Galvanometer driving control method and system based on deflection synchronous analysis

Abstract

The invention discloses a galvanometer driving control method and system based on deflection synchronous analysis, and relates to the technical field of galvanometer driving control, and the method comprises the steps: obtaining galvanometer driving system data, obtaining a galvanometer driving reference position and a displacement influence coefficient according to the galvanometer driving system data, obtaining target track information, and obtaining a galvanometer driving reference position according to the target track information; and sorting the track ordinates according to a target track sequence to obtain a track Y-axis displacement sequence. According to the invention, through the central position of the motor rotating shaft, the galvanometer driving coordinate system is constructed and the reference position is determined, accurate space positioning of galvanometer motion is realized, a unified space basis is provided for subsequent multi-axis deflection synchronous control, and quantitative characterization of multi-axis coupling interference is realized through fitting a curvilinear equation and obtaining a displacement influence coefficient. The feature target trajectory is split through the extreme point, and the deflection initial correction amount is calculated in a segmented manner, so that the correction efficiency is improved, and the stability and reliability of galvanometer driving control are ensured.

Description

Technical Field

[0001] This invention relates to the field of galvanometer drive control technology, specifically to a galvanometer drive control method and system based on deflection synchronization analysis. Background Technology

[0002] As a core actuator in laser processing, 3D printing, laser scanning, and precision testing, the precision of the galvanometer's drive control directly determines the equipment's operational quality and efficiency. In high-precision applications such as laser cutting and micro / nano processing, the galvanometer needs to achieve high-speed and stable deflection motion according to a preset target trajectory. The coordinated synchronization of the X-axis and Y-axis drive motors and the compatibility of the Z-axis laser focusing are crucial to ensuring accurate laser spot positioning and trajectory replication accuracy, which is of great significance for promoting the intelligent and precision transformation of the manufacturing industry.

[0003] Currently, galvanometer drive control suffers from several limitations, including the inability to accurately analyze the galvanometer drive status, the inability to accurately correct position errors based on the galvanometer drive, and the neglect of coupling interference from multi-axis deflections. Existing technologies treat X-axis and Y-axis drives as independent systems, failing to consider the impact of Y-axis deflection on X-axis displacement. This leads to deflection distortion during actual motion, reduced trajectory replication accuracy, and susceptibility to subsequent trajectory deviations due to accumulated mechanical structural errors. The predominantly holistic correction strategy not only suffers from low correction efficiency but also exhibits synchronization delays, hindering timely error correction and impacting the timeliness and accuracy of galvanometer drive control. Summary of the Invention

[0004] To address the aforementioned technical problems, a galvanometer drive control method and system based on deflection synchronization analysis is provided. This technical solution solves the problems mentioned in the background art, such as the inability to accurately analyze the galvanometer drive status, the inability to accurately correct position errors based on the galvanometer drive, and the neglect of coupling interference from multi-axis deflections. Existing technologies treat X-axis and Y-axis drives as independent systems, failing to consider the impact of Y-axis deflection on X-axis displacement. This leads to deflection distortion in actual motion, decreased trajectory replication accuracy, and easy accumulation of mechanical structural errors causing subsequent trajectory deviations. The holistic correction strategy often employs low correction efficiency and suffers from synchronization delays, failing to correct errors in a timely manner and affecting the timeliness and accuracy of galvanometer drive control.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A galvanometer drive control method based on deflection synchronization analysis includes: Acquire data from the galvanometer drive system, which includes parameters of the axial drive motor, including an X-axis drive motor, a Y-axis drive motor, and a Z-axis drive motor. Based on the data from the galvanometer drive system, obtain the galvanometer drive reference position and displacement influence coefficient; Obtain target trajectory information, which includes coordinate position data of each point on the trajectory; Based on the target trajectory information, the ordinates of the trajectory are sorted according to the target trajectory order to obtain the trajectory Y-axis displacement sequence; Based on the trajectory Y-axis displacement sequence, and using the position and angle transformation in the galvanometer driving system, the trajectory Y-axis deflection angle sequence is obtained; Based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, the initial deflection correction amount is obtained based on the target trajectory information; Based on the initial deflection correction amount and the target trajectory information, the trajectory X-axis deflection angle sequence is obtained; Based on the target trajectory information and the laser focusing requirements, Z-axis driving data is obtained, which is used to focus the laser at different positions. The galvanometer drive control is realized based on the trajectory X-axis deflection angle sequence, trajectory Y-axis deflection angle sequence, and Z-axis drive data.

[0006] Preferably, obtaining the galvanometer drive reference position and displacement influence coefficient based on the galvanometer drive system data specifically includes: Based on the data from the galvanometer drive system, mechanical structure parameters are obtained, including the center position of the X-axis motor shaft and the center position of the Y-axis motor. Using the center position of the X-axis motor shaft as a reference, draw the X-axis reference line along the X-axis motor shaft direction; using the center position of the Y-axis motor shaft as a reference, draw the Y-axis reference line along the Y-axis motor shaft direction. Based on spatial geometric analysis and according to the requirements of galvanometer driving, the X-axis reference line and the Y-axis reference line should be perpendicular to each other. Based on the Y-axis reference line, a Y-axis reference plane parallel to the X-axis reference line is constructed. Map the X-axis baseline parallel to the Y-axis baseline to obtain the X-axis mapping line; The intersection of the X-axis mapping line and the Y-axis baseline is taken as the plane displacement reference point; Obtain work plane information; Based on the working plane information, the planar displacement reference point is mapped to the working plane to obtain the galvanometer driving reference position; The displacement influence coefficient is obtained based on the reference position of the galvanometer drive.

[0007] Preferably, obtaining the displacement influence coefficient based on the galvanometer driving reference position specifically includes: Based on the data from the galvanometer drive system, obtain the rated deflection range of the X-axis and the rated deflection range of the Y-axis; Based on the rated deflection range of the X-axis and the rated deflection range of the Y-axis, the X-axis drive motor and the Y-axis drive motor are driven to obtain the working point of the galvanometer, which represents the position of the galvanometer laser on the working plane; Adjust the X-axis and Y-axis deflection angles of the galvanometer drive system until the galvanometer working point coincides with the galvanometer drive reference position, and obtain the reference state of the galvanometer drive system. With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, a galvanometer driving coordinate system is constructed. The X-axis direction of the galvanometer driving coordinate system is parallel to the Y-axis reference line, and the Y-axis direction is perpendicular to the Y-axis reference line. Based on X-axis deflection distortion analysis, obtain the Y-axis angle interval set; Based on the positive X-axis of the galvanometer-driven coordinate system, the X-axis drive motor is deflected until the maximum deflection angle is reached; Keeping the maximum positive deflection angle of the X-axis constant, the Y-axis drive motor is deflected with an angle interval set to obtain the X-axis feature point set, which represents the working point of the galvanometer after each deflection of the Y-axis drive motor. Obtain the first feature point; Based on the set of X-axis feature points, the deflection angle of the Y-axis drive motor is used as the input, and the ratio of the difference between the x-axis feature points and the first feature point to the x-axis feature point is used as the output. The curve equation is fitted to obtain the displacement influence coefficient, which includes the displacement influence of different Y-axis deflection angles on the X-axis drive.

