Vacuum pump control method, device and system

Abstract

The invention discloses a vacuum pump control method, device and system, and belongs to the technical field of vacuum pumps, the vacuum pump control method comprises the steps that a starting instruction of a vacuum pump is responded, first data of a plurality of first type indexes of the vacuum pump are monitored, and the first type indexes comprise the concentration index of target gas in the environment where the vacuum pump is located; under the condition that the first data meets a first limiting condition, the vacuum pump is started, second data of at least one first type of index of the vacuum pump and third data of at least one second type of index are monitored, and the second type of index comprises an operation state index of the vacuum pump; and based on the second data and the third data, the vacuum pump is controlled, and the operation safety of the vacuum pump can be improved.

Description

Technical Field

[0001] This application relates to the field of vacuum pump technology, specifically to a vacuum pump control method, device, and system. Background Technology

[0002] Vacuum pumps (including vacuum dry pumps and oil-sealed pumps) are key equipment in semiconductor manufacturing, new material synthesis, chemical processes, and new energy production, and are widely used in processes involving gases. In many processes, vacuum systems need to handle or may generate specific gases, such as flammable and explosive gases (e.g., hydrogen, silane, methane, acetylene), toxic gases (e.g., phosphine, arsine, ammonia), corrosive gases (e.g., hydrogen fluoride, chlorine, hydrogen chloride), and asphyxiating gases that may create oxygen-deficient environments (e.g., high concentrations of nitrogen, carbon dioxide). If these specific gases leak due to pump seal failure, pipeline damage, or process abnormalities, it can easily lead to fires, explosions, personnel poisoning, equipment corrosion, or oxygen deficiency.

[0003] Currently, vacuum pump control solutions mainly focus on the mechanical or electrical safety of the vacuum pump itself, which leads to potential safety hazards in the operation of the vacuum pump. Summary of the Invention

[0004] To address the aforementioned technical problems, embodiments of this application provide a vacuum pump control method, apparatus, and system that can improve the operational safety of vacuum pumps.

[0005] Firstly, a vacuum pump control method is provided, comprising the following steps: In response to the start command of the vacuum pump, the system monitors first data of several first-type indicators of the vacuum pump, the first-type indicators including the concentration of the target gas in the environment in which the vacuum pump is located. If the first data meets the first limiting condition, the vacuum pump is started, and the second data of at least one first type indicator of the vacuum pump and the third data of at least one second type indicator are monitored, the second type indicator including the operating status indicator of the vacuum pump. The vacuum pump is controlled based on the second data and the third data.

[0006] In some design embodiments, controlling the vacuum pump based on the second and third data includes: If the second data satisfies the second constraint condition and the third data satisfies the third constraint condition, the vacuum pump continues to operate; If the second data does not meet the second limiting condition, the vacuum pump will be shut down; If the second data satisfies the second constraint condition and the third data does not satisfy the third constraint condition, an operation adjustment operation is performed on the vacuum pump to alleviate or eliminate the abnormal operating state represented by the third data.

[0007] In some design embodiments, the operation of regulating the vacuum pump to alleviate or eliminate the abnormal operating condition characterized by the third data includes: The preset operating parameters of the vacuum pump are reduced by a preset ratio. The preset operating parameters include at least one of power, speed, and current. After performing operational adjustment operations on the vacuum pump to alleviate or eliminate the abnormal operating state characterized by the third data, the method further includes: Monitor the fourth data of the first type of indicator and the fifth data of the second type of indicator; If the fourth data satisfies the second restriction condition and the fifth data satisfies the third restriction condition, the preset operating parameters of the vacuum pump are restored to their original values.

[0008] In some of these design approaches, the third constraint includes: The third data of the second type of indicator of the vacuum pump remains within a preset data range for a preset time period.

[0009] In some of these design approaches, the first constraint includes: The first data of the concentration index of the target gas is less than the concentration threshold.

[0010] In some of these design options, the first type of indicator also includes the cooling medium flow rate of the vacuum pump, and / or the purge medium flow rate within the vacuum pump, the purge medium being used to prevent the target gas from accumulating within the vacuum pump. The first limiting condition also includes: The first data of the cooling medium flow rate index is greater than a first cooling flow rate threshold; and / or The first data of the purge medium flow rate index is greater than the first purge flow rate threshold.

[0011] In some of these design approaches, the method further includes: If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the cooling medium flow rate index is less than or equal to the first cooling flow rate threshold and greater than or equal to the second cooling flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the cooling medium flow rate index is less than the second cooling flow rate threshold, the vacuum pump will not be started. If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the purge medium flow rate index is less than or equal to the first purge flow rate threshold and greater than or equal to the second purge flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the purge medium flow rate index is less than the second purge flow rate threshold, the vacuum pump will not be started.

[0012] In some of these design approaches, the operating status indicators include electrical parameters, temperature parameters, and pressure parameters. The electrical parameters include the vacuum pump's motor current, motor power, and frequency. The temperature parameters include the vacuum pump's pump body bearing temperature, motor winding temperature, and exhaust temperature. The pressure parameters include the vacuum pump's inlet pressure and outlet pressure.

[0013] Secondly, a vacuum pump control device is also provided, the device comprising: The monitoring module is used to respond to the start command of the vacuum pump and monitor the first data of several first type indicators of the vacuum pump, the first type indicators including the concentration of the target gas in the environment where the vacuum pump is located. The startup module is used to start the vacuum pump when the first data meets the first limiting condition, and to monitor the second data of at least one first type indicator of the vacuum pump, and the third data of at least one second type indicator, wherein the second type indicator includes the operating status indicator of the vacuum pump. The control module is used to control the vacuum pump based on the second data and the third data.

[0014] Thirdly, a vacuum pump control system is also provided, the system comprising: The acquisition component is used to acquire data of a first type of indicator and a second type of indicator of the vacuum pump. The first type of indicator includes the concentration of the target gas in the environment where the vacuum pump is located, and the second type of indicator includes the operating status indicator of the vacuum pump. An input component is provided for the user to input commands to turn the vacuum pump on or off. A control component, connected to the vacuum pump, the input component, and the acquisition component, is configured to execute the vacuum pump control method described above.

