Boats and process equipment
By designing insulating connecting rods in the PECVD equipment to connect boats of different polarities, the problem of short circuit leakage in the boats in the PECVD equipment was solved, the stability of the equipment and the quality of the film were improved, and the overall strength of the carrier boat was enhanced.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LAPLACE RENEWABLE ENERGY TECH CO LTD
- Filing Date
- 2025-06-18
- Publication Date
- 2026-06-23
Smart Images
Figure CN224395014U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of photovoltaic material processing, and more specifically to a carrier boat and a process equipment comprising the carrier boat. Background Technology
[0002] Plasma-enhanced chemical vapor deposition (PECVD) is a technique that uses plasma energy to achieve gas-phase chemical reactions and deposit thin films at low temperatures. PECVD activates the reactive gases with plasma, significantly reducing the deposition temperature (typically 100-400°C), making it suitable for temperature-sensitive substrates (such as glass and polymers). Currently, PECVD technology is widely used in semiconductor and photovoltaic material processing. Common PECVD processing equipment includes plate-type PECVD and tubular PECVD. In PECVD processing of semiconductor or photovoltaic materials, a power source is typically connected to electrodes to discharge gas and generate plasma. Materials such as silicon films deposited by PECVD have a certain degree of conductivity. When these deposited films parasitize the insulating material of the electrodes, the insulating material may fail, resulting in leakage or parasitic discharge, leading to energy waste, film quality degradation, and unstable discharge. Utility Model Content
[0003] In view of this, this application provides a carrier that can effectively prevent short circuits between two carrier blades of different polarities, the carrier comprising:
[0004] Multiple first boat pages, each of which is plate-shaped;
[0005] Multiple second boats, the second boats and the first boats are configured to have opposite polarities, each second boat is plate-shaped, and the multiple second boats and the multiple first boats are arranged alternately and at intervals along a first direction, the first direction being the thickness direction of the first boats and the second boats;
[0006] At least one insulated first connecting rod, the first connecting rod connecting to a plurality of first leaf blades, and an insulating gap between the first connecting rod and the second leaf blade; and
[0007] At least one insulated second connecting rod connects to a plurality of second leaf blades, and there is an insulating gap between the second connecting rod and the first leaf blade, wherein the second connecting rod and the first connecting rod are spaced apart from each other.
[0008] This application fundamentally eliminates the path for a short circuit between the first and second boats by setting up independent and insulated first and second connecting rods. The first connecting rod connects to the first boat, and the second connecting rod connects to the second boat. Even if a conductive film layer is parasitically deposited on the surfaces of the first and second connecting rods, it will not cause a short circuit or leakage between the first and second boats. Furthermore, connecting multiple first boats with the first connecting rod and multiple second boats with the second connecting rod can improve the overall strength or stability of the first and second boats.
[0009] In some embodiments, at least one first connecting rod and at least one second connecting rod are arranged alternately and at intervals along a second direction perpendicular to the first direction.
[0010] In some embodiments, along the second direction, a plurality of first boat pages and a plurality of second boat pages have opposing first ends and second ends, wherein one of the first connecting rods is located at the first end and one of the second connecting rods is located at the second end.
[0011] In some embodiments, at least one first connecting rod and at least one second connecting rod are divided into multiple groups of connecting rods, each group of connecting rods including one first connecting rod and one second connecting rod spaced apart, and the multiple groups of connecting rods are arranged at intervals along a second direction perpendicular to the first direction.
[0012] In some embodiments, the number of the first connecting rods is equal to the number of the second connecting rods.
[0013] In some embodiments, the first boat leaf has a first side along a third direction, and the first boat leaf has opposing first and second sides along the first direction, the third direction being perpendicular to the first direction; the first connecting rod includes a first rod portion and a plurality of first overlapping portions connecting the first rod portion, the plurality of first overlapping portions being spaced apart from each other, the first rod portion extending in a rod shape along the first direction, the first rod portion being disposed above the plurality of first sides, and the plurality of first overlapping portions being respectively connected to the plurality of first sides or the plurality of second sides in a one-to-one correspondence.
