Online microenvironment pollution detection and monitoring system

Abstract

Embodiments of an active flow control system including one or more inlets and one or more outlets are disclosed. The first outlet is configured to be fluidly coupled to an inlet of a microenvironment, and the first inlet is configured to be coupled to an outlet of the microenvironment. The active flow control system comprises one or more flow control configurations; each flow control configuration corresponds to a flow control mode. The one or more traffic configurations include a configuration corresponding to a sampling pattern. The sampling mode includes injecting a neutral fluid from the first outlet to the inlet of the microenvironment and directing a mixed fluid exiting through the outlet of the microenvironment to the first inlet of the active flow control system, the mixed fluid is a combination of the neutral fluid and a fluid in the microenvironment prior to injection of the neutral fluid into the microenvironment.

Description

[0001] Cross-reference of related applications

[0002] This application claims priority to U.S. Provisional Application No. 63 / 511,419, filed June 30, 2023, and U.S. Patent Application No. 18 / 756,650, filed June 27, 2024, pursuant to Article VIII of the Patent Cooperation Treaty, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The disclosed embodiments generally relate to airborne pollution monitoring, and specifically, but not exclusively, to devices, systems, and methods for online detection and monitoring of airborne pollution in stationary and mobile microenvironments. Background Technology

[0004] Air quality and airborne molecular contamination (AMC) are becoming increasingly important in semiconductor, memory, and other similar high-tech industries (e.g., displays) as their processes evolve. In these and other industries, AMC has been identified as a major contributor to manufacturing failure rates, and its impact on manufacturing yield worsens as manufacturing process nodes shrink.

[0005] Manufacturers have been investing significant effort in monitoring and controlling facility environmental cleanliness using on-site or offline AMC monitoring equipment. Detailed studies have been implemented and improvements are underway to identify sources of contamination and preventative procedures to reduce AMC in facility ambient air. However, despite substantial efforts to control facility ambient air quality, the cleanliness of the internal microenvironments of components such as process equipment modules and mobile carriers (e.g., front-opening wafer transport cassettes (FOUPs) used as substrate / wafer transport containers in the semiconductor industry) has not been well studied.

[0006] Contamination (especially AMC contamination) is inevitably present inside the FOUP during the process; it can originate from specific process equipment / modules or from other microenvironments. Because process equipment and substrates are often enclosed in their own microenvironments, on-site facility environmental monitoring cannot detect issues associated with process equipment / modules or substrate containers (e.g., FOUPs). When process equipment / modules or FOUPs are contaminated, cross-contamination and AMC can spread along the manufacturing line, with the FOUP acting as a contamination carrier transporting AMC to multiple locations.

[0007] In most cases, process equipment modules and substrates have their own enclosed microenvironments, meaning that on-site facility environmental monitoring cannot capture AMC-related issues associated with process equipment modules or mobile carriers. Furthermore, when a process equipment module or mobile carrier is contaminated, AMC cross-contamination can occur on the manufacturing line, with the mobile carrier acting as a conduit for spreading contaminants to various locations. Therefore, even if AMC is later found in a mobile carrier or process equipment module, tracing the source of contamination becomes extremely difficult. Attached Figure Description

[0008] The following figures illustrate a non-limiting and non-exhaustive embodiment of the invention, wherein, unless otherwise specified, the same element symbols refer to the same parts in each view.

[0009] Figures 1A to 1B It is a diagram illustrating an embodiment of a process module or process equipment having a front-opening wafer transfer box (FOUP) and a process for purging the FOUP as it is loaded onto the process equipment in a microenvironment, such as a FOUP.

[0010] Figures 2A to 2B This is a diagram illustrating an embodiment of an offline sampling and analysis method for detecting airborne molecular contamination in a microenvironment such as FOUP.

[0011] Figures 3A to 3B This is a diagram illustrating an embodiment of an online pollution monitoring system for microenvironments.

[0012] Figures 4A to 4E This is a diagram of a further embodiment of an online AMC monitoring system for microenvironments.

[0013] Figures 5A to 5C This is a chart of an example of a flow profile that can be applied to a pattern used by a pollution monitoring system.

[0014] Figure 6 This is a block diagram of an embodiment of an online pollution analyzer.

[0015] Figure 7A This is a diagram illustrating an embodiment of an online pollution monitoring system based on a loading port for use in mobile microenvironments.

[0016] Figure 7B These are a pair of illustrated embodiments of a conventional loading port purging system for mobile microenvironments and a loading port-based online pollution monitoring system.

[0017] Figures 8A to 8D This is a process diagram illustrating an embodiment of the interaction between different components of an online pollution monitoring system based on a loading port for use in a mobile microenvironment.

[0018] Figure 9This is a diagram illustrating an embodiment of the interaction between a pollution analyzer and multiple loading port units in a loading port-based online pollution monitoring system for mobile microenvironments.

[0019] Figures 10A to 10C This is a block diagram of an embodiment of the loading port unit.

[0020] Figures 11A to 11B This is a block diagram of an embodiment of an active flow control system that can be used in a loading port-based online pollution monitoring system for mobile microenvironments.

[0021] Figures 12A to 12B They are used for Figures 11A to 11B A block diagram illustrating an embodiment of the inspection mode flow path of an active flow control system is shown in the figure.

[0022] Figures 13A to 13B They are used for Figures 11A to 11B A block diagram illustrating an embodiment of the sampling mode flow path of an active flow control system is shown in the figure.

[0023] Figures 13C to 13D Because Figures 13A to 13B The diagram shows an example of pollution measurement results obtained through sampling, and in Figures 13A to 13B The graph shows the flow profile applied during the sampling period.

[0024] Figures 14A to 14B They are used for Figures 11A to 11B A block diagram illustrating an embodiment of the purge mode flow path of an active flow control system.

[0025] Figures 15A to 15B They are used for Figures 11A to 11B A block diagram illustrating an embodiment of the cleaning mode flow path of an active flow control system is shown in the figure.

[0026] Figure 16 This is a block diagram of the integrated loading port unit.

[0027] Figure 17 This is a diagram of an online pollution monitoring system based on a loading port for use in mobile microenvironments. Detailed Implementation

[0028] Embodiments of devices, systems, and methods for online monitoring of contaminated environmental conditions in microenvironments are described. Specific details are described to provide an understanding of the embodiments; however, those skilled in the art will recognize that the invention can be practiced without one or more of the details described or using other methods, components, materials, etc. In some instances, well-known structures, materials, or operations have not been shown or described in detail, but nonetheless, they are covered within the scope of the invention.

[0029] Throughout this specification, references to "one embodiment" or "an embodiment" indicate that a described feature, structure, or characteristic may be included in at least one of the said embodiments, such that the appearance of "in one embodiment" or "in an embodiment" does not necessarily refer to all the same embodiment. Furthermore, specific features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. [Introduction]

[0030] The following describes an embodiment of a loading port-based online contamination monitoring system for microenvironments. Existing loading port systems have a single function: they are used to purge microenvironments for cleaning purposes, cleaning the microenvironment by providing a large-volume purge of a neutral fluid, such as clean dry air (CDA) or nitrogen (N2), to remove contaminants. Existing loading port systems do not provide monitoring capabilities to assess contamination within the purged microenvironment.

[0031] The described embodiment is an online microenvironment pollution monitoring system incorporating a next-generation flow control system and an analyzer array. In addition to the purging function performed by existing onboard systems, the disclosed measurement and monitoring system is also capable of monitoring contaminant levels within the microenvironment. It provides several additional capabilities, including sampling capabilities to sample (i.e., recover / extract) contaminants from within the microenvironment; analytical capabilities to detect contaminants and general environmental conditions (e.g., temperature and humidity) within the microenvironment using an analyzer array; self-checking capabilities, through which the system can periodically or through programmed actions self-check whether contaminant residues within the system are below control limits; and self-cleaning capabilities, wherein the system can periodically or through programmed actions self-clean the entire system to reduce contaminant residues within the system.

[0032] Figures 1A to 1B Together, embodiments of the process equipment module 100 and embodiments of purging operations for the microenvironments used with the process equipment module are described. In the illustrated embodiments, the process equipment module 100 includes a loading port 102 on which one or more microenvironments 104 (in this embodiment, movable wafer carriers (e.g., FOUPs)) can be loaded; the illustrated embodiments show a loading port capable of accommodating four FOUPs 104, but in other embodiments, the loading port may accommodate a different number of FOUPs than shown. FOUPs are only one possible microenvironment; other microenvironments are possible in other embodiments, as explained below. In addition to the loading port 102, the process equipment module 100 also includes three chambers: a front interface 106 adjacent to the loading port 102, a process loading lock chamber 108 adjacent to the front interface 106, and a process chamber 110 adjacent to the loading lock chamber 108. The process chamber 110 is where relevant manufacturing steps are performed on the items carried in the FOUPs 104.

[0033] Figure 1B An embodiment of the purging operation used by the process equipment module 100 is described. In step 112, a movable carrier / FOUP 104 is docked to the loading port 102, and the bottom air inlet and outlet of the movable carrier / FOUP 104 are fluidly coupled to the mating inlet / outlet in the loading port. The loading port unit (LPU) housed below the FOUP in the loading port 102 then purges a neutral gas, such as nitrogen (N2) or clean dry air (CDA), into the FOUP to flush air and / or contaminants from inside the FOUP to the exhaust outlet below the loading port, thereby maintaining the microenvironment inside the FOUP at the desired cleanliness level. In step 114, as the front door of the FOUP is opened, purging continues, and the internal wafer is transferred to other chambers of the process equipment module—front interface 106, loading lock chamber 108, and process chamber 110—for the desired manufacturing steps. During the required manufacturing steps, purging continues until step 116, when the wafer returns to the FOUP, the FOUP's doors are closed, and the FOUP is uncoupled from the loading port. CDA purging stops after the FOUP is uncoupled and moved to the next process equipment module. Direct monitoring of the cleanliness of the microenvironment, such as the FOUP and process equipment / modules, is not well-developed.

[0034] Figures 2A to 2B This illustrates an example of offline sampling and measurement of the environment within the microenvironment of a FOUP, for instance. Figure 2A This section explains the methods for both offline (also known as off-process) and on-site methods. Figure 2B This describes a method that works offline but in the field. Figure 2A This describes an embodiment of a current process 200 used to measure and understand contamination and other conditions within the microenvironment of a FOUP. In this method, a sample is manually collected from the FOUP 202 while it is positioned at the loading port of process equipment 204. The collected sample is then taken to an off-site laboratory 206, where laboratory instruments can be used to analyze the chemical composition of the sample and other environmental conditions such as temperature and humidity. This method is time-consuming and yields limited data from only a small number of samples, which often fail to capture problematic FOUPs—that is, FOUPs whose internal environment does not meet specifications. Therefore, tracing the source of contamination is virtually impossible.

