Electric colloid blocking device and wafer gluing equipment

Abstract

According to the electric colloid blocking device and the wafer gluing equipment provided by the invention, the piezoelectric ceramic motor is adopted in the driving mechanism of the electric colloid blocking device, and compared with an electromagnetic linear driving motor, the piezoelectric ceramic motor generates low heat in the working process, so that the service life of the piezoelectric ceramic motor is prolonged, and the service life of the piezoelectric ceramic motor is prolonged. A heat dissipation gas circuit does not need to be additionally arranged for the driving mechanism, the structural complexity of the electric colloid blocking device is reduced, meanwhile, the influence of heat generated by the driving mechanism in the working process on coating liquid is reduced, and the energy-saving effect is better achieved; and meanwhile, the retaining force of the piezoelectric ceramic motor cannot be attenuated when the piezoelectric ceramic motor is in a static state, so that the stability of the matching state between the on-off diaphragm and the runner is ensured.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor gluing, and more particularly to an electric colloidal blocking device and wafer gluing equipment. BACKGROUND

[0002] In the process of manufacturing semiconductor wafers and gluing, a colloidal blocking device is widely used to control the on-off of the delivery of coating liquid to the semiconductor wafer and the back suction function, which can prevent liquid from dripping onto the wafer surface after the liquid supply element is disconnected.

[0003] At present, the existing colloidal blocking device usually includes a valve body, a driving mechanism, and an on-off diaphragm and a back suction diaphragm connected to the driving mechanism. The valve body is provided with a flow channel for the flow of coating liquid. When the driving mechanism drives the on-off diaphragm to open the flow channel, the liquid path is in communication, and the coating liquid is coated onto the semiconductor wafer through the coating liquid dripping device. When the coating liquid is coated in the required amount, the driving mechanism drives the on-off diaphragm to close the flow channel to block the liquid path. At this time, the back suction diaphragm is driven by the driving mechanism to generate negative pressure in the flow channel to back suction the coating liquid.

[0004] The problem of the above technical solution is that in the above technical solution, the driving mechanism usually uses an electromagnetic linear drive motor to drive the on-off diaphragm and the back suction diaphragm. Since the electromagnetic linear drive motor generates a large amount of heat during operation, a cooling mechanism is needed to cool the electromagnetic linear drive motor to prevent the heat generated by the electromagnetic linear drive motor from being conducted to the coating liquid and affecting the coating liquid. Moreover, after the temperature of the electromagnetic linear drive motor rises, the holding force decays, which leads to unstable cooperation between the on-off diaphragm and the back suction diaphragm and the flow channel, thereby causing the cross section of the coating liquid at the outlet of the coating liquid dripping device to deviate. SUMMARY

[0005] The purpose of the embodiment of the present application is to provide an electric colloidal blocking device and wafer gluing equipment to solve the technical problem that the driving mechanism affects the coating liquid due to temperature rise in the prior art.

[0006] To achieve the above purpose, the first aspect of the present application provides an electric colloidal blocking device, comprising:

[0007] a fixing mechanism;

[0008] a driving mechanism comprising a piezoelectric ceramic motor connected to the fixing mechanism;

[0009] a conduction mechanism connected to the fixing mechanism and connected with the piezoelectric ceramic motor;

[0010] a valve body connected to the conducting mechanism, the valve body being provided with a flow channel for the medium to flow through, and the valve body being further provided with a backflow cavity in communication with the flow channel;

[0011] an on-off diaphragm connected to the conducting mechanism for closing or opening the flow channel;

[0012] a back-suction diaphragm connected to the conducting mechanism and installed in the backflow cavity for causing the backflow cavity to back-suck the medium in the flow channel when the on-off diaphragm closes the flow channel.

[0013] Optionally, the conducting mechanism comprises:

[0014] a guide connected to the fixing mechanism and provided with a first guide hole and a second guide hole;

[0015] a first guide sleeve assembly slidingly connected in the first guide hole, the on-off diaphragm being connected to the first guide sleeve assembly;

[0016] a second guide sleeve assembly slidingly connected in the second guide hole, the back-suction diaphragm being connected to the second guide sleeve assembly.

[0017] Optionally, the first guide sleeve assembly comprises:

[0018] a first guide sleeve slidingly connected in the first guide hole;

[0019] a transmission block slidingly connected in the first guide hole and connected to the first guide sleeve, the on-off diaphragm being connected to an end of the transmission block away from the first guide sleeve;

[0020] a resilient member abutting against one end of the transmission block and the other end of the first guide sleeve;

[0021] Optionally, an outer wall of the first guide sleeve is provided with a first positioning pin, and an inner wall of the first guide hole is provided with a first guide groove, the first positioning pin being slidingly connected in the first guide groove.

[0022] Optionally, the transmission block is provided with a first clamping ring;

[0023] the first guide sleeve is provided with a sliding groove and a second clamping ring, and along the sliding direction of the transmission block, the length dimension of the sliding groove is greater than the length dimension of the first clamping ring;

[0024] the second clamping ring is clamped with the first clamping ring.