[0014] In some embodiments, the second boat leaf has a second side along a third direction, and the second boat leaf has opposing third and fourth sides along the first direction, the third direction being perpendicular to the first direction; the second connecting rod includes a second rod portion and a plurality of second overlapping portions connecting the second rod portion, the plurality of second overlapping portions being spaced apart from each other, the second rod portion extending in a rod shape along the first direction, the second rod portion being disposed above the plurality of second sides, and the plurality of second overlapping portions being respectively connected to the plurality of third sides or the plurality of fourth sides in a one-to-one correspondence.
[0015] In some embodiments, each first boat leaf includes a main body and a protrusion connecting the main body, the protrusion having a through hole, and a first connecting rod passing through the through hole to connect multiple first boat leaves in series.
[0016] In some embodiments, each of the first boat sheets has a through hole, through which the first connecting rod passes to connect multiple first boat sheets in series. Correspondingly, each of the second boat sheets has a notch facing the through hole, which prevents the first connecting rod from contacting the second boat sheet.
[0017] This application also provides a process apparatus, including:
[0018] Process cavity; and
[0019] The aforementioned carrier boat is disposed within the process cavity. Attached Figure Description
[0020] Figure 1 This is a three-dimensional schematic diagram of a boat according to an embodiment of this application.
[0021] Figure 2 This is a schematic diagram showing the connection between the first boat page and the first connecting rod of the boat in an embodiment of this application.
[0022] Figure 3 This is a schematic diagram showing the connection between the second boat page and the second connecting rod of the boat in an embodiment of this application.
[0023] Figure 4 This is a schematic diagram showing the arrangement of the first and second connecting rods of a boat according to an embodiment of this application.
[0024] Figure 5 This is a schematic diagram showing the arrangement of the first and second connecting rods of the boat according to another embodiment of this application.
[0025] Figure 6 This is a schematic diagram of the first page of the boat-carrying vessel according to an embodiment of this application.
[0026] Figure 7 This is a schematic diagram of the second page of the boat-carrying vessel according to an embodiment of this application.
[0027] Figure 8 This is a schematic diagram of the process equipment according to an embodiment of this application.
[0028] Explanation of key component symbols:
[0029] Boat 100, First Boat Page 10, Second Boat Page 20, First Direction D1, Second Direction D2, Third Direction D2
[0030] First connecting rod 30, second connecting rod 40, first rod portion 31, first overlapping portion 33, second rod portion 41.
[0031] Second overlapping portion 43, first side 101, first side 102, second side 103, second side 201.
[0032] Third side 202, fourth side 203, main body 11, protrusion 13, through hole 130, notch 210
[0033] Process equipment 200, process cavity 201. Detailed Implementation
[0034] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0035] like Figure 1 As shown, the carrier 100 in this embodiment includes a plurality of first carrier plates 10 and a plurality of second carrier plates 20. The first carrier plates 10 and second carrier plates 20 are configured to have opposite polarities, i.e., one of the first carrier plates 10 and the other is an anode carrier plate, and the other is a cathode carrier plate. Each first carrier plate 10 is plate-shaped, and the plurality of first carrier plates 10 are arranged at intervals along a first direction D1. Each second carrier plate 20 is plate-shaped, and the plurality of second carrier plates 20 are arranged at intervals along the first direction D1. The first direction D1 is the thickness direction of the first carrier plates 10 and the second carrier plates 20. Along the first direction D1, the plurality of second carrier plates 20 and the plurality of first carrier plates 10 are arranged alternately and at intervals. That is, a second carrier plate 20 is disposed between every two adjacent first carrier plates 10, and a first carrier plate 10 is disposed between every two adjacent second carrier plates 20. Along the first direction D1, the first carrier plates 10 and the second carrier plates 20 overlap each other.
[0036] The first boat 10 and the second boat 20 can hold a product to be processed (e.g., a wafer). The first boat 10 and the second boat 20 can be made of graphite material to hold the wafer and apply radio frequency power. When the first boat 10 and the second boat 20 are applied radio frequency power, the reactive gas between two adjacent first boat 10 and second boat 20 is ionized to form plasma, thereby enabling deposition or etching processes to be performed on the wafer held between the first boat 10 and the second boat 20.
