Self-cleaning single crystal furnace observation window structure

Abstract

The invention discloses a self-cleaning single crystal furnace observation window structure, and belongs to the technical field of single crystal furnaces. Comprising a shell composed of an upper shell body and a lower shell body, a rotary visual sheet with multiple sets of visual quartz sheets is arranged in the shell body, a cleaning assembly which elastically abuts against the visual sheet is arranged below the visual sheet, the upper shell body is provided with a control assembly which controls the visual sheet to rotate, the shell body is correspondingly provided with an observation hole, the visual assembly is installed at the observation hole of the upper shell body, and sealing structures are arranged at all connecting parts. The clean observation channel can be rapidly switched by rotating the visual sheet, the cleaning assembly synchronously wipes the quartz sheet during switching, and a clear view can be recovered without shutdown. The whole structure is convenient to assemble and disassemble, the sealing performance is good, the maintenance efficiency and continuous usability of the observation window are improved, and the production continuity of the single crystal furnace is guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal furnace, in particular to a self-cleaning single crystal furnace observation window structure. BACKGROUND

[0002] Single crystal cadmium is used to manufacture resistors, capacitors and other electronic components, and its production quality directly affects the performance of downstream products. Single crystal furnace is a key equipment for single crystal cadmium growth, and parameters such as temperature field and crystal pulling speed need to be accurately controlled during crystal pulling process. The observation window is used to monitor the crystal formation direction and appearance in real time, which is an important link to ensure the quality of single crystal. After decades of development, the crystal pulling process has been continuously optimized in terms of equipment and control technology, but the use pain points related to the observation window have not been effectively solved.

[0003] During the single crystal furnace crystal pulling operation, volatile substances are generated after the cadmium material in the furnace is melted. These volatile substances are easily attached to the inner surface of the quartz sheet of the observation window, forming a layer of plating film. As the use time increases, the plating film will gradually thicken, causing the observation field of view to be blurred, making it difficult to clearly judge the crystal growth state, which may affect the accurate control of the crystal pulling process, such as crystal pulling, shoulder turning, and constant diameter. Therefore, the quartz sheet of the observation window needs to be frequently replaced and cleaned due to severe pollution. The existing structure of the observation window is often difficult to quickly replace, and the entire observation window needs to be removed before the quartz sheet can be cleaned or replaced, which wastes a lot of time and affects the continuity of production. Further, it restricts the production efficiency of the crystal pulling process, which is a technical pain point that needs to be improved in the industry. SUMMARY

[0004] The present application aims to solve the above problems and provides a self-cleaning single crystal furnace observation window structure that improves the continuous availability of the observation window.

[0005] The present application solves the problem by adopting the following technical solution: A self-cleaning single crystal furnace observation window structure, comprising a shell composed of an upper shell and a lower shell, the upper shell and the lower shell being detachably connected through a locking assembly arranged therebetween, a containing space being formed between the upper shell and the lower shell, a visible sheet being arranged in the containing space, the visible sheet being rotatably connected between the upper shell and the lower shell through a rotating shaft, a visible sheet cleaning assembly being arranged in the containing space between the visible sheet and the lower shell, the cleaning assembly being in elastic abutment with the lower surface of the visible sheet; a control assembly being arranged on the upper shell to control the rotation of the visible sheet, observation holes being oppositely arranged on the upper shell and the lower shell and being adapted in size to the observation port of the single crystal furnace, a visible assembly being arranged on the observation hole of the upper shell.

