Online plasma surface treatment process and equipment and control method thereof

Abstract

The invention is applicable to the technical field of surface treatment, and provides an online plasma surface treatment process which comprises the following steps: setting a negative pressure environment; the products are conveyed into the negative pressure environment, and primary cleaning is conducted on the products in the conveying process; carrying out secondary cleaning on the product by using plasma in a negative pressure environment; and the products are conveyed out of the negative pressure environment, and the products are cleaned for three times in the conveying process. The negative pressure environment is arranged, and impurities generated during primary cleaning, secondary cleaning and tertiary cleaning are collected in the negative pressure environment, so that when plasma surface treatment is carried out on a product, the impurities can be removed when the product is conveyed into the negative pressure environment; and after entering the negative pressure environment and leaving the negative pressure environment, the product is cleaned, so that the product is in a non-open treatment space during plasma surface treatment and is prevented from being interfered by the external environment in the treatment process, and the stability of plasma surface treatment is improved.

Description

Technical Field

[0001] This invention belongs to the field of surface treatment technology, and particularly relates to an online plasma surface treatment process, equipment and control method. Background Technology

[0002] Plasma surface treatment technology, as a highly efficient dry modification method, has been widely used in materials science, microelectronics, biomedicine, packaging, and composite materials. This technology generates plasma rich in highly reactive particles through ionized gas, which acts on the material surface to achieve functions such as cleaning, activation, etching, graft polymerization, and coating deposition. This significantly improves the wettability, adhesion, biocompatibility, barrier properties, and other functionalities of the material, while also offering advantages such as environmental friendliness, shallow treatment depth, and no damage to the substrate's intrinsic properties.

[0003] Currently, most mainstream plasma surface treatment equipment adopts an offline, batch processing mode. A typical process involves placing the workpiece to be treated in a sealed vacuum chamber, evacuating to a certain back pressure, introducing a working gas, applying a high-voltage electric field between electrodes to generate plasma, and performing timed treatment. After treatment, the workpiece is removed from the vacuum chamber. This mode suffers from poor production connectivity, dependence on the vacuum system, limitations on product size and shape, and the potential introduction of secondary contamination.

[0004] Therefore, online plasma surface treatment equipment has been developed in the industry. However, these devices generally suffer from poor stability, mainly because the open processing space is easily affected by external environmental conditions. Improving the stability of online plasma surface treatment equipment is a problem that needs to be addressed. Summary of the Invention

[0005] The purpose of this invention is to provide an online plasma surface treatment process, equipment, and control method, aiming to solve the problem of stability in online plasma surface treatment equipment.

[0006] The present invention is implemented as follows: an online plasma surface treatment process, the online plasma surface treatment process comprising: Set up a negative pressure environment; The product is transported into the negative pressure environment, and the product is cleaned once during the transport process, so that the impurities generated during the first cleaning are collected in the negative pressure environment. The product is then cleaned a second time using plasma in a negative pressure environment, so that the impurities generated during the second cleaning are collected in the negative pressure environment. The product is transported out of the negative pressure environment and cleaned three times during the transport process, so that the impurities generated during the three cleanings are collected in the negative pressure environment.

[0007] Another objective of this invention is to provide an online plasma surface treatment apparatus, wherein the online plasma surface treatment apparatus is used to perform the online plasma surface treatment process, and the online plasma surface treatment apparatus includes: A conveying device for conveying products; A cleaning device, comprising a moving component and a nozzle, wherein the moving component is used to move the nozzle to a cleaning station, and the nozzle is used to spray plasma to clean the product; A negative pressure device is used to generate negative pressure to collect impurities generated during product processing. The negative pressure device is equipped with an air knife assembly, which is located at the inlet and outlet of the product conveyor. The air knife assembly is used to blow out ion wind to isolate external air. The control module includes an electrostatic detection unit, an energy detection unit, and a temperature detection unit. The electrostatic detection unit is used to detect the ion balance and / or bias voltage within the device to control the operation of the cleaning device within the device. The energy detection unit is used to detect the ion energy within the device. The temperature detection unit is used to detect the temperature within the device and / or the temperature at the nozzle to control the operation of the cleaning device within the device.

[0008] Another objective of this invention is to provide a control method for an online plasma surface treatment device, wherein the control method is applied to the online plasma surface treatment device, and the control method includes: Activate the negative pressure device to lower the air pressure in the working area below atmospheric pressure; The product is conveyed into the work area, and the negative pressure device is adjusted during the process to enhance the cleaning effect of a single cleaning. The product is transported to the processing position, and the nozzle is started to perform secondary cleaning of the product according to the set path. During this process, the power distribution of the negative pressure device is adjusted to eliminate the influence of plasma on the air pressure in the working area. The product is conveyed out of the work area, and the negative pressure device is adjusted during this process to enhance the effect of the three cleaning processes.

[0009] This invention provides an online plasma surface treatment process. The invention establishes a negative pressure environment into which the product is transported for surface treatment. The product undergoes a primary cleaning during transport into the negative pressure environment, a secondary cleaning using plasma, and a tertiary cleaning during transport out of the negative pressure environment. Impurities generated during these three cleaning processes are collected within the negative pressure environment. This allows for cleaning of the product during transport into, after entering, and upon leaving the negative pressure environment, ensuring the product is in a non-open processing space to avoid interference from the external environment. The primary cleaning before the secondary plasma cleaning removes some impurities, improving the stability of the plasma surface treatment. The tertiary cleaning after plasma surface treatment removes any remaining impurities as the product exits the negative pressure environment, further enhancing the stability of the plasma surface treatment process. Attached Figure Description

[0010] Figure 1 A three-dimensional structural diagram of an online plasma surface treatment device provided in an embodiment of the present invention; Figure 2 A flowchart illustrating a control method for an online plasma surface treatment device provided in an embodiment of the present invention; In the attached diagram: 1. Conveying device; 2. Cleaning device; 21. Moving component; 22. Nozzle; 3. Negative pressure device; 31. Ventilation fan; 32. Funnel; 33. Ionizing air knife. Detailed Implementation

[0011] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0012] The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0013] An online plasma surface treatment process provided as an embodiment of the present invention includes: Set up a negative pressure environment; The product is transported into the negative pressure environment, and the product is cleaned once during the transport process, so that the impurities generated during the first cleaning are collected in the negative pressure environment. The product is then cleaned a second time using plasma in a negative pressure environment, so that the impurities generated during the second cleaning are collected in the negative pressure environment. The product is transported out of the negative pressure environment and cleaned three times during the transport process, so that the impurities generated during the three cleanings are collected in the negative pressure environment.

