Substrate transfer apparatus for transferring substrate in vacuum chamber

Abstract

The present invention relates to a substrate transfer apparatus, comprising: a lifting robot including a lifting shaft in which an a-th hollow is formed and a lifting drive unit for moving the lifting shaft up and down and rotating the lifting shaft; the walking robot comprises a walking arm, a bth driving motor and a bth speed reducer, the bth driving motor is arranged in an internal groove of the walking arm, and the bth speed reducer is arranged in a b2th vertical through hole of the walking arm; and a transfer robot including a transfer arm platform, a first transfer arm unit including a first transfer link arm, a second transfer link arm, a first common link arm, a first auxiliary link arm, a first auxiliary link arm, a second auxiliary link arm, a third auxiliary link arm, a fourth auxiliary link arm, and a first end effector, and a second transfer arm unit including a second transfer link arm, a third auxiliary link arm, a fourth auxiliary link arm, and a second end effector. The second transfer arm unit includes a 21st transfer link arm, a 22nd transfer link arm, a second common link arm, a 21st auxiliary link arm, a 22nd auxiliary link arm, a 23rd auxiliary link arm, a 24th auxiliary link arm, and a second end effector.

Description

Technical Field

[0001] This invention relates to a substrate conveying device, specifically, to a substrate conveying device capable of conveying high-load substrates over long distances in a vacuum chamber. Background Technology

[0002] Typically, substrates such as semiconductor wafers, display devices, or thin-film solar cells are manufactured by performing various processes on the substrate. At this time, the substrate is loaded into a substrate processing apparatus that provides the optimal conditions required for each process and is then processed. Furthermore, a mask is used as the substrate to form various patterns.

[0003] Currently, in order to improve productivity, cluster-type substrate processing devices capable of batch processing substrates have been developed and used.

[0004] The clustered substrate processing apparatus includes a load locking chamber for loading and unloading substrates, a transfer chamber for transporting substrates, and multiple process chambers for performing each process.

[0005] In addition, the substrate transfer robot is set in a vacuum transfer chamber, which can transfer the substrate from the load locking chamber to the transfer chamber, transfer the substrate from the transfer chamber to the load locking chamber, transfer the substrate between the transfer chambers, or transfer the substrate to introduce and withdraw it from the process chamber.

[0006] In recent years, in order to cope with the increasing size of substrates and improve substrate processing capabilities, research is being conducted on structures that can process two substrates in one process chamber or octagonal structures with four process chambers equally spaced in the transfer chamber, and quadrangular structures with process chambers located on both sides of the substrate transfer path in the transfer chamber.

[0007] In particular, when two substrates are placed in a process chamber, it may be unavoidable to move the position of the transfer robot in order to correspond to the offset of the position relative to each substrate and to correspond to the mounting position of each process chamber in the quadrangular structure.

[0008] Therefore, in recent years, with a walking robot set up in a vacuum chamber and a transfer robot installed on the walking robot, the transfer robot is moved to a set position in the vacuum chamber by driving the walking robot, and then the transfer robot is driven to transfer the substrate.

[0009] However, the walking robot in this existing substrate transfer device has a complex structure in order to allow the transfer robot to move within a vacuum chamber, and requires the installation of walking equipment in its internal space, thus having a large volume in the height direction.

[0010] Therefore, existing substrate transfer devices have drawbacks, namely, the production of walking robots requires a relatively high cost.

[0011] Furthermore, with the installation of the walking robot, the height from the bottom of the transfer chamber to the top of the substrate transfer device increases, thereby increasing the volume of the transfer chamber itself, which in turn increases the manufacturing cost of the substrate manufacturing equipment.

[0012] As a result, the volume of the transfer chamber itself increases, and consequently, the maintenance costs for maintaining the vacuum in the transfer chamber also increase.

[0013] Therefore, the applicant provides a solution that enables the formation of a walking robot in a substrate conveying device with a simple structure. Summary of the Invention

[0014] The problem the invention aims to solve

[0015] The present invention aims to solve all the above-mentioned problems.

[0016] Another object of the present invention is to provide a smaller substrate conveying device to improve efficiency relative to the installation area and installation height.

[0017] Another object of the present invention is to provide a substrate conveying device that can minimize vibration and / or interference through a simple structure, and minimize posture changes caused by thermal expansion.

[0018] Another object of the present invention is to provide a substrate conveying device that can fundamentally prevent the generation of particles in a vacuum chamber and has a vacuum-sealed structure.

[0019] Another object of the present invention is to provide a substrate conveying device that can reduce the manufacturing cost and maintenance expenses of substrate manufacturing equipment.

[0020] Problem-solving methods

[0021] The features of this invention are used to achieve the objectives of this invention described above and the characteristic effects of this invention described later, and its structure is as follows.

[0022] According to an embodiment of the present invention, a substrate conveying device is provided, which conveys a substrate in a vacuum chamber. The device includes: a lifting robot comprising a lifting shaft having a first hollow section (a) and a lifting drive unit for vertical and rotary movement of the lifting shaft, and sealed within a vacuum chamber through-hole, the vacuum chamber being formed in the lower region of the vacuum chamber; and a walking robot comprising a walking arm, a second drive motor (b), and a second reducer (b). The second front end region of the walking arm forms a first vertical through-hole (b1) penetrating the top and bottom surfaces, the bottom surface facing the ground. The other front end region of the second arm forms a second vertical through-hole (b2), an internal groove, and a lower open space. The second vertical through-hole penetrates the top and bottom surfaces. The internal groove is separated from the second vertical through-hole by a partition wall and is formed on the inner side relative to the second vertical through-hole. The lower open space has a predetermined depth from the bottom to the top surface and connects the second vertical through-hole and the internal groove to each other. The internal wiring hole is formed inside the walking arm, and the internal wiring hole connects the b1 vertical through hole and the internal groove; the b drive motor is disposed in the internal groove of the walking arm; the b reducer is disposed in the b2 vertical through hole of the walking arm, and the rotary drive shaft is disposed exposed on the top surface. The rotary drive shaft rotates in conjunction with the b drive motor and forms a b hollow. The lifting shaft is sealed and connected to the first specific bottom surface area of ​​the bottom surface corresponding to the b1 vertical through hole in the front end area of ​​the b, so that the a hollow of the lifting shaft corresponds to the b1 vertical through hole. The b1 cover is sealed and connected to the first specific top surface area of ​​the top surface corresponding to the b1 vertical through hole in the front end area of ​​the b, and the b2 cover is sealed and connected to the second specific bottom surface area of ​​the bottom surface corresponding to the lower open space in the other front end area of ​​the b.The robot includes a transfer arm platform, a first transfer arm unit, and a second transfer arm unit. The transfer arm platform includes a c1 connecting hole, a c2 connecting hole, a c3 connecting hole, a 1-1 blade, a 1-2 blade, a 2-1 blade, and a 2-2 blade. The c1 connecting hole is formed in the c-center region, which is a specific region on the center line corresponding to the direction of movement of the substrate for transfer. It is divided into an upper c1 space and a lower c1 space by a c1 locking member forming the c1 vertical through hole. The upper c1 space is sealed by a c1 cover. The c1 vertical through hole corresponds to the b-th hollow of the rotary drive shaft of the b-th reducer of the walking robot. The c2 connecting hole is formed in the c-front end region of one side region with the center line as a reference. The c2 vertical through hole is divided into an upper c2 space and a lower c2 space by the c2 locking member, and the lower c2 space is sealed by the c2 cover. The c3 connecting hole is formed in another front region of the c corresponding to the other side region of the c front region when the center line is used as a reference. The c3 vertical through hole is divided into an upper c3 space and a lower c3 space by the c3 locking member, and the lower c3 space is sealed by the c3 cover. The 1_1 blade and the 1_2 blade are formed in front of and behind the c2 connecting hole, respectively. The 2_1 blade and the 2_2 blade are formed in front of and behind the c3 connecting hole, respectively. The rotary drive shaft of the b reducer of the walking robot, which is inserted into the lower c1 space, is fixedly connected to the c1 locking member.The first transmission arm unit includes a first transmission linkage arm, a first transmission linkage arm, a first common linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first auxiliary linkage arm, a first end effector, and a first end effector. A first drive motor and a first reducer are disposed within the sealed internal space of the first transmission linkage arm. The first reducer reduces the rotational speed to half by linkage with the first drive motor. A first drive shaft and a first output shaft are sealed on the first front end region of the first transmission linkage arm. The first drive shaft is linked to the first reducer and forms a first hollow section (c1_1) thereon. The output shaft of the first c1_1 is linked to the drive shaft of the first c1_1. A drive shaft of the second c1_2 and an output shaft of the second c1_2 are sealed on the other front end region of the first c1_1 transmission link arm. The drive shaft of the second c1_2 is linked to the drive motor of the first c1 and forms a hollow section thereon. The output shaft of the second c1_2 is linked to the drive shaft of the second c1_2. The output shaft of the second c1_1 is fixedly connected to the connector of the second c1_1. The connector of the second c1_1 is fixedly connected to the locking member of the second c2 by being inserted into the upper space of the transmission arm platform. The front end region of the first c1_2 transmission link arm is fixedly connected to the first c1_2 via a first fixed connection shaft. The c1_2 output shaft of the 1_1 transmission link arm, the c1 center region of the first common link arm rotatably coupled to the first fixed coupling shaft, the 1_1 auxiliary link arm parallel to the 1_1 transmission link arm, and the c1_4 front end region rotatably coupled to the 1_1 blade of the transmission arm platform, the other front end region of the c1_4 rotatably coupled to the c1_3 front end region of the first common link arm, the 1_2 auxiliary link arm parallel to the 1_1 transmission link arm, and the c1_5 front end region rotatably coupled to the 1_2 blade of the transmission arm platform, the other front end region of the c1_5 rotatably coupled to the first... The first auxiliary link arm is parallel to the first transmission link arm, and the front end region of the first shared link arm is rotatably coupled to the other front end region of the first shared link arm. The first auxiliary link arm is parallel to the first shared link arm, and the front end region of the first auxiliary link arm is rotatably coupled to the other front end region of the first auxiliary link arm. The other front end region of the first auxiliary link arm is rotatably coupled to the other front end region of the first transmission link arm. The first end effector is fixed to the other front end region of the first auxiliary link arm, thereby supporting the base plate.The second transmission arm unit includes a 2_1 transmission linkage arm, a 2_2 transmission linkage arm, a second common linkage arm, a 2_1 auxiliary linkage arm, a 2_2 auxiliary linkage arm, a 2_3 auxiliary linkage arm, a 2_4 auxiliary linkage arm, and a second end effector. A c2 drive motor and a c2 reducer are disposed within the sealed internal space of the 2_1 transmission linkage arm. The c2 reducer reduces the rotational speed to half by linkage with the c2 drive motor. A c2_1 drive shaft and a c2_1 output shaft are sealed on the c2_1 front end region of the 2_1 transmission linkage arm. The c2_1 drive shaft is linked to the c2 reducer and forms a c2_1 hollow section thereon. The output shaft of the c2_1 is linked to the drive shaft of the c2_1. A drive shaft of the c2_2 and an output shaft of the c2_2 are sealed on the other front end region of the c2_1 of the 2_1 transmission link arm. The drive shaft of the c2_2 is linked to the drive motor of the c2 and forms a hollow section thereon. The output shaft of the c2_2 is linked to the drive shaft of the c2_2. The output shaft of the c2_1 is fixedly connected to the 2_2 connector. The 2_2 connector is fixedly connected to the c3 locking member by being inserted into the upper space of the c3 of the transmission arm platform. The front end region of the c2_2 of the 2_2 transmission link arm is fixedly connected to the c2_1 via a second fixed connection shaft. The c2_2 output shaft of the 2_1 transmission link arm, the c2 center region of the 2nd common link arm is rotatably coupled to the 2nd fixed connection shaft, the 2_1 auxiliary link arm is parallel to the 2_1 transmission link arm, and the c2_4 front end region is rotatably coupled to the 2_1 blade of the transmission arm platform, the other front end region of the c2_4 is rotatably coupled to the c2_3 front end region of the 2nd common link arm, the 2_2 auxiliary link arm is parallel to the 2_1 transmission link arm, and the c2_5 front end region is rotatably coupled to the 2_2 blade of the transmission arm platform, the other front end region of the c2_5 is rotatably coupled to the 2nd fixed connection shaft. The second auxiliary link arm has a c2_3 front end region, which is parallel to the second transmission link arm. The c2_6 front end region is rotatably connected to the c2_3 front end region of the second shared link arm. The second auxiliary link arm is parallel to the second shared link arm, and the c2_7 front end region is rotatably connected to the c2_6 front end region of the second auxiliary link arm. The c2_7 front end region is rotatably connected to the c2_2 front end region of the second transmission link arm. The second end effector is fixed to the c2_7 front end region of the second auxiliary link arm to support the base plate.

