Integrated piezoelectric pump based on reciprocating displacement active valve

Abstract

The invention discloses an integrated piezoelectric pump based on a reciprocating displacement active valve, which belongs to the technical field of valved piezoelectric pumps, and comprises a reciprocating displacement pumping composite assembly, a combination chamber, a pump body shell, a passive liquid inlet assembly and a passive liquid outlet assembly, the combination chamber is connected into the pump body shell in a sliding mode, and the reciprocating displacement pumping composite assembly is installed on the combination chamber. The reciprocating displacement pumping composite assembly comprises a left displacement composite substrate and a right displacement composite substrate which are the same in structure. The left displacement composite substrate is of a series arch structure and comprises piezoelectric ceramics, a left displacement substrate, k pumping substrates, a displacement driving supporting part, k-1 lower supporting parts, a swing supporting part and an upper supporting part. The piezoelectric ceramic vibrates to drive the pumping base plate on the lower side of the piezoelectric ceramic to vibrate up and down, the displacement driving supporting part and the swing supporting part swing in a reciprocating mode, and k-1 lower supporting parts are kept still. Circulating reciprocating displacement of the combined chamber relative to the pump body shell can be achieved, and then the active liquid inlet valve and the active liquid outlet valve are opened alternately.

Description

Technical Field

[0001] This invention belongs to the field of valved piezoelectric pump technology, specifically relating to an integrated piezoelectric pump based on a reciprocating active valve. Background Technology

[0002] Piezoelectric pumps utilize piezoelectric materials to pump fluids, offering core advantages such as compact structure, precise control, low power consumption, and no electromagnetic interference. They show great promise in fields like biomedicine, electronic heat dissipation, and precision chemicals. They are particularly suitable for high-end applications such as microfluidics, precision drug delivery, and chip heat dissipation. With the development of new materials and intelligent technologies, they are expected to play an even more crucial role in miniaturized, high-precision fluid control in the future.

[0003] The valve design is the "throat" and "precision converter" of a piezoelectric pump system. Its importance lies in its direct determination of whether the high-frequency, low-amplitude mechanical vibrations of the piezoelectric oscillator can be efficiently and with low loss converted into controllable macroscopic fluid transport. While passive check valves such as Tesla channels and conical channels have simple structures, they suffer from severe hysteresis and poor shut-off performance, limiting the pump's output performance at high frequencies. Existing active valves have solved the hysteresis problem, but their structures are usually complex and difficult to integrate. Their response frequency and action characteristics are difficult to ideally match with the high-frequency, fast-response piezoelectric material actuators, which limits the full potential of the piezoelectric pump's overall performance.

[0004] In summary, in response to the problems of low pumping efficiency and energy utilization of traditional piezoelectric pumps, there is an urgent need in this field for an active valve piezoelectric pump that can be coupled with the pumping frequency. Summary of the Invention

[0005] The purpose of this invention is to solve the problems existing in the field of valved piezoelectric pump technology, and to provide an integrated piezoelectric pump based on a reciprocating active valve.

[0006] The present invention adopts the following technical solution:

[0007] An integrated piezoelectric pump based on a reciprocating displacement active valve includes:

[0008] 2. Reverse resetting pumping composite component; 3. Combination chamber; 4. Pump body shell; 5. Passive liquid inlet component; 6. Passive liquid outlet component;

[0009] The combined chamber 3 is slidably connected to the pump body shell 4, and the reciprocating pumping composite component 2 is installed on it;

[0010] The reciprocating pumping composite assembly 2 includes a left displacement composite substrate 20 and a right displacement composite substrate 21 with identical structures;

[0011] The left displacement composite substrate 20 has a "series arched" structure, including piezoelectric ceramic 1, left displacement substrate 22, k pumping substrates 23, displacement drive support 24, k-1 lower support, swing support 27 and upper support 28.

[0012] The left displacement base plate 22 is strip-shaped, and its upper end is slidably connected to the inner wall of the pump body shell 4 through the upper support part 28.

[0013] The left displacement base plate 22 has vertically and evenly distributed "cantilever" displacement drive support 24, k-1 lower support parts and swing support parts 27 on its lower side from left to right.

[0014] Each support portion has k piezoelectric ceramics 1 bonded to the upper side of the left displacement substrate 22, and k cylindrical connecting posts 22a are respectively provided on the lower side of the left displacement substrate 22. The lower end of the connecting post 22a is connected to the pumping substrate 23.

[0015] The displacement drive support 24 includes a drive foot connector 24a, a high-damping foot 24b, and a unidirectional high-damping tooth 24c.

[0016] The vibration of the piezoelectric ceramic 1 will cause the pumping substrate 23 on its lower side to vibrate up and down, and the displacement will drive the support part 24 and the swing support part 27 to swing back and forth, while k-1 lower support parts remain stationary.

[0017] The high-damping foot 24b reciprocates, and the unidirectional high-damping tooth 24c at its lower end interacts with the inner wall of the pump body shell 4 to generate a unidirectional driving force.

[0018] The right displacement composite substrate 21 and the left displacement composite substrate 20 are arranged in opposite directions and work alternately to realize the cyclic reciprocating movement of the combined chamber 3 relative to the pump body shell 4.

[0019] The combined chamber 3 includes k fluid chambers connected in sequence. The fluid chambers are respectively provided with transition chamber I 33 and transition chamber II 34 inside and outside, which cooperate with the pumping substrate 23 on the right and left displacement composite substrates to form pump chambers.

[0020] The fluid chamber is provided with a fluid chamber inlet 34a on the outside of the chamber and a chamber outlet is provided vertically at the bottom;

[0021] The pump body housing 4 is provided with a side suction section 42 and a bottom pump outlet section 43;

[0022] The side suction section 42 includes a transversely arranged through hole that can overlap with the fluid chamber inlet 34a to form an active liquid inlet valve;

[0023] The bottom pump outlet 43 includes a horizontally arranged through hole that can overlap with the chamber outlet to form an active liquid outlet valve;

[0024] When the combined chamber 3 moves within the main chamber 41 inside the pump body housing 4, the active liquid outlet valve and the active liquid inlet valve open alternately.

[0025] When the pumping base plate 23 vibrates downward, the combined chamber 3 remains stationary and the active liquid outlet valve opens; when the pumping base plate 23 vibrates upward, the combined chamber 3 moves and the active liquid inlet valve opens.

[0026] The driving foot connector 24a of the displacement driving support part 24 in the left displacement composite substrate 20 is a strip plate, with its upper end fixed to the left displacement substrate 22 and its lower end fixed to the outside of the high damping foot 24b.