[0015] Beneficial effects: The vacuum pump control method, device and system of this application monitors the concentration index of the target gas before startup, and simultaneously monitors the concentration index of the target gas and the operating status index of the vacuum pump after startup. Based on the two types of index data, the vacuum pump is controlled in a targeted manner. This overcomes the shortcomings of the prior art, which only focuses on the mechanical or electrical safety of the vacuum pump and ignores the risk of target gas leakage. It avoids safety accidents such as fire, explosion, personnel poisoning, equipment corrosion or environmental hypoxia caused by target gas leakage during the startup stage from the source. It can also comprehensively grasp the operating status of the vacuum pump and the environmental safety status during operation, thus improving the safety of the entire vacuum pump operation process. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram illustrating the application environment of the vacuum pump control method provided in some embodiments of this application; Figure 2 This is a schematic flowchart of a vacuum pump control method provided in some embodiments of this application; Figure 3 This is a schematic diagram of a vacuum pump control system provided in some embodiments of this application; Figure 4 This is another schematic flowchart of a vacuum pump control method provided in some embodiments of this application; Figure 5 This is a schematic diagram of the structure of a vacuum pump control device provided in some embodiments of this application; Figure 6 This is another schematic diagram of a vacuum pump control system provided in some embodiments of this application; Figure 7 This is a schematic diagram of the internal structure of an electronic device provided in some embodiments of this application. Detailed Implementation

[0018] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0020] "A and / or B" includes the following three combinations: A only, B only, and a combination of A and B.

[0021] The use of "applies to" or "configured to" in this application implies open and inclusive language, which does not exclude applicability to or configuration to devices performing additional tasks or steps. Additionally, the use of "based on" implies openness and inclusivity, because processes, steps, calculations, or other actions "based on" one or more of the stated conditions or values ​​may in practice be based on additional conditions or values ​​beyond those stated.

[0022] In this application, the term "exemplary" is used to mean "used as an example, illustration, or description." Any embodiment described as "exemplary" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to make and use this application. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that this application can be made without using these specific details. In other instances, well-known structures and processes are not described in detail to avoid obscuring the description of this application with unnecessary detail. Therefore, this application is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0023] The following describes the relevant content, terms, meanings, technical issues, technical solutions, and beneficial effects involved in the embodiments of this application.

[0024] Vacuum pumps (including vacuum dry pumps and oil-sealed pumps) are widely used in gas-related processes in semiconductors, new energy, and other fields. In many processes, vacuum systems need to handle or may generate specific gases, such as flammable and explosive gases (e.g., hydrogen, silane, methane, acetylene), toxic gases (e.g., phosphine, arsine, ammonia), corrosive gases (e.g., hydrogen fluoride, chlorine, hydrogen chloride), and asphyxiating gases that may create oxygen-deficient environments (e.g., high concentrations of nitrogen, carbon dioxide). If these specific gases leak due to pump seal failure, pipeline damage, or process abnormalities, it can easily lead to fires, explosions, personnel poisoning, equipment corrosion, or oxygen deficiency. This poses significant safety hazards during vacuum pump start-up, shutdown, and operation. Therefore, in addition to conventional parameters such as pressure and temperature, it is necessary to monitor specific gas leaks, motor current, motor power, and cooling water flow rate in real time. These parameters are interconnected, and traditional single-point detection methods are insufficient for a comprehensive risk assessment.

[0025] Existing vacuum pump control schemes have shortcomings in the monitoring and control of target gases (i.e., specific gases) during vacuum pump startup and operation. Specifically: First, during vacuum pump startup, there is a lack of effective means to monitor the concentration of the target gas. When a leak occurs in the pump body or pipeline, the leak or local accumulation cannot be detected in time, leading to safety hazards. Second, during vacuum pump operation, existing safety control and detection strategies only monitor basic parameters such as pressure and temperature, failing to achieve real-time monitoring of the target gas concentration, which also poses safety hazards. Furthermore, the various measurement parameters of the vacuum pump are not independent of each other. Existing vacuum pump control schemes fail to effectively integrate and analyze key operating parameters such as target gas concentration, power, and current, resulting in an inability to comprehensively and systematically assess the vacuum pump's operating status. In addition, existing vacuum pump control schemes directly shut down the vacuum pump if its operation is obstructed or malfunctions. Repeated shutdowns lead to wear and tear on the pump's mechanical components, reduced lifespan of electrical components, and economic losses due to production stoppages.

[0026] To address the aforementioned issues, this application provides a vacuum pump control method, a vacuum pump control device, a vacuum pump control system, an electronic device, a computer-readable storage medium, and a computer program product. In this application, by monitoring the concentration of the target gas before startup and simultaneously monitoring the concentration of the target gas and the vacuum pump's operating status indicators after startup, and by performing targeted control of the vacuum pump based on these two types of data, this overcomes the shortcomings of existing technologies that only focus on the mechanical or electrical safety of the vacuum pump while neglecting the risk of target gas leakage. This not only avoids safety accidents such as fires, explosions, personnel poisoning, equipment corrosion, or environmental oxygen deficiency caused by target gas leakage during startup, but also allows for comprehensive monitoring of the vacuum pump's operating status and environmental safety conditions during operation, thus improving the safety of the entire vacuum pump operation process.

[0027] To better understand the vacuum pump control method, vacuum pump control device, vacuum pump control system, electronic device, computer-readable storage medium, and computer program product provided in the embodiments of this application, the application environment applicable to the embodiments of this application is described below.

[0028] Please see Figure 1 , Figure 1 This diagram illustrates an application environment for a vacuum pump control method provided in an embodiment of this application. As one implementation, the vacuum pump control method provided in this embodiment can be applied to an electronic device. This electronic device can be, for example,... Figure 1 The server 110 shown can be connected to the terminal device 120 via a network. The network serves as a medium for providing a communication link between the server 110 and the terminal device 120. The network can include various connection types, such as wired communication links, wireless communication links, etc., and this embodiment is not limited thereto. Optionally, in other embodiments, the electronic device can also be a smartphone, laptop, etc.

[0029] It should be understood that Figure 1 The server 110, network, and terminal device 120 shown are merely illustrative. Depending on the implementation requirements, any number of servers, networks, and terminal devices can be included. For example, server 110 can be a physical server or a server cluster consisting of multiple servers, and terminal device 120 can be a mobile phone, tablet, desktop computer, laptop computer, smart speaker, smart wearable device, etc. It is understood that embodiments of this application can also allow multiple terminal devices 120 to access server 110 simultaneously.

[0030] In some embodiments, the terminal device 120 may send a vacuum pump control request to the server. After receiving the vacuum pump control request, the server 110 may control the vacuum pump using the vacuum pump control method described in the embodiments of this application.

[0031] As another implementation, the server 110 and the terminal device 120 described in this application embodiment can be integrated, such as the server 110 or the terminal device 120 directly receiving the vacuum pump control request input by the user and controlling the vacuum pump.

[0032] The following detailed description, in conjunction with the accompanying drawings, describes the vacuum pump control method, vacuum pump control device, vacuum pump control system, electronic device, computer-readable storage medium, and computer program product provided in the embodiments of this application. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of embodiments. Although a logical order is shown in the flowcharts, in some cases, the steps shown or described may be performed in a different order than that shown in the drawings.

