Manipulator supporting control support module

Abstract

The invention provides a manipulator support control bracket module, which comprises a linear motor driving module, a guide rail mounting support plate, a guide rail mounting support plate and a guide rail mounting support plate, the open stable frame is arranged at the bottom of the side, away from the linear motor driving module, of the guide rail mounting supporting plate. The supporting bracket is arranged at the top of one side, away from the linear motor driving module, of the guide rail mounting supporting plate; the bottom of the supporting bracket is connected with the open stable frame; the control module is arranged at the top of the open stable frame; the drag chain fixing end support is arranged on the left side or the right side of the open stable frame, the linear motor driving module and the equipment frame are separated and independently supported, and the open stable frame, the supporting support and the control module are arranged in a layered mode, so that the coupling influence of equipment vibration on the mechanical arm is reduced; the positioning precision of grabbing and discharging and the transferring position consistency are improved; control elements are integrated to the independent support, so that rapid parameter calibration and line maintenance are facilitated, the downtime is shortened, and the maintenance complexity is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing, and in particular to the field of wafer material transfer technology, specifically a robotic arm support and control bracket module. Background Technology

[0002] Currently, in the DDR5 automatic testing equipment for semiconductor module testing (MOD TEST), the linear motor drive module, which serves as the main body for the robotic arm movement, is installed on a frame on one side of the equipment. During the movement, it is subject to vibration interference from the testing equipment, causing unexpected fluctuations or tremors in the trajectory of the robotic arm that grasps materials. This affects the positioning accuracy of the robotic arm during grasping and unloading, and also causes slight displacement of the material position during the transfer process.

[0003] Furthermore, the control module for the movement and opening / closing of the robotic arm is integrated into the testing equipment, making it impossible to quickly adjust parameters to calibrate the robotic arm's trajectory during position verification. Additionally, the overall wiring harness is quite long, requiring each wire to be stripped and combed during maintenance, which is time-consuming and labor-intensive. Summary of the Invention

[0004] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a robotic arm support control bracket module to solve the difficulties of the prior art.

[0005] To achieve the above and other related objectives, the present invention provides a robotic arm support control bracket module, comprising:

[0006] A linear motor drive module 1, wherein a slider 11 is fitted on one side of the linear motor drive module 1;

[0007] The guide rail mounting support plate 2 is vertically positioned on the side of the linear motor drive module 1 away from the slider 11.

[0008] An open stabilizing frame 3 is bolted to the bottom of the guide rail mounting support plate 2 on the side away from the linear motor drive module 1.

[0009] Support bracket 4 is bolted to the top of the guide rail mounting support plate 2 on the side away from the linear motor drive module 1, and the bottom of the support bracket 4 is bolted to the open stabilizing frame 3.

[0010] Control module 5 is bolted to the top of the open stable frame 3;

[0011] The cable chain fixing end bracket 6 is located on the left or right side of the open stable frame 3.

[0012] According to the preferred embodiment, a guide rail embedding groove 21 is pre-set in the center of the side of the guide rail mounting support plate 2 near the guide rail mounting support plate 2. A linear motor drive module 1 is installed in the guide rail embedding groove 21. The linear motor drive module 1 is connected to the guide rail mounting support plate 2 by bolts.

[0013] According to the preferred scheme, Open Stable Framework 3 includes:

[0014] Left and right side plates 31 are bolted together and installed on the left and right sides of the bottom of the guide rail mounting support plate 2 away from the linear motor drive module 1.

[0015] The base 32 is located at the bottom of the guide rail mounting support plate 2. The top of the base 32 has a frame plate embedded groove 33. The frame plate embedded groove 33 is U-shaped. The guide rail mounting support plate 2 and the left and right side plates 31 are clamped in the frame plate embedded groove 33. The frame plate embedded groove 33 is connected to the guide rail mounting support plate 2 and the left and right side plates 31 by bolts.

[0016] The frame cover plate 34 is bolted to the top of the left and right side plates 31. The side wall of the frame cover plate 34 near the linear motor drive module 1 abuts against the guide rail mounting support plate 2. The frame cover plate 34 is bolted to the guide rail mounting support plate 2.

[0017] According to the preferred embodiment, weight reduction grooves 22 are provided at equal intervals on the left and right sides of the guide rail mounting support plate 2 in the area below the frame cover plate 34 and in the guide rail embedding groove 21.