[0014] In this embodiment of the invention, preferably, the online plasma surface treatment process is applicable to scenarios including, but not limited to: board surface cleaning and activation before and after SMT printing / mounting, before and after SPI / AOI, and before and after reflow soldering, as well as surface pretreatment of PCB / PCBA before bonding, coating, dispensing, and soldering, and is adapted to perform plasma surface treatment on products during online production; products include, but are not limited to, circuit boards, displays, and other products; in a negative pressure environment, the negative pressure system can use a ventilation fan 31 to blow air and a vacuum pump to adsorb impurities generated during product surface treatment into a collection frame with a filter. The first cleaning is the initial ion wind blowing on the product when it is transported into the negative pressure environment to remove macroscopic contaminants, eliminate initial static electricity, and prepare for the second cleaning; the second cleaning is the use of plasma to treat the product surface after the product has fully entered the negative pressure environment, which can be a deep cleaning of the product (the high-energy active particles (ions, electrons, free radicals) in the plasma can bombard and thoroughly clean the product). The plasma etching process removes invisible organic contaminants, oil, and oxide layers, achieving nanoscale cleanliness. It also activates the product surface (by introducing polar functional groups such as hydroxyl (-OH) and carboxyl (-COOH) groups into the material surface (e.g., polyimide, epoxy resin, glass, ITO conductive layer) through plasma bombardment, significantly increasing surface energy and transforming it from "hydrophobic / oleophobic" to "hydrophilic / oleophilic") and microscopically roughens the surface (plasma etching can roughen the surface at the nanoscale), greatly increasing specific surface area and mechanical bonding ability. This improves the compatibility of the product surface treatment and significantly enhances the adhesion and reliability of subsequent processes (such as photoresist coating, bonding, potting, polarizer attachment, printing, bonding, soldering, etc.). The third cleaning step, during the process of transporting the product out of the negative pressure environment, removes plasma treatment residues, eliminates secondary static electricity, cools and stabilizes the product surface, and maintains the effects of plasma treatment, avoiding any impact on the stability of the plasma surface treatment.

[0015] In one embodiment of the present invention, a negative pressure environment is set up so that the product is transported into the negative pressure environment for surface treatment. In the negative pressure environment, the product undergoes a first cleaning during transport, a second cleaning using plasma, and a third cleaning during transport out of the negative pressure environment. Impurities generated during the first, second, and third cleanings are collected in the negative pressure environment. This allows for product cleaning during plasma surface treatment, ensuring the product is in a non-open processing space to avoid interference from the external environment. The first cleaning before the second plasma cleaning removes some impurities, improving the stability of the plasma surface treatment. The third cleaning after plasma surface treatment, as the product exits the negative pressure environment, removes any remaining impurities, further enhancing the stability of the plasma surface treatment.

[0016] In a preferred embodiment of the present invention, the setting of the negative pressure environment includes: Install an air inlet with a filtering function; A first barrier is installed at the product conveying inlet to prevent some or all of the air from entering the working area; A second barrier is installed at the product conveying outlet to prevent some or all of the air from entering the working area; A negative pressure generating device is installed to make the air pressure in the working area lower than atmospheric pressure.

[0017] In this embodiment of the invention, preferably, a negative pressure environment is set up and a first partition and a second partition are set at the product conveying inlet and outlet to prevent external air from entering the working area of ​​plasma surface treatment. This can prevent air and dust impurities in the external environment from affecting the stability of plasma surface treatment. In addition, the air pressure in the working area is lower than atmospheric pressure so that impurities on the product and impurities after plasma surface treatment can be collected in the collection box.

[0018] In a preferred embodiment of the present invention, the first partition is a first ion air knife 33, which blows out ion air to form an air curtain to prevent part or all of the air from entering the working area. The ion wind blown out by the first ion air knife 33 acts on the product surface to clean the product once when the product is transported into the negative pressure environment, thereby achieving the pre-cleaning of the product.

[0019] In this embodiment of the invention, preferably, the first barrier is a first ion air knife 33 of a certain length. The first ion air knife 33 faces the inlet of the working area, forming an air curtain that blocks external air from entering the working area. The blown ion air can perform a primary cleaning of the product, using the airflow formed by ionized air to blow away physical contaminants such as dust, fibers, and large particles that adhered to the product surface during the previous process or handling. This is a non-contact cleaning method, avoiding scratches on precision surfaces. The ion air effectively neutralizes the original static electricity on the product surface, creating a uniform and clean electrically neutral starting point for the next plasma treatment. This provides a dry and clean substrate surface for subsequent plasma treatment, ensuring that plasma energy can act efficiently on the material itself, rather than being consumed or blocked by contaminants.

[0020] In a preferred embodiment of the present invention, the second partition is a second ion air knife 33, which blows out ion air to form an air curtain to prevent part or all of the air from entering the working area. The ion wind blown out by the second ion air knife 33 acts on the product surface to perform three cleanings on the product when the product is transported out of the negative pressure environment, thereby achieving the final cleaning of the product.

[0021] In this embodiment of the invention, preferably, the second baffle is a second ion air knife 33 of a certain length. The second ion air knife 33 faces the outlet of the working area, forming an air curtain that blocks external air from entering the working area. The blown ion air can perform three cleanings on the product, mainly removing by-products, and finally removing static electricity and providing protection. During plasma treatment, some tiny volatile by-products or loose particles that are redeposited may be generated. The ion air can gently blow these particles away from the surface after plasma surface treatment, preventing them from contaminating subsequent high-precision processes (such as photolithography and vacuum evaporation). Plasma treatment itself is an ionization process, which may reintroduce or distribute uneven charges on the product surface. Reusing the ion air from the second ion air knife 33 ensures that the product is in a completely static-neutralized state before entering the next stage, avoiding static electricity adsorption of dust or damage to sensitive components. Plasma treatment may cause a slight temperature rise on the surface; the ion air can provide a certain degree of uniform cooling. Blowing away residues promptly helps maintain the high surface activity and cleanliness achieved in the second step, preventing them from rapidly decaying due to exposure to air and contact with contaminants (commonly known as "timeliness").