[0025] Optionally, an end of the first guide hole away from the first driving mechanism is provided with a first limiting ring, the transmission block is provided with a second limiting ring, and the second limiting ring is used for abutting against the first limiting ring to limit the position of the transmission block.

[0026] Optionally, the piezoelectric ceramic motor comprises:

[0027] The first piezoelectric ceramic motor is connected to the fixing mechanism.

[0028] The first piezoelectric ceramic motor is provided with a first driving lead screw, and the first guide sleeve is threadedly connected with the first driving lead screw.

[0029] Optionally, an end of the first guide sleeve close to the first driving motor is provided with a first limiting block, and the fixing mechanism is provided with a second limiting block, and the second limiting block is used for abutting against the first limiting block to limit the rotation angle of the first guide sleeve.

[0030] Optionally, the second guide sleeve assembly comprises:

[0031] The second guide sleeve is slidingly connected to the second guide hole, and the on-off diaphragm is connected to the second guide sleeve.

[0032] Optionally, the piezoelectric ceramic motor further comprises:

[0033] The second piezoelectric ceramic motor is connected to the fixing mechanism.

[0034] The second piezoelectric ceramic motor is provided with a second driving lead screw, and the second guide sleeve is threadedly connected with the second driving lead screw.

[0035] Optionally, a magnetic isolation sleeve is arranged between the first piezoelectric ceramic motor and the second piezoelectric ceramic motor.

[0036] The electric colloidal blocking device provided by the application has the following beneficial effects: compared with the prior art, in the driving mechanism of the electric colloidal blocking device provided by the application, a piezoelectric ceramic motor is used, compared with an electromagnetic linear driving motor, the piezoelectric ceramic motor generates relatively low heat during operation, and it is not necessary to additionally provide a heat dissipation mechanism for the driving mechanism, which not only reduces the structural complexity of the electric colloidal blocking device, but also reduces the influence of the heat generated by the driving mechanism during operation on the coating liquid; at the same time, since the piezoelectric ceramic motor generates relatively low heat during operation, its holding force will not decay, so as to ensure the stability of the cooperation state between the on-off diaphragm and the back-suction diaphragm and the flow channel.

[0037] The second aspect of the application provides a wafer coating device, comprising:

[0038] The electric colloidal blocking device is any one of the electric colloidal blocking devices described above.

[0039] The wafer coating device provided by the application has the beneficial effects that, compared with the prior art, the wafer coating device provided by the application includes the electric colloidal blocking device provided by any one of the above, the driving mechanism in the electric colloidal blocking device adopts a piezoelectric ceramic motor, compared with an electromagnetic linear driving motor, the piezoelectric ceramic motor generates less heat during operation, and it is not necessary to additionally provide a heat dissipation air path for the driving mechanism, which not only reduces the structural complexity of the electric colloidal blocking device, but also reduces the influence of heat generated by the driving mechanism during operation on the coating liquid and has the energy-saving effect; at the same time, the holding force of the piezoelectric ceramic motor does not decay in the static state, thereby ensuring the sealing property between the on-off diaphragm and the flow channel. BRIEF DESCRIPTION OF DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0041] Figure 1 A perspective structural schematic view of the electric colloidal blocking device provided by the embodiments of the application is shown in the figure.

[0042] Figure 2 A structural schematic view of the fixing mechanism provided by the embodiments of the application is shown in the figure.

[0043] Figure 3 A sectional view of the electric colloidal blocking device provided by the embodiments of the application is shown in the figure.

[0044] Figure 4 A structural schematic view of the fixing plate provided by the embodiments of the application is shown in the figure.

[0045] Figure 5 A perspective structural schematic view of the guide provided by the embodiments of the application is shown in the figure.

[0046] Figure 6 A top view of the guide provided by the embodiments of the application is shown in the figure.

[0047] Figure 7 A sectional view of the guide provided by the embodiments of the application is shown in the figure.

[0048] Figure 8 A sectional view of the first guide sleeve assembly provided by the embodiments of the application is shown in the figure.

[0049] Figure 9A sectional view of the second guide sleeve assembly provided for the embodiment of the present application;

[0050] Figure 10 A sectional view of the valve body provided for the embodiment of the present application;

[0051] Figure 11 A structural schematic view of the first sealing boss provided for the embodiment of the present application;

[0052] Figure 12 A structural schematic view of the third sealing boss provided for the embodiment of the present application.