[0027] The curvature of the left side of each tooth of the unidirectional high-damping tooth 24c is greater than that of the right side. The micro-damping force generated when moving to the left relative to the bottom of the main chamber 41 is less than the frictional force generated when moving to the right relative to the left. The sliding friction force relative to the leftward movement is... The driving force for the relative rightward shift is ;

[0028] The lower support portion includes a lower support portion connector 25a, a lower support foot I 25d, and a lower support foot II 25e;

[0029] The lower support connector 25a is a strip plate, with its upper end fixed to the left displacement base plate 22 and its lower end fixed to the arc-shaped lower support foot I 25d and lower support foot II 25e.

[0030] The micro-damping force generated by the sliding contact between the single lower support and the bottom of the main chamber 41 is ;

[0031] The swing support 27 includes a swing support connector 27a and an arc-shaped sliding foot 27b, which generates a micro-damping force through sliding contact with the bottom of the main chamber 41. ;

[0032] The upper support 28 has a V-shaped structure, and its position and number correspond to those of the lower support. Its total micro-damping force during sliding contact with the main chamber 41 is... The micro-damping force between the combined chamber 3 and the pump body shell 4 is ;

[0033] The damping force and driving force mentioned above satisfy the following equation:

[0034] Sliding friction driving force .

[0035] The fluid chamber includes transition chamber I 33, transition chamber II 34, chamber partition plate 35, and lower chamber 36;

[0036] The transition chambers I 33 and II 34 are separated by a chamber partition plate 35. The transition chamber I 33 is connected to the vertical chamber outlet I 36a on the lower chamber 36, and the transition chamber II 34 is connected to the vertical chamber outlet II 36b on the lower chamber 36.

[0037] When liquid is introduced from one side: a transition chamber connection port 35b is opened in the center of the chamber partition plate 35, and the transition chamber I 33 and the transition chamber II 34 are connected. At this time, only one side of the transition chamber I 33 or the transition chamber II 34 needs to be opened as the fluid chamber inlet 34a.

[0038] When liquid is introduced from both sides: the chamber partition plate 35 completely separates the transition chamber I 33 and the transition chamber II 34. At this time, fluid chamber inlets 34a need to be opened on the outside of both the transition chamber I 33 and the transition chamber II.

[0039] The pumping substrate 23 is sealed to the transition cavity to form a pump cavity; each pumping substrate 23 has a composite substrate fixing connector 22b on both sides that is fixed to the composite substrate fixing groove 37 of the transition cavity.

[0040] The pump body housing 4 includes a main housing 40, a main chamber 41, a side suction section 42, a bottom pump outlet section 43, and an end cap 11;

[0041] The main shell 40 is a rectangular shell structure with one end open, and has a main chamber 41 inside, a side cover sealing boss 40d on the side, and a bottom cover sealing boss 40e at the bottom.

[0042] The side cover sealing boss 40d surrounds the side suction part 42, and the bottom cover sealing boss 40e surrounds the bottom pumping part 43.

[0043] The end cap 11 is sealed to the opening side of the main housing 40, forming a detachable sealed inspection port.

[0044] The passive liquid inlet assembly includes a side elastic sealing structure 5 and a side cover 6;

[0045] The side cover 6 has an elastic sealing structure placement cavity I60, which is sealed and fixedly connected to the side cover sealing boss 40d.

[0046] The elastic sealing structure placement cavity I60 is provided with a side cover inlet 61 at its center, and a side elastic sealing structure 5 is provided inside.

[0047] The side elastic sealing structure 5 includes a sealing block I 50 and elastic clamping beams I 51 and II 52 on both sides;

[0048] The ends of the elastic clamping beam are fixed to both sides of the elastic sealing structure placement cavity I60.

[0049] When the fluid is pumped out, the elastic clamping beam I 51 and elastic clamping beam II 52 push the sealing block I 50 into the side cover inlet 61, preventing the liquid from entering the combined chamber 3, and the passive liquid inlet assembly is closed.

[0050] When fluid is pumped in, the elastic clamping beam I 51 and elastic clamping beam II 52 deform as the pump chamber is sucked in, causing the sealing block I 50 to disengage from the side cover inlet 61. The passive liquid inlet assembly opens, and the liquid enters the pump chamber in the following order: side cover inlet 61, elastic sealing structure placement cavity I 60, side suction part 42, and fluid chamber inlet 34a.

[0051] The passive liquid discharge assembly includes a bottom elastic sealing structure 7 and a bottom cover 8;

[0052] The bottom cover 8 has an outlet 81 at the center of the elastic sealing structure placement cavity II 80;

[0053] The elastic sealing structure placement cavity II80 is sealed and fixedly connected to the bottom cover sealing boss 40e, and a bottom elastic sealing structure 7 is provided inside it.

[0054] The bottom elastic sealing structure 7 includes a sealing plate 70 and an elastic pressing part 71;

[0055] The sealing plate 70 is provided with sealing blocks II 70a evenly distributed on it, and elastic pressing parts 71 are provided on both sides of the bottom. A guide port 70d is provided between each pair of sealing blocks on the sealing plate 70.

[0056] In the initial state, the elastic pressing part 71 drives the sealing plate 70 to push upward, and the sealing blocks II 70a, III 70b and IV 70c are correspondingly inserted into the through holes of the bottom pumping part 43.

[0057] The elastic pressing part 71 includes two elastic support legs I 71a and two elastic support legs II 71b;

[0058] Both the elastic support leg I 71a and the elastic support leg II 71b are arc-shaped elastic beams, with their bottom ends fixed to the elastic sealing structure placement cavity II 80.

[0059] When fluid is pumped in, the elastic clamping part 71 deforms as the pump chamber is sucked in, causing the sealing plate 70 to push upward. The sealing blocks II 70a, III 70b and IV 70c are correspondingly inserted into the through holes of the bottom pumping part 43, and the passive liquid discharge assembly is closed. The closed state of the passive liquid discharge assembly can be used as the initial state of the bottom elastic sealing structure 7.

[0060] When the fluid is pumped out, the sealing plate 70 is pressed down by the liquid as the pump chamber is pumped out, which causes the elastic clamping part 71 to bend, the passive liquid discharge assembly to open, and the liquid is pumped out in sequence through the pressing chamber 36, the bottom pumping part 43, the guide port 70d, the elastic sealing structure placement chamber II 80, and the bottom cover outlet 81.

[0061] A method for using an integrated piezoelectric pump based on a reciprocating displacement active valve, wherein the above-mentioned integrated piezoelectric pump based on a reciprocating displacement active valve is used.