[0022] like Figure 1 As shown in the figure, an online plasma surface treatment device is also provided in this embodiment of the invention, comprising: Conveying device 1, the conveying device 1 being used to convey products; Cleaning device 2, the cleaning device 2 includes a moving component 21 and a nozzle 22, the moving component 21 is used to move the nozzle 22 to the cleaning station, and the nozzle 22 is used to spray plasma to clean the product; The negative pressure device 3 is used to generate negative pressure to collect impurities generated during product processing. The negative pressure device 3 is equipped with an air knife assembly, which is located at the inlet and outlet of the product conveyor. The air knife assembly is used to blow out ion wind to isolate external air. The control module includes an electrostatic detection unit, an energy detection unit, and a temperature detection unit. The electrostatic detection unit is used to detect the ion balance and / or bias voltage within the device to control the operation of the cleaning device 2 within the device. The energy detection unit is used to detect the ion energy within the device. The temperature detection unit is used to detect the temperature within the device and / or the temperature at the nozzle 22 to control the operation of the cleaning device 2 within the device.

[0023] In this embodiment of the invention, preferably, the online plasma surface treatment equipment mainly includes a conveying device 1 for conveying products, a cleaning device 2 for surface treatment of products, and a negative pressure device 3 for generating a negative pressure environment. This equipment is generally used for products such as circuit boards, and it achieves online processing. That is, the product is conveyed from the production line, enters the equipment, and is then conveyed into the equipment by the conveying device 1. In the negative pressure environment inside the equipment, plasma is used for surface treatment, and after treatment, the product is conveyed out. Therefore, the equipment is equipped with a conveying device 1 for conveying products. The online plasma surface treatment equipment can be equipped with a cabinet. The conveying device 1 can be located in the middle layer inside the cabinet, and the conveying direction of the conveying device 1 is consistent with the orientation of the inlet and outlet on both sides of the cabinet. The cleaning device 2 can be located above the conveying device 1 to clean the products on the conveying device 1. The negative pressure device 3 is set inside the cabinet to create a negative pressure environment throughout the cabinet. Air knife components set at the inlet and outlet in the conveying direction are used to isolate external air or impurities and dust from entering the negative pressure environment, preventing interference from the external environment from affecting the stability of the surface treatment when the cleaning device 2 uses plasma to treat the product. The equipment is equipped with... The control module includes an electrostatic detection unit that monitors the ion balance or bias voltage in the working area during online surface treatment. This prevents the stability of the surface treatment process from being affected by ion balance or bias voltage. An energy detection unit monitors the ion energy in the working area to prevent excessively high or low ion energy from affecting the stability of the surface treatment. A temperature detection unit monitors the temperature in the working area and at the nozzle 22 during online surface treatment to prevent excessively high or low ambient temperatures or overheating at the nozzle 22 from affecting the stability of the surface treatment. The ion air blown out by the air knife assembly prevents external air from entering the working area. The control module also monitors various parameters in real time to detect factors that may affect the stability of the surface treatment. Based on the feedback from these parameters, the causes of poor stability can be identified, and the cleaning device 2 or the negative pressure device 3 can be adjusted accordingly to improve the stability of the online surface treatment and prevent any impact on the surface treatment effect.

[0024] Preferably, the conveying device 1 can be a set of conveying tracks so that impurities on the product surface are collected from the bottom of the product by the negative pressure device 3 during the conveying process. When the product is conveyed by the external equipment assembly line and enters the equipment, the conveying device 1 in the cabinet conveys the product, so that the product can be continuously conveyed during the conveying process in the equipment. From the time the product enters the negative pressure environment in the cabinet, to the time the conveying device 1 conveys the product to the cleaning station, and finally the product is conveyed out of the equipment, the set of conveying tracks is set up. This not only facilitates the collection of impurities during product processing, but also allows for a structural design in which one conveying track is fixed and the other is movable. This allows the spacing between the conveying tracks, i.e., the width of the conveying device 1, to be adjusted according to the width of the product to accommodate products of different widths entering the equipment for plasma surface treatment.

[0025] Preferably, the cleaning device 2 includes a moving component 21 for moving the nozzle 22 and a nozzle 22 for ejecting plasma. The moving component 21 can be installed inside the equipment cabinet and located above the conveying device 1. During operation, the nozzle 22 needs to move on the product surface along a set route. Therefore, the moving component 21 is generally equipped with XYZ axes to drive the nozzle 22 to move. When the moving component 21 transports the nozzle 22 to the cleaning station, the nozzle 22 sprays plasma onto the product surface to achieve functions such as cleaning, activation, etching, graft polymerization, and coating deposition on the product surface.

[0026] Preferably, the negative pressure device 3 is mainly used to create negative pressure inside the equipment, i.e., during the conveying process of the conveying device 1 and the surface treatment process of the cleaning device 2, so as to collect impurities generated during the surface treatment of the product. Air knife components are provided at the inlet and outlet of the product conveying. The ion wind blown out by the air knife components isolates the internal and external environments of the equipment, reducing or preventing external air or dust impurities from entering the equipment and affecting the stability of plasma surface treatment of the product.

[0027] Preferably, the control module mainly includes, but is not limited to, an electrostatic detection unit, an energy detection unit, and a temperature detection unit. Ion balance measures whether the number of positive and negative ions generated by the ionization device is balanced. The closer the value is to 0V, the more balanced the ratio of positive and negative ions, avoiding new static electricity accumulation due to ion imbalance. Bias voltage is similar in concept to residual voltage, referring to the voltage value remaining in the test area after static electricity has been neutralized during ionization device operation. The closer this value is to 0V, the better the static electricity elimination effect of the device. The electrostatic detection unit detects the ion balance and / or bias voltage within the equipment to control the operation of the cleaning device 2. This can involve directly alarming and stopping the cleaning device 2 when the ratio of positive to negative ions in the ion balance is unbalanced or the bias voltage deviates from 0V, or issuing an alarm to allow staff to adjust the parameters of the plasma ejected from the nozzle 22 or the corresponding parameters of the ion wind ejected from the air knife structure. Similarly, the energy detection unit detects excessively high or low energy levels and promptly controls the cleaning device 2 to prevent product damage. The temperature detection unit detects the temperature within the equipment and the temperature at the nozzle 22. If the temperature at the nozzle 22 is detected to be too high, an alarm can be issued and the operation of the nozzle 22 of the cleaning device 2 can be promptly controlled to prevent excessive temperature from affecting the stability of the product surface treatment or damaging the product surface.

