Electron detector and transmission electron microscope imaging system
By employing a combination of conversion and reflection elements in the transmission electron microscope imaging system, the problems of low resolution and sensor susceptibility to damage have been solved, achieving higher resolution and a larger detection area while reducing heat dissipation requirements.
CN121394271APending Publication Date: 2026-01-23GUANGZHOU INSTITUTES OF BIOMEDICINE AND HEALTH CHINESE ACADEMY OF SCIENCES
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Patent Information
- Application Number
- CN202511454989.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-13
- Publication Date
- 2026-01-23
AI Technical Summary
Technical Problem
Traditional transmission electron microscope imaging systems suffer from low resolution, severe coupling loss, limited detection area, and easy sensor damage.
Method used
An electron beam is converted into light by a conversion element, and the light is reflected to the photosensitive element by first and second reflective elements, thus avoiding direct bombardment of the sensor by the electron beam. The two reflections reduce light loss and sensor damage.
Benefits of technology
It improves the resolution of electronic detectors and the reliability of photosensitive elements, reduces the space requirements of heat dissipation mechanisms, expands the detection area, and reduces the complexity of image processing.
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Figure CN121394271A_ABST
Abstract
The invention relates to an electron detector and a transmission electron microscope imaging system. The electron detector includes a conversion element, a first reflective element, a second reflective element, and a photosensitive element. The conversion element is used for receiving the electron beam and converting the electron beam into light. The first reflection element is used for receiving and reflecting the light emitted by the conversion element. The second reflection element is used for receiving and reflecting the light reflected by the first reflection element. And the photosensitive element is used for receiving the light reflected by the second reflecting element. According to the electronic detector, the resolution of the electronic detector is improved, and the light loss is reduced.
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