AGV-based equipment maintenance method and system, computer and storage equipment

Abstract

The invention provides an AGV-based equipment maintenance method and system, a computer and a storage medium, and the method comprises the steps: generating an equipment environment map, and associating an equipment code of equipment to an actual equipment position; acquiring real-time device states of the plurality of devices; acquiring an alarm information table, if the real-time equipment state is a real-time alarm state, selecting the equipment as alarm equipment, and extracting an alarm processing mode and alarm processing time from the alarm information table; if the alarm processing mode is machine end processing, issuing an alarm processing task to the manned AGV within the alarm processing time; and based on the equipment environment map and the equipment number, selecting an alarm equipment position, and according to the alarm equipment position, planning a moving path for the manned AGV so as to carry an engineer to the alarm equipment for maintenance through the manned AGV. Through the method, the efficiency of responding and processing the equipment alarm in the flow line production process can be improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to an AGV-based equipment maintenance method, system, computer, and storage device. Background Technology

[0002] In semiconductor manufacturing, automated production lines are widely used. These lines contain a large number of devices, and when problems occur in various devices or work steps, timely manual intervention is required.

[0003] Traditional equipment handling methods suffer from slow response speed and low efficiency. Existing technologies typically combine automated mobile devices to reach the problem location for equipment handling, such as using AGVs to dock with production equipment or using AGVs to automatically transport materials.

[0004] However, semiconductor equipment is highly automated and complex, requiring manual intervention to handle equipment problems. It is difficult to solve problems through the interaction between automated mobile devices and the equipment. Furthermore, semiconductor production lines have a large number of devices and a wide variety of problems, resulting in low efficiency in handling equipment problems and high labor and time costs. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this invention is to provide an AGV-based equipment maintenance method, system, computer and storage device, which aims to solve the problem of low efficiency in handling equipment problems in semiconductor production lines in the prior art.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solution: An AGV-based equipment maintenance method includes the following steps: Scan the on-site environment to generate a device environment map. Several devices are set up in the on-site environment. Scan the several devices to generate several actual device locations in the device environment map. Associate the device codes of the devices with the actual device locations. Obtain the real-time device status of several of the aforementioned devices; Obtain the alarm information table. If the real-time device status is a real-time alarm status, select the device as an alarm device and extract the alarm handling method and alarm handling time corresponding to the real-time alarm status from the alarm information table. If the alarm handling method is machine-side handling, then an alarm handling task is issued to the manned AGV during the alarm handling time to start the manned AGV; Based on the equipment environment map and the equipment number of the alarm device, the alarm device location is selected from several actual equipment locations, and a movement path is planned for the personnel-carrying AGV according to the alarm device location, so as to transport engineering personnel to the alarm device for maintenance by the personnel-carrying AGV.

[0007] Furthermore, after the step of obtaining the real-time device status of the plurality of devices, the method further includes: Several device display frames are generated based on several device numbers, and color attributes are assigned to the device display frames based on the real-time device status to form a background display diagram of the real-time device status.

[0008] Furthermore, before the steps of obtaining the alarm information table, selecting the device as the alarm device if the real-time device status is a real-time alarm status, and extracting the alarm handling method and alarm handling time corresponding to the real-time alarm status from the alarm information table, the method further includes: A number of historical alarm states are obtained, and a number of historical processing schemes are obtained based on the number of historical alarm states. The alarm processing time and alarm processing method are extracted from the historical processing schemes. An alarm information table is formed by combining the number of historical alarm states, the number of alarm processing times corresponding to the number of historical alarm states, and the number of alarm processing methods.

[0009] Furthermore, after obtaining the alarm information table, selecting the device as the alarm device if the real-time device status is a real-time alarm status, and extracting the alarm handling method and alarm handling time corresponding to the real-time alarm status from the alarm information table, the method further includes: If the real-time equipment status is a consumable replacement status, then it is determined whether the real-time operation steps of the equipment are in a risky step, and the risky steps include sorting steps, grinding steps and cutting steps; If the real-time operation step of the device is in the risky step, a consumable processing task is issued to the manned AGV to start the manned AGV.