[0028] In one embodiment of the present invention, a negative pressure environment is set up so that the product is transported into the negative pressure environment for surface treatment. In the negative pressure environment, the product undergoes a first cleaning during transport, a second cleaning using plasma, and a third cleaning during transport out of the negative pressure environment. Impurities generated during the first, second, and third cleanings are collected in the negative pressure environment. This allows for product cleaning during plasma surface treatment, ensuring the product is in a non-open processing space to avoid interference from the external environment. The first cleaning before the second plasma cleaning removes some impurities, improving the stability of the plasma surface treatment. The third cleaning after plasma surface treatment, as the product exits the negative pressure environment, removes any remaining impurities, further enhancing the stability of the plasma surface treatment.

[0029] like Figure 1As shown, in a preferred embodiment of the present invention, the negative pressure device 3 includes a ventilation fan 31 and a vacuum pump. The ventilation fan 31 is disposed at the top of the device and is used to blow the generated airflow toward the product on the conveying device 1 to blow off impurities generated during product processing. The ventilation fan 31 is provided with a filter element for filtering the airflow. The vacuum pump is disposed in a funnel 32, which is disposed at the bottom of the conveying device 1. The vacuum pump is used to generate negative pressure airflow to collect impurities during product processing and / or impurities blown off by the ventilation fan 31 into the funnel 32. The air knife assembly includes a first ion air knife 33 and a second ion air knife 33. The first ion air knife 33 is disposed at the inlet in the product conveying direction, and the second ion air knife 33 is disposed at the outlet in the product conveying direction. The first ion air knife 33 and the second ion air knife 33 are respectively used to generate ion air curtains to isolate external air. The ion air blown out by the first ion air knife 33 and the second ion air knife 33 is used to clean the product surface.

[0030] In this embodiment of the invention, preferably, the negative pressure device 3 mainly includes a ventilation fan 31 and a vacuum pump. The ventilation fan 31 is installed on the top of the equipment, and the airflow generated by the ventilation fan 31 blows into the equipment from the outside. A filter can be installed at the air outlet of the ventilation fan 31 to filter the airflow entering the equipment, preventing dust from the external environment from affecting the surface treatment stability of the product. The vacuum pump can be installed on the side wall of the funnel 32. The funnel 32 can be installed inside the equipment and below the conveying device 1, or below the cleaning station. The funnel 32 collects the cleaning impurities. The vacuum pump generates a negative pressure airflow in the same direction as the ventilation fan 31, so that impurities that are easy to fall off the product surface and impurities cleaned by the cleaning device 2 are carried by the negative pressure airflow and adsorbed into the funnel 32. A collection frame can be installed below the funnel 32. The collection box can be located at the bottom layer inside the equipment, and a side door can be provided on the side of the equipment for regular removal and cleaning of the collection box. The airflow generated by the ventilation fan 31 and the vacuum pump can be from top to bottom. The first ion air knife 33 and the second ion air knife 33 in the air knife assembly are respectively set at the inlet and outlet of the product conveying. Their positions can be installed from left to right, so that the inside of the equipment forms a non-open processing space. The first ion air knife 33 generates an air curtain at the product inlet, and the second ion air knife 33 generates an air curtain at the product outlet, which can isolate the air flow between the inside and outside environment of the equipment and the entry of dust and impurities. The ion air generated by the first ion air knife 33 can clean the product surface when the product enters the equipment, and the ion air generated by the second ion air knife 33 can clean the product surface again when the product is conveyed out of the equipment.

[0031] In a preferred embodiment of the present invention, the electrostatic detection unit includes a first electrostatic detection element and a second electrostatic detection element. The first electrostatic detection element is disposed on the inner wall of the device and is used to detect the ion balance and / or bias voltage of the working area inside the device. The second electrostatic detection element is disposed on the air knife assembly and is used to detect the ion balance and / or bias voltage of the ion wind blown out by the air knife assembly. The energy detection unit includes a first energy detection element and a second energy detection element. The first energy detection element is disposed on the nozzle 22 and is used to detect the ion energy at the nozzle 22. The second energy detection element is disposed on the air knife assembly and is used to detect the ion energy at the point where the air knife assembly blows out ion wind.

[0032] In this embodiment of the invention, the electrostatic detection unit may include, but is not limited to, a first electrostatic detection device and a second electrostatic detection device. The electrostatic detection device may be an ion balance tester or an electrostatic voltage tester. It is mainly used to detect the potential difference formed by the charge in the space of the equipment through the inductive probe and convert the signal into a numerical display so as to obtain the electrostatic detection result. It can be installed on the inner wall of the equipment or at the air outlet of the air knife assembly that blows out the ion wind, or on the inner wall of the cavity where the nozzle 22 sprays out plasma, etc. The energy detection unit may include, but is not limited to, a first energy detection element and a second energy detection element. The energy detector may be an ion energy analyzer, which can directly measure the ion energy distribution function and ensure the consistency of the product treatment effect (such as cleaning, activation, and etching) by monitoring and optimizing the ion energy acting on the product surface. The energy detection element may be installed on the nozzle 22 that ejects plasma or on the inner wall of the equipment within the range of plasma ejection. Similarly, it may be installed on the air knife assembly that ejects ion wind or on the inner wall of the equipment within the range of ion wind blowing. The unit detects the proportion of different ion energies and the total number of ions blown onto the product surface per unit time. The unit compares the obtained proportion and total number of ions with the set value. If there is a deviation, it is necessary to adjust the power, air pressure, or gas ratio of the nozzle 22 and / or air knife assembly, or directly terminate the current action to avoid affecting the product treatment effect or damaging the product.

