Hydrophobic coating and preparation method thereof, electronic component and electronic equipment

Abstract

The invention relates to the technical field of hydrophobic coatings, in particular to a hydrophobic coating and a preparation method thereof, an electronic component and electronic equipment. The hydrophobic coating comprises a titanium oxide sub-layer and an organic sub-layer which are stacked in the thickness direction of the hydrophobic coating. Wherein the titanium oxide sub-layer at least comprises an element O and an element Ti, and the molar fraction of the element Ti in the titanium oxide sub-layer is 75%-90%. The organic sub-layer at least comprises a carbon chain. By controlling the molar fraction of the Ti element in the titanium oxide sub-layer, the surface energy of the titanium oxide sub-layer is reduced, and the hydrophobic effect of the hydrophobic coating is improved. In addition, a Ti-O-C chemical bond formed between the titanium oxide sub-layer and the organic sub-layer enables the titanium oxide sub-layer and the organic sub-layer to be stably combined together, so that the hydrophobic coating can keep a relatively strong hydrophobic effect for a long time.

Description

Technical Field

[0001] This application relates to the field of hydrophobic coating technology, and in particular to a hydrophobic coating and its preparation method, electronic components, and electronic devices. Background Technology

[0002] Hydrophobic coatings achieve their waterproof effect by reducing the surface energy of the surface, making it easier for water droplets to roll off. However, the long-term hydrophobic performance of current hydrophobic coatings still needs further improvement. Summary of the Invention

[0003] This application discloses a hydrophobic coating and its preparation method, as well as electronic components and electronic devices, which can maintain a strong hydrophobic effect for a long time.

[0004] To achieve the above objectives, in a first aspect, embodiments of this application disclose a hydrophobic coating, comprising a titanium oxide sublayer and an organic sublayer stacked along the thickness direction of the hydrophobic coating; The titanium oxide sublayer contains at least O and Ti elements, and the molar fraction of Ti in the titanium oxide sublayer is 75% to 90%. The organic sublayer contains at least a carbon chain.

[0005] In one possible implementation of the first aspect, the length of the carbon chain is 8 to 10.

[0006] In a possible implementation of the first aspect, the titanium oxide sublayer is composed of the O element and the Ti element; and / or, The titanium oxide sublayer is an amorphous thin film.

[0007] In a possible implementation of the first aspect, both the titanium oxide sublayer and the organic sublayer are monolayers; and / or, The number of both the titanium oxide sublayer and the organic sublayer is multiple; along the thickness direction of the hydrophobic coating, the titanium oxide sublayer and the organic sublayer are alternately arranged; and / or, The total thickness of the hydrophobic coating is 5 μm to 25 μm; and / or, The surface of the hydrophobic coating has a micro-nano rough structure.

[0008] Secondly, embodiments of this application disclose a method for preparing a hydrophobic coating, comprising the following steps: Preparation of titanium oxide sublayer and organic sublayer: A titanium source and an organic oxide source are introduced to deposit the titanium oxide sublayer and the organic sublayer stacked together; wherein the titanium oxide sublayer contains at least O and Ti elements, and the molar fraction of the Ti element in the titanium oxide sublayer is 75%~90%, and the organic sublayer contains at least carbon chains.

[0009] In a possible implementation of the second aspect, the step of preparing the titanium oxide sublayer and the organic sublayer includes the following sub-steps: The titanium source is introduced; wherein the pulse duration of the titanium source is 1 s to 5 s, and the flow rate is 200 sccm to 1000 sccm; A first inert gas is introduced; wherein the introduction time of the first inert gas is 30 s to 50 s, and the flow rate is 200 sccm to 500 sccm; The organic oxidation source is introduced; wherein the pulse duration of the organic oxidation source is 0.01 s to 1 s, and the flow rate is 100 sccm to 300 sccm; the organic oxidation source contains at least the carbon chain; A second inert gas is introduced; wherein the introduction time of the second inert gas is 60 s to 120 s, and the flow rate is set to 500 sccm to 1000 sccm.

[0010] In a possible implementation of the second aspect, the deposition method in the steps of preparing the titanium oxide sublayer and the organic sublayer is atomic layer deposition; and / or, In the steps of preparing the titanium oxide sublayer and the organic sublayer, the deposition temperature is 60℃~150℃, and the reaction chamber pressure is 0.5 torr~3.0 torr; and / or, The steps for preparing the titanium oxide sublayer and the organic sublayer are repeated multiple times; and / or, The titanium source includes at least one of tetra(dimethylamino)titanium or tetraisopropoxide titanium; and / or, The organic oxidizing source includes at least one of ethylene glycol, glycidyl ether compounds, or ethylenediamine; and / or, The first inert gas and the second inert gas include at least one of nitrogen, argon or helium.

