Electrical connection device

Abstract

This electrical connection device is provided with: a first substrate having a first surface and a second surface facing in the opposite direction to the first surface; a fixing nut disposed inside the first substrate; a second substrate laminated on the second surface; and a fixing bolt disposed on the second substrate. The threaded part of the fixing bolt passes through at least a part of the second substrate and is inserted into the first substrate from the second surface, and the threaded part is fitted with the fixing nut to fix the first substrate to the second substrate.

Description

Electrical connection device Technical Field

[0001] This invention relates to an electrical connection device for inspecting the electrical properties of an object. Background Technology

[0002] To measure the electrical characteristics of an object under inspection, such as an integrated circuit, an electrical connection device is used to electrically connect the object under inspection and an inspection apparatus. The electrical connection device includes components such as a probe that contacts the object under inspection, a probe head that supports the probe, and a wiring board with internal wiring that electrically connects the probe and the inspection apparatus.

[0003] The wiring substrate includes internal wiring such as signal wiring that transmits electrical signals between the signal terminals of the object under inspection and the inspection device, grounding wiring that supplies ground voltage to the object under inspection, and power supply wiring that supplies power voltage to the object under inspection. Probe pads that connect to the internal wiring are disposed on the surface of the wiring substrate. By stacking the probe head and the wiring substrate, the probe contacts the probe pads, and the probe is electrically connected to the internal wiring of the wiring substrate.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2007-178405 Summary of the Invention

[0007] The probe head is secured to the wiring board by a fixing screw, for example, inserted from the lower surface opposite the object being inspected. In this case, during inspection of the object, the fixing screw may loosen due to vibration or other factors. There is a concern that a loose fixing screw may protrude from the lower surface of the probe head and come into contact with the object being inspected, or that the fixing screw may fall from the probe head onto the object being inspected, causing damage to the object.

[0008] In view of the above-mentioned problems, the object of the present invention is to provide an electrical connection device that prevents damage to the object being inspected caused by screws in the components of the fixed electrical connection device.

[0009] An electrical connection device according to one aspect of the present invention comprises: a first substrate having a first surface and a second surface facing in the opposite direction to the first surface; a fixing nut disposed inside the first substrate; a second substrate stacked on the second surface; and a fixing bolt disposed on the second substrate. The threaded portion of the fixing bolt passes through at least a portion of the second substrate and is inserted into the first substrate from the second surface, the threaded portion of the fixing bolt engaging with the fixing nut to fix the first substrate to the second substrate.

[0010] According to the present invention, an electrical connection device is provided that prevents damage to an object under inspection caused by screws in the components of the fixed electrical connection device. Attached Figure Description

[0011] Figure 1 is a schematic diagram showing the configuration of the electrical connection device according to the embodiment.

[0012] Figure 2 is a schematic enlarged view showing the structure of the fixing nut and fixing bolt of the electrical connection device in the embodiment.

[0013] Figure 3 is a schematic enlarged view showing other construction details of the fixing nut and fixing bolt of the electrical connection device in the embodiment.

[0014] Figure 4 is a schematic top view showing the structure of the fixing nut of the electrical connection device according to the embodiment.

[0015] Figure 5 is a schematic diagram showing the configuration of the electrical connection device of the comparative example.

[0016] Figure 6 is a schematic diagram showing the configuration of the electrical connection device in a modified embodiment.

[0017] Symbol Explanation

[0018] 1—Electrical connection device, 2—Object to be inspected, 10—Probe, 20—First substrate, 21—First layer, 22—Second layer, 30—Second substrate, 35—Probe pad, 38—Fixing resin, 40—Fixing nut, 41—Groove forming part, 42—Flange part, 50—Fixing bolt, 51—First part, 52—Second part, 60—Printed substrate, 70—Reinforcing member, 80—Wire, 200—Recess, 201—First surface, 202—Second surface, 250—Connecting pin, 421—Insertion part, 422—Protrusion, 601—First connecting screw, 602—Second connecting screw, 603—Third connecting screw. Detailed Implementation

[0019] Next, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description of the drawings, the same or similar parts are labeled with the same or similar symbols. However, it should be noted that the drawings are schematic diagrams, and the thickness proportions of each part differ from reality. Furthermore, the drawings also include parts with different dimensional relationships and proportions. The embodiments shown below illustrate apparatus and methods for embodying the technical concept of the present invention; the embodiments of the present invention do not specify the materials, shapes, structures, arrangements, etc., of the constituent parts as described below.