[0033] In a preferred embodiment of the present invention, the temperature detection unit includes a first temperature measuring element and a second temperature measuring element. The first temperature measuring element is disposed on the inner wall of the device and is used to detect the temperature of the working area inside the device. The second temperature measuring element is disposed on the nozzle 22 and is used to detect the temperature at the nozzle 22.

[0034] In this embodiment of the invention, the temperature detection unit includes, but is not limited to, a first temperature measuring element and a second temperature measuring element. The temperature measuring element can be a non-contact infrared thermal imager, a thermometer, or a contact thermocouple. The temperature measuring element can be installed on the inner wall of the equipment to detect the ambient temperature of the product surface treatment. Alternatively, the temperature measuring element can be installed on the nozzle 22 to detect the temperature of the nozzle 22. It can also be installed within the range of the plasma ejected from the nozzle 22 to detect the temperature of the ejected plasma, so as to avoid the ejected plasma temperature being too high and affecting the product surface, or the effect and stability of the product surface treatment due to the temperature factors in the working environment.

[0035] In a preferred embodiment of the present invention, the control module further includes a data collection unit, a data display unit, a data feedback unit, and a correction unit. The data collection unit is communicatively connected to the electrostatic detection unit, the energy detection unit, and the temperature detection unit, respectively. The data collection unit is used to collect the detection results of the electrostatic detection unit, the energy detection unit, and the temperature detection unit, and send the collected detection results to the data display unit. The data display unit is communicatively connected to the digital display device, the data collection unit, and the data feedback unit. The data display unit is used to display and / or monitor the detection results collected by the data collection unit on the digital display device and to send the displayed and / or monitored detection results to the data feedback unit. The data feedback unit is communicatively connected to the data collection unit, the data display unit, and the calibration unit. The data feedback unit is used to receive and analyze the detection results, generate feedback instructions based on the analysis results, and send the generated feedback instructions to the calibration unit. The calibration unit is communicatively connected to the data feedback unit, the cleaning device, and the negative pressure module. The calibration unit is used to receive calibration instructions from the data feedback unit and send the received calibration instructions to the cleaning device and / or the negative pressure device.

[0036] In this embodiment of the invention, the control module includes not only an electrostatic detection unit, an energy detection unit, and a temperature detection unit, but also a data collection unit, a data display unit, a data feedback unit, and a correction unit to realize digital detection and intelligent monitoring of the online plasma surface treatment equipment. The data collection unit is communicatively connected to the electrostatic detection unit, the energy detection unit, and the temperature detection unit to collect detection results. It can also collect electrode detection results and the results of air stability inside the equipment. The collected detection results or various data during real-time operation of the equipment are displayed through the digital display device of the data display unit. The digital display device (embedded touch screen) monitors the working status and working parameters of the equipment in real time. For example, it monitors or monitors the power supply, voltage, current, power, air pressure, working frequency, spray gun speed, module temperature, fan status, communication status, etc. All of these are presented centrally and dynamically through the digital display device of the data display unit and support functions such as real-time coordinate error reporting window, real-time trajectory coordinate display, multiple trajectory programming, and real-time monitoring of multiple waveforms with a response speed of up to 200ms.

[0037] It can also record, save, and upload relevant operating parameters (plasma parameters / dry ice parameters / voltage parameters / current parameters / electrode parameters / atmospheric pressure parameters / air stability, etc.) and detection data to a cloud server or factory MES system, providing support for production data collection and quality traceability. The equipment possesses powerful digital monitoring capabilities, with 21 built-in fault monitoring and alarm functions to ensure safe operation; it displays voltage, current, power, waveforms, etc. in real time, making it a data-driven and intelligent plasma device. It includes functions such as temperature, electrostatic discharge, energy monitoring, and real-time waveform display. Data feedback is also fed back to the service system through a data feedback unit, allowing each detection unit to adjust parameters or pause operation based on feedback or calibration commands. Data can be uploaded to the MES system for data collection and quality assurance in automated factories. After the data feedback unit sends the feedback command to the correction unit, the correction unit corrects the corresponding parameters, working steps, or triggers alarms in real time according to the information in the feedback command. It has self-correction functions, such as electrode life monitoring and reminder to replace, as well as self-correction and alarm functions for power supply voltage fluctuations, and predictive maintenance: for example, continuously monitoring electrode wear and actively reminding to replace it when it reaches a threshold; real-time monitoring of power supply voltage fluctuations and automatic compensation or correction, and triggering an alarm if it exceeds the range.

[0038] like Figure 2The diagram shows a flowchart of a control method for an online plasma surface treatment device provided in an embodiment of the present invention. The control method for an online plasma surface treatment device provided in this embodiment includes: the control method for the online plasma surface treatment device is applied to the online plasma surface treatment device, and the control method for the online plasma surface treatment device includes: Activate negative pressure device 3 to lower the air pressure in the working area below atmospheric pressure; The product is conveyed into the work area, and the negative pressure device 3 is adjusted during the process to enhance the cleaning effect of one cleaning cycle. When the product is delivered to the processing position, the nozzle 22 is activated to perform secondary cleaning on the product according to the set path. During this process, the power distribution of the negative pressure device 3 is adjusted to eliminate the influence of plasma on the air pressure in the working area. The product is conveyed out of the work area, and during this process, the negative pressure device 3 is adjusted to enhance the effect of the three cleaning processes.

[0039] In this embodiment of the invention, preferably, the working area pressure is lower than atmospheric pressure so that impurities in the working area are adsorbed and collected into the collection frame below the funnel 32.

[0040] In this embodiment of the invention, preferably, the first cleaning is achieved by adjusting the negative pressure device 3 so that the airflow generated by the vacuum pump can blow the ion wind generated by the first ion air knife 33 onto the surface of the product when it first enters the working area, so that the impurities are adsorbed by the vacuum pump and collected in the collection box under the funnel 32.

[0041] In a preferred embodiment of the invention, after the product has been cleaned once, it is simultaneously transported to the processing position by the conveying device 1, and the moving component 21 drives the nozzle 22 to move along a set path to achieve secondary cleaning of the product by the plasma ejected from the nozzle 22.

[0042] In a preferred embodiment of the invention, after the secondary cleaning is completed, when the conveying device 1 transports the product out of the working area, the ion wind generated by the second ion air knife 33 blows towards the surface of the product that is about to leave the working area, so that the particles generated on the product surface after plasma surface treatment are cleaned to complete the third cleaning.