[0053] In the drawings, various reference numerals refer to:

[0054] 10, fixing mechanism;

[0055] 11, fixing plate; 111, first mounting hole; 1111, second limiting block; 112, second mounting hole; 1121, fourth limiting block; 12, driving plate; 13, valve cover; 14, connecting piece; 141, first connecting part; 142, second connecting part; 15, signal connector;

[0056] 20, driving mechanism;

[0057] 21, piezoelectric ceramic motor; 21a, first piezoelectric ceramic motor; 21b, second piezoelectric ceramic motor; 22, first driving lead screw; 23, second driving lead screw; 24, magnetic isolation sleeve;

[0058] 30, transmission mechanism;

[0059] 31, guide; 311, first guide hole; 3111, first guide groove; 3112, first limiting ring; 312, second guide hole; 3121, second guide groove; 3122, third limiting ring; 313, first mounting convex ring; 314, second mounting convex ring; 32, first guide sleeve assembly; 321, first guide sleeve; 3211, second clasp; 3212, sliding groove; 3213, first limiting block; 322, transmission block; 3221, first clasp; 3222, second limiting ring; 323, elastic member; 324, first positioning pin; 33, second guide sleeve assembly; 331, second guide sleeve; 3311, fourth limiting ring; 3312, third limiting block; 332, second positioning pin; 34, third sealing ring; 35, fourth sealing ring;

[0060] 40, valve body;

[0061] 41, flow channel; 41a, first flow channel; 41b, second flow channel; 411, liquid inlet; 412, liquid outlet; 42, through cavity; 43, first sealing boss; 44, second sealing boss; 441, first sealing protrusion; 45, backflow cavity; 46, mounting cavity; 461, third sealing protrusion; 47, third sealing boss;

[0062] 50, on-off diaphragm;

[0063] 51, first sealing portion; 52, first sealing protrusion;

[0064] 60, backflow diaphragm;

[0065] 61, second sealing portion; 62, fourth sealing protrusion;

[0066] 70, mounting seat. DETAILED DESCRIPTION

[0067] In order to make the technical problems to be solved, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0068] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0069] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0070] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0071] Please refer to Figures 1 to 10 , now the electric colloidal blocking device provided by the embodiments of the present application will be described.

[0072] The first aspect of this application is to provide an electric colloidal blocking device, including a fixing mechanism 10, a driving mechanism 20, a conducting mechanism 30, a valve body 40, an on / off diaphragm 50, and a back-suction diaphragm 60.

[0073] The fixing mechanism 10 includes a fixing plate 11, a drive plate 12, and a valve cover 13. The drive plate 12 is connected to the fixing plate 11 via a connector 14. The connector 14 includes a first connecting part 141 and a second connecting part 142. The first connecting part 141 is fixedly connected to the fixing plate 11 by bolts, and the second connecting part 142 is fixedly connected to the drive plate 12 by bolts. The first connecting part 141 and the second connecting part 142 are perpendicular to each other so that the drive plate and the fixing plate 11 are perpendicular to each other.

[0074] The valve cover 13 is fixedly connected to the fixing plate 11 by bolts, and the drive plate 12 is enclosed inside it. The drive plate 12 is provided with a signal connector 15, which is used for electrical connection with the controller.

[0075] The drive mechanism 20 includes a piezoelectric ceramic motor 21, which is connected to one side of the fixing plate 11 in the fixing mechanism 10 and located inside the valve cover 13. The piezoelectric ceramic motor 21 is electrically connected to the signal connector 15. The controller is electrically connected to the piezoelectric ceramic motor 21 through the signal connector 15 to realize the control of starting or stopping the piezoelectric ceramic motor 21.

[0076] The transmission mechanism 30 is connected to the fixed plate 11 in the fixed mechanism 10 and is located on the side of the fixed plate 11 away from the piezoelectric ceramic motor 21. The transmission mechanism 30 is connected to the piezoelectric ceramic motor 21, which is used to drive some components in the transmission structure to move toward or away from the fixed plate 11.

[0077] The valve body 40 is connected to the transmission mechanism 30, and the end of the valve body 40 away from the transmission mechanism 30 is connected to the mounting base 70. The mounting base 70 is fixedly connected to the valve body 40 by bolts.

[0078] The valve body 40 is provided with a flow channel 41 and a connecting cavity 42 for medium flow. The flow channel 41 includes an inlet 411 and an outlet 412. The valve seat is provided with a flow channel 41 including a first flow channel 41a and a second flow channel 41b. The first flow channel 41a is connected to the inlet 411, and the second flow channel 41b is connected to the outlet 412. The first flow channel 41a is provided with a first bend, and the second flow channel 41b is provided with a second bend. The first bend and the second bend are parallel to each other, and the first bend and the second bend are connected through the connecting cavity 42.

[0079] The switching diaphragm 50 is connected to the transmission mechanism 30. A first annular sealing boss 43 is provided within the conduction cavity 42. Both the first bend and the second bend are located within the first sealing boss 43. The piezoelectric ceramic motor 21 in the drive mechanism 20 drives the switching diaphragm 50 to move within the valve body 40 via the transmission mechanism 30. When the switching diaphragm 50 abuts against the first sealing boss 43, it cuts off the connection between the first flow channel 41a and the conduction cavity 42, thereby cutting off the first flow channel 41a and the second flow channel 41b. When the switching diaphragm 50 separates from the first sealing boss 43, it opens the connection between the flow channel 41 and the conduction cavity 42, thereby opening the first flow channel 41a and the second flow channel 41b, thus closing or opening the flow channel 41.