[0006] Furthermore, the locking assembly includes upper ear plates evenly distributed along the outer edge of the upper housing and lower ear plates correspondingly distributed along the outer edge of the lower housing. The upper and lower ear plates are arranged in a one-to-one correspondence. A positioning hole is provided on the upper surface of the lower ear plate, and a positioning rod that can be inserted into the positioning hole is provided on the lower surface of the upper ear plate. A fisheye bolt is hinged to the lower ear plate, and a slot adapted to the fisheye bolt rod is provided on the upper ear plate. After the fisheye bolt is flipped upward, the rod is inserted into the slot, and a locking knob is screwed on the top of the fisheye bolt. After the locking knob is tightened, it presses against the upper surface of the upper ear plate to lock the upper and lower housings. By utilizing the cooperation of the flippable fisheye bolt and the slot, combined with the pressing action of the locking knob, quick assembly and disassembly and reliable locking can be completed without additional tools, which greatly facilitates the maintenance and replacement of internal components.

[0007] Furthermore, a sealing groove is provided on the mating surface of the lower shell and the upper shell, and a sealing ring is provided in the sealing groove; this effectively ensures the static sealing performance at the connection between the two, prevents external air from entering or gas from leaking out of the furnace, and ensures the stability and safety of the working environment inside the single crystal furnace.

[0008] Furthermore, multiple mounting holes are evenly distributed around the observation hole on the upper edge of the lower housing, and each mounting hole is fitted with a bolt. The lower housing is fixedly connected to the single crystal furnace wall by the bolts. A sealing gasket is provided at the contact surface between the lower housing and the single crystal furnace wall to ensure the stability of the entire observation window structure and, together with the sealing gasket, enhance the sealing effect of the contact surface between the lower housing and the furnace wall.

[0009] Furthermore, the viewing plate includes a circular rotating disk with at least two viewing holes evenly distributed on the same circumference around its own center. The inner diameter of each viewing hole matches the inner diameter of the observation hole. A viewing quartz plate is fixedly installed in each viewing hole, and the surface of the viewing quartz plate is flush with the surface of the rotating disk. When the viewing plate rotates, multiple viewing quartz plates are sequentially and precisely aligned between the two observation holes to achieve switching of the observation channel. By rotating the viewing plate, different quartz plates can be quickly switched to the observation position, realizing the function of quickly restoring a clear field of view without stopping the machine.

[0010] Furthermore, the viewing film cleaning assembly includes a cleaning brush plate with steel bristles on its top surface. A brush plate fixing groove is provided on the lower housing, and the cleaning brush plate is fixedly installed in the brush plate fixing groove by bolts. The steel bristles on the top of the cleaning brush plate protrude from the brush plate fixing groove and elastically abut against the lower surface of the viewing film. The width of the top surface of the cleaning brush plate is greater than or equal to the diameter of the viewing quartz film, enabling complete coverage of the viewing quartz film passing overhead, achieving synchronous cleaning during rotation. This allows the lower surface of the viewing film to pass through the cleaning assembly during rotation switching, with the steel bristles automatically wiping away any adhering contaminants.

[0011] Furthermore, the control assembly includes a rotary handle, a rotary rod, a first gear, and a second gear; a gear mounting groove is formed on the inner surface of the upper housing, and both the first gear and the second gear are located in the gear mounting groove. The second gear is concentrically fixedly connected to the display panel, and the first gear is located on one side of the second gear and meshes with it. One end of the rotary rod is coaxially fixedly connected to the first gear, and the other end of the rotary rod extends through the upper housing to the outside of the housing and is connected to the rotary handle; a sealing element is also provided between the rotary rod and the upper housing; thus realizing convenient switching operation of the internal display panel from outside the furnace.

[0012] Furthermore, the sealing element is located outside the housing and includes a sealing cover fitted onto the rotating rod. One end of the sealing cover is fixedly connected to the upper housing by bolts. A first sealing ring is provided at the contact surface between the sealing cover and the upper housing, and a second sealing ring is provided between the inner wall of the sealing cover and the outer circumferential surface of the rotating rod. The first and second sealing rings together achieve dynamic sealing at the penetration point of the rotating rod. Through the sealing cover and the sealing rings respectively provided on the end face and shaft diameter, multiple sealing barriers are formed, effectively solving the sealing problem at the rotating component and preventing leakage of gas inside and outside the furnace while ensuring operational flexibility.