[0010] Furthermore, if the alarm handling method is machine-side processing, after the step of issuing an alarm handling task to the manned AGV within the alarm handling time to activate the manned AGV, the method further includes: If the alarm handling method is remote handling, then the alarm device will be remotely maintained during the alarm time to deactivate the alarm.

[0011] Furthermore, after selecting the alarm device location from several actual device locations based on the equipment environment map and the device number of the alarm device, and planning a movement path for the personnel-carrying AGV according to the alarm device location, so as to transport engineering personnel to the alarm device for maintenance by the personnel-carrying AGV, the method further includes: Stop the operation of the alarm device; The updated device status of the alarm device is obtained, and a color attribute is assigned to the device display box based on the updated device status to form an updated device status background display image, and the updated device status background display image is mapped to the user interface; The alarm status is updated to determine whether it is cleared. If the alarm is cleared, the alarm device is restored to operation.

[0012] An AGV-based equipment maintenance system, employing the AGV-based equipment maintenance method described in the above technical solution, the system comprising: The scanning module is used to scan the on-site environment and generate a device environment map. Several devices are set in the on-site environment. The scanning of several devices generates several actual device locations in the device environment map, and the device codes of the devices are associated with the actual device locations. The acquisition module is used to acquire the real-time device status of several of the devices; The first judgment module is used to obtain the alarm information table. If the real-time device status is a real-time alarm status, the device is selected as an alarm device, and the alarm handling method and alarm handling time corresponding to the real-time alarm status are extracted from the alarm information table. The second judgment module is used to issue an alarm processing task to the manned AGV within the alarm processing time if the alarm processing method is machine-side processing, so as to start the manned AGV. The planning module is used to select the location of the alarm device from several actual device locations based on the equipment environment map and the device number of the alarm device, and plan a movement path for the manned AGV according to the location of the alarm device, so as to transport engineering personnel to the alarm device for maintenance by the manned AGV.

[0013] A computer includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the AGV-based equipment maintenance method described in the above technical solutions.

[0014] A storage medium storing a computer program thereon, which, when executed by a processor, implements the AGV-based equipment maintenance method as described in the above technical solution.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: by scanning all the equipment to obtain an overall equipment environment map of the production line, the equipment number is pre-associated with the real-time equipment location, and the real-time equipment status of all the equipment is collected at regular intervals to continuously monitor equipment status information and promptly detect equipment problems. An alarm information table is pre-built, and when a real-time alarm status is collected, the problem type of the equipment is quickly identified by comparing the real-time alarm status with the historical alarm status. The processing method and timeliness of problem handling are obtained from the alarm information table, thereby promptly driving the manned AGV to transport engineering personnel to the location of the problematic equipment. This significantly saves personnel movement time on the production site and enables automatic planning of movement paths and automatic acquisition of corresponding historical processing solutions, helping engineering personnel to quickly handle problems. It also provides safety protection for engineering personnel while handling problems, and promptly collects and updates the status after problem handling, visually mapping it to the user interface, improving the efficiency and automation of handling a large number of devices. Attached Figure Description

[0016] Figure 1 This is a flowchart of the AGV-based equipment maintenance method in the first embodiment of the present invention; Figure 2 This is a structural block diagram of the AGV-based equipment maintenance system in the second embodiment of the present invention; The following detailed description, in conjunction with the accompanying drawings, will further illustrate the present invention. Detailed Implementation

[0017] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of the invention are illustrated in the drawings. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

[0018] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0019] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0020] Please see Figure 1 The AGV-based equipment maintenance method in the first embodiment of the present invention includes the following steps: Step S10: Scan the on-site environment and generate a device environment map. Several devices are set up in the on-site environment. Scan the several devices to generate several actual device locations in the device environment map. Associate the device codes of the devices with the actual device locations. Preferably, a lidar or visual sensor is used to scan the environment to generate an environment map of the device.