[0020] The electrical connection device 1 shown in Figure 1 is used for measuring the electrical characteristics of an object 2. The electrical connection device 1 includes: a first substrate 20 having a first surface 201 facing the object 2 and a second surface 202 facing the opposite direction to the first surface 201; and a second substrate 30 stacked on the second surface 202 of the first substrate 20. Furthermore, the electrical connection device 1 includes a fixing nut 40 disposed inside the first substrate 20 and a fixing bolt 50 disposed on the second substrate 30. The fixing bolt 50 passes through at least a portion of the second substrate 30, with its threaded portion inserted into the first substrate 20 from the second surface 202. The threaded portion of the fixing bolt 50 engages with the fixing nut 40, fixing the first substrate 20 to the second substrate 30. Details of the fixing nut 40 and the fixing bolt 50 will be described later.

[0021] In the description of the embodiment, the direction in which the second substrate 30 is located when viewed from the first substrate 20 is designated as upward, and the direction in which the first substrate 20 is located when viewed from the second substrate 30 is designated as downward. Furthermore, the surface facing upward is referred to as the upper surface, and the surface facing downward is referred to as the lower surface. For example, the first surface 201 is the lower surface of the first substrate 20, and the second surface 202 is the upper surface of the first substrate 20. Additionally, the direction perpendicular to the vertical direction is designated as the horizontal direction. The first surface 201 and the second surface 202 extend in the horizontal direction.

[0022] The probe 10 includes a signal probe that transmits an electrical signal between the object under inspection 2 and the inspection device, and a power probe that supplies power voltage or ground voltage to the object under inspection 2. The probe 10 has one end, i.e., a front end, that contacts a terminal of the object under inspection 2 (not shown in the figure), and the other end, i.e., a base end. The material of the probe 10 may be, for example, nickel (Ni) or a nickel alloy.

[0023] The first substrate 20 may hold the probe tip of the probe 10 in a manner that extends from the first surface 201 toward the object to be inspected 2. A guide hole is formed in the first substrate 20, extending from the first surface 201 to a second surface 202 in the opposite direction to the first surface 201. The first substrate 20 supports the probe 10, which passes through the guide hole. The material of the first substrate 20 is, for example, ceramic.

[0024] The second substrate 30 may be a wiring substrate having internal wiring electrically connected to the probe 10. A probe pad 35 is disposed on the lower surface of the second substrate 30 opposite to the first substrate 20. The base end of the probe 10, which penetrates the first substrate 20, contacts the probe pad 35, which is electrically connected to the internal wiring. The second substrate 30 may be, for example, a multilayer wiring substrate such as an MLO (Multi-Layer Organic) substrate or an MLC (Multi-Layer Ceramic) substrate. The probe pad 35 may be, for example, a metallic material such as gold (Au) or copper (Cu).

[0025] The first substrate 20 of the electrical connection device 1 shown in FIG1 includes a first layer 21 having a first surface 201 and a second layer 22 having a second surface 202. The first layer 21 and the second layer 22 are stacked and fixed to each other by a coupling pin 250.

[0026] The electrical connection device 1 also includes a printed circuit board 60 and a reinforcing member 70 that are sequentially stacked on the second substrate 30.

[0027] A printed circuit board 60 is disposed on the upper surface of a second substrate 30. A recess is formed on a portion of the upper surface of the second substrate 30, opposite to the lower surface of the printed circuit board 60, and a space is provided between the second substrate 30 and the printed circuit board 60. The electrical connection device 1 includes a wiring conductor 80 that passes through the second substrate 30 and the printed circuit board 60, and through the space between the second substrate 30 and the printed circuit board 60. One terminal of the wiring conductor 80 is electrically connected to a probe pad 35. The other terminal of the wiring conductor 80 is electrically connected to an electrode terminal 61 disposed on the upper surface of the printed circuit board 60. In other words, a portion of the wiring conductor 80 is internal wiring of the second substrate 30, and another portion of the wiring conductor 80 is printed wiring of the printed circuit board 60 that is electrically connected to the internal wiring of the second substrate 30. The electrode terminal 61 of the printed circuit board 60 is electrically connected to an inspection device such as an omitted tester. Thus, the probe 10 and the inspection device are electrically connected via the second substrate 30 and the printed circuit board 60.