[0037] like Figure 1As shown, the carrier in this embodiment further includes at least one first connecting rod 30 and at least one second connecting rod 40. Both the first connecting rod 30 and the second connecting rod 40 are made of insulating material, such as insulating ceramic, but are not limited thereto. The second connecting rod 40 and the first connecting rod 30 are spaced apart from each other. (See also...) Figure 2 The first connecting rod 30 connects to multiple first leaf blades 10, and there is an insulating gap between the first connecting rod 30 and the second leaf blade 20. (See also...) Figure 3 The second connecting rod 40 connects to a plurality of second leaf blades 20, and there is an insulating gap between the second connecting rod 400 and the first leaf blade 10. In this embodiment, the number of second connecting rods 40 is equal to the number of first connecting rods 30.
[0038] Thus, by setting the first connecting rod 30 connecting the first leaf 10 and the second connecting rod 40 connecting the second leaf 20 to be independent and spaced apart, with the first connecting rod 30 and the second leaf 20 completely out of contact, and the second connecting rod 40 and the first leaf 10 completely out of contact, the path for a short circuit between the first leaf 10 and the second leaf 20 is fundamentally broken. Even if a conductive film layer is parasitically deposited on the surfaces of the first connecting rod 30 and the second connecting rod 40, it will not cause a short circuit or leakage between the first leaf 10 and the second leaf 20. In addition, by connecting multiple first leaves 10 with the first connecting rod 30 and connecting multiple second leaves 20 with the second connecting rod 40, the overall strength or stability of the first leaf 10 and the second leaf 20 can be improved.
[0039] In some embodiments, such as Figure 1 and Figure 4 As shown, along a second direction D2 perpendicular to the first direction D1, the first connecting rod 30 and the second connecting rod 40 are arranged alternately and at intervals. By setting the first connecting rod 30 and the second connecting rod 40 to be arranged alternately and at intervals along the second direction D2, sufficient spacing is provided between adjacent first connecting rods 30 and second connecting rods 40, thereby reducing the obstruction of gas or the space occupied by the first connecting rods 30 and second connecting rods 40 on the coating substrate. Figure 1 The example boat 100 shown has two first connecting rods 30 and two second connecting rods 40, but this is not a limitation. It is understood that the number of first connecting rods 30 and second connecting rods 40 can be adjusted according to requirements, for example, based on the length of the first boat 10 and the second boat 20 extending along the second direction D2.
[0040] like Figure 1 and Figure 4 As shown, along the second direction D2, a plurality of first boats 10 and a plurality of second boats 20 have opposing first ends and second ends, wherein a first connecting rod 30 is located at the first end and a second connecting rod 40 is located at the second end.
[0041] In some embodiments, such as Figure 5 As shown, the first connecting rod 30 and the second connecting rod 40 are divided into multiple groups of connecting rods. Each group of connecting rods includes an adjacent and spaced-apart first connecting rod 30 and a second connecting rod 40. These multiple groups of connecting rods are arranged at intervals along the second direction D2. By setting multiple groups of connecting rods, each group including an adjacent and spaced-apart first connecting rod 30 and a second connecting rod 40, the first connecting rods 30 and the second connecting rod 40 can be arranged more densely, thereby improving the overall strength or stability of the carrier. Figure 5 The example carrier 100 shown has four first connecting rods 30 and four second connecting rods 40, totaling four sets of connecting rods, but this is not a limitation. It is understood that the number of first connecting rods 30 and second connecting rods 40 can be adjusted according to requirements, for example, based on the length of the first carrier page 10 and the second carrier page 20 extending along the second direction D2.
[0042] like Figure 5 As shown, along the second direction D2, a plurality of first boats 10 and a plurality of second boats 20 have opposing first ends and second ends, wherein one first connecting rod 30 is located at the first end and the other first connecting rod 30 is located at the second end.