[0021] Step S20: Obtain the real-time device status of several of the devices; Preferably, the real-time device status is obtained based on a first frequency. Specifically, the server obtains real-time status data once per second, and the data is retrieved using the POST method. The real-time status data has a request header and a fixed parameter format. The real-time device status includes production status, waiting for materials status, real-time alarm status, consumable replacement status, requiring engineering support status, maintenance status, and shutdown status. Each real-time device status is represented by a corresponding status code, which exists in the real-time status data. The real-time alarm status is further associated with more alarm types through alarm codes.

[0022] Following step S20, the method further includes: S210: Generate several device display frames based on several device numbers, and assign color attributes to the device display frames based on the real-time device status to form a real-time device status background display diagram.

[0023] Preferably, each of the device display boxes represents one device, and all devices in the production line can be represented in the diagram. The device display box is a square with the device code marked in the middle. The status of the device can be intuitively understood according to the different colors in the device display box, which is beneficial to make the background information of the device processing more visual and intelligent. Specifically, the alarm status is set to red to make it more eye-catching.

[0024] Step S30: Obtain the alarm information table. If the real-time device status is a real-time alarm status, select the device as the alarm device and extract the alarm processing method and alarm processing time corresponding to the real-time alarm status from the alarm information table. Understandably, when the real-time alarm status is collected, the problem type of the device can be quickly identified by comparing it with the alarm information table, and the processing method and timeliness of the processing can be obtained from it, which is beneficial to greatly improve the speed and efficiency of processing device problems.

[0025] Before step S30, the method further includes: S310: Obtain several historical alarm states, obtain several historical processing schemes based on the several historical alarm states, extract alarm processing time and alarm processing method from the historical processing schemes, and form an alarm information table by combining the several historical alarm states, the several alarm processing times corresponding to the several historical alarm states, and the several alarm processing methods.

[0026] Preferably, the historical alarm status records the reasons for the alarm in detail, such as "Wafer continuous positioning NG alarm", "Automatic reference point feature scanning failure", "Void matching terrain failure, please check wafer status", "First die search failure", etc. Based on the accumulated processing solutions, it is determined whether the problem requires personnel to go to the machine site for processing, and the optimal processing time for the problem is determined. For example, the alarm processing time corresponding to "Wafer continuous positioning NG alarm" is 12 seconds, the alarm processing time corresponding to "Automatic reference point feature scanning failure" is 2 minutes and 27 seconds, the alarm processing time corresponding to "Void matching terrain failure, please check wafer status" is 2 minutes and 27 seconds, and the alarm processing time corresponding to "First die search failure" is 31 seconds. It can be understood that constructing the alarm information table is beneficial to ensuring that staff can solve problems in a timely and efficient manner.

[0027] Following step S30, the method further includes: S330: If the real-time equipment status is a consumable replacement status, then determine whether the real-time operation steps of the equipment are in a risky step, the risky steps include sorting steps, grinding steps and cutting steps; S340: If the real-time operation step of the device is in the risk step, a consumable processing task is issued to the manned AGV to start the manned AGV.

[0028] Preferably, for machines that are in critical steps and require consumable replacement, personnel must arrive at the machine to handle the issue. The AGV can not only transport personnel but also help personnel move consumables more efficiently. For complex semiconductor equipment, if consumables responsible for different operational steps encounter problems, and the equipment in the risky step requires consumable replacement, its status information can also be added to the alarm information table. Based on historical experience in handling such problems, corresponding processing methods and processing times can be set to quickly obtain solutions through the alarm information table, which is beneficial for efficiently and automatically solving equipment problems.

[0029] Step S40: If the alarm handling method is machine-side processing, then during the alarm handling time, an alarm handling task is issued to the manned AGV to start the manned AGV; Understandably, timely activation of the manned AGV allows engineers to be transported to the location of the malfunctioning equipment in a timely manner, significantly saving personnel movement time on the production site.

[0030] Following step S40, the method further includes: S410: If the alarm handling method is remote handling, then remote maintenance is performed on the alarm device remotely during the alarm time to clear the alarm.

[0031] Step S50: Based on the equipment environment map and the equipment number of the alarm device, select the alarm device location from several actual equipment locations, and plan a movement path for the manned AGV according to the alarm device location, so as to transport engineering personnel to the alarm device for maintenance by the manned AGV.

