Graphite thinning real-time monitoring system and method

Abstract

The invention provides a graphite thinning real-time monitoring system and method. The graphite thinning real-time monitoring system comprises a control module; the processing laser module is electrically connected with the control module, and the processing laser module emits processing laser to carry out thinning treatment on the graphite material layer placed on the carrier plate; the optical module is electrically connected with the control module, the optical module comprises a light emitting part and a light receiving part, in the thinning process, the light emitting part emits a light source to the graphite material layer, the light source is reflected from the graphite material layer to obtain a first light signal, and the light receiving part receives the first light signal and provides a spectrum; the image analysis module is electrically connected with the control module, and the image analysis module analyzes the spectrum and obtains an optical result; wherein the control module controls the processing laser module according to the optical result. According to the graphite thinning real-time monitoring system and method disclosed by the invention, the processing efficiency and accuracy of the graphite material can be improved.

Description

Technical Field

[0001] This application relates to a real-time monitoring system and method, and more particularly to a real-time monitoring system and method for graphite thinning. Background Technology

[0002] Graphene possesses excellent electronic stability, thermal conductivity, optical rotation, and mechanical properties, and is frequently used as a heat dissipation material in electronic products. However, as the size of electronic products shrinks, it is also necessary to reduce the thickness of graphene heat dissipation materials. Currently, the main methods for graphene thinning include chemical etching, plasma etching, and laser thinning. Chemical etching involves sputtering zinc onto the graphene to disrupt the lattice structure of the top layer of graphene, and then dissolving the zinc and the disrupted graphene layer with dilute hydrochloric acid to achieve single-atom-layer precision etching. Plasma etching involves placing the graphene sample in a plasma immersion ion implantation device, introducing an inert gas, and using plasma immersion ion implantation technology to sputter and thin the multilayer graphene sample layer by layer. Laser thinning uses a laser to peel off a specific number of graphene layers from the graphene sample, thereby achieving precise control over the number of layers.

[0003] However, regardless of the method used for graphene thinning, it involves precise control of the atomic-level thickness of graphene. It is difficult to grasp the number of layers at each location of graphene for thinning, making the precise positioning operation of graphene thinning extremely difficult.

[0004] Therefore, how to improve the processing efficiency and accuracy of graphite materials through process improvement to overcome the above-mentioned defects has become one of the important issues that this project aims to address. Summary of the Invention

[0005] The technical problem to be solved by this application is to provide a real-time monitoring system and method for graphite thinning, which addresses the shortcomings of existing technologies. The system includes: a control module; a processing laser module electrically connected to the control module, wherein the processing laser module emits a processing laser to thin a graphite material layer placed on a carrier plate; an optical module electrically connected to the control module, the optical module including a light emitting unit and a light receiving unit, wherein during the thinning process, the light emitting unit emits a light source towards the graphite material layer, and the light source is reflected from the graphite material layer to obtain a first light signal, the light receiving unit receives the first light signal and provides a spectrum; and an image analysis module electrically connected to the control module, wherein the image analysis module analyzes the spectrum and obtains optical results; wherein the control module controls the processing laser module based on the optical results.

[0006] Furthermore, the light receiving unit includes a first light receiving unit and a second light receiving unit, which are respectively disposed on the upper and lower sides of the carrier plate. The first light receiving unit receives the first light signal, and the second light receiving unit receives the second light signal passing through the graphite material layer.

[0007] Furthermore, the light receiving unit receives a spectral range of 300 nm to 2500 nm, wherein the spectrum is a continuous spectrum.

[0008] Furthermore, the optical result is at least one of the pattern shape, size, thickness, composition, and density of the graphite material layer, and the first light receiving unit and the second light receiving unit are photoelastic sensors.

[0009] Furthermore, the processing laser module also includes a processing laser moving device to move the processing laser module in three-dimensional space. The optical module also includes a light emitting part moving device and a light receiving part moving device. The light emitting part moving device moves the light emitting part in the three-dimensional space, and the light receiving part moving device moves the light receiving part in the three-dimensional space. The light emitting part emits laser scanning pulses, and the first light receiving unit and the second light receiving unit are laser vibrometers.