[0018] According to the preferred embodiment, the support bracket 4 includes:

[0019] Support side plate 41, two support side plates 41 are provided, and the two support side plates 41 are bolted together and set on the left and right sides of the top of the guide rail mounting support plate 2 away from the linear motor drive module 1. The bottom of the support side plate 41 is connected to the frame cover plate 34 by bolts. The support side plate 41 is in the shape of a right trapezoid, and the top width of the support side plate 41 is smaller than the bottom width.

[0020] A crossbeam plate 42 is arranged vertically and spaced between two supporting side plates 41. The left and right sides of the crossbeam plate 42 are connected to the supporting side plates 41 by bolts.

[0021] The No. 3 weight reduction groove 43 is provided at intervals on the support side plate 41, located on the upper and lower sides of the crossbeam plate 42.

[0022] According to the preferred scheme, control module 5

[0023] The chassis placement cabinet 51 is located between the left and right side panels 31 and directly below the rack cover 34. The chassis placement cabinet 51 is connected to the left and right side panels 31 and the guide rail mounting support plate 2 by bolts.

[0024] The control cabinet 52 is installed in the cabinet space formed between the cabinet plate 51 and the rack cover plate 34;

[0025] Cable routing channels 53 are respectively opened on the top of the left and right side panels 31, and one side of the cable routing channels 53 communicates with the box space;

[0026] The screen bracket 54 is bolted to the top of the frame cover plate 34 on the side away from the guide rail mounting support plate 2, and the top of the screen bracket 54 is bolted to the display 55.

[0027] According to the preferred embodiment, a second weight-reducing groove 35 is provided in the left and right side plates 31 below the wiring groove 53 and in the center of the base 32.

[0028] According to the preferred embodiment, the cable chain fixing end bracket 6 is J-shaped, and a cable chain groove 61 is provided in the center of the cable chain fixing end bracket 6.

[0029] This invention employs a linear motor drive module, a guide rail mounting support plate, an open stabilizing frame, a support bracket, and a control module. By separating the linear motor drive module from the equipment frame and supporting it independently, and combining this with the layered arrangement of the open stabilizing frame, support bracket, and control module, the coupling effect of equipment vibration on the robotic arm is reduced, improving the positioning accuracy of gripping and unloading, as well as the consistency of transfer positions. Placing the control components on an independent bracket in the front facilitates rapid parameter calibration and circuit maintenance, shortens downtime, and reduces maintenance complexity.

[0030] The preferred embodiments of the invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the invention. Attached Figure Description

[0031] Figure 1 The diagram shown is a three-dimensional structural schematic of the present invention.

[0032] Figure 2 The diagram shown is a schematic diagram of the linear motor drive module structure in this invention.

[0033] Figure 3 The diagram shows the open stabilizing frame, support bracket, control module, and drag chain fixing end bracket in this invention.

[0034] Figure 4 The diagram shown is an exploded view of the present invention.

[0035] Label Explanation

[0036] 1. Linear motor drive module; 11. Slider;

[0037] 2. Guide rail mounting support plate;

[0038] 21. Guide rail embedding groove; 22. Weight reduction groove No. 1;

[0039] 3. Open and stable framework;

[0040] 31. Left and right side panels; 32. Base; 33. Embedded groove in frame plate; 34. Frame cover plate; 35. No. 2 weight reduction groove;

[0041] 4. Support bracket;

[0042] 41. Support side plate; 42. Crossbeam plate; 43. No. 3 weight reduction groove;

[0043] 5. Control module;

[0044] 51. Chassis mounting cabinet; 52. Control chassis; 53. Cable tray; 54. Screen bracket; 55. Monitor;

[0045] 6. Cable chain fixed end bracket; 61. Cable chain groove. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0047] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this invention may have fewer components, other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0048] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar terms do not necessarily indicate a quantity limitation. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0049] This invention proposes a robotic arm support control bracket module for use in the transfer process of semiconductor materials. This invention does not limit the specifications and types of specific materials to be transferred, but the structure of the linear motor drive module 1, guide rail mounting support plate 2, open stable frame 3, support bracket 4, and control module 5 is particularly suitable for material transfer.

[0050] In general, the robotic arm shock absorption support control bracket proposed in this invention mainly includes: a linear motor drive module 1, a guide rail mounting support plate 2, an open stabilizing frame 3, a support bracket 4, and a control module 5. (See also...) Figure 1 It shows the arrangement of the linear motor drive module 1, the guide rail mounting support plate 2, the open stabilizing frame 3, the support bracket 4, and the control module 5.

