Multi-degree-of-freedom motion module and semiconductor packaging test equipment

Abstract

The invention relates to the technical field of motion modules, in particular to a multi-degree-of-freedom motion module and semiconductor packaging test equipment. The multi-degree-of-freedom motion module comprises a rack, the z-axis rod-shaped motor is arranged on the rack; a movable gap is reserved between a first stator and a first rotor of the z-axis rod-shaped motor; the first rotor can move in the z-axis direction; the x-axis flat plate motor is arranged on the lower side of the z-axis rod-shaped motor, and the first flat plate motor can drive the first rotor to move in the x-axis direction; the y-axis flat plate motor is arranged on the upper side of the z-axis rod-shaped motor, and the first flat plate motor can drive the first rotor to move in the y-axis direction; the first rotor is provided with a load seat, and the load is arranged on the load seat. A movable gap is reserved between the first stator and the first rotor, the first rotor can move in the x, y and z directions under the joint cooperation of the x-axis flat motor, the y-axis flat motor and the z-axis rod-shaped motor, and the design is direct driving, good in precision, compact in structure and beneficial to module miniaturization.

Description

Multi-degree-of-freedom motion modules and semiconductor packaging testing equipment Technical Field

[0001] This invention relates to the field of motion module technology, and in particular to a multi-degree-of-freedom motion module and semiconductor packaging and testing equipment. Background Technology

[0002] XYZ modules are frequently used in automated production equipment to precisely load workpieces onto corresponding workstations. Commonly available modules include cylinder-driven, ball screw servo-driven, and belt-driven XYZ modules. These modules generally suffer from the following problems: 1. Their kinetic energy requires multi-stage transmission, and frequent movements can lead to insufficient positioning accuracy, making it difficult to meet the high-precision and compact requirements of high-end equipment. 2. These XYZ modules are generally large in size, making them unsuitable for high-precision environments with low movement.

[0003] For example, the automatic screw-locking device for cover plates disclosed in Chinese patent application number CN202222746620.2 has a linear XYZ module, which is usually driven by a lead screw, belt, or cylinder, and has the aforementioned problems.

[0004] For example, a cantilevered three-degree-of-freedom sorting and storage platform disclosed in Chinese patent application number CN202020220096.3 uses a servo motor to drive its XYZ linear module, which also suffers from the above-mentioned problems. Summary of the Invention

[0005] In view of this, the present invention addresses the shortcomings of the prior art by providing a multi-degree-of-freedom motion module that is directly driven by a motor, which is not only highly accurate but also more compact, thereby overcoming the deficiencies of the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: This application provides a multi-degree-of-freedom motion module, including a frame; a z-axis rod motor is mounted on the frame; a clearance is provided between the first stator and the first mover of the z-axis rod motor; the first mover can move in the z-axis direction; an x-axis flat motor is mounted below the z-axis rod motor, and the first flat motor can drive the first mover to move in the x-axis direction; a y-axis flat motor is mounted above the z-axis rod motor, and the first flat motor can drive the first mover to move in the y-axis direction; a load seat is provided on the first mover, and the load is mounted on the load seat.

[0007] Preferably, the frame is provided with an x-axis sliding module, and the load base is provided with a y-axis sliding module; a z-axis sliding module is provided between the x-axis sliding module and the y-axis sliding module; an x-axis blocking block is provided on the base plate of the frame; a z-axis blocking block is provided on the x-axis sliding module; a y-axis blocking block is provided on the y-axis sliding module; the x-axis blocking block can stop the x-axis sliding module; the z-axis blocking block can stop the z-axis sliding module; and the y-axis blocking block can stop the y-axis sliding module.

[0008] Preferably, the x-axis sliding module includes an x-axis guide rail, an x-axis slider sliding on the x-axis guide rail, and a first mounting plate disposed on the x-axis slider; an x-axis blocking block can stop the first mounting plate; the z-axis sliding module and the z-axis blocking block are disposed on the first mounting plate; the z-axis sliding module includes a z-axis guide rail, a z-axis slider sliding on the z-axis guide rail, and a second mounting plate disposed on the z-axis slider; the z-axis blocking block is disposed on the first mounting plate and can stop the second mounting plate; the y-axis sliding module includes a y-axis guide rail and a y-axis slider sliding on the y-axis guide rail; the y-axis guide rail is disposed on the second mounting plate; the y-axis slider is connected to a load seat; the y-axis blocking block is disposed on the second mounting plate, and the load seat can stop the y-axis blocking block.