[0033] On the one hand, this embodiment provides a vacuum pump control method, such as... Figure 2 As shown, the process includes the following steps S201-S203: S201. In response to the start command of the vacuum pump, monitor the first data of several first type indicators of the vacuum pump, wherein the first type indicators include the concentration of the target gas in the environment in which the vacuum pump is located.

[0034] Specifically, when a vacuum pump start command is received from the operator via the human-machine interface, or triggered by a start command for the vacuum pump from the upper-level process control system, the vacuum pump start operation is not executed immediately. Instead, the sensor network associated with the vacuum pump is invoked to collect and acquire first-type data of a first type of indicator. Among these, a core and essential first-type indicator is the concentration of the target gas in the environment in which the vacuum pump is located. The concentration of the target gas can be monitored by gas concentration sensors (e.g., hydrogen sensors, toxic gas detectors, etc.) deployed inside the vacuum pump casing, near the inlet, near the outlet, or at key locations within the process chamber where the vacuum pump is located.

[0035] In this embodiment, the concentration value returned by the gas concentration sensor can be used as the basis for judging the safety of the current environment. This step aims to ensure that there are no safety hazards in the working environment due to leakage or accumulation of the target gas (e.g., flammable and explosive hydrogen, toxic gas, etc.) before the vacuum pump is started, thereby avoiding safety risks such as ignition, explosion, or poisoning from the source.

[0036] S202. If the first data satisfies the first limiting condition, start the vacuum pump and monitor the second data of at least one first type indicator of the vacuum pump, and the third data of at least one second type indicator, wherein the second type indicator includes the operating status indicator of the vacuum pump.

[0037] Specifically, the first data of the target gas concentration is compared with a preset first limit condition. The first limit condition typically refers to the corresponding data falling within one or more safety thresholds, such as requiring the hydrogen concentration to be below its lower explosive limit (LEL) (e.g., 15% LEL). Only when all the first data meet the first limit condition is the environment deemed safe, and a drive signal is then generated and sent to the frequency converter to start the vacuum pump motor, initiating normal operation of the vacuum pump.

[0038] After the vacuum pump starts up and enters the operation phase, the monitoring task does not end, but enters a continuous dual-path parallel monitoring mode: one path continues to monitor at least one first-type indicator (especially the concentration of the target gas), and the data acquired at this time is the second data, used to detect possible new gas leaks during operation in real time; the other path begins to monitor at least one second-type indicator, acquiring the corresponding third data, where the second-type indicator can reflect the operational health status of the vacuum pump itself. This dual-path parallel monitoring mode, by continuously monitoring the concentration of the target gas in the environment where the vacuum pump is located before and after startup, eliminates safety hazards caused by target gas leaks or accumulation throughout the entire life cycle of the vacuum pump; during the operation of the vacuum pump, by simultaneously monitoring the vacuum pump's operating status and environmental safety conditions, the safety of the entire vacuum pump operation process is improved.

[0039] In some embodiments, the first limiting condition includes: a first data point of the concentration index of the target gas is less than a concentration threshold.

[0040] Specifically, the first limiting condition is that, before activation, the real-time value of the target gas concentration index monitored by the gas concentration sensor (i.e., the first data) must be lower than a pre-set safety limit, i.e., the concentration threshold. This concentration threshold is not fixed but is set and adjusted based on the chemical properties of the target gas, safety standards, and risk assessment results of the specific application scenario. For example, when the target gas is hydrogen, the concentration threshold can be set as a percentage of its lower explosive limit; when the target gas is a toxic gas, the concentration threshold can be determined based on its time-weighted average permissible concentration or short-term exposure permissible concentration.

[0041] By setting the first limiting condition, it is ensured that the vacuum pump will not be started in an environment where the target gas has leaked to a dangerous concentration, thereby fundamentally avoiding safety accidents that may be caused by starting sparks, heat or mechanical action that could directly ignite or explode the leaked gas, or lead to the aggravation of the spread of toxic gases.

[0042] In some embodiments, the operating status indicators include electrical parameters, temperature parameters, and pressure parameters. The electrical parameters include the motor current, motor power, and frequency of the vacuum pump; the temperature parameters include the pump body bearing temperature, motor winding temperature, and exhaust temperature of the vacuum pump; and the pressure parameters include the inlet pressure and outlet pressure of the vacuum pump.

[0043] Specifically, electrical parameters reflect the electrical load and energy consumption status of the vacuum pump. These parameters include the motor current, motor power, and frequency. Motor current can be obtained through a current sensor (e.g., a Hall effect sensor). An abnormally high motor current may indicate increased mechanical friction, heavier load, or jamming within the vacuum pump, while a low motor current may suggest transmission failure or no-load operation. Motor power can be obtained through a power meter or calculated from current and voltage. Sustained abnormal fluctuations or deviations from the rated range in motor power are key signals for judging the vacuum pump's efficiency and potential faults (e.g., internal leakage, rotor imbalance). Frequency can be obtained through the feedback signal from the variable frequency drive unit in the vacuum pump or a dedicated frequency sensor. The stability and accuracy of the frequency directly determine the vacuum pump's speed and pumping speed control precision. Abnormal fluctuations or deviations in frequency may indicate malfunction of the variable frequency drive unit, sudden load changes, or disturbances in the control loop. A persistently low frequency may lead to insufficient pumping speed, affecting the process, while an abnormally high frequency may pose a risk of pump overspeed operation.

[0044] Temperature parameters are used to monitor the thermal state of critical components during vacuum pump operation. They serve as a basis for preventing overheating damage and identifying process anomalies. These parameters include the pump body bearing temperature, motor winding temperature, and exhaust temperature. The pump body bearing temperature can be monitored using a temperature sensor installed in the bearing housing. An abnormally high bearing temperature usually indicates poor lubrication, accelerated wear, or assembly problems. The motor winding temperature can be obtained using a temperature sensor embedded in the motor windings. This temperature reflects the motor's heat generation, and monitoring it can help prevent motor burnout due to overload, poor heat dissipation, or insulation aging. The exhaust temperature can be measured at the vacuum pump's exhaust port. It is closely related to the compression process, the properties of the pumped gas, and the cooling effect. Abnormal changes in exhaust temperature may indicate abnormal process gas reactions, cooling system malfunctions, or wear of internal pump components.

[0045] Pressure parameters are used to evaluate the pumping performance of a vacuum pump and the smoothness of the system flow. These parameters include the vacuum pump's inlet and outlet pressures. The inlet pressure, measured at the pump's inlet, reflects the vacuum level of the evacuated container and the flow conditions of the inlet channel. Abnormal fluctuations in the inlet pressure may indicate changes in the process, blockages in the upstream piping, or leaks. The outlet pressure, measured at the pump's exhaust port or outlet piping, reflects the exhaust back pressure. Excessively high outlet pressure can affect the vacuum pump's exhaust capacity and may lead to overheating or damage. This can be caused by blockages in the exhaust pipe, increased resistance in downstream equipment, or a malfunctioning atmospheric release valve.