[0051] The linear motor drive module 1 is fitted with a slider 11 on one side. The guide rail mounting support plate 2 is vertically placed on the side of the linear motor drive module 1 away from the slider 11. The linear motor drive module 1, as the core support component, has a pre-set guide rail embedding groove 21 for locking the linear motor drive module and fixing it with bolts. At the same time, it provides an installation reference surface for the open stable frame 3 and the support bracket 4.

[0052] The aforementioned open stabilizing frame 3 is bolted to the bottom of the guide rail mounting support plate 2 on the side away from the linear motor drive module 1. The open stabilizing frame 3 includes: left and right side plates 31, a base 32, and a frame cover plate 34. The left and right side plates 31 are bolted to the left and right sides of the bottom of the guide rail mounting support plate 2 at the end away from the linear motor drive module 1, forming the vertical support of the frame. The base 32 is located at the bottom of the guide rail mounting support plate 2, and the top of the base 32 has a U-shaped frame plate embedded groove 33. The base is formed by bolted connections to the guide rail mounting support plate 2 and left and right side plates 31. The U-shaped embedded groove enhances the connection strength between the base and the side plates and support plates, improving the overall vibration resistance. The frame cover plate 34 is bolted to the top of the left and right side plates 31. The side wall of the frame cover plate 34 near the linear motor drive module 1 abuts against the guide rail mounting support plate 2. The frame cover plate 34 is connected to the guide rail mounting support plate 2 by bolts, so that the bottom of the open stable frame 3 forms a quadrilateral structure, which provides strong support for the bottom of the linear motor drive module 1.

[0053] The aforementioned support bracket 4 is bolted to the top of the guide rail mounting support plate 2 on the side away from the linear motor drive module 1. The bottom of the support bracket 4 is bolted to the open stabilizing frame 3. The support bracket 4 includes: two right-angled trapezoidal support side plates 41, spaced crossbeam plates 42, and a third weight-reducing groove 43. The support side plates 41 are bolted to the top left and right sides of the guide rail mounting support plate 2, and the bottom is connected to the frame cover plate 34. The design of being narrow at the top and wide at the bottom distributes the force. The crossbeam plates 42 are arranged vertically between the two support side plates and fixed with bolts to enhance the lateral rigidity of the support bracket 4. The third weight-reducing groove 43 is spaced on the top and bottom sides of the crossbeam plates of the support side plates.

[0054] The aforementioned control module 5 is bolted to the top of the open stable frame 3. Integrated into the open stable frame 3, the control module 5 allows for quick troubleshooting during maintenance of the linear motor drive module 1 and the robotic arm on it during actual use, thanks to its shorter and more standardized wiring. The display 55 shows the robotic arm's status in real time, improving debugging efficiency. The control module 5 includes: a chassis mounting cabinet 51, a control chassis 52, a cable tray 53, a screen bracket 54, and a display 55. The chassis mounting cabinet 51 is positioned between the left and right side panels 31. Directly below the rack cover 34, the chassis placement cabinet 51 is connected to the left and right side panels 31 and the guide rail mounting support plate 2 by bolts. The chassis placement cabinet 51, the left and right side panels 31 and the guide rail mounting support plate 2 form a cabinet space. The control cabinet 52 is installed in the cabinet space and integrates the control module for the movement / opening and closing of the robot arm. The cable trays 53 are respectively opened on the top of the left and right side panels 31. One side of the cable trays 53 is connected to the cabinet space for cable management. The screen bracket 54 is bolted to the top of the rack cover 34 on the side away from the guide rail mounting support plate 2. The top of the screen bracket 54 is bolted to the top of the display 55.

[0055] The aforementioned cable chain fixing end bracket 6 is located on the left or right side of the open stable frame 3. The cable chain fixing end bracket 6 is J-shaped, and a cable chain groove 61 is provided in the center of the cable chain fixing end bracket 6 for fixing one end of the cable chain, guiding the cable chain to move with the robot arm, and protecting the internal cables / pipelines.

[0056] It should also be noted that the weight reduction groove structure includes: No. 1, No. 2, and No. 3 weight reduction grooves. The No. 1 weight reduction groove 22 is located on the left and right sides of the guide rail mounting support plate 2, in the area below the frame cover plate 34 and in the guide rail embedding groove 21; the No. 2 weight reduction groove 35 is located below the cable routing groove of the left and right side plates 31 and in the center of the base 32; the No. 3 weight reduction groove 43 is located on the upper and lower sides of the crossbeam of the support bracket 4 supporting the side plate. Without significantly reducing the structural strength, the weight of each component is reduced, the design is lightweight, the amount of material used is reduced, the manufacturing cost is reduced, and the support frame becomes an open structure, which facilitates the free arrangement of the wiring.