[0035] Figure 2BThis describes another embodiment of process 250 using an on-site contamination analysis system—such as an AMC analysis system for an on-site FOUP only. In process 250, when the wafer is completed in process equipment 204 and returned to its corresponding microenvironment, such as FOUP 202, the normal process sequence would require bringing FOUP 202 directly to process equipment 252 for the next manufacturing step, as shown at the top of the figure. However, in this process, the FOUP is instead pulled out of its normal process sequence and sent to an on-site FOUP environmental measurement, analysis, and monitoring system 254 for analysis of the air inside the FOUP.

[0036] Although the contamination analysis system 254 can serve as an on-site monitoring tool, it is an off-process monitoring method because FOUP 202 no longer follows its normal process sequence. Since the FOUP must be removed from its normal manufacturing sequence, this introduces additional uncertainty due to interference with the normal process sequence. Furthermore, in this method, the contamination analysis system 254 has limited capability, meaning it can only screen a limited number of FOUPs, and therefore can significantly impact process throughput. Even if the contamination analysis system 254 could increase its screening capability, it would still add an extra step to manufacturing, which could further reduce process throughput. Therefore, this method is limited to screening FOUPs. It is not intended for online measurement and monitoring of the microenvironment within the FOUP.

[0037] Figures 3A to 3B Examples of systems and methods for online measurement and monitoring in microenvironments are described. Figure 3A This describes an embodiment of a system and method 300 for sampling and analyzing the environment within a microenvironment 302. System 300 includes an active flow control system 304, a pollution analysis system 306, and a control center 314, all working together to analyze and monitor the environment within the microenvironment 302. In the illustrated embodiment, the microenvironment 302 is, for example, a FOUP mobile vehicle, but other embodiments may use other types of microenvironments (e.g., see [link to documentation]). Figure 3B ).

[0038] Microenvironment 302 includes a fluid inlet 302i and a fluid outlet 302o. The illustrated embodiment of microenvironment 302 has one fluid inlet and one fluid outlet, but other embodiments may have multiple inlets, multiple outlets, or both, and in yet another embodiment, the number of inlets need not be the same as the number of outlets. Microenvironment 302 is fluidly coupled to active flow control system 304 such that microenvironment 302 and flow control system 304 can exchange fluids: inlet 302i is coupled to the outlet of active flow control system 304 via fluid line 310, and outlet 302o is coupled to the inlet of active flow control system 304 via fluid line 308.

[0039] The active flow control unit 304 is a loading port unit (LPU) fluidly coupled to the microenvironment 302, enabling fluid exchange between the microenvironment 302 and the flow control system 304: inlet 302i is coupled to outlet 304o via fluid line 310, and outlet 302o is coupled to inlet 304i via fluid line 308. The active flow control system 304 is also fluidly coupled to the contamination analysis system 306 via fluid line 312.

[0040] The active flow control module / system 304 can implement various modes, is programmable, and can be controlled locally or remotely by the control center 314. The following text combines... Figures 4A to 4E Various modes and their programmability are discussed. The active flow control system is used as a cleaning and / or rinsing module / system, and in some modes, fluid is injected into microenvironment 302 and samples collected from within microenvironment 302 are guided to contamination analysis system 306. The active flow control module / system 304 may be part of an existing process module, for example, a loading port of process equipment / module on which a mobile carrier will be placed for the next process step.

[0041] The contamination analysis system 306 is fluidly coupled to the outlet of the active flow control system 304 via fluid line 312, enabling it to measure and monitor environmental conditions, such as airborne molecular contamination (AMC), in the fluid drawn from the microenvironment 302 into the contamination analysis system by the active flow control system. In the illustrated embodiment, the active flow control system 304 and the contamination analysis system 306 are separate units, but in other embodiments, the flow control unit 304 and the contamination analysis system 306 may be integrated into a single unit. In one embodiment, for example, Figure 16 The active flow control system can be integrated with the pollution analysis system 306, an embodiment of which is described in... Figure 6 As shown in the diagram. Programmable flow profiles can be used to obtain optimal results for target outcomes in each operating mode (e.g., optimal sampling recovery for contamination analysis), as illustrated below. Figures 4A to 4E Discussion. The following text combines... Figure 6 An embodiment of a pollution analysis system suitable for use as pollution analysis system 306 is described.

[0042] Control center 314 is communicatively coupled to microenvironment 302, active flow control system 304, and contamination analysis system 306. Additionally, contamination analysis system 306 can be directly communicatively coupled to active flow control system 304. In the illustrated embodiment, all communication links are wireless; however, in other embodiments, communication links may be wireless, wired, or a combination of wired and wireless, and not all communication links need to be of the same type. Through these communication links, control center 314 can receive and transmit data from and to microenvironment 302, active flow control system 304, and contamination analysis system 306. Contamination analysis system 306 can also communicate directly or via active flow control 304 with remote control center 314 in real time to report measurement results, as shown in the figure. Contamination analysis system 304 can also communicate directly with active flow control system 304 to, in particular, regulate the flow rate through fluid line 312.

[0043] For data received from the contamination analysis system 306 at the control center 314, when the contaminant concentration exceeds the cleanliness criteria (which may be left over from previous processes), the control center 314 may transmit a control signal to the system to trigger a response action—for example, suspending the process on the sample (e.g., wafer or mask) inside the corresponding mobile carrier—to prevent further contamination of the following process equipment / modules.

[0044] In embodiments of the sampling or purging mode of system 300, the active flow control system 304 injects a neutral fluid into the microenvironment 302 at a flow rate A via fluid line 310. As used herein, a neutral fluid is a fluid or combination of fluids that is not expected to chemically react with contaminants and / or materials present in the microenvironment. In one embodiment, the neutral fluid may be a chemically inert gas, such as nitrogen (N2), but in other embodiments, it may be a gas or combination of gases that is not chemically inert but is not expected to chemically react with contaminants or materials (e.g., silicon wafers, metals, and photoresists), such as clean dry air (CDA). In the embodiments described herein, the neutral fluid is a gas, but in other embodiments, the neutral fluid may be a liquid or a combination of liquid and gas.

[0045] The fluid injected into microenvironment 302 exits the microenvironment at a flow rate B through fluid line 308 and is directed to active flow control system 304. The fluid exiting through fluid line 308 is a mixed fluid, i.e., a mixture of the injected neutral fluid and the fluid already present in the microenvironment before the injection of the neutral gas. If any contaminants were present in the microenvironment before the injection of the neutral gas, these contaminants are carried out of the microenvironment in the mixed fluid. Active flow control 304 then directs some or all of the fluid entering through fluid line 308 to fluid line 312 at a flow rate C, where the fluid travels to contamination analysis system 306 for analysis. Flow rates A, B, and C do not need to be the same due to fluid leakage at various locations—e.g., at the gate through which the wafer is inserted and removed from the FOUP. In one embodiment, flow rate A will be greater than flow rate B, and flow rate B will be greater than flow rate C. However, in other embodiments, the flow rates do not need to follow this pattern. For example, in embodiments where the active flow control element 304 can inject additional fluid into the system (see, for example, see...). Figure 11B The flow rate C can exceed one of the two flow rates A and B. In another embodiment, the contamination analysis system 306 can be implemented, for example, by using a pump (see, for example, see...). Figure 6 The flow rate C can be adjusted to be different from or the same as the flow rates A and B. The active flow control 304 may have additional modes besides the sampling and purging modes, as described below.

[0046] Figure 3B Another embodiment of the online measurement and monitoring system 350 is described. System 350 is similar to system 350 in most respects: it includes an LPU / active flow control system 304, a contamination analysis system 306, and a control center 314, all working together to analyze and monitor the environment within the microenvironment. The main difference between system 300 and 350 is the type of microenvironment: in system 350, the microenvironment 352 is a vehicle reservoir rather than a FOUP. Like FOUP 302, vehicle reservoir 352 has at least one inlet and at least one outlet coupled to the active flow control system 304. The active flow control system includes at least modes for sampling and flushing or ventilating the interior of the microenvironment. The active flow control system 304 may be part of an existing reservoir setup or an external add-on system, and may be programmable and controllable locally or remotely by a control center to perform the same functions for the reservoir as for the FOUP, as discussed below.

[0047] Figures 4A to 4EFurther embodiments of a system for online contamination analysis and monitoring of conditions in a microenvironment are described. In the illustrated embodiments, the microenvironment is a front-opening wafer transport pod (FOUP) for transporting wafers in semiconductor manufacturing; however, in other embodiments, the microenvironment need not be a FOUP. In some embodiments, the microenvironment may be another type of mobile wafer carrier besides a FOUP, such as, but not limited to, a wafer transport pod, FOUP, FOSB, PGV, wafer cassette, wafer SMIF, OHT, OHB, OHS, ZFS, AMR, AGV, etc. In other embodiments, the microenvironment may be a mask carrier, such as, but not limited to, an EUV wafer transport pod, RSP, photomask SMIF, mask wafer transport pod, or mask package. In yet another embodiment, the microenvironment may be a carrier repository, including, but not limited to, repositories for storing mobile carriers or other materials requiring environmental monitoring and control. Some embodiments of the microenvironment may be mobile and can be moved around within a facility, such as a factory; however, in other embodiments, it need not be mobile.

[0048] Figures 4A to 4E The embodiments described herein are substantially similar to systems 300 and 350 discussed above, and include similar main components: an LPU / active flow control system 404, a pollution analysis system 406, and a control center 412, all of which work together to analyze and monitor the environment within the microenvironment 402. Figures 4A to 4E In the embodiments:

[0049] ● Microenvironment 402 includes at least one inlet for an inflow (in liquid or gas phase) and at least one outlet for an outflow (also in liquid or gas phase). The microenvironment can be any volume that is substantially closed except for its inlets and outlets. In one embodiment, the number of inlets is equal to the number of outlets, but in other embodiments, they need not be equal.

[0050] ● The Load Port Unit (LPU) / Flow Control System 404 is coupled to the inlet and / or outlet of the microenvironment to generate an active flow in liquid or gas phase, thereby allowing contaminants inside the microenvironment to be carried out of the microenvironment through the outlet when the active flow is input to the inlet of the microenvironment. Figures 4A to 4B In embodiments, the flow control device 404 may be an integral system used as part of a conventional ventilation / recirculation flow operation / process in a microenvironment (e.g., see...). Figure 11B ).exist Figures 4C to 4E In some embodiments, the flow control device may also be an additional active flow control system or adapter module coupled between the microenvironment and, for example, the existing flow control settings of the LPU in an existing process module, to provide additional flow control functionality without adversely affecting the existing operation / process of the microenvironment (e.g., see [link]). Figure 11A ).