[0032] Understandably, the automatic planning of movement paths solves the problems of time-consuming pathfinding for engineers and lengthy walking paths, further improving the processing efficiency of the equipment.

[0033] Following step S50, the method further includes: S510: Stop the operation of the alarm device; S520: Obtain the updated device status of the alarm device, assign color attributes to the device display box based on the updated device status to form an updated device status background display image, and map the updated device status background display image to the user interface; S530: Determine whether the alarm is cleared based on the updated device status. If the alarm is cleared, restore the operation of the alarm device.

[0034] Understandably, this provides safety protection for engineers while they handle problems, collects and updates the status in a timely manner after the problem is resolved, and visualizes it on the user interface, thereby improving the efficiency and automation of handling a large number of devices.

[0035] Please see Figure 2 The AGV-based equipment maintenance system in the second embodiment of the present invention applies the AGV-based equipment maintenance method described in the first embodiment above, and the system includes: The scanning module 10 is used to scan the on-site environment and generate a device environment map. Several devices are set in the on-site environment. The scanning of several devices generates several actual device locations in the device environment map, and the device codes of the devices are associated with the actual device locations. The acquisition module 20 is used to acquire the real-time device status of several of the devices; The acquisition module 20 includes: The first unit is used to generate several device display frames based on several device numbers, and to assign color attributes to the device display frames based on the real-time device status, so as to form a real-time device status background display diagram.

[0036] The first judgment module 30 is used to obtain an alarm information table. If the real-time device status is a real-time alarm status, the device is selected as an alarm device, and the alarm processing method and alarm processing time corresponding to the real-time alarm status are extracted from the alarm information table. The first judgment module 30 includes: The second unit is used to obtain several historical alarm states, obtain several historical processing schemes based on the several historical alarm states, extract alarm processing time and alarm processing method from the historical processing schemes, and form an alarm information table by combining the several historical alarm states, the several alarm processing times corresponding to the several historical alarm states, and the several alarm processing methods.

[0037] The third unit is used to determine whether the real-time operation steps of the equipment are in a risky step if the real-time equipment status is a consumable replacement status. The risky steps include sorting steps, grinding steps and cutting steps. The fourth unit is used to issue a consumable processing task to the manned AGV to start the manned AGV if the real-time operation step of the device is in the risk step.

[0038] The second judgment module 40 is used to issue an alarm processing task to the manned AGV within the alarm processing time if the alarm processing method is machine-side processing, so as to start the manned AGV. The second judgment module 40 includes: The fifth unit is used to perform remote maintenance on the alarm device during the alarm time if the alarm processing method is remote processing, so as to clear the alarm.

[0039] The planning module 50 is used to select the location of the alarm device from several actual device locations based on the equipment environment map and the device number of the alarm device, and to plan a movement path for the manned AGV according to the location of the alarm device, so as to transport engineering personnel to the alarm device for maintenance by the manned AGV.

[0040] The planning module 50 includes: The sixth unit is used to stop the operation of the alarm device; The seventh unit is used to obtain the updated device status of the alarm device, assign color attributes to the device display box based on the updated device status to form an updated device status background display image, and map the updated device status background display image to the user interface; The eighth unit is used to determine whether the alarm has been cleared based on the status of the updated device. If the alarm has been cleared, the operation of the alarm device is restored.

[0041] The third embodiment of the present invention provides a computer, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the AGV-based equipment maintenance method as described in the first embodiment.

[0042] The fourth embodiment of the present invention provides a storage medium on which a computer program is stored, which, when executed by a processor, implements the AGV-based equipment maintenance method as described in the first embodiment.