[0046] By monitoring electrical, temperature, and pressure parameters, multi-parameter monitoring can be achieved, enabling a more comprehensive and accurate diagnosis of the overall operating status of the vacuum pump. This not only identifies mechanical or electrical faults within the vacuum pump itself but also combines ambient gas information to comprehensively assess operational risks.

[0047] S203. Based on the second data and the third data, control the vacuum pump.

[0048] Specifically, in this step, the real-time acquired second data (data related to environmental gas safety) and third data (data related to vacuum pump operation safety) are used as joint inputs for comprehensive logical judgment, and corresponding control commands are output accordingly to manage the operation status of the vacuum pump. This enables the vacuum pump operation control to not only cope with internal mechanical and electrical faults, but also to cope with the risks that may be brought by the external process environment, thus achieving all-round safety protection.

[0049] In some embodiments, controlling the vacuum pump based on the second data and the third data includes steps S2031-S2033: S2031. If the second data satisfies the second restriction condition and the third data satisfies the third restriction condition, the vacuum pump continues to operate.

[0050] Specifically, after the vacuum pump is started, it enters a continuous monitoring and decision-making cycle. In each monitoring cycle, two types of data are acquired and judged in parallel: one type is the second data reflecting the environmental safety status (i.e., the second data corresponding to the first type of indicators containing the concentration of the target gas monitored during operation), and the other type is the third data reflecting the vacuum pump's own operating status (i.e., the third data corresponding to the second type of indicators containing operating status indicators).

[0051] In this embodiment, a second constraint condition is preset for the second data (the second constraint condition may be the same as or different from the first constraint condition) and a third constraint condition is preset for the third data. The vacuum pump is considered to be in a safe and stable operating state if and only if the real-time acquired second data meets the second constraint condition (e.g., the gas concentration remains below a safe threshold) and the third data also meets the third constraint condition (e.g., current, temperature, pressure, etc. are all within their respective normal operating ranges). At this time, the vacuum pump is controlled to maintain its current operating parameters (e.g., speed, power) unchanged, and monitoring continues for the next cycle.

[0052] In some embodiments, the third limiting condition includes: the third data of the second type index of the vacuum pump remains within a preset data range for a preset duration.

[0053] Specifically, the determination of the third constraint condition is not based on a single, instantaneous sampling data, but on a dual judgment of time continuity and data stability, in order to improve the accuracy of state assessment and filter out misjudgments caused by signal noise or instantaneous interference.

[0054] For each monitored second-type indicator (e.g., motor current, pump bearing temperature, inlet pressure, etc.), the real-time collected third data must remain within a preset data range specifically set for that indicator for a continuous preset time period in order to be deemed to meet the third restriction condition.

[0055] The preset data range is set in advance based on the vacuum pump's design parameters, safety operation manual, historical operating data, and process requirements. For example, the normal range for motor current may be set to 80% to 120% of the rated current; the range for pump body bearing temperature may be set to above room temperature but not higher than 75°C, etc.

[0056] The preset duration is set based on the characteristics of the specific parameter, the system response time, and the stability requirements of the process. For example, for rapidly changing electrical parameters (e.g., motor current), the preset duration may be set to 10-30 seconds; for thermal parameters with high inertia (e.g., pump bearing temperature), the preset duration may be set to 1-5 minutes.

[0057] In this embodiment, the indicator is considered to be in a stable and normal state only when every sampled value (or filtered value) of the second type of indicator falls within its normal data range throughout the entire preset time period. This design can avoid interference caused by a single abnormal data point due to instantaneous fluctuations in the power grid, occasional sensor interference, or minor load changes, thereby improving anti-interference capability and reliability.

[0058] S2032. If the second data does not meet the second limiting condition, shut down the vacuum pump.

[0059] Specifically, if the second data no longer meets the second limiting condition (for example, the target gas concentration sensor reading suddenly exceeds the safety threshold, indicating a dangerous gas leak or accumulation during operation), then regardless of whether the third data (data related to the vacuum pump's own operating status) is normal, the highest level of safety protection action—shutting down the vacuum pump—will be immediately triggered. This is because hazardous ambient gases (e.g., risk of combustion, explosion, poisoning, etc.) directly threaten the safety of personnel and equipment, and potential hazards must be stopped immediately without conditions. Therefore, an emergency shutdown signal will be generated, cutting off the drive power to the vacuum pump motor, or executing a rapid shutdown procedure through drive units such as frequency converters to immediately shut down the vacuum pump. Simultaneously, an alarm device can send specific alarm reasons such as "gas concentration exceeds the limit" to prompt operators to take emergency measures.

[0060] S2033. If the second data satisfies the second restriction condition and the third data does not satisfy the third restriction condition, perform an operation adjustment operation on the vacuum pump to alleviate or eliminate the abnormal operating state represented by the third data.

[0061] Specifically, when the second data consistently meets the second constraint (ambient gas safety is assured), but one or more of the third data fail to meet the third constraint (e.g., increased pump bearing temperature, increased motor current, inlet pressure fluctuations), it indicates that the vacuum pump has experienced some performance degradation or malfunction. In this case, instead of a blanket shutdown, an operational adjustment operation is performed. The purpose of this operation is to proactively and tentatively intervene in the operation of the vacuum pump, aiming to alleviate or eliminate the abnormal state characterized by the abnormal third data by changing certain operating conditions or outputs.

[0062] By performing operational adjustment operations on the vacuum pump instead of shutting it down, production interruptions caused by non-urgent anomalies and losses caused by frequent equipment start-ups and shutdowns are avoided.

[0063] In some embodiments, performing an operation adjustment operation on the vacuum pump to alleviate or eliminate the abnormal operating state characterized by the third data includes: reducing the parameter value of a preset operating parameter of the vacuum pump according to a preset ratio, wherein the preset operating parameter includes at least one of power, speed, and current.

[0064] Specifically, when an operational adjustment is required, the set values ​​of one or more key preset operating parameters of the vacuum pump are reduced according to a pre-defined ratio (i.e., preset ratio). These preset operating parameters are selected from at least one of power, speed, and current, and these parameters directly determine the mechanical load and energy consumption level of the vacuum pump. For example, the target speed command or power limit of the motor can be immediately reduced to a fixed percentage (e.g., 80%) of the current value.

[0065] This strategy of reducing load and energy consumption according to a preset ratio aims to quickly and effectively reduce the mechanical stress and thermal load inside the vacuum pump, thereby alleviating the operational abnormalities characterized by third-party data (e.g., excessive temperature, excessive current).