[0043] like Figure 1 As shown, a first connecting rod 30 spans across a plurality of first leaf blades 10. The first connecting rod 30 includes a first rod portion 31 and a plurality of first overlapping portions 33 connecting the first rod portion 31. Both the first rod portion 31 and the first overlapping portions 33 are made of insulating material. The first rod portion 31 extends in a rod shape along a first direction D1. The plurality of first overlapping portions 33 are spaced apart from each other. The first rod portion 31 is disposed on one side of the plurality of first leaf blades 10, and each first overlapping portion 33 connects the first rod portion 31 and a first leaf blade 10, thereby achieving the connection between the first connecting rod 30 and the first leaf blade 10.
[0044] like Figure 1 As shown, the first leaf 10 has a first side 101 along a third direction D3, which is perpendicular to the first direction D1 and the second direction D2. The first leaf 10 has opposing first side 102 and second side 103 along the first direction D1. A first rod portion 31 is disposed above a plurality of first side 101s. A plurality of first overlapping portions 33 are respectively connected to a plurality of first side 101s in a one-to-one correspondence, or the plurality of first overlapping portions 33 are respectively connected to a plurality of second side 103s in a one-to-one correspondence.
[0045] The second boat leaf 20 has a second side 201 along the third direction D3, and a third side 202 and a fourth side 203 along the first direction. A second rod portion 41 is disposed above the plurality of second side portions 201. A plurality of second overlapping portions 43 are respectively connected to a plurality of third side portions 202 in a one-to-one correspondence, or a plurality of second overlapping portions 43 are respectively connected to a plurality of fourth side portions 203 in a one-to-one correspondence. Correspondingly, although not shown in the figures, in some embodiments, the first boat leaf 10 may be provided with a slot that matches the first overlapping portion 33. The first overlapping portion 33 is engaged in the slot and abuts against the first boat leaf 10, thus achieving a fixed connection between the first overlapping portion 33 and the first boat leaf 10.
[0046] like Figure 1 As shown, a second connecting rod 40 spans over a plurality of second leaflets 20. The second connecting rod 40 includes a second rod portion 41 and a plurality of second overlapping portions 43 connecting the second rod portion 41. Both the second rod portion 41 and the second overlapping portions 43 are made of insulating material. The second rod portion 41 extends in a rod shape along a first direction D1. The plurality of second overlapping portions 43 are spaced apart from each other. The second rod portion 41 is disposed on one side of the plurality of second leaflets 20, and each second overlapping portion 43 connects the second rod portion 41 and a second leaflet 20, thereby achieving the connection between the second connecting rod 40 and the second leaflet 20.
[0047] Correspondingly, although not shown in the figure, in some embodiments, the second boat page 20 is provided with a slot that matches the second overlapping part 43. The second overlapping part 43 is held in the slot and abuts against the second boat page 20, thus achieving a fixed connection between the second overlapping part 43 and the second boat page 20.
[0048] Understandably, the connection between the first connecting rod 30 and the first leaf 10 can be achieved using tenons and mortise joints, screws and screw holes, clips and slots, or a combination thereof, to maintain the stability of the connection. Similarly, the connection between the second connecting rod 40 and the second leaf 20 can be achieved using tenons and mortise joints, screws and screw holes, clips and slots, or a combination thereof, to maintain the stability of the connection.
[0049] like Figure 1 As shown, the first connecting rod 30 and the second connecting rod 40 are disposed on the same side of the plurality of first leaflets 10 and the plurality of second leaflets 20.
[0050] To connect the first connecting rod 30 to the first leaf 10, multiple first leaf 10s can be connected in series by making a hole in the first leaf 10 and having the first connecting rod 30 pass through the hole. However, since the first leaf 10 and the second leaf 20 overlap, it is necessary to avoid the first connecting rod 30 contacting the second leaf 20.