[0009] Preferably, an x-axis encoder is provided on the side of the first mounting plate; a z-axis encoder is provided on the front of the second mounting plate; and a y-axis encoder is provided on the back of the second mounting plate.

[0010] Preferably, at least one magnetic spring is provided between the first mounting plate and the second mounting plate.

[0011] Preferably, the x-axis flatbed motor includes a second stator and a second mover; the second stator is disposed on the lower inner wall of the frame, and the second mover is disposed at the bottom of the z-axis rod motor; the y-axis flatbed motor includes a third stator and a third mover; the third stator is disposed on the upper inner wall of the frame, and the third mover is disposed at the top of the z-axis rod motor.

[0012] Preferably, the second stator and the third stator are filled with insulating glue, and the second stator (31) and the third stator are glued to the corresponding mounting slots on the frame.

[0013] Preferably, the frame includes a base plate, a top plate, and upright plates; triangular frames are provided to connect the base plate and the upright plates, and the top plate and the upright plates.

[0014] Preferably, there are two z-axis rod motors, and a connecting frame is provided between the two first movers.

[0015] This application discloses a semiconductor packaging testing device, including the aforementioned multi-degree-of-freedom motion module; the multi-degree-of-freedom motion module is equipped with a suction cup or clamp for acquiring materials.

[0016] Compared with existing technologies, this invention has significant advantages and beneficial effects. Specifically, as shown in the above technical solution, the z-axis rod motor is mounted on the frame; the x-axis flat motor is mounted below the z-axis rod motor; and the y-axis flat motor is mounted above the z-axis rod motor. A clearance is provided between the first stator and the first mover, allowing the first mover to move in the xyz directions through the combined action of the x-axis flat motor, y-axis flat motor, and z-axis rod motor. This design provides direct drive, high precision, and facilitates module miniaturization, resulting in a more compact structure. Attached Figure Description

[0017] Figure 1 is an overall schematic diagram of an embodiment of the present invention.

[0018] Figure 2 is a schematic diagram of Figure 1 from another angle, representing an embodiment of the present invention.

[0019] Figure 3 is a partial structural schematic diagram of an embodiment of the present invention.

[0020] Figure 4 is an exploded view of an embodiment of the present invention.

[0021] Figure 5 is a partial structural exploded view of an embodiment of the present invention.

[0022] Figure 6 is a cross-sectional schematic diagram of an embodiment of the present invention.

[0023] Figure Identification: 10. Frame; 11. Base plate; 12. Top plate; 13. Vertical plate; 14. Triangular frame; 15. Mounting slot; 20. Z-axis rod motor; 21. First stator; 22. First mover; 23. Load seat; 24. Load; 25. Connecting frame; 210. Z-axis sliding module; 211. Z-axis blocking block; 212. Z-axis guide rail; 213. Z-axis slider; 214. Second mounting plate; 215. Z-axis encoder; 30. X-axis flat motor; 31. Second stator; 32. Second mover; 310. X-axis sliding module; 311. X-axis blocking block; 312. X-axis guide rail; 313. X-axis slider; 314. First mounting plate; 315. X-axis encoder; 316. Magnetic spring; 40. Y-axis flat motor; 41. Third stator; 42. Third mover; 410. Y-axis sliding module; 411. Y-axis blocking block; 412. Y-axis guide rail; 413. Y-axis slider; 414. Y-axis encoder. Detailed Implementation

[0024] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0025] Please refer to Figures 1 to 6 for Example 1, which shows the specific structure of a preferred embodiment of the present invention, which is a multi-degree-of-freedom motion module.

[0026] This motion module achieves movement in the xyz axis directions under the direct drive of the z-axis rod motor 20, the x-axis flat motor, and the y-axis flat motor. It has a compact structure, high transmission efficiency, and better precision.