[0011] Thirdly, embodiments of this application disclose an electronic component, including: The subject; and A hydrophobic coating is disposed on the surface of the body; Wherein, the hydrophobic coating is the hydrophobic coating described in the first aspect; or, the hydrophobic coating is prepared by the preparation method described in the second aspect.

[0012] In a possible implementation of the third aspect, the first layer of the hydrophobic coating closest to the body is the titanium oxide sublayer, along the thickness direction of the hydrophobic coating.

[0013] Fourthly, embodiments of this application disclose an electronic device having the electronic components described in the third aspect.

[0014] Compared with the prior art, the beneficial effects of this application are: This application improves the hydrophobic effect of the hydrophobic coating by controlling the molar fraction of Ti in the titanium oxide sublayer, thereby reducing the surface energy of the titanium oxide sublayer. Furthermore, the Ti-OC chemical bonds formed between the titanium oxide sublayer and the organic sublayer ensure a stable bond between them, enabling the hydrophobic coating to maintain a strong hydrophobic effect for a long period.

[0015] Specifically, in this application, the molar fraction of Ti in the titanium oxide sublayer is controlled between 75% and 90%. A higher molar fraction of Ti ensures more complete consumption of hydroxyl groups during titanium oxide sublayer deposition, effectively reducing the content of strongly polar groups (hydroxyl groups) and thus lowering the surface energy of the titanium oxide sublayer. Furthermore, the titanium oxide sublayer with the aforementioned Ti molar fraction contains low-valence Ti and oxygen vacancies. Both low-valence Ti and oxygen vacancies can independently reduce the surface energy of the titanium oxide sublayer, and their synergistic effect is even stronger, significantly improving the hydrophobic effect of the hydrophobic coating. Moreover, the titanium oxide sublayer with the aforementioned Ti molar fraction also exhibits good thermal conductivity, allowing the hydrophobic coating to also assist in heat dissipation.

[0016] Building upon this, this application layers an organic sublayer on top of a titanium oxide sublayer. The carbon elements in the organic sublayer's carbon chains form Ti-OC chemical bonds (titanium-oxygen-carbon bonds) with the Ti and O elements in the titanium oxide sublayer. These Ti-OC chemical bonds possess extremely high stability, firmly fixing the carbon chains to the titanium oxide sublayer and preventing the organic sublayer from detaching during use due to friction, erosion, or environmental aging. Since carbon chains are nonpolar groups, when they stably cover the surface of the titanium oxide sublayer, the hydrophobic coating can maintain low surface energy characteristics for a long period. In this way, the hydrophobic coating can maintain a strong hydrophobic effect for an extended period. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a hydrophobic coating disclosed in an embodiment of this application; Figure 2 This is a schematic diagram of the structure of an electronic component disclosed in an embodiment of this application; Figure 3 for Figure 2 A magnified view of a portion of region A shown in the diagram.

[0019] Explanation of reference numerals in the attached figures: 1. Electronic components; 10. Hydrophobic coating; 11. Titanium oxide sublayer; 13. Organic sublayer; Z0-Z1, thickness direction of the hydrophobic coating; 20. Ontology. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] In this application, the term "setup" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection via an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0022] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0023] Hydrophobic coatings achieve a waterproof effect by reducing the surface energy of the surface, making it easier for water droplets to roll off.

[0024] Single-material hydrophobic coatings rarely possess the combined properties of composite materials. Therefore, some hydrophobic coatings employ a dual-system approach, combining titanium dioxide and modified resin. Titanium dioxide is incorporated into the modified resin to create the hydrophobic coating. While incorporating titanium dioxide can create micro-nano rough structures on the surface of the hydrophobic coating, thus improving its hydrophobic effect, issues arise such as uneven titanium dioxide distribution or poor adhesion between the modified resin and the substrate material. This leads to the hydrophobic coating easily detaching and failing to maintain a strong hydrophobic effect over a long period.

[0025] Based on the above analysis, this application provides a hydrophobic coating that reduces the surface energy of the titanium oxide sublayer by controlling the molar fraction of Ti in the titanium oxide sublayer, thereby improving the hydrophobic effect of the coating. Furthermore, the Ti-OC chemical bonds formed between the titanium oxide sublayer and the organic sublayer ensure stable bonding between them, enabling the hydrophobic coating to maintain a strong hydrophobic effect for a long period.

[0026] The technical solution of the present invention will now be described in conjunction with the embodiments and accompanying drawings.

[0027] Reference Figure 1 This application discloses a hydrophobic coating 10, which includes a titanium oxide sublayer 11 and an organic sublayer 12 stacked along the thickness direction Z0-Z1 of the hydrophobic coating.

[0028] The titanium oxide sublayer 11 contains at least O (oxygen) and Ti (titanium) elements, and the molar fraction of Ti in the titanium oxide sublayer 11 is 75% to 90%, for example, 75%, 77%, 80%, 82%, 85%, 87% or 90%. The organic sublayer 12 contains at least carbon chains.