[0057] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A robotic arm support and control bracket module, characterized in that, include: A linear motor drive module (1) is provided with a slider (11) mounted on one side of the linear motor drive module (1); The guide rail mounting support plate (2) is vertically positioned on the side of the linear motor drive module (1) away from the slider (11); An open stabilizing frame (3) is bolted to the bottom of the guide rail mounting support plate (2) on the side away from the linear motor drive module (1); Support bracket (4) is bolted to the top of the guide rail mounting support plate (2) on the side away from the linear motor drive module (1), and the bottom of the support bracket (4) is bolted to the open stabilizing frame (3). The control module (5) is bolted to the top of the open stabilizing frame (3); The cable chain fixing end bracket (6) is located on the left or right side of the open stabilizing frame (3).

2. The robotic arm shock absorption support control bracket according to claim 1, characterized in that, The guide rail mounting support plate (2) has a guide rail embedding groove (21) pre-set in the center of the side near the guide rail mounting support plate (2). A linear motor drive module (1) is installed in the guide rail embedding groove (21). The linear motor drive module (1) is connected to the guide rail mounting support plate (2) by bolts.

3. The robotic arm shock absorption support control bracket according to claim 2, characterized in that, The open stability framework (3) includes: Left and right side plates (31) are bolted together and installed on the left and right sides of the bottom of the guide rail mounting support plate (2) away from the linear motor drive module (1); The base (32) is located at the bottom of the guide rail mounting support plate (2). The top of the base (32) has a frame plate embedded groove (33) in the shape of a U. The guide rail mounting support plate (2) and the left and right side plates (31) are fitted inside the frame plate embedded groove (33). The frame plate embedded groove (33) is connected to the guide rail mounting support plate (2) and the left and right side plates (31) by bolts. The frame cover plate (34) is bolted to the top of the left and right side plates (31). The side wall of the frame cover plate (34) near the linear motor drive module (1) abuts against the guide rail mounting support plate (2). The frame cover plate (34) is bolted to the guide rail mounting support plate (2).

4. The robotic arm shock absorption support control bracket according to claim 3, characterized in that, The guide rail mounting support plate (2) has a No. 1 weight reduction groove (22) at equal intervals on the left and right sides of the area below the frame cover plate (34) and the guide rail embedding groove (21).

5. The robotic arm shock absorption support control bracket according to claim 4, characterized in that, The support bracket (4) includes: Support side plate (41), there are 2 support side plates (41), the 2 support side plates (41) are connected by bolts and set on the left and right sides of the top of the guide rail mounting support plate (2) away from the linear motor drive module (1), the bottom of the support side plate (41) is connected to the frame cover plate (34) by bolts, the support side plate (41) is in the shape of a right trapezoid, and the top width of the support side plate (41) is smaller than the bottom width; A crossbeam plate (42) is arranged vertically between two supporting side plates (41). The left and right sides of the crossbeam plate (42) are connected to the supporting side plates (41) by bolts. The No. 3 weight reduction groove (43) is spaced apart on the support side plate (41) and located on the upper and lower sides of the crossbeam plate (42).

6. The robotic arm shock absorption support control bracket according to claim 5, characterized in that, The control module (5) The chassis placement cabinet (51) is located between the left and right side panels (31) and directly below the rack cover (34). The chassis placement cabinet (51) is connected to the left and right side panels (31) and the guide rail mounting support plate (2) by bolts. Control cabinet (52), which is installed in the cabinet space formed between the cabinet placement panel (51) and the rack cover (34); Cable routing channels (53) are respectively opened on the top of the left and right side panels (31), and one side of the cable routing channels (53) is connected to the box space; A screen bracket (54) is bolted to the top of the frame cover plate (34) on the side away from the guide rail mounting support plate (2), and a display (55) is bolted to the top of the screen bracket (54).

7. The robotic arm shock absorption support control bracket according to claim 6, characterized in that, The left and right side plates (31) are provided with a second weight reduction groove (35) located below the wiring groove (53) and in the center of the base (32).

8. The robotic arm shock absorption support control bracket according to claim 7, characterized in that, The cable chain fixing end bracket (6) is J-shaped, and a cable chain groove (61) is provided in the center of the cable chain fixing end bracket (6).

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