[0008] Preferably, the step of obtaining the Y-axis angle interval set based on X-axis deflection distortion analysis specifically includes: Based on the reference state of the galvanometer drive system, and taking the positive X-axis of the galvanometer drive coordinate system as the basis, the X-axis drive motor is deflected until the maximum deflection angle is reached. The working point of the galvanometer at this time is taken as the first feature point of the X-axis. Keeping the maximum deflection angle of the positive X-axis unchanged, the Y-axis drive motor is deflected based on the positive Y-axis of the galvanometer drive coordinate system until the maximum deflection angle is reached. The working point of the galvanometer at this time is taken as the second feature point of the X-axis. The difference in the x-coordinate between the second feature point on the X-axis and the first feature point on the X-axis is taken as the X-axis deviation value. Based on the accuracy requirements of the galvanometer, obtain the maximum displacement deviation value; The ratio of the X-axis deviation value to the maximum displacement deviation value is used as the gradient division value; The difference in the ordinate of the second feature point on the X-axis and the first feature point on the X-axis is used as the displacement value on the Y-axis. Based on the gradient division values, the Y-axis displacement values ​​are divided to obtain displacement interval information; Based on the Y-axis displacement and angle mapping relationship in the galvanometer drive system data, and based on the displacement interval information, a set of Y-axis angle intervals is obtained, which includes the deflection angle corresponding to each Y-axis displacement interval.

[0009] Preferably, the step of obtaining the initial deflection correction amount based on the target trajectory information, according to the trajectory Y-axis deflection angle sequence and displacement influence coefficient, specifically includes: By mapping the trajectory Y-axis displacement sequence to the trajectory Y-axis deflection angle sequence, the Y-axis displacement angle matching information is obtained. Based on the reference position driven by the galvanometer, the trajectory Y-axis displacement sequence is divided according to the Y-axis displacement value to obtain the trajectory Y-axis sub-sequence; Based on the target trajectory corresponding to each trajectory Y-axis subsequence, the extreme points of the target trajectory are obtained using the galvanometer-driven coordinate system. The target trajectory is divided into subsequences corresponding to each trajectory Y-axis based on the extreme points of the target trajectory, and the feature target trajectory is obtained. Based on the characteristic target trajectory, obtain the characteristic position data of each segment of the characteristic target trajectory, wherein the characteristic position includes the start position and the end position of the characteristic target trajectory; Based on the feature position data of each feature target trajectory segment, obtain the initial deflection correction amount of that feature target trajectory segment; Specifically, the initial deflection correction amount is:

[0010] In the formula, This is the initial correction amount for the deflection. Indicates the first The starting point correction amount of the segment feature target trajectory. Indicates the first The endpoint correction amount of the segment feature target trajectory. Indicates the first The corrected x-coordinate of the feature position of the segment feature target trajectory. Indicates the first The x-coordinate of the feature position of the target trajectory segment. Indicates the first The displacement influence coefficient of the segment feature target trajectory. Indicates the first The Y-axis deflection angle corresponding to the ordinate of the characteristic position of the segment target trajectory.

[0011] Preferably, the step of obtaining the trajectory X-axis deflection angle sequence based on the target trajectory information according to the initial deflection correction amount specifically includes: Based on the initial deflection correction, obtain the initial deflection correction for each point in each segment of the target trajectory. Based on the target trajectory information, the horizontal coordinates of the trajectory are sorted according to the target trajectory order to obtain the trajectory X-axis displacement sequence; Based on the initial deflection correction and the trajectory X-axis displacement sequence, the abscissa of each point in each segment of the feature target trajectory is corrected to obtain the trajectory X-axis correction coordinate sequence. Based on the trajectory X-axis corrected coordinate sequence, and using the position angle transformation in the galvanometer driving system, the trajectory X-axis deflection angle sequence is obtained; Specifically, the trajectory X-axis correction coordinate sequence is as follows:

[0012] In the formula, Indicates the first The first segment of the characteristic target trajectory Corrected x-coordinates of each point Indicates the first The first segment of the characteristic target trajectory The x-coordinates of the points Indicates the first The first segment of the characteristic target trajectory The point and the first The trajectory length of the starting point of the segment feature target trajectory. Indicates the first The length of the segment feature target trajectory, This is the initial correction amount for the deflection. Indicates the first The starting point correction amount of the segment feature target trajectory.

[0013] Furthermore, a galvanometer drive control system based on deflection synchronization analysis is proposed to implement the control method described above, including: The main control module is used to fit the curve equation according to the set of X-axis feature points, obtain the displacement influence coefficient, obtain the initial deflection correction amount based on the target trajectory information based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, obtain the trajectory X-axis deflection angle sequence based on the target trajectory information, and obtain the Z-axis drive data based on the target trajectory information and laser focusing requirements. The information acquisition module is used to acquire data from the galvanometer drive system, acquire mechanical structure parameters, acquire target trajectory information, and acquire working plane information based on the galvanometer drive system data. The error amplification module is used to take the intersection of the X-axis mapping line and the Y-axis reference line as the planar displacement reference point, and map the planar displacement reference point to the working plane according to the working plane information to obtain the galvanometer driving reference position. With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, a galvanometer driving coordinate system is constructed, and the Y-axis angle interval set is obtained based on the X-axis deflection distortion analysis. The display module interacts with the main control module and is used to output and display the reference position of the galvanometer drive, the displacement influence coefficient, the trajectory X-axis deflection angle sequence, the trajectory Y-axis deflection angle sequence, and the Z-axis drive data.

[0014] Optionally, the main control module specifically includes: The control unit is used to obtain the initial deflection correction amount based on the target trajectory information, according to the trajectory Y-axis deflection angle sequence and displacement influence coefficient; obtain the trajectory X-axis deflection angle sequence based on the target trajectory information, according to the initial deflection correction amount and the target trajectory information; and obtain the Z-axis drive data based on the laser focusing requirements according to the target trajectory information. An information receiving unit interacts with an information acquisition module and an error amplification module to receive data and transmit it to a displacement correction unit. The displacement correction unit is used to fit the curve equation based on the X-axis feature point set, taking the deflection angle of the Y-axis drive motor as the input and the ratio of the difference between the X-axis feature points and the first feature point to the abscissa of the first feature point as the output, to obtain the displacement influence coefficient.

