Infrared metasurface array spectrometer for spectrum detection
The infrared metasurface array spectrometer, which optimizes the subwavelength array design and optical path layout, solves the problems of insufficient spectral accuracy, spatial resolution and dynamic response capability of existing infrared spectrometers, and realizes high-precision, fast spectral measurement and equipment miniaturization.
Patent Information
- Application Number
- CN202511717921.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-21
- Publication Date
- 2026-02-17
AI Technical Summary
Existing infrared spectrometers suffer from insufficient spectral accuracy, low spatial resolution, weak dynamic response, and inadequate structural integration, making it difficult to meet the application requirements of high precision, real-time operation, and miniaturization.
The infrared metasurface array spectrometer, which employs a subwavelength array design and optimized optical path layout, achieves efficient spectral dispersion and focusing over a wide wavelength range by working collaboratively through four subwavelength arrays with clearly defined functions, combined with precise phase modulation formulas and particle swarm optimization algorithms. The folded optical path design and high-transmittance materials enhance the compactness and dynamic response capabilities of the device.
It achieves high-precision spectral measurement over a wide band, improves spatial resolution and dynamic response capability, and significantly reduces the size of the equipment, providing a practical solution for the miniaturization and integration of infrared spectral detection technology.
Smart Images
Figure CN121540283A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of infrared spectroscopy detection technology, and in particular to an infrared metasurface array spectrometer for spectral detection. Background Technology
[0002] Infrared spectroscopy technology has advantages such as being non-destructive, rapid, pollution-free, and enabling in-situ analysis. It can capture the spectral characteristics of substances in the infrared band to obtain information on their structure, composition, and properties, and has been widely used in many fields such as chemical engineering, medicine, environmental protection, and aerospace. Early infrared spectrometers relied on traditional optical components, such as prisms and gratings, to achieve spectral dispersion. Although this laid the technological foundation, it had problems such as being bulky, having a complex structure, and being poorly portable, making it difficult to meet the needs of scenarios such as on-site detection and online monitoring.
[0003] In recent years, the rise of metamaterials / metasurface technology has made it possible to innovate infrared spectroscopy detection equipment. As a two-dimensional artificial structure composed of subwavelength scale unit structures, metasurfaces have excellent electromagnetic wave manipulation capabilities, enabling precise control of the phase, amplitude, and polarization state of light, breaking the performance limitations of traditional optical components. With in-depth research, metasurface-based spectrometers have gradually become a hot topic, showing significant potential in miniaturization and integration, and driving the development of infrared spectroscopy detection technology towards lightweight and portable directions.
[0004] However, existing metasurface infrared spectrometers still have many problems that urgently need to be solved: First, the spectral accuracy is insufficient, limited by the unit structure design and phase control accuracy, making it difficult to achieve high-precision spectral dispersion over a wide spectral range; second, the spatial resolution is low, as the focusing performance of traditional metasurface arrays is affected by aberrations, resulting in poor focusing performance over a wide field of view; third, the dynamic response capability is weak, making it impossible to quickly capture instantaneous changes in spectral signals; and fourth, the structural integration is insufficient, with some solutions still relying on complex auxiliary optical systems, failing to fully utilize the compact advantages of metasurfaces. These problems make it difficult for existing equipment to meet the application requirements of high precision, real-time operation, and miniaturization, limiting the widespread adoption of infrared spectral detection technology in more scenarios.
[0005] Therefore, there is an urgent need in this field for an infrared metasurface array spectrometer for spectral detection to solve the above problems. Summary of the Invention
[0006] This invention provides an infrared metasurface array spectrometer for spectral detection, aiming to solve the problems of low spectral accuracy, insufficient spatial resolution, weak dynamic response, and low integration of existing equipment by optimizing the subwavelength array design and optical path layout, so as to achieve high-precision and rapid measurement of infrared spectra and provide technical support for miniaturized and integrated infrared spectral detection equipment.
[0007] This invention provides an infrared metasurface array spectrometer for spectral detection, comprising:
[0008] A pair of opposing substrates;
[0009] Multiple subwavelength arrays, wherein the subwavelength arrays are formed by multiple unit structure arrays and disposed on the substrate;
[0010] A detector array;
[0011] The plurality of subwavelength arrays are configured sequentially to achieve lateral spectral splitting, angular dispersion and focusing, and spatial separation on the focal plane, and the detector array is used to acquire the separated spectral information.