[0023] When any direction on the plane from above the vacuum chamber is referred to as the first direction, and the direction perpendicular to the first direction is referred to as the second direction, the central axis of the lifting robot's lifting shaft is positioned at a distance equal to a preset distance from the center line of the first direction, which is the center line of the first direction, and is positioned on the center line of the second direction, which is the center line of the second direction, or on a parallel line of the second direction. The arc between the first contact point and the second contact point, which intersect the center line of the first direction on the rotation radius of the rotating drive shaft, serves as the walking trajectory of the walking robot. The rotating drive shaft moves with the lifting shaft as the center, as the first other front end region of the walking arm rotates.

[0024] When the transport robot, which is coupled to the rotary drive shaft, moves between the first contact point and the second contact point, the traveling robot faces either end of the first direction.

[0025] When the conveying robot moves between the first contact point and the second contact point, the walking robot makes the rotation direction of the b-th drive motor the same as or opposite to the rotation direction of the lifting shaft of the lifting robot.

[0026] When the transport robot moves between the first contact point and the second contact point, the transport robot moves the front of the transport robot towards either end of the first direction at the first contact point and the second contact point by means of the operation of the b-th drive motor, and stops the operation of the b-th drive motor during the process of the transport robot moving between the first contact point and the second contact point.

[0027] The vacuum chamber has a rectangular shape, wherein the length in the first direction is greater than the length in the second direction.

[0028] The internal wiring hole of the walking arm of the walking robot is formed by generating a horizontal through hole, the horizontal through hole extending from the side of the b-th front end region of the walking arm to the internal groove, and a b3 cover is combined with the side of the b-th front end region corresponding to the horizontal through hole, the b3 cover sealing the horizontal through hole.

[0029] In the transport robot, by making the height of the second fixed coupling axis higher than the height of the first fixed coupling axis, the first end effector and the second end effector are located at different heights on the same path.

[0030] In the conveying robot, the conveying arm platform further includes a c1 wiring hole and a c2 wiring hole, the c1 wiring hole connecting the upper space of the c1 and the lower space of the c2, and the c2 wiring hole connecting the upper space of the c1 and the lower space of the c3.

[0031] In the conveying robot, the conveying arm platform includes an upper plate and a lower plate. The upper plate includes the first 1-1 blade, the first 1-2 blade, the second 2-1 blade, and the second 2-2 blade. The lower plate is coupled to the upper plate. A c1 upper coupling hole, serving as part of the c1 coupling hole, is formed in the c-th central region of the upper plate. A c2 upper coupling hole, serving as part of the c2 coupling hole, is formed in the c-th front end region of the upper plate. A c2 locking member, with a c2 vertical through hole formed inside the c2 upper coupling hole, is provided to separate the internal space of the c2 upper coupling hole. A c3 coupling hole, serving as part of the c-th coupling hole, is formed in another c-th front end region of the upper plate. The upper c3 connecting hole is provided with a c3 locking member having a c3 vertical through hole inside the upper c3 connecting hole, thereby separating the internal space of the upper c3 connecting hole. The lower c1 connecting hole is formed as another part of the c1 connecting hole in the central region of the lower c plate, and the c1 locking member having a c1 vertical through hole inside the lower c1 connecting hole is provided, thereby separating the internal space of the lower c1 connecting hole. The lower c2 connecting hole is formed as another part of the c2 connecting hole in the front end region of the lower c plate, and the lower c3 connecting hole is formed as another part of the c3 connecting hole in the other front end region of the lower c plate.

[0032] The bottom surface of the upper plate forms an upper wiring groove c1 and an upper wiring groove c2. The upper wiring groove c1 connects the internal space of the upper connecting hole of c1 and the lower space of the upper connecting hole of c2. The upper wiring groove c2 connects the internal space of the upper connecting hole of c1 and the lower space of the upper connecting hole of c3. The top surface of the lower plate forms a lower wiring groove c1 and a lower wiring groove c2. The lower wiring groove c1 connects the upper space of the lower connecting hole of c1 and the internal space of the lower connecting hole of c2. The lower wiring groove c2 connects the upper space of the lower connecting hole of c1 and the internal space of the lower connecting hole of c3.

[0033] Beneficial effects

[0034] This invention provides a smaller substrate conveying device by integrating a walking robot as a single unit and a drive system for conveying substrates within the linkage arm of a conveying robot.

[0035] This invention provides a substrate transfer device that minimizes vibration and / or interference and reduces posture changes caused by thermal expansion by forming the linkage arm of the transfer robot into a double parallel linkage.

[0036] This invention provides a substrate conveying device that fundamentally prevents the generation of microparticles by giving the walking robot and conveying robot located in the conveying chamber a structure that is completely sealed from the conveying chamber.

[0037] The present invention can minimize the volume of the transfer chamber through a smaller configuration, thereby providing a substrate transfer device that reduces the manufacturing cost and maintenance expenses of substrate manufacturing equipment. Attached Figure Description

[0038] The following drawings, which are used to describe embodiments of the present invention, are only a part of the embodiments of the present invention, and those skilled in the art to which the present invention pertains (hereinafter referred to as "skilled persons") can obtain other drawings based on these drawings without any creative work.

[0039] Figures 1A to 1C This is a diagram illustrating another example of a clustered substrate processing apparatus equipped with a substrate transfer device according to an embodiment of the present invention.

[0040] Figure 2A and Figure 2B This is a schematic diagram of a substrate transfer device according to an embodiment of the present invention.

[0041] Figures 3A to 3C This is a schematic diagram of a lifting robot in a substrate conveying device according to an embodiment of the present invention.

[0042] Figures 4A to 4D This is a schematic diagram of a walking robot in a substrate conveying device according to an embodiment of the present invention.

[0043] Figure 5A and Figure 5B This is a schematic diagram of a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention.

[0044] Figures 6A to 6C This is a schematic diagram of the transfer arm platform of the transfer robot in a substrate transfer device according to an embodiment of the present invention.

[0045] Figure 7 This is a schematic diagram of the first transmission link arm of the transmission robot in a substrate transmission device according to an embodiment of the present invention.

[0046] Figure 8 This is a schematic diagram of the connection portion of the first 1st transfer link arm and the first 1st 2nd transfer link arm of the transfer robot in a substrate transfer device according to an embodiment of the present invention.