[0062] The piezoelectric ceramic 1 drives the opening and closing of the active valve and the pumping of fluid. The intermittent unidirectional movement of the combined chamber 3 is as follows:

[0063] S1. Fluid pumped out:

[0064] The combined chamber 3 is stationary, with the active liquid inlet valve and the passive liquid inlet assembly closed;

[0065] The piezoelectric ceramic 1 on the left displacement substrate 22 vibrates downward, the displacement drive support 24 and the swing support 27 open outward, the displacement drive support 24 does not provide moving drive force, and the combined chamber 3 is stationary.

[0066] The chamber outlet is aligned with the bottom pump outlet 43. At the same time, the pressure inside the pump chamber increases, pressing down the bottom elastic sealing structure 7. The active liquid outlet valve and the passive liquid outlet assembly open simultaneously, and the fluid is pumped out.

[0067] S2. Fluid pumping in:

[0068] Combination chamber 3 moves to the left, and the active liquid inlet valve and passive liquid inlet assembly are opened;

[0069] The piezoelectric ceramic 1 on the left displacement substrate 22 vibrates upward, and the displacement drive support 24 and the swing support 27 retract inward. The displacement drive support 24 provides the moving driving force, which drives the assembly chamber 3 to move to the left.

[0070] The fluid chamber inlet 34a and the side suction part 42 gradually overlap. At the same time, the pressure inside the pump chamber decreases and the bottom elastic sealing structure 7 pops up. The side elastic sealing structure 5 is pressed inward, the active liquid inlet valve and the passive liquid inlet assembly open, and the fluid is pumped in.

[0071] S3. Intermittent movement and direction change:

[0072] When the combined chamber 3 reaches the left end, the piezoelectric ceramic 1 on the left displacement substrate 22 stops vibrating, and the piezoelectric ceramic 1 on the right displacement composite substrate 21 begins to vibrate, and the combined chamber 3 becomes intermittently moving to the right.

[0073] This invention provides an integrated piezoelectric pump based on a reciprocating active valve, belonging to the field of valved piezoelectric pump technology. It includes: a reciprocating pumping composite assembly, a combined chamber, a pump housing, a passive inlet assembly, and a passive outlet assembly. The combined chamber is slidably connected within the pump housing, and the reciprocating pumping composite assembly is mounted on it. The reciprocating pumping composite assembly includes a left displacement composite base plate and a right displacement composite base plate with identical structures. The left displacement composite base plate has a "series arched" structure, including a piezoelectric ceramic, a left displacement base plate, k pumping base plates, a displacement drive support, k-1 lower supports, a swing support, and an upper support. The vibration of the piezoelectric ceramic will cause the pumping base plate below it to vibrate up and down, the displacement drive support and the swing support to swing back and forth, and the k-1 lower supports remain stationary. This enables the combined chamber to cyclically reciprocate relative to the pump housing, thereby achieving the alternating opening of the active inlet valve and the active outlet valve.

[0074] The beneficial effects of the technical solution adopted in this invention compared with the prior art are as follows:

[0075] 1. In this invention, the drive and valve opening and closing control functions are integrated into the same piezoelectric vibrator unit. The pressure change of the piezoelectric pump chamber and the opening and closing of the valve are mechanically coupled and precisely synchronized through the same piezoelectric vibrator unit, which fundamentally eliminates control delay, greatly reduces backflow and internal leakage, and thus significantly improves volumetric efficiency and output capacity.

[0076] 2. In this invention, the active valve action of the piezoelectric pump is directly and passively derived from the pumping action (the pumping and reciprocating motion use the same piezoelectric vibrator unit). There is no need to design a separate and complex control circuit and algorithm for the valve. The system control logic is greatly simplified, the dynamic response is faster, and the system structure is simplified, which can reduce the system failure rate and improve the overall reliability.

[0077] 3. In this invention, the fluid chambers can be connected in series, and the pumping flow rate of the piezoelectric pump can be dynamically adjusted to meet the pumping requirements of the piezoelectric pump under different working conditions. Attached Figure Description

[0078] Figure 1 This is an exploded view of the overall structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0079] Figure 2 This is a schematic diagram of the reciprocating pumping composite component structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0080] Figure 3 This is a schematic diagram of the fluid chamber I of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention;

[0081] Figure 4This is a schematic diagram of the specific structure of the pump body housing of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0082] Figure 5 This is a schematic diagram of the side elastic sealing structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0083] Figure 6 This is a schematic diagram of the specific structure of the side cover of an integrated piezoelectric pump based on a reciprocating active valve according to the present invention;

[0084] Figure 7 This is a schematic diagram of the bottom elastic sealing structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0085] Figure 8 This is a schematic diagram of the specific structure of the bottom cover of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention;

[0086] Figure 9 This is a schematic diagram of the specific structure of the side sealing strip of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention;

[0087] Figure 10 This is a schematic diagram of the end cover structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0088] Figure 11 This is a schematic diagram of the installation of the pump body shell, end cover, and side cover of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0089] Figure 12 This is a schematic diagram illustrating the working principle of the side elastic sealing structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0090] Figure 13 This is a schematic diagram illustrating the working principle of the bottom elastic sealing structure of an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention.

[0091] Figure 14 This is a schematic diagram illustrating the working principle of the reciprocating pumping composite component of an integrated piezoelectric pump based on a reciprocating active valve, which drives the combined chamber to move to the right.

[0092] Figure 15 This is a schematic diagram illustrating the working principle of the reciprocating pumping composite component of an integrated piezoelectric pump based on a reciprocating active valve, which drives the combined chamber to move to the left.

[0093] Figure 16 This is a schematic diagram illustrating the pumping principle and the working principle of the active valve port opening and closing coordination of an integrated piezoelectric pump based on a reciprocating active valve according to the present invention.

[0094] In the attached diagram:

[0095] 1. Piezoelectric ceramics;

[0096] 2. Reverse displacement pumping composite assembly; 20. Left displacement composite substrate; 21. Right displacement composite substrate;

[0097] 22. Left displacement base plate; 22a. Connecting post; 22b. Composite base plate fixing connector; 23. Pumping base plate; 24. Displacement drive support part; 24a. Drive foot connector; 24b. High damping foot; 24c. One-way high damping tooth; 25. Lower support part I; 25a. Lower support part connector; 25b. Support foot connecting rod I; 25c. Support foot connecting rod II; 25d. Lower support foot I; 25e. Lower support foot II; 26. Lower support part II; 27. Swing support part; 27a. Swing support part connector; 27b. Sliding foot; 28. Upper support part;

[0098] 3. Combination chamber; 30. Fluid chamber I; 31. Fluid chamber II; 32. Fluid chamber III; 33. Transition chamber I; 34. Transition chamber II; 34a. Fluid chamber inlet; 35. Chamber partition plate; 35b. Transition chamber connection port; 36. Lower chamber; 36a. Chamber outlet I; 36b. Chamber outlet II; 36c. Sealing ring placement groove I; 37. Composite substrate fixing groove;