[0010] Furthermore, the wavelength of the processing laser is 300 to 2000 nm, the pulse width of the processing laser is 50 to 500 fs, the pulse energy of the processing laser is 10 nJ to 1000 μJ, and the first optical receiving unit and the second optical receiving unit are optical wavefront sensors.

[0011] Furthermore, the graphite thinning real-time monitoring system further includes a drying laser module that emits a drying laser, wherein the wavelength of the drying laser is 800 to 1000 nm, the pulse width of the drying laser is 0.1 to 100 ns, and the pulse energy of the drying laser is 10 nJ to 1000 μJ.

[0012] Furthermore, either the processing laser module or the drying laser module generates a linear laser or a surface laser through at least one optical component. The linear laser and the surface laser are selectively used for preheating, rough processing, or fine processing, or both are used in combination for preheating, rough processing, or fine processing.

[0013] Furthermore, the drying laser module and the processing laser module are configured to be integrated into a single processing and drying laser module.

[0014] To address the aforementioned technical problems, another technical solution adopted in this application is to provide a real-time monitoring method for graphite thinning, comprising: placing a graphite material layer on a carrier plate; providing a processing laser module that emits a processing laser to thin the graphite material layer; providing an optical module whose light emitting part emits a light source onto the graphite material layer, such that the light source is reflected from the graphite material layer to obtain a first light signal, and receiving the first light signal using a light receiving part to obtain a spectrum; providing an image analysis module that analyzes the spectrum to obtain optical results; and providing a control module that controls the processing laser module according to the optical results.

[0015] Furthermore, the light receiving unit includes a first light receiving unit and a second light receiving unit, which are respectively disposed on the upper and lower sides of the carrier plate. The first light receiving unit receives the first light signal, and the second light receiving unit receives the second light signal passing through the graphite material layer.

[0016] Furthermore, the light receiving unit receives a spectral range of 300 nm to 2500 nm, wherein the spectrum is a continuous spectrum.

[0017] Furthermore, the optical result is at least one of the pattern shape, size, thickness, composition, and density of the graphite material layer, and the first light receiving unit and the second light receiving unit are photoelastic sensors.

[0018] Furthermore, the processing laser module also includes a processing laser moving device to move the processing laser module in three-dimensional space. The optical module also includes a light emitting part moving device and a light receiving part moving device. The light emitting part moving device moves the light emitting part in the three-dimensional space, and the light receiving part moving device moves the light receiving part in the three-dimensional space. The light emitting part emits laser scanning pulses, and the first light receiving unit and the second light receiving unit are laser vibrometers.

[0019] Furthermore, the wavelength of the processing laser is 300 to 2000 nm, the pulse width of the processing laser is 50 to 500 fs, the pulse energy of the processing laser is 10 nJ to 1000 μJ, and the first optical receiving unit and the second optical receiving unit are optical wavefront sensors.

[0020] Furthermore, the real-time monitoring method for graphite thinning further includes a drying laser module that emits a drying laser, wherein the wavelength of the drying laser is 800 to 1000 nm, the pulse width of the drying laser is 0.1 to 100 ns, and the pulse energy of the drying laser is 10 nJ to 1000 μJ.

[0021] Furthermore, either the processing laser module or the drying laser module generates a linear laser or a surface laser through at least one optical component. The linear laser and the surface laser are selectively used for preheating, rough processing, or fine processing, or both are used in combination for preheating, rough processing, or fine processing.

[0022] Furthermore, the drying laser module and the processing laser module are configured to be integrated into a single processing and drying laser module.