[0013] Furthermore, the visual assembly includes a viewing plate and a pressure ring. The viewing plate is a high-temperature resistant quartz plate. The diameter of the viewing plate is larger than the inner diameter of the observation hole and the inner diameter of the pressure ring, but smaller than the outer diameter of the pressure ring. A third sealing ring is provided between the pressure ring and the viewing plate, and a fourth sealing ring is provided between the pressure ring and the upper housing. Multiple bolt holes are evenly distributed along the circumference of the pressure ring, and bolts pass through the bolt holes to securely connect it to the upper housing, ensuring the sealing of the observation window.

[0014] Furthermore, the rotating shaft is rotatably engaged with the viewing film and fixed to the lower housing, providing a reliable support center for the stable rotation of the viewing film.

[0015] The present invention, which adopts the above technical solution, has the following prominent features compared with the prior art: This invention, through a unique rotatable multi-position viewing plate combined with a cleaning component integrated within the structure, enables rapid switching between clean viewing windows during single crystal furnace operation. This effectively avoids the problem of having to stop the machine for disassembly and cleaning due to contamination of a single viewing window, significantly improving the continuous availability and ease of maintenance of the viewing windows. The cleaning component automatically cleans the quartz plate during window switching, ensuring that the viewing quartz plate between the two viewing holes remains clean at all times, guaranteeing the clarity of the observation field and the continuity of the production process. The overall structural design balances sealing, ease of operation, and maintenance efficiency, effectively solving the long-standing problem of viewing window maintenance in the industry. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main structure of an embodiment of the present invention; Figure 2 This is a schematic diagram of the front view of the upper shell structure according to an embodiment of the present invention; Figure 3 This is an embodiment of the present invention. Figure 2 Exploded view; Figure 4 This is a schematic diagram of the main structure of the sealing element according to an embodiment of the present invention; Figure 5 This is a cross-sectional structural diagram of the sealing element according to an embodiment of the present invention; Figure 6 This is a bottom view of the upper shell structure according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the front view of the housing structure in an embodiment of the present invention; Figure 8 This is an embodiment of the present invention. Figure 7 Exploded view; Figure 9 This is a schematic diagram of the main view structure of the viewable film according to an embodiment of the present invention; Figure 10 This is an embodiment of the present invention. Figure 9 Exploded view; The components in the diagram are labeled as follows: housing 1, locking assembly 2, viewing plate 3, viewing plate cleaning assembly 4, control assembly 5, viewing assembly 6, sealing ring 7, rotating shaft 8, upper housing 11, lower housing 12, observation hole 13, gear mounting groove 111, brush plate fixing groove 121, upper ear plate 21, slot 22, positioning rod 23, lower ear plate 24, fisheye bolt 25, locking knob 26, positioning hole 27, rotating disk 31, viewing hole 32, viewing quartz plate 33, cleaning brush plate 41, steel brush 42, rotating handle 51, rotating rod 52, first gear 53, second gear 54, seal 55, sealing cover 551, first sealing ring 552, second sealing ring 553, viewing observation plate 61, pressure ring 62, third sealing ring 63, fourth sealing ring 64. Detailed Implementation

[0017] The present invention will be further described below with reference to embodiments, which are intended only to provide a better understanding of the invention. Therefore, the examples given do not limit the scope of protection of the present invention.

[0018] See Figures 1-10A self-cleaning observation window structure for a single crystal furnace includes a housing 1, which is composed of an upper housing 11 and a lower housing 12. The upper housing 11 and the lower housing 12 are detachably connected by a locking assembly 2. An accommodating space is formed between the upper housing 11 and the lower housing 12. A viewing plate 3 is disposed in the accommodating space. The viewing plate 3 is rotatably connected between the upper housing 11 and the lower housing 12 via a rotating shaft 8. A viewing plate cleaning assembly 4 is disposed in the accommodating space and located between the viewing plate 3 and the lower housing 12. The cleaning assembly 4 elastically abuts against the lower surface of the viewing plate 3. A control assembly 5 for controlling the rotation of the viewing plate 3 is disposed on the upper housing 11. Observation holes 13 adapted to the size of the observation opening of the single crystal furnace are opened opposite to each other on the upper and lower housings. A viewing assembly 6 is disposed on the observation hole 13 of the upper housing 11.