[0051] ● Flow control devices can be designed to provide / realize different flow profiles in a microenvironment (e.g., flow profile A, flow profile B, flow profile C, etc.). Figures 5A to 5C (as shown in the image).

[0052] ● Pollution analysis device 406, which is fluidly coupled to the microenvironment, such as Figure 4A The image shows direct fluid coupling to its outlet port, or as shown in the diagram. Figures 4B to 4E The image shows an LPU / flow control device coupled to an exit port of the microenvironment.

[0053] ● A control center 412 is wired or wirelessly coupled to the microenvironment 402, the flow control system 404, and / or the pollution analysis system 406. The control center can communicate with each component to receive data reports and information regarding the operation of each system. The control center can also send control signals to each component to control aspects of its operation. For example, if one or more specific pollutants measured by the pollution analysis system exceed a threshold concentration, the control center can determine a corresponding action, such as sending an alert to the user or suspending the manufacturing process at the relevant station.

[0054] ● A wired or wireless communication link between the contamination analysis system 406 and the LPU / flow control system 404. This communication link allows the two to exchange data and control signals. In some embodiments, the contamination analysis system 406 can also be used to regulate the flow rate leaving the microenvironment or the LPU / flow control system.

[0055] Figures 4A to 4E The embodiments described herein have at least the above similarities, but as discussed below, their main difference lies in which active flow control device (complete or additional) is included and the fluid coupling between the components.

[0056] Figure 4A This describes one embodiment of system 400, which includes a microenvironment 402, a complete LPU / flow control device 404, and a contamination analysis device 406, all communicatively coupled to a control center 412. The contamination analysis system 406 is also directly communicatively coupled to the LPU / flow control device 404. The inlet of the microenvironment is fluidly coupled to the inlet of the LPU / flow control device 404 via fluid line 408, and the outlet of the microenvironment is fluidly coupled to the inlet of the contamination analysis device 406 via fluid line 410.

[0057] Figure 4BAn embodiment of system 420 is described, comprising a microenvironment 402, a complete LPU / flow control device 404, and a contaminant analysis device 406, all communicatively coupled to a control center 412. The contaminant analysis system 406 is also directly communicatively coupled to the LPU / flow control device 404. The inlet of the microenvironment is fluidly coupled to the outlet of the LPU / flow control device via fluid line 422, the outlet of the microenvironment is fluidly coupled to the inlet of the LPU / flow control device via fluid line 424, and the outlet of the LPU / flow control device is fluidly coupled to the inlet of the contaminant analysis system via fluid line 426.

[0058] Figure 4C This describes one embodiment of system 440, which includes a microenvironment 402, a load port unit (LPU) 404 comprising an existing simple flow system 404a and an additional active flow control system 404b, and a contamination analysis device 406, all communicatively coupled to a control center 412. The contamination analysis system 406 is also directly communicatively coupled to the LPU / flow control device 404. The inlet of the microenvironment is fluidly coupled to the outlet of the active flow control system 404b via fluid line 444, and the outlet of the microenvironment is fluidly coupled to the inlet of the active flow control system 404b via fluid line 446. The existing simple flow control system 404a has an outlet fluidly coupled to another inlet of the active flow control system 404b via fluid line 442, and another outlet of the active flow control system is fluidly coupled to the inlet of the contamination analysis system via fluid line 448.

[0059] Figure 4D This describes one embodiment of system 460, which includes a microenvironment 402, a load port unit (LPU) 404 comprising an existing simple flow system 404a and an additional active flow control system 404b, and a contaminant analysis device 406, all communicatively coupled to a control center 412. The contaminant analysis system 406 is also directly communicatively coupled to the LPU / flow control device 404. The inlet of the microenvironment is fluidly coupled to the outlet of the active flow control device 404b via fluid line 464, and the outlet of the microenvironment is fluidly coupled to the inlet of the active flow control device via fluid line 466. The existing simple flow control system 404a has an outlet fluidly coupled to another inlet of the active flow control device via fluid line 462. Another outlet of the active flow control device 404b is fluidly coupled to the inlet of the existing simple flow system via fluid line 468a and to the inlet of the contaminant analysis system via fluid line 468b.

[0060] Figure 4EAn embodiment of system 480 is described, comprising a microenvironment 402, a load port unit (LPU) 404 comprising an existing simple flow system 404a and an additional active flow control system 404b, and a contamination analysis device 406, all communicatively coupled to a control center 412. The contamination analysis system 406 is also directly communicatively coupled to the LPU / flow control device 404. The inlet of the microenvironment 402 is fluidly coupled to the outlet of the active flow control device via fluid line 484, and the outlet of the microenvironment is fluidly coupled to the inlet of the active flow control device 404b via fluid line 486. The existing simple flow control system 404a has an outlet fluidly coupled to another inlet of the active flow control device via fluid line 482. Another outlet of the active flow control device 404b is fluidly coupled to the inlet of the existing simple flow system via fluid line 488, and another outlet of the existing simple flow system is fluidly coupled to the inlet of the contamination analysis system 406 via fluid line 490.

[0061] LPU / Active Flow Control Devices—Whether Figures 3A to 3B The integrated embodiments shown in 4A to 4B and 16 are still Figures 4C to 4E The additional embodiments shown (i.e., flow control systems attached to existing simple flow systems) can all operate in one or more of the following modes:

[0062] ● Cleaning Mode. In this mode, as a self-cleaning function, the active flow control device flushes a neutral fluid (e.g., nitrogen (N2) or clean dry air (CDA)) through itself to remove any contaminants that may be present in the active flow control device. For example, contamination may have occurred after running a previous sampling mode. In other embodiments, the cleaning mode may include additional or different functionalities.

[0063] ● Check Mode. In check mode, the active flow control device uses a contaminant analysis device to check the contamination level within itself and / or the fluid lines to the contaminant analysis device as a baseline / background cleanliness to ensure that there is no contamination within the active flow control device itself that could affect measurements of samples obtained from the microenvironment using the sampling mode. In one embodiment, the check mode may be run after the cleaning mode to check whether the cleaning mode has effectively removed existing contamination from the active flow control device. In another embodiment, alternatively or additionally, the check mode may be run before the sampling mode. In other embodiments, the check mode may include additional or different functionality.

[0064] ● Sampling Mode. In sampling mode, the active flow control device samples the interior of the microenvironment by guiding an inflow of neutral fluid (in gas or liquid phase) into the inlet of the microenvironment, guiding it into the interior of the microenvironment, and guiding the resulting effluent from the outlet of the microenvironment to the contamination analysis device. In other embodiments, the sampling mode may include additional or different functionalities.

[0065] ● Purge Mode. In purge mode, the active flow control device directs neutral fluid into the microenvironment to remove any contaminants present. In one embodiment, the purge mode may include a normal purge mode at a standard loading port and a continuous purge mode. In other embodiments, the purge mode may include additional or different functionalities.

[0066] In addition to the listed operating modes, other embodiments of the active flow control device may also include additional operating modes, and no given operating sequence needs to use all available modes. Figures 4A to 4E In some embodiments, the modes themselves and their sequences can also be programmable. The operational characteristics of each mode—for example, in one embodiment, its flow rate, its flow rate profile, and its duration—can be programmed. A particular operation comprises a number of modes executed in a sequence; in one embodiment, the characteristics of each mode can be programmed to be constant during a given operation, but in other embodiments, the characteristics of each mode can change between the occurrence of the mode during the mode and / or within a given operation (e.g., see...). Figures 5A to 5C Each mode, when programmable, may also include functions beyond those described above. Commands can be sent from the control center to the LPU using software such as, but not limited to, Equipment Automation Programs (EAPs) to execute different flow profiles for each mode (inspection mode, sampling mode, purging mode, cleaning mode, etc.).

[0067] In addition to the programmability of the operational characteristics of each mode, the number and type of modes executed in the operation, as well as their sequence, can also be programmable. For example, in one embodiment, a four-mode operation may include a cleaning mode, an inspection mode, a sampling mode, and a purging mode executed in the stated order, but different four-mode operations may change the sequence and execute these modes in a different order. The total number of modes in a given operation can be varied; that is, an embodiment of the operation may use all available modes or fewer than all available modes. Moreover, the mode sequence may include more than one example of any mode. For example, an embodiment of an operation with a six-mode sequence may include more than one sampling mode, having the following sequence: cleaning mode, inspection mode, sampling mode, purging mode, sampling mode, purging mode. Such a sequence allows the system to check the validity of the purging mode.

[0068] In one embodiment, a programmable sampling step can be inserted into an existing flow control process sequence to achieve optimal recovery of contaminants carried from the microenvironment's outlet to the contaminant analysis device when generating an active flow into the microenvironment's inlet. In another embodiment, the programmable sampling flow step and flow control can be part of an additional flow control device / module / adapter. Programmable sampling flow allows for significant flexibility in sampling and rinsing / cleaning.

[0069] ● Different flow profiles during the inflow period can be dynamically programmed for different microenvironments to allow / achieve effective collection and analysis to determine the original contamination concentration within the microenvironment.

[0070] ● During the pollutant analysis period, the flow rate can be fixed or dynamically adjusted at different flow profiles (e.g., see...). Figures 5A to 5C ).

[0071] ● An additional flushing flow step can be inserted into the flow control device to flush / clean all connecting pipes / components inside the flow control device, as well as the piping connections to the contaminant analysis device, thus avoiding cross-interference with the next contaminant measurement.

[0072] ● The cleanliness analysis step of the contaminant analysis equipment is used to check and confirm that there is no background contaminant interference inside the connecting pipes / assemblies of the flow control equipment and the connecting pipes / assemblies between the output of the microenvironment and the contaminant analysis equipment before the sampling and measurement steps of the microenvironment.

[0073] ● Different flow profiles for dynamically programmed flushing steps can be set for different microenvironments.

[0074] ● The microenvironment can be, but is not limited to, mobile vehicles, vehicle storage warehouses, process equipment, cabinet enclosures, or storage rooms for process equipment, instruments, chemical materials, etc.

[0075] ● Flow control equipment can be an existing module / system attached to production process equipment / module or an external system coupled to the microenvironment, such as, but not limited to, nitrogen (N2) feeders, loading port flushing systems, and gas ventilation systems for carrier storage facilities.

[0076] ● Software control sequences and / or additional hardware modifications and / or additional modules can be added to existing flow control devices to enable additional programmable sampling flow steps from microenvironments to pollutant analysis devices for concentration measurement.