[0080] The conductive cavity 42 is also provided with an annular second sealing boss 44. The second sealing boss 44 is located outside the first sealing boss 43, and the outer wall of the second sealing boss 44 is spaced apart from the inner wall of the conductive cavity 42. The switching diaphragm 50 is provided with an annular first sealing part 51. When the switching diaphragm 50 abuts against the first sealing boss 43, the first sealing part 51 is inserted between the outer wall of the second sealing boss 44 and the inner wall of the conductive cavity 42, and the outer wall of the first sealing part 51 abuts against the inner wall of the conductive cavity 42 to seal the conductive cavity 42.

[0081] It should be noted that the second sealing boss 44 has an annular first sealing protrusion 441 on the side facing the switch diaphragm 50. When the switch diaphragm 50 abuts against the first sealing boss 43, the switch diaphragm 50 undergoes elastic deformation and the first sealing protrusion 441 abuts against the switch diaphragm 50 to seal the abutment portion between the switch diaphragm 50 and the second sealing boss 44.

[0082] Meanwhile, the outer wall of the second sealing boss 44 is spaced apart from the inner wall of the conduction cavity 42. During the process of the switching diaphragm 50 abutting against the first sealing boss 43, the gap between the outer wall of the second sealing boss 44 and the inner wall of the conduction cavity 42 is used to position and guide the first sealing part 51.

[0083] In one embodiment of this application, an annular second sealing protrusion 52 is provided on the outer wall of the first sealing part 51. The second sealing protrusion 52 is used to abut against the inner wall of the conduction cavity 42 to seal the first sealing part 51 and the inner wall of the conduction cavity 42.

[0084] The valve body 40 is also provided with a return cavity 45 and a mounting cavity 46 that communicate with the flow channel 41. The return cavity 45 is located between the second flow channels 41b, and the mounting cavity 46 communicates with the second flow channel 41b through the return cavity 45. The mounting cavity 46 is provided with an annular third sealing boss 47. The outer wall of the third sealing boss 47 is spaced apart from the inner wall of the mounting cavity 46. The back suction diaphragm 60 is connected to the transmission mechanism 30 and installed in the mounting cavity 46. When the on / off diaphragm 50 closes the flow channel 41, the piezoelectric ceramic motor 21 in the drive mechanism 20 drives the back suction diaphragm 60 to separate from the communication part between the mounting cavity 46 and the return cavity 45 through the transmission mechanism 30, so that a negative pressure is generated in the return cavity 45, thereby causing the return cavity 45 to back suction the medium in the second flow channel 41b.

[0085] The suction diaphragm 60 is provided with an annular second sealing part 61. When the suction diaphragm 60 abuts against the mounting cavity 46 and the third sealing boss 47, the second sealing part 61 is inserted between the outer wall of the third sealing boss 47 and the inner wall of the return cavity 45, and the outer wall of the second sealing part 61 abuts against the inner wall of the return cavity 45 to seal the return cavity 45. At the same time, the outer wall of the third sealing boss 47 is spaced apart from the inner wall of the mounting cavity 46. During the abutment of the suction diaphragm 60 and the third sealing boss 47, the gap between the third sealing boss 47 and the inner wall of the mounting cavity 46 is used to position and guide the second sealing part 61.

[0086] It should be noted that the bottom wall of the mounting cavity 46 has an annular third sealing protrusion 461 on the side facing the back suction diaphragm 60. When the back suction diaphragm 60 abuts against the connecting part of the mounting cavity 46 and the return cavity 45, the back suction diaphragm 60 undergoes elastic deformation, and the third sealing protrusion 471 abuts against the back suction diaphragm 60 to seal the abutment part between the back suction diaphragm 60 and the bottom wall of the mounting cavity 46.

[0087] In one embodiment of this application, an annular fourth sealing protrusion 62 is provided on the outer wall of the second sealing part 61. When the second sealing part 61 is located in the gap between the third sealing boss 47 and the mounting cavity 46, the fourth sealing protrusion 62 abuts against the inner wall of the mounting cavity 46 to seal the second sealing part 61 and the inner wall of the mounting cavity 46.

[0088] In one embodiment of this application, the transmission mechanism 30 includes a guide 31, a first guide sleeve assembly 32, and a second guide sleeve assembly 33.

[0089] The guide member 31 has a plate-like or block-like structure and is connected to the side of the fixing plate 11 in the fixing mechanism 10 away from the valve cover 13. The fixing plate 11 has a first mounting hole 111 and a second mounting hole 112 on the side facing the first guide assembly and the second guide assembly. Both the first mounting hole 111 and the second mounting hole 112 are blind holes.

[0090] The guide member 31 is provided with a first guide hole 311 and a second guide hole 312, which are parallel and spaced apart, and both penetrate the guide member 31 along its thickness direction. The guide member 31 is also provided with a first mounting protrusion 313 and a second mounting protrusion 314. The first mounting protrusion 313 is coaxially arranged with the first guide hole 311 and is installed within the first mounting hole 111. The second mounting protrusion 314 is coaxially arranged with the second guide hole 312 and is installed within the second mounting hole 112.