[0027] This application provides a multi-degree-of-freedom motion module, including a frame 10; a z-axis rod motor 20 mounted on the frame 10; a clearance is provided between the first stator 21 and the first mover 22 of the z-axis rod motor 20; the first mover 22 can move in the z-axis direction; an x-axis flat motor 30 is mounted below the z-axis rod motor 20, and the first flat motor 30 can drive the first mover 22 to move in the x-axis direction; a y-axis flat motor 30 is mounted above the z-axis rod motor 20, and the first flat motor 30 can drive the first mover 22 to move in the y-axis direction; a load seat 23 is provided on the first mover 22, and a load 24 is mounted on the load seat 23. The z-axis rod motor is a tubular linear motor, whose stator is a stainless steel shaft with built-in permanent magnets, and the mover is a coreless coil slider, achieving efficient magnetic line cutting through a 360° annular winding. A flatbed motor is a common type of linear motor. Its structure can be considered as a rotary motor cut radially and flattened, consisting of a mover (including coil windings) and a magnetic track (including rare-earth magnets). Brushless commutation is achieved through three-phase coils and Hall effect elements, resulting in high acceleration, fast dynamic response, and high positioning accuracy. The load holder 23 is plate-shaped and can be hung on the load 24 in the upper mold. The first mover 22 can move in the z-axis direction. A clearance exists between the first stator 21 and the first mover 22. The x-axis flatbed motor allows the first mover 22 to move in the x-axis direction, and the y-axis flatbed motor allows it to move in the y-axis direction. Therefore, with the combined action of the x-axis flatbed motor, the y-axis flatbed motor, and the z-axis rod motor, the load holder 23 can move in the x, y, and z directions. This type of linear motor module features high acceleration, fast dynamic response, high positioning accuracy, compact structure, and smaller size.

[0028] Preferably, the frame 10 is provided with an x-axis sliding module 310, and the load seat 23 is provided with a y-axis sliding module 410; a z-axis sliding module 210 is provided between the x-axis sliding module 310 and the y-axis sliding module 410; an x-axis blocking block 311 is provided on the base plate 11 of the frame 10; a z-axis blocking block 211 is provided on the x-axis sliding module 310; a y-axis blocking block 411 is provided on the y-axis sliding module 410; the x-axis blocking block 311 can stop the x-axis sliding module 310; the z-axis blocking block 211 can stop the z-axis sliding module 210; and the y-axis blocking block 411 can stop the y-axis sliding module 410. The x-axis sliding module 310, the y-axis sliding module 410, and the z-axis sliding module 210 allow the first mover 22 to move more smoothly, ensuring its motion stability. The x-axis blocking block 311, y-axis blocking block 411, and z-axis blocking block 211 can limit the amount of motion in the corresponding directions, ensuring motion accuracy and preventing damage.

[0029] Preferably, the x-axis sliding module 310 includes an x-axis guide rail 312, an x-axis slider 313 sliding on the x-axis guide rail 312, and a first mounting plate 314 disposed on the x-axis slider 313; an x-axis blocking block 311 can stop the first mounting plate 314. The x-axis guide rail 312 is disposed on the base plate 11, the x-axis slider 313 slides on the x-axis guide rail 312, and the first mounting plate 314 is disposed on the x-axis slider 313. There are two x-axis blocking blocks 311, which are spaced apart. The first mounting plate 314 moves between the two x-axis blocking blocks 311, and the x-axis blocking blocks 311 can control the amount of movement of the load seat 23 in the x-direction.

[0030] The z-axis sliding module 210 and the z-axis blocking block 211 are mounted on the first mounting plate 314. The z-axis sliding module 210 includes a z-axis guide rail 212, a z-axis slider 213 that slides on the z-axis guide rail 212, and a second mounting plate 214 mounted on the z-axis slider 213. The z-axis blocking block 211 is mounted on the first mounting plate 314 and can stop the second mounting plate 214. The z-axis guide rail 212 is mounted on the first mounting plate 314; the second mounting plate 214 is mounted on the z-axis slider 213, which can slide on the z-axis guide rail 212. In this embodiment, there is one z-axis blocking block 211, and below the z-axis blocking block 211 is an x-axis blocking block 311. Therefore, the cooperation of one z-axis blocking block 211 and one x-axis blocking block 311 can effectively control the movement of the load seat 23 in the z-axis direction.