[0012] Compared with the prior art, the beneficial effects of this application are as follows:
[0013] 1. This application achieves efficient spectral dispersion and focusing of light over a wide wavelength range by working together with four subwavelength arrays with clearly defined functions, combined with a precise phase control formula and particle swarm optimization algorithm. It effectively corrects monochromatic aberration, achieves near-diffraction-limited focusing effect, and ensures high accuracy of spectral measurements.
[0014] 2. The synergistic design of the subwavelength array in this application enables the spectrometer to maintain excellent spatial resolution over a wide field of view, while the compact optical path layout reduces optical signal transmission loss and improves the device's ability to capture instantaneous spectral signals, meeting the needs of rapid detection.
[0015] 3. Based on the metasurface folded optical path design and combined with the subwavelength scale unit structure, this application significantly reduces the size and weight of the device, realizes the miniaturization and lightweighting of key components, and solves the problem of poor portability of traditional devices.
[0016] 4. The subwavelength array of this application uses high transmittance materials in the infrared band, and the substrate uses high reflectivity materials, which reduces energy loss, ensures stable operation of the equipment in different environments, and extends its service life. Through structural innovation and technical optimization, this application comprehensively improves the overall performance of infrared spectrometers, provides a practical solution for the miniaturization, integration, and high-precision development of infrared spectral detection technology, and broadens its application scenarios.
[0017] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description
[0018] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention, but do not constitute a limitation thereof; in the drawings:
[0019] Figure 1This is a schematic diagram of the structure of an infrared metasurface array spectrometer for spectral detection provided in an embodiment of the present invention;
[0020] Figure 2 These are schematic diagrams illustrating different morphologies of the unit structure in the subwavelength array provided in this embodiment of the invention;
[0021] Figure 3 This is a schematic diagram illustrating the structure and function of the first subwavelength array provided in an embodiment of the present invention;
[0022] In the figure, 1 is the first subwavelength array; 2 is the second subwavelength array; 3 is the third subwavelength array; 4 is the fourth subwavelength array; 5 is the substrate; 6 is the unit structure; 7 is the substrate; and 8 is the detector array. Detailed Implementation
[0023] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.
[0024] Example 1:
[0025] This invention provides an infrared metasurface array spectrometer for spectral detection. Please refer to [link to relevant documentation]. Figure 1-3 ,include:
[0026] A pair of opposing substrates 5;
[0027] Multiple subwavelength arrays, which are formed by multiple unit structures 6 arrays and disposed on substrate 5;
[0028] One detector array 8;
[0029] Among them, multiple subwavelength arrays are configured in sequence to achieve lateral beam splitting, angular dispersion and focusing, and spatial separation on the focal plane, and the detector array 8 is used to acquire the spectral information after separation.
[0030] Specifically, the substrate 5 is a pair of parallel substrates 5, and the subwavelength array is fixedly connected to the substrate 5 via the base 7. Each subwavelength array is composed of multiple superpixels, and the length and width of the unit structure 6 are smaller than the working wavelength. This spectrometer is based on a folded and compact design of a metasurface structure. It corrects monochromatic aberration through the synergistic effect of multiple subwavelength arrays, achieving near-diffraction-limited focusing in a wide field of view, thereby improving the spatial resolution, compactness, and dynamic response capability of infrared spectroscopy measurements. Figure 1 As shown, the assembly position relationship of the parallel substrate 5, multiple subwavelength arrays, and detector array 8 is demonstrated, ensuring that the optical path is folded compactly, providing structural support for miniaturization and integration.
[0031] In one embodiment, the plurality of subwavelength arrays include a first subwavelength array 1, a second subwavelength array 2, a third subwavelength array 3, and a fourth subwavelength array 4, wherein the first subwavelength array 1 and the other subwavelength arrays are respectively disposed on different substrates 5.
[0032] Specifically, the first subwavelength array 1 is disposed on one of the parallel substrates 5, while the second subwavelength array 2, the third subwavelength array 3, and the fourth subwavelength array 4 are disposed on another opposing parallel substrate 5. The distribution of the four subwavelength arrays adapts to the requirements of coordinated transmission and reflection of the optical path, optimizing the overall size of the spectrometer; for example Figure 1 As shown, the partitioning of four subwavelength arrays on two parallel substrates 5 provides a structural basis for the orderly realization of subsequent beam splitting and focusing functions.
[0033] In one embodiment, the first subwavelength array 1 is used for lateral beam splitting to form a lateral line array spectrum, the second subwavelength array 2 is used to disperse and focus light of different wavelengths to different angles, and the third subwavelength array 3 and the fourth subwavelength array 4 are used to focus light from different angles to different points on the focal plane.