[0043] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0044] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A method for equipment maintenance based on AGV, characterized in that, Includes the following steps: Scan the on-site environment to generate a device environment map. Several devices are set up in the on-site environment. Scan the several devices to generate several actual device locations in the device environment map. Associate the device codes of the devices with the actual device locations. Obtain the real-time device status of several of the aforementioned devices; Obtain the alarm information table. If the real-time device status is a real-time alarm status, select the device as an alarm device and extract the alarm handling method and alarm handling time corresponding to the real-time alarm status from the alarm information table. If the alarm handling method is machine-side handling, then an alarm handling task is issued to the manned AGV during the alarm handling time to start the manned AGV; Based on the equipment environment map and the equipment number of the alarm device, the alarm device location is selected from several actual equipment locations, and a movement path is planned for the personnel-carrying AGV according to the alarm device location, so as to transport engineering personnel to the alarm device for maintenance by the personnel-carrying AGV.

2. The AGV-based equipment maintenance method according to claim 1, characterized in that, Following the step of obtaining the real-time device status of the plurality of devices, the method further includes: Several device display frames are generated based on several device numbers, and color attributes are assigned to the device display frames based on the real-time device status to form a background display diagram of the real-time device status.

3. The AGV-based equipment maintenance method according to claim 1, characterized in that, The steps for obtaining the alarm information table include: A number of historical alarm states are obtained, and a number of historical processing schemes are obtained based on the number of historical alarm states. The alarm processing time and alarm processing method are extracted from the historical processing schemes. An alarm information table is formed by combining the number of historical alarm states, the number of alarm processing times corresponding to the number of historical alarm states, and the number of alarm processing methods.

4. The AGV-based equipment maintenance method according to claim 1, characterized in that, After the steps of selecting the device as an alarm device and retrieving the alarm handling method and alarm handling time corresponding to the real-time alarm status from the alarm information table if the real-time device status is a real-time alarm status, the method further includes: If the real-time equipment status is a consumable replacement status, then it is determined whether the real-time operation steps of the equipment are in a risky step, and the risky steps include sorting steps, grinding steps and cutting steps; If the real-time operation step of the device is in the risky step, a consumable processing task is issued to the manned AGV to start the manned AGV.

5. The AGV-based equipment maintenance method according to claim 1, characterized in that, If the alarm handling method is machine-side processing, then after the step of issuing an alarm handling task to the manned AGV within the alarm handling time to activate the manned AGV, the method further includes: If the alarm handling method is remote handling, then the alarm device will be remotely maintained during the alarm time to deactivate the alarm.

6. The AGV-based equipment maintenance method according to claim 2, characterized in that, After the steps of selecting an alarm device location from several actual device locations based on the equipment environment map and the device number of the alarm device, and planning a movement path for the personnel-carrying AGV according to the alarm device location, so as to transport engineering personnel to the alarm device for maintenance by the personnel-carrying AGV, the method further includes: Stop the operation of the alarm device; The updated device status of the alarm device is obtained, and a color attribute is assigned to the device display box based on the updated device status to form an updated device status background display image, and the updated device status background display image is mapped to the user interface; The alarm status is updated to determine whether it is cleared. If the alarm is cleared, the alarm device is restored to operation.

7. An AGV-based equipment maintenance system, employing the AGV-based equipment maintenance method as described in any one of claims 1 to 6, characterized in that, The system includes: The scanning module is used to scan the on-site environment and generate a device environment map. Several devices are set in the on-site environment. The scanning of several devices generates several actual device locations in the device environment map, and the device codes of the devices are associated with the actual device locations. The acquisition module is used to acquire the real-time device status of several of the devices; The first judgment module is used to obtain the alarm information table. If the real-time device status is a real-time alarm status, the device is selected as an alarm device, and the alarm handling method and alarm handling time corresponding to the real-time alarm status are extracted from the alarm information table. The second judgment module is used to issue an alarm processing task to the manned AGV within the alarm processing time if the alarm processing method is machine-side processing, so as to start the manned AGV. The planning module is used to select the location of the alarm device from several actual device locations based on the equipment environment map and the device number of the alarm device, and plan a movement path for the manned AGV according to the location of the alarm device, so as to transport engineering personnel to the alarm device for maintenance by the manned AGV.

8. A computer comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the AGV-based equipment maintenance method as described in any one of claims 1 to 6.

9. A storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the AGV-based equipment maintenance method as described in any one of claims 1 to 6.

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