[0031] The y-axis sliding module 410 includes a y-axis guide rail 412 and a y-axis slider 413 that slides on the y-axis guide rail 412. The y-axis guide rail 412 is mounted on a second mounting plate 214. The y-axis slider 413 is connected to a load seat 23. A y-axis blocking block 411 is mounted on the second mounting plate 214, and the load seat 23 can stop the y-axis blocking block 411. The y-axis guide rail 412 is mounted on the second mounting plate 214; the y-axis slider 413 is connected to the load seat 23 and can slide on the y-axis guide rail 412. There are two y-axis blocking blocks 411, which cooperate with the load seat 23 to effectively control the amount of movement of the load seat 23 in the y-axis direction.

[0032] Preferably, an x-axis encoder 315 is disposed on the side of the first mounting plate 314; a z-axis encoder 215 is disposed on the front of the second mounting plate 214; and a y-axis encoder 414 is disposed on the back of the second mounting plate 214. An encoder is a high-precision sensor that measures displacement or rotational motion along the X, Y, and Z axes. By converting mechanical motion into electrical signals, it provides real-time feedback of position, speed, and direction information, ensuring motion accuracy. The x-axis encoder 315, y-axis encoder 414, and z-axis encoder 215 can precisely control the amount of motion in the x, y, and z directions, resulting in better accuracy.

[0033] Preferably, at least one magnetic spring 316 is disposed between the first mounting plate 314 and the second mounting plate 214. The magnetic spring 316 is a device that uses the repulsive force (or attractive force under a specific structure) between permanent magnets or electromagnets to provide elastic force or cushioning effect. Its core characteristics are no contact, no mechanical friction, and long lifespan. Unlike traditional mechanical springs, the magnetic spring 316 generates force through the action of a magnetic field, requiring no external energy source, and the force value is stable.

[0034] Preferably, the x-axis flat motor includes a second stator 31 and a second mover 32; the y-axis flat motor includes a third stator 41 and a third mover 42; the second mover 32 is disposed at the bottom of the z-axis rod motor 20, and the second stator 31 is disposed on the lower inner wall of the frame 10; the third mover 42 is disposed at the top of the z-axis rod motor 20, and the third stator 41 is disposed on the upper inner wall of the frame 10. The second stator (31) and the third stator (41) are filled with insulating glue and are adhered to the mounting groove 15 on the frame. The second stator 31, the second mover 32, the third stator 41, and the third mover 42 can be installed by screws or adhesive. The x-axis flat motor drives the first mover 22 to move in the x-axis direction, the y-axis flat motor drives the first mover 22 to move in the y-axis direction, and the first mover 22 of the z-axis rod motor 20 moves in the z-axis direction. The use of insulating adhesive in conjunction with mounting slots enhances the structural strength of each stator and simplifies installation. Similarly, the second and third movers 32 and 42 can also be installed using insulating adhesive, which is equally convenient. Therefore, the assembly of the X-axis and Y-axis flatbed motors is more efficient and convenient.

[0035] Preferably, the frame 10 includes a base plate 11, a top plate 12, and an upright plate 13; a triangular frame 14 is provided to connect the base plate 11 and the upright plate 13, and the top plate 12 and the upright plate 13. This design can improve the overall robustness of the frame 10, provide better stability, and increase the internal space.

[0036] Preferably, there are two z-axis rod motors 20, connected by a connecting frame 25 between the two first movers 22. Two z-axis rod motors 20 improve the stability of z-axis movement, resulting in smoother up-and-down motion. The connecting frame 25 is a rectangular frame, facilitating installation.

[0037] Example 2 includes the multi-degree-of-freedom motion module of Example 1, and the same parts will not be described again. This application provides a semiconductor packaging testing device, including the aforementioned multi-degree-of-freedom motion module; the multi-degree-of-freedom motion module is equipped with a suction cup or clamp for acquiring materials. The multi-degree-of-freedom motion module enables the semiconductor packaging testing device to acquire and load materials more accurately, contributing to the miniaturization of the device.

[0038] In summary, the key design feature of this invention is that there is a clearance between the first stator 21 and the first mover 22. With the combined action of the x-axis flatbed motor, the y-axis flatbed motor, and the z-axis rod motor 20, the first mover 22 can move in the xyz direction. This design is a direct drive, has good precision, and is conducive to module miniaturization, making the structure more compact.