[0091] A third sealing ring 34 is provided between the first mounting protrusion 313 and the first mounting hole 111, and a fourth sealing ring 35 is provided between the second mounting protrusion 314 and the second mounting ring.

[0092] The first guide sleeve assembly 32 is slidably connected within the first guide hole 311, and the through / off diaphragm 50 is connected to the end of the first guide sleeve assembly 32 away from the fixed plate 11. The second guide sleeve assembly 33 is slidably connected within the second guide hole 312, and the back suction diaphragm 60 is connected to the end of the second guide sleeve assembly 33 away from the fixed plate 11.

[0093] Specifically, in this application, the first guide sleeve assembly 32 includes a first guide sleeve 321, a transmission block 322, and an elastic element 323.

[0094] The piezoelectric ceramic motor 21 includes a first piezoelectric ceramic motor 21a, which is connected to the side of the fixing plate 11 in the fixing mechanism 10 away from the first guide assembly and located inside the valve cover 13. The shaft of the first piezoelectric ceramic motor 21a passes through the fixing plate 11 and extends into the first mounting hole 111. A first drive screw 22 is connected to the shaft of the first piezoelectric ceramic motor 21a, and a first guide sleeve 321 is threadedly connected to the first drive screw 22.

[0095] The transmission block 322 is slidably connected within the first guide hole 311 and connected to the first guide sleeve 321. The transmission block 322 can slide relative to the first guide sleeve 321. The through-diaphragm 50 is threadedly connected to the end of the transmission block 322 away from the first guide sleeve 321. One end of the elastic member 323 abuts against the transmission block 322, and the other end abuts against the first guide sleeve 321.

[0096] When the first piezoelectric ceramic motor 21a rotates, it drives the first guide sleeve 321 to slide within the first guide hole 311 via the first drive screw 22. As the first guide sleeve 321 slides within the first guide hole 311, the drive block slides within the first guide hole 311, and the transmission block 322 drives the switching diaphragm 50 to slide within the conducting cavity 42, thereby enabling the switching diaphragm 50 to abut against and separate from the first sealing boss 43.

[0097] Compared to the direct connection between the transmission block 322 and the first guide sleeve 321, by providing an elastic element 323 between the first guide sleeve 321 and the transmission block 322, the elastic element 323 is compressed to generate elastic force as the transmission block 322 drives the switching diaphragm 50 to move towards the first sealing boss 43. This elastic force acts on the first guide sleeve 321 and the transmission block 322 for buffering, preventing damage to the switching diaphragm 50 during its contact with the first sealing boss 43. Simultaneously, when the switching diaphragm 50 contacts the first sealing boss 43, the elastic force of the elastic element 323 ensures that the switching diaphragm 50 remains in contact with the first sealing boss 43, thus guaranteeing the sealing effect of the switching diaphragm 50.

[0098] In this application, the elastic element 323 is preferably a spring.

[0099] In another embodiment of this application, the elastic element 323 is an elastic block made of an elastic material, such as a rubber block.

[0100] To prevent the first guide sleeve 321 from rotating within the first guide hole 311 when the first drive screw 22 drives the first guide sleeve 321 to slide within the first guide hole 311, in this application, a first positioning pin 324 is protruding on the outer wall of the first guide sleeve 321, and a first guide groove 3111 is provided on the inner wall of the first guide hole 311. The extension direction of the first guide groove 3111 is consistent with the extension direction of the first guide hole 311, and the first positioning pin 324 is slidably connected within the first guide groove 3111. When the first guide sleeve 321 slides within the first guide hole 311, the first positioning pin 324 abuts against at least one side wall of the first guide groove 3111 to prevent the first guide sleeve 321 from rotating within the first guide hole 311, thereby ensuring that the first guide sleeve 321 cannot rotate within the first guide hole 311.

[0101] In the application, the outer wall of the first guide sleeve 321 is provided with a first mounting hole 111, one end of the first positioning pin 324 is inserted into the first mounting hole 111, and the other end of the first positioning pin 324 is inserted into the first guide groove 3111.

[0102] In another embodiment of this application, the end of the first positioning pin 324 near the first guide sleeve 321 is fixedly connected to the outer wall of the first guide sleeve 321, such as by welding to fix the first positioning pin 324 to the outer wall of the first guide sleeve 321.

[0103] In one embodiment of this application, the transmission block 322 is provided with a first retaining ring 3221. The first guide sleeve 321 is provided with a groove 3212 and a second retaining ring 3211, and along the sliding direction of the transmission block 322, the length of the groove 3212 is greater than the length of the first retaining ring 3221. The second retaining ring 3211 engages with the first retaining ring 3221.