[0043] In a preferred embodiment of the present invention, the activation of the negative pressure device 3 to lower the working area air pressure below atmospheric pressure includes: Start the vacuum pump at maximum power; Activate the first and second barriers and gradually increase their power from minimum to maximum. During this process, detect the air pressure in the working area and take the power of the barrier corresponding to the minimum air pressure as the target power, so that the first and second barriers operate at the target power. Reduce the power of the vacuum pump by a set amount, turn on the ventilation fan 31 to operate at the set power, obtain the air pressure in the working area, and perform the following adjustment steps based on the difference between the air pressure in the working area and the target air pressure: When the difference is greater than 0, the ratio a is applied in each odd-numbered adjustment period. P1 is the step size that increases the vacuum pump power once, and is adjusted proportionally to a within each even-numbered period. P2 / n represents the step size for decreasing the power of the ventilation fan 31 in n increments, repeating this process until the working area air pressure reaches the target air pressure; when the difference is less than 0, the power is reduced proportionally a in each odd-numbered adjustment cycle. P2 increases the power of the primary ventilation fan by 31 units in increments and proportionally a in each even-numbered adjustment cycle. P1 / n is the step size for decreasing the vacuum pump power n times. This process is repeated until the working area pressure reaches the target pressure. Where P1 is the current power of the vacuum pump; P2 is the current power of the ventilation fan.

[0044] In this embodiment of the invention, preferably, the vacuum pump is first set to maximum power, and then the power of the first ion air knife 33 on the first partition and the second ion air knife 33 on the second partition are adjusted so that the minimum air pressure in the working area corresponds to the power of the first and second partitions as the target power. After determining the target power of the first and second partitions, the power of the vacuum pump is adjusted again, reducing the power of the vacuum pump to the set range, and then the ventilation fan 31 is turned on. The ventilation fan 31 operates at the set power. At this time, three of the four devices that affect the air pressure in the working area are operating at the set power. Using the difference between the detected air pressure value and the target air pressure value, the current power of the vacuum pump is P1, and the current power of the ventilation fan 31 is P2. The vacuum pump extracts air from the working area to reduce the air pressure in the working area, while the ventilation fan 31 introduces external air to increase the air pressure in the working area. When the difference between the current negative pressure environment air pressure and the target air pressure is detected to be greater than 0, If the power of ventilation fan 31 is too high, causing the air pressure in the working area to be higher than atmospheric pressure, then the power of the vacuum pump needs to be increased and the power of ventilation fan 31 decreased. In this case, the power of the vacuum pump can be adjusted in increments of 'a' within each odd-numbered adjustment cycle for larger adjustments. Fine adjustment is achieved by adjusting the power of ventilation fan 31 n times in increments of 'a / n', avoiding oscillations or over-adjustment in the working area that could affect the air pressure. The power of both the ventilation fan and the vacuum pump is adjusted simultaneously based on the air pressure difference. The device affecting the air pressure difference is the primary adjustment device, and the other is the auxiliary adjustment device. The primary adjustment device adjusts the power in larger increments, while the auxiliary adjustment device adjusts the power in smaller increments, ensuring a smooth and rapid adjustment of the air pressure in the working area to match the target air pressure value. The increment of 'a' can be a percentage of the current power P1 of the vacuum pump, or it can be a proportional decomposition of the current power of the vacuum pump. For example, if the current vacuum pump power is 100W, the increment of 'a' is 10%. P1 calculates that increasing the vacuum pump power by 10W results in a current vacuum pump power of 110W after the first adjustment. The even-numbered adjustment cycles following odd-numbered adjustment cycles are based on the formula a. P2 / n represents the step size for decreasing the power of ventilation fan 31 in n steps, where P2 is the current power of ventilation fan 31, and n is the number of steps. The process of decreasing the power of ventilation fan 31 can involve small adjustments, for example, if the current power of ventilation fan 31 is 500W, the ratio a is 10%, and n is 5 steps. The P2 / n calculation shows that the power of the ventilation fan 31 is reduced by 10W, resulting in a current ventilation fan power of 490W after the first adjustment. In the next odd-numbered adjustment cycle, the current power of the vacuum pump and the ventilation fan, obtained from the previous cycle, are used for further adjustment. That is, in the second odd-numbered adjustment cycle, the increased vacuum pump power is 121W, and in the second even-numbered adjustment cycle, the reduced ventilation fan 31 power is 480.2W. The working area air pressure can be checked after each adjustment until the working area air pressure reaches the target air pressure.

[0045] Similarly, when the difference is less than 0, the vacuum pump power is too high, causing the working area air pressure to be lower than atmospheric pressure and the difference from the target air pressure value to be too large. Therefore, it is necessary to reduce the vacuum pump power and increase the power of the ventilation fan 31 to maintain the air pressure in the working area always lower than atmospheric pressure and to ensure the air pressure in the working area reaches the target air pressure value. The step size of the ratio 'a' can be a percentage of the current power P2 of the ventilation fan 31, or it can be a proportional decomposition of the current power of the ventilation fan 31. For example, if the current power of the ventilation fan 31 is 100W, and the ratio 'a' is 10%, then... P2 calculates that increasing the power of the ventilation fan by 10W results in a power of 110W for the current ventilation fan 31 after the first adjustment. The even-numbered adjustment cycles following odd-numbered adjustment cycles are based on the formula a. P1 / n represents the step size for decreasing the vacuum pump power in n increments, where P1 is the current vacuum pump power and n is the number of increments. The process of decreasing the vacuum pump power can involve small adjustments, for example, if the current vacuum pump power is 500W, the percentage a is 10%, and n is 5 increments. The calculation using P1 / n shows that the power of the vacuum pump is reduced by 10W, resulting in a current vacuum pump power of 490W after the first adjustment. In the next odd-numbered adjustment cycle, the power of the ventilation fan and the vacuum pump, obtained from the previous cycle, are used for further adjustment. In the second odd-numbered adjustment cycle, the increased power of the ventilation fan is 121W, and in the second even-numbered adjustment cycle, the reduced power of the vacuum pump is 480.2W. The working area air pressure can be checked after each adjustment until the working area air pressure reaches the target air pressure.