[0077] Figures 5A to 5C The instructions are available for use. Figures 4A to 4EExamples of embodiments of flow profiles programmed in some or all operating modes—for example, inspection mode, cleaning mode, sampling mode, purging mode, and other modes not listed herein. The graphs illustrate flow rate profiles over time, but in other embodiments, alternatively or additionally, profiles of quantities other than flow rate can be programmed. Figure 5A This section describes constant flow velocity profiles, where different constant flow velocities are applied to different microenvironments. Figure 5B This illustrates linearly increasing flow velocities, with different velocities applied to different microenvironments. Other embodiments may also utilize non-linearly increasing profiles, linearly decreasing profiles, or profiles that are non-linearly increasing or decreasing. Figure 5C This illustrates a more complex profile where the flow velocity first increases, then remains constant, and then decreases. Furthermore, this profile can be applied differently to different microenvironments. In general, any arbitrary velocity profile can be applied to a microenvironment, to different microenvironments (e.g., applying different flow profiles to a FOUP rather than a vehicle storage tank), or to different examples of the same microenvironment (e.g., different examples of the same FOUP).

[0078] Figure 6 This description can be used in online environmental monitoring systems (e.g.) Figures 3A to 3B Examples of online pollution analysis systems 600 (as shown in 4A to 4E) are illustrated herein. System 600 is sometimes referred to herein as an airborne molecular pollution (AMC) system, but it is not limited to detecting only AMCs. In addition to AMCs, system 600 can also measure and monitor other types of pollution and other physical and chemical properties within the microenvironment. In one embodiment, system 600 can detect and measure pollution, including but not limited to individual volatile organic compounds (VOCs), total VOCs, individual acids, total acids, individual bases, amines, and particles; simultaneously, embodiments of system 600 can detect and measure other properties such as temperature and humidity. The pollution analysis system can combine various analyzers or be a single instrument and can be coupled to a microenvironment and / or flow control system. In various embodiments:

[0079] ● The pollutant analysis equipment can be connected to multiple microenvironment and / or flow control systems to monitor different microenvironment settings.

[0080] ● Monitoring of different microenvironments can be scheduled / controlled locally at the pollutant analysis equipment, or remotely scheduled / controlled by the control center.

[0081] ● The contaminant analysis equipment can perform a self-rinsing cleaning flow between measurements of each microenvironment to ensure the cleanliness of its background without interfering with the measurement of the microenvironment.

[0082] ● The contaminant analysis equipment can also perform a complete cleanliness analysis of the connecting pipes / components to check and confirm that there is no background contaminant interference before the sampling and measurement steps of the microenvironment.

[0083] ● The contamination analysis system can have a one-to-one or one-to-many correspondence with the manifold design used to connect to multiple systems, and can be programmable to communicate with remote control and data servers (i.e., such as...). Figures 3A to 3B Monitoring is performed by the control center shown in 4A to 4E or by assignments from local analyzer operations.

[0084] ● Can be directed to remote control and data servers (i.e., such as...) Figures 3A to 3B The control center shown in 4A to 4E reports real-time monitoring results (e.g., test data from sampling or inspection modes) to determine whether the active flow control unit (LPU) with the same loading port needs further analysis or can be switched to monitor another LPU.

[0085] The pollution analysis system 600 is housed within a housing 602, which may be fixed or movable. For example, the housing 602 may be a fixed or movable cabinet. In another embodiment, the pollution analysis system 600 may be integrated with a flow control system (e.g., Figure 16 The flow control system shown in the diagram is integrated. System 600 includes a manifold 604 having an inlet fluidly coupled to an individual sampling tube from the sampling tube bus 603 and an outlet fluidly coupled to a pump 605, which is particularly useful for controlling the flow rate entering the system through the tubes in the tube bus 603. Pump 605 includes one or more outlets fluidly coupled to various analyzers via a tube 606. Tube 606 includes a valve 607 such that the output from the pump can be selectively directed to any analyzer or combination of analyzers. Tube 606 is neutral to all AMC compounds and does not attract AMC compounds. In one embodiment, it may be a passivated or coated metal tube or an inert plastic tube (e.g., PFA or Teflon).

[0086] Analyzers 608 to 630 may include sensors or sensor arrays for their specific type of detection, but in some embodiments, they may also include additional components, including gas chromatographs, pre-concentrators, traps, filters, valves, etc. Various analyzers may be used in different embodiments, including chemical analyzers (VOCs, acids, bases, etc.), particle counters, humidity sensors, temperature sensors, ion analyzers, dopant analyzers, etc. Among other things, and not limited to the analyzers listed below, embodiments of the contamination analysis system 600 may include one or more of the following types of analyzers:

[0087] ● An analyzer used to collect and analyze the concentration of a specific (individual) volatile organic compound (VOC) (e.g., IPA) and / or to detect the total concentration of VOCs.

[0088] ● An analyzer used to collect and analyze the concentration of specific individual acid compounds (e.g., HF, H2SO4, HCl, etc.) and / or to detect the total concentration of acids.

[0089] ● An analyzer used to collect and analyze the concentration of specific (individual) alkaline compounds (e.g., NH4OH, NaOH, etc.) and / or to detect the total concentration of alkali.

[0090] ● An analyzer used to collect and analyze the concentration of specific (individual) sulfide compounds and / or to detect the total concentration of sulfides.

[0091] ● An analyzer used to collect and analyze the concentration of specific (individual) amine compounds and / or ammonia (NH3) and / or to detect the total concentration of amines and / or ammonia.

[0092] ● Analyzers that connect to manifold equipment to detect airborne particles or aerosol counts.

[0093] ● An analyzer used to detect the humidity of a sample.

[0094] ● An analyzer used to detect the temperature of a sample.

[0095] ● An analyzer for detecting fluorinated compounds, such as chemical coolants (e.g., fluorocarbon compounds (CxF)) or dry etching chemicals (e.g., CxFy), and / or for detecting the total concentration of chemical coolants (e.g., fluorocarbons) or the total concentration of dry etching agents.

[0096] ● An analyzer used to collect and analyze the concentration of specific (individual) anions (negatively charged ions) (e.g., F-, Cl-, PO43-, NOx-, SO22-) and / or to detect the total concentration of anions.

[0097] ● An analyzer used to collect and analyze the concentration of specific (individual) cations (positively charged ions) (e.g., NH4+) and / or to detect the total concentration of cations.

[0098] ● An analyzer used to collect and analyze the concentration of specific (individual) metal ions and / or detect the total concentration of metal ions.

[0099] ● An analyzer used to collect and analyze the concentration of specific (individual) silicon dopant ions and / or detect the total concentration of dopants.

[0100] Analyzers 608 to 628 are communicatively coupled to a control and communication system 662, which integrates the operation of all analyzers and devices included in device 600. The control and communication system 662 is used to receive, process, and / or interpret data received from analyzers 608 to 628, and each analyzer and its associated valve 607 can be controlled by the control and communication system for sample analysis. In one embodiment, the hardware of the control and communication system 662 may be a general-purpose computer, which includes a processor, memory, storage devices, etc., and software having instructions that cause the listed hardware to perform the required functions. However, in other embodiments, the control and communication system 662 may be a special-purpose computer (e.g., an application-specific integrated circuit (ASIC)) that also has software having instructions that cause it to perform the required functions.

[0101] The control and communication system 662 can be wired or wirelessly coupled to one or more process equipment modules, and / or communicatively coupled to a remote data / control server (e.g., Figures 3A to 3B (and the control center shown in 4A to 4E), the remote data / control server collects data from system 600 and can control each system 600 and its fluidly and communicatively coupled process equipment. Therefore, system 600 can receive and transmit real-time test result updates or receive operational commands from the server, such as for specific sampling channels (i.e., specific individual sampling tubes) for performing online AMC analysis.

[0102] Figure 7A This describes an embodiment of a system and method for online contamination monitoring on existing FOUP loading port units (LPs) and / or N2 feeder systems in process equipment. FOUP 702 can be transported between different LPUs—for example, LPUs 708 or 710 on process equipment 704, and LPUs 712 and 714 on process equipment 706—via an automated guided vehicle (AGV) or overhead transport system (OHT), which can be controlled remotely by a remote control / data server (e.g., Figures 3A to 3B (and the control center shown in 4A to 4E) control. Each LPU is fluidly coupled to the contaminant analysis system 726 via a fluid line: LPU 708 is fluidly coupled to system 726 via fluid line 708, LPU 710 is coupled to system 726 via fluid line 720, and so on. Therefore, in this embodiment, there is a many-to-one correspondence between LPUs and the contaminant analysis system, that is, multiple LPUs share the contaminant analysis system. The AMC analysis system can communicate wirelessly or wiredly with the LPUs or the control center or both for AMC monitoring commands. The measurement results of the AMC analyzer can be reported to the LPUs, the control center or both for corresponding process control. The following is combined with Figure 9An example of the operation of a system in which multiple LPUs share a contamination analysis system is described.

[0103] Figure 7B This section compares an existing LPU system with an embodiment of an LPU used for online environmental monitoring. As explained above, an existing LPU can purge the interior of a FOUP, but does not otherwise measure or control contamination within the FOUP. The top of the figure shows an existing purging operation without environmental monitoring. In step 112, a movable carrier / FOUP 104 is docked to a loading port 102, with the bottom air inlet and outlet of the movable carrier / FOUP 104 fluidly coupled to mating inlets / outlets in the loading port. The loading port unit (LPU) housed below the FOUP in loading port 102 then purges nitrogen (N2) or clean dry air (CDA) into the FOUP to flush air and / or contaminants from inside the FOUP to an exhaust outlet below the loading port, thereby maintaining the internal microenvironment at the desired cleanliness level. In step 114, as the front door of the FOUP is opened, purging continues, and the internal wafer is transferred to other chambers of the process equipment module—in the sequence of front interface 106, loading lock chamber 108, and process chamber 110—for the desired manufacturing steps. Purging continues as the desired manufacturing steps are performed until step 116, when the wafer returns to the FOUP, the FOUP door is closed, and the FOUP is uncoupled from the loading port. After the FOUP is uncoupled and moved to the next process equipment module, CDA purging stops.