[0023] One of the beneficial effects of this application is that the graphite thinning real-time monitoring system and method provided by this application can improve the processing efficiency and accuracy of graphite materials through the technical solutions of "during the thinning process, the light emitting part emits a light source to the graphite material layer, and the light source is reflected from the graphite material layer to obtain a first light signal, the light receiving part receives the first light signal and provides a spectrum" and "the control module controls the processing laser module according to the optical results".

[0024] The other effects and embodiments of this application are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the system architecture of the real-time monitoring system for graphite thinning in this application;

[0027] Figure 2 This is a side view schematic diagram of the first embodiment of the graphite thinning real-time monitoring system of this application;

[0028] Figure 3 This is a side view schematic diagram of the second embodiment of the graphite thinning real-time monitoring system of this application;

[0029] Figure 4 This is a side view schematic diagram of the third embodiment of the graphite thinning real-time monitoring system of this application;

[0030] Figure 5 This is a side view schematic diagram of the fourth embodiment of the graphite thinning real-time monitoring system of this application;

[0031] Figure 6 This is a flowchart of the real-time monitoring method for graphite thinning in this application.

[0032] Symbol Explanation

[0033] 100: Real-time monitoring system for graphite thinning 1: Control module

[0034] 2: Laser processing module; 3: Optical module

[0035] 4: Image analysis module; 5: Drying laser module

[0036] 31: Light emitting unit; 32: Light receiving unit

[0037] 321: First optical receiving unit; 322: Second optical receiving unit

[0038] M: Laser module; L1: Laser processing module

[0039] L2: Drying laser; R: Light source

[0040] R1: First optical signal; R2: Second optical signal

[0041] G: Graphite material layer C: Carrier plate

[0042] S1~S5: Steps Detailed Implementation

[0043] The following specific embodiments illustrate the implementation of the "Real-time Monitoring System and Method for Graphite Thinning" disclosed in this application. Those skilled in the art can understand the advantages and effects of this application from the content disclosed in this specification. This application can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this application. Furthermore, the accompanying drawings are for simple illustration only and are not depictions of actual dimensions, as stated in advance. The following embodiments will further describe the relevant technical content of this application in detail, but the disclosed content is not intended to limit the scope of protection of this application.

[0044] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0045] First Embodiment

[0046] See Figures 1 to 2 As shown, the first embodiment of this application provides a real-time monitoring system 100 for graphite thinning, which includes: a control module 1, a processing laser module 2, an optical module 3, and an image analysis module 4. The processing laser module 2, the optical module 3, and the image analysis module 4 can all be electrically connected to the control module 1, so that the control module 1 can control the processing laser module 2, the optical module 3, and the image analysis module 4.

[0047] Specifically, the processing laser module 2 can emit a processing laser L1 to thin the graphite material layer G placed on the carrier plate C. In one embodiment of this application, the processing laser L1 can be a femtosecond laser. Specifically, the wavelength of the processing laser L1 can be 300 to 2000 nm (e.g., any positive integer between 300 and 2000), and the pulse width of the processing laser L1 can be 50 to 500 fs (e.g., any positive integer between 50 and 500). The pulse energy of the processing laser L1 can be 10 nJ to 1000 μJ (e.g., any positive integer between 10 and 1000). Thus, the processing laser L1 processes the graphite material layer G in the laser region. In other words, this application can utilize the characteristics of femtosecond cold processing to achieve high-precision thickness removal, thereby achieving controlled thinning.

[0048] The optical module 3 may include at least a light emitting unit 31 and a light receiving unit 32. The light emitting unit 31 can provide a light source R to the graphite material layer G, and when the light source R comes into contact with the graphite material layer G, at least part or all of it can be reflected from the graphite material layer G to obtain a first light signal R1. For example, the light source R can be infrared light. Further, the light receiving unit 32 can receive the first light signal R1 and provide a continuous spectrum. Specifically, the continuous spectrum can be a spectral range of 300 nm to 2500 nm (e.g., any positive integer between 300 and 2500), and the light receiving unit 32 can simultaneously receive more than 100 bands. In other words, the light receiving unit 32 can receive a continuous spectrum from 300 nm to 2500 nm. For example, the light receiving unit 32 can be a hyperspectral camera. However, the examples given above are only one possible embodiment and are not intended to limit this application.