[0104] Specifically, in this embodiment, a groove 3212 is provided on the end of the first guide sleeve 321 away from the fixed plate 11. The opening of the groove 3212 is located at the end of the first guide sleeve 321 away from the fixed plate 11, and a second retaining ring 3211 is provided at the opening of the groove 3212. A first retaining ring 3221 is provided on the transmission block 322, and the first retaining ring 3221 is slidably connected to the groove 3212. During the process of the switching diaphragm 50 separating from the first sealing boss 43, the side of the first retaining ring 3221 facing the opening of the groove 3212 can abut against the side of the second retaining ring 3211 away from the opening of the groove 3212, so that the second retaining ring 3211 drives the driving member through the first retaining ring 3221 to drive the switching diaphragm 50 to separate from the first sealing boss 43.

[0105] When the switching diaphragm 50 abuts against the first sealing boss 43, the length of the sliding groove 3212 is greater than the length of the first retaining ring 3221, so that when the first guide sleeve 321 slides in the first guide hole 311, the first guide sleeve 321 and the driving block can slide relative to each other, thereby compressing the elastic member 323.

[0106] In one embodiment of this application, a first limiting ring 3112 is provided at the end of the first guide hole 311 away from the first drive mechanism 20, and a second limiting ring 3222 is provided on the transmission block 322. The second limiting ring 3222 is used to abut against the first limiting ring 3112 to limit the position of the transmission block 322.

[0107] Specifically, in this embodiment, the first limiting ring 3112 is disposed at one end of the first guide hole 311 away from the fixed plate 11, and the second limiting ring 3222 is spaced apart along the axial direction of the driving block. The distance between the second limiting ring 3222 and the first retaining ring 3221 along the axial direction of the driving block is greater than the size of the second retaining ring 3211 along the axial direction of the driving block. The second retaining ring 3211 is located between the first retaining ring 3221 and the second limiting ring 3222. Since the distance between the second limiting ring 3222 and the first retaining ring 3221 is greater than the size of the second retaining ring 3211 along the axial direction of the driving block, the second retaining ring 3211 can slide relative to the driving block between the second limiting ring 3222 and the first retaining ring 3221, thereby enabling the first guide sleeve 321 to slide relative to the driving block.

[0108] In one embodiment of this application, a first limiting block 3213 is provided at one end of the first guide sleeve 321 near the first piezoelectric ceramic motor 21a, and a second limiting block 1111 is provided on the fixing mechanism 10. The second limiting block 1111 is used to abut against the first limiting block 3213 to limit the number of rotations or rotation angle of the first guide sleeve 321.

[0109] Specifically, in this embodiment, the second limiting block 1111 is disposed in the first mounting hole 111. When the first piezoelectric ceramic motor 21a drives the first guide sleeve 321 to rotate through the first drive screw 22 and slides in the first guide hole 311 while the first guide sleeve 321 is away from the first sealing boss 43, the second limiting block 1111 is used to abut against the first limiting block 3213 to restrict the rotation of the first guide sleeve 321, thereby limiting the maximum distance that the first guide sleeve 321 slides in the first guide hole 311, so as to realize the maximum opening degree of the regulating flow channel 41.

[0110] In one embodiment of the application, the controller is provided with a first linear drive sensor, which is used to detect the number of rotations or rotation angle of the first piezoelectric ceramic motor 21a, thereby facilitating the conversion of the number of rotations or rotation angle of the first piezoelectric ceramic motor 21a into the opening amount of the flow channel 41.

[0111] When it is necessary to open the flow channel 41 to a preset opening amount, the controller controls the first piezoelectric ceramic motor 21a to rotate to the number of rotations corresponding to the preset opening amount. When the first piezoelectric ceramic motor 21a rotates to the number of rotations or rotation angle corresponding to the preset opening amount, the first linear drive sensor converts the detected number of rotations or rotation angle of the first piezoelectric ceramic motor 21a into a detection signal and transmits the detection signal to the controller. After the controller determines that the first piezoelectric ceramic motor 21a has rotated to the number of rotations or rotation angle corresponding to the preset opening amount based on the detection signal, the controller issues a stop rotation signal and sends the stop rotation signal to the first piezoelectric ceramic motor 21a. The first piezoelectric ceramic motor 21a stops rotating according to the rotation signal.

[0112] In one embodiment of the application, the second guide sleeve assembly 33 includes a second guide sleeve 331. The second guide sleeve 331 is slidably connected to the second guide hole 312, and the suction diaphragm 60 is threadedly connected to the second guide sleeve 331.

[0113] Specifically, in this embodiment, the piezoelectric ceramic motor 21 further includes a second piezoelectric ceramic motor 21b. The second piezoelectric ceramic motor 21b is connected to the side of the fixing plate 11 in the fixing mechanism 10 away from the second guide assembly and located inside the valve cover 13. The shaft of the second piezoelectric ceramic motor 21b passes through the fixing plate 11 and extends into the second mounting hole 112. A second drive screw 23 is connected to the shaft of the second piezoelectric ceramic motor 21b, and the second guide sleeve 331 is threadedly connected to the second drive screw 23. The suction diaphragm 60 is threadedly connected to the end of the second guide sleeve 331 away from the second piezoelectric ceramic motor 21b.