[0099] 4. Pump body casing; 40. Main casing; 40a. End cover groove; 40b. End cover connecting sealing platform; 40c. Port sealing strip placement groove; 40d. Side cover sealing boss; 40e. Bottom cover sealing boss; 41. Main chamber; 41a. Side sealing strip placement groove; 42. Side suction section; 43. Bottom pump outlet section;

[0100] 5. Side elastic sealing structure; 50. Sealing block I; 51. Elastic clamping beam I; 51a. Fixing foot I; 52. Elastic clamping beam II; 52a. Fixing foot III;

[0101] 6. Side cover; 60. Elastic sealing structure placement cavity I; 61. Side cover inlet;

[0102] 7. Bottom elastic sealing structure; 70. Sealing plate; 70a. Sealing block II; 70b. Sealing block III; 70c. Sealing block IV; 70d. Flow guide; 71. Elastic pressing part; 71a. Elastic support leg I; 71b. Elastic support leg II;

[0103] 8. Bottom cover; 80. Elastic sealing structure placement cavity II; 81. Bottom cover outlet;

[0104] 9. Fluid chamber outlet sealing ring;

[0105] 10. Side sealing strip; 100. Connecting port;

[0106] 11. End cap; 111. End cap body; 111a. Sealing connection port; 112. Fixing buckle; 112a. Triangular tenon; 112b. Flexible connecting beam; 112c. Buckle connecting plate;

[0107] 12. Port sealing ring. Detailed Implementation

[0108] Example 1:

[0109] An integrated piezoelectric pump based on a reciprocating displacement active valve includes: a reciprocating displacement pumping composite component 2, a combination chamber 3, a pump body shell 4, a passive liquid inlet component, and a passive liquid outlet component;

[0110] The combined chamber 3 is slidably connected to the pump body shell 4, and the reciprocating pumping composite component 2 is installed on it;

[0111] The reciprocating pumping composite assembly 2 includes a left displacement composite substrate 20 and a right displacement composite substrate 21 with identical structures;

[0112] The left displacement composite substrate 20 has a "series arched" structure, including piezoelectric ceramic 1, left displacement substrate 22, three pumping substrates 23, displacement drive support 24, lower support I 25, lower support II 26, swing support 27 and upper support 28.

[0113] The left displacement base plate 22 is strip-shaped, and its upper end is provided with an upper support portion 28 that is slidably connected to the inner wall of the pump body housing 4.

[0114] The left displacement base plate 22 has vertically and evenly distributed and fixed "cantilever" displacement drive support 24, lower support I 25, lower support II 26 and swing support 27 on its lower side from left to right.

[0115] Each support portion is bonded with a piezoelectric ceramic 1 on the upper side of the left displacement substrate 22; a cylindrical connecting post 22a is provided on the lower side of the left displacement substrate 22, and the lower end of the connecting post 22a is connected to the pumping substrate 23.

[0116] The displacement drive support 24 includes a drive foot connector 24a, a high-damping foot 24b, and a unidirectional high-damping tooth 24c.

[0117] The vibration of the piezoelectric ceramic 1 will cause the pumping substrate 23 on its lower side to vibrate up and down, and the displacement will drive the support part 24 and the swing support part 27 to swing back and forth, while the lower support part I 25 and the lower support part II 26 remain stationary.

[0118] The drive foot connector 24a of the displacement drive support 24 drives the arc-shaped high-damping foot 24b to swing back and forth. The unidirectional high-damping tooth 24c at the lower end of the high-damping foot 24b interacts with the inner wall of the pump body shell 4 to generate a unidirectional driving force.

[0119] The right displacement composite substrate 21 and the left displacement composite substrate 20 are staggered and arranged in opposite directions, working alternately (the displacement drive support parts 24 of the two are arranged in opposite directions, and the driving forces are opposite), so as to realize the cyclic reciprocating displacement of the combined chamber 3 relative to the pump body shell 4.

[0120] The combined chamber 3 includes fluid chamber I 30, fluid chamber II 31, and fluid chamber III 32 arranged from left to right with identical structures;

[0121] The fluid chamber I30 has transition chamber I33 and transition chamber II34 inside and outside, respectively. These chambers cooperate with the pumping substrate 23 of the right displacement composite substrate 21 and the left displacement composite substrate 20 to form pump chambers, totaling 6 chambers, with 3 on each side working simultaneously.

[0122] The fluid chamber I 30 is provided with a fluid chamber inlet 34a on the outside and a chamber outlet vertically at the bottom;

[0123] The pump body housing 4 is provided with a side suction section 42 and a bottom pump outlet section 43;

[0124] The side suction section 42 includes a transversely arranged through hole that can overlap with the fluid chamber inlet 34a in the fluid chamber to form an active liquid inlet valve;

[0125] The bottom pump outlet 43 includes a horizontally arranged through hole that can coincide with the outlet of the fluid chamber to form an active liquid outlet valve;

[0126] When the combined chamber 3 moves within the main chamber 41 of the pump body housing 4, the active liquid outlet valve and the active liquid inlet valve open alternately.

[0127] When the pumping base plate 23 vibrates downward, the combined chamber 3 remains stationary and the active liquid outlet valve opens; when the pumping base plate 23 vibrates upward, the combined chamber 3 moves and the active liquid inlet valve opens.

[0128] The left-displacement composite substrate 20 and the right-displacement composite substrate 21 have the same structure. Taking the left-displacement composite substrate 20 as an example:

[0129] The drive foot connector 24a of the displacement drive support 24 is a rectangular thin plate to avoid interference with the fluid chamber during movement. The lower part is recessed inward, the upper end is fixed to the left displacement base plate 22, and the lower end is fixed to the outside of the high damping foot 24b.

[0130] The unidirectional high-damping tooth 24c has a greater curvature on the left side than on the right side. The micro-damping force generated when moving to the left relative to the bottom of the main chamber 41 is less than the frictional force generated when moving to the right. The sliding friction force relative to the leftward movement is... The driving force for the relative rightward shift is ;

[0131] The lower support part I 25 includes a lower support part connector 25a, a support foot connecting rod I 25b, a support foot connecting rod II 25c, a lower support foot I 25d, and a lower support foot II 25e;

[0132] The lower support connector 25a is a rectangular thin plate, with its upper end fixed to the left displacement base plate 22 and its lower end symmetrically connected to the support foot connecting rod I 25b and the support foot connecting rod II 25c, which are respectively fixed to the lower support foot I 25d and the lower support foot II 25e.