[0015] Optionally, the information acquisition module specifically includes: The first acquisition unit is used to acquire galvanometer drive system data, which includes axial drive motor parameters, and to acquire mechanical structure parameters based on the galvanometer drive system data. The second acquisition unit is used to acquire target trajectory information, which includes coordinate position data of each point on the trajectory, and to acquire working plane information.

[0016] Optionally, the error amplification module specifically includes: An error analysis unit is used to take the intersection of the X-axis mapping line and the Y-axis reference line as the planar displacement reference point, and map the planar displacement reference point to the working plane according to the working plane information to obtain the galvanometer drive reference position. The feature analysis unit is used to construct a galvanometer driving coordinate system with the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, and to obtain the Y-axis angle interval set based on the X-axis deflection distortion analysis.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: This invention proposes a galvanometer drive control method and system based on deflection synchronization analysis. By constructing a galvanometer drive coordinate system and determining the reference position through the center position of the motor shaft, the precise spatial positioning of the galvanometer motion is achieved, providing a unified spatial basis for subsequent multi-axis deflection synchronization control. By fitting the curve equation, the displacement influence coefficient is obtained, realizing the quantitative characterization of multi-axis coupling interference. By splitting the characteristic target trajectory at extreme points and calculating the initial deflection correction in segments, the correction efficiency is improved, ensuring the stability and reliability of the galvanometer drive control. Attached Figure Description

[0018] Figure 1 This is a flowchart of a galvanometer drive control method based on deflection synchronization analysis proposed in this invention. Figure 2 This is a flowchart of the process for obtaining the reference position of the galvanometer drive in this invention; Figure 3 This is a flowchart of the process for obtaining the displacement influence coefficient in this invention; Figure 4 This is a flowchart of the process for obtaining the Y-axis angle interval set in this invention; Figure 5 This is a block diagram of a galvanometer drive control system based on deflection synchronization analysis proposed in this invention. Detailed Implementation

[0019] The following description is intended to disclose the invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0020] Reference Figure 1 - Figure 4 As shown, an embodiment of the present invention provides a galvanometer drive control method based on deflection synchronization analysis, comprising: Acquire data from the galvanometer drive system, which includes parameters of the axial drive motor, including an X-axis drive motor, a Y-axis drive motor, and a Z-axis drive motor. Based on the data from the galvanometer drive system, obtain the galvanometer drive reference position and displacement influence coefficient; Specifically, based on the data from the galvanometer driving system, the reference position and displacement influence coefficient of the galvanometer driving system are obtained, including: Based on the data from the galvanometer drive system, mechanical structure parameters are obtained, including the center position of the X-axis motor shaft and the center position of the Y-axis motor. Using the center position of the X-axis motor shaft as a reference, draw the X-axis reference line along the X-axis motor shaft direction; using the center position of the Y-axis motor shaft as a reference, draw the Y-axis reference line along the Y-axis motor shaft direction. Based on spatial geometric analysis and according to the requirements of galvanometer driving, the X-axis reference line and the Y-axis reference line should be perpendicular to each other. Based on the Y-axis reference line, a Y-axis reference plane parallel to the X-axis reference line is constructed. Map the X-axis baseline parallel to the Y-axis baseline to obtain the X-axis mapping line; The intersection of the X-axis mapping line and the Y-axis baseline is taken as the plane displacement reference point; Obtain work plane information; Based on the working plane information, the planar displacement reference point is mapped to the working plane to obtain the galvanometer driving reference position; The displacement influence coefficient is obtained based on the reference position of the galvanometer drive.

[0021] In this solution, the center positions of the X and Y axis motor shafts are located through spatial geometric analysis, constructing perpendicular reference lines and planes. These are then mapped to the working plane via parallel mapping to obtain the galvanometer drive reference position, providing a unique and precise origin reference for galvanometer motion. This unified reference ensures that subsequent deflection angle calculations and trajectory corrections are based on the same origin, guaranteeing spatial consistency of motion control from the source and filling the gap in traditional methods that ignore multi-axis interference. Based on the galvanometer drive reference position, a dedicated coordinate system can be constructed to accurately capture the interference of Y-axis deflection on X-axis displacement (i.e., the displacement influence coefficient), ensuring control conforms to the actual operating scenario. By mapping the planar displacement reference point to the actual working plane, the galvanometer drive reference position is not an abstract geometric point, but rather a spatial position that conforms to the actual laser operation (such as the center origin of the working plane).

[0022] Specifically, the displacement influence coefficient is obtained based on the reference position of the galvanometer drive, including: Based on the data from the galvanometer drive system, obtain the rated deflection range of the X-axis and the rated deflection range of the Y-axis; Based on the rated deflection range of the X-axis and the rated deflection range of the Y-axis, the X-axis drive motor and the Y-axis drive motor are driven to obtain the working point of the galvanometer, which represents the position of the galvanometer laser on the working plane; Adjust the X-axis and Y-axis deflection angles of the galvanometer drive system until the galvanometer working point coincides with the galvanometer drive reference position, and obtain the reference state of the galvanometer drive system. With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, a galvanometer driving coordinate system is constructed. The X-axis direction of the galvanometer driving coordinate system is parallel to the Y-axis reference line, and the Y-axis direction is perpendicular to the Y-axis reference line. Based on X-axis deflection distortion analysis, obtain the Y-axis angle interval set; Based on the positive X-axis of the galvanometer-driven coordinate system, the X-axis drive motor is deflected until the maximum deflection angle is reached; Keeping the maximum positive deflection angle of the X-axis constant, the Y-axis drive motor is deflected with an angle interval set to obtain the X-axis feature point set, which represents the working point of the galvanometer after each deflection of the Y-axis drive motor. Obtain the first feature point; Based on the set of X-axis feature points, the deflection angle of the Y-axis drive motor is used as the input, and the ratio of the difference between the x-axis feature points and the first feature point to the x-axis feature point is used as the output. The curve equation is fitted to obtain the displacement influence coefficient, which includes the displacement influence of different Y-axis deflection angles on the X-axis drive.

