Quartz boat frame, quartz boat frame grooving and clamping device and use method of quartz boat frame grooving and clamping device

Abstract

The invention relates to the technical field of semiconductor processing equipment, in particular to a quartz boat frame, a grooving and clamping device for the quartz boat frame and a use method of the grooving and clamping device. The vertical plate is arranged on the bottom plate; the two outer clamping plates are arranged on the bottom plate and used for clamping the outer side faces of the two first groove plates. The U-shaped clamp is arranged on the vertical plate and is used for clamping the side plate; and the top plate is arranged on the vertical plate and is used for supporting the upper plate. Rapid positioning and stable fixing of the quartz boat frame can be achieved, the machining efficiency is improved, and the product percent of pass is increased.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing equipment technology, and more specifically, to a quartz boat frame, a grooving clamping device for the quartz boat frame, and a method of using the same. Background Technology

[0002] Quartz boats are carriers used in the silicon wafer production process, primarily for loading and cleaning silicon wafers. To ensure stable support of the silicon wafers, several precise grooves need to be machined on the quartz boat. The dimensional and positional accuracy of these grooves directly affects the quality of subsequent silicon wafer processing; therefore, the grooving process of the quartz boat is one of the core steps in its production.

[0003] Currently, the industry commonly uses a "high-strength wax bonding and fixing" technique for grooving quartz boat frames (especially Z-shaped quartz boat frames). This involves bonding multiple quartz blocks to an L-shaped quartz boat frame using melted high-strength wax, then allowing the wax to cool and solidify to secure the frame. This wax bonding process is time-consuming and requires constant manual adjustment of the quartz boat frame's position using dial gauges to ensure the accuracy of subsequent grooving. However, due to the unique shape of quartz boat frames, the wax bonding method cannot guarantee sufficient strength and precision, making it difficult to achieve the design accuracy requirements for grooving. Specifically, the high-strength wax is affected by environmental temperature and other factors, causing slight misalignment during processing, which can easily lead to breakage. Furthermore, misalignment of the reference surface can result in dimensional defects after processing, affecting product quality and ultimately increasing the defect rate. Summary of the Invention

[0004] The main objective of this invention is to provide a quartz boat frame, a grooving clamping device for the quartz boat frame, and a method for using the same, in order to solve the technical problems mentioned in the background art.

[0005] To address the aforementioned technical problems, this invention proposes a quartz boat frame with a Z-shaped structure, comprising: Side panels; The top plate is located at the top of the side plate; The first groove plate has two pieces, which are symmetrically arranged at both ends on the same side of the side plate below; The second groove plate has two pieces, which are symmetrically arranged at both ends of the same side of the side plate below, and the two second groove plates are located between the two first groove plates; And a reinforcing plate, having two pieces, which respectively connect the first groove plate and the second groove plate.

[0006] On the other hand, a quartz boat frame slotting clamping device is proposed, comprising: Base plate; The upright plate is set on the base plate; The outer clamping plate has two pieces and is set on the base plate to clamp the outer sides of the two first groove plates; U-shaped clamps are installed on the upright plate to clamp the side plates; And the top plate, which is set on the vertical plate, is used to support the upper plate.

[0007] In any of the above technical solutions, the outer clamping plate is further characterized by an L-shaped structure, with its bottom surface connected to the bottom plate and its side surface used to abut against the outer side surface of the first groove plate.

[0008] In any of the above technical solutions, further comprising: The inner clamping plate consists of four pieces, which are set on the bottom plate in pairs to clamp the two sides of the two second groove plates.

[0009] In any of the above technical solutions, the inner clamping plate is further characterized by an L-shaped structure, with its bottom surface connected to the bottom plate and its side surface used to abut against the side surface of the second groove plate.

[0010] In any of the above technical solutions, a first fastening bolt is further provided on the U-shaped clamp for fixing the side plate to the U-shaped clamp.

[0011] In any of the above technical solutions, further comprising: A height adjustment plate, installed on the top plate, is used to adjust the support height of the upper plate; And a second fastening bolt, used to fix the upper plate to the height adjustment plate.

