threadedly matched with the connecting screw (43). The first connecting nut (44) is in contact with the connecting positioning plate (42) but is not connected, and the second connecting nut (45) is in contact with the mounting fixed plate (12) but is not connected.

10. Use of a feed connection structure for a graphite heat exchanger for the production of electronic grade hydrochloric acid according to any one of claims 1 to 9, characterized in that The method comprises the following steps: Step S1, corrosion-resistant pre-sealing adaptation: a contact ring (23) made of the same material as the fluid pipeline (14) is positioned and embedded with the fluid pipeline (14) on the protection plate (13) through a contact groove (22), so that an extension pipeline (24) on the contact ring (23) axially extends into the inner cavity of the fluid pipeline (14) to form an initial sealing fit, and the strong corrosive environment of electronic-grade hydrochloric acid is adapted; Step S2, elastic adjusting assembly assembly: the connecting sleeve (21) is sleeved on the outer wall of the contact ring (23), and the elastic pipeline (80) is arranged in the first positioning pipeline (60) and the second positioning pipeline (70), and an adjustable gap (90) is reserved therebetween, and the basic buffer in the direction of adjustment is constructed through the deformation allowance of the elastic pipeline (80), so that the connecting flange plate (30) and the connecting sleeve (21) are kept in an elastic state; Step S3, two-way threaded limiting: the first limiting ring pipe (51) of the limiting sleeve (50) is threadedly combined with the outer wall of the first positioning pipeline (60), and the second limiting ring pipe (52) is threadedly combined with the outer wall of the second positioning pipeline (70), so that the connecting flange plate (30) and the connecting sleeve (21) are kept in a fixed state through threaded cooperation; Step S4, pre-assembly of layered positioning structure: ​ ​ ​ The connecting positioning plate (42) on both sides of the connecting plate (20) is rigidly fixed with the connecting plate (20) through the reinforcing plate (41), so that the connecting screw rod (43) on the connecting positioning plate (42) is correspondingly arranged through the protection through hole (15) of the protection plate (13) and the fixing through hole (121) of the mounting fixed plate (12) on the mounting plate (11), thereby forming a three-layer positioning frame of the protection plate (13), the connecting plate (20) and the mounting fixed plate (12); Step S5, double-nut progressive fastening: The first connecting nut (44) is pre-tightened on the connecting screw rod (43) to be attached to the connecting positioning plate (42), and then the second connecting nut (45) is tightened to be tightly matched with the mounting fixed plate (12), the assembly gap is eliminated through the progressive locking of the first connecting nut (44) and the second connecting nut (45), the high-precision positioning and fixing of the connecting flange plate (30) on the fluid pipeline (14) is realized, and finally the connecting flange plate (30) is connected to the electronic-grade hydrochloric acid feeding pipeline; Step S6, elastic adjustment: When the connecting flange plate (30) is connected to the electronic-grade hydrochloric acid feeding pipeline, the first limiting ring pipe (51) and the second limiting ring pipe (52) are rotated until the second limiting ring pipe (52) is separated from the second positioning pipeline (70), so that the connecting flange plate (30) and the connecting sleeve (21) are kept in an elastic state, and then the direction of the connecting flange plate (30) is adjusted to be aligned with the electronic-grade hydrochloric acid feeding pipeline by pushing the connecting flange plate (30).

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