[0023] In this scheme, the X and Y axis deflection angles are adjusted to align the working point of the galvanometer with the reference position. A dedicated coordinate system is constructed with the reference position as the origin, ensuring that subsequent tests of the displacement influence coefficient are based on the same spatial reference. This avoids data distortion caused by coordinate system offsets in different test scenarios. This unified reference ensures consistent acquisition logic for all feature point data, laying the foundation for the accuracy of the displacement influence coefficient. X-axis deflection distortion analysis is used to divide the Y-axis angle intervals, allowing for targeted acquisition of X-axis displacement deviations at different Y-axis angles. To isolate interfering factors and improve the accuracy of coefficient quantification, a controlled variable method is adopted: "keeping the maximum X-axis deflection angle constant and adjusting only the Y-axis deflection." This ensures that the X-axis displacement deviation is caused solely by the Y-axis deflection, eliminating interference from other variables (such as changes in the X-axis angle). The displacement influence coefficient after curve fitting more closely reflects the actual coupling law. Through curve fitting of "Y-axis deflection angle (input) → ratio of horizontal axis deviation (output)," the inter-axis coupling interference is transformed from a "qualitative description" to a "quantitative coefficient" (e.g., when the Y-axis deflection is 30°, the X-axis displacement deviation ratio is 0.05). Traditional methods can only detect the "existence of inter-axis interference" but cannot quantify the intensity of the interference, leading to blind correction strategies. This quantified coefficient allows subsequent corrections to accurately adapt to interference at different Y-axis angles, avoiding "over-correction" or "under-correction."

[0024] It is understandable that galvanometer pincushion distortion exists in the galvanometer drive control process. This means that when scanning a square pattern, the straight lines at the edges will be concave towards the center of the pattern, forming a shape similar to a pillow. Its mathematical essence is the nonlinear mapping relationship between the scanning angle and the actual displacement. Even the existing 9-point correction and 25-point correction technologies can only reduce the degree of distortion, but cannot completely correct the error.

[0025] In this embodiment, the rated deflection range of the X-axis and the rated deflection range of the Y-axis are obtained based on the data from the galvanometer driving system: The rated deflection range of the X-axis is [ (e.g., [−11.5°, 11.5°]), the rated deflection range of the Y-axis is [ (e.g., [−12°, 12°]); Determine the core test angle and select the maximum deflection angle in the positive X-axis direction. As a fixed test angle (because the Y-axis coupling interference is most significant when the X-axis deflection is at its maximum, the test results are more representative), the Y-axis test range covers the entire rated deflection range.

[0026] Based on the rated deflection ranges of the X-axis and Y-axis, the X-axis drive motor and Y-axis drive motor are driven to obtain the operating point of the galvanometer. Drive logic: First, independently drive the X-axis motor to... Then, independently drive the Y-axis motor to multiple discrete angles (angles in the subsequent angle interval set); Working point acquisition: The actual coordinates of the laser on the working plane at each Y-axis deflection angle are acquired using the position feedback module built into the galvanometer (such as a photoelectric encoder). (i.e., the working point of the galvanometer; each angle is repeatedly sampled 3 times, and the x-coordinate is taken.) The average value is used as the effective x-coordinate corresponding to that angle to avoid random errors.

[0027] Adjust the X-axis and Y-axis deflection angles of the galvanometer drive system until the galvanometer working point coincides with the galvanometer drive reference position, and obtain the reference state of the galvanometer drive system: With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, construct the galvanometer driving coordinate system: The coordinate system is defined as follows: the X-axis is parallel to the Y-axis baseline (horizontal along the working plane), the Y-axis is perpendicular to the Y-axis baseline (vertical along the working plane), the coordinate unit is uniformly mm, and the origin (0, 0) is the reference position for galvanometer drive.

[0028] Based on X-axis deflection distortion analysis, obtain the Y-axis angle interval set: Based on the positive X-axis of the galvanometer-driven coordinate system, the X-axis drive motor is deflected until the maximum deflection angle is reached: Deflection operation: Based on the initial drive parameters of the reference state, the X-axis motor drive signal is gradually increased until the maximum positive deflection angle of the X-axis is reached. Keep the drive signal unchanged (lock the X-axis position).

[0029] Keeping the maximum positive deflection angle of the X-axis constant, the Y-axis drive motor is deflected using a set of angle intervals to obtain the set of feature points on the X-axis: Deflection stepping: Adjust the Y-axis motor deflection angle sequentially according to the angular interval set (0° → maximum positive Y-axis angle), stabilize for 0.5s after each deflection (to avoid motor vibration), and then collect the horizontal coordinate of the working point; Feature point definition: each Y-axis deflection angle Corresponding to a feature point on the X-axis ,in Let x be the x-coordinate of the working point at that angle. The input Y-axis deflection angle ultimately forms the X-axis feature point set { , ,..., (n is the total number of angular intervals).

[0030] Obtain the first feature point: Explicitly defined: First feature point That is, the feature point on the X-axis when the Y-axis deflection angle is 0°, where The x-coordinate of the working point collected at this angle (serving as a reference point for coupling interference).

[0031] Data preprocessing: Outlier removal: using 3 Criteria for removing outlier x-coordinates from the feature point set ; Data standardization: This involves standardizing the x-coordinates of all feature points. Converted to x-coordinate relative to the first feature point deviation ratio

[0032] Eliminate the influence of differences in the absolute value of the horizontal axis.

[0033] To fit the data, a quadratic polynomial equation is chosen as the fitting equation, taking into account the nonlinear characteristics of the inter-axis coupling interference of the galvanometers:

[0034] A, B, and C are the fitting parameters; Use MATLAB's `lsqcurvefit` function or Python's `scipy.optimize.curve_fit` function to deflect the curve by the Y-axis angle. For input quantity, the deviation ratio For the output, perform curve fitting.

[0035] The displacement influence coefficient is obtained, and this equation can be used to directly calculate any Y-axis deflection angle in subsequent applications. The corresponding X-axis deviation ratio .

[0036] Specifically, based on X-axis deflection distortion analysis, a set of Y-axis angle intervals is obtained, including: Based on the reference state of the galvanometer drive system, and taking the positive X-axis of the galvanometer drive coordinate system as the basis, the X-axis drive motor is deflected until the maximum deflection angle is reached. The working point of the galvanometer at this time is taken as the first feature point of the X-axis. Keeping the maximum deflection angle of the positive X-axis unchanged, the Y-axis drive motor is deflected based on the positive Y-axis of the galvanometer drive coordinate system until the maximum deflection angle is reached. The working point of the galvanometer at this time is taken as the second feature point of the X-axis. The difference in the x-coordinate between the second feature point on the X-axis and the first feature point on the X-axis is taken as the X-axis deviation value. Based on the accuracy requirements of the galvanometer, obtain the maximum displacement deviation value; The ratio of the X-axis deviation value to the maximum displacement deviation value is used as the gradient division value; The difference in the ordinate of the second feature point on the X-axis and the first feature point on the X-axis is used as the displacement value on the Y-axis. Based on the gradient division values, the Y-axis displacement values ​​are divided to obtain displacement interval information; Based on the Y-axis displacement and angle mapping relationship in the galvanometer drive system data, and based on the displacement interval information, a set of Y-axis angle intervals is obtained, which includes the deflection angle corresponding to each Y-axis displacement interval.