[0047] Explanation of reference numerals in the attached figures

[0048] TA: Substrate transfer device

[0049] 1000: Lifting Robot

[0050] 2000: Walking Robot

[0051] 3000: Teleportation Robot Detailed Implementation

[0052] The following detailed description of the invention refers to the accompanying drawings, which schematically illustrate specific embodiments in which the invention can be practiced to illustrate the objectives, technical solutions, and advantages of the invention. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention.

[0053] The following detailed description of the invention describes specific embodiments in which the invention can be practiced, with reference to the accompanying drawings. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the invention are different but not mutually exclusive. For example, specific shapes, structures, and characteristics described in this specification can be implemented by other embodiments without departing from the inventive concept and scope of the invention. Furthermore, it should be understood that the position or configuration of the constituent elements in each disclosed embodiment can be changed without departing from the inventive concept and scope of the invention. Therefore, the detailed description that follows is not intended to be limiting, and the scope of the invention is defined only by all the scopes equivalent to those stated in the claims and the appended claims, provided that appropriate description is possible. Similar reference numerals in the drawings refer to the same or similar functions in several respects.

[0054] To enable those skilled in the art to readily implement this invention, preferred embodiments of the invention will now be described in detail with reference to the accompanying drawings.

[0055] Figures 1A to 1C This is a diagram illustrating an example of a clustered substrate processing apparatus equipped with a substrate transfer device according to an embodiment of the present invention.

[0056] Figures 1A to 1CA substrate processing apparatus is disclosed, wherein a process chamber PC1 and a process chamber PC2 are respectively arranged on both sides of a vacuum chamber VC, which serves as a transfer chamber, with a four-corner structure. Two substrates can be arranged in each process chamber. The substrate processing apparatus enables a transfer robot 3000 for transferring substrates to move, so that a substrate transfer device TA is fixedly set at a specific position P1 in the vacuum chamber VC, and the moving robot 2000 corresponds to the position of each process chamber and the position of the two substrates in each process chamber. The substrate transfer device TA includes a lifting robot 1000, a moving robot 2000 attached above the lifting robot 1000, and a transfer robot 3000 attached above the moving robot 2000.

[0057] For example, when any direction on the plane observed from the vacuum chamber VC is referred to as the first direction, and the direction perpendicular to the first direction is referred to as the second direction, the central axis of the lifting robot 1000 (i.e., the central axis of the lifting shaft of the lifting robot 1000) can be positioned at a position P1 equidistant from the centerline L1 (the centerline in the first direction) by a predetermined distance, and positioned on the centerline L2 (the centerline in the second direction). That is, the central axis of the lifting shaft of the lifting robot 1000 can be positioned on the centerline L2 of the second direction, and at a position P1 equidistant from the centerline L1 of the first direction by a predetermined distance. However, the present invention is not limited to this; the central axis of the lifting shaft can be positioned on a line parallel to the second direction, parallel to the centerline L2 of the second direction. For reference, Figures 1A to 1C The vacuum chamber shown has a rectangular shape, wherein the length in the first direction is greater than the length in the second direction.

[0058] In addition, the walking robot 2000 can use the rotating drive shaft, that is, the arc between the first contact point P2 and the second contact point P3 intersecting the first direction centerline L1 at the rotation radius of the junction of the conveyor robot and the walking robot, as the walking trajectory DT. The rotating drive shaft is centered on the lifting axis of the b-th front end region of the walking arm, and moves with the rotation of the other b-th front end region of the walking arm.

[0059] The following is a brief description of the process of transferring a substrate within the transfer chamber VC using the substrate transfer device TA as described above.

[0060] With the traveling robot 2000 of the substrate transfer device TA driving the transfer robot 3000 to a position at the first contact point P2, the transfer robot 3000 can be rotated so that its front (i.e., the direction away from the substrate in the straight line direction of the substrate transfer in the transfer robot 3000) faces the first load locking chamber LC1. This allows the transfer robot 3000 to move the substrate from the first load locking chamber LC1 into the transfer chamber VC. After the substrate is moved in, the transfer robot 3000 can be rotated so that its front faces at the first contact point P2 towards the left process stage of the first process chamber PC1 or the left process stage of the second process chamber PC2 in the second direction. This allows the transfer robot 3000 to transfer the substrate to the left process stage of the first process chamber PC1 or the left process stage of the second process chamber PC2.

[0061] Furthermore, after the walking robot 2000 moves the transfer robot 3000 to the second contact point P3, the process of transferring the substrate to the right-side process stage of the first process chamber PC1, the right-side process stage of the second process chamber PC2, and the second load locking chamber LC2 by rotating the transfer robot 3000 can be easily understood from the above process, so a detailed description of it is omitted.

[0062] Furthermore, when the transfer robot 3000 moves between the first contact point P2 and the second contact point P3, the walking robot 2000 can prevent the substrate and the transfer chamber VC from colliding by facing either end of the first direction.

[0063] At this time, the walking of the transfer robot 3000 caused by the walking robot 2000 and the rotation of the transfer robot 3000 can be combined in various ways to minimize the substrate transfer time.

[0064] That is, the walking robot 2000 moves the front of the conveying robot 3000 toward either end of the first contact point P2 or the second contact point P3 in the first direction, and the conveying robot 3000 can be moved without rotating during the process of moving between the first contact point P2 and the second contact point P3.

[0065] In contrast, when the conveyor robot 3000 moves between the first contact point P2 and the second contact point P3, the walking robot 2000 can make the rotation direction of the conveyor robot 3000 the same as or opposite to the walking direction.

[0066] For example, such as Figure 1CAs shown, when the front of the transfer robot 3000 is facing the second load locking chamber LC2 at the first contact point P2, when the transfer robot 3000 moves towards the second contact point P3, the walking robot 2000 can move the transfer robot 3000 from the first contact point P2 to the second contact point P3 without rotating the transfer robot 3000.

[0067] For example, when the front of the transfer robot 3000 is facing the first load locking chamber LC1 at the first contact point P2, in order to transfer the substrate to the right-side process stage of the second process chamber PC2, when the walking robot 2000 transfers the transfer robot 3000 to the second contact point P3, the transfer robot 3000 is rotated counterclockwise so that when the transfer robot 3000 reaches the second contact point P3, its front is facing the right-side process stage of the second process chamber PC2, so that the transfer robot 3000 directly transfers the substrate to the right-side process stage of the second process chamber PC2 at the second contact point P3.

[0068] For example, such as Figure 1A As shown, with the transfer robot 3000 facing the left side of the first process chamber PC1, in order to transfer the substrate to the second load locking chamber LC2, the walking robot 2000 moves the transfer robot 3000 from the first contact point P2 to the second contact point P3 while rotating the transfer robot 3000 clockwise so that when the transfer robot 3000 reaches the second contact point P3, its front faces the second load locking chamber LC2. This allows the transfer robot 3000 to directly move the substrate from the vacuum chamber VC to the second load locking chamber LC2 at the second contact point P3.

[0069] The above Figures 1A to 1C An exemplary substrate processing apparatus with a quadrangular structure is shown, but the present invention is not limited thereto. In the state where the substrate transfer device TA is fixedly installed at a specific position in a vacuum chamber of various structures according to an embodiment of the present invention, the walking robot can make the transfer robot walk along various preset paths.

[0070] Figure 2A and Figure 2B This is a schematic diagram of a substrate transfer device TA according to an embodiment of the present invention.

[0071] Reference Figure 2A and Figure 2B The substrate conveying device TA may include a lifting robot 1000, a walking robot 2000 attached to the lifting robot 1000, and a conveying robot 3000 attached to the walking robot 2000.

[0072] First, the lifting robot 1000 can be located in the lower outer region of the housing, with its upper end sealed to the vacuum chamber through hole (not shown), and the lifting shaft 1100 forming the first hollow can move up and down and rotate. The housing seals the interior of the vacuum chamber VC, and the vacuum chamber through hole is formed in the lower region of the housing of the vacuum chamber VC.

[0073] Thus, the lifting robot 1000 adjusts the vertical position of the transfer robot 3000 by means of the up-and-down movement of the lifting shaft 1100, thereby positioning the transfer robot 3000 at a suitable height for loading or unloading substrates in the process room, etc., and enabling the walking robot 2000 to move the transfer robot 3000 by means of rotational movement.

[0074] For example, refer to Figures 3A to 3C The lifting robot 1000 is described in further detail.

[0075] The lifting robot 1000 is formed below the vacuum chamber and includes a lifting plate 1200 that moves up and down as a lifting drive unit. The a-th central region of the lifting plate 1200 can form a a-th vertical through hole 1210.

[0076] Furthermore, the lifting robot 1000 is rotatably coupled to the a-th vertical through hole 1210 and includes a lifting shaft 1100 having a hollow a-th hole.

[0077] For example, a shaft housing 1110 of the tube body can be fixedly connected to the a-th vertical through hole 1210 in the vertical direction. A lifting shaft 1100 is rotatably arranged inside the shaft housing 1110, and the upper and lower sides of the lifting shaft 1100 can extend to the outer region in the vertical direction of the lifting shaft 1100, respectively. An upper flange 1121 can be connected to the upper side of the lifting shaft 1100, and a lower flange 1122 can be connected to the lower side of the lifting shaft 1100. However, the present invention is not limited to this, and various structures that allow the lifting shaft 1100 to be rotatably connected to the a-th vertical through hole 1210 can be used.

[0078] Furthermore, the lifting drive unit of the lifting robot 1000 may include a first screw shaft 1220_1 and a second screw shaft 1220_2. The first screw shaft 1220_1 is connected to one side of the lifting plate 1200 by a nut and is formed in a vertical direction. The second screw shaft 1220_2 is connected to the other side of the lifting plate 1200 by a nut and is formed in a vertical direction. In this case, one side and the other side of the lifting plate 1200 may be symmetrical sides with reference to the a-th vertical through hole 1210 of the lifting plate 1200, but are not limited to this.