[0049] Subsequently, the image analysis module 4 can analyze the continuous spectrum received by the light receiving unit 32 to obtain optical results. The optical results can be at least one of the pattern shape, size, thickness, composition, and density of the graphite material layer G. Therefore, the graphite thinning real-time monitoring system 100 of this application can monitor the pattern shape, size, thickness, composition, and density of the graphite material layer G in real time during the thinning process, so as to more accurately grasp the state of the graphite material layer G during the thinning process, and can adjust the processing laser module 2 in real time to improve the processing accuracy of the graphite material layer G.

[0050] Second Embodiment

[0051] See Figure 1 and Figure 3 As shown, the second embodiment of this application provides a real-time monitoring system 100 for graphite thinning, which includes: a control module 1, a processing laser module 2, an optical module 3, and an image analysis module 4. Unlike the first embodiment, the light receiving unit 32 of the optical module 3 may include a first light receiving unit 321 and a second light receiving unit 322. The first light receiving unit 321 may be disposed on the upper side of the carrier plate C, that is, on the same side as the processing laser module 2, and the second light receiving unit 322 may be disposed on the opposite side of the carrier plate C relative to the first light receiving unit 321.

[0052] Furthermore, the first light receiving unit 321 can be used to receive the first light signal R1 reflected from the graphite material layer G, and the second light receiving unit 322 can be used to receive the second light signal R2 passing through the graphite material layer G. Both the first light signal R1 and the second light signal R2 are continuous spectra, which can be provided to the image analysis module 4 for analysis. It is worth noting that continuous spectra are data in continuous bands, which can generate high-resolution spectra for each pixel in the image, allowing for a more accurate depiction of spectral features.

[0053] In another embodiment of this application, the light emitting unit 31 can emit laser scanning pulses to the monitoring area. For example, the laser scanning pulses can be femtosecond ultrasonic waves. The first light receiving unit 321 and the second light receiving unit 322 can be laser vibrometers to receive reflected ultrasonic waves from the monitoring area and penetrating ultrasonic waves passing through the graphite material layer G, so as to generate a first waveform diagram and a second waveform diagram respectively to confirm the processing status of the graphite material layer G. The wavelength range of the laser scanning pulses can be 300 nm to 2000 nm, and the pulse width range can be 50 fs to 50 ns.

[0054] In another embodiment of this application, the light emitting unit 31 may be a laser device including a collimator, a polarizer, and a laser source, and may be used to irradiate the graphite material layer G with laser light. The first light receiving unit 321 and the second light receiving unit 322 may be photoelastic sensors. The first light receiving unit 321 may receive a first reflected light from the laser light reflected by the graphite material layer G to generate a first reflected light signal. The second light receiving unit 322 may transmit a second transmitted light through the laser light passing through the graphite material layer G to generate a second transmitted light signal. Subsequently, a first stress distribution feature map and a second stress distribution feature map may be generated based on the first reflected light signal and the second transmitted light signal, respectively.

[0055] Users can first monitor whether the object under test has defects such as cracks by using the first stress distribution feature map generated by reflected light, and then monitor or confirm the processing status of the graphite material layer G again by using the second stress distribution feature map generated by transmitted light, thereby improving the efficiency of processing monitoring.

[0056] In another embodiment of this application, the first light receiving unit 321 and the second light receiving unit 322 can be wavefront sensors. The first light receiving unit 321 receives reflected light from the detection portion of the laser beam passing through the detection portion of the object under test to generate a reflected light signal, and the second light receiving unit 322 receives transmitted light from the laser beam passing through the detection portion of the object under test to generate a transmitted light signal. Furthermore, the graphite thinning real-time monitoring system 100 may also include a beam splitter, such that the reflected light is first split by the beam splitter before being transmitted to the first light receiving unit 321. The reflected light after passing through the beam splitter is free of stray light, making the light received by the first light receiving unit 321 purer.