[0037] In this scheme, the gradient division value is determined by the ratio of the X-axis deviation value (the displacement distortion of the X-axis when the Y-axis deflects to the maximum displacement deviation value), so that the division density of the Y-axis displacement interval matches the degree of X-axis distortion—the greater the distortion, the finer the gradient division, and the smaller the corresponding angle interval. Traditional methods use uniform angle intervals, which cannot adapt to the distortion differences in different regions (e.g., a certain segment of Y-axis deflection causes severe X-axis distortion, but the interval is too coarse and not accurately sampled). This adaptation mechanism allows the angle interval to be "divided on demand," ensuring that the subsequently acquired X-axis feature points can accurately capture the distortion pattern. Traditional angle intervals are often fixed values, which do not take into account the actual accuracy requirements of the equipment, resulting in either oversampling and wasting resources or undersampling and failing to meet the accuracy requirements. This setting deeply binds the angle interval to the actual operating requirements of the galvanometer, balancing accuracy and efficiency.

[0038] In this embodiment, the maximum displacement deviation value can be set according to the specific application scenario. For example, in precision semiconductor, medical, and precision electronics processing, the maximum displacement deviation value is ±5μm, while in industrial processing such as marking, cutting, and welding, the maximum displacement deviation value is ±0.03~0.05mm.

[0039] Galvanometer driving coordinate system: with the galvanometer driving reference position as the origin (0, 0), and the working plane as the laser processing surface (vertical distance from the Y-axis reference line d=200mm). X-axis rated maximum deflection angle: ±11.5° (maximum positive deflection angle = 11.5°). Y-axis rated maximum deflection angle: ±12° (maximum positive deflection angle = 12°); Y-axis displacement and angle mapping relationship (industry standard): 1° corresponds to 5mm (that is, for every 1° deflection of the Y-axis, the Y-axis displacement on the working plane increases by 5mm). Galvanometer accuracy requirements: For precision machining scenarios, the maximum displacement deviation is 0.05mm (the maximum distortion of the X-axis due to the Y-axis deflection is allowed to be no more than 0.05mm).

[0040] The galvanometer is in the reference state (the working point coincides with the reference position (0,0)). Based on the positive X-axis, the X-axis motor is driven to deflect to the maximum angle of 11.5°, while keeping the Y-axis deflection angle = 0°. By transforming the position and angle of the galvanometer, the coordinates of the first feature point on the X-axis of the working plane are obtained as (100mm, 0mm), i.e., the x-coordinate. =100mm (X-axis position when Y-axis displacement = 0mm).

[0041] Keeping the maximum deflection angle of the positive X-axis unchanged at 11.5°, and using the positive Y-axis as a base, drive the Y-axis motor to deflect to the maximum angle of 12°; Due to X-axis deflection distortion (coupled interference of Y-axis deflection on the X-axis), the coordinates of the second feature point on the X-axis on the working plane are (98mm, 60mm), i.e., the horizontal coordinate... =98mm (X-axis position when Y-axis displacement = 60mm).

[0042]

[0043] That is, when the Y-axis deflects from 0° to 12°, the X-axis shifts by 2mm due to distortion.

[0044] Based on the requirements of precision laser processing (such as marking semiconductor chips), the preset maximum displacement deviation value is 0.05mm.

[0045]

[0046] The displacement value corresponding to the positive Y-axis deflection range (0°-12°) needs to be divided into 40 segments, and the X-axis distortion corresponding to each segment should be controlled within 0.05mm.

[0047]

[0048] That is, when the Y-axis deflects from 0° to 12°, the total displacement on the working plane is 60mm;

[0049] Based on the mapping relationship between Y-axis displacement and angle (1°=5mm), the displacement interval is converted into an angle interval to obtain the set of Y-axis angle intervals; Similarly, the Y-axis is deflected negatively (0°-(-12°)). The final complete set of angular intervals consists of 80 intervals.

[0050] Obtain target trajectory information, which includes coordinate position data of each point on the trajectory; Based on the target trajectory information, the ordinates of the trajectory are sorted according to the target trajectory order to obtain the trajectory Y-axis displacement sequence; Based on the trajectory Y-axis displacement sequence, and using the position and angle transformation in the galvanometer driving system, the trajectory Y-axis deflection angle sequence is obtained; Based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, the initial deflection correction amount is obtained based on the target trajectory information; Specifically, based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, and using the target trajectory information, the initial deflection correction is obtained, including: By mapping the trajectory Y-axis displacement sequence to the trajectory Y-axis deflection angle sequence, the Y-axis displacement angle matching information is obtained. Based on the reference position driven by the galvanometer, the trajectory Y-axis displacement sequence is divided according to the Y-axis displacement value to obtain the trajectory Y-axis sub-sequence; Based on the target trajectory corresponding to each trajectory Y-axis subsequence, the extreme points of the target trajectory are obtained using the galvanometer-driven coordinate system. The target trajectory is divided into subsequences corresponding to each trajectory Y-axis based on the extreme points of the target trajectory, and the feature target trajectory is obtained. Based on the characteristic target trajectory, obtain the characteristic position data of each segment of the characteristic target trajectory, wherein the characteristic position includes the start position and the end position of the characteristic target trajectory; Based on the feature position data of each feature target trajectory segment, obtain the initial deflection correction amount of that feature target trajectory segment; Specifically, the initial deflection correction amount is:

[0051] In the formula, This is the initial correction amount for the deflection. Indicates the first The starting point correction amount of the segment feature target trajectory. Indicates the first The endpoint correction amount of the segment feature target trajectory. Indicates the first The corrected x-coordinate of the feature position of the segment feature target trajectory. Indicates the first The x-coordinate of the feature position of the target trajectory segment. Indicates the first The displacement influence coefficient of the segment feature target trajectory. Indicates the first The Y-axis deflection angle corresponding to the ordinate of the characteristic position of the segment target trajectory.

[0052] In this scheme, by matching the Y-axis displacement sequence with the deflection angle sequence and dividing the Y-axis into sub-sequences, the correction range is made to fit the coupling interference characteristics of different Y-axis deflection intervals. This avoids the neglect of interference differences in different Y-axis intervals by traditional "overall correction" (such as the different interference of small and large Y-axis deflections on the X-axis). It achieves a precise correspondence between the correction range and the interference interval, improves the targeting of the correction, focuses on key segments by splitting the feature trajectory, dynamically compensates for inter-axis coupling interference, and solves the problem of deflection distortion. The correction amount formula is directly integrated into the displacement influence coefficient corresponding to the Y-axis deflection, and specifically compensates for the displacement interference of different Y-axis deflection angles on the X-axis, so that the coupling influence of the X-axis correction amount and the Y-axis deflection is dynamically adapted.