[0066] In some embodiments, after performing operational adjustment operations on the vacuum pump to alleviate or eliminate the abnormal operating state characterized by the third data, the method further includes: monitoring a fourth data point of the first type of indicator and a fifth data point of the second type of indicator; and restoring the parameter values ​​of the preset operating parameters of the vacuum pump when the fourth data point satisfies the second constraint condition and the fifth data point satisfies the third constraint condition.

[0067] Specifically, after the operational adjustment is completed, an observation and recovery phase begins. During this phase, continuous monitoring is conducted: on the one hand, data on the first type of indicators (referred to as the fourth data in this phase) continues to be collected to ensure that environmental safety conditions (i.e., the second limiting condition) are always met; on the other hand, data on the second type of indicators (referred to as the fifth data in this phase) continues to be collected to evaluate the effectiveness of the adjustment operation and determine whether the abnormal operating state of the vacuum pump has been eliminated.

[0068] When the fourth data point continuously meets the second constraint (environmental safety is assured) and the fifth data point also meets the third constraint (vacuum pump operation returns to normal), the anomaly is determined to have been resolved. At this point, a recovery procedure is triggered to restore the previously reduced preset operating parameters (e.g., power, speed, or current) to their original normal values ​​before the adjustment operation or to the new target values ​​set according to process requirements, thereby returning the vacuum pump to its normal full-load or set load operating state.

[0069] In some embodiments, the first type of indicator further includes a cooling medium flow rate indicator of the vacuum pump, and / or a purge medium flow rate indicator within the vacuum pump, the purge medium being used to prevent the target gas from accumulating within the vacuum pump; The first limiting condition further includes: the first data of the cooling medium flow rate index is greater than the first cooling flow rate threshold; and / or the first data of the purging medium flow rate index is greater than the first purging flow rate threshold.

[0070] Specifically, in addition to the concentration of the target gas, the first type of indicators also includes monitoring indicators for the operating status of key auxiliary systems of the vacuum pump. These include: the flow rate of the cooling medium in the vacuum pump, and / or the flow rate of the purge medium within the vacuum pump. Sufficient flow of the cooling medium (usually water or coolant) is a prerequisite for ensuring that the pump body, motor, and other components of the vacuum pump do not overheat and be damaged due to frictional or compressive heat during operation. The continuous introduction of the purge medium (usually an inert gas, such as nitrogen) serves to dilute, replace, and prevent the target gas (especially flammable and explosive gases like hydrogen) from accumulating in the pump chamber or sealed areas, thereby physically preventing the formation of a hazardous gas mixture environment.

[0071] Accordingly, the first constraint also includes quantitative requirements for these extended indicators. Specifically: during the initiation judgment phase, in addition to requiring that the first data of the target gas concentration indicator be less than the concentration threshold, it is also required that the first data of the cooling medium flow rate indicator be greater than a preset first cooling flow rate threshold; and / or, the first data of the purge medium flow rate indicator be greater than a preset first purge flow rate threshold.

[0072] The first cooling flow rate threshold is the minimum safe flow rate determined based on the rated thermal load of the vacuum pump and the design of the cooling system, ensuring sufficient heat dissipation after startup. The first purging flow rate threshold is the minimum effective purging flow rate calculated or empirically set based on the volume of the vacuum pump, the possible gas leakage rate, and the safe dilution factor, ensuring that a safe atmosphere is effectively maintained inside the vacuum pump.

[0073] The overall first constraint is considered satisfied only when all monitored extended indicators (e.g., cooling flow rate, purge flow rate) meet the condition of being greater than the first threshold, and the concentration of the target gas also meets its safety conditions. This design extends safety assurance from monitoring a single ambient gas to verifying the critical auxiliary conditions upon which the vacuum pump depends for normal operation, thereby more comprehensively blocking potential safety risks caused by cooling failure or insufficient purging at the source of startup.

[0074] In some embodiments, the second limiting condition may be the same as or different from the first limiting condition. For example, if the second limiting condition is the same as the first limiting condition, then during the operation of the vacuum pump, the second operating data corresponding to the first type of index meets the second limiting condition. Similarly, the extended indexes (e.g., cooling flow rate, purge flow rate) are required to meet the condition that they are greater than the first threshold, and the concentration index of the target gas also meets its safety condition.

[0075] In some embodiments, the method further includes: If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the cooling medium flow rate index is less than or equal to the first cooling flow rate threshold and greater than or equal to the second cooling flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the cooling medium flow rate index is less than the second cooling flow rate threshold, the vacuum pump will not be started. If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the purge medium flow rate index is less than or equal to the first purge flow rate threshold and greater than or equal to the second purge flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the purge medium flow rate index is less than the second purge flow rate threshold, the vacuum pump will not be started.

[0076] Specifically, this embodiment proposes a graded response mechanism, which sets two levels of safety thresholds for the cooling medium flow rate index and the purging medium flow rate index: a first flow rate threshold (a higher ideal safety value) and a second flow rate threshold (a lower minimum allowable value). Differentiated control strategies are implemented for flow rates in different ranges, thereby improving the flexibility and availability of responding to fluctuations in non-critical auxiliary conditions while ensuring a safety baseline.

[0077] Regarding the cooling medium flow rate, during pre-vacuum pump startup monitoring, if the target gas concentration is confirmed to be safe (first data point is less than the concentration threshold), but monitoring of the cooling medium flow rate reveals that its first data point is between the first and second cooling flow rate thresholds (i.e., the cooling medium flow rate is low but not dangerously low), it is determined that the current cooling capacity, while not optimal, can still support short-term operation or the risk is controllable. In this case, the vacuum pump is allowed to start, but an alarm message (e.g., low cooling flow rate) will be immediately issued to alert operators and prompt them to check the cooling system. This design avoids completely halting production due to a slight deficiency in cooling flow. However, if the monitored cooling medium flow rate is below the second cooling flow rate threshold, it indicates a severe deficiency in cooling capacity, and starting the vacuum pump would pose an overheating risk. In this case, even if the target gas concentration is safe, starting the vacuum pump is prohibited.

[0078] The tiered response logic for the purge medium flow rate is similar to that for the cooling medium flow rate. When the gas concentration is safe and the purge flow rate is between the first and second purge flow rate thresholds, it is considered that although the inert gas purge has not reached the required intensity, it can still play a certain role in dilution and preventing accumulation. Therefore, the vacuum pump is allowed to start and an alarm is issued simultaneously (e.g., purge flow rate is too low) to remind the operator to perform maintenance. If the purge flow rate is lower than the second purge flow rate threshold, it is determined that it can no longer effectively prevent the target gas (e.g., hydrogen) from accumulating in the vacuum. At this time, starting the pump is prohibited to fundamentally eliminate the risk of internal combustion and explosion that may be caused by purge failure.