[0114] When the second piezoelectric ceramic motor 21b rotates, it drives the second guide sleeve 331 to slide within the second guide hole 312 via the second drive screw 23. As the second guide sleeve 331 slides within the second guide hole 312, it drives the backflow diaphragm 60 to slide within the reflux cavity 45, thereby separating the backflow diaphragm 60 from and abutting against the mounting cavity 46. Specifically, when the backflow diaphragm 60 abuts against the connecting portion of the reflux cavity 45 and the mounting cavity 46, it isolates the reflux cavity 45 and the mounting cavity 46, thereby reducing the volume of the backflow space used for backflow medium. When the backflow diaphragm 60 separates from the connecting portion of the reflux cavity 45 and the mounting cavity 46, it connects the reflux cavity 45 and the mounting cavity 46, thereby increasing the volume of the backflow space used for backflow medium, thus achieving backflow of the medium.

[0115] To prevent the second guide sleeve 331 from rotating within the second guide hole 312 when the second drive screw 23 drives the second guide sleeve 331 to slide within the second guide hole 312, in this application, a second positioning pin 332 is protruding from the outer wall of the second guide sleeve 331, and a second guide groove 3121 is provided on the inner wall of the second guide hole 312. The extension direction of the second guide groove 3121 is consistent with the extension direction of the second guide hole 312, and the second positioning pin 332 is slidably connected within the second guide groove 3121. When the second guide sleeve 331 slides within the second guide hole 312, the second positioning pin 332 abuts against at least one side wall of the second guide groove 3121 to prevent the second guide sleeve 331 from rotating within the second guide hole 312, thereby ensuring that the second guide sleeve 331 cannot rotate within the second guide hole 312.

[0116] In the application, the outer wall of the second guide sleeve 331 is provided with a second mounting hole 112, one end of the second positioning pin 332 is inserted into the second mounting hole 112, and the other two ends of the second positioning pin 332 are inserted into the second guide groove 3121.

[0117] In another embodiment of this application, the end of the second positioning pin 332 near the second guide sleeve 331 is fixedly connected to the outer wall of the second guide sleeve 331, such as by welding to fix the second positioning pin 332 to the outer wall of the second guide sleeve 331.

[0118] In one embodiment of this application, a third limiting ring 3122 is provided at the end of the second guide hole 312 away from the fixed plate 11, and a fourth limiting ring 3311 is provided on the second guide sleeve 331. The third limiting ring 3122 is used to abut against the fourth limiting ring 3311 to limit the position of the second guide sleeve 331.

[0119] In one embodiment of this application, a third limiting block 3312 is provided at one end of the second guide sleeve 331 near the second piezoelectric ceramic motor 21b, and a fourth limiting block 1121 is provided on the fixing mechanism 10. The fourth limiting block 1121 is used to abut against the third limiting block 3312 to limit the number of rotations or rotation angle of the second guide sleeve 331.

[0120] Specifically, in this embodiment, the fourth limiting block 1121 is disposed in the second mounting hole 112. When the second piezoelectric ceramic motor 21b drives the second guide sleeve 331 to rotate through the second drive screw 23 and slides in the second guide hole 312, and the second guide sleeve 331 moves away from the mounting cavity 46, the fourth limiting block 1121 is used to abut against the third limiting block 3312 to restrict the rotation of the second guide sleeve 331, thereby limiting the maximum distance that the second guide sleeve 331 slides in the second guide hole 312, so as to realize the maximum opening degree of the adjustment return cavity 45.

[0121] In one embodiment of the application, the controller is provided with a second linear drive sensor, which is used to detect the number of rotations or rotation angle of the second piezoelectric ceramic motor 21b, thereby facilitating the conversion of the number of rotations or rotation angle of the second piezoelectric ceramic motor 21b into the opening amount of the return cavity 45.

[0122] When it is necessary to open the reflux chamber 45 to a preset opening amount, the controller controls the second piezoelectric ceramic motor 21b to rotate to the number of rotations corresponding to the preset opening amount. When the second piezoelectric ceramic motor 21b rotates to the number of rotations or rotation angle corresponding to the preset opening amount, the second linear drive sensor converts the detected number of rotations or rotation angle of the second piezoelectric ceramic motor 21b into a detection signal and transmits the detection signal to the controller. After the controller determines that the second piezoelectric ceramic motor 21b has rotated to the number of rotations or rotation angle corresponding to the preset opening amount based on the detection signal, the controller issues a stop rotation signal and sends the stop rotation signal to the second piezoelectric ceramic motor 21b. The second piezoelectric ceramic motor 21b stops rotating according to the rotation signal.

[0123] In one embodiment of this application, a magnetic shielding sleeve 24 is provided between the first piezoelectric ceramic motor 21a and the second piezoelectric ceramic motor 21b. The magnetic shielding sleeve 24 is fixedly connected to the fixing plate 11 by bolts. By providing the magnetic shielding sleeve 24 between the first piezoelectric ceramic motor 21a and the second piezoelectric ceramic motor 21b, electromagnetic signal interference between the first piezoelectric ceramic motor 21a and the second piezoelectric ceramic motor 21b is prevented.