[0046] In a preferred embodiment of the present invention, the adjusting negative pressure device 3 enhances the cleaning effect of a single cleaning operation, including: Increase the power of the first baffle from the target power to the maximum power, while decreasing the power of the second baffle so that the sum of the power of the first baffle and the second baffle remains unchanged; While in the previous step, gradually increase the power of the vacuum pump to the maximum. The product is fully inserted into the equipment, and the first baffle is gradually reduced from the maximum power to the target power, while the power of the second baffle is increased so that the sum of the power of the first baffle and the second baffle remains unchanged; While in the previous step, gradually reduce the vacuum pump power to the value before the power was increased; The negative pressure regulating device 3 enhances the effect of the three-stage cleaning, including: Increase the power of the second baffle from the target power to the maximum power, while reducing the power of the first baffle so that the sum of the power of the first baffle and the second baffle remains unchanged; While in the previous step, gradually increase the power of the vacuum pump to the maximum. Once the product is completely removed from the equipment, the second baffle is gradually reduced from maximum power to target power, while the power of the first baffle is increased so that the sum of the power of the first baffle and the second baffle remains unchanged; While in the previous step, gradually reduce the vacuum pump power to the value before the power was increased.

[0047] In this embodiment of the invention, preferably, during the first cleaning, the product is cleaned by the ion wind generated by the first ion wind knife 33. At this time, it is necessary to increase the power of the first baffle and decrease the power of the second baffle, and keep the increase and decrease constant to avoid affecting the air pressure in the working area. In addition, the power of the vacuum pump is increased to facilitate the collection of impurities from the first cleaning into the collection frame.

[0048] In this embodiment of the invention, preferably, during the third cleaning, the product is cleaned by the ion wind generated by the second ion wind knife 33. At this time, it is necessary to reduce the power of the first baffle and increase the power of the second baffle, while keeping the increase and decrease in power constant to avoid affecting the air pressure in the working area. In addition, the power of the vacuum pump is increased to facilitate the collection of impurities from the third cleaning into the collection frame.

[0049] In a preferred embodiment of the present invention, the power distribution of the adjusting negative pressure device 3 to eliminate the influence of plasma on the working area air pressure includes: The power of the ventilation fan 31 is reduced according to the plasma flow rate to reduce the air intake. The control pulse of the vacuum pump is determined based on the excitation pulse of the nozzle 22, so that the center of the control pulse coincides with the center of the excitation pulse and the control pulse has a longer duration. The vacuum pump power is periodically increased to the rated power according to the control pulse, and this step is repeated until the secondary cleaning of the product is completed.

[0050] In this embodiment of the invention, preferably, reducing the power of the ventilation fan 31 to reduce the air intake can be based on the positive correlation between the power of the ventilation fan 31 and the air intake. By reducing the power of the ventilation fan, the air intake can be reduced. The air intake is the product of wind speed and time. The air intake is positively correlated with the wind speed, so the wind speed can be reduced. The plasma flow rate is the product of the flow rate and time. Within the same time range, the air intake of the ventilation fan 31 is adjusted according to the plasma flow rate to avoid the air intake speed of the ventilation fan 31 being greater than the flow rate of the plasma, which would affect the plasma's treatment of the product surface. This also prevents the plasma from being affected by the air intake of the ventilation fan 31 when it is ejected from the nozzle 22 to treat the product surface, thus affecting the stability of the plasma surface treatment.

[0051] In this embodiment of the invention, preferably, the coincidence of the control pulse and the excitation pulse center can be achieved by ensuring that the control pulse period of the vacuum pump completely covers the excitation pulse period of the nozzle. This allows the adsorption time period of the vacuum pump to be longer than the ejection time period of the plasma in the nozzle, enabling the adsorption of impurities and dust in the working area before plasma ejection, or adsorption of impurities, dust, and residual plasma in the working area after plasma ejection, thus more promptly and quickly adsorbing impurities into the collection frame. For example, the control pulse of the vacuum pump may start before the first excitation pulse of the nozzle begins, and the control pulse of the vacuum pump may also start when the first excitation pulse of the nozzle reaches its center. Once the nozzle's excitation pulse ends, the vacuum pump's control pulse continues for the same duration as the start time difference between the control pulse and the excitation pulse. Similarly, the next vacuum pump control pulse starts earlier than the nozzle's excitation pulse and ends later than the nozzle's excitation pulse, with the control pulse and excitation pulse centered on each other. As the nozzle 22 moves along its trajectory, the vacuum pump's power is periodically adjusted based on the excitation pulse at different positions of the nozzle 22. This ensures that the periodic power increase of the vacuum pump's control pulse is consistent with the periodic movement of the nozzle 22 along its trajectory during secondary cleaning.

[0052] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An online plasma surface treatment process, characterized in that, The online plasma surface treatment process includes: Set up a negative pressure environment; The product is transported into the negative pressure environment, and the product is cleaned once during the transport process, so that the impurities generated during the first cleaning are collected in the negative pressure environment. The product is then cleaned using plasma in a negative pressure environment, and the impurities generated during the secondary cleaning are collected in the negative pressure environment. The product is transported out of the negative pressure environment and cleaned three times during the transport process, so that the impurities generated during the three cleanings are collected in the negative pressure environment.

2. The online plasma surface treatment process according to claim 1, characterized in that, The setting of a negative pressure environment includes: Install an air inlet with a filtering function; A first barrier is installed at the product conveying inlet to prevent some or all of the air from entering the working area; A second barrier is installed at the product conveying outlet to prevent some or all of the air from entering the working area; A negative pressure generating device is installed to make the air pressure in the working area lower than atmospheric pressure.

3. The online plasma surface treatment process according to claim 2, characterized in that, The first barrier is a first ion air knife, which blows out ion air to form an air curtain to prevent some or all of the air from entering the working area; The ion air blown out by the first ion air knife acts on the product surface to clean the product once when the product is transported into the negative pressure environment, thereby achieving pre-cleaning of the product.

4. The online plasma surface treatment process according to claim 2, characterized in that, The second barrier is a second ion air knife, which blows out ion air to form an air curtain to prevent some or all of the air from entering the working area; The ion wind blown out by the second ion air knife acts on the product surface to perform three cleanings on the product when the product is transported out of the negative pressure environment, thereby achieving the final cleaning of the product.