[0079] In this embodiment, by setting two levels of response—"alarm" and "prohibit startup"—a precise distinction can be made between absolute safety (prohibit startup) and relatively safe and monitorable operation (startup allowed but alarm triggered). This avoids unnecessary production interruptions caused by fluctuations in the non-fatal indicators of the auxiliary system, and ensures that any deviation from the ideal state can be promptly monitored and handled through real-time alarms.

[0080] In some embodiments, the method further includes: If the second data of the target gas concentration index is less than the concentration threshold, and the second data of the cooling medium flow rate index is less than or equal to the first cooling flow rate threshold and greater than or equal to the second cooling flow rate threshold, the vacuum pump continues to run and an alarm message is issued. If the second data of the target gas concentration index is less than the concentration threshold, and the second data of the cooling medium flow rate index is less than the second cooling flow rate threshold, the vacuum pump shall be shut down. If the second data of the target gas concentration index is less than the concentration threshold, and the second data of the purge medium flow rate index is less than or equal to the first purge flow rate threshold and greater than or equal to the second purge flow rate threshold, the vacuum pump continues to run and an alarm message is issued. If the second data of the target gas concentration index is less than the concentration threshold, and the second data of the purge medium flow rate index is less than the second purge flow rate threshold, the vacuum pump shall be shut down.

[0081] Specifically, extending the aforementioned graded response mechanism to the monitoring of vacuum pump operation can achieve continuous safety control throughout the entire cycle from startup to operation. After the vacuum pump starts up and enters the operation phase, the second set of continuously monitored data also includes the concentration of the target gas, the flow rate of the cooling medium, and / or the flow rate of the purging medium.

[0082] This embodiment defines a graded handling strategy that corresponds to the startup phase logic but has different response actions to the possible decrease in cooling medium flow or purge medium flow during operation. Its core is to make a decision between "alarm operation" and "forced shutdown" based on the degree to which the flow deviates from the safety threshold.

[0083] For monitoring the cooling medium flow rate during operation, when the target gas concentration is detected to be safe (second data is less than the concentration threshold), but the cooling medium flow rate is between the first and second cooling flow rate thresholds, it is determined that although the vacuum pump may have an overheating risk, the situation is not critical enough to require immediate shutdown. In this case, the vacuum pump is allowed to continue operating, but an alarm will be triggered simultaneously to warn operators that the cooling system efficiency has decreased and timely intervention is necessary. This strategy maintains production continuity while alerting to risks through alarms. However, once the cooling medium flow rate drops below the second cooling flow rate threshold, it means that the heat dissipation capacity is insufficient to maintain the vacuum pump's safe temperature, and the overheating risk is determined to be extremely high. At this point, regardless of other parameters, the vacuum pump will be immediately shut down to prevent equipment damage due to overheating.

[0084] The logic for monitoring the flow rate of the purging medium during operation is the same as that for monitoring the cooling flow rate, and will not be elaborated here.

[0085] This tiered control strategy during operation avoids overreaction and frequent unplanned shutdowns caused by normal fluctuations or slow deterioration of auxiliary system parameters. Simultaneously, an inviolable safety threshold (second threshold) is set, which immediately shuts down the system upon being triggered, ensuring the safety of the vacuum pump.

[0086] In this embodiment, by monitoring the concentration of the target gas during the vacuum pump startup and operation phases, the risk of target gas leakage throughout the entire life cycle of the vacuum pump is improved. During operation, by simultaneously monitoring the first type of indicator containing the target gas concentration and the second type of indicator containing the operating status, the operational safety can be more accurately determined. When the indicator is abnormal but does not affect the vacuum pump's short-term operation, instead of directly implementing a shutdown strategy, an operation adjustment operation is performed to alleviate or eliminate the abnormal state, thus avoiding mechanical wear, reduced electrical component lifespan, and economic losses due to repeated start-ups and shutdowns.

[0087] like Figure 3The diagram illustrates a vacuum pump control system provided in some embodiments of this application. This system uses a motherboard (e.g., the central control motherboard of the vacuum pump) as the data processing and logic control unit. At the input end, the motherboard is connected to multiple monitoring and input modules via corresponding signal interfaces, specifically including: temperature and pressure sensors for monitoring the vacuum pump's operating status, a hydrogen monitoring module for detecting the hydrogen concentration in the environment, and a CAN (Controller Area Network) signal input module for receiving user control commands or signals from the upper-level system. Simultaneously, the motherboard also receives operating parameters such as power, current, and frequency from the frequency converter drive unit. At the output and control end, the motherboard is connected to the frequency converter drive unit via a digital signal link such as a 485 communication bus. The frequency converter drive unit (typically a frequency converter) adjusts its output (adjusting output current, power, and frequency; the motor receives these output signals and performs corresponding adjustments) to drive the vacuum pump based on control signals issued by the motherboard (e.g., the motherboard receives commands input by the user through a human-machine interface, parses the commands, generates control signals, and sends them to the frequency converter drive unit). Furthermore, the system integrates monitoring of key auxiliary modules, including monitoring the cooling water flow of the water-cooled module and the nitrogen flow of the nitrogen module providing inert gas purging. Signals from these modules are also connected to the main board, forming a complete closed-loop control circuit. This system can collect and centrally process multi-dimensional information on the vacuum pump's operating environment safety (hydrogen concentration), its physical status (temperature, pressure, electrical parameters), and auxiliary systems (cooling, purging), providing the hardware foundation for implementing safety control throughout the startup and operation phases.

[0088] like Figure 4 The diagram shown is another schematic flowchart of a vacuum pump control method provided in some embodiments of this application, which includes steps S401-S417: S401, Receive input start command; It can be input by the user through a human-computer interaction interface.

[0089] S402. Obtain all monitoring parameters; This parameter may include the concentration of leaked hydrogen, cooling water flow rate, nitrogen flow rate, and operating status parameters (e.g., power, current, frequency, temperature, pressure).

[0090] S403. Determine if the concentration of leaked hydrogen is higher than 15% LEL; S404. If the concentration of leaked hydrogen exceeds 15% LEL, an alarm will be triggered, and the machine will be shut down or not restarted.

[0091] Specifically, if the stage is the vacuum pump startup stage, an alarm will be triggered and the pump will not start; if the stage is the vacuum pump operation stage, an alarm will be triggered and the pump will stop.

[0092] S405. If the concentration of leaked hydrogen is less than or equal to 15% LEL, determine whether the cooling water flow rate is less than 2 l / min. If the cooling water flow rate is less than 2 l / min and the system is currently in the startup phase, an alarm will be triggered and the system will not start; if the cooling water flow rate is less than 2 l / min and the system is currently in the running phase, an alarm will be triggered and the system will be shut down.