[0079] In addition, the lifting drive unit of the lifting robot 1000 may include a1 drive motor 1310, which provides driving force for rotating the first screw shaft 1220_1 and the second screw shaft 1220_2.

[0080] At this time, in order to transmit the driving force of the a1 drive motor 1310 to the first screw shaft 1220_1 and the second screw shaft 1220_2, a timing belt can be used. Each timing belt can be coupled to the drive shaft of the a1 drive motor 1310 and a timing pulley coupled to each of the first screw shaft 1220_1 and the second screw shaft 1220_2. However, the driving force between the a1 drive motor 1310 and the first screw shaft 1220_1 and the second screw shaft 1220_2 is transmitted by pulleys, but the present invention is not limited to this, and various methods for transmitting driving force, such as gears, can be used.

[0081] Therefore, in the lifting drive unit of the lifting robot 1000, the first screw shaft 1220_1 and the second screw shaft 1220_2 rotate with the operation of the a1 drive motor, so that the lifting plate 1200 moves up and down in the direction of rotation of the a1 drive motor 1310, thereby enabling the lifting shaft 1100 to move up and down.

[0082] Furthermore, the lifting drive unit of the lifting robot 1000 may include at least one first sliding guide 1230_1 and at least one second sliding guide 1230_2. The first sliding guide 1230_1 is formed on one side of the lifting plate 1200 and supports the vertical movement direction of the lifting plate 1200, while the second sliding guide 1230_2 is formed on the other side of the lifting plate 1200 and supports the vertical movement direction of the lifting plate 1200. In this way, by forming a plurality of sliding guides on each side, the vertical movement direction of the lifting plate 1200 can be supported more stably.

[0083] Furthermore, the a2 drive motor 1320 can be fixedly connected to the lifting plate 1200, and the a2 drive motor 1320 can provide driving force for rotating the lifting shaft 1100.

[0084] At this time, in order to transmit the driving force of the a2 drive motor 1320 to the lifting shaft 1100, a synchronous belt 1321 can be used. The synchronous belt 1321 can be connected to the drive shaft of the a2 drive motor 1320 and a synchronous pulley. The synchronous pulley is connected to the input shaft of the a reducer 1130. The output shaft of the a reducer 1130 can be fixedly connected to the lower side of the lifting shaft 1100, preferably fixedly connected to the lower flange 1122. The lower flange 1122 is fixedly connected to the lower side of the lifting shaft 1100. In addition, the driving force between the a2 drive motor 1320 and the lifting shaft 1100 is transmitted through pulleys, but the present invention is not limited to this. Various methods for transmitting driving force, such as gears, can be used.

[0085] Therefore, the lifting drive unit of the lifting robot 1000 can make the lifting shaft 1100 move with the operation of the a2 drive motor.

[0086] Furthermore, the lifting robot 1000 can seal the vacuum chamber through hole of the vacuum chamber through the a cover 1500, and the a cover 1500 can be formed with a hole that allows the lifting shaft 1100 to be inserted.

[0087] Furthermore, the lifting robot 1000 may include a bellows 1400 into which the lifting shaft 1100 is inserted, preferably into a shaft housing 1110 including the lifting shaft 1100, and one end is coupled to the lower region of the lifting plate 1200, preferably to the lower region of the shaft housing 1110 where the lifting shaft 1100 is located, and the other end is coupled to the a-th cover 1500. Thus, the vacuum chamber is sealed from the external environment and maintained under vacuum due to the bellows 1400.

[0088] Next refer to Figures 4A to 4D Describes a walking robot 2000 in a substrate conveying device.

[0089] Figures 4A to 4D This is a schematic diagram of a walking robot 2000 in a substrate conveying device according to an embodiment of the present invention. The walking robot 2000 may include a walking arm 2100, a b-th drive motor 2200, and a b-th reducer 2300.

[0090] The walking arm 2100 is formed as a whole. When the surface facing the ground is called the bottom surface, the b-th front end region can form a b1 vertical through hole 2110 that penetrates the top surface and the bottom surface, and the b2 vertical through hole 2120 that penetrates the top surface and the bottom surface can be formed in the other b-th front end region.

[0091] Furthermore, the other front end region of the walking arm 2100 can form an internal groove 2140 and a lower open space 2150. The internal groove 2140 is separated from the second vertical through hole 2120 by a partition wall. Compared to the second vertical through hole 2120 which is formed on the inside, the lower open space 2150 has a predetermined depth from the bottom surface to the top surface and is connected to the second vertical through hole 2120 and the internal groove 2140.

[0092] In addition, an internal wiring hole 2130 can be formed inside the walking arm 2100, which connects the b1 vertical through hole 2110 in the b front end region and the internal groove 2140.

[0093] At this time, an internal wiring hole 2130 can be formed by generating a horizontal through hole, which extends from the side of the b-th front end region of the walking arm 2100 to the internal groove 2140.

[0094] In addition, the b-th drive motor 2200 of the walking robot 2000 can be disposed in the internal slot 2140, which is formed in the b-th other front end region of the walking arm 2100. The b-th drive motor 2200 can provide driving force for rotating the conveying robot.

[0095] In addition, the b-th reducer 2300 of the walking robot 2000 is disposed in the b2-th vertical through hole 2120. The b2-th vertical through hole 2120 is formed in the b-th other front end region of the walking arm 2100. The rotary drive shaft can be configured to be exposed on the top surface of the walking arm 2100. The rotary drive shaft is linked to the b-th drive motor 2200 and rotates in a manner that forms the b-th hollow.

[0096] At this time, the transmission of driving force between the b-th drive motor 2200 and the b-th reducer 2300 of the walking robot 2000 is achieved through a synchronous belt in the lower open space 2150. The synchronous belt can be connected to a synchronous pulley, which is connected to the drive shaft of the b-th drive motor 2200 and below the b-th reducer 2300. However, the present invention is not limited to this; the transmission of driving force between the b-th drive motor 2200 and the b-th reducer 2300 can be achieved through various methods for transmitting driving force, such as gears.

[0097] Furthermore, a lifting shaft can be sealed and connected to the first specific bottom surface region of the bottom surface of the walking arm 2100 corresponding to the b1 vertical through hole 2110 in the b front region of the walking arm 2100, so that the a hollow part of the lifting shaft of the lifting robot corresponds to the b1 vertical through hole 2110, and the b1 cover 2111 can be sealed and connected to the first specific top surface region of the top surface corresponding to the b1 vertical through hole in the b front region.

[0098] Furthermore, a second specific bottom surface region corresponding to the lower open space 2150 in the other front region of the walking arm 2100 can be sealed with a second cover 2121.

[0099] In addition, a b3 cover 2131 can be attached to the side of the b front end region of the walking arm 2100, and the b3 cover 2131 seals the horizontal through hole.

[0100] As described above, the walking robot 2000 in the substrate conveying device according to an embodiment of the present invention is formed by an integral walking arm 2100. Due to its simple structure, the height of the walking robot 2000 itself can be minimized.

[0101] Next, refer to Figures 5A to 8 A transfer robot 3000 in a substrate transfer apparatus according to an embodiment of the present invention is described.

[0102] Reference Figure 5A and Figure 5B The transfer robot 3000 may include a transfer arm platform 3100, a first transfer arm unit 3200, and a second transfer arm unit 3300. The transfer arm platform 3100 is coupled to the rotary drive shaft of the b-th reducer of the walking robot. The first transfer arm unit 3200 and the second transfer arm unit 3300 are coupled to the transfer arm platform 3100. Each of the first transfer arm unit 3200 and the second transfer arm unit 3300 may be coupled with a first end effector 3400 and a second end effector 3500 for supporting a substrate. For reference, Figure 5A The diagram shows a state where a mask serving as a substrate is supported in the first end effector 3400 and a glass substrate serving as a substrate is supported in the second end effector 3500. Figure 5B This shows the state in which the clamps used to support the substrate in the first end effector 3400 and the second end effector 3500 have been removed.

[0103] Thus, the transfer robot 3000 moves within the vacuum chamber by means of the operation of the walking robot, thereby positioning itself in a specific location. When the first end effector 3400 or the second end effector 3500 is positioned for loading or unloading the substrate due to the up-and-down movement of the lifting robot, the substrate supported by the first end effector 3400 or the second end effector 3500 can be loaded or unloaded by the operation of the first transfer arm unit 3200 or the second transfer arm unit 3300.

[0104] Furthermore, the transfer arm platform 3100 may include a c1 connecting hole 3110, a c2 connecting hole 3120, and a c3 connecting hole 3130. When the linear movement direction of the first transfer arm unit 3200 or the second transfer arm unit 3300 is taken as a reference, which is the linear movement direction of the substrate moved by the transfer robot 3000, the center line CL of the transfer arm platform 3100 is bisected. The c1 connecting hole 3110 is formed in the c central region, which is its specific region. The c2 connecting hole 3120 is formed in the c front end region of one side region when the center line CL is taken as a reference. The c3 connecting hole 3130 is formed in the c other front end region of the other side region corresponding to the c front end region when the center line CL is taken as a reference.

[0105] Furthermore, in the conveyor arm platform 3100, the front and rear of the c2 engagement hole 3120 are formed with first blade 3171 and first blade 3172 for connecting rod engagement, and the front and rear of the c3 engagement hole 3130 are formed with second blade 3181 and second blade 3182 for connecting rod engagement.

[0106] At this time, refer to Figure 6A The c1 connecting hole 3110 of the conveyor arm platform 3100 is divided into an upper c1 space 3113 and a lower c1 space 3114 by a c1 locking member 3112 forming a c1 vertical through hole 3111 in the c1 central region, and the upper c1 space 3113 can be sealed by a c1 cover 3140, wherein the c1 vertical through hole 3111 corresponds to the b hollow of the rotation drive shaft of the b reducer of the walking robot.