[0057] Third Embodiment

[0058] See Figure 4 As shown, the third embodiment of this application provides a real-time monitoring system 100 for graphite thinning, which includes: a control module 1, a processing laser module 2, an optical module 3, an image analysis module 4, and a drying laser module 5. Unlike the first embodiment, the real-time monitoring system 100 for graphite thinning may further include the drying laser module 5. When the graphite material layer G is in an uncured state, the drying laser module 5 can dry the graphite material layer G to obtain a cured graphite material layer G.

[0059] Specifically, the wavelength of the drying laser L2 can be from 800 to 1000 nm (e.g., any positive integer between 800 and 1000), and the pulse width of the drying laser L2 can be from 0.1 to 100 ns (e.g., any positive integer between 0.1 and 100). The pulse energy of the drying laser L2 can be from 10 nJ to 1000 μJ, that is, from 10 nJ to 1,000,000 nJ (e.g., any positive integer between 10 and 1,000,000). The drying temperature range of the drying laser L2 is from 100 to 300 °C (e.g., any positive integer between 100 and 300).

[0060] It should be noted that the graphite thinning real-time monitoring system 100 of this application can either dry the graphite material layer G before processing, or process the graphite material layer G before drying. This application does not particularly limit the order of processing and drying. In other words, the graphite thinning real-time monitoring system 100 of this application can handle graphite material layers G that are processed before drying, or dried before processing, allowing for more flexible processing of the graphite material layer G.

[0061] For example, either the processing laser module 2 or the drying laser module 5 can generate a linear laser or a surface laser through at least one optical component (not shown). The linear laser and the surface laser can be selectively used for preheating, roughing, or finishing, or both can be used in combination for preheating, roughing, or finishing. However, the examples given above are merely one possible embodiment and are not intended to limit this application.

[0062] Fourth embodiment

[0063] See Figure 5 As shown, the third embodiment of this application provides a real-time monitoring system 100 for graphite thinning, which includes: a control module 1, a processing laser module 2, an optical module 3, an image analysis module 4, and a drying laser module 5. Unlike the third embodiment, the drying laser module 5 and the processing laser module 2 can be configured to be integrated into a single processing and drying laser module M.

[0064] Furthermore, the processing laser module 2 may further include a processing laser moving device, enabling the processing laser module to move in three-dimensional space to process specific locations on the graphite material layer G. Similarly, the optical module 3 may further include a light emitting unit moving device and a light receiving unit moving device, enabling the light emitting unit and the light receiving unit to move in three-dimensional space. Specifically, the light receiving unit can be moved by the light receiving unit moving device to a position where reflected or transmitted light can be received.

[0065] Fifth embodiment

[0066] See Figure 6As shown, the fifth embodiment of this application provides a method for real-time monitoring of graphite thinning, which includes at least steps S1 to S5.

[0067] Step S1: Place the graphite material layer G on the carrier plate C. Step S2: Provide a processing laser module 2, which thins the graphite material layer. Step S3: Provide an optical module 3. The light emitting unit 31 of the optical module 3 emits a light source L onto the graphite material layer G, causing the light source R to be reflected from the graphite material layer G to obtain a first light signal R1. The light receiving unit 32 receives the first light signal R1 to obtain a continuous spectrum. Step S4: Provide an image analysis module 4, which analyzes the continuous spectrum to obtain optical results. Step S5: Provide a control module 1, which can control the processing laser module 2 according to the optical results. For example, the laser position, laser intensity, or laser frequency of the processing laser module 2 can be controlled according to the optical results.

[0068] Further, step S3 further includes providing a first light receiving unit 321 and a second light receiving unit 322 on the upper and lower sides of the carrier plate C. The first light receiving unit 321 receives a first light signal R1 reflected from the graphite material layer G, and the second light receiving unit 322 receives a second light signal R2 passing through the graphite material layer G.