[0093] S406. If the cooling water flow rate is greater than or equal to 2 l / min, then determine whether the cooling water flow rate is less than 3 l / min. S407. If the cooling water flow rate is less than 3 l / min, report "Caution"; S408. If the cooling water flow rate is greater than or equal to 3 l / min, determine whether the nitrogen flow rate is less than 1 l / min. If the nitrogen flow rate is less than 1 l / min and the system is currently in the startup phase, an alarm will be triggered and the system will not start; if the nitrogen flow rate is less than 1 l / min and the system is currently in the running phase, an alarm will be triggered and the system will be shut down.

[0094] S409. If the nitrogen flow rate is greater than or equal to 1 l / min, determine whether the nitrogen flow rate is less than 90 l / min. S410. If the nitrogen flow rate is less than 90 l / min, report "Caution"; S411. If the nitrogen flow rate is greater than or equal to 90 l / min, determine whether the vacuum pump has been started. S412. If the vacuum pump is not started, execute the startup procedure; S413. If the vacuum pump has been started, determine whether the vacuum pump is operating abnormally. S414. If the vacuum pump is operating abnormally, report "Caution"; In this embodiment, "caution" and "alarm" are two different concepts. When the former occurs, the pump can continue to operate for a short period of time, and it is manifested by displaying "warning" and specific warning content on the interactive interface. For example, "warning_MB_TEMP_HIGH" indicates that the MB pump temperature is high. When the latter occurs, the pump will stop directly or not start, and an "alarm" and specific warning content will be reported. For example, "alarm_MB_TEMP_HIGH" indicates that the pump has stopped due to the MB pump temperature being too high. When "judging whether the vacuum pump's operating status is abnormal", the power of the last 3 minutes can be detected. If the power is greater than 120% of the rated power for 3 consecutive minutes, the vacuum pump is considered to be operating abnormally.

[0095] S415. Reduce the power of the vacuum pump by 30% and repeat step S402. S416. If the vacuum pump is operating normally, determine whether the vacuum pump is in a reduced power state. If the vacuum pump is not in a reduced power state, then repeat step S402. S417. If the vacuum pump is in a reduced power state, restore the power and repeat step S402.

[0096] like Figure 5 The diagram shown is a structural schematic of a vacuum pump control device 5 provided in some embodiments of this application. The device 5 includes: The monitoring module 51 is used to respond to the start command of the vacuum pump and monitor the first data of several first type indicators of the vacuum pump, wherein the first type indicators include the concentration of the target gas in the environment in which the vacuum pump is located. The startup module 52 is used to start the vacuum pump when the first data meets the first limiting condition, and monitor the second data of at least one first type indicator of the vacuum pump, and the third data of at least one second type indicator, wherein the second type indicator includes the operating status indicator of the vacuum pump. The control module 53 is used to control the vacuum pump based on the second data and the third data.

[0097] In some embodiments, the control module 53 is specifically used for: If the second data satisfies the second constraint condition and the third data satisfies the third constraint condition, the vacuum pump continues to operate; If the second data does not meet the second limiting condition, the vacuum pump will be shut down; If the second data satisfies the second constraint condition and the third data does not satisfy the third constraint condition, an operation adjustment operation is performed on the vacuum pump to alleviate or eliminate the abnormal operating state represented by the third data.

[0098] In some embodiments, the control module 53 is specifically used for: The preset operating parameters of the vacuum pump are reduced by a preset ratio. The preset operating parameters include at least one of power, speed, and current. After performing the operation adjustment on the vacuum pump, the control module 53 is further configured to: Monitor the fourth data of the first type of indicator and the fifth data of the second type of indicator; If the fourth data satisfies the second restriction condition and the fifth data satisfies the third restriction condition, the preset operating parameters of the vacuum pump are restored to their original values.

[0099] In some embodiments, the third limiting condition includes: The third data of the second type of indicator of the vacuum pump remains within a preset data range for a preset time period.

[0100] In some embodiments, the first limiting condition includes: The first data of the concentration index of the target gas is less than the concentration threshold.

[0101] In some embodiments, the first type of indicator further includes a cooling medium flow rate indicator of the vacuum pump, and / or a purge medium flow rate indicator within the vacuum pump, the purge medium being used to prevent the target gas from accumulating within the vacuum pump; The first limiting condition also includes: The first data of the cooling medium flow rate index is greater than a first cooling flow rate threshold; and / or The first data of the purge medium flow rate index is greater than the first purge flow rate threshold.

[0102] In some embodiments, the startup module 52 is further configured to: If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the cooling medium flow rate index is less than or equal to the first cooling flow rate threshold and greater than or equal to the second cooling flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the cooling medium flow rate index is less than the second cooling flow rate threshold, the vacuum pump will not be started. If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the purge medium flow rate index is less than or equal to the first purge flow rate threshold and greater than or equal to the second purge flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the purge medium flow rate index is less than the second purge flow rate threshold, the vacuum pump will not be started.

[0103] In some embodiments, the operating status indicators include electrical parameters, temperature parameters, and pressure parameters. The electrical parameters include the motor current, motor power, and frequency of the vacuum pump; the temperature parameters include the pump body bearing temperature, motor winding temperature, and exhaust temperature of the vacuum pump; and the pressure parameters include the inlet pressure and outlet pressure of the vacuum pump.

[0104] like Figure 6The diagram shows a vacuum pump control system provided in some embodiments of this application. The system includes: The acquisition component is used to acquire data of a first type of indicator and a second type of indicator of the vacuum pump. The first type of indicator includes the concentration of the target gas in the environment where the vacuum pump is located, and the second type of indicator includes the operating status indicator of the vacuum pump. An input component is provided for the user to input commands to turn the vacuum pump on or off. A control component, connected to the vacuum pump, the input component, and the acquisition component, is configured to execute the vacuum pump control method described above.

[0105] For details on the implementation of each of the above operations, please refer to the previous examples, which will not be repeated here.

[0106] like Figure 7 The diagram shown is a schematic representation of the internal structure of an electronic device provided in some embodiments of this application. The electronic device includes a processor, a memory, an input / output interface, a communication interface, a display unit, and an input device. The processor, memory, and input / output interface are connected via a system bus, and the communication interface, display unit, and input device are also connected to the system bus via the input / output interface. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores an operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The input / output interface is used for exchanging information between the processor and external devices. The communication interface is used for wired or wireless communication with external terminals; wireless communication can be achieved through Wi-Fi, mobile cellular networks, NFC (Near Field Communication), or other technologies. When the computer program is executed by the processor, it implements a vacuum pump control method. The display unit of the electronic device is used to form a visually visible image. It can be a display screen, a projection device, or a virtual reality imaging device. The display screen can be an LCD screen or an e-ink screen. The input device of the electronic device can be a touch layer covering the display screen, or buttons, trackballs, or touchpads set on the casing of the electronic device, or external keyboards, touchpads, or mice, etc.