[0051] In some embodiments, such as Figure 6As shown, each first boat leaf 10 includes a main body 11 and a protrusion 13 connecting the main body 11. A through hole 130 is formed through the protrusion 13. The main body 11 and the protrusion 13 can be integrally formed from the same material. The main body 11 is rectangular in shape, and the protrusion 13 is connected to one edge of the main body 11. A first connecting rod 30 passes through the through hole 130 and abuts against the protrusion 13, i.e., the first connecting rod abuts against the wall of the through hole 130, thereby connecting the first connecting rod 30 to the first boat leaf 10. In this way, the first connecting rod 30 connects multiple first boat leaves 10 in series. Multiple first boat leaves 10 are arranged at intervals along the first direction D1, with the protrusions 13 aligned and arranged in a row along the first direction D1. Furthermore, the number of protrusions 13 on each first boat leaf 10 is equal to the number of first connecting rods 30. Furthermore, due to the protrusion 13, when the first connecting rod 30 is connected in series with multiple first boat pages 10, it will not come into contact with the second boat page 20 between adjacent first boat pages 10.
[0052] Understandably, the shape of the protrusion 13 is not limited and can be square, semi-circular, semi-elliptical, etc.
[0053] Although not shown in the figure, the second boat leaf 20 can also be configured in this manner, that is, each second boat leaf 20 also includes a main body and a protrusion connecting the main body, and the protrusion has a through hole. The main body and the protrusion can be integrally formed from the same material. The main body is rectangular plate in shape, and the protrusion is connected to one edge of the main body 11. The second connecting rod passes through the through hole and abuts against the protrusion, thereby connecting the second connecting rod 40 to the second boat leaf 20, so that the second connecting rod 40 connects multiple second boat leaves 20 in series. Multiple second boat leaves 20 are arranged at intervals along the first direction D1, and the protrusions are aligned with each other along the first direction D1 to form a row. In addition, the number of protrusions on each second boat leaf 20 is equal to the number of second connecting rods 40. Furthermore, due to the arrangement of the protrusions, when the second connecting rod 40 connects multiple second boat leaves 20 in series, it will not contact the first boat leaf 10 between adjacent second boat leaves 20. Understandably, the protrusions 13 of the first page 10 and the protrusions of the second page 20 are not aligned with each other along the first direction D1.
[0054] In some embodiments, the first leaf 10 does not have a protrusion 13, but instead has a through hole directly provided in the first leaf 10 for the first connecting rod 30 to pass through. Correspondingly, such as Figure 7 As shown, the second boat leaf 20 has a notch 210 positioned to align with the through hole of the first boat leaf 10, so that the first connecting rod 30 can pass through the notch 210 after passing through the first boat leaf 10, thus avoiding contact with the second boat leaf 20. It is understood that the shape of the notch 210 is not limited.
[0055] Similarly, although not shown in the figure, the second boat page 20 may not have a protrusion 13. Instead, a through hole 130 may be provided in the second boat page 20 for the second connecting rod 40 to pass through. Correspondingly, the first boat page 10 is provided with a notch 210 at the position of the through hole 130 of the second boat page 20, so that the second connecting rod 40 can pass through the notch 210 after passing through the second boat page 20, thereby avoiding contact with the first boat page 10.
[0056] Understandably, in order to avoid the through hole 130 affecting the function of the first leaf 10 and the second leaf 20, the position of the through hole 130 of the first leaf 10 is set as close as possible to the edge of the first leaf 10, and the position of the through hole 130 of the second leaf 20 is set as close as possible to the edge of the second leaf 20.
[0057] like Figure 8 As shown, this application embodiment also provides a process apparatus 200, including the aforementioned carrier boat 100. The process apparatus 200 includes a process cavity 201, and the carrier boat 100 is disposed within the process cavity 201. The process apparatus 200 may further include a support mechanism (not shown) for supporting the carrier boat. The support mechanism 23 may, for example, include at least two support rods (not shown) to support the carrier boat. This process apparatus 200 may be a semiconductor process apparatus.
[0058] Furthermore, the process equipment may also include radio frequency electrodes (not shown) to apply radio frequency power between two adjacent first and second boats, causing the reactive gas between the two adjacent first and second boats to be ionized to form plasma, thereby enabling deposition or etching processes on the wafers carried by the first and second boats. In an alternative embodiment, the process equipment may be, for example, a tubular PECVD equipment or a plate-type PECVD equipment.