[0133] Both the lower support foot I 25d and the lower support foot II 25e are arc-shaped plates, and the micro-damping force generated by their sliding contact with the bottom of the main chamber 41 is... ;

[0134] The lower support part II26 has the same shape and function as the lower support part I25, and the micro-damping force generated by its sliding contact with the bottom of the main chamber 41 is ;

[0135] The swing support 27 includes a swing support connector 27a and a sliding foot 27b;

[0136] The swing support connector 27a is a rectangular thin plate. To avoid interference with the fluid chamber during movement, the lower part is recessed inward, the upper end is fixed to the left displacement base plate 22, and the lower end is fixed to the outside of the sliding foot 27b.

[0137] The sliding foot 27b is an arc-shaped plate, with its bottom in sliding contact with the bottom of the main chamber 41, generating a micro-damping force. ;

[0138] The upper support 28 has a V-shaped structure, and its position and number correspond to the lower support I 25 and the lower support II 26 respectively. Its lower end is fixed to the upper end of the left displacement base plate 22, and its upper end is in sliding contact with the inner wall of the top of the main chamber 41.

[0139] The total micro-damping force of the sliding between the upper support 28 and the pump housing 4 is The micro-damping force between the combined chamber 3 and the pump body shell 4 is ;

[0140] The damping force and driving force mentioned above satisfy the following equation:

[0141] Sliding friction driving force .

[0142] The fluid chamber I 30 includes a transition chamber I 33, a transition chamber II 34, a chamber partition plate 35, and a lower chamber 36;

[0143] The transition cavity I 33 and transition cavity II 34 are separated by a chamber partition plate 35;

[0144] The transition cavity I 33 is connected to the vertical chamber outlet I 36a of the lower chamber 36, and the transition cavity II 34 is connected to the vertical chamber outlet II 36b of the lower chamber 36.

[0145] When liquid is introduced from one side: a transition chamber connection port 35b is opened in the center of the chamber partition plate 35, and the transition chamber I 33 and the transition chamber II 34 are connected. At this time, only one side of the transition chamber I 33 or the transition chamber II 34 needs to be opened as the fluid chamber inlet 34a.

[0146] When liquid is introduced from both sides: the chamber partition plate 35 completely separates the transition chamber I 33 and the transition chamber II 34. At this time, fluid chamber inlets 34a need to be opened on the outside of both the transition chamber I 33 and the transition chamber II.

[0147] The pumping substrate 23 is sealed and fixed to the upper edge of the transition cavity to form a pump cavity; each pumping substrate 23 is provided with a composite substrate fixing connector 22b on both sides.

[0148] The lower end of the composite substrate fixing connector 22b is fixedly connected to the composite substrate fixing groove 37 on the upper edge of the transition cavity.

[0149] Both chamber outlet I 36a and chamber outlet II 36b are provided with sealing ring placement grooves I 36c at the bottom, where six fluid chamber outlet sealing rings 9 are placed in sequence to form an outlet seal and prevent fluid from overflowing.

[0150] In this embodiment, a single-sided liquid inlet is selected. A transition chamber connection port 35b is centrally located on the chamber partition plate 35, and a fluid chamber inlet 34a is located on one side of the transition chamber II 34. The side suction part 42 has three through holes arranged laterally opposite to it on one side of the pump body shell 4.

[0151] In this embodiment, the bottom pumping section 43 is provided with three horizontally arranged through holes, which are located between chamber outlet I 36a and chamber outlet II 36b. At this time, the reciprocating displacement range of the combined chamber 3 is small. In some embodiments, the number of through holes in the bottom pumping section 43 may be 6.

[0152] The pump body housing 4 includes a main housing 40, a main chamber 41, a side suction section 42, a bottom pump outlet section 43, and an end cap 11;

[0153] The main shell 40 is a rectangular shell structure with one end open, and has a main chamber 41 inside, a side cover sealing boss 40d on the side, and a bottom cover sealing boss 40e at the bottom.

[0154] The main housing 40 has T-shaped end cap grooves 40a on all four sides of the open end, and a square end cap connecting sealing platform 40b at the port. The end cap connecting sealing platform 40b has a port sealing strip placement groove 40c. A port sealing ring 12 is set inside the port sealing strip placement groove 40c.

[0155] The side cover sealing boss 40d is a rectangular frame-shaped boss that surrounds the side suction part 42;

[0156] The bottom cover sealing boss 40e is a rectangular frame-shaped boss that surrounds the bottom pumping part 43;

[0157] The main chamber 41 is provided with a rectangular side sealing strip placement groove 41a on one side of the side suction part 42;

[0158] The side sealing strip 10 is bonded in the side sealing strip placement groove 41a to cover the side suction part 42;

[0159] The sealing strip 10 is a long strip-shaped rubber structure with three identical cross-section connecting ports 100 arranged on it corresponding to the side suction part 42, which fit tightly against the side of the fluid chamber I 30 when in contact.

[0160] The end cap 11 is sealed to the opening side of the main housing 40, forming a detachable sealed inspection port.

[0161] The end cap 11 includes a square plate-shaped end cap body 111 and four fixing buckles 112;

[0162] The shape of the end cap body 111 is the same as the shape of the cross section of the opening side of the main housing 40. A sealing connection port 111a is provided at the opening position of the main chamber 41, which is sealed and connected to the end cap connecting sealing platform 40b during assembly.

[0163] The sealing connection port 111a has the same shape as the outer side of the end cap connecting sealing platform 40b, and is tightly sealed with the port sealing ring 12 during assembly.

[0164] The fixing buckle 112 includes two triangular tenons 112a, two elastic connecting beams 112b, and a buckle connecting plate 112c;

[0165] The triangular tenon 112a is a right-angled triangular plate, with the right-angle end fixed to the elastic connecting beam 112b and the hypotenuse facing outward;

[0166] The elastic connecting beam 112b has a certain elasticity and can be bent inward, with its lower end fixed to the snap-fit ​​connecting plate 112c.

[0167] The ends of the snap-fit ​​connecting plate 112c are evenly distributed around the sealing connection port 111a;

[0168] See appendix Figure 11 The fixing buckle 112 can be inserted into the end cover buckle groove 40a, so that the end cover 11 is fixed on the main housing 40. During maintenance, the triangular buckle 112a is pressed inward and the end cover 11 is pulled outward to open it.

[0169] The passive liquid inlet assembly includes a side elastic sealing structure 5 and a side cover 6;

[0170] The side cover 6 is a rectangular plate structure with a rectangular elastic sealing structure placement cavity I60 on the inner side. During assembly, the inner side is sealed and fixed to the side cover sealing boss 40d on the side of the main housing 40.