[0028] As described above, the wiring conductor 80 passes through the interior of a recess formed on the upper surface of the second substrate 30. The wiring conductor 80 can be fixed to the second substrate 30 by curing the fixing resin 38 that flows into the interior of the recess.

[0029] The second substrate 30 may also be a space converter, for example, in which the spacing of the wiring conductors 80 is wider than the spacing of the probes 10. The second substrate 30 may be, for example, a ceramic substrate or an MLO substrate.

[0030] The printed circuit board 60 is fixed to a reinforcing member 70, which has a higher rigidity than the printed circuit board 60. The reinforcing member 70 also serves as a support, which ensures the mechanical strength of the electrical connection device 1 so that the printed circuit board 60 does not flex, and fixes the components of the electrical connection device 1 respectively.

[0031] The printed circuit board 60 is fixed to the rigid body reinforcement 70 by a first connecting screw 601 and a second connecting screw 602 that pass through the lower surface and the upper surface of the printed circuit board 60. Additionally, the second substrate 30 is fixed to the printed circuit board 60 by a third connecting screw 603 that passes through the lower surface and the upper surface. As shown in FIG1, the tip of the third connecting screw 603 may also engage with the head of the first connecting screw 601.

[0032] The following is a detailed description of the fixing nut 40 and the fixing bolt 50.

[0033] As shown in Figure 1, the fixing bolt 50 continuously penetrates the second substrate 30 and the printed circuit board 60. The outer diameter of the second portion 52 of the fixing bolt 50 penetrating the printed circuit board 60 is larger than the outer diameter of the first portion 51 of the fixing bolt 50 penetrating the second substrate 30. At the boundary between the first portion 51 and the second portion 52, the end face of the second portion 52, which extends outward from the outer edge of the first portion 51, abuts against the upper surface of the second substrate 30. Furthermore, the portion of the second portion 52 of the fixing bolt 50 that protrudes from the printed circuit board 60 is housed in a hole formed on the lower surface of the reinforcing member 70.

[0034] Figure 2 shows an enlarged view of the engagement portion of the fixing nut 40 and the fixing bolt 50. The fixing nut 40 includes: a groove forming portion 41 having a groove corresponding to the helical groove formed on the side of the threaded portion of the fixing bolt 50; and a flange portion 42 connected to the groove forming portion 41 and extending in a direction intersecting the extending direction (vertical direction) of the fixing bolt 50. The flange portion 42 shown in Figure 2 extends horizontally perpendicular to the vertical direction.

[0035] The flange portion 42 is embedded in the first substrate 20, and the fixing nut 40 is fixed to the first substrate 20. For example, as shown in FIG2, the flange portion 42 can also be inserted into the space formed between the first layer 21 and the second layer 22. In this way, by embedding the flange portion 42 into the first substrate 20, the fixing nut 40 is prevented from falling off the first substrate 20. Moreover, free rotation during thread tightening when the fixing bolt 50 is fitted into the fixing nut 40 can be prevented.

[0036] The flange portion 42 may include: an insertion portion 421 extending parallel to the first surface 201 and inserted into the first substrate 20; and a protrusion 422 disposed on the surface of the insertion portion 421 and protruding in a direction intersecting the extending direction of the insertion portion 421. The protrusion 422 protrudes, for example, from the surface of the insertion portion 421 in an upward or downward direction. A recess 200 is formed in the first substrate 20 for inserting the protrusion 422.

[0037] Figure 2 illustrates, illustratively, the case where the protrusion 422 is formed on the lower surface of the insertion portion 421. Therefore, the recess 200 is formed in the first layer 21. Conversely, when the protrusion 422 is formed on the upper surface of the insertion portion 421, the recess 200 is formed in the second layer 22. Alternatively, as shown in Figure 3, the protrusion 422 may be formed on both the upper and lower surfaces of the insertion portion 421. In this case, the recess 200 is formed in both the first layer 21 and the second layer 22. Thus, the recess 200 is formed in at least one of the first layer 21 and the second layer 22.