[0059] This application fundamentally breaks the path for a short circuit between the first boat 10 and the second boat 20 by setting up independent and insulated first connecting rods 30 and second connecting rods 40. The first connecting rod 30 connects to the first boat 10, and the second connecting rod 40 connects to the second boat 20. Even if a conductive film layer is parasitically deposited on the surfaces of the first connecting rods 30 and 40, it will not cause a short circuit or leakage between the first boat 10 and the second boat 20. Furthermore, by connecting multiple first boats 10 with the first connecting rod 30 and multiple second boats 20 with the second connecting rod 40, the overall strength or stability of the first boats 10 and the second boat 20 can be improved.
[0060] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.
Claims
1. A type of boat, characterized in that, include: Multiple first boat pages, each of which is plate-shaped; Multiple second boats, the second boats and the first boats are configured to have opposite polarities, each second boat is plate-shaped, and the multiple second boats and the multiple first boats are arranged alternately and at intervals along a first direction, the first direction being the thickness direction of the first boats and the second boats; At least one insulated first connecting rod, the first connecting rod connecting to a plurality of first leaf blades, and an insulating gap between the first connecting rod and the second leaf blade; and At least one insulated second connecting rod connects to a plurality of second leaf blades, and there is an insulating gap between the second connecting rod and the first leaf blade, wherein the second connecting rod and the first connecting rod are spaced apart from each other.
2. The boat according to claim 1, characterized in that, Along a second direction perpendicular to the first direction, at least one first connecting rod and at least one second connecting rod are arranged alternately and at intervals.
3. The boat according to claim 2, characterized in that, Along the second direction, a plurality of first boat flaps and a plurality of second boat flaps have opposing first ends and second ends, wherein one of the first connecting rods is located at the first end and one of the second connecting rods is located at the second end.
4. The boat according to claim 1, characterized in that, At least one first connecting rod and at least one second connecting rod are divided into multiple groups of connecting rods. Each group of connecting rods includes one first connecting rod and one second connecting rod that are spaced apart from each other. The multiple groups of connecting rods are arranged at intervals along a second direction that is perpendicular to the first direction.
5. The boat according to claim 1, characterized in that, The number of the first connecting rods is equal to the number of the second connecting rods.
6. The boat according to claim 1, characterized in that, The first boat leaf has a first side edge along a third direction, and the first boat leaf has opposing first and second sides along the first direction, the third direction being perpendicular to the first direction; The first connecting rod includes a first rod portion and a plurality of first overlapping portions connecting the first rod portion. The plurality of first overlapping portions are spaced apart from each other. The first rod portion extends in a rod shape along the first direction. The first rod portion is disposed above a plurality of first sides. The plurality of first overlapping portions are respectively connected to a plurality of first sides or a plurality of second sides.
7. The boat according to claim 1, characterized in that, The second boat leaf has a second side along a third direction, and the second boat leaf has opposing third and fourth sides along the first direction, the third direction being perpendicular to the first direction; The second connecting rod includes a second rod portion and a plurality of second overlapping portions connecting the second rod portion. The plurality of second overlapping portions are spaced apart from each other. The second rod portion extends in a rod shape along the first direction. The second rod portion is disposed above a plurality of second sides. The plurality of second overlapping portions are respectively connected to a plurality of third sides or a plurality of fourth sides.
8. The boat according to claim 1, characterized in that, Each of the first boat pages includes a main body and a protrusion connecting the main body. The protrusion has a through hole, and the first connecting rod passes through the through hole to connect multiple first boat pages in series.
9. The boat according to claim 1, characterized in that, Each of the first boat sheets has a through hole, through which the first connecting rod passes to connect multiple first boat sheets in series. Correspondingly, each of the second boat sheets has a notch facing the through hole, which prevents the first connecting rod from contacting the second boat sheet.
10. A process equipment, characterized in that, include: Process cavity; as well as The carrier boat as described in any one of claims 1 to 9 is disposed within the process cavity.