[0171] The elastic sealing structure placement cavity I60 has a side cover inlet 61 at its center, and the space formed inside is provided with a side elastic sealing structure 5;

[0172] The side cover inlet 61 is a square through hole, which is arranged corresponding to the side suction part 42 and communicates inward with the main chamber 41;

[0173] The side elastic sealing structure 5 includes a sealing block I 50 and elastic clamping beams I 51 and II 52 on both sides;

[0174] The sealing block I50 is a square block-shaped rubber structure, slightly larger than the side cover inlet 61;

[0175] The elastic clamping beam I51 is an arc-shaped curved beam with a fixed foot I51a at the end;

[0176] The elastic clamping beam II 52 is an arc-shaped curved beam with a fixed foot III 52a at the end;

[0177] The fixing feet are all square plates, fixed on both sides of the elastic sealing structure placement cavity I60;

[0178] See appendix Figure 12 When the fluid is pumped out, the elastic clamping beam I 51 and elastic clamping beam II 52 bend outward, pushing the sealing block I 50 into the side cover inlet 61, preventing liquid from entering the combined chamber 3, and the passive liquid inlet assembly is closed; and the closed state of the passive liquid inlet assembly can be used as the initial state of the side elastic sealing structure 5.

[0179] See appendix Figure 12 When fluid is pumped in, the elastic clamping beam I 51 and elastic clamping beam II 52 deform as the pump chamber is sucked in, causing the sealing block I 50 to disengage from the side cover inlet 61. The passive liquid inlet assembly opens, and the liquid enters the pump chamber in the following order: side cover inlet 61, elastic sealing structure placement cavity I 60, side suction part 42, and fluid chamber inlet 34a.

[0180] The passive liquid discharge assembly includes a bottom elastic sealing structure 7 and a bottom cover 8;

[0181] The bottom cover 8 has a bottom cover outlet 81 in the center of the elastic sealing structure placement cavity II 80. During assembly, the elastic sealing structure placement cavity II 80 and the outer side of the bottom cover sealing boss 40e are tightly fitted together, and the space formed inside them accommodates the bottom elastic sealing structure 7.

[0182] The bottom cover outlet 81 is a square through hole, which is arranged corresponding to the bottom pump outlet 43 and connects upward to the main chamber 41;

[0183] The bottom elastic sealing structure 7 includes a sealing plate 70 and an elastic pressing part 71;

[0184] The sealing plate 70 is a rectangular plate with sealing blocks II 70a, III 70b and IV 70c evenly distributed on its surface, and elastic pressing parts 71 evenly distributed on both sides of its bottom.

[0185] The sealing blocks are all wedge-shaped bosses, corresponding to the through holes of the bottom pump outlet 43, and are slightly larger in size;

[0186] A flow guide port 70d is provided between each pair of sealing blocks on the sealing plate 70;

[0187] The elastic pressing part 71 includes two elastic support legs I 71a and two elastic support legs II 71b;

[0188] Both the elastic support leg I 71a and the elastic support leg II 71b are arc-shaped elastic beams, with their bottom ends fixed to the elastic sealing structure placement cavity II 80.

[0189] See appendix Figure 13 When fluid is pumped in, the elastic clamping part 71 deforms with the suction state of the pump chamber, causing the sealing plate 70 to push upward, and the sealing blocks II 70a, III 70b and IV 70c are correspondingly inserted into the through holes of the bottom pumping part 43, and the passive liquid discharge assembly is closed; and the closed state of the passive liquid discharge assembly can be used as the initial state of the bottom elastic sealing structure 7.

[0190] See appendix Figure 13 When the fluid is pumped out, the sealing plate 70 is pressed down by the liquid as the pump chamber is pumped out, which causes the elastic pressing part 71 to bend, the passive liquid discharge assembly opens, and the liquid is pumped out in sequence through the pressing chamber 36, the bottom pumping part 43, the guide port 70d, the elastic sealing structure placement chamber II 80, and the bottom cover outlet 81.

[0191] Example 2:

[0192] In some embodiments, n fluid chambers can be connected in series, but it should be noted that this will increase the damping force, and the total damping force will be less than the driving force provided by the displacement drive support 24.

[0193] The working principle of the integrated piezoelectric pump based on a reciprocating displacement active valve of the present invention is as follows:

[0194] In use, the piezoelectric ceramics 1 on the left displacement composite substrate 20 and the right displacement composite substrate 21 work alternately to realize the reciprocating motion and cyclic pumping of the piezoelectric pump.

[0195] In the above embodiment 1, the transition chamber I 33 and the transition chamber II 34 are connected and can be regarded as a whole pump chamber, and the pressure change between the two can be transmitted.

[0196] The vibration of the piezoelectric ceramic 1 on the left displacement substrate 22 in the left displacement composite substrate 20 is transmitted to the pumping substrate 23 through the connecting column 22a, causing a change in the volume of the pump chamber, thereby realizing the intake and pumping of fluid.

[0197] The piezoelectric ceramics 1 on both sides of the left displacement substrate 22 vibrate up and down, which will cause the displacement drive support 24 and the swing support 27 to swing in and out.

[0198] See appendix Figure 15 When the piezoelectric ceramic 1 on the left side of the left displacement substrate 22 vibrates downward, it drives the driving foot connector 24a and the swing support connector 27a to swing outward.

[0199] The unidirectional high-damping tooth 24c is slid to the left relative to the main chamber 41, generating sliding friction. Insufficient to drive the movement of combination chamber 3; combination chamber 3 remains stationary.

[0200] When the piezoelectric ceramic on the left side of the left displacement substrate 22 vibrates downward, the pump chamber volume decreases. At this time, the fluid chamber inlet 34a is misaligned with the side suction part 42, and the passive liquid inlet assembly is closed. The chamber outlet I 36a coincides with the bottom pump outlet 43, the passive liquid outlet assembly is opened, and the liquid is pumped out.

[0201] When the piezoelectric ceramic 1 on the left side of the left displacement substrate 22 vibrates upward, it drives the displacement drive support 24 to swing the support connector 27a inward.

[0202] The high-damping foot 24b is rolled to the right relative to the main chamber 41, and the unidirectional high-damping teeth 24c successively contact the bottom of the main chamber 41. At this time, the driving force... Move combination chamber 3 to the left;

[0203] When the piezoelectric ceramic on the left side of the left displacement substrate 22 vibrates upward, the pump chamber volume increases, the passive liquid inlet component opens, the fluid is pumped into the pump chamber, the passive liquid outlet component closes, and the chamber outlet I 36a and the bottom pump outlet 43 begin to be misaligned.

[0204] The sliding foot 27b always slides relative to the bottom of the main chamber 41, serving only a supporting function;

[0205] After the combined chamber 3 reaches the leftmost end, the piezoelectric ceramic 1 on the left displacement substrate 22 stops working, and the piezoelectric ceramic 1 on the right displacement composite substrate 21 starts working.