[0107] Furthermore, the c2 engagement hole 3120 of the conveyor arm platform 3100 is divided into an upper c2 space 3123 and a lower c2 space 3124 by the c2 locking member 3122 forming the c2 vertical through hole 3121 in the c2 front end region, and the lower c2 space 3124 can be sealed by the c2 cover 3150.

[0108] Furthermore, the c3 connecting hole 3130 of the conveyor arm platform 3100 is divided into an upper c3 space 3133 and a lower c3 space 3134 by the c3 locking member 3132 forming the c3 vertical through hole 3131 in another front end region of the c3, and the lower c3 space 3134 can be sealed by the c3 cover 3160.

[0109] In addition, the transfer arm platform 3100 may include the aforementioned wiring hole, which is used to insert the wiring that is hollowly inserted through the rotation drive shaft of the b-th reducer of the walking robot into the first transfer arm unit 3200 and the second transfer arm unit 3300.

[0110] That is, the interior of the conveyor arm platform 3100 can form a first wiring hole H110 and a second wiring hole H120. The first wiring hole H110 connects the upper space 3113 of the first c1 and the lower space 3124 of the second c2, and the second wiring hole H120 connects the upper space 3113 of the first c1 and the lower space 3134 of the third c3.

[0111] For example, in addition to the above Figure 6A In addition, refer to Figure 6B and Figure 6C The conveyor arm platform 3100 can be formed by combining an upper plate 3100a and a lower plate 3100b. The upper plate 3100a includes a first blade 3171, a first blade 3172, a second blade 3181, and a second blade 3182.

[0112] In the c-th central region of the upper plate 3100a, a c1 upper joint hole 3110_1 is formed as part of the c1 joint hole; in the c-th front end region, a c2 upper joint hole 3120_1 is formed as part of the c2 joint hole; and in the other front end region of the c-th plate, a c3 upper joint hole 3130_1 is formed as part of the c3 joint hole.

[0113] Furthermore, a c2 locking member 3122 is formed inside the upper c2 connecting hole 3120_1, thereby separating the internal space of the upper c2 connecting hole 3120_1. A c3 locking member 3132 is formed inside the upper c3 connecting hole 3130_1, thereby separating the internal space of the upper c3 connecting hole 3130_1. A c2 vertical through hole 3121 is formed on the c2 locking member 3122, and a c3 vertical through hole 3131 is formed on the c3 locking member 3132.

[0114] In addition, the bottom surface of the upper plate 3100a forms an upper wiring groove H110_1 of type c1 and an upper wiring groove H120_1 of type c2. The upper wiring groove H110_1 of type c1 connects the internal space of the upper connecting hole 3110_1 of type c1 and the lower space of the upper connecting hole 3120_1 of type c2. The upper wiring groove H120_1 of type c2 connects the internal space of the upper connecting hole 3110_1 of type c1 and the lower space of the upper connecting hole 3130_1 of type c3.

[0115] In addition, a lower c1 connecting hole 3110_2, which serves as another part of the c1 connecting hole, is formed in the c-th central region of the lower plate 3100b; a lower c2 connecting hole 3120_2, which serves as another part of the c2 connecting hole, is formed in the c-th front end region; and a lower c3 connecting hole 3130_2, which serves as another part of the c3 connecting hole, is formed in the other front end region of the c-th plate.

[0116] Furthermore, a c1 locking member 3112 is formed inside the lower c1 connecting hole 3110_2, thereby separating the internal space of the lower c1 connecting hole 3110_2, wherein a c1 vertical through hole 3111 is formed on the c1 locking member 3112.

[0117] Furthermore, the top surface of the lower plate 3100b forms a lower wiring groove H110_2 (c1) and a lower wiring groove H120_2 (c2). The lower wiring groove H110_2 (c1) connects the upper space of the lower connecting hole 3110_2 (c1) and the inner space of the lower connecting hole 3120_2 (c2). The lower wiring groove H120_2 (c2) connects the upper space of the lower connecting hole 3110_2 (c1) and the inner space of the lower connecting hole 3130_2 (c3).

[0118] Therefore, by combining the upper plate 3100a and the lower plate 3100b, the c1 connecting hole 3110 can be formed by combining the upper connecting hole 3110_1 and the lower connecting hole 3110_2 of c1, the c2 connecting hole 3120 can be formed by combining the upper connecting hole 3120_1 and the lower connecting hole 3120_2 of c2, and the c3 connecting hole 3130 can be formed by combining the upper connecting hole 3130_1 and the lower connecting hole 3130_2 of c3. Furthermore, by combining the upper plate 3100a and the lower plate 3100b, the c1 wiring hole H110 can be formed by combining the upper wiring groove H110_1 and the lower wiring groove H110_2 of c1, and the c2 wiring hole H120 can be formed by combining the upper wiring groove H120_1 and the lower wiring groove H120_2 of c2.

[0119] Re-reference Figure 5A and Figure 5B The conveyor arm platform 3100 can be integrated with a walking robot. Specifically, by inserting the rotary drive shaft of the walking robot's b-th reducer into the lower c1 space of the c1-th engagement hole 3110, the rotary drive shaft of the walking robot's b-th reducer can be fixedly engaged with the c1-th locking member. At this time, when fixing the rotary drive shaft of the walking robot's b-th reducer to the c1-th locking member, the sealing performance of the fixed engagement area can be improved by adding O-rings, washers, or other sealing components. The technique of adding O-rings, washers, or other sealing components is also applicable to other engagement units described later, and therefore will not be repeated in the following description.

[0120] Therefore, the external environment caused by the hollow of the bth reducer's rotary drive shaft of the walking robot can be sealed from the vacuum environment inside the vacuum chamber in the c1 connecting hole 3110.

[0121] Furthermore, the first transmission link arm 3210 of the first transmission arm unit 3200 can be coupled to the c2 coupling hole 3120 of the transmission arm platform 3100, and the second transmission link arm 3310 of the second transmission arm unit 3300 can be coupled to the c3 coupling hole 3130 of the transmission arm platform 3100.

[0122] At this time, refer to Figure 7 The first transmission arm unit 3200 has a sealed internal space. The first drive motor 3211 and the first reducer 3212 can be installed in the sealed internal space. The first reducer 3212 reduces the speed to 1 / 2 by linkage with the first drive motor 3211.

[0123] Furthermore, the first c1_1 drive shaft 3213 and the first c1_1 output shaft 3214 can be sealed on the first c1_1 front end region of the first c1_1 transmission link arm 3210, and the second c1_2 drive shaft 3216 and the second c1_2 output shaft 3217 can be sealed on the other c1_1 front end region of the first c1_1 transmission link arm 3210. The second c1_1 drive shaft 3213 is linked with the first c1 reducer 3212 and forms a second c1_1 hollow thereon. The second c1_1 output shaft 3214 is linked with the second c1_1 drive shaft 3213. The second c1_2 drive shaft 3216 is linked with the first c1 drive motor 3211 and forms a second c1_2 hollow thereon. The second c1_2 output shaft 3217 is linked with the second c1_2 drive shaft 3216. At this time, the linkage between the c1 drive motor 3211 and the c1 reducer 3212, the linkage between the c1 reducer 3212 and the c1_1 drive shaft 3213, and the linkage between the c1 drive motor 3211 and the c1_2 drive shaft 3216 can be implemented by pulleys, but the present invention is not limited to this, and various methods for transmitting rotational force, such as gears, can also be used. Furthermore, the c1_1 drive shaft 3213 and the c1_1 output shaft 3214, and the c1_2 drive shaft 3216 and the c1_2 output shaft 3217 can also be formed by reducers with the same reduction ratio. Furthermore, the rotation directions of the c1_1 output shaft 3214 and the c1_2 output shaft 3217 can be opposite to each other.

[0124] Re-reference Figure 5A and Figure 5B The output shaft of the first transmission link arm 3210 of the first transmission arm unit 3200, located in the front end region of the first transmission link arm 3210, can be fixedly connected to the second locking member by inserting it into the upper space of the second connecting hole 3120 of the transmission arm platform 3100.

[0125] At this time, the 2_1 connector ( Figure 73215) can be used for the connection of the c1_1 output shaft and the c2 locking member. The 2_1 connecting member is a tubular shaft and has a length extending from the junction of the transmission arm platform 3100 and the 1_1 transmission link arm 3210 to a length equal to the distance between the c1_1 output shaft and the c2 locking member. The two ends of the 2_1 connecting member can be fixedly connected to the c1_1 output shaft and the c2 locking member respectively.

[0126] Furthermore, the c1_2 front end region of the first_2 transmission link arm 3220 can be fixedly coupled to the c1_2 output shaft of the first_1 transmission link arm 3210 of the first transmission arm unit 3200.

[0127] At this time, the first fixed coupling shaft ( Figure 7 3218) can be used for the connection of the c1_2 output shaft of the first_1 transmission link arm 3210 and the c1_2 front end region of the first_2 transmission link arm 3220. The first fixed connection shaft is a tubular shaft and has a length extending from the connection point of the first_1 transmission link arm 3210 and the first_2 transmission link arm 3220 to a length equal to the distance between the connection areas of the c1_2 output shaft and the c1_2 front end region. The two ends of the first fixed connection shaft can be fixedly connected to the connection areas of the c1_2 output shaft and the c1_2 front end region, respectively.

[0128] In addition, the first common linkage arm 3230 can be disposed in the joint area of ​​the first transmission linkage arm 3210 and the first transmission linkage arm 3220, that is, the joint area of ​​the c1_2 output shaft and the c1_2 front end area.