[0053] It is understandable that the influence of the Y-axis on the X-axis displacement is always present. If every position in the target trajectory is corrected, not only will the amount of data processing be large, but the correction efficiency will also be low, and the displacement cannot be corrected in a timely manner according to the work progress. Therefore, this solution improves the correction efficiency while ensuring the correction accuracy by segmenting the target trajectory.

[0054] Extreme points are the dividing points of trajectory motion trend changes, and the corresponding Y-axis deflection angle and interference intensity may also change trend. Locking the extreme points can ensure that the trend of each subsequent segment of the trajectory is uniform, avoiding excessive fluctuations in the correction amount due to multiple trends within a single trajectory. Each subsequence trajectory is divided into several characteristic target trajectories according to the extreme points. The galvanometer target trajectory is often a complex curve (such as the complex path of laser processing). Direct overall correction is prone to error accumulation due to the variable interference pattern.

[0055] Feature trajectory decomposition transforms complex trajectories into several simple segments with a single trend. This reduces the amount of data processed per segment and allows the correction calculation for each segment to better reflect the interference and trajectory characteristics of that segment, balancing correction accuracy and efficiency. The starting and ending coordinates and corresponding Y-axis deflection angles of each feature trajectory segment are extracted. The starting and ending points are the boundary anchor points of each feature trajectory segment, and their corresponding Y-axis deflection angles can be directly correlated with the displacement influence coefficient (interference quantification value). Calculating the correction amount based on these two key nodes avoids redundancy in point-by-point calculations (improving efficiency) and ensures the consistency of correction amounts within segments. Furthermore, these two points establish the changing trend of corrections within segments (e.g., a smooth transition from the starting point correction amount to the ending point correction amount).

[0056] In this embodiment, the position angle conversion in the galvanometer driving system is specifically as follows:

[0057] In the formula, As coordinates, The horizontal distance between the X and Y galvanometers. This is the vertical distance from the Y-axis baseline to the working plane; Based on the initial deflection correction amount and the target trajectory information, the trajectory X-axis deflection angle sequence is obtained; Specifically, based on the initial deflection correction and the target trajectory information, the trajectory X-axis deflection angle sequence is obtained, including: Based on the initial deflection correction, obtain the initial deflection correction for each point in each segment of the target trajectory. Based on the target trajectory information, the horizontal coordinates of the trajectory are sorted according to the target trajectory order to obtain the trajectory X-axis displacement sequence; Based on the initial deflection correction and the trajectory X-axis displacement sequence, the abscissa of each point in each segment of the feature target trajectory is corrected to obtain the trajectory X-axis correction coordinate sequence. Based on the trajectory X-axis corrected coordinate sequence, and using the position angle transformation in the galvanometer driving system, the trajectory X-axis deflection angle sequence is obtained; Specifically, the trajectory X-axis correction coordinate sequence is as follows:

[0058] In the formula, Indicates the first The first segment of the characteristic target trajectory Corrected x-coordinates of each point Indicates the first The first segment of the characteristic target trajectory The x-coordinates of the points Indicates the first The first segment of the characteristic target trajectory The point and the first The trajectory length of the starting point of the segment feature target trajectory. Indicates the first The length of the segment feature target trajectory, This is the initial correction amount for the deflection. Indicates the first The starting point correction of the segment feature target trajectory In this scheme, the correction amount is calculated separately for each point of each feature target trajectory segment, replacing the coarse mode of "uniform correction for the whole segment". This adapts to the differences in Y-axis deflection interference corresponding to different trajectory points, so that the X-axis displacement of each point is compensated, which greatly improves the point-level accuracy of trajectory replication. The correction amount is dynamically adapted with the trajectory position to ensure the smoothness of the motion. The correction formula incorporates the "trajectory length ratio between the current point and the starting point", so that the correction amount is dynamically adjusted with the position of the trajectory point in the feature segment (such as matching the starting point correction amount when close to the starting point, and gradually adapting when transitioning to the end point). This avoids trajectory abrupt changes and stuttering caused by fixed correction amounts, and ensures the smoothness and continuity of the galvanometer motion.

[0059] Based on the target trajectory information and the laser focusing requirements, Z-axis driving data is obtained, which is used to focus the laser at different positions. It is understandable that the Z-axis drive motor is used to drive the focusing adjustment mechanism to ensure that processing points at different heights and positions can obtain clear focus. In this solution, the coordinate information of the target trajectory on the working plane can be obtained by the trajectory X-axis deflection angle sequence and the trajectory Y-axis deflection angle sequence. Based on this, the path length of the laser from the focusing adjustment mechanism to the working plane can be obtained by using the distance between the working plane and the focusing adjustment mechanism and the Pythagorean theorem. For those skilled in the art, knowing the path length of the light beam and adjusting the focus of the light beam so that the focus is exactly located on the working plane is a conventional technical means, so it will not be described in detail here.

[0060] The galvanometer drive control is realized based on the trajectory X-axis deflection angle sequence, trajectory Y-axis deflection angle sequence, and Z-axis drive data.

[0061] Reference Figure 5 As shown, further, combining the above-mentioned galvanometer drive control method based on deflection synchronization analysis, a galvanometer drive control system based on deflection synchronization analysis is proposed, including: The main control module is used to fit the curve equation according to the set of X-axis feature points, obtain the displacement influence coefficient, obtain the initial deflection correction amount based on the target trajectory information based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, obtain the trajectory X-axis deflection angle sequence based on the target trajectory information, and obtain the Z-axis drive data based on the target trajectory information and laser focusing requirements. The information acquisition module is used to acquire data from the galvanometer drive system, acquire mechanical structure parameters, acquire target trajectory information, and acquire working plane information based on the galvanometer drive system data. The error amplification module is used to take the intersection of the X-axis mapping line and the Y-axis reference line as the planar displacement reference point, and map the planar displacement reference point to the working plane according to the working plane information to obtain the galvanometer driving reference position. With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, a galvanometer driving coordinate system is constructed, and the Y-axis angle interval set is obtained based on the X-axis deflection distortion analysis. The display module interacts with the main control module and is used to output and display the reference position of the galvanometer drive, the displacement influence coefficient, the trajectory X-axis deflection angle sequence, the trajectory Y-axis deflection angle sequence, and the Z-axis drive data.