[0034] Specifically, the first subwavelength array 1 employs the phase-splitting principle to focus a broadband incident beam onto a fixed focal plane and generate significant lateral shifts at different wavelengths, thus forming a lateral linear spectrum. The second subwavelength array 2 has a periodic phase distribution, which can deflect the incident light to a large angle inside the substrate. Furthermore, the structure is optimized using a particle swarm optimization algorithm to maximize deflection efficiency at multiple wavelengths in two polarization bands. The third and fourth subwavelength arrays 3 and 4 precisely focus the light onto different positions on the focal plane for different incident angles corresponding to different input wavelengths, and finally, the complete spectral information is captured by the detector array 8. Figure 3 As shown, Figure 3 This is a schematic diagram of the first subwavelength array 1, which covers its structural design logic for lateral beam splitting, ensuring stable and reliable lateral dispersion.
[0035] In one implementation, the subwavelength array structure changes the size of the unit structure 6 by means of the transmission phase principle, thereby achieving the modulation of the electromagnetic wave phase.
[0036] Specifically, the subwavelength array structure is based on Huygens' electromagnetic metasurface design concept, combined with a series of highly transmittance and controllable artificial atoms covering the 2π transmission phase. By changing the size parameters of the unit structure 6, the device can provide complete 2π phase coverage in both transmission and reflection modes, thereby achieving precise control of the electromagnetic wave phase; combined with Figure 2 As shown, Figure 2Various unit structures 6 with different structures are shown, including cylindrical, elliptical cylindrical, and rectangular cylindrical structures. The different unit structures 6 can be adapted to different phase modulation requirements by adjusting their size, ensuring the functional adaptability of the subwavelength array.
[0037] In one implementation, the phase distribution of the subwavelength array is calculated using the following formula:
[0038]
[0039] Where λ is the incident light wavelength, f is the focusing focal length, and (x,y) are the position coordinates on the substrate, (x...y ... f ,y f () is the focal position.
[0040] Specifically, this formula is the total phase calculation formula required for subwavelength array focusing. An XY plane rectangular coordinate system is established with the plane of the substrate 5 where the first subwavelength array 1 is located, with the origin at (0, 0) and (x, y) being the coordinates of any position on the substrate 5. Through this formula, the phase distribution of the second subwavelength array 2, the third subwavelength array 3, and the fourth subwavelength array 4 can be accurately calculated, providing a mathematical basis for the size design of the unit structure 6 in each subwavelength array and ensuring the realization of the focusing function.
[0041] In one implementation, the phase distribution of the first subwavelength array satisfies:
[0042]
[0043] Where λ is the incident light wavelength, (x,y) are the position coordinates on the first subwavelength array, (x',y') are the focal position, f is the focal length, and θ is the incident angle.
[0044] Specifically, this formula is the phase compensation expression for the first subwavelength array 1 when achieving lateral dispersion. It is used to compensate for the phase profile provided by the superlens at different wavelengths, ensuring that the broadband incident beam forms a stable lateral line array spectrum on the fixed focal plane. Each parameter in the formula corresponds one-to-one with the actual assembly parameters of the spectrometer. (x,y) are the position coordinates on the first subwavelength array 1. Through this formula, the phase distribution of the first subwavelength array 1 can be accurately optimized to ensure the lateral spectral dispersion effect.
[0045] In one embodiment, the size of the unit structure 6 is smaller than the wavelength of the incident light, ranging from 0.2 to 1.2 μm.
[0046] Specifically, the length and width of unit structure 6 are strictly controlled below the incident light wavelength, with a size range limited to 0.2-1.2 μm. This size design enables unit structure 6 to meet subwavelength characteristics, effectively participate in electromagnetic wave phase modulation and optical path guidance, and avoid optical path interference caused by excessive size; combined with Figure 2 As shown, different types of unit structures 6 are designed within this size range to ensure that the structural parameters are precisely matched with the functional requirements of the subwavelength array.
[0047] In one implementation, the first subwavelength array 1 of a plurality of subwavelength arrays controls the phase of the transmitted electromagnetic wave, while the remaining subwavelength arrays control the phase of the reflected electromagnetic wave.
[0048] Specifically, the first subwavelength array 1 is configured to control the phase of the transmitted electromagnetic wave, ensuring that the incident light can be transmitted efficiently and complete the lateral beam splitting; the second subwavelength array 2, the third subwavelength array 3, and the fourth subwavelength array 4 are configured to control the phase of the reflected electromagnetic wave, adapting to the reflection characteristics of the substrate 5 on which they are located, and realizing the folded transmission of the optical path; this coordinated control mode of transmission and reflection, together with two parallel substrates 5 arranged opposite to each other, not only improves the spectral detection performance, but also further compresses the overall size of the spectrometer, realizing miniaturization.