[0038] As described above, the fixing nut 40 is stably positioned on the first substrate 20 by the protrusion 422 of the flange 42 being inserted into the recess 200 of the first substrate 20. This prevents contact damage between the fixing nut 40 and the first substrate 20 caused by the impact of thread tightening when the fixing bolt 50 is fitted into the fixing nut 40.

[0039] The fixing nut 40 and the fixing bolt 50 do not protrude beyond the first surface 201 toward the object 2 being inspected. In other words, the entire fixing nut 40 and the threaded portion of the fixing bolt 50 are housed inside the first base plate 20. Therefore, contact between the fixing nut 40 or the fixing bolt 50 and the object 2 being inspected is prevented.

[0040] Although the illustration is omitted, the space formed in the first substrate 20 for inserting the flange 42 has a corner bend in the inner wall surface. This is because the space provided in the first substrate 20 is formed by machining with a drill bit, etc. Therefore, as shown in FIG4, the corner of the insertion part 421 can be chamfered. FIG4 shows a top view of the fixing nut 40. In this way, by making the outer edge of the insertion part 421 rounded, the side of the flange 42 and the inner wall surface of the space formed in the first substrate 20 are in surface contact. As a result, damage to the first substrate 20 caused by the contact between the first substrate 20 and the flange 42 can be suppressed. In addition, a constant space can be provided around the fixing nut 40 to take into account the manufacturing leeway of the electrical connection device 1, but the narrower the gap around the flange 42, the less wobble there is, and the more the fixing nut 40 can be prevented from tilting during tightening.

[0041] In the above description, a fixing nut 40 with one flange portion 42 extending from the groove forming portion 41 was described. However, the fixing nut 40 may also have multiple flange portions 42 extending in different directions. For example, the fixing nut 40 may also have two flange portions 42 extending in opposite directions. Furthermore, the case where the flange portion 42 extends from the groove forming portion 41 in one direction has been described, but the flange portion 42 may also extend in multiple directions. The more flange portions 42 there are or the more directions they extend, the more stably the fixing nut 40 can be fixed to the first substrate 20. On the other hand, by arranging the flange portion 42 only on one side of the groove forming portion 41, the increase in the area of ​​the first substrate 20 and the second substrate 30 can be suppressed.

[0042] Furthermore, while the above description describes the case where the protrusion 422 is cylindrical, the shape of the protrusion 422 is not limited to a cylindrical shape. Additionally, the protrusion 422 and the insertion portion 421 can be integrally formed, or the protrusion 422, made of a different material than the insertion portion 421, can be formed on the insertion portion 421.

[0043] As explained above, in the electrical connection device 1 of the embodiment, a fixing nut 40 disposed inside the first substrate 20 and a fixing bolt 50 passing through at least a portion of the second substrate 30 engage to fix the first substrate 20 to the second substrate 30. In contrast, for example, in the electrical connection device 1M of the comparative example shown in FIG. 5, the first substrate 20 is fixed to the second substrate 30 by a fixing screw 300 inserted from the lower surface of the first substrate 20. Therefore, there is a concern that the fixing screw 300 may protrude from the lower surface of the first substrate 20 and come into contact with the object being inspected, or may fall off the first substrate 20.

[0044] On the other hand, according to the electrical connection device 1, even if the engagement of the fixing nut 40 and the fixing bolt 50 becomes loose, there is no situation where the fixing nut 40 or the fixing bolt 50 protrudes from the lower surface of the first substrate 20 or falls off the first substrate 20. Moreover, by inserting the protrusion 422 of the flange portion 42 into the recess 200 of the first substrate 20, it is possible to suppress free rotation during thread tightening when the fixing bolt 50 is engaged with the fixing nut 40 and to prevent contact damage between the fixing nut 40 and the first substrate 20.

[0045] Furthermore, according to the electrical connection device 1, the first substrate 20 and the second substrate 30 are clamped by a fixing nut 40 and a fixing bolt 50, thereby fixing the first substrate 20 to the second substrate 30. Therefore, even if the material of the first substrate 20 is not suitable for forming threaded grooves, the first substrate 20 and the second substrate 30 can still be connected. Moreover, by connecting the first substrate 20 and the second substrate 30 using the fixing nut 40 and the fixing bolt 50, the first substrate 20 and the second substrate 30 can also be easily separated. Therefore, maintenance such as component replacement of the electrical connection device 1 is easy to perform.