[0062] The main control module specifically includes: The control unit is used to obtain the initial deflection correction amount based on the target trajectory information, according to the trajectory Y-axis deflection angle sequence and displacement influence coefficient; obtain the trajectory X-axis deflection angle sequence based on the target trajectory information, according to the initial deflection correction amount and the target trajectory information; and obtain the Z-axis drive data based on the laser focusing requirements according to the target trajectory information. An information receiving unit interacts with an information acquisition module and an error amplification module to receive data and transmit it to a displacement correction unit. The displacement correction unit is used to fit the curve equation based on the X-axis feature point set, taking the deflection angle of the Y-axis drive motor as the input and the ratio of the difference between the X-axis feature points and the first feature point to the abscissa of the first feature point as the output, to obtain the displacement influence coefficient.

[0063] The information acquisition module specifically includes: The first acquisition unit is used to acquire galvanometer drive system data, which includes axial drive motor parameters, and to acquire mechanical structure parameters based on the galvanometer drive system data. The second acquisition unit is used to acquire target trajectory information, which includes coordinate position data of each point on the trajectory, and to acquire working plane information.

[0064] The error amplification module specifically includes: An error analysis unit is used to take the intersection of the X-axis mapping line and the Y-axis reference line as the planar displacement reference point, and map the planar displacement reference point to the working plane according to the working plane information to obtain the galvanometer drive reference position. The feature analysis unit is used to construct a galvanometer driving coordinate system with the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, and to obtain the Y-axis angle interval set based on the X-axis deflection distortion analysis.

[0065] In summary, the advantages of this invention are as follows: by constructing a galvanometer drive coordinate system and determining the reference position through the center position of the motor shaft, precise spatial positioning of the galvanometer motion is achieved, providing a unified spatial basis for subsequent multi-axis deflection synchronous control; by fitting the curve equation, the displacement influence coefficient is obtained, realizing the quantitative characterization of multi-axis coupling interference; by splitting the characteristic target trajectory through extreme points and calculating the initial deflection correction in segments, the correction efficiency is improved, ensuring the stability and reliability of the galvanometer drive control.

[0066] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection claimed by the appended claims and their equivalents is defined.

Claims

1. A galvanometer drive control method based on deflection synchronization analysis, characterized in that, include: Acquire data from the galvanometer drive system, which includes parameters of the axial drive motor, including an X-axis drive motor, a Y-axis drive motor, and a Z-axis drive motor. Based on the data from the galvanometer drive system, obtain the galvanometer drive reference position and displacement influence coefficient; Obtain target trajectory information, which includes coordinate position data of each point on the trajectory; Based on the target trajectory information, the ordinates of the trajectory are sorted according to the target trajectory order to obtain the trajectory Y-axis displacement sequence; Based on the trajectory Y-axis displacement sequence, and using the position and angle transformation in the galvanometer driving system, the trajectory Y-axis deflection angle sequence is obtained; Based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, the initial deflection correction amount is obtained based on the target trajectory information; Based on the initial deflection correction amount and the target trajectory information, the trajectory X-axis deflection angle sequence is obtained; Based on the target trajectory information and the laser focusing requirements, Z-axis driving data is obtained, which is used to focus the laser at different positions. The galvanometer drive control is realized based on the trajectory X-axis deflection angle sequence, trajectory Y-axis deflection angle sequence, and Z-axis drive data.

2. The galvanometer drive control method based on deflection synchronization analysis according to claim 1, characterized in that, The step of obtaining the galvanometer driving reference position and displacement influence coefficient based on the galvanometer driving system data specifically includes: Based on the data from the galvanometer drive system, mechanical structure parameters are obtained, including the center position of the X-axis motor shaft and the center position of the Y-axis motor. Using the center position of the X-axis motor shaft as a reference, draw the X-axis reference line along the X-axis motor shaft direction; using the center position of the Y-axis motor shaft as a reference, draw the Y-axis reference line along the Y-axis motor shaft direction. Based on spatial geometric analysis and according to the requirements of galvanometer driving, the X-axis reference line and the Y-axis reference line should be perpendicular to each other. Based on the Y-axis reference line, a Y-axis reference plane parallel to the X-axis reference line is constructed. Map the X-axis baseline parallel to the Y-axis baseline to obtain the X-axis mapping line; The intersection of the X-axis mapping line and the Y-axis baseline is taken as the plane displacement reference point; Obtain work plane information; Based on the working plane information, the planar displacement reference point is mapped to the working plane to obtain the galvanometer driving reference position; The displacement influence coefficient is obtained based on the reference position of the galvanometer drive.

3. The galvanometer drive control method based on deflection synchronization analysis according to claim 2, characterized in that, The step of obtaining the displacement influence coefficient based on the galvanometer driving reference position specifically includes: Based on the data from the galvanometer drive system, obtain the rated deflection range of the X-axis and the rated deflection range of the Y-axis; Based on the rated deflection range of the X-axis and the rated deflection range of the Y-axis, the X-axis drive motor and the Y-axis drive motor are driven to obtain the working point of the galvanometer, which represents the position of the galvanometer laser on the working plane; Adjust the X-axis and Y-axis deflection angles of the galvanometer drive system until the galvanometer working point coincides with the galvanometer drive reference position, and obtain the reference state of the galvanometer drive system. With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, a galvanometer driving coordinate system is constructed. The X-axis direction of the galvanometer driving coordinate system is parallel to the Y-axis reference line, and the Y-axis direction is perpendicular to the Y-axis reference line. Based on X-axis deflection distortion analysis, obtain the Y-axis angle interval set; Based on the positive X-axis of the galvanometer-driven coordinate system, the X-axis drive motor is deflected until the maximum deflection angle is reached; Keeping the maximum positive deflection angle of the X-axis constant, the Y-axis drive motor is deflected with an angle interval set to obtain the X-axis feature point set, which represents the working point of the galvanometer after each deflection of the Y-axis drive motor. Obtain the first feature point; Based on the set of X-axis feature points, the deflection angle of the Y-axis drive motor is used as the input, and the ratio of the difference between the x-axis feature points and the first feature point to the x-axis feature point is used as the output. The curve equation is fitted to obtain the displacement influence coefficient, which includes the displacement influence of different Y-axis deflection angles on the X-axis drive.

4. The galvanometer drive control method based on deflection synchronization analysis according to claim 3, characterized in that, The method for obtaining the Y-axis angle interval set based on X-axis deflection distortion analysis specifically includes: Based on the reference state of the galvanometer drive system, and taking the positive X-axis of the galvanometer drive coordinate system as the basis, the X-axis drive motor is deflected until the maximum deflection angle is reached. The working point of the galvanometer at this time is taken as the first feature point of the X-axis. Keeping the maximum deflection angle of the positive X-axis unchanged, the Y-axis drive motor is deflected based on the positive Y-axis of the galvanometer drive coordinate system until the maximum deflection angle is reached. The working point of the galvanometer at this time is taken as the second feature point of the X-axis. The difference in the x-coordinate between the second feature point on the X-axis and the first feature point on the X-axis is taken as the X-axis deviation value. Based on the accuracy requirements of the galvanometer, obtain the maximum displacement deviation value; The ratio of the X-axis deviation value to the maximum displacement deviation value is used as the gradient division value; The difference in the ordinate of the second feature point on the X-axis and the first feature point on the X-axis is used as the displacement value on the Y-axis. Based on the gradient division values, the Y-axis displacement values ​​are divided to obtain displacement interval information; Based on the Y-axis displacement and angle mapping relationship in the galvanometer drive system data, and based on the displacement interval information, a set of Y-axis angle intervals is obtained, which includes the deflection angle corresponding to each Y-axis displacement interval.