[0069] Beneficial effects of the embodiments

[0070] One of the beneficial effects of this application is that the graphite thinning real-time monitoring system and method provided by this application can improve the processing efficiency and accuracy of graphite materials through the technical solutions of "during the thinning process, the light emitting part emits a light source to the graphite material layer, and the light source is reflected from the graphite material layer to obtain a first light signal, the light receiving part receives the first light signal and provides a continuous spectrum" and "the control module controls the processing laser module according to the optical results".

[0071] Furthermore, the graphite thinning real-time monitoring system and method provided in this application can first monitor whether the object under test has defects by using a first spectrum generated by reflected light, and then monitor or confirm the processing status of the graphite material layer again based on a second spectrum generated by transmitted light, thereby improving the processing efficiency and accuracy of graphite materials.

[0072] Furthermore, the graphite thinning real-time monitoring system and method provided in this application can further include a processing laser moving device in its processing laser module, enabling the processing laser module to move in three-dimensional space to process specific locations on the graphite material layer. Similarly, the optical module can further include a light emitting unit moving device and a light receiving unit moving device, allowing the light emitting unit and light receiving unit to move in three-dimensional space. Specifically, the light receiving unit can be moved by the light receiving unit moving device to a position where reflected or transmitted light can be received, thereby improving the processing efficiency and accuracy of the graphite material.

[0073] The embodiments and / or implementation methods described above are merely preferred embodiments and / or implementation methods for implementing the technology of this application, and are not intended to limit the implementation methods of the technology of this application in any way. Any person skilled in the art may make some modifications or alterations to other equivalent embodiments without departing from the scope of the technical means disclosed in this application, but these should still be regarded as the technology or embodiments that are substantially the same as those of this application.

Claims

1. A real-time monitoring system for graphite thinning, characterized in that, The real-time monitoring system for graphite thinning includes: Control module; A processing laser module, which is electrically connected to the control module, emits a processing laser to thin a graphite material layer placed on a carrier plate; An optical module, electrically connected to the control module, includes a light emitting unit and a light receiving unit. During the thinning process, the light emitting unit emits a light source towards the graphite material layer, and the light source is reflected from the graphite material layer to obtain a first light signal. The light receiving unit receives the first light signal and provides a spectrum. An image analysis module, electrically connected to the control module, analyzes the spectrum and obtains optical results; The control module controls the processing laser module based on the optical results.

2. The real-time monitoring system for graphite thinning according to claim 1, characterized in that, The light receiving unit includes a first light receiving unit and a second light receiving unit, which are respectively disposed on the upper and lower sides of the carrier plate. The first light receiving unit receives the first light signal, and the second light receiving unit receives the second light signal passing through the graphite material layer.

3. The real-time monitoring system for graphite thinning according to claim 1, characterized in that, The optical receiving unit receives a spectral range of 300 nm to 2500 nm, wherein the spectrum is a continuous spectrum.

4. The real-time monitoring system for graphite thinning according to claim 2, characterized in that, The optical result is at least one of the pattern shape, size, thickness, composition, and density of the graphite material layer; wherein the first light receiving unit and the second light receiving unit are photoelastic sensors.

5. The real-time monitoring system for graphite thinning according to claim 2, characterized in that, The processing laser module further includes a processing laser moving device to move the processing laser module in three-dimensional space. The optical module further includes a light emitting part moving device and a light receiving part moving device. The light emitting part moving device moves the light emitting part in the three-dimensional space, and the light receiving part moving device moves the light receiving part in the three-dimensional space. The light emitting part emits laser scanning pulses, and the first light receiving unit and the second light receiving unit are laser vibrometers.

6. The real-time monitoring system for graphite thinning according to claim 2, characterized in that, The wavelength of the processing laser is 300 to 2000 nm, the pulse width of the processing laser is 50 to 500 fs, and the pulse energy of the processing laser is 10 nJ to 1000 μJ; wherein, the first optical receiving unit and the second optical receiving unit are optical wavefront sensors.