[0029] In this application, the mole fraction of Ti has a meaning known in the art and can be measured using methods known in the art, such as inductively coupled plasma optical emission spectrometry (ICP-OES) / mass spectrometry (ICP-MS).

[0030] This application improves the hydrophobic effect of the hydrophobic coating 10 by controlling the molar fraction of Ti in the titanium oxide sublayer 11, thereby reducing the surface energy of the titanium oxide sublayer 11. Furthermore, the Ti-OC chemical bond formed between the titanium oxide sublayer 11 and the organic sublayer 12 allows them to be stably bonded together, thus enabling the hydrophobic coating 10 to maintain a strong hydrophobic effect for a long time.

[0031] Specifically, in this application, the molar fraction of Ti in the titanium oxide sublayer 11 is controlled between 75% and 90%. A higher molar fraction of Ti ensures more complete consumption of hydroxyl groups during deposition, effectively reducing the content of strongly polar groups (hydroxyl groups) and thus lowering the surface energy of the titanium oxide sublayer 11. Furthermore, the titanium oxide sublayer 11 with the aforementioned Ti molar fraction contains low-valence Ti and oxygen vacancies. Both low-valence Ti and oxygen vacancies can independently reduce the surface energy of the titanium oxide sublayer 11, and their synergistic effect is even stronger, significantly improving the hydrophobic effect of the hydrophobic coating 10. Moreover, the titanium oxide sublayer 11 with the aforementioned Ti molar fraction also exhibits good thermal conductivity, allowing the hydrophobic coating 10 to also serve as a heat dissipation aid.

[0032] Based on this, this application stacks an organic sublayer 12 on the titanium oxide sublayer 11. The carbon element in the carbon chain of the organic sublayer 12 forms a Ti-OC chemical bond (titanium-oxygen-carbon bond) with the Ti and O elements in the titanium oxide sublayer 11. The Ti-OC chemical bond has extremely high stability, which can firmly fix the carbon chain to the titanium oxide sublayer 11 and prevent the organic sublayer 12 from falling off during use due to friction, erosion, or environmental aging. The carbon chain is a nonpolar group. When the carbon chain stably covers the surface of the titanium oxide sublayer 11, the hydrophobic coating 10 can maintain low surface energy characteristics for a long time. In this way, the hydrophobic coating 10 can maintain a strong hydrophobic effect for a long time.

[0033] In this application, after the titanium source is deposited on the substrate surface, hydroxyl groups and oxygen vacancies are formed. The organic oxidant source containing carbon chains reacts with the hydroxyl groups and oxygen vacancies to form Ti-OC chemical bonds (titanium-oxygen-carbon bonds). Generally, the longer the carbon chain, the greater its steric hindrance, and the more difficult it is to form Ti-OC chemical bonds. However, in this application, since the molar fraction of Ti in the titanium oxide sublayer 11 is controlled at 75%~90%, there are enough oxygen vacancies in the titanium oxide sublayer 11, thus relaxing the restriction on the carbon chain length. This allows this application to utilize longer carbon chains to further improve hydrophobicity.

[0034] Optionally, the carbon chain length is 8-10. The carbon chain length refers to the number of carbon atoms in the carbon chain. When there are sufficient oxygen vacancies in the titanium oxide sublayer 11, the C8-C10 carbon chains can still easily combine with oxygen vacancies and be fixed on the titanium oxide sublayer. The C8-C10 carbon chains can also combine with hydroxyl groups on the precursor surface, thus more easily forming Ti-OC chemical bonds (titanium-oxygen-carbon bonds) with the Ti and O elements in the titanium oxide sublayer 11, thereby reducing the surface energy. Furthermore, the C8-C10 carbon chains have stronger nonpolarity, resulting in better hydrophobicity and further enhancing the hydrophobic effect of the hydrophobic coating 10.

[0035] Optionally, the titanium oxide sublayer 11 is composed of O and Ti elements to avoid the incorporation of other elements that would affect the formation of Ti-OC chemical bonds. This is beneficial to increasing the distribution density of Ti-OC chemical bonds, which in turn is beneficial to improving the bonding force between the organic sublayer 12 and the titanium oxide sublayer 11.

[0036] In some embodiments, both the titanium oxide sublayer 11 and the organic sublayer 12 are monolayers. Monolayers facilitate the construction of stable low surface energy surfaces through chemical bonding, while their molecular structure and spatial arrangement together hinder the adhesion and spread of water molecules, resulting in better hydrophobic effects for the hydrophobic coating 10.

[0037] Furthermore, the thickness of the monolayer is relatively stable, which is beneficial for controlling the total thickness of the hydrophobic coating 10. The resulting hydrophobic coating 10 has a thinner thickness, which has a smaller impact on the volume when applied to microelectronic components.