[0039] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A multi-degree-of-freedom motion module, characterized in that: Includes a frame (10); a z-axis rod motor (20) is mounted on the frame (10); there is a clearance between the first stator (21) and the first mover (22) of the z-axis rod motor (20); the first mover (22) can move in the z-axis direction; an x-axis flat motor (30) is mounted on the lower side of the z-axis rod motor (20), and the first flat motor (30) can drive the first mover (22) to move in the x-axis direction; a y-axis flat motor (40) is mounted on the upper side of the z-axis rod motor (20), and the first flat motor (30) can drive the first mover (22) to move in the y-axis direction; a load seat (23) is mounted on the first mover (22), and a load (24) is mounted on the load seat (23).

2. The multi-degree-of-freedom motion module according to claim 1, characterized in that: An x-axis sliding module (310) is provided on the frame (10), and a y-axis sliding module (410) is provided on the load seat (23). A z-axis sliding module (210) is provided between the x-axis sliding module (310) and the y-axis sliding module (410). An x-axis blocking block (311) is provided on the base plate (11) of the frame (10). A z-axis blocking block (211) is provided on the x-axis sliding module (310). A y-axis blocking block (411) is provided on the y-axis sliding module (410). The x-axis blocking block (311) can stop the x-axis sliding module (310). The z-axis blocking block (211) can stop the z-axis sliding module (210). The y-axis blocking block (411) can stop the y-axis sliding module (410).

3. The multi-degree-of-freedom motion module according to claim 2, characterized in that: The x-axis sliding module (310) includes an x-axis guide rail (312), an x-axis slider (313) sliding on the x-axis guide rail (312), and a first mounting plate (314) disposed on the x-axis slider (313); an x-axis blocking block (311) can stop the first mounting plate (314); the z-axis sliding module (210) and the z-axis blocking block (211) are disposed on the first mounting plate (314); the z-axis sliding module (210) includes a z-axis guide rail (212), a z-axis slider (213) sliding on the z-axis guide rail (212), and a first mounting plate (314) disposed on the z-axis slider (213). The second mounting plate (214) is provided with a z-axis blocking block (211) on the first mounting plate (314), and the z-axis blocking block (211) can stop the second mounting plate (214); the y-axis sliding module (410) includes a y-axis guide rail (412) and a y-axis slider (413) that slides on the y-axis guide rail (412); the y-axis guide rail (412) is provided with the second mounting plate (214); the y-axis slider (413) is connected to the load seat (23); the y-axis blocking block (411) is provided with the second mounting plate (214), and the load seat (23) can stop the y-axis blocking block (411).

4. The multi-degree-of-freedom motion module according to claim 3, characterized in that: The first mounting plate (314) has an x-axis encoder (315) on its side; the second mounting plate (214) has a z-axis encoder (215) on its front; and the second mounting plate (214) has a y-axis encoder (414) on its back.

5. The multi-degree-of-freedom motion module according to claim 3, characterized in that: At least one magnetic spring (316) is provided between the first mounting plate (314) and the second mounting plate (214).

6. The multi-degree-of-freedom motion module according to claim 1, characterized in that: The x-axis flat motor (30) includes a second stator (31) and a second mover (32); the second stator (31) is disposed on the lower inner wall of the frame (10), and the second mover (32) is disposed at the bottom of the z-axis rod motor (20); the y-axis flat motor (40) includes a third stator (41) and a third mover (42); the third stator (41) is disposed on the upper inner wall of the frame (10); and the third mover (42) is disposed at the top of the z-axis rod motor (20).

7. The multi-degree-of-freedom motion module according to claim 6, characterized in that: The second stator (31) and the third stator (41) are filled with insulating glue and are attached to the corresponding mounting slots on the frame.

8. The multi-degree-of-freedom motion module according to claim 1, characterized in that: The frame (10) includes a base plate (11), a top plate (12), and a vertical plate (13); a triangular frame (14) is provided between the base plate (11) and the vertical plate (13), and between the top plate (12) and the vertical plate (13).

9. The multi-degree-of-freedom motion module according to any one of claims 1-9, characterized in that: There are two z-axis rod motors (20), and a connecting frame (25) is provided between the two first movers (22).

10. A semiconductor packaging and testing device, characterized in that: The multi-degree-of-freedom motion module includes any one of claims 1-9; the multi-degree-of-freedom motion module is provided with a suction cup or clamp for acquiring materials.

Images