[0019] The locking assembly 2 includes upper ear plates 21 evenly distributed along the outer edge of the upper housing 11 and lower ear plates 24 correspondingly distributed along the outer edge of the lower housing 12. The upper ear plates 21 and lower ear plates 24 are arranged in a one-to-one correspondence. The upper surface of the lower ear plate 24 is provided with a positioning hole 27, and the lower surface of the upper ear plate 21 is provided with a positioning rod 23 that can be inserted into the positioning hole 27. A fisheye bolt 25 is hinged to the lower ear plate 24, and a slot 22 adapted to the rod of the fisheye bolt 25 is provided on the upper ear plate 21. After the fisheye bolt 25 is flipped upward, the rod is inserted into the slot 22, and a locking knob 26 is screwed onto the top of the fisheye bolt 25. After the locking knob 26 is tightened, it presses against the upper surface of the upper ear plate 21 to lock the upper and lower housings. The cooperation between the flippable fisheye bolt 25 and the slot 22, combined with the locking knob 26, achieves the locking of the upper and lower housings. The clamping action enables quick assembly and disassembly and reliable locking without the need for additional tools, greatly facilitating the maintenance and replacement of internal components.

[0020] A sealing groove is provided on the mating surface of the lower shell 12 and the upper shell 11, and a sealing ring 7 is provided in the sealing groove; this effectively ensures the static sealing performance at the connection between the two, prevents external air from entering or gas from leaking out of the furnace, and ensures the stability and safety of the working environment inside the single crystal furnace.

[0021] Multiple mounting holes are evenly distributed around the observation hole 13 on the upper edge of the lower housing 12. Each mounting hole is fitted with a bolt, and the lower housing 12 is fixedly connected to the single crystal furnace wall through the bolts. A sealing gasket is provided at the contact surface between the lower housing 12 and the single crystal furnace wall to ensure the stability of the entire observation window structure and, together with the sealing gasket, enhance the sealing effect of the contact surface between the lower housing 12 and the furnace wall.

[0022] The viewing plate 3 includes a circular rotating disk 31, with at least two viewing holes 32 evenly distributed on the same circumference around its own center. The inner diameter of each viewing hole 32 is adapted to the inner diameter of the observation hole 13. A viewing quartz plate 33 is fixedly installed in each viewing hole 32, and the surface of the viewing quartz plate 33 is flush with the surface of the rotating disk 31. When the viewing plate 3 rotates, multiple viewing quartz plates 33 are sequentially and precisely aligned between the two observation holes 13, realizing the switching of the observation channel. By rotating the viewing plate 3, different quartz plates can be quickly switched to the observation position, realizing the function of quickly restoring a clear field of vision without stopping the machine.

[0023] The visual film cleaning assembly 4 includes a cleaning brush plate 41, on the top surface of which a steel brush 42 is provided. A brush plate fixing groove 121 is provided on the lower housing 12. The cleaning brush plate 41 is fixedly installed in the brush plate fixing groove 121 by bolts. The steel brush 42 on the top of the cleaning brush plate 41 protrudes out of the brush plate fixing groove 121 and elastically abuts against the lower surface of the visual film 3. The width of the top surface of the cleaning brush plate 41 is greater than or equal to the diameter of the visual quartz plate 33, which can completely cover the visual quartz plate 33 passing from above, realizing synchronous cleaning during rotation. When the visual film 3 rotates and switches, its lower surface passes through the cleaning assembly 4, and the steel brush 42 automatically wipes off the attached contaminants.