[0038] Optionally, both the titanium oxide sublayer 11 and the organic sublayer 12 are multiple layers. Along the thickness direction Z0-Z1 of the hydrophobic coating, the titanium oxide sublayer 11 and the organic sublayer 12 are alternately arranged. Adjacent titanium oxide sublayers 11 and organic sublayers 12 form an organic-inorganic hybrid coating layer.

[0039] When both the titanium oxide sublayer 11 and the organic sublayer 12 are relatively thin monolayers, multilayer overlapping is beneficial for obtaining a sufficiently thick hydrophobic coating 10.

[0040] Furthermore, each titanium oxide sublayer 11 is stacked with an organic sublayer 12. In this way, each titanium oxide sublayer 11 is covered with carbon chains to reduce surface energy, and each organic sublayer 12 can be combined with the titanium oxide sublayer 11 through Ti-OC chemical bonds, thereby further improving the overall stability of the hydrophobic coating 10.

[0041] Furthermore, titanium oxide sublayers 11 are stacked on both sides of some organic sublayers 12. The two ends of the carbon chain in the organic sublayer 12 form Ti-OC chemical bonds with the titanium oxide sublayers 11 on both sides, thereby better fixing the carbon chain, improving the bonding effect between the titanium oxide sublayer 11 and the organic sublayer 12, further enhancing the bonding force between the organic sublayer 12 and the titanium oxide sublayer 11, and reducing the risk of delamination.

[0042] For example, the number of titanium oxide sublayer 11 and organic sublayer 12 can range from several to dozens of layers, and the embodiments of this application do not limit this.

[0043] Optionally, the total thickness of the hydrophobic coating 10 is 5 μm to 25 μm, for example, 5 μm, 10 μm, 20 μm, or 25 μm. This thickness of the hydrophobic coating 10 is sufficient to provide good adhesion and wear resistance. However, the hydrophobic coating 10 is not excessively thick, so as not to affect its heat dissipation performance.

[0044] Furthermore, the surface of the hydrophobic coating 10 possesses a micro-nano rough structure. The term "micro-nano rough structure" refers to a non-planar morphology on the material surface that simultaneously exhibits both micrometer-scale (1 μm~1000 μm) and nanometer-scale (1 nm~1000 nm) features, such as protrusions, depressions, pores, or textures. This micro-nano rough structure, combined with the low surface energy characteristics of the organic sublayer 12, further enhances the hydrophobic effect of the hydrophobic coating 10.

[0045] This application also discloses a method for preparing a hydrophobic coating, comprising the following steps: Preparation of titanium oxide sublayer and organic sublayer: A titanium source and an organic oxide source are introduced to deposit a stacked titanium oxide sublayer and an organic sublayer; wherein the titanium oxide sublayer contains at least O and Ti elements, and the molar fraction of Ti element in the titanium oxide sublayer is 75%~90%, and the organic sublayer contains at least carbon chains.

[0046] In this preparation method, the molar fraction of Ti in the titanium oxide sublayer is controlled at 75%~90%. The higher molar fraction of Ti leads to more complete consumption of hydroxyl groups during the deposition of the titanium oxide sublayer, thereby effectively reducing the content of strongly polar groups (hydroxyl groups) and thus reducing the surface energy of the titanium oxide sublayer.

[0047] Furthermore, the titanium oxide sublayer with the aforementioned Ti molar fraction contains low-valence Ti and oxygen vacancies. Both low-valence Ti and oxygen vacancies can independently reduce the surface energy of the titanium oxide sublayer, and their synergistic effect is even stronger, thus significantly improving the hydrophobic effect of the hydrophobic coating. Moreover, the titanium oxide sublayer with the aforementioned Ti molar fraction also exhibits good thermal conductivity, allowing the hydrophobic coating to also serve as a heat dissipation aid.

[0048] Building upon this, this application layers an organic sublayer on top of a titanium oxide sublayer. The carbon elements in the organic sublayer's carbon chains form Ti-OC chemical bonds (titanium-oxygen-carbon bonds) with the Ti and O elements in the titanium oxide sublayer. These Ti-OC chemical bonds possess extremely high stability, firmly fixing the carbon chains to the titanium oxide sublayer and preventing the organic sublayer from detaching during use due to friction, erosion, or environmental aging. Since carbon chains are nonpolar groups, when they stably cover the surface of the titanium oxide sublayer, the hydrophobic coating can maintain low surface energy characteristics for a long period. In this way, the hydrophobic coating can maintain a strong hydrophobic effect for an extended period.