[0104] The top of the diagram shows the use of the above text for... Figures 4A to 4E The described sequence of operations performs online environmental monitoring. In the illustrated sequence, at step 702, as the FOUP approaches the loading port, the LPU in the loading port performs its inspection mode. At step 704, after the FOUP has been docked to the loading port, the LPU performs its sampling mode. After completing the sampling mode, at step 708, the LPU performs its purge mode, in which the LPU injects a neutral gas, such as nitrogen (N2) or clean dry air (CDA), into the FOUP to purge air and / or contaminants from inside the FOUP to an exhaust outlet below the loading port, thereby maintaining the internal microenvironment at the desired cleanliness level. As the front door of the FOUP is opened, the purge mode continues, and the internal wafer is transferred to other chambers of the process equipment module—with the aforementioned sequence being the front interface 106, loading lock chamber 108, and process chamber 110—for the required manufacturing steps. During the required manufacturing steps, the purge mode continues until the wafer returns to the FOUP, the FOUP door is closed, and the FOUP is disconnected from the loading port. Once the FOUP is disconnected from the loading port, the LPU enters its cleaning mode.

[0105] Figures 8A to 8D This illustrates an embodiment of the interaction between the microenvironment and different LPU units. As in the embodiment described above, the FOUP is mobile and transported around the facility by overhead cranes or automated guided vehicles (AGVs), and can communicate with a remote control / data center (e.g., a control center). The control center can know (e.g., based on scheduling) or determine the location of the FOUP (e.g., based on reading RFID tags attached to the FOUP) and communicate with other components (e.g., LPUs). In each figure, the left column shows the actions of the FOUP, the right column shows the actions of the LPU, and the arrows between them illustrate the exchange of data and commands. Figures 8B to 8D In this embodiment, all modes—inspection mode, cleaning mode, sampling mode, and purging mode, plus any mode not described herein—have all the features described above (including programmability).

[0106] Figure 8A This describes the interaction between the microenvironment (FOUP in this embodiment) and the Loading Port Unit (LPU), which does not perform environmental monitoring. Specifically, the described setup only performs the purging function when the FOUP is docked to the LPU; it does not have the function or capability to monitor the cleanliness of the FOUP's microenvironment. In block 802, the FOUP is approaching the docking section of the LPU, and the control center signals the LPU to notify of the FOUP's arrival. In block 804, the LPU at this stage is in standby mode, waiting for the FOUP to dock. Once the FOUP is docked, in block 806, the control center commands the LPU to begin purging the FOUP; in response to this command, in block 808, the LPU begins purging the FOUP. When purging is complete, the LPU signals the control center to notify that purging has ended. In box 810, the control center signals that the FOUP should be pulled out of the docking section, and when the FOUP is pulled away from the docking section and the LPU cannot sense the presence of the FOUP—for example, because it cannot read the RFID tag attached to the FOUP—the process returns to its standby mode or self-rinsing mode in box 812.

[0107] Figure 8BThis describes an embodiment of the interaction between a FOUP and a Load Port Unit (LPU) for environmental monitoring of the microenvironment containing the FOUP. In block 814, the FOUP is approaching the docking section of the LPU, and the control center signals the LPU to notify of the FOUP's arrival. During this phase, in block 816, the LPU waiting for the FOUP to dock performs its cleaning mode and its inspection mode before or during docking; both cleaning and inspection modes are described above. Once the FOUP is docked, in block 818, the control center commands the LPU to initiate a purge mode and a sampling mode; both purge and sampling modes are also described above. In response to the commands, in block 818, the LPU begins purging and sampling the FOUP. In one embodiment, the sampling and purge modes may operate simultaneously for at least a portion of the purge duration (e.g., sampling may only last for the first few seconds of purge), but in another embodiment, sampling and purge may operate sequentially, with the purge mode operating only after the sampling mode is completed.

[0108] In box 820, when sampling is in progress or completed, the LPU reports the contamination measurement value to the control center in box 818, and then continues to purge mode. When purge mode is completed, the LPU reports its completion to the control center in box 818. In box 822, the control center signals that the FOUP should be pulled away from the docking point, and when the FOUP is pulled away from the docking point or the LPU cannot sense the presence of the FOUP—for example, because it cannot read the RFID tag attached to the FOUP—the process returns to its cleaning mode in box 824.

[0109] Figure 8C This describes another embodiment of the interaction between the FOUP and the Loaded Port Unit (LPU) for environmental monitoring of the microenvironment containing the FOUP. In block 826, the FOUP is approaching the docking section of the LPU, and the control center signals the LPU to notify of the FOUP's arrival. In block 828, the LPU waiting for the FOUP to dock performs its cleaning mode, and its inspection mode before or after the FOUP docking. Once the FOUP is docked, in block 830, the control center commands the LPU to initiate a purge mode and a sampling mode; the purge mode and sampling mode are also described above. In response to the commands, in block 832, the LPU begins sampling and purging the FOUP. In this embodiment, sampling and purging are performed sequentially, with the purge mode only running after the sampling mode is completed.

[0110] In box 832, when sampling is in progress or completed, the LPU reports the contamination measurement to the control center in box 830, and then continues to purge mode. When purge mode is completed, the LPU reports completion to the control center in box 830. In box 834, the control center signals that the FOUP should be pulled away from the docking point, and when the FOUP is pulled away from the docking point or the LPU can no longer sense the presence of the FOUP, the process returns to its cleaning mode in box 836.

[0111] Figure 8D This describes another embodiment of the interaction between the FOUP and the Loaded Port Unit (LPU) for environmental monitoring of the microenvironment containing the FOUP. In block 838, the FOUP is approaching the docking section of the LPU, and the control center signals the LPU to notify of the FOUP's arrival. In block 840, the LPU waiting for the FOUP to dock performs its cleaning mode, and its inspection mode before or after the FOUP docking. Once the FOUP is docked, in block 842, the control center commands the LPU to initiate purge and sampling modes; the purge and sampling modes are also described above.

[0112] In block 844, in response to a command from block 842, the LPU begins sampling and purging the FOUP. In this embodiment, sampling and purging are performed serially (i.e., one after the other), and multiple sampling / purging cycles may exist. In another embodiment, the sampling and purging modes may operate simultaneously for at least a portion of the purging duration, such as... Figure 8C As described herein, the LPU operates through a first sampling mode, reports its measurement data to the control center, and then performs a first purging mode. To check if the first purging mode is effective, the process runs through a second sampling mode and again reports its measurements to the control center. If, based on the reported measurements from the second sampling mode, the control center determines that the first purging mode is ineffective, then the LPU may run through the second purging mode. In other embodiments, this sampling / purging cycle may be performed more or fewer times than shown, until the process determines that the purging mode has effectively cleaned the microenvironment inside the FOUP.

[0113] In box 844, when the sampling / purge cycle is complete, the LPU reports its final purge to the control center in box 842. In box 846, the control center signals that the FOUP should be pulled away from the docking section, and when the FOUP is pulled away from the docking section or the LPU can no longer sense the presence of the FOUP, the process returns to its cleaning mode in box 848.

[0114] Figure 9This describes one embodiment of a monitoring schedule 900 that can be used when a single pollution analysis system monitors multiple LPUs, i.e., when there is a many-to-one correspondence between LPUs and the pollution analysis system. In the illustrated embodiment, there are two LPUs and one pollution analysis system, but other embodiments are not limited to these numbers (e.g., see...). Figure 7A The contamination analysis system can be connected to multiple LPUs via a manifold system.

[0115] The disclosed embodiments include at least the modes described above—inspection mode, cleaning mode, sampling mode, and purging mode—to achieve online monitoring of the microenvironment within the FOUP without altering the existing FOUP process flow. In the figures, the left column shows the operation of the first LPU, the middle column shows the operation of the contamination analysis system, and the right column shows the operation of the second LPU. In the illustrated embodiments, the same mode sequence is applied to both LPUs; however, in other embodiments, different mode sequences may be applied to each LPU, for example, based on environmental measurements received by each FOUP self-intercepting at a specific LPU (e.g., see...). Figure 8D All the modes described above—inspection mode, cleaning mode, sampling mode, and purging mode, etc.—have all the features described above (including programmability).

[0116] The process begins with the FOUP being disconnected from the first LPU (shown as LP1 in the diagram). With the FOUP disconnected, LP1 runs through its cleaning mode in box 902, while the contamination analysis system remains in standby mode in box 912. In box 904, the FOUP is about to arrive, and in box 914, LP1 runs its check mode and sends a fluid self-check mode to the contamination analysis system. In box 906, the FOUP is connected, and in box 916, LP1 runs through its sampling mode and sends a sample to the contamination analysis system for analysis. After the sampling mode is completed in box 906, LP1 continues to its purge mode in box 908. In box 910, the FOUP is disconnected, and LP1 runs through its self-cleaning mode.

[0117] In box 918, the contamination analysis system may optionally clean and inspect its internal fluid connections while awaiting FOUP docking with LP2. In box 926, with FOUP disengaged, LP2 operates through its cleaning mode. In box 928, FOUP is about to arrive, and LP2 operates its inspection mode and sends a fluid self-inspection mode to the contamination analysis system, which analyzes the inspection mode fluid in box 920. In box 930, FOUP has docked, and LP2 operates through its sampling mode and sends a sample to the contamination analysis system, which analyzes the inspection mode fluid in box 922. After sampling mode is completed in box 930, LP2 operates through its purge mode in box 932. In box 934, FOUP is disengaged, and LP2 operates through its self-cleaning mode.

[0118] Figure 10A This describes an embodiment of the Load Port Unit (LPU) 1000. In the illustrated embodiment, the LPU is placed below the loading port of a docking plate of a piece of process equipment (see, for example, see...). Figure 1A However, in other embodiments, the LPU 1000 may be placed elsewhere. The loading port typically includes a docking plate 1002 having an upper surface 1002U and a lower surface 1002L. The lower surface 1002L includes a fluid inlet 1006 and a fluid outlet 1008, and the interior of the docking plate 1002 and its top surface 1002 include fluid connectors (not shown) that fluidly couple the inlet 1006 and outlet 1008 to the microenvironment within the FOUP 1004. The upper surface 1002U also includes mechanical connectors for receiving the FOUP 1004 and maintaining its removable mounting on the docking plate.

[0119] The existing LPU system 1010 has two inlets and two outlets. One outlet is fluidly coupled to a docking plate inlet 1006 via fluid line 1012, and the corresponding inlet is fluidly coupled to a docking plate outlet 1008 via fluid line 1014. The other inlet is fluidly coupled to a source of a neutral gas, such as nitrogen (N2) or clean dry air (CDA), via fluid line 1016, and the corresponding outlet is fluidly coupled to a fluid discharge outlet 1018.

[0120] In the operation of LPU system 1010, neutral gas is injected into the system via fluid connector 1016. Then, neutral gas is injected into the interior of FOUP 1004 via fluid connector 1012 and inlet 1006 to purge the microenvironment inside the FOUP. The neutral gas injected into FOUP 1004 also carries away contaminants previously present in the FOUP, and then leaves the FOUP via outlet 1008 and fluid line 1014, returning to LPU system 1010. LPU 1010 then discharges the purge air, for example, to the atmosphere via fluid line 1018. This LPU is then only capable of purging or flushing the microenvironment inside the FOUP.