[0049] In one embodiment, the material of the subwavelength array is a high-transmittance material in the infrared band, selected from one or more of Si, Ge, SiO2, ZnSe, ZnS, BaF2, MgF2, CaF2, AlN, MgO, ZnO, VO2, Si3N4, or Al2O3.
[0050] Specifically, the subwavelength array includes a first subwavelength array 1, a second subwavelength array 2, a third subwavelength array 3, a fourth subwavelength array 4, and a substrate 7. The nanopillar materials are all selected from the aforementioned high-transmittance materials in the infrared band. Such materials have high contrast with the refractive index of the environment at the designed wavelength, which can highly concentrate electromagnetic waves in the array structure, while reducing energy loss in the structure of the substrate 7, ensuring high accuracy of infrared spectroscopy measurement, and providing material support for the high-resolution performance of the spectrometer.
[0051] In one embodiment, the substrate 5 is made of a high reflectivity material in the infrared band, selected from one or more of Au, Ag, or Al.
[0052] Specifically, substrate 5, as the carrier structure of the subwavelength array, needs to be selected in a way that matches the reflection operation modes of the second subwavelength array 2, the third subwavelength array 3, and the fourth subwavelength array 4. High reflectivity materials in the infrared band, such as Au, Ag, and Al, can effectively ensure the transmission efficiency of reflected electromagnetic waves, reduce energy loss during reflection, and work in synergy with the phase modulation function of the subwavelength array to ensure stable transmission of the optical path and accurate acquisition of spectral information, thus ensuring the dynamic response capability of the spectrometer.
[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. An infrared metasurface array spectrometer for spectral detection, characterized in that, include: A pair of opposing substrates; Multiple subwavelength arrays, wherein the subwavelength arrays are formed by multiple unit structure arrays and disposed on the substrate; A detector array; The plurality of subwavelength arrays are configured sequentially to achieve lateral spectral splitting, angular dispersion and focusing, and spatial separation on the focal plane, and the detector array is used to acquire the separated spectral information.
2. The infrared metasurface array spectrometer according to claim 1, characterized in that, The plurality of subwavelength arrays include a first subwavelength array, a second subwavelength array, a third subwavelength array, and a fourth subwavelength array, wherein the first subwavelength array and the other subwavelength arrays are respectively disposed on different substrates.
3. The infrared metasurface array spectrometer according to claim 2, characterized in that, The first subwavelength array is used to laterally split light to form a lateral line array spectrum, the second subwavelength array is used to disperse light of different wavelengths and focus it to different angles, and the third and fourth subwavelength arrays are used to focus light from different angles to different points on the focal plane.
4. The infrared metasurface array spectrometer according to claim 1, characterized in that, The subwavelength array structure modulates the phase of electromagnetic waves by changing the size of the unit structure through the principle of transmission phase.
5. The infrared metasurface array spectrometer according to claim 4, characterized in that, The phase distribution of the subwavelength array is calculated using the following formula: Where λ is the incident light wavelength, f is the focusing focal length, and (x,y) are the position coordinates on the substrate, (x...y ... f ,y f () is the focal position.
6. The infrared metasurface array spectrometer according to claim 2, characterized in that, The phase distribution of the first subwavelength array satisfies: Where λ is the incident light wavelength, (x,y) are the position coordinates on the first subwavelength array, (x',y') are the focal position, f is the focal length, and θ is the incident angle.
7. The infrared metasurface array spectrometer according to claim 1, characterized in that, The size of the unit structure is smaller than the wavelength of the incident light, ranging from 0.2 to 1.2 μm.
8. The infrared metasurface array spectrometer according to claim 1, characterized in that, The first subwavelength array in the plurality of subwavelength arrays controls the phase of the transmitted electromagnetic wave, while the remaining subwavelength arrays control the phase of the reflected electromagnetic wave.
9. The infrared metasurface array spectrometer according to claim 1, characterized in that, The material of the subwavelength array is a high-transmittance material in the infrared band, selected from one or more of Si, Ge, SiO2, ZnSe, ZnS, BaF2, MgF2, CaF2, AlN, MgO, ZnO, VO2, Si3N4, or Al2O3.
10. The infrared metasurface array spectrometer according to claim 1, characterized in that, The substrate material is a high reflectivity material in the infrared band, selected from one or more of Au, Ag, or Al.