[0206] See appendix Figure 14 The driving principle of the right displacement composite substrate 21 is exactly the same as that of the left displacement composite substrate 20. The two are installed in opposite directions. When the piezoelectric ceramic 1 on the right displacement composite substrate 21 vibrates, it drives the combined chamber 3 to move to the right.

[0207] The method of using an integrated piezoelectric pump based on a reciprocating displacement active valve according to the present invention is as follows:

[0208] See appendix Figure 16 The piezoelectric ceramic 1 simultaneously drives the active liquid outlet valve and the active liquid inlet valve to alternately open and close and pump the fluid, realizing the cyclic pumping of the piezoelectric pump. The following example is the intermittent leftward movement of the combined chamber 3; the same applies to the rightward movement.

[0209] 1) Fluid pumping out: Combination chamber 3 is stationary, the active inlet valve and passive inlet assembly are closed, and the active outlet valve and passive outlet assembly are open;

[0210] When the piezoelectric ceramic 1 on the left displacement substrate 22 vibrates downward, the displacement drive support 24 and the swing support 27 open outward. The displacement drive support 24 does not provide a moving driving force, the combined chamber 3 is stationary, the three chamber outlets I 36a are aligned with the bottom pump outlet 43, and at the same time the pressure inside the pump chamber increases, pressing down the bottom elastic sealing structure 7. The active liquid outlet valve and the passive liquid outlet assembly open simultaneously, and the fluid is pumped out.

[0211] 2) Fluid pumping in: Combination chamber 3 moves to the left, the active liquid inlet valve and the passive liquid inlet assembly open, and the active liquid outlet valve and the passive liquid outlet assembly close;

[0212] When the piezoelectric ceramic 1 on the left displacement substrate 22 vibrates upward, the displacement drive support 24 and the swing support 27 retract inward. The displacement drive support 24 provides the moving drive force, which drives the combined chamber 3 to move to the left. The fluid chamber inlet 34a and the side suction part 42 gradually overlap. At the same time, the pressure in the pump chamber decreases and the bottom elastic sealing structure 7 pops up. The side elastic sealing structure 5 is pressed inward, and the active liquid inlet valve and the passive liquid inlet assembly open, and the fluid is pumped in.

[0213] 3) When the combined chamber 3 reaches the left end, the piezoelectric ceramic 1 on the left displacement substrate 22 stops vibrating, and the piezoelectric ceramic 1 on the right displacement composite substrate 21 starts vibrating, and the combined chamber 3 becomes intermittent right motion.

[0214] This invention discloses an integrated piezoelectric pump based on a reciprocating displacement active valve, the materials used and the manufacturing method of which are as follows:

[0215] The combined chamber 3, pump body shell 4, side cover 6, bottom cover 8 and end cover 11 can be made of special engineering plastics with low friction, such as PEEK, PTFE, PMMA, etc., which can make the pump body more stable and lighter.

[0216] The side elastic sealing structure 5 and the bottom elastic sealing structure 7 can be made of materials with good elasticity and moderate stiffness, such as stainless steel and fiber-reinforced polymers. Their structures are relatively complex and can be integrally formed using additive manufacturing technology.

[0217] The reciprocating pumping composite component 2 can be made of stainless steel (314, 306) and integrally formed using additive manufacturing technology.

Claims

1. An integrated piezoelectric pump based on a reciprocating displacement active valve, characterized in that, include: The components include a reciprocating pumping composite assembly (2), a combined chamber (3), a pump housing (4), a passive liquid inlet assembly, and a passive liquid outlet assembly; The combined chamber (3) is slidably connected to the pump body shell (4), and the reciprocating pumping composite component (2) is installed on it. The reciprocating pumping composite assembly (2) includes a left displacement composite substrate (20) and a right displacement composite substrate (21) with identical structures. The left displacement composite substrate (20) has a "series arch" structure, including piezoelectric ceramic (1), left displacement substrate (22), k pumping substrates (23), displacement drive support (24), k-1 lower support, swing support (27) and upper support (28). The left displacement base plate (22) is strip-shaped, and its upper end slides against the inner wall of the pump body shell (4) through the upper support part (28); The left displacement base plate (22) has vertically and evenly distributed "cantilever" displacement drive support (24), k-1 lower support parts and swing support parts (27) on the lower side from left to right. k piezoelectric ceramics (1) are bonded to the upper side of the left displacement substrate (22) between each support part, and k cylindrical connecting posts (22a) are provided on the lower side of the left displacement substrate (22). The lower end of the connecting post (22a) is connected to the pumping substrate (23).

2. The integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 1, characterized in that: The displacement drive support (24) includes a drive foot connector (24a), a high-damping foot (24b), and a unidirectional high-damping tooth (24c). The vibration of the piezoelectric ceramic (1) will cause the pumping substrate (23) below it to vibrate up and down, and the displacement will drive the support (24) and the swing support (27) to swing back and forth, while k-1 lower support parts remain stationary. The high-damping foot (24b) swings back and forth, and the unidirectional high-damping tooth (24c) at its lower end interacts with the inner wall of the pump body shell (4) to generate a unidirectional driving force; The right displacement composite substrate (21) and the left displacement composite substrate (20) are arranged in opposite directions and work alternately to realize the cyclic reciprocating displacement of the combined chamber (3) relative to the pump body shell (4); The combined chamber (3) includes k fluid chambers connected in sequence. The fluid chambers are respectively provided with transition chamber I (33) and transition chamber II (34) inside and outside, which cooperate with the pumping substrate (23) on the right and left displacement composite substrates to form pump chambers.

3. The integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 2, characterized in that: The fluid chamber is provided with a fluid chamber inlet (34a) on the outside and a chamber outlet is provided vertically at the bottom; The pump body housing (4) is provided with a side suction section (42) and a bottom pump outlet section (43). The side suction section (42) includes a transversely arranged through hole that coincides with the fluid chamber inlet (34a) to form an active liquid inlet valve; The bottom pump outlet (43) includes a transversely arranged through hole that coincides with the chamber outlet, forming an active liquid outlet valve; When the combined chamber (3) moves within the main chamber (41) inside the pump body housing (4), the active liquid outlet valve and the active liquid inlet valve open alternately; When the pumping base plate (23) vibrates downward, the combination chamber (3) remains stationary and the active liquid outlet valve opens; when the pumping base plate (23) vibrates upward, the combination chamber (3) moves and the active liquid inlet valve opens.