[0121] Figure 10B An embodiment of the Load Port Unit (LPU) 1025 is described. In the illustrated embodiment, the LPU is placed below the docking plate 1002 of the load port of a process tool (e.g., see Figure 1), but in other embodiments, the LPU 1025 may be placed elsewhere. The LPU system 1025 includes two main components: an existing LPU system 1010 and an additional active flow control unit 1026, which works together as an integrated LPU 1034. The LPU 1034 is communicatively coupled to both the contamination analysis system and the control center, and the control center is also communicatively coupled to the contamination analysis system (e.g., see Figure 1). Figures 4A to 4E In the illustrated embodiment, the active flow control system 1026 adds sampling mode, cleaning mode, inspection mode and purging mode to the purging function that already exists in the existing LPU system 1010.

[0122] In the illustrated embodiment, the existing LPU system 1010 and the additional flow control unit 1026 are separate units, but in other embodiments, they may be combined into a single unit (e.g., see [link to documentation]). Figure 16 The existing LPU system 1010 has an outlet fluidly coupled to the inlet of flow control element 1026 via fluid line 1012, and the corresponding inlet fluidly coupled to the outlet of flow control element 1026 via fluid line 1014. Another inlet of LPU system 1010 is fluidly coupled to a source of neutral gas, such as nitrogen (N2) or clean dry air (CDA), via fluid line 1016, and another outlet is fluidly coupled to fluid discharge outlet 1018.

[0123] In addition to the fluid connections to the LPU system 1010 described above, the additional active flow control system 1026 also has an outlet fluidly coupled to the docking plate inlet 1006 via fluid line 1028, and an inlet fluidly coupled to the docking plate outlet 1008 via fluid line 1030. The additional flow control system also has an outlet fluidly coupled to the inlet of the contamination analysis system via fluid line 1032. The integrated LPU 1034 has communication links to the control center and the contamination analysis system (see, for example, [link to relevant documentation]). Figures 4C to 4E ).

[0124] In the operation of LPU system 1025, neutral gas is injected into LPU system 1010 via fluid connection 1016. The neutral gas is then injected into auxiliary flow control unit 1026 via fluid line 1012. How auxiliary flow control unit 1026 directs the neutral gas entering through fluid line 1012 depends on the application mode, such as inspection mode, cleaning mode, sampling mode, or purging mode, as described above.

[0125] In inspection mode, flow control 1026 can guide incoming neutral gas through fluid line 1032 to the contamination analysis system, and return it to LPU system 1010 through fluid line 1014, or both. In cleaning mode, flow control can guide neutral gas back to LPU system 1010 through fluid line 1014. Flow control can also guide incoming neutral fluid through fluid line 1032 to the contamination analysis system to clean fluid line 1032 and the contamination analysis system. In sampling mode, flow control can guide incoming neutral gas through fluid line 1028 and inlet 1006 into FOUP 1004, then guide the gas leaving FOUP through fluid line 1030 through fluid line 1032 to the contamination analysis system, and return it to LPU system 1010 and outlet 1018 through fluid line 1014, or both. During this phase, the fluid exiting through fluid line 1030 contains neutral gas and any contaminants carried out of the FOUP's microenvironment by the neutral gas. In purge mode, the flow control unit can guide the incoming neutral gas through fluid line 1028 and inlet 1006 into the FOUP 1004, and then guide the fluid exiting the FOUP through fluid line 1030 back to the LPU system 1010 and outlet 1018 through fluid line 1014; in this embodiment, the flow control unit 1026 then uses the existing LPU system's purge function to purge the FOUP. During this phase, the fluid exiting through fluid line 1030 contains neutral gas and any contaminants carried out of the FOUP's microenvironment by the neutral gas.

[0126] Figure 10CThis describes an embodiment of the Load Port Unit (LPU) 1050. The LPU 1050 is similar in most respects to the LPU 1025: it contains substantially the same components as the integrated LPU 1052, is arranged and cooperates in the same manner as the integrated LPU 1052, and the LPU 1052 is communicatively coupled to both the contamination analysis system and the control center, and the control center is also communicatively coupled to the contamination analysis system (e.g., see...). Figures 4A to 4E In the illustrated embodiment, the active flow control system 1050 adds sampling mode, cleaning mode, inspection mode and purging mode to the purging function that already exists in the existing LPU system 1010.

[0127] The main difference between LPUs 1025 and 1050 is the configuration of the additional flow control 1026. In some embodiments, the docking plate 1002 of the loading port may not provide all the functions of the additional flow control 1026 or the fluid connections for proper mode operation. In such cases, the additional flow control 1026 may include a fluid interface that allows it to be fluidly coupled directly to the FOUP rather than fluidly coupled through the docking plate. The fluid interface of the additional flow control may replace some or all of the fluid connections of the docking plate 1002; that is, in LPU 1050, the additional flow control may partially or completely replace the functions performed by the docking plate 1002 in LPU 1025. The integrated LPU 1052 has communication links to the control center and the contamination analysis system (see, for example, [link to relevant documentation]). Figures 4C to 4E ).

[0128] Figures 11A to 11B Explanation can be used as, for example Figures 4C to 4E Examples of active flow control units 404b in the embodiments shown and additional flow control units 1026 in the active flow control units 10B to 10C in the embodiments shown.

[0129] Figure 11A This describes an embodiment of the additional active flow control unit 1100. (As in...) Figures 10B to 10C In this embodiment, the active flow control unit 1100 is coupled to the existing LPU system 1010, enabling it to cooperate as an integrated LPU 1034. The active flow control unit 1100 includes three multi-way valves. In the illustrated embodiment, these are three-way valves TV1, TV2, and TV3, but in other embodiments, they do not need to be three-way valves and can be replaced by multi-way valves with more than three ports (e.g., four or more). Although not shown in the figures, all valves may include mechanisms (e.g., switches, motors, servers, etc.) that allow them to be activated based on commands received from a control center via a communication link. Figures 4A to 4E It is displayed in the middle.

[0130] In the flow control unit 1100, three-way valves TV1 to TV3 are fluidly coupled to achieve the different modes described above. Three-way valve TV1 fluidly couples three fluid lines: an inlet fluid line 1102 through which it receives neutral gas; an outlet line 1104 through which it directs neutral gas through the inlet 1006 of the docking plate to a microenvironment (e.g., FOUP); and a bypass line 1106 through which it is fluidly coupled to valve TV2. Similarly, three-way valve TV2 fluidly couples three fluid lines: a bypass line 1106 through which it is fluidly coupled to and can exchange fluid with three-way valve TV1; a fluid line 1108 through which it receives fluid leaving the FOUP through the outlet 1008 of the docking plate; and a fluid line 1110 through which it is fluidly coupled to valve TV3. The three-way valve TV3 also fluidly couples three fluid lines: fluid line 1110, through which valve TV2 is fluidly coupled to valve TV3; fluid line 1112, through which three-way valve TV3 is fluidly coupled to the contamination analysis system and can exchange fluids with the contamination analysis system (e.g., see...). Figures 4A to 4E ); and fluid line 1114, through which three-way valve TV3 can discharge fluid leaving FOUP via outlet 1008 of the docking plate and valve TV2. In operation of the flow control unit 1100, valves TV1 to TV3 can be configured to implement the modes described above, as follows: Figure 12A , 13A As shown in 14A and 15A.

[0131] Figure 11B This describes an embodiment of the additional active flow control unit 1150. (As in...) Figures 10B to 10C In this embodiment, the active flow control unit 1150 is coupled to the existing LPU system 1010, enabling it to cooperate as an integrated LPU 1174. The active flow control unit 1150 comprises four main components: a source of a neutral gas, such as nitrogen (N2) or clean dry air (CDA) 1152; a pressure and flow controller 1154; a multi-way valve TV1; and a flow divider 1156. The multi-way valve TV1 is shown as a three-way valve in this embodiment, but in other embodiments, it may be another type of multi-way valve with more or fewer ports, such as a four-way valve. The flow divider 1156 is shown as a T-type flow divider in this embodiment, but in other embodiments, it may be another type of flow divider, such as a Y-type flow divider, a four-way flow divider, or some other type of flow divider.

[0132] In the flow control unit 1150, a neutral gas source 1152 is fluidly coupled to a pressure and flow controller 1154 via a fluid line 1158, and the pressure and flow controller is fluidly coupled to a three-way valve TV1 via a fluid line 1160. The three-way valve TV1 is also fluidly coupled to a flow divider 1156 via a fluid line 1162, and to a contamination analysis system via a fluid line 1164. In addition to being fluidly coupled to valve TV1, the flow divider 1156 is also fluidly coupled to fluid line 1168, which receives fluid leaving the FOUP through the outlet 1008 of the docking plate 1002. Neutral fluid from the existing LPU system 1010 can also enter the flow control unit 1150 via fluid line 1166 and leave the flow control unit through the inlet 1006 of the docking plate 1002 into the FOUP. Valve TV1 receives fluid exiting the FOUP through outlet 1008 and diverter 1156, and partially or completely guides the exiting fluid through fluid line 1164 to the contamination analysis system. Although not shown in the diagram, all components may include mechanisms (e.g., motors, solenoids, servers, switches, etc.) that allow them to be activated based on commands received from the control center via a communication link. Figures 4A to 4E As shown in the diagram. In the operation of the flow control unit 1150, the source 1152, controller 1154, and valve TV1 can be configured to implement the modes described above, as illustrated below. Figure 12B , 13B Displays 14B and 15B.

[0133] Figure 12A This describes an embodiment of the operation of the inspection mode in the flow control unit 1100. The inspection mode analyzes pipeline cleanliness to ensure no AMC background interference for FOUP AMC measurements during the next phase of the sampling mode. The criteria for the inspection mode include confirming that the cleanliness of the LPU and contamination analysis system pipelines meets control standards.

[0134] To implement the check mode in the flow control unit 1100, valve TV1 is configured to receive fluid through fluid line 1102 and direct the fluid to bypass line 1106, while preventing flow into fluid line 1104; valve TV2 is configured to receive fluid through bypass line 1106 and direct the fluid to fluid line 1110, while preventing flow through fluid line 1108; and valve TV3 is configured to receive fluid from fluid line 1110 and direct the fluid to fluid line 1112. This valve configuration results in the flow path shown by the dashed line in the figure: originating from, for example, an existing LPU system 1010 (see...). Figure 11AThe neutral fluid enters through fluid line 1102 and travels through valve TV1 to bypass line 1106, valve TV2, fluid line 1110, valve TV3, and exits through fluid line 1112 to the contamination analysis system. In this inspection mode, the fluid leaving the flow control unit through fluid line 1112 is a mixed fluid, i.e., a mixture of the injected neutral gas and the fluid that was in the flow control unit before the injection of the neutral gas. If any contaminants were present in the flow control unit before the injection of the neutral gas, they are carried out of the flow control unit in the mixed fluid.