[0129] That is, refer to Figure 8 The central region of the first common linkage arm 3230 is rotatably coupled to the first fixed coupling shaft 3218, and the first fixed coupling shaft 3218 is coupled to the output shaft 3217 and the front end region of the c1_2.

[0130] In addition, re-reference Figure 5A and Figure 5B The first transmission arm unit 3200 may include a first auxiliary linkage arm 3240, which is parallel to the first transmission linkage arm 3210. The first auxiliary linkage arm 3240 is rotatably coupled to the first blade 3171 of the transmission arm platform 3100, and the other front end region of the first auxiliary linkage arm 3240 is rotatably coupled to the first common linkage arm 3230.

[0131] In addition, the first transfer arm unit 3200 may include a first-second auxiliary linkage arm 3250, which is parallel to the first-first transfer linkage arm 3210. The first-second auxiliary linkage arm 3250 is rotatably coupled to the first-second blade 3172 of the transfer arm platform 3100, and the other front end region of the first-second auxiliary linkage arm 3250 is rotatably coupled to the other front end region of the first common linkage arm 3230.

[0132] Therefore, two single parallel links can be formed in the region of the first transmission link arm 3210, forming a double parallel link with the first transmission link arm 3210 as the reference.

[0133] That is, the joint where the c1_1 front end region of the first_1 transmission link arm 3210 and the c2 engagement hole 3120 of the transmission arm platform 3100 are joined, and the joint where the c1_4 front end region of the first_1 auxiliary link arm 3240 and the first_1 blade 3171 of the transmission arm platform 3100 are joined, forms a frame; the first_1 transmission link arm 3210 forms an input link; the joint where the other front end region of the c1_1 of the first_1 transmission link arm 3210 and the c1 center region of the first common link arm 3230 are joined, and the joint where the c1_3 front end region of the first common link arm 3230 and the other front end region of the c1_4 of the first_1 auxiliary link arm 3240 are joined, forms a connecting arm; and the first_1 auxiliary link arm 3240 forms a follower, thereby constituting a single parallel link. Here, "frame" is a concept that may or may not physically exist. It is a predetermined reference line or reference plane that fixes one end of the input link and one end of the driven link that constitute the parallel link. The term "frame" mentioned below should be interpreted in a similar way.

[0134] Furthermore, the joint where the c1_1 front end region of the first_1 transmission link arm 3210 and the c2 engagement hole 3120 of the transmission arm platform 3100 are joined, and the joint where the c1_5 front end region of the first_2 auxiliary link arm 3250 and the first_2 blade 3172 of the transmission arm platform 3100 are joined, forms a frame. The first_1 transmission link arm 3210 forms an input link. The joint where the other front end region of the c1_1 of the first_1 transmission link arm 3210 and the c1 center region of the first common link arm 3230 are joined, and the joint where the other front end region of the c1_3 of the first common link arm 3230 and the other front end region of the c1_5 of the first_2 auxiliary link arm 3250 are joined, forms a connecting arm. The first_2 auxiliary link arm 3250 forms a follower, thereby constituting another single parallel link.

[0135] By using the dual parallel linkages as described above, vibration and / or disturbance of the first end effector 3400 on the substrate transport path can be reduced.

[0136] Furthermore, the first transmission arm unit 3200 may include a first-third auxiliary linkage arm 3260, which is parallel to the first-second transmission linkage arm 3220. The c1-6 front end region of the first-third auxiliary linkage arm 3260 can be rotatably coupled to the other c1-3 front end region of the first common linkage arm 3230. In this case, joints connecting the c1-6 front end region of the first-third auxiliary linkage arm 3260 and the other c1-3 front end region of the first common linkage arm 3230, as well as joints connecting the other c1-5 front end region of the first-second auxiliary linkage arm 3250 and the other c1-3 front end region of the first common linkage arm 3230, can be formed at the same or different positions.

[0137] In addition, the first transmission arm unit 3200 may include a first-fourth auxiliary linkage arm 3270, which is parallel to the first common linkage arm 3230. The c1-7 front end region of the first-fourth auxiliary linkage arm 3270 can be rotatably connected to the other c1-6 front end region of the first-third auxiliary linkage arm 3260, and the c1-7 front end region of the first-fourth auxiliary linkage arm 3270 can be rotatably connected to the c1-2 front end region of the first-second transmission linkage arm 3220.

[0138] Furthermore, the first transfer arm unit 3200 may include a first end effector 3400, which may be fixed to another front end region of the first-fourth auxiliary linkage arm 3270, thereby supporting the substrate. For reference, in Figure 5B In this process, the clamp plate of the first end effector 3400 used to fix the support base plate is integrated with the first-fourth auxiliary linkage arm 3270.

[0139] The first transfer arm unit 3200 configured as described above can enable the first end effector 3400 to move back and forth in a straight line by means of each transfer arm and auxiliary arm, thereby loading or unloading the substrate at a set position by means of the first end effector 3400.

[0140] In addition, re-reference Figure 5A and Figure 5B The second transfer arm unit 3300 can be configured similarly to the first transfer arm unit 3200 and can be set on the transfer arm platform 3100 such that it is symmetrical with respect to the center line CL of the transfer arm platform 3100 and the first transfer arm unit 3200.

[0141] That is, the second transmission link arm 3310 of the second transmission arm unit 3300 has a sealed internal space, and the second drive motor and the second reducer can be installed in the sealed internal space. The second reducer is linked with the second drive motor to reduce the speed to 1 / 2.

[0142] Furthermore, the c2_1 front end region of the 2_1 transmission link arm 3310 can be sealed with a c2_1 drive shaft and a c2_1 output shaft, and the other front end region of the c2_1 of the 2_1 transmission link arm 3310 can be sealed with a c2_2 drive shaft and a c2_2 output shaft. The c2_1 drive shaft is linked to the c2 reducer and has a c2_1 hollow section thereon; the c2_1 output shaft is linked to the c2_1 drive shaft; the c2_2 drive shaft is linked to the c2 drive motor and has a c2_2 hollow section thereon; and the c2_2 output shaft is linked to the c2_2 drive shaft. In this case, the linkage between the c2 drive motor and the c2 reducer, the linkage between the c2 reducer and the c2_1 drive shaft, and the linkage between the c2 drive motor and the c2_2 drive shaft can be implemented using pulleys, but the invention is not limited to this; various methods for transmitting rotational force, such as gears, can also be used. Furthermore, the c2_1 drive shaft and c2_1 output shaft, and the c2_2 drive shaft and c2_2 output shaft can each be configured as a reducer with the same reduction ratio. Additionally, the rotation directions of the c2_1 output shaft and the c2_2 output shaft can be opposite to each other.

[0143] In addition, the c2_1 output shaft can be inserted into the c3 upper space of the c3 engagement hole 3130 of the transmission arm platform 3100, thereby fixing it to the c3 locking member. The c2_1 output shaft is located in the c2_1 front end area of ​​the 2_1 transmission link arm 3310 of the 2nd transmission arm unit 3300.

[0144] At this time, the 2_2 connector can be used to connect the c2_1 output shaft and the c3 locking member. The 2_2 connector is a tubular shaft and has a length extending from the junction of the transmission arm platform 3100 and the 2_1 transmission link arm 3310 to a length equal to the distance between the c2_1 output shaft and the c3 locking member. The two ends of the 2_2 connector can be fixedly connected to the c2_1 output shaft and the c3 locking member, respectively.

[0145] Furthermore, the c2_2 front end region of the 2_2 transmission link arm 3320 can be fixedly coupled to the c2_2 output shaft of the 2_1 transmission link arm 3310 of the 2 transmission arm unit 3300.

[0146] At this time, the second fixed coupling shaft 3318 can be used to connect the c2_2 output shaft of the second_1 transmission link arm 3310 and the c2_2 front end region of the second_2 transmission link arm 3320. The second fixed coupling shaft 3318 is a tubular shaft and has a length extending from the connection point of the second_1 transmission link arm 3310 and the second_2 transmission link arm 3320 to a length equal to the distance between the connection area of ​​the c2_2 output shaft and the c2_2 front end region. The two ends of the second fixed coupling shaft 3318 can be fixedly connected to the connection area of ​​the c2_2 output shaft and the c2_2 front end region, respectively. Furthermore, by making the height of the second fixed coupling shaft 3318 higher than the height of the first fixed coupling shaft, the first end effector 3400 of the first transmission arm unit 3200 and the second end effector 3500 of the second transmission arm unit 3300 can be located at different heights on the same path. The second fixed coupling shaft 3318 connects the second-first transmission link arm 3310 and the second-second transmission link arm 3320 of the second transmission arm unit 3300, and the first fixed coupling shaft connects the first-first transmission link arm 3210 and the first-second transmission link arm 3220 of the first transmission arm unit 3200. However, the invention is not limited to this; the height of the first fixed coupling shaft can also be higher than the height of the second fixed coupling shaft.

[0147] Then, the second common linkage arm 3330 can be set in the joint area of ​​the second_1 transmission linkage arm 3310 and the second_2 transmission linkage arm 3320, that is, the joint area of ​​the c2_2 output shaft and the c2_2 front end area.

[0148] That is, the c2 central region of the second common linkage arm 3330 can be rotatably coupled to the second fixed coupling shaft, and the second fixed coupling shaft is coupled to the c2_2 output shaft and the c2_2 front end region.

[0149] In addition, the second transmission arm unit 3300 may include a second auxiliary linkage arm 3340, which is parallel to the second transmission linkage arm 3310. The front end region of the c2_4 can be rotatably connected to the second blade 3181 of the transmission arm platform 3100, and the other front end region of the c2_4 can be rotatably connected to the c2_3 front end region of the second common linkage arm 3330.