[0012] In any of the above technical solutions, further comprising: A square groove is formed on the base plate; The outer clamping plate and the inner clamping plate are both located within the square groove.

[0013] On the other hand, a method for using a quartz boat frame grooving clamping device is also proposed, the steps of which are as follows: Place the quartz boat frame on the base plate and adjust its position so that its side plates are flush against the upright plate. Replace the height adjustment plate with one of the appropriate thickness so that the bottom of the quartz boat frame rests against the base plate while the top plate rests against the height adjustment plate. Adjust the outer clamping plate to clamp the first hook plate of the quartz boat frame, and adjust the inner clamping plate to clamp the second hook plate. Secure the top plate and side plates of the quartz boat frame with the first and second fastening bolts, respectively. This completes the fixing and clamping of the quartz boat frame.

[0014] Beneficial effects: Compared with existing technologies, it can achieve rapid positioning and stable fixation of quartz boat frames, improving processing efficiency and product qualification rate. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the quartz boat frame of the present invention; Figure 2 This is a schematic diagram of the clamping device of the present invention; Figure 3 This is a schematic diagram of the structure of the quartz boat frame of the present invention fixed on the clamping device.

[0017] The annotations in the attached figures are explained as follows: 1. Side plate; 2. Top plate; 3. First groove plate; 4. Second groove plate; 5. Reinforcing plate; 100. Base; 200. Bottom plate; 210. Square groove; 300. Vertical plate; 400. Outer clamping plate; 500. U-shaped clamp; 510. First fastening bolt; 600. Top plate; 700. Inner clamping plate; 800. Height adjustment plate; 900. Second fastening bolt. Detailed Implementation

[0018] Hereinafter, exemplary embodiments according to this application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are merely a part of the embodiments of this application, and not all of the embodiments of this application. It should be understood that this application is not limited to the exemplary embodiments described herein. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention.

[0019] It should be noted that, as shown in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, and these steps and elements do not constitute an exclusive list; the method or apparatus may also include other steps or elements.

[0020] If the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0021] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0022] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0023] The following embodiments will provide a detailed description of a quartz boat frame, a grooving clamping device for the quartz boat frame, and its usage method.

[0024] Example 1: like Figure 1 As shown, this embodiment proposes a quartz boat frame with a Z-shaped structure, including: a side plate 1; a top plate 2, one end of which is disposed on the top of the side plate 1; two first groove plates 3, which are symmetrically disposed at both ends of the same side below the side plate 1; two second groove plates 4, which are symmetrically disposed at both ends of the same side below the side plate 1, with the two second groove plates 4 located between the two first groove plates 3; and two reinforcing plates 5, which respectively connect the first groove plates 3 and the second groove plates 4.

[0025] To address the issue of low space utilization caused by traditional quartz boat frames only being able to support silicon wafers on one side or a single layer, a Z-shaped structure was adopted, incorporating two first groove plates 3 and two second groove plates 4. This allows the entire quartz boat frame to support more silicon wafers, thus meeting the needs of mass production. Furthermore, a reinforcing plate was added to enhance the overall strength of the quartz boat frame.

[0026] Example 2: This embodiment proposes a quartz boat frame slotting clamping device for clamping the quartz boat frame in Embodiment 1.

[0027] like Figures 1-3 As shown, in this embodiment, a quartz boat frame grooving clamping device includes: a base plate 200; a vertical plate 300 disposed on the base plate 200; two outer clamping plates 400 disposed on the base plate 200 for clamping the outer sides of the two first groove plates 3; a U-shaped clamp 500 disposed on the vertical plate 300 for clamping the side plates 1; and a top plate 600 disposed on the vertical plate 300 for supporting the upper plate 2.

[0028] The quartz boat frame is divided into an upper part and a lower part. The upper part refers to the upper plate 2 and the upper side plate 1, while the lower part consists of the lower side plate 1, the first groove plate 3, the second groove plate 4, and the reinforcing plate 5. In the traditional production process of quartz boat frames, the lower part is first grooved, and then the upper part is welded to it. This method does not guarantee quality, mainly because the welding / annealing process causes a "groove relative reference deviation," increasing the defect rate.