[0135] Figure 12B An embodiment illustrating the operation of the check mode in the flow control unit 1150 is described. To implement the check mode in the flow control unit 1150, source 1152 is turned on and neutral gas is directed through fluid line 1158 to pressure and flow controller 1154. Pressure and flow controller directs neutral gas through fluid line 1160 to valve TV1, which is set to direct neutral gas only into fluid line 1164 and not into fluid line 1162. This valve configuration results in the flow path shown by the dashed lines in the figure: neutral fluid begins to enter at source 1152 and travels through fluid line 1158, controller 1154, fluid line 1160, valve TV1, and finally to fluid line 1164 to the contamination analysis system. In this check mode, the fluid leaving the flow control unit through fluid line 1164 is a mixed fluid, i.e., it is a mixture of the injected neutral gas and the fluid in the flow control unit before the injection of neutral gas. If any contaminants are present in the flow control unit before the neutral gas is injected, they will be carried out of the flow control unit in the mixed fluid.

[0136] Figure 13A An embodiment illustrating the operation of the sampling mode in the flow control unit 1100 is described. To implement the check mode in the flow control unit 1100, valve TV1 is configured to receive fluid through fluid line 1102. Valve TV1 is set to direct fluid into fluid line 1104 while preventing flow into bypass line 1106; valve TV2 is configured to receive fluid through fluid line 1108 and direct the fluid into fluid line 1110 while preventing flow through bypass line 1106; and valve TV3 is configured to receive fluid from fluid line 1110 and direct the fluid into fluid line 1112 instead of fluid line 1114. This valve configuration results in the flow path shown by the dashed lines in the figure: originating from, for example, an existing LPU system 1010 (see...). Figure 11AA neutral fluid enters the FOUP microenvironment through fluid line 1102 at an input flow rate A and travels through valve TV1 and inlet 1006. The fluid then exits the FOUP through outlet 1008 and travels through fluid line 1108 to valve TV2, fluid line 1110, valve TV3, and exits through fluid line 1112 at a flow rate B to the contamination analysis system. In this sampling or purging mode, the fluid leaving the microenvironment through fluid line 1108 is a mixed fluid, i.e., a mixture of the injected neutral gas and the fluid already present in the microenvironment before the injection of the neutral gas. If any contaminants were present in the microenvironment before the injection of the neutral gas, these contaminants are carried out of the microenvironment in the mixed fluid.

[0137] In one embodiment, the flow control unit 1100 can Figure 13A The sampling pattern shown in the middle and Figure 14A The purging modes shown in the diagram are combined. When the sampling mode and the purging mode are combined in this way, the flow control unit 1100 uses the existing LPU system 1010 (see [link]). Figure 11A The purging mode in the sampler is part of the sampling mode, wherein the sampling mode operates concurrently with at least the initial portion of the purging mode. In one embodiment of this concurrent operation, valve TV3 may initially be set to guide some or all of the purging fluid through fluid line 1112 to the contamination analysis system, so that sampling and purging occur simultaneously. After sampling is complete, the setting of valve TV3 may be changed so that all purging fluid leaves through fluid line 1114 and no purging fluid enters fluid line 1112.

[0138] Figure 13BAn embodiment illustrating the operation of the sampling mode in the flow control unit 1150 is described. To implement the sampling mode, valve TV1 is set to block flow through fluid line 1160, while simultaneously receiving fluid through fluid line 1168 and diverter 1156 and directing the fluid into fluid line 1164. Source 1152 and flow controller 1154 can be closed during this mode. This valve configuration results in the flow path shown by the dashed lines in the figure: neutral fluid enters through fluid line 1166 at an input flow rate A and travels through inlet 1006 into the microenvironment inside the FOUP. The fluid then leaves the FOUP through outlet 1008 into fluid line 1168, where diverter 1156 directs all or part of the fluid into valve TV1. Valve TV1 then directs the fluid into fluid line 1164, where it travels at a sampling flow rate B to the contamination analysis system. In this sampling or purging mode, the fluid leaving the microenvironment via fluid line 1164 is a mixed fluid, i.e., a mixture of the injected neutral gas and the fluid already present in the microenvironment prior to the injection of the neutral gas. If any contaminants were present in the microenvironment prior to the injection of the neutral gas, these contaminants are carried out of the microenvironment in the mixed fluid. In one embodiment, the flow control unit 1150 can... Figure 13B The sampling pattern shown in the middle and Figure 14B The purging modes shown in the diagram are combined. When the sampling mode and the purging mode are combined in this way, the flow control unit 1150 uses the existing LPU system 1010 (see [link]). Figure 11B The purging mode in the sampler is part of its sampling mode, wherein the sampling mode operates concurrently with at least the initial portion of the purging mode. In one embodiment of this concurrent operation, valve TV1 may initially be set to guide some or all of the purging fluid through fluid line 1164 to the contamination analysis system, so that sampling and purging occur simultaneously. After sampling is complete, the setting of valve TV1 may be changed so that the purging fluid leaves through fluid line 1168 and no purging fluid enters fluid line 1164.

[0139] The described flow path is used to perform real-time measurements of contaminants purged from the FOUP. The CDA injection rate into the FOUP can be optimized by controlling the pressure controller and flow meter. The sampling flow rate / profile can be optimized in conjunction with the injection rate (e.g., 5 L to 10 L per minute) to obtain optimal detection response and recovery. Furthermore, the sampling flow rate / profile can be programmed with different profiles, such as... Figure 13C The programmable flow rate / profile formulation design not only meets the sampling requirements for target concentration detection (or high recovery rate), but also ensures that the gases in the FOUP can be accurately measured to provide critical contamination information to determine whether the cleanliness inside the FOUP meets process control requirements.

[0140] Figures 13C to 13D This describes an embodiment of the fluid input to the sampling mode and the measurement output from the sampling mode. Figure 13C This description applies to a programmed flow velocity profile that can be applied to fluid input via fluid line 1102 in flow control unit 1100 or fluid line 1166 in flow control unit 1150. As explained above, any flow velocity profile can be applied. However, in this particular profile, the flow velocity increases non-linearly over time until it rapidly decreases at a specific time. Figure 13D This describes an example of a measurement output generated by a sampling mode. In this example, the pollution analysis system can detect multiple forms of pollution—for example, various different chemical compounds and their concentrations. The detected concentration initially increases over time, but begins to decrease over time as the sample removes more compounds from the microenvironment.

[0141] Figure 14A An embodiment illustrating the operation of the purge mode in the flow control unit 1100 is provided. To implement the purge mode in the flow control unit 1100, valve TV1 is configured to receive fluid through fluid line 1102 and direct the fluid to fluid line 1104, while preventing flow into bypass line 1106; valve TV2 is configured to receive fluid through fluid line 1108 and direct the fluid to fluid line 1110, while preventing flow through bypass line 1106; and valve TV3 is configured to receive fluid from fluid line 1110 and direct the fluid to fluid line 1114, while preventing flow into fluid line 1112. This valve configuration results in the flow path shown by the dashed lines in the figure: fluid enters through fluid line 1102 and travels through valve TV1, through the microenvironment inside the FOUP, to fluid line 1108, valve TV2, fluid line 1110, valve TV3, and exits through fluid line 1114. In this embodiment, the flow control unit 1100 then uses the existing LPU system 1010 (see [link to LPU system]). Figure 11A The purging function in the ) is used to implement and / or supplement or replace its own purging mode.

[0142] Figure 14B An embodiment illustrating the operation of the purge mode in the flow control unit 1150 is provided. In one embodiment, the LPU can maintain the same standard purge process on the FOUP during wafer fabrication and can achieve optimal high purge flow rates / profiles (e.g., 20 L to 200 L per minute) through the flow meter and pressure controller in the flow control unit 1150.

[0143] To implement the purge mode in the flow control unit 1150, valve TV1 is set to prevent flow through fluid line 1162. Source 1152 and flow controller 1154 can be closed during this mode, causing no fluid to flow through fluid line 1160 to valve TV1, or alternatively, valve TV1 can be set to prevent flow into fluid line 1160. This configuration results in the flow path shown by the dashed line in the figure: neutral fluid enters through fluid line 1166 and travels through inlet 1006 into the microenvironment inside the FOUP. The fluid then leaves the FOUP through outlet 1008 into fluid line 1168, where distributor 1156 directs all flow out of the system.

[0144] Figure 15A An embodiment illustrating the operation of the cleaning mode in the flow control unit 1100 is described. In the illustrated embodiment, after the FOUP is removed, the system can execute the cleaning mode to clean all its internal piping, as well as the piping and analyzer within the contamination analysis system, ensuring that both are clean before the next FOUP measurement.

[0145] To implement the cleaning mode in the flow control unit 1100, valve TV1 is configured to receive fluid through fluid line 1102 and direct the fluid to bypass line 1106 while preventing flow into fluid line 1104, and valve TV2 is configured to receive fluid through bypass line 1106 and direct the fluid to fluid line 1110 while blocking flow through fluid line 1108. Valve TV3 can be configured in three different ways: it can be configured to receive fluid from fluid line 1110 and direct all fluid to fluid line 1114; it can be configured to separate fluid from fluid line 1110 into both fluid lines 1112 and fluid line 1114; or it can be configured to direct all fluid to fluid line 1112. This valve configuration results in the flow path shown by the dashed lines in the diagram: fluid enters through fluid line 1102 and travels through valve TV1 to bypass line 1106, valve TV2, fluid line 1110, and valve TV3, and exits through fluid line 1114 to the outlet and / or through fluid line 1112 to the contamination analysis system. In this clean mode, the fluid leaving the flow control unit through fluid line 1114 is a mixed fluid, i.e., a mixture of injected neutral gas and the fluid present in the flow control unit before the injection of neutral gas. If any contaminants were present in the flow control unit before the injection of neutral gas, these contaminants are carried out of the flow control unit in the mixed fluid. Guiding some or all of the self-cleaning outlet air through fluid line 1112 not only allows the flow control unit 1100 to clean itself and the contamination analysis system, but also allows for monitoring during the clean mode and stopping it when the desired cleanliness level is reached. If additional cleaning is required, the clean mode can also be allowed to continue after the desired cleanliness level is reached.