[0150] In addition, the second transmission arm unit 3300 may include a second auxiliary linkage arm 3350, which is parallel to the second transmission linkage arm 3310. The c2_5 front end region of the second auxiliary linkage arm 3350 can be rotatably coupled to the second blade 3182 of the transmission arm platform 3100, and the other front end region of the c2_5 of the second auxiliary linkage arm 3350 can be rotatably coupled to the other front end region of the c2_3 of the second common linkage arm 3330.

[0151] Therefore, two single parallel links can be formed in the region of the 2_1 transmission link arm 3310, forming a double parallel link with the 2_1 transmission link arm 3310 as the reference.

[0152] That is, the joint where the c2_1 front end region of the 2_1 transmission link arm 3310 and the c3 engagement hole 3130 of the transmission arm platform 3100 are joined, and the joint where the c2_4 front end region of the 2_1 auxiliary link arm 3340 and the 2_1 blade 3181 of the transmission arm platform 3100 are joined, forms a frame; the 2_1 transmission link arm 3310 forms an input link; the joint where the c2_1 other front end region of the 2_1 transmission link arm 3310 and the c2 center region of the 2 common link arm 3330 are joined, and the joint where the c2_3 front end region of the 2 common link arm 3330 and the c2_4 other front end region of the 2_1 auxiliary link arm 3340 are joined, forms a connecting arm; and the 2_1 auxiliary link arm 3340 forms a follower, thereby constituting a single parallel link.

[0153] Furthermore, the joint where the c2_1 front end region of the 2_1 transmission link arm 3310 and the c3 engagement hole 3130 of the transmission arm platform 3100 are joined, and the joint where the c2_5 front end region of the 2_2 auxiliary link arm 3350 and the 2_2 blade 3182 of the transmission arm platform 3100 are joined, forms a frame. The 2_1 transmission link arm 3310 forms an input link. The joint where the c2_1 other front end region of the 2_1 transmission link arm 3310 and the c2 center region of the 2 common link arm 3330 are joined, and the joint where the c2_3 other front end region of the 2 common link arm 3330 and the c2_5 other front end region of the 2_2 auxiliary link arm 3350 are joined, forms a connecting arm. The 2_2 auxiliary link arm 3350 forms a follower, thereby constituting another single parallel link.

[0154] By using the dual parallel linkages as described above, vibration and / or disturbance of the second end effector 3500 on the substrate transport path can be reduced.

[0155] Furthermore, the second transmission arm unit 3300 may include a second-third auxiliary linkage arm 3360, which is parallel to the second-second transmission linkage arm 3320. The front end region of the c2-6 can be rotatably coupled to the other front end region of the c2-3 of the second common linkage arm 3330. In this case, a joint that connects the front end region of the c2-6 of the second-third auxiliary linkage arm 3360 and the other front end region of the c2-3 of the second common linkage arm 3330, as well as the joint that connects the other front end region of the c2-5 of the second-second auxiliary linkage arm 3350 and the other front end region of the c2-3 of the second common linkage arm 3330, can be formed in the same or different positions.

[0156] In addition, the second transmission arm unit 3300 may include a second-fourth auxiliary linkage arm 3370, which is parallel to the second common linkage arm 3330. The front end region of the c2-7 can be rotatably connected to the other front end region of the c2-6 of the second-third auxiliary linkage arm 3360, and the other front end region of the c2-7 can be rotatably connected to the other front end region of the c2-2 of the second-second transmission linkage arm 3320.

[0157] Furthermore, the second transfer arm unit 3300 may include a second end effector 3500, which may be fixed to another front end region of the second-fourth auxiliary linkage arm 3370 (c2-7) to support the substrate. For reference, in Figure 5B In the second end effector 3500, a plate that forms a clamp for fixing the support substrate is attached to the second auxiliary link arm 3370, thereby fixing the plate of the clamp for fixing the support substrate in the second end effector 3500 to another front end region of the second auxiliary link arm 3370.

[0158] The second transmission arm unit 3300 configured as described above can enable the second end effector 3500 to move back and forth in a straight line by means of each transmission arm and auxiliary arm, thereby loading or unloading the substrate at a set position by means of the second end effector 3500.

[0159] At this time, the other front end region of the first transmission link arm 3210 of the first transmission arm unit 3200 and the other front end region of the second transmission link arm 3310 of the second transmission arm unit 3300 can be located in the front or rear region of the transmission arm platform 3100.

[0160] Alternatively, the other front end region of the first transmission link arm 3210 of the first transmission arm unit 3200 can be located in the front region of the transmission arm platform 3100, and the other front end region of the second transmission link arm 3310 of the second transmission arm unit 3300 can be located in the rear region of the transmission arm platform 3100.

[0161] In addition, the c1 wiring and the c2 wiring are respectively configured in the sealed space inside the conveyor robot 3000. The c1 wiring is used for the operation of the c1 drive motor 3211, and the c2 wiring is used for the operation of the c2 drive motor.

[0162] At this time, by inserting the c1 wiring through the hollow of each of the lifting robot's lifting shaft, the rotary drive shaft of the walking robot's b-th reducer, and the c1_1 drive shaft 3213 of the conveyor robot 3000 into the c1 drive motor 3211, it can be sealed from the internal space of the vacuum chamber. Similarly, by inserting the c2 wiring through the hollow of each of the lifting robot's lifting shaft, the rotary drive shaft of the walking robot's b-th reducer, and the c2_1 drive shaft of the conveyor robot 3000 into the c2 drive motor, it can be sealed from the internal space of the vacuum chamber. Furthermore, the c1 wiring and the c2 wiring, through the c1 wiring hole and the c2 wiring hole formed in the conveyor arm platform 3100, can branch from the rotary drive shaft of the walking robot's b-th reducer into the first conveyor arm unit 3200 and the second conveyor arm unit 3300, respectively.

[0163] The present invention has been described above with reference to specific constituent elements and limited embodiments, as well as the accompanying drawings. However, this is only to help to fully understand the present invention, and the present invention is not limited thereto. Those skilled in the art to which the present invention pertains can make various modifications and variations based on the above description.

[0164] Therefore, the technical concept of the present invention should not be limited to the embodiments described above, and the claims and modifications equivalent to or equivalent to the claims are all within the scope of the technical concept of the present invention.

Claims

1. A substrate transfer apparatus which transfers a substrate in a vacuum chamber, comprising: a lift robot which includes a lift shaft formed with a first a hollow and a lift driving unit which moves the lift shaft up and down and rotates the lift shaft, and is sealingly formed in a vacuum chamber through hole formed in a lower area of the vacuum chamber; a walking robot which includes a walking arm, a first b driving motor and a first b speed reducer, a first b front end area of the walking arm is formed with a first b1 vertical through hole which penetrates a top surface and a bottom surface, the bottom surface is a surface which faces a ground, a first b other front end area is formed with a first b2 vertical through hole which penetrates the top surface and the bottom surface, an inner slot which is separated from the first b2 vertical through hole by a partition wall and is formed inside compared to the first b2 vertical through hole, and a lower open space which has a predetermined depth from the bottom surface to the top surface direction, and the first b2 vertical through hole and the inner slot are connected to each other, and an inner wiring hole which connects the first b1 vertical through hole and the inner slot is formed inside; the first b driving motor is provided in the inner slot of the walking arm; the first b speed reducer is provided in the first b2 vertical through hole of the walking arm, and a rotation driving shaft which is rotatably linked to the first b driving motor and is formed with a first b hollow is exposed in the top surface, wherein, a first specific bottom surface area of the bottom surface which corresponds to the first b1 vertical through hole in the first b front end area is sealingly combined with the lift shaft so that the first a hollow of the lift shaft corresponds to the first b1 vertical through hole, a first specific top surface area of the top surface which corresponds to the first b1 vertical through hole in the first b front end area is sealingly combined with a first b1 cover, and a second specific bottom surface area of the bottom surface which corresponds to the lower open space in the first b other front end area is sealingly combined with a first b2 cover; and a transfer robot which is sealingly combined with the first b2 vertical through hole in the first b other front end area of the walking arm and is formed with a second a hollow which corresponds to the first b2 vertical through hole.