7. The real-time monitoring system for graphite thinning according to claim 1, characterized in that, The graphite thinning real-time monitoring system further includes a drying laser module that emits a drying laser, wherein the wavelength of the drying laser is 800 to 1000 nm, the pulse width of the drying laser is 0.1 to 100 ns, and the pulse energy of the drying laser is 10 nJ to 1000 μJ.

8. The real-time monitoring system for graphite thinning according to claim 1, characterized in that, One of the processing laser module and the drying laser module generates a linear laser or a surface laser through at least one optical component. The linear laser and the surface laser are selectively used for preheating, rough processing, or fine processing, or both are used in combination for preheating, rough processing, or fine processing.

9. The real-time monitoring system for graphite thinning according to claim 7, characterized in that, The drying laser module and the processing laser module are configured to be integrated into a single processing and drying laser module.

10. A method for real-time monitoring of graphite thinning, characterized in that, The real-time monitoring system for graphite thinning includes: A layer of graphite material is placed on a carrier plate; A processing laser module is provided, which emits a processing laser to thin a graphite material layer; An optical module is provided, wherein the light emitting part of the optical module emits a light source to the graphite material layer, such that the light source is reflected from the graphite material layer to obtain a first light signal, and the first light signal is received by the light receiving part to obtain a spectrum; Provides an image analysis module that analyzes the spectrum to obtain optical results; and A control module is provided, which controls the processing laser module based on the optical results.

11. The real-time monitoring method for graphite thinning according to claim 10, characterized in that, in, The optical module includes: providing a first light receiving unit and a second light receiving unit on the upper and lower sides of the carrier plate, wherein the first light receiving unit receives the first light signal and the second light receiving unit receives the second light signal passing through the graphite material layer.

12. The real-time monitoring method for graphite thinning according to claim 10, characterized in that, The optical receiving unit receives a spectral range of 300 nm to 2500 nm, wherein the spectrum is a continuous spectrum.

13. The real-time monitoring method for graphite thinning according to claim 11, characterized in that, The optical result is at least one of the pattern shape, size, thickness, composition, and density of the graphite material layer; wherein the first light receiving unit and the second light receiving unit are photoelastic sensors.

14. The real-time monitoring method for graphite thinning according to claim 11, characterized in that, The processing laser module further includes a processing laser moving device to move the processing laser module in three-dimensional space. The optical module further includes a light emitting part moving device and a light receiving part moving device. The light emitting part moving device moves the light emitting part in the three-dimensional space, and the light receiving part moving device moves the light receiving part in the three-dimensional space. The light emitting part emits laser scanning pulses, and the first light receiving unit and the second light receiving unit are laser vibrometers.

15. The real-time monitoring method for graphite thinning according to claim 11, characterized in that, The wavelength of the processing laser is 300 to 2000 nm, the pulse width of the processing laser is 50 to 500 fs, and the pulse energy of the processing laser is 10 nJ to 1000 μJ; wherein, the first optical receiving unit and the second optical receiving unit are optical wavefront sensors.

16. The real-time monitoring method for graphite thinning according to claim 10, characterized in that, The real-time monitoring method for graphite thinning further includes providing a drying laser module that emits a drying laser, wherein the wavelength of the drying laser is 800 to 1000 nm, the pulse width of the drying laser is 0.1 to 100 ns, and the pulse energy of the drying laser is 10 nJ to 1000 μJ.

17. The real-time monitoring method for graphite thinning according to claim 16, characterized in that, One of the processing laser module and the drying laser module generates a linear laser or a surface laser through at least one optical component. The linear laser and the surface laser are selectively used for preheating, rough processing, or fine processing, or both are used in combination for preheating, rough processing, or fine processing.

18. The real-time monitoring method for graphite thinning according to claim 16, characterized in that, The drying laser module and the processing laser module are configured to be integrated into a single processing and drying laser module.

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