[0146] Figure 15B An example illustrating the operation of the cleaning mode in the flow control unit 1150. (As in...) Figure 15AIn the illustrated embodiment, the flow control unit can execute a cleaning mode to clean all piping within itself, as well as the piping and analyzer within the contamination analysis system. In this embodiment, optimal self-cleaning flow rate / profile (e.g., 3 L to 20 L per minute) is achieved via the flow meter and pressure controller 1154. To implement the cleaning mode in the flow control unit 1150, valve TV1 is configured to receive fluid through fluid line 1160 and guide the fluid through fluid line 1164 to the contamination analysis system. Source 1152 and flow controller 1154 are activated during this mode. This configuration results in the flow path shown by the dashed lines in the figure: neutral fluid from source 1152 enters fluid line 1158 and travels to pressure and flow controller 1154, after which it travels through fluid line 1160 to valve TV1. Valve TV1 then guides the fluid through fluid line 1164 to the contamination analysis system. In this cleaning mode, the fluid leaving the flow control unit via fluid line 1164 is a mixed fluid, i.e., a mixture of the injected neutral gas and the fluid that was in the flow control unit before the injection of the neutral gas. If any contaminants were present in the flow control unit before the injection of the neutral gas, then those contaminants are carried out of the flow control unit in the mixed fluid. Figure 15A In this embodiment, guiding some or all of the self-cleaning outlet air through the fluid line 1164 not only allows the flow control unit 1150 to clean itself and both the contamination analysis system, but also allows for monitoring during the cleaning mode and stopping it when the desired cleanliness level is reached. If additional cleaning is required, the cleaning mode can also be allowed to continue after the desired cleanliness level has been reached.

[0147] Figure 16 This describes an embodiment of the integrated load port unit (LPU) 1600. The LPU 1600 includes a load port unit 1602 fluidly coupled to an active flow control element 1604; therefore, it is referred to as "integrated" because it combines the functionality of a conventional load port unit 1602 with the functionality of the additional active flow control element 1604 in a single unit, for example, as... Figures 4A to 4B It is displayed in the middle.

[0148] Loading port unit 1602 includes a fluid delivery section through which fluid is delivered to an active flow controller 1604, and through which fluid is fluidly coupled to a microenvironment (e.g., FOUP 1606) of loading port docking plate 1608. The fluid delivery section begins with a neutral gas source 1610 capable of delivering nitrogen (N2) or clean dry air (CDA). A pressure regulator 1612 is fluidly coupled to the outlet of source 1610, and a splitter 1614 is fluidly coupled to the outlet of the pressure regulator. One outlet of splitter 1614 is coupled to a flow controller comprising parallel high-flow and low-flow branches. The high-flow and low-flow branches are arranged in parallel such that each can be independently used to supply a wider range of flow rates (i.e., higher and lower) than a single flow controller can supply. The high-flow branch includes a switching valve 1616 fluidly coupled to the outlet of splitter 1614 and a high-flow controller 1618 fluidly coupled to the outlet of switching valve 1616. The low-flow branch includes a switching valve 1620 fluidly coupled to the outlet of the flow divider 1614 and a low-flow controller 1622 fluidly coupled to the outlet of the switching valve 1620. Another optional flow divider 1624 has an inlet coupled to the outlet of the flow controller. An optional pressure sensor 1626 is fluidly coupled to one outlet of the flow divider 1624, and an optional filter 1628 is fluidly coupled to the other outlet of the flow divider. The filter 1628 is then fluidly coupled to valve TV1 in the active flow control element 1604.

[0149] The loading port unit 1602 also includes a fluid receiving section through which it can receive fluid from the active flow controller 1604. The fluid receiving section includes a diverter 1630, the inlet of which is fluidly coupled to the outlet of valve TV3 of the active flow controller 1604. The outlet of the diverter 1630 is fluidly coupled to a pressure sensor 1632 and a vacuum generator 1634. The fluid delivery and receiving sections of the loading port unit 1602 are fluidly coupled to each other via a pressure regulator 1636 whose inlet is coupled to the outlet of the diverter 1614, a flow controller 1638 whose inlet is fluidly coupled to the outlet of the pressure regulator 1636, and an optional switching valve 1640 whose inlet is fluidly coupled to the outlet of the flow controller 1638 and whose outlet is fluidly coupled to the vacuum generator 1634.

[0150] Active flow control 1604 is fluidly coupled to the outlet and inlet of loading port unit 1602: valve TV1 is coupled to the outlet of filter 1628 and splitter 1630 is coupled to the outlet of valve TV3. In the illustrated embodiment, active flow control 1604 can be identified as Figure 11AThe additional active flow controller 1100 shown is operable in any mode described for the flow controller. In other embodiments, the active flow controller 1604 may use... Figure 11B The active flow controller 1150 shown herein can operate similarly in any mode described for the flow controller. Since the active flow controller 1604 and its operation have been described in detail above, they will not be repeated here.

[0151] Figure 17 An embodiment of a loading port-based online pollution monitoring system 1700 for mobile microenvironments is described. The illustrated embodiment can be used in conjunction with the LPU embodiment described above. System 1700 shares many similarities with system 700: it includes multiple LPUs 1702 to 1708, each with a free fluid pipeline coupled to a single pollution analysis system 1710, resulting in a many-to-one correspondence between LPUs and pollution analysis systems. The above, in conjunction with... Figure 6 Description of embodiments of a pollution analysis system. In this or other embodiments of system 1700:

[0152] ● The contamination analysis system can be designed one-to-one or one-to-many with manifolds for connecting to multiple LPUs, and can be programmed to monitor via assignment from remote control and data servers or from local analyzer operations.

[0153] ● Report real-time monitoring results (e.g., test data from sampling and inspection modes) to the remote control and data server to determine whether the LPU needs further analysis or whether the system should switch to monitoring another LPU.

[0154] ● The pollution analysis system can be connected to multiple microenvironment and / or flow control systems to monitor different microenvironment settings.

[0155] ● Monitoring of different microenvironments can be scheduled / controlled locally at the pollutant analysis equipment, or remotely scheduled / controlled by the control center.

[0156] ● The contamination analysis system can perform self-cleaning flow between measurements of each microenvironment to ensure the cleanliness of its background without interfering with the measurements of the microenvironment.

[0157] ● The contamination analysis system can also perform a complete cleanliness analysis of connecting pipes / components to check and confirm that there is no background contaminant interference before the sampling and measurement steps of the microenvironment.

[0158] ● The pollution analysis system can be designed one-to-one or one-to-many with manifolds for connecting to multiple systems, and can be programmed to monitor via assignment from remote control and data servers or from local analyzer operations.

[0159] ● The contamination analysis system can communicate wirelessly or wiredly with either or both of the control center and the LPU to monitor the target FOUP for contamination. Real-time monitoring results (e.g., test data from sampling and inspection modes) are reported to a remote control and data server to determine whether further analysis of the same LPU is needed or to switch to another LPU for monitoring.

[0160] The above description of the embodiments is not intended to be exhaustive or to limit the invention to the forms described. Specific embodiments and examples of the invention are described herein for illustrative purposes, but various modifications are possible.

Claims

1. An apparatus comprising: An active flow control system comprising one or more inlets and one or more outlets, wherein: The first of the one or more outlets is configured to be fluidly coupled to the inlet of the microenvironment, and The first inlet of the one or more inlets is configured to couple to the outlet of the microenvironment; and The active flow control system includes one or more flow control configurations, each flow control configuration corresponding to a flow control mode, and the one or more flow configurations including configurations corresponding to sampling modes, the sampling modes including: Neutral fluid is injected from the first outlet into the inlet of the microenvironment, and The mixed fluid exiting through the outlet of the microenvironment is guided to the first inlet of the active flow control system, the mixed fluid being a combination of the neutral fluid and the fluid in the microenvironment prior to the injection of the neutral fluid into the microenvironment.

2. The device according to claim 1, wherein the active flow control system can be coupled to one or more microenvironments.

3. The device of claim 1, further comprising a control center communicatively coupled to the active flow control system, wherein the control center is capable of transmitting instructions to the active flow control system, the instructions, when executed, causing the active flow control system to perform one or more of the flow control modes.

4. The device of claim 3, further comprising a contamination analysis system adapted to communicatively couple to the control center and fluidly couple to a second outlet of one or more outlets of the active flow control system.

5. The device according to claim 4, wherein the pollution analysis system is also directly communicatively coupled to the active flow control system.

6. The apparatus of claim 4, wherein the instructions include, when executed, instructions that cause the active flow control system to direct the mixed fluid to the contamination analysis system.

7. The device according to claim 4, wherein the pollution analysis system can be coupled to one or more active flow control systems.

8. The device according to claim 4, wherein the one or more flow control modes comprise: Inspection mode, wherein the active flow control system inspects itself for contamination. Cleaning mode, wherein the active flow control system cleans its own contamination, and Purge mode, wherein the active flow control system purges contaminants from the microenvironment.

9. The device of claim 8, wherein the active flow control system is fluidly coupled to an existing loading port unit having existing purging functionality.

10. The device of claim 9, wherein the purging mode uses, supplements, or replaces the purging function of the existing loading port unit.

11. The device of claim 8, wherein the active flow control system adds the sampling mode, the cleaning mode and the inspection mode to the existing purging function.

12. The device of claim 11, wherein the sampling mode and the purging mode operate concurrently at least during the initial portion of the purging mode.

13. The device according to claim 8, wherein, In addition to cleaning the active flow control system, the cleaning mode also cleans the contamination analysis system.

14. The device of claim 8, wherein each flow control mode is programmable.

15. The device of claim 14, wherein each flow control mode can be programmed to use a flow velocity profile and the flow velocity profile can be adjustable.

16. The device of claim 15, wherein different flow velocity profiles can be used in different flow control modes for a specific microenvironment.

17. The device of claim 16, wherein one or more new flow control modes can be added to existing flow control modes.

18. The device of claim 3, wherein the instructions include instructions that, when executed, cause the active flow control system to perform an operation, the operation comprising selecting a plurality of flow control modes from the one or more flow control modes and executing them sequentially.

19. The device of claim 18, wherein the sequence of flow control modes in the operation is changeable and programmable.

20. The device of claim 18, wherein the sequence of flow control modes is capable of including multiple examples of any flow control mode.

21. The apparatus of claim 1, wherein the first inlet and the first outlet of the active flow control system are fluidly coupled to the loading port of the process module.

22. The device of claim 21, wherein a cleaning mode, an inspection mode, and a sampling mode are added to the existing purging mode of the loading port.

23. The device of claim 1, wherein the active flow control system is an additional adapter module coupled to an existing simple flow control system.

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