[0029] Therefore, this embodiment is equipped with multi-dimensional fixing fixtures. Specifically, the upper and lower halves of the quartz boat frame are first welded together, and then the quartz boat frame is placed on the base plate 200. The position of the quartz boat frame is adjusted so that its side plate 1 is close to the upright plate 300 and the upper plate 2 is against the top plate 600. Then, the quartz boat frame is fixed by the outer clamping plate 400 and the U-shaped clamp 500 so that it will not be displaced during grooving, thereby ensuring its grooving accuracy.

[0030] In this embodiment, welding is performed first, followed by grooving. This method avoids defects such as reference offset, stress deformation, and incomplete weld cracks caused by secondary welding after grooving. At the same time, it eliminates the welding process, shortens the processing cycle, and reduces the defect rate.

[0031] In this embodiment, the optimized component further includes: an inner clamping plate 700, which has four pieces and is disposed on the base plate 200, in pairs, for clamping the two sides of the two second groove plates 4.

[0032] The first groove plate 3 is clamped by two outer clamping plates 400, and then the second hook plate is clamped by four inner clamping plates 700 to further improve the clamping effect on the quartz boat frame.

[0033] It should be noted that the outer clamping plate 400 has an L-shaped structure, with its bottom surface connected to the bottom plate 200, and its side surface used to abut against the outer side surface of the first groove plate 3. The inner clamping plate 700 has an L-shaped structure, with its bottom surface connected to the bottom plate 200, and its side surface used to abut against the side surface of the second groove plate 4.

[0034] The outer clamping plate 400 and the inner clamping plate 700 are set as an L-shaped structure, which clamps the groove plate through their respective sides, ensuring clamping without scratching the groove plate.

[0035] It should be noted that both the outer clamping plate 400 and the inner clamping plate 700 are fixed by bolts, and the bolt fixing holes on the outer clamping plate 400 and the inner clamping plate 700 are slotted holes to facilitate the movement of the outer clamping plate 400 and the inner clamping plate 700 after the bolts are loosened, thereby adjusting the position of the outer clamping plate 400 and the inner clamping plate 700. After the position is adjusted, the bolts can be tightened.

[0036] In this embodiment, the optimized component also includes: a base 100, disposed at the bottom of the base plate 200, for raising the height of the base plate 200.

[0037] Example 3: This embodiment is a further improvement based on Embodiment 2.

[0038] As shown in the figure, in this embodiment, a square groove 210 is also provided on the base plate 200; wherein, the outer clamping plate 400 and the inner clamping plate 700 are both located in the square groove 210.

[0039] A square groove 210 is opened on the base plate 200 to avoid interference between the cutting tool and the tooling during the grooving process.

[0040] Example 4: This embodiment is a further improvement based on Embodiment 2.

[0041] like Figure 2 and Figure 3 As shown, in this embodiment, a first fastening bolt 510 is provided on the U-shaped clamp 500 for fixing the side plate 1 to the U-shaped clamp 500.

[0042] There are two U-shaped clamps 500. When the side plate 1 of the quartz boat frame abuts against the upright plate 300, the two U-shaped clamps 500 are clamped on both sides of the upright plate 300. At this time, the side plate 1 is located inside the U-shaped clamps 500. Then, by rotating the first fastening bolt 510, the protruding end of the first fastening bolt 510 continuously pushes the side plate 1, so that it abuts against the inner wall of the U-shaped clamp 500, thereby achieving the clamping of the side plate 1 of the quartz boat frame.

[0043] Example 5: This embodiment is a further improvement based on Embodiment 2.

[0044] like Figure 2 As shown, in this embodiment, it also includes: a height adjustment plate 800, which is disposed on the top plate 600 and is used to adjust the support height of the upper plate 2; And a second fastening bolt 900, used to fix the upper plate 2 to the height adjustment plate 800.

[0045] The height of the side plate 1 varies for different models of quartz boat frames. Based on this, a height adjustment plate 800 is provided. When processing quartz boat frames of different heights, the height adjustment plate 800 of different heights can be replaced to achieve the desired fit, which is very convenient.