[0046] <Variation Example>

[0047] As shown in Figure 6, the portion of the second substrate 30 that houses the fixing bolt 50 can also be made of a conductive material with higher rigidity than insulating materials such as ceramic. For example, the portion of the second substrate 30 that houses the internal wiring can be made of ceramic, while the outer edge of the fixing bolt 50 can be made of metal.

[0048] (Other implementation methods)

[0049] As described above, the present invention has been described through embodiments, but it should not be construed as limiting the invention to the extent that the discussion and drawings form part of this disclosure. Based on this disclosure, those skilled in the art will be able to recognize various alternative embodiments, examples, and techniques employed.

[0050] For example, the case where the material of the first substrate 20 is ceramic was illustrated above, but the material of the first substrate 20 may also be resin or glass, in addition to ceramic. Alternatively, the first substrate 20 may also be a thin metal plate that cannot form threaded grooves.

[0051] Alternatively, the electrical connection device 1 can also hold the probe 10 in a bent state. By holding the probe 10 in a bent state, when the tip of the probe 10 contacts the object to be inspected 2, the probe 10 bends further through flexural deformation, allowing the probe 10 to contact the object to be inspected 2 with a predetermined pressure. For example, by offsetting the positions of the guide holes of the first layer 21 and the second layer 22 of the first substrate 20 through which the same probe 10 passes in the same horizontal direction, the probe 10 can be bent in the space between the guide holes of the first layer 21 and the second layer 22.

[0052] Thus, the present invention naturally includes various embodiments not described above. Therefore, the technical scope of the present invention is determined solely by the specific aspects of the invention as described in the claims, which are well-determined by the foregoing description.

Claims

1. An electrical connection device for inspecting an object, characterized in that, It comprises: a first substrate having a first surface opposite to the object being inspected and a second surface facing in the opposite direction to the first surface; and a fixing nut disposed inside the first substrate; A second substrate is stacked on the second surface; and a fixing bolt passes through at least a portion of the second substrate and inserts a threaded portion into the first substrate from the second surface, and engages the threaded portion with the fixing nut to fix the first substrate to the second substrate.

2. The electrical connection device according to claim 1, characterized in that, The fixing nut includes: a groove forming portion having a groove corresponding to the groove formed in the threaded portion of the fixing bolt; and a flange portion connected to the groove forming portion and extending in a direction intersecting the extension direction of the fixing bolt, the flange portion being embedded in the first substrate, and the fixing nut being fixed to the first substrate.

3. The electrical connection device according to claim 2, characterized in that, The flange portion includes: an insertion portion that extends parallel to the first surface and is inserted into the first substrate; and a protrusion disposed on the surface of the insertion portion and protruding in a direction intersecting the extension direction of the insertion portion, and a recess into which the protrusion is embedded is formed in the first substrate.

4. The electrical connection device according to claim 3, characterized in that, The first substrate includes: a first layer having a first surface; and a second layer having a second surface, wherein the flange is inserted into a space formed between the first layer and the second layer, and the recess is formed in at least one of the first layer and the second layer.

5. The electrical connection device according to claim 1, characterized in that, The fixing nut and the fixing bolt do not protrude beyond the first surface facing the object being inspected.

6. The electrical connection device according to claim 1, characterized in that, The first substrate is made of ceramic.

7. The electrical connection device according to any one of claims 1 to 6, characterized in that, It also includes a probe that contacts the object to be inspected, wherein the first substrate is a probe head that holds the probe in such a way that it extends from the first surface toward the object to be inspected.

8. The electrical connection device according to claim 7, characterized in that, The second substrate is a wiring substrate having internal wiring that is electrically connected to the probe.

9. The electrical connection device according to claim 8, characterized in that, It also includes a printed circuit board stacked on the second substrate, wherein the fixing bolt continuously penetrates the second substrate and the printed circuit board, the outer diameter of the second portion of the fixing bolt penetrating the printed circuit board is larger than the outer diameter of the first portion of the fixing bolt penetrating the second substrate, and the end face of the second portion, which extends outward from the outer edge of the first portion at the boundary between the first portion and the second portion, abuts against the second substrate.

10. The electrical connection device according to claim 9, characterized in that, It also includes a rigid reinforcement layered on the printed circuit board, wherein the portion of the second part of the fixing bolt protruding from the printed circuit board is received in a hole formed in the reinforcement.

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