[0107] Those skilled in the art will understand that Figure 7 The structure shown is only a block diagram of a part of the structure related to the present application and does not constitute a limitation on the electronic device to which the present application is applied. The specific electronic device may include more or fewer components than shown in the figure, or combine certain components, or have different component arrangements.

[0108] Based on the same inventive concept, embodiments of this application also provide a computer-readable storage medium, which may include: read-only memory (ROM), random access memory (RAM), disk or optical disk, etc.

[0109] Since the computer program stored in the computer-readable storage medium can execute any of the vacuum pump control methods provided in the embodiments of this application, the beneficial effects that any of the vacuum pump control methods provided in the embodiments of this application can achieve can be realized, as detailed in the preceding embodiments, and will not be repeated here.

[0110] Based on the same inventive concept, embodiments of this application also provide a computer program product or computer program, which includes computer instructions stored in a computer-readable storage medium. A processor of an electronic device reads the computer instructions from the computer-readable storage medium and executes the computer instructions, causing the electronic device to perform the methods provided in the various optional implementations of the above embodiments.

[0111] It should be noted that the object data (including but not limited to user device information, user personal information, etc.) and dialogue data involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of related data must comply with the relevant laws, regulations and standards of relevant countries and regions. Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods.

[0112] Any reference to memory, database, or other media used in the embodiments provided in this application may include at least one of non-volatile and volatile memory. Non-volatile memory may include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory may include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM may be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc.

[0113] The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, etc., and are not limited to these.

[0114] In the above embodiments of the vacuum pump control device, computer-readable storage medium, electronic device, and computer program product, the descriptions of each embodiment have different focuses. Parts not described in detail in a particular embodiment can be referred to in the relevant descriptions of other embodiments. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes and beneficial effects of the vacuum pump control device, computer-readable storage medium, computer program product, electronic device, and their corresponding units described above can be referred to the description of the vacuum pump control method in the above embodiments, and will not be repeated here.

[0115] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0116] The above provides a detailed description of a vacuum pump control method, vacuum pump control device, electronic device, computer-readable storage medium, and computer program product provided in the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A vacuum pump control method, characterized by, Includes the following steps: In response to the start command of the vacuum pump, the system monitors first data of several first-type indicators of the vacuum pump, the first-type indicators including the concentration of the target gas in the environment in which the vacuum pump is located. If the first data meets the first limiting condition, the vacuum pump is started, and the second data of at least one first type indicator of the vacuum pump and the third data of at least one second type indicator are monitored, the second type indicator including the operating status indicator of the vacuum pump. The vacuum pump is controlled based on the second data and the third data.

2. The method of claim 1, wherein, The control of the vacuum pump based on the second data and the third data includes: If the second data satisfies the second constraint condition and the third data satisfies the third constraint condition, the vacuum pump continues to operate; If the second data does not meet the second limiting condition, the vacuum pump will be shut down; If the second data satisfies the second constraint condition and the third data does not satisfy the third constraint condition, an operation adjustment operation is performed on the vacuum pump to alleviate or eliminate the abnormal operating state represented by the third data.

3. The method of claim 2, wherein, The operation of adjusting the vacuum pump to alleviate or eliminate the abnormal operating state characterized by the third data includes: The preset operating parameters of the vacuum pump are reduced by a preset ratio. The preset operating parameters include at least one of power, speed, and current. After performing operational adjustment operations on the vacuum pump to alleviate or eliminate the abnormal operating state characterized by the third data, the method further includes: Monitor the fourth data of the first type of indicator and the fifth data of the second type of indicator; If the fourth data satisfies the second restriction condition and the fifth data satisfies the third restriction condition, the preset operating parameters of the vacuum pump are restored to their original values.

4. The method of claim 2, wherein, The third limiting condition includes: The third data of the second type of indicator of the vacuum pump remains within a preset data range for a preset time period.

5. The method of claim 1, wherein, The first limiting condition includes: The first data of the concentration index of the target gas is less than the concentration threshold.

6. The method of claim 5, wherein, The first type of index also includes the cooling medium flow rate index of the vacuum pump, and / or the purge medium flow rate index within the vacuum pump, the purge medium being used to prevent the target gas from accumulating within the vacuum pump; The first limiting condition also includes: The first data of the cooling medium flow rate index is greater than the first cooling flow rate threshold. and / or The first data of the purge medium flow rate index is greater than the first purge flow rate threshold.

7. The method according to claim 6, characterized in that, The method further includes: If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the cooling medium flow rate index is less than or equal to the first cooling flow rate threshold and greater than or equal to the second cooling flow rate threshold, the vacuum pump is started and an alarm message is issued. If the first data of the target gas concentration index is less than the concentration threshold and the first data of the cooling medium flow rate index is less than the second cooling flow rate threshold, the vacuum pump will not be started. If the first data of the target gas concentration index is less than the concentration threshold, and the first data of the purge medium flow rate index is less than or equal to the first purge flow rate threshold and greater than or equal to the second purge flow rate threshold, the vacuum pump is started and an alarm message is issued. The vacuum pump will not be started if the first data of the target gas concentration index is less than the concentration threshold and the first data of the purge medium flow rate index is less than the second purge flow rate threshold.

8. The method according to any one of claims 1-7, characterized in that, The operating status indicators include electrical parameters, temperature parameters, and pressure parameters. The electrical parameters include the motor current, motor power, and frequency of the vacuum pump. The temperature parameters include the pump body bearing temperature, motor winding temperature, and exhaust temperature of the vacuum pump. The pressure parameters include the inlet pressure and outlet pressure of the vacuum pump.

9. A vacuum pump control device, characterized in that, The device includes: The monitoring module is used to respond to the start command of the vacuum pump and monitor the first data of several first type indicators of the vacuum pump, the first type indicators including the concentration of the target gas in the environment where the vacuum pump is located. The startup module is used to start the vacuum pump when the first data meets the first limiting condition, and to monitor the second data of at least one first type indicator of the vacuum pump, and the third data of at least one second type indicator, wherein the second type indicator includes the operating status indicator of the vacuum pump. The control module is used to control the vacuum pump based on the second data and the third data.

10. A vacuum pump control system, characterized in that, The system includes: The acquisition component is used to acquire data of a first type of indicator and a second type of indicator of the vacuum pump. The first type of indicator includes the concentration of the target gas in the environment where the vacuum pump is located, and the second type of indicator includes the operating status indicator of the vacuum pump. An input component is provided for the user to input commands to turn the vacuum pump on or off. A control component, connected to the vacuum pump, the input component, and the acquisition component, is configured to perform the vacuum pump control method as described in any one of claims 1-8.

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