[0049] In some embodiments, the deposition method in the steps of preparing the titanium oxide sublayer and the organic sublayer is atomic layer deposition (ALD). Atomic layer deposition (ALD) can precisely control the thickness, composition and structure of the hydrophobic coating at the atomic scale, which is beneficial for adjusting the molar fraction of Ti in the titanium oxide sublayer to 75%~90%.

[0050] Exemplary steps for preparing the titanium oxide sublayer and the organic sublayer include the following sub-steps: A titanium source is introduced; wherein the pulse duration of the titanium source is 1 s to 5 s, for example, 1 s, 3 s or 5 s, and the flow rate is 200 sccm to 1000 sccm, for example, 200 sccm, 600 sccm or 1000 sccm, so as to saturate the titanium source on the substrate.

[0051] A first inert gas is introduced; wherein the duration of the introduction of the first inert gas is 30 s to 50 s, for example, 30 s, 40 s or 50 s, and the flow rate is 200 sccm to 500 sccm, for example, 200 sccm, 350 sccm or 500 sccm, in order to completely remove unreacted titanium source and byproducts and avoid titanium source residue.

[0052] An organic oxidation source is introduced, and the organic oxidation source contains at least a carbon chain. The pulse duration of the organic oxidation source is 0.01 s to 1 s, for example, 0.01 s, 0.1 s, 0.5 s, or 1 s, and the flow rate is 100 sccm to 300 sccm, for example, 200 sccm, 350 sccm, or 500 sccm. This application controls the molar fraction of Ti in the titanium dioxide sublayer to be 75% to 90% by adjusting the flow rate and pulse duration of the organic oxidation source.

[0053] A second inert gas is introduced; the introduction time of the second inert gas is 60 s to 120 s, and the flow rate is set to 500 sccm to 1000 sccm, so as to completely remove unreacted organic oxidation sources and by-products and avoid organic impurities.

[0054] In some embodiments, during the steps of preparing the titanium oxide sublayer and the organic sublayer, the deposition temperature is 60°C to 150°C, for example, 60°C, 90°C, 120°C or 150°C, and the reaction chamber pressure is 0.5 torr to 3.0 torr, for example, 0.5 torr, 1 torr, 2 torr or 3.0 torr.

[0055] In this preparation method, the deposition temperature is reduced to 60℃~150℃, which helps to avoid the oxidation of the substrate material caused by high temperatures and reduces the risk of thermal decomposition of organic oxidation sources. The aforementioned substrate refers to the base surface of the hydrophobic coating, such as the surface of electronic components.

[0056] Optionally, the steps of preparing the titanium oxide sublayer and the organic sublayer can be repeated multiple times.

[0057] Optionally, the titanium source includes at least one of tetra(dimethylamino)titanium or tetraisopropoxide titanium.

[0058] Tetra(dimethylamino)titanium and tetraisopropoxide titanium can reduce the introduction of hydroxyl groups during the deposition process, thereby helping to lower the surface energy of the hydrophobic coating and improve its hydrophobic effect. Furthermore, tetra(dimethylamino)titanium and tetraisopropoxide titanium do not generate corrosive hydrogen chloride gas during deposition, thus shortening the purging time of the first inert gas and reducing damage to the substrate.

[0059] Optionally, the organic oxidation source includes at least one of ethylene glycol, glycidyl ether compounds, or ethylenediamine. These organic oxidation sources have short carbon chain lengths, low steric hindrance, and readily bind to hydroxyl groups on the precursor surface. Furthermore, these organic oxidation sources exhibit high reactivity, allowing the reaction to proceed at relatively low deposition temperatures.

[0060] Optionally, the first inert gas and the second inert gas include at least one of nitrogen, argon or helium.

[0061] Reference Figure 2 This application discloses an electronic component 1, including a body 20 and a hydrophobic coating 10, wherein the hydrophobic coating 10 is disposed on the surface of the body 20.

[0062] Wherein, the hydrophobic coating 10 is the hydrophobic coating 10 in any of the above embodiments; or, the hydrophobic coating 10 is the hydrophobic coating 10 prepared by the preparation method in any of the above embodiments.

[0063] This application provides a hydrophobic coating 10 on the surface of the electronic component 1. This hydrophobic coating 10 isolates the surface from moisture and liquid corrosion, reducing the risk of failure caused by moisture and ensuring the stable performance of the electronic component 1 in humid and liquid environments. The hydrophobic coating 10 also assists in heat dissipation, further improving the reliability and lifespan of the electronic component 1.

[0064] For example, electronic component 1 is an inductor, capacitor, resistor, or filter. The body is, for example, a ferrite body or a ceramic body.

[0065] Considering the poor adhesion between organic materials and hydrophobic coatings, such as Figure 3 As shown in this embodiment, along the thickness direction Z of the hydrophobic coating, the first layer of the hydrophobic coating 10 closest to the body 20 is a titanium oxide sublayer 11. That is, the titanium oxide sublayer 11 is directly bonded to the surface of the body 20, thereby improving the bonding force between the hydrophobic coating 10 and the body 20.