[0046] Example 6: This embodiment presents a method for using a quartz boat frame grooving clamping device. The steps of the method are as follows: Place the quartz boat frame on the base plate 200 and adjust its position so that its side plate 1 is tightly against the upright plate 300. Replace the height adjustment plate 800 with one of the corresponding thickness so that the bottom of the quartz boat frame rests against the base plate 200 while the top plate 2 rests against the height adjustment plate 800. Adjust the outer clamping plate 400 to clamp the first hook plate of the quartz boat frame, and adjust the inner clamping plate 700 to clamp the second hook plate of the quartz boat frame. Secure the top plate 2 and side plate 1 of the quartz boat frame with the first fastening bolt 510 and the second fastening bolt 900, respectively. This completes the fixing and clamping of the quartz boat frame. The fixed quartz boat frame can then be grooved using a cutting tool.

[0047] The various embodiments of this disclosure have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or improvement of the technology in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A quartz boat frame, characterized in that, The quartz boat frame has a Z-shaped structure and includes: Side panel (1); The upper plate (2) is located at one end on the top of the side plate (1); The first groove plate (3) has two pieces, which are symmetrically arranged at both ends below the same side of the side plate (1); The second groove plate (4) has two pieces and is symmetrically arranged at both ends below the same side of the side plate (1). The two second groove plates (4) are located between the two first groove plates (3). And a reinforcing plate (5), which has two pieces and connects the first groove plate (3) and the second groove plate (4) respectively.

2. A quartz boat frame slotting clamping device, characterized in that, For clamping the quartz boat frame as described in claim 1.

3. The quartz boat frame slotting clamping device as described in claim 2, characterized in that, include: Base plate (200); A vertical plate (300) is disposed on the base plate (200); The outer clamping plate (400) has two pieces and is disposed on the bottom plate (200) for clamping the outer sides of the two first groove plates (3); U-shaped clamp (500) is disposed on the upright plate (300) and is used to clamp the side plate (1). And a top plate (600), which is disposed on the vertical plate (300) and is used to support the upper plate (2).

4. The quartz boat frame grooving clamping device as described in claim 3, characterized in that, The outer clamping plate (400) has an L-shaped structure, its bottom surface is connected to the bottom plate (200), and its side surface is used to abut against the outer side surface of the first groove plate (3).

5. The quartz boat frame grooving clamping device as described in claim 3, characterized in that, Also includes: The inner clamping plate (700) has four pieces and is set on the bottom plate (200) in pairs to clamp the two sides of the second groove plate (4).

6. The quartz boat frame grooving clamping device as described in claim 5, characterized in that, The inner clamping plate (700) has an L-shaped structure, its bottom surface is connected to the bottom plate (200), and its side surface is used to abut against the side surface of the second groove plate (4).

7. The quartz boat frame grooving clamping device as described in claim 5, characterized in that, The U-shaped clamp (500) is provided with a first fastening bolt (510) for fixing the side plate (1) to the U-shaped clamp (500).

8. The quartz boat frame grooving clamping device as described in claim 7, characterized in that, Also includes: A height adjustment plate (800) is provided on the top plate (600) for adjusting the support height of the upper plate (2); And a second fastening bolt (900) for fixing the upper plate (2) to the height adjustment plate (800).

9. The quartz boat frame grooving clamping device as described in claim 5, characterized in that, Also includes: A square groove (210) is formed on the base plate (200); The outer clamping plate (400) and the inner clamping plate (700) are both located within the square groove (210).

10. A method of using the quartz boat frame grooving clamping device as described in claim 8, characterized in that, The steps for using this method are as follows: Place the quartz boat frame on the base plate (200), adjust the position of the quartz boat frame so that its side plate (1) is close to the upright plate (300); replace the height adjustment plate (800) of the corresponding thickness so that the bottom of the quartz boat frame is against the base plate (200) and the top plate (2) is against the height adjustment plate (800); clamp the first hook plate of the quartz boat frame by adjusting the outer clamping plate (400) and clamp the second hook plate of the quartz boat frame by adjusting the inner clamping plate (700); fix the top plate (2) and side plate (1) of the quartz boat frame by the first fastening bolt (510) and the second fastening bolt (900) respectively; and the quartz boat frame can be fixed and clamped.

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