5. The galvanometer drive control method based on deflection synchronization analysis according to claim 4, characterized in that, The step of obtaining the initial deflection correction based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, and based on the target trajectory information, specifically includes: By mapping the trajectory Y-axis displacement sequence to the trajectory Y-axis deflection angle sequence, the Y-axis displacement angle matching information is obtained. Based on the reference position driven by the galvanometer, the trajectory Y-axis displacement sequence is divided according to the Y-axis displacement value to obtain the trajectory Y-axis sub-sequence; Based on the target trajectory corresponding to each trajectory Y-axis subsequence, the extreme points of the target trajectory are obtained using the galvanometer-driven coordinate system. The target trajectory is divided into subsequences corresponding to each trajectory Y-axis based on the extreme points of the target trajectory, and the feature target trajectory is obtained. Based on the characteristic target trajectory, obtain the characteristic position data of each segment of the characteristic target trajectory, wherein the characteristic position includes the start position and the end position of the characteristic target trajectory; Based on the feature position data of each feature target trajectory segment, obtain the initial deflection correction amount of that feature target trajectory segment; Specifically, the initial deflection correction amount is: ； In the formula, This is the initial correction amount for the deflection. Indicates the first The starting point correction amount of the segment feature target trajectory. Indicates the first The endpoint correction amount of the segment feature target trajectory. Indicates the first The corrected x-coordinate of the feature position of the segment feature target trajectory. Indicates the first The x-coordinate of the feature position of the target trajectory segment. Indicates the first The displacement influence coefficient of the segment feature target trajectory. Indicates the first The Y-axis deflection angle corresponding to the ordinate of the characteristic position of the segment target trajectory.

6. The galvanometer drive control method based on deflection synchronization analysis according to claim 5, characterized in that, The step of obtaining the trajectory X-axis deflection angle sequence based on the initial deflection correction amount and the target trajectory information specifically includes: Based on the initial deflection correction, obtain the initial deflection correction for each point in each segment of the target trajectory. Based on the target trajectory information, the horizontal coordinates of the trajectory are sorted according to the target trajectory order to obtain the trajectory X-axis displacement sequence; Based on the initial deflection correction and the trajectory X-axis displacement sequence, the abscissa of each point in each segment of the feature target trajectory is corrected to obtain the trajectory X-axis correction coordinate sequence. Based on the trajectory X-axis corrected coordinate sequence, and using the position angle transformation in the galvanometer driving system, the trajectory X-axis deflection angle sequence is obtained; Specifically, the trajectory X-axis correction coordinate sequence is as follows: ； In the formula, Indicates the first The first segment of the characteristic target trajectory Corrected x-coordinates of each point Indicates the first The first segment of the characteristic target trajectory The x-coordinates of the points Indicates the first The first segment of the characteristic target trajectory The point and the first The trajectory length of the starting point of the segment feature target trajectory. Indicates the first The length of the segment feature target trajectory, This is the initial correction amount for the deflection. Indicates the first The starting point correction amount of the segment feature target trajectory.

7. A galvanometer drive control system based on deflection synchronization analysis, used to implement the control method as described in any one of claims 1-6, characterized in that, include: The main control module is used to fit the curve equation according to the set of X-axis feature points, obtain the displacement influence coefficient, obtain the initial deflection correction amount based on the target trajectory information based on the trajectory Y-axis deflection angle sequence and displacement influence coefficient, obtain the trajectory X-axis deflection angle sequence based on the target trajectory information, and obtain the Z-axis drive data based on the target trajectory information and laser focusing requirements. The information acquisition module is used to acquire data from the galvanometer drive system, acquire mechanical structure parameters, acquire target trajectory information, and acquire working plane information based on the galvanometer drive system data. The error amplification module is used to take the intersection of the X-axis mapping line and the Y-axis reference line as the planar displacement reference point, and map the planar displacement reference point to the working plane according to the working plane information to obtain the galvanometer driving reference position. With the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, a galvanometer driving coordinate system is constructed, and the Y-axis angle interval set is obtained based on the X-axis deflection distortion analysis. The display module interacts with the main control module and is used to output and display the reference position of the galvanometer drive, the displacement influence coefficient, the trajectory X-axis deflection angle sequence, the trajectory Y-axis deflection angle sequence, and the Z-axis drive data.

8. A galvanometer drive control system based on deflection synchronization analysis according to claim 7, characterized in that, The main control module specifically includes: The control unit is used to obtain the initial deflection correction amount based on the target trajectory information, according to the trajectory Y-axis deflection angle sequence and displacement influence coefficient; obtain the trajectory X-axis deflection angle sequence based on the target trajectory information, according to the initial deflection correction amount and the target trajectory information; and obtain the Z-axis drive data based on the laser focusing requirements according to the target trajectory information. An information receiving unit interacts with an information acquisition module and an error amplification module to receive data and transmit it to a displacement correction unit. The displacement correction unit is used to fit the curve equation based on the X-axis feature point set, taking the deflection angle of the Y-axis drive motor as the input and the ratio of the difference between the X-axis feature points and the first feature point to the abscissa of the first feature point as the output, to obtain the displacement influence coefficient.

9. A galvanometer drive control system based on deflection synchronization analysis according to claim 7, characterized in that, The information acquisition module specifically includes: The first acquisition unit is used to acquire galvanometer drive system data, which includes axial drive motor parameters, and to acquire mechanical structure parameters based on the galvanometer drive system data. The second acquisition unit is used to acquire target trajectory information, which includes coordinate position data of each point on the trajectory, and to acquire working plane information.

10. A galvanometer drive control system based on deflection synchronization analysis according to claim 7, characterized in that, The error amplification module specifically includes: An error analysis unit is used to take the intersection of the X-axis mapping line and the Y-axis reference line as the planar displacement reference point, and map the planar displacement reference point to the working plane according to the working plane information to obtain the galvanometer drive reference position. The feature analysis unit is used to construct a galvanometer driving coordinate system with the galvanometer driving reference position as the origin and the Y-axis reference line as the basis, and to obtain the Y-axis angle interval set based on the X-axis deflection distortion analysis.

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