[0124] A second aspect of this application is to provide a wafer coating apparatus, which includes an electrically powered colloid blocking device, wherein the electrically powered colloid blocking device is the electrically powered colloid blocking device provided in any of the above embodiments.

[0125] The beneficial effects of the wafer coating equipment provided in this application are as follows: Compared with the prior art, the wafer coating equipment provided in this application includes the electric colloid blocking device provided in any of the above-mentioned methods. The drive mechanism 20 in the electric colloid blocking device adopts a piezoelectric ceramic motor 21. Compared with the electromagnetic linear drive motor, the piezoelectric ceramic motor 21 generates less heat during operation, and there is no need to set up an additional heat dissipation air path for the drive mechanism 20. This not only reduces the structural complexity of the electric colloid blocking device, but also reduces the impact of the heat generated by the drive mechanism 20 during operation on the coating liquid and has a greater energy-saving effect. At the same time, since the holding force of the piezoelectric ceramic motor 21 does not decay when it is stationary, the stability of the fit between the on / off diaphragm 50 and the flow channel 41 is ensured.

[0126] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An electro-colloidal blocking device, characterized in that, The utility model relates to a valve drive mechanism, comprising: a fixing mechanism; a driving mechanism comprising a piezoelectric ceramic motor connected to the fixing mechanism; a transmission mechanism connected to the fixing mechanism and connected to the piezoelectric ceramic motor; a valve body connected to the transmission mechanism, the valve body being provided with a flow channel for medium flow, and the valve body being further provided with a backflow cavity in communication with the flow channel; an on-off diaphragm connected to the transmission mechanism for closing or opening the flow channel; a back-suction diaphragm connected to the transmission mechanism and installed in the backflow cavity for back-sucking the medium in the flow channel when the on-off diaphragm closes the flow channel.

2. The electrodynamic colloid blocking device of claim 1, wherein, The transmission mechanism comprises: a guide connected to the fixing mechanism and provided with a first guide hole and a second guide hole; a first guide sleeve assembly slidingly connected in the first guide hole, the on-off diaphragm being connected to the first guide sleeve assembly; a second guide sleeve assembly slidingly connected in the second guide hole, the back-suction diaphragm being connected to the second guide sleeve assembly.

3. The electrodynamic colloid blocking device of claim 2, wherein, The first guide sleeve assembly comprises: a first guide sleeve slidingly connected in the first guide hole; a transmission block slidingly connected in the first guide hole and connected to the first guide sleeve, the transmission block sliding relative to the first guide sleeve, the on-off diaphragm being connected to an end of the transmission block away from the first guide sleeve; a resilient member abutting one end of the transmission block and the other end of the first guide sleeve.

4. The electrodynamic colloid blocking device of claim 3, wherein, A first positioning pin is protruded from the outer wall of the first guide sleeve, and a first guide groove is provided on the inner wall of the first guide hole, the first positioning pin slidingly connected in the first guide groove.

5. The electrodynamic colloid blocking device of claim 4, wherein, A first clamping ring is provided on the transmission block; A sliding groove and a second clamping ring are provided on the first guide sleeve, and the length of the sliding groove is greater than the length of the first clamping ring along the sliding direction of the transmission block; The second clamping ring is clamped with the first clamping ring.

6. The electrodynamic colloid blocking device of claim 5, wherein, A first limiting ring is provided on an end of the first guide hole away from the piezoelectric ceramic motor, and a second limiting ring is provided on the transmission block, the second limiting ring being used to abut the first limiting ring to limit the position of the transmission block.

7. The electrodynamic colloid blocking device of claim 6, wherein, The piezoelectric ceramic motor comprises: a first piezoelectric ceramic motor connected to the fixing mechanism; a first drive screw is provided on the first piezoelectric ceramic motor, and the first guide sleeve is threadedly connected with the first drive screw.

8. The electrodynamic colloid blocking device of claim 7, wherein, A first limiting block is provided on an end of the first guide sleeve close to the first drive motor, and a second limiting block is provided on the fixing mechanism, the second limiting block being used to abut the first limiting block to limit the rotation angle of the first guide sleeve.

9. The electrodynamic colloid blocking device of claim 8, wherein, The second guide sleeve assembly comprises: a second guide sleeve slidingly connected in the second guide hole, the on-off diaphragm being connected to the second guide sleeve.

10. The electrodynamic colloid blocking device of claim 9, wherein, The piezoelectric ceramic motor further comprises: a second piezoelectric ceramic motor connected to the fixing mechanism; a second drive screw is provided on the second piezoelectric ceramic motor, and the second guide sleeve is threadedly connected with the second drive screw.

11. The electrodynamic colloid blocking device of claim 10, wherein, A magnetic isolation sleeve is provided between the first piezoelectric ceramic motor and the second piezoelectric ceramic motor.

12. A wafer coating apparatus, characterized by comprising: ​ An electro-colloidal blocking device as claimed in any one of claims 1 to 11.

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