4. An integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 1, 2, or 3, characterized in that: The driving foot connector (24a) of the displacement driving support part (24) in the left displacement composite substrate (20) is a strip plate, with the upper end fixed to the left displacement substrate (22) and the lower end fixed to the outside of the high damping foot (24b). The curvature of the left side of each tooth in the unidirectional high-damping tooth (24c) is greater than that on the right side. The micro-damping force generated when moving to the left relative to the bottom of the main chamber (41) is less than the frictional force generated when moving to the right relative to the bottom. The sliding friction force relative to the left is... The driving force for the relative rightward shift is ; The lower support includes a lower support connector (25a), a lower support foot I (25d), and a lower support foot II (25e). The lower support connector (25a) is a strip plate, with its upper end fixed to the left displacement base plate (22) and its lower end fixed to the arc-shaped lower support foot I (25d) and lower support foot II (25e). The micro-damping force generated by the sliding contact between the single lower support and the bottom of the main chamber (41) is ; The swing support (27) includes a swing support connector (27a) and an arc-shaped sliding foot (27b), which generates a micro-damping force by sliding against the bottom of the main chamber (41). ; The upper support (28) has a V-shaped structure, and its position and number correspond to those of the lower support. The total micro-damping force between it and the main chamber (41) is... The micro-damping force between the combined chamber (3) and the pump body shell (4) is ; The damping force and the driving force satisfy the following equation: Sliding friction driving force .

5. An integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 4, characterized in that: The fluid chamber includes transition chamber I (33), transition chamber II (34), chamber partition plate (35), and lower chamber (36); The transition chamber I (33) and transition chamber II (34) are separated by a chamber partition plate (35). The transition chamber I (33) is connected to the vertical chamber outlet I (36a) on the lower chamber (36), and the transition chamber II (34) is connected to the vertical chamber outlet II (36b) on the lower chamber (36). When liquid is introduced from one side: a transition chamber connection port (35b) is opened in the center of the chamber partition plate (35), and the transition chamber I (33) and the transition chamber II (34) are connected. At this time, only one side of the transition chamber I (33) or the transition chamber II (34) needs to be opened as the fluid chamber inlet (34a). When liquid is introduced from both sides: the chamber partition plate (35) completely separates the transition chamber I (33) and the transition chamber II (34). At this time, fluid chamber inlets (34a) need to be opened on the outside of both the transition chamber I (33) and the transition chamber II. The pumping substrate (23) is sealed to the transition cavity to form a pump cavity; each pumping substrate (23) has a composite substrate fixing connector (22b) on both sides that is fixed to the composite substrate fixing groove (37) of the transition cavity.

6. An integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 5, characterized in that: The pump body housing (4) includes a main housing (40), a main chamber (41), a side suction section (42), a bottom pump outlet section (43), and an end cap (11). The main shell (40) is a rectangular shell structure with one end open, with a main chamber (41) inside, a side cover sealing boss (40d) on the side, and a bottom cover sealing boss (40e) at the bottom. The side cover sealing boss (40d) surrounds the side suction part (42), and the bottom cover sealing boss (40e) surrounds the bottom pumping part (43). The end cap (11) is sealed to the opening side of the main housing (40) to form a detachable sealed inspection port.

7. An integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 6, characterized in that: The passive liquid inlet assembly includes a side elastic sealing structure (5) and a side cover (6). The side cover (6) has an elastic sealing structure placement cavity I (60) which is sealed and fixed to the side cover sealing boss (40d); The elastic sealing structure placement cavity I (60) is provided with a side cover inlet (61) in the center, and a side elastic sealing structure (5) is provided inside. The side elastic sealing structure (5) includes sealing block I (50) and elastic clamping beam I (51) and elastic clamping beam II (52) on both sides; The end of the elastic compression beam is fixed to both sides of the elastic sealing structure placement cavity I (60).

8. An integrated piezoelectric pump based on a reciprocating displacement active valve according to claim 7, characterized in that: The passive liquid discharge assembly includes a bottom elastic sealing structure (7) and a bottom cover (8); The bottom cover (8) has an elastic sealing structure with a cavity II (80) at the center of which is a bottom cover outlet (81). The elastic sealing structure placement cavity II (80) is sealed and fixedly connected to the bottom cover sealing boss (40e), and a bottom elastic sealing structure (7) is provided inside it. The bottom elastic sealing structure (7) includes a sealing plate (70) and an elastic pressing part (71); Sealing blocks II (70a) are evenly distributed on the sealing plate (70), and elastic pressing parts (71) are provided on both sides of the bottom. A guide port (70d) is provided between each pair of sealing blocks on the sealing plate (70). In the initial state, the elastic pressing part (71) drives the sealing plate (70) to push upward, and the sealing block II (70a), sealing block III (70b) and sealing block IV (70c) are correspondingly inserted into the through hole of the bottom pumping part (43).

9. A method of using an integrated piezoelectric pump based on a reciprocating displacement active valve, characterized in that: The integrated piezoelectric pump based on a reciprocating displacement active valve as described in claim 8; The piezoelectric ceramic (1) drives the opening and closing of the active valve and the pumping of fluid. The intermittent unidirectional movement of the combined chamber 3 is as follows: S1. Fluid pumped out: The combined chamber (3) is stationary, and the active liquid inlet valve and the passive liquid inlet assembly are closed; The piezoelectric ceramic (1) on the left displacement substrate (22) vibrates downward, the displacement drive support (24) and the swing support (27) open outward, the displacement drive support (24) does not provide moving drive force, and the combination chamber (3) is stationary; The chamber outlet is aligned with the bottom pump outlet (43). At the same time, the pressure inside the pump chamber increases, pressing down the bottom elastic sealing structure (7). The active liquid outlet valve and the passive liquid outlet assembly open simultaneously, and the fluid is pumped out. S2. Fluid pumping in: The combination chamber (3) moves to the left, and the active liquid inlet valve and the passive liquid inlet assembly are opened; The piezoelectric ceramic (1) on the left displacement substrate (22) vibrates upward, and the displacement drive support (24) and the swing support (27) contract inward. The displacement drive support (24) provides the moving drive force, which drives the assembly chamber (3) to move to the left. The fluid chamber inlet (34a) and the side suction section (42) gradually overlap. At the same time, the pressure inside the pump chamber decreases, the bottom elastic sealing structure (7) pops up, the side elastic sealing structure (5) is pressed inward, the active liquid inlet valve and the passive liquid inlet assembly open, and the fluid is pumped in. S3. Intermittent movement and direction change: When the combined chamber (3) reaches the left end, the piezoelectric ceramic (1) on the left displacement substrate (22) stops vibrating, and the piezoelectric ceramic (1) on the right displacement composite substrate (21) starts vibrating, and the combined chamber (3) becomes intermittently moving to the right.

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