[0066] This application also discloses an electronic device having the electronic components described in any of the above embodiments.

[0067] For example, the electronic device may be a consumer electronic device such as a mobile phone, computer or tablet computer, or a household electronic device such as an air conditioner or refrigerator, or even a car.

[0068] The present application is further illustrated below with reference to embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the present application.

[0069] Example 1 The method for preparing the hydrophobic coating in this embodiment includes the following steps: S1. Cleaning: Clean the surface of the inductor components, remove surface oil and dirt, and dry them for later use.

[0070] S2. Steps for preparing titanium oxide sublayer and organic sublayer: Place the cleaned inductor into the atomic layer deposition equipment, and sequentially introduce titanium source, first inert gas, organic oxide source and second inert gas to deposit titanium oxide sublayer and organic sublayer. The deposition temperature is 120℃; the pressure in the reaction chamber is less than 2 torr.

[0071] The titanium source is titanium tetraisopropoxide, the pulse duration of the titanium source is 5 s, and the flow rate is 500 sccm.

[0072] The first inert gas is nitrogen, and the introduction time of the first inert gas is 30 s, with a flow rate of 300 sccm.

[0073] The organic oxidation source was n-decyl glycidyl ether (C10 alkyl glycidyl ether) with a carbon chain length of 10. The pulse duration of the organic oxidation source was 0.3 s, and the flow rate was 200 sccm. The reaction produced a titanium dioxide sublayer and an organic sublayer, with the titanium dioxide sublayer having a Ti molar fraction of 82%.

[0074] The second inert gas is nitrogen, and the introduction time of the second inert gas is 60 s, with a flow rate of 500 sccm.

[0075] Step S2 is repeated 50 times.

[0076] Example 2 The only difference between this embodiment and Embodiment 1 is that step S2 is repeated 80 times.

[0077] Example 3 The only difference between this embodiment and Embodiment 1 is that titanium tetraisopropoxide in step S2 is replaced with titanium tetrachloride.

[0078] Example 4 The only difference between this embodiment and Embodiment 1 is that n-decyl glycidyl ether in step S2 is replaced with ethylene glycol, the carbon chain length is 2, and the deposition temperature is 70°C.

[0079] Example 5 The only difference between this embodiment and Example 1 is that the n-decyl glycidyl ether in step S2 is replaced with octyl glycidyl ether (C8 alkyl glycidyl ether), with a carbon chain length of 8 and a deposition temperature of 100°C.

[0080] Example 6 The only difference between this embodiment and Example 1 is that the n-decyl glycidyl ether in step S2 is replaced with tetradecyl glycidyl ether (C14 glycidyl ether), with a carbon chain length of 14 and a deposition temperature of 150°C.

[0081] Example 7 The only difference between this embodiment and Embodiment 1 is that in step S2, the pulse duration of the organic oxidation source is 0.01 s, the flow rate is 100 sccm, and the molar fraction of Ti in the generated titanium oxide sublayer is 75%.

[0082] Example 8 The only difference between this embodiment and Embodiment 1 is that in step S2, the pulse duration of the organic oxidation source is 0.5 s, the flow rate is 200 sccm, and the molar fraction of Ti in the generated titanium oxide sublayer is 90%.

[0083] Comparative Example 1 The only difference between this comparative example and Example 1 is that n-decyl glycidyl ether in step S2 is replaced with water.

[0084] Comparative Example 2 The method for preparing the hydrophobic coating in this comparative example includes the following steps: A hydrophobic coating was obtained by spraying polyimide resin onto the surface of the inductor using a roller spraying method at a temperature of 95°C. The thickness of the polyimide resin coating was the same as that of the hydrophobic coating in Example 1.

[0085] Comparative Example 3 The only difference between this comparative example and Example 1 is that in step S2, the pulse duration of the organic oxidation source is 1 s, the flow rate is 300 sccm, and the molar fraction of Ti in the titanium oxide sublayer is 70%.

[0086] Performance testing: The contact angles of the hydrophobic coatings in each embodiment and comparative example were tested, and salt spray and adhesion tests were performed on the inductor components. The test results are shown in Table 1. The contact angle test standard number was ASTM D7334-08(2018), the salt spray test standard number was GB / T 2423.17-2008, and the adhesion test standard number was GB / T 9286. In the adhesion test results, grade 0 was better than grade 1.

[0087] Table 1: Test results of each embodiment and comparative example

[0088] The preparation method of this application will be further explained below with reference to Table 1.