[0024] The control component 5 includes a rotary handle 51, a rotary rod 52, a first gear 53, and a second gear 54. A gear mounting groove 111 is provided on the inner surface of the upper housing 11. The first gear 53 and the second gear 54 are both located in the gear mounting groove 111, and the second gear 54 is concentrically fixedly connected to the viewing plate 3. The first gear 53 is located on one side of the second gear 54 and meshes with it. One end of the rotary rod 52 is coaxially fixedly connected to the first gear 53, and the other end of the rotary rod 52 extends through the upper housing 11 to the outside of the housing 1 and is connected to the rotary handle 51. A sealing element 55 is also provided between the rotary rod 52 and the upper housing 11. This enables convenient switching operation of the internal viewing plate 3 from outside the furnace.

[0025] The sealing element 55 is disposed on the outside of the housing 1, including a sealing cover 551 fitted onto the rotating rod 52. One end of the sealing cover 551 is fixedly connected to the upper housing 11 by bolts. A first sealing ring 552 is provided at the contact surface between the sealing cover 551 and the upper housing 11. A second sealing ring 553 is provided between the inner wall of the sealing cover 551 and the outer peripheral surface of the rotating rod 52. The first sealing ring 552 and the second sealing ring 553 together achieve dynamic sealing at the penetration point of the rotating rod 52. Through the sealing cover 551 and the sealing rings respectively disposed on the end face and the shaft diameter, multiple sealing barriers are formed, which effectively solves the sealing problem at the rotating part, and prevents leakage of gas inside and outside the furnace while ensuring operational flexibility.

[0026] The visual component 6 includes a visual observation plate 61 and a pressure ring 62. The visual observation plate 61 is a high-temperature resistant quartz plate. The diameter of the visual observation plate 61 is larger than the inner diameter of the observation hole 13 and the inner diameter of the pressure ring 62, but smaller than the outer diameter of the pressure ring 62. A third sealing ring 63 is provided between the pressure ring 62 and the visual observation plate 61, and a fourth sealing ring 64 is provided between the pressure ring 62 and the upper housing 11. Multiple bolt holes are evenly distributed along the circumference of the pressure ring 62, and bolts pass through the bolt holes to securely connect it to the upper housing 11, ensuring the sealing of the observation window.

[0027] The rotating shaft 8 is rotatably engaged with the viewing film 3 and fixed to the lower housing 12; providing a reliable support center for the stable rotation of the viewing film 3.

[0028] This invention, through a unique rotatable multi-position viewing plate combined with a cleaning component integrated within the structure, enables rapid switching between clean viewing windows during single crystal furnace operation. This effectively avoids the problem of having to stop the machine for disassembly and cleaning due to contamination of a single viewing window, significantly improving the continuous availability and ease of maintenance of the viewing windows. The cleaning component automatically cleans the quartz plate during window switching, ensuring that the viewing quartz plate between the two viewing holes remains clean at all times, guaranteeing the clarity of the observation field and the continuity of the production process. The overall structural design balances sealing, ease of operation, and maintenance efficiency, effectively solving the long-standing problem of viewing window maintenance in the industry.

[0029] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. All equivalent changes made based on the description and drawings of the present invention are included within the scope of the present invention.

Claims

1. A self-cleaning single crystal furnace observation window structure, comprising a housing, characterized in that: The housing consists of an upper housing and a lower housing, which are detachably connected by a locking assembly. A receiving space is formed between the upper and lower housings, and a viewing sheet is disposed within the receiving space. The viewing sheet is rotatably connected between the upper and lower housings via a rotating shaft. A viewing sheet cleaning assembly is disposed within the receiving space and between the viewing sheet and the lower housing, and the cleaning assembly elastically abuts against the lower surface of the viewing sheet. A control assembly for controlling the rotation of the viewing sheet is disposed on the upper housing. Observation holes adapted to the size of the observation port of the single crystal furnace are opened opposite each other on the upper and lower housings, and a viewing assembly is disposed on the observation hole of the upper housing.

2. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: The locking assembly includes upper ear plates evenly distributed along the outer edge of the upper shell and lower ear plates correspondingly distributed along the outer edge of the lower shell. The upper ear plates and lower ear plates are arranged in a one-to-one correspondence. A positioning hole is provided on the upper surface of the lower ear plate, and a positioning rod that can be inserted into the positioning hole is provided on the lower surface of the upper ear plate. A fisheye bolt is hinged on the lower ear plate, and a slot adapted to the body of the fisheye bolt is provided on the upper ear plate. After the fisheye bolt is flipped upward, the body is inserted into the slot, and a locking knob is screwed on the top of the fisheye bolt. After the locking knob is tightened, it presses against the upper surface of the upper ear plate to lock the upper and lower shells.

3. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: A sealing groove is provided on the mating surface of the lower shell and the upper shell, and a sealing ring is provided in the sealing groove.

4. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: Multiple mounting holes are evenly distributed around the observation hole on the upper edge of the lower housing. Each mounting hole contains a bolt, and the lower housing is fixedly connected to the single crystal furnace wall by the bolts. A sealing gasket is provided at the contact surface between the lower housing and the single crystal furnace wall.

5. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: The viewing plate includes a circular rotating disk with at least two viewing holes evenly distributed on the same circumference around its own center. The inner diameter of each viewing hole is adapted to the inner diameter of the observation hole. A viewing quartz plate is fixedly installed in each viewing hole, and the surface of the viewing quartz plate is flush with the surface of the rotating disk. When the viewing plate rotates, multiple viewing quartz plates are sequentially and precisely aligned between the two observation holes to achieve switching of the observation channel.

6. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: The visual film cleaning assembly includes a cleaning brush plate with steel bristles on its top surface. A brush plate fixing groove is provided on the lower housing, and the cleaning brush plate is fixedly installed in the brush plate fixing groove by bolts. The steel bristles on the top of the cleaning brush plate protrude out of the brush plate fixing groove and elastically abut against the lower surface of the visual film. The width of the top surface of the cleaning brush plate is greater than or equal to the diameter of the visual quartz film, which can completely cover the visual quartz film passing from above, and achieve synchronous cleaning during rotation.

7. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: The control assembly includes a rotary handle, a rotary rod, a first gear, and a second gear. A gear mounting groove is formed on the inner surface of the upper housing. Both the first gear and the second gear are located in the gear mounting groove, and the second gear is concentrically fixedly connected to the viewing plate. The first gear is located on one side of the second gear and meshes with it. One end of the rotary rod is coaxially fixedly connected to the first gear, and the other end of the rotary rod extends through the upper housing to the outside of the housing and is connected to the rotary handle. A seal is also provided between the rotary rod and the upper housing.

8. The self-cleaning single crystal furnace observation window structure according to claim 7, characterized in that: The sealing element is disposed on the outside of the housing and includes a sealing cover fitted on the rotating rod. One end of the sealing cover is fixedly connected to the upper housing by bolts. A first sealing ring is provided at the contact surface between the sealing cover and the upper housing. A second sealing ring is provided between the inner wall of the sealing cover and the outer peripheral surface of the rotating rod. The first sealing ring and the second sealing ring together achieve dynamic sealing at the penetration point of the rotating rod.

9. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: The visual component includes a viewing plate and a pressure ring. The viewing plate is a high-temperature resistant quartz plate. The diameter of the viewing plate is larger than the inner diameter of the observation hole and the inner diameter of the pressure ring, but smaller than the outer diameter of the pressure ring. A third sealing ring is provided between the pressure ring and the viewing plate, and a fourth sealing ring is provided between the pressure ring and the upper housing. Multiple bolt holes are evenly distributed along the circumference of the pressure ring, and bolts pass through the bolt holes to securely connect it to the upper housing.

10. The self-cleaning single crystal furnace observation window structure according to claim 1, characterized in that: The rotating shaft is rotatably engaged with the viewing film and fixed to the lower housing.

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