5. An online plasma surface treatment device, characterized in that, The online plasma surface treatment equipment is used to perform the online plasma surface treatment process as described in any one of claims 1-4, and the online plasma surface treatment equipment comprises: A conveying device for conveying products; A cleaning device, comprising a moving component and a nozzle, wherein the moving component is used to move the nozzle to a cleaning station, and the nozzle is used to spray plasma to clean the product; A negative pressure device is used to generate negative pressure to collect impurities generated during product processing. The negative pressure device is equipped with an air knife assembly, which is located at the inlet and outlet of the product conveyor. The air knife assembly is used to blow out ion wind to isolate external air. The control module includes an electrostatic detection unit, an energy detection unit, and a temperature detection unit. The electrostatic detection unit is used to detect the ion balance and / or bias voltage within the device to control the operation of the cleaning device within the device. The energy detection unit is used to detect the ion energy within the device. The temperature detection unit is used to detect the temperature within the device and / or the temperature at the nozzle to control the operation of the cleaning device within the device.

6. The online plasma surface treatment equipment according to claim 5, characterized in that, The negative pressure device includes a ventilation fan and a vacuum pump. The ventilation fan is located at the top of the equipment and is used to blow the generated airflow toward the product on the conveying device to blow off impurities generated during product processing. The ventilation fan is equipped with a filter element for filtering the airflow. The vacuum pump is located inside the funnel, which is located at the bottom of the conveying device. The vacuum pump is used to generate negative pressure airflow to collect impurities generated during product processing and / or impurities blown off by the ventilation fan into the funnel. The air knife assembly includes a first ion air knife and a second ion air knife. The first ion air knife is located at the inlet in the product conveying direction, and the second ion air knife is located at the outlet in the product conveying direction. The first ion air knife and the second ion air knife are used to generate ion air curtains to isolate external air. The ion air blown out by the first ion air knife and the second ion air knife is used to clean the product surface.

7. The online plasma surface treatment equipment according to claim 5, characterized in that, The electrostatic detection unit includes a first electrostatic detection element and a second electrostatic detection element. The first electrostatic detection element is disposed on the inner wall of the equipment and is used to detect the ion balance and / or bias voltage of the working area inside the equipment. The second electrostatic detection element is disposed on the air knife assembly and is used to detect the ion balance and / or bias voltage of the ion wind blown out by the air knife assembly. The energy detection unit includes a first energy detection element and a second energy detection element. The first energy detection element is disposed on the nozzle and is used to detect the ion energy at the nozzle. The second energy detection element is disposed on the air knife assembly and is used to detect the ion energy at the point where the air knife assembly blows out the ion wind. The temperature detection unit includes a first temperature measuring element and a second temperature measuring element. The first temperature measuring element is disposed on the inner wall of the equipment and is used to detect the temperature of the working area inside the equipment. The second temperature measuring element is disposed on the nozzle and is used to detect the temperature at the nozzle.

8. The online plasma surface treatment equipment according to claim 5, characterized in that, The control module further includes a data collection unit, a data display unit, a data feedback unit, and a correction unit. The data collection unit is communicatively connected to the electrostatic detection unit, the energy detection unit, and the temperature detection unit, respectively. The data collection unit is used to collect the detection results of the electrostatic detection unit, the energy detection unit, and the temperature detection unit, and send the collected detection results to the data display unit. The data display unit is communicatively connected to the digital display device, the data collection unit, and the data feedback unit. The data display unit is used to display and / or monitor the detection results collected by the data collection unit on the digital display device and to send the displayed and / or monitored detection results to the data feedback unit. The data feedback unit is communicatively connected to the data collection unit, the data display unit, and the calibration unit. The data feedback unit is used to receive and analyze the detection results, generate feedback instructions based on the analysis results, and send the generated feedback instructions to the calibration unit. The calibration unit is communicatively connected to the data feedback unit, the cleaning device, and the negative pressure module. The calibration unit is used to receive calibration instructions from the data feedback unit and send the received calibration instructions to the cleaning device and / or the negative pressure device.

9. A control method for an online plasma surface treatment device, characterized in that, The control method for the online plasma surface treatment equipment is applied to the online plasma surface treatment equipment as described in any one of claims 5-8, and the control method for the online plasma surface treatment equipment includes: Activate the negative pressure device to lower the air pressure in the working area below atmospheric pressure; The product is conveyed into the work area, and the negative pressure device is adjusted during the process to enhance the cleaning effect of a single cleaning. The product is transported to the processing position, and the nozzle is started to perform secondary cleaning of the product according to the set path. During this process, the power distribution of the negative pressure device is adjusted to eliminate the influence of plasma on the air pressure in the working area. The product is conveyed out of the work area, and the negative pressure device is adjusted during this process to enhance the effect of the three cleaning processes.

10. The control method for the online plasma surface treatment equipment according to claim 9, characterized in that, The activation of the negative pressure device lowers the air pressure in the working area below atmospheric pressure, including: Start the vacuum pump at maximum power; Activate the first and second barriers and gradually increase their power from minimum to maximum. During this process, detect the air pressure in the working area and take the power of the barrier corresponding to the minimum air pressure as the target power, so that the first and second barriers operate at the target power. Reduce the power of the vacuum pump by a set amount, turn on the ventilation fan to operate at the set power, obtain the air pressure in the working area, and perform the following adjustment steps based on the difference between the air pressure in the working area and the target air pressure: When the difference is greater than 0, the ratio a is applied in each odd-numbered adjustment period. P1 is the step size that increases the vacuum pump power once, and is adjusted proportionally to a within each even-numbered period. P2 / n represents the step size for decreasing the ventilation fan power n times, repeating this process until the working area air pressure reaches the target air pressure; when the difference is less than 0, the power is reduced proportionally a in each odd-numbered adjustment cycle. P2 increases the primary ventilation fan power by a step size and in each even-numbered adjustment cycle by a proportional increment. P1 / n is the step size for decreasing the vacuum pump power n times. This process is repeated until the working area pressure reaches the target pressure. Where P1 is the current power of the vacuum pump; P2 is the current power of the ventilation fan.

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