[0089] The influence of hydrophobic coating composition and structure on hydrophobic coating performance: Comparative Example 1 uses water as the oxidation source, and the resulting film is a titanium oxide film. The titanium oxide film has a lot of hydroxyl groups on its surface, resulting in a high surface energy. As a result, Comparative Example 1 has poor hydrophobicity, with a contact angle of only 35°. Furthermore, corrosive ions can easily penetrate the titanium oxide film and corrode the inductor, resulting in a salt spray test result of only 24 h for Comparative Example 1.

[0090] Comparative Example 2 uses polyimide resin to spray a hydrophobic coating. No chemical bonds are formed between the polyimide film and the inductor, resulting in an adhesion level of only 1 for Comparative Example 2.

[0091] In Example 1, n-decyl glycidyl ether was used as an organic oxidant source. After the small amount of hydroxyl groups remaining on the surface of the titanium dioxide sublayer combined with the organic oxidant source, carbon chains were attached to the surface of the titanium dioxide sublayer to eliminate strong polar groups (hydroxyl groups) and increase non-polar groups (carbon chains), thereby reducing surface energy, improving hydrophobicity, and reducing the spread and retention of water film on the surface of the hydrophobic coating, so that the contact angle of Example 1 could reach 132°.

[0092] Furthermore, the titanium source reacts with the surface of the inductor to form chemical bonds, thereby improving the bonding effect between the hydrophobic coating and the inductor. The organic oxide source also reacts with the titanium source to form a high-density Ti-OC cross-linked network, further enhancing the bonding effect between the organic sublayer and the titanium oxide sublayer. As a result, the adhesion of this hydrophobic coating can reach level 0. This improved adhesion indicates that the hydrophobic coating can stably adhere to the surface of the inductor, thus achieving a long-lasting hydrophobic effect.

[0093] Furthermore, the Ti-OC crosslinking network reduces the porosity of the hydrophobic coating, effectively preventing water, oxygen, and corrosive ions from penetrating through the hydrophobic coating to the surface of the inductor, thus cutting off the transport path of corrosive substances. The introduction of organic components (organic sublayer) alleviates the brittle cracking problem of the inorganic film (titanium oxide sublayer), further ensuring the continuity of the anti-corrosion effect, enabling the salt spray test result of Example 1 to reach 72 h.

[0094] The effect of the mole fraction of Ti on the performance of hydrophobic coatings: In the application, the molar fraction of Ti was adjusted by controlling the pulse duration and flow rate of the organic oxidation source.

[0095] The molar fraction of Ti in the titanium oxide sublayer of Comparative Example 3 is 70%. The content of low-valence Ti and oxygen vacancies in the titanium oxide sublayer is low, resulting in a high surface energy. The low oxygen vacancy content makes it difficult for C10 carbon chains to form Ti-OC chemical bonds, which in turn leads to a low density of C10 carbon chains and a poor hydrophobic effect. The contact angle of Comparative Example 3 is only 111°.

[0096] In Example 7, the molar fraction of Ti in the titanium oxide sublayer was increased to 75%. The content of low-valence Ti and oxygen vacancies in the titanium oxide sublayer was sufficiently high, resulting in a low surface energy. The high oxygen vacancy content also made it easier for C10 carbon chains to form Ti-OC chemical bonds, leading to a higher density of C10 carbon chains. This reduced the surface energy of the hydrophobic coating and improved its hydrophobic effect. The contact angle in Example 7 reached 113°.

[0097] In Example 1, the molar fraction of Ti in the titanium oxide sublayer was increased to 82%, the content of low-valence Ti and oxygen vacancies, and the density of C10 carbon chains were further increased, the surface energy of the hydrophobic coating was further reduced, and the contact angle of Example 1 could reach 132°.

[0098] In Example 8, the molar fraction of Ti in the titanium oxide sublayer was further increased by 90%, the content of low-valence Ti and oxygen vacancies, and the density of C10 carbon chains were further increased, the surface energy of the hydrophobic coating was further reduced, and the contact angle of Example 1 could reach 136°.

[0099] However, achieving a Ti molar fraction exceeding 90% in the titanium oxide sublayer is technically challenging and difficult, resulting in low profitability.

[0100] The effect of carbon chain length on the performance of hydrophobic coatings: The organic oxidation source in Example 4 was ethylene glycol, which formed a carbon chain with a length of only 2. The carbon chain was relatively short and had a limited contribution to the reduction of surface energy. The contact angle of Example 4 was only 110°.

[0101] The organic oxidation source in Example 5 is octyl glycidyl ether (C8 alkyl glycidyl ether) with a carbon chain length of 8. The C8 carbon chain can further reduce the surface energy, and the contact angle of Example 5 is further increased to 120°.

[0102] The organic oxidation source in Example 1 is n-decyl glycidyl ether (C10 alkyl glycidyl ether) with a carbon chain length of 10. The C10 carbon chain can further reduce the surface energy, and the contact angle of Example 1 is further increased to 132°.