2. The substrate transfer apparatus according to claim 1, wherein, when any direction on a plane of the vacuum chamber is referred to as a first direction and a direction which is perpendicular to the first direction is referred to as a second direction, a center axis of the lift shaft of the lift robot is positioned at a position which is separated from a first direction center line which is a center line in the first direction by the same distance as a predetermined distance, and is positioned on a second direction center line which is a center line in the second direction or a second direction parallel line which is parallel to the second direction center line, A transfer robot includes a transfer arm platform, a first transfer arm unit, and a second transfer arm unit, the transfer arm platform includes a first c1 coupling hole, a second c2 coupling hole, a third c3 coupling hole, a first 1_1 and 1_2 blade, and a second 2_1 and 2_2 blade, the first c1 coupling hole is formed in a first c center region, the first c center region is a specific region on a center line corresponding to a moving direction of a substrate for transfer, is divided into a first c1 upper space and a first c1 lower space by a first c1 stopper forming a first c1 vertical passage corresponding to the first b hollow of the rotational driving shaft of the first b speed reducer of the walking robot, the second c2 coupling hole is formed in a first c front end region of a one side region with the center line as a reference, is divided into a second c2 upper space and a second c2 lower space by a second c2 stopper forming a second c2 vertical passage, and the second c2 lower space is sealed by a second c2 cover, the third c3 coupling hole is formed in a first c other front end region corresponding to a other side region of the first c front end region with the center line as a reference, is divided into a third c3 upper space and a third c3 lower space by a third c3 stopper forming a third c3 vertical passage, and the third c3 lower space is sealed by a third c3 cover, the first 1_1 and 1_2 blade are formed in front of and behind the second c2 coupling hole respectively, the second 2_1 and 2_2 blade are formed in front of and behind the third c3 coupling hole respectively, wherein the rotational driving shaft of the first b speed reducer of the walking robot inserted into the first c1 lower space is fixedly coupled to the first c1 stopper;The first transfer arm unit includes a first_1 transfer link arm, a first_2 transfer link arm, a first common link arm, a first_1 auxiliary link arm, a first_2 auxiliary link arm, a first_3 auxiliary link arm, a first_4 auxiliary link arm, and a first end effector, a c1 drive motor and a c1 speed reducer are provided in a sealed internal space of the first_1 transfer link arm, the c1 speed reducer reduces the rotational speed to 1 / 2 by linkage with the c1 drive motor, a c1_1 drive shaft and a c1_1 output shaft are provided in a sealed manner on a c1_1 front end region of the first_1 transfer link arm, the c1_1 drive shaft is linked with the c1 speed reducer and a c1_1 hollow is formed thereon, the c1_1 output shaft is linked with the c1_1 drive shaft, a c1_2 drive shaft and a c1_2 output shaft are provided in a sealed manner on a c1_2 other front end region of the first_1 transfer link arm, the c1_2 drive shaft is linked with the c1 drive motor and a c1_2 hollow is formed thereon, the c1_2 output shaft is linked with the c1_2 drive shaft, the c1_1 output shaft is fixedly combined to a 2_1 connecting piece, the 2_1 connecting piece is fixedly combined to the c2 stop piece by being inserted into the c2 upper space of the transfer arm platform, a c1_2 front end region of the first_2 transfer link arm is fixedly combined to the c1_2 output shaft of the first_1 transfer link arm through a first fixed combination shaft, a c1 center region of the first common link arm is rotatably combined to the first fixed combination shaft, the first_1 auxiliary link arm is parallel to the first_1 transfer link arm, and a c1_4 front end region is rotatably combined to the first_1 blade of the transfer arm platform, a c1_4 other front end region is rotatably combined to a c1_3 front end region of the first common link arm, the first_2 auxiliary link arm is parallel to the first_1 transfer link arm, and a c1_5 front end region is rotatably combined to the first_2 blade of the transfer arm platform, a c1_5 other front end region is rotatably combined to a c1_3 other front end region of the first common link arm, the first_3 auxiliary link arm is parallel to the first_2 transfer link arm, and a c1_6 front end region is rotatably combined to a c1_3 other front end region of the first common link arm, the first_4 auxiliary link arm is parallel to the first common link arm, and a c1_7 front end region is rotatably combined to a c1_6 other front end region of the first_3 auxiliary link arm, a c1_7 other front end region is rotatably combined to a c1_2 other front end region of the first_2 transfer link arm, and the first end effector is fixed to the c1_7 other front end region of the first_4 auxiliary link arm to support the substrate.The second transfer arm unit includes a second 1 transfer link arm, a second 2 transfer link arm, a second common link arm, a second 1 auxiliary link arm, a second 2 auxiliary link arm, a second 3 auxiliary link arm, a second 4 auxiliary link arm, and a second end effector, a sealed internal space of the second 1 transfer link arm is provided with a second c drive motor and a second c speed reducer, the second c speed reducer reduces the rotational speed to 1 / 2 by linkage with the second c drive motor, a second c 1 drive shaft and a second c 1 output shaft are sealingly provided on a second c 1 front end region of the second 1 transfer link arm, the second c 1 drive shaft is linked with the second c speed reducer and a second c 1 hollow is formed thereon, the second c 1 output shaft is linked with the second c 1 drive shaft, a second c 2 drive shaft and a second c 2 output shaft are sealingly provided on a second c 2 other front end region of the second 1 transfer link arm, the second c 2 drive shaft is linked with the second c drive motor and a second c 2 hollow is formed thereon, the second c 2 output shaft is linked with the second c 2 drive shaft, the second c 1 output shaft is fixedly combined to a second 2 connecting piece, the second 2 connecting piece is fixedly combined to the second c 3 blocking piece by being inserted into the second c 3 upper space of the transfer arm platform, a second c 2 front end region of the second 2 transfer link arm is fixedly combined to the second c 2 output shaft of the second 1 transfer link arm through a second fixed combination shaft, a second c center region of the second common link arm is rotatably combined to the second fixed combination shaft, the second 1 auxiliary link arm is parallel to the second 1 transfer link arm, and a second c 4 front end region is rotatably combined to the second 1 blade of the transfer arm platform, a second c 4 other front end region is rotatably combined to a second c 3 front end region of the second common link arm, the second 2 auxiliary link arm is parallel to the second 1 transfer link arm, and a second c 5 front end region is rotatably combined to the second 2 blade of the transfer arm platform, a second c 5 other front end region is rotatably combined to a second c 3 other front end region of the second common link arm, the second 3 auxiliary link arm is parallel to the second 2 transfer link arm, and a second c 6 front end region is rotatably combined to a second c 3 other front end region of the second common link arm, the second 4 auxiliary link arm is parallel to the second common link arm, and a second c 7 front end region is rotatably combined to a second c 6 other front end region of the second 3 auxiliary link arm, a second c 7 other front end region is rotatably combined to a second c 2 other front end region of the second 2 transfer link arm, and the second end effector is fixed to the second c 7 other front end region of the second 4 auxiliary link arm to support the substrate. a circular arc between a first contact point and a second contact point which intersect the first direction center line on a radius of rotation of the rotation driving shaft which moves with the lift shaft as a center with rotation of a first other front end area of the walking arm is a walking track of the walking robot.

3. The substrate transfer apparatus according to claim 2, wherein, when the transfer robot which is combined with the rotation driving shaft walks between the first contact point and the second contact point, the walking robot makes a front of the transfer robot face either one of both ends in the first direction.

4. The substrate transfer apparatus according to claim 2, wherein, ​ ​ ​ When the transfer robot is caused to travel between the 1st contact point and the 2nd contact point, the traveling robot causes the rotation direction of the bth drive motor to be the same as or opposite to the rotation direction of the lifting shaft of the lifting robot.

5. The substrate transfer apparatus according to claim 2, wherein When the transfer robot is caused to travel between the 1st contact point and the 2nd contact point, the traveling robot causes the front of the transfer robot to be directed toward either of the two ends in the 1st direction on the 1st contact point and the 2nd contact point by the operation of the bth drive motor, and stops the operation of the bth drive motor during the travel of the transfer robot between the 1st contact point and the 2nd contact point.

6. The substrate transfer apparatus according to claim 2, wherein The vacuum chamber has a rectangular shape in which the length of the 1st direction is greater than the length of the 2nd direction.

7. The substrate transfer apparatus according to claim 1, wherein The internal wiring hole of the traveling arm of the traveling robot is formed by generating a horizontal through hole that penetrates from the side surface of the bth front end region of the traveling arm to the internal groove, and the side surface of the bth front end region corresponding to the horizontal through hole is combined with a bth 3 cover that seals the horizontal through hole.

8. The substrate transfer apparatus according to claim 1, wherein In the transfer robot, the 1st end effector and the 2nd end effector are located at different heights on the same path by causing the height of the 2nd fixed combination shaft to be higher than the height of the 1st fixed combination shaft.

9. The substrate transfer apparatus according to claim 1, wherein In the transfer robot, the transfer arm platform further includes a cth 1 wiring hole that connects the cth 1 upper space and the cth 2 lower space, and a cth 2 wiring hole that connects the cth 1 upper space and the cth 3 lower space.

10. The substrate transfer apparatus according to claim 1, wherein In the transfer robot, the transfer arm platform includes an upper plate and a lower plate, the upper plate includes the 1st 1 blade, the 1st 2 blade, the 2nd 1 blade, and the 2nd 2 blade, and the lower plate is combined to the upper plate, wherein a cth 1 upper combination hole that is part of the cth 1 combination hole is formed in the cth center region of the upper plate, a cth 2 upper combination hole that is part of the cth 2 combination hole is formed in the cth front end region of the upper plate, and the cth 2 upper combination hole is internally equipped with the cth 2 locking piece that forms the cth 2 vertical through hole, thereby separating the internal space of the cth 2 upper combination hole, a cth 3 upper combination hole that is part of the cth 3 combination hole is formed in the cth other front end region of the upper plate, and the cth 3 upper combination hole is internally equipped with the cth 3 locking piece that forms the cth 3 vertical through hole, thereby separating the internal space of the cth 3 upper combination hole, The c1 lower coupling hole is formed in the c center region of the lower plate as another part of the c1 coupling hole, and the c1 lower coupling hole is internally equipped with the c1 locking member formed with the c1 vertical through hole, thereby separating the internal space of the c1 lower coupling hole, the c2 lower coupling hole is formed in the c front end region of the lower plate as another part of the c2 coupling hole, and the c3 lower coupling hole is formed in the c other front end region of the lower plate as another part of the c3 coupling hole. 11.The substrate transfer device according to claim 10, wherein The bottom surface of the upper plate forms a c1 upper wiring groove and a c2 upper wiring groove, the c1 upper wiring groove connects the internal space of the c1 upper coupling hole and the lower space of the c2 upper coupling hole, and the c2 upper wiring groove connects the internal space of the c1 upper coupling hole and the lower space of the c3 upper coupling hole, The top surface of the lower plate forms a c1 lower wiring groove and a c2 lower wiring groove, the c1 lower wiring groove connects the upper space of the c1 lower coupling hole and the internal space of the c2 lower coupling hole, and the c2 lower wiring groove connects the upper space of the c1 lower coupling hole and the internal space of the c3 lower coupling hole.

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