[0103] The organic oxidation source in Example 6 was tetradecyl glycidyl ether (C14 glycidyl ether), with a carbon chain length of 14. The longer the carbon chain length, the greater its steric hindrance, making it more difficult to form Ti-OC chemical bonds. The carbon chain is difficult to bind to the titanium oxide sublayer, which in turn leads to a less significant decrease in surface energy. In fact, the contact angle in Example 6 decreased to 112°.

[0104] The effect of titanium source type on the performance of hydrophobic coatings: In Example 3, the titanium source was titanium tetrachloride, resulting in a higher number of hydroxyl groups on the surface of the generated titanium oxide sublayer. In contrast, the titanium source used in Example 1 was titanium tetraisopropoxide. This organic titanium source can reduce the number of hydroxyl groups on the surface of the titanium oxide sublayer, thereby further reducing the surface energy of the hydrophobic coating and increasing the contact angle of Example 1 to 132°.

[0105] The effect of deposition cycle number on hydrophobic coating performance: Compared to Example 1, Example 2 increased the number of cycles to 80, the hydrophobic coating thickness increased, the hydrophobic effect was better, and the contact angle was further increased to 135°.

[0106] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A hydrophobic coating, characterized in that, It includes a titanium oxide sublayer and an organic sublayer stacked along the thickness direction of the hydrophobic coating; The titanium oxide sublayer contains at least O and Ti elements, and the molar fraction of Ti in the titanium oxide sublayer is 75% to 90%. The organic sublayer contains at least a carbon chain.

2. The hydrophobic coating according to claim 1, characterized in that, The length of the carbon chain is 8 to 10.

3. The hydrophobic coating according to claim 1, characterized in that, The titanium oxide sublayer is composed of the O element and the Ti element.

4. The hydrophobic coating according to any one of claims 1 to 3, characterized in that, Both the titanium oxide sublayer and the organic sublayer are monolayers; and / or, Both the titanium oxide sublayer and the organic sublayer are multiple, and the titanium oxide sublayer and the organic sublayer are alternately arranged along the thickness direction of the hydrophobic coating; and / or, The total thickness of the hydrophobic coating is 5 μm to 25 μm; and / or, The surface of the hydrophobic coating has a micro-nano rough structure.

5. A method for preparing a hydrophobic coating, characterized in that, Includes the following steps: Preparation of titanium oxide sublayer and organic sublayer: A titanium source and an organic oxide source are introduced to deposit the titanium oxide sublayer and the organic sublayer stacked together; wherein the titanium oxide sublayer contains at least O and Ti elements, and the molar fraction of the Ti element in the titanium oxide sublayer is 75%~90%, and the organic sublayer contains at least carbon chains.

6. The preparation method according to claim 5, characterized in that, The steps for preparing the titanium oxide sublayer and the organic sublayer include the following sub-steps: The titanium source is introduced; wherein the pulse duration of the titanium source is 1 s to 5 s, and the flow rate is 200 sccm to 1000 sccm; A first inert gas is introduced; wherein the introduction time of the first inert gas is 30 s to 50 s, and the flow rate is 200 sccm to 500 sccm; The organic oxidation source is introduced; wherein the pulse duration of the organic oxidation source is 0.01 s to 1 s, and the flow rate is 100 sccm to 300 sccm; the organic oxidation source contains at least the carbon chain; A second inert gas is introduced; wherein the introduction time of the second inert gas is 60 s to 120 s, and the flow rate is set to 500 sccm to 1000 sccm.

7. The preparation method according to claim 6, characterized in that, The deposition method in the steps of preparing the titanium oxide sublayer and the organic sublayer is atomic layer deposition; and / or, In the steps of preparing the titanium oxide sublayer and the organic sublayer, the deposition temperature is 60℃~150℃, and the reaction chamber pressure is 0.5 torr~3.0 torr; and / or, The steps for preparing the titanium oxide sublayer and the organic sublayer are repeated multiple times; and / or, The titanium source includes at least one of tetra(dimethylamino)titanium or tetraisopropoxide titanium; and / or, The organic oxidizing source includes at least one of ethylene glycol, glycidyl ether compounds, or ethylenediamine; and / or, The first inert gas and the second inert gas include at least one of nitrogen, argon or helium.

8. An electronic component, characterized in that, include: ontology; as well as A hydrophobic coating is disposed on the surface of the body; Wherein, the hydrophobic coating is the hydrophobic coating of any one of claims 1 to 4; or, the hydrophobic coating is prepared by the preparation method of any one of claims 5 to 7.

9. The electronic component according to claim 8, characterized in that, Along the thickness direction of the hydrophobic coating, the first layer of the hydrophobic coating closest to the body is the titanium oxide sublayer.

10. An electronic device, characterized in that, It has the electronic components as described in claim 8 or 9.

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