Shell device and shell panel

Abstract

The embodiment of the invention provides a shell device and a shell panel, relates to the technical field of shells, and aims to improve the influence caused by shell deformation. The shell device comprises a first device, a first panel, a second panel, a third panel and an annular fourth panel, wherein the first panel, the second panel and the third panel are opposite at intervals, and the fourth panel intersects with the first panel, the second panel and the third panel and is in sealed connection with the first panel, the second panel and the third panel A first cavity is defined by the first panel, the third panel and the fourth panel, the first device is arranged in the sealed first cavity, and the first device is fixedly connected with the first panel or the second panel. A second cavity is defined by the first panel, the second panel and the fourth panel. The second panel or the fourth panel is provided with a first through hole communicated with the second cavity. In the above embodiment, the second cavity is utilized to distinguish a part which is easy to deform in the shell and a part which is used as a mounting reference of the first device, and the deformation of the first panel and the deformation of the second panel are not conducted mutually, so that the adverse effect caused by the deformation of the shell is improved.

Description

Technical Field

[0001] This application relates to the field of housing technology, and more particularly to a housing device and a housing panel. Background Technology

[0002] A housing typically refers to an outer shell used to house internal components. For example, work equipment or transportation vehicles often have housings. The housing not only protects the internal components but also serves as a mounting reference, fixing the components relative to the housing. The drawback is that if the housing deforms, the mounting reference will change, affecting the normal operation of the equipment. Taking semiconductor equipment with a housing as an example, the housing provides a vacuum environment and mounting reference for semiconductor manufacturing or testing. In other words, high-precision instruments located inside the housing typically use the housing as their mounting reference. For semiconductor equipment, when the housing is affected by internal and external pressure differences and deforms, the mounting reference of high-precision instruments will change. Since most high-precision instruments have high requirements for the attitude stability of the mounting reference, changes in the mounting reference can lead to a decrease in the accuracy of semiconductor manufacturing or testing, adversely affecting the operation of the semiconductor equipment.

[0003] Therefore, how to mitigate the adverse effects of shell deformation on equipment operation is a technical problem that urgently needs to be solved by technical personnel. Summary of the Invention

[0004] This application provides a housing device and a housing panel, the main purpose of which is to improve the adverse effects of housing deformation on equipment operation.

[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions:

[0006] In a first aspect, embodiments of this application provide a housing device comprising a first component, a first panel, a second panel, a third panel, and a fourth panel. The first, second, and third panels are spaced apart from each other along their thickness direction. The fourth panel is an annular panel, intersecting and sealingly connected to the first, second, and third panels. The first, third, and fourth panels enclose a first cavity, which is a sealed cavity. The first component is disposed within the first cavity and is fixedly connected to either the first or second panel. The first, second, and fourth panels also enclose a second cavity. The second or fourth panel has a first through hole communicating with the second cavity.

[0007] In some embodiments of the first aspect, the housing device provides a sealed connection between the panels, which helps to form a sealed cavity. For example, the sealing of the first cavity provides a vacuum environment for the operation of the first device. The fourth panel can fixably support the first and second panels respectively, and deformation of the first or second panel does not affect each other. For example, when the first panel is deformed, the second panel is supported by the fourth panel, ensuring that the second panel is unaffected by the deformation of the first panel and maintains a small deformation. By selecting a panel with smaller deformation between the first and second panels for fixed connection, the mounting reference of the first device can be ensured to be stable and reliable. Furthermore, the first through-hole connects to the second cavity, thereby allowing adjustment of the air pressure within the second cavity, which in turn allows control of the pressure difference between the second cavity and the external environment of the housing, thereby controlling the pressure exerted on the first or second panel from outside the housing. For example, if the first through hole is connected to the external environment of the housing, the pressure generated by the pressure difference between the external environment of the housing and the second cavity acts on the first panel. The second panel is not affected by the deformation of the first panel. The first device is fixedly connected to the second panel, which can ensure the stability of the mounting reference of the first device. Thus, the easily deformable part of the housing and the part that serves as the mounting reference of the first device can be distinguished, the adverse effects of housing deformation on equipment operation can be reduced, and the operating accuracy of the housing device can be improved.

[0008] In conjunction with the first aspect, in one possible implementation, the first device is fixedly connected to the second panel, and the first through-hole connects the second cavity to the external environment of the housing device. The second cavity is connected to the external environment of the housing device, and the air pressure in the second cavity is the same as the air pressure in the external environment of the housing device. A pressure difference exists between the first and second cavities. The pressure generated by this pressure difference compresses the first panel against the first cavity, while the second panel is not subjected to pressure. Supported by the fourth panel, the second panel exhibits a small amount of deformation. Therefore, using the second panel as the mounting reference for devices within the housing device can mitigate the adverse effects of housing deformation on the operation of the housing device.

[0009] In conjunction with the first aspect, in one possible implementation, the first device is fixedly connected to the second panel. The housing device also includes an air pump. The air pump communicates with the second cavity through a first through-hole and is used to deliver gas into the second cavity. In this implementation, the air pump increases the air pressure in the second cavity. If the first cavity is in a vacuum state, the air pressure in the second cavity is greater than the air pressure in the first cavity, causing the first panel to be deformed by compression. However, if the air pressure in the second cavity is equal to the air pressure of the external environment of the housing, the second panel is not subjected to air pressure. The first device uses the second panel as a mounting reference, which can improve the operating accuracy of the housing device. Furthermore, if the air pressure in the second cavity is greater than or less than the air pressure of the external environment of the housing, the shape and position of the second panel can be adjusted, thereby adjusting the mounting reference of the first device, which helps to further improve the operating accuracy of the housing device.

[0010] In conjunction with the first aspect, in one possible implementation, the first device is fixedly connected to the first panel. The housing device also includes a vacuum pump. The vacuum pump is connected to the second cavity through a first through-hole and is used to extract gas from the second cavity. In this implementation, by extracting gas from the second cavity, the gas pressure inside the second cavity is reduced. If the first cavity is in a vacuum state, the second cavity is also in a vacuum state, and the first panel is not subjected to gas pressure. If the gas pressure of the external environment of the housing is greater than the gas pressure of the second cavity, the second panel is deformed by compression, while the first panel remains unaffected. The first device uses the first panel as a mounting reference, which can improve the operating accuracy of the housing device. Furthermore, if the gas pressure of the second cavity is greater than the gas pressure of the first cavity but less than the gas pressure of the external environment of the housing, the shape and position of the first panel can also be adjusted, thereby adjusting the mounting reference of the first device, which helps to further improve the operating accuracy of the housing device.

[0011] In conjunction with the first aspect, in one possible implementation, the first panel has a second through hole. The housing device also includes an annular member. One axial end of the annular member is sealed to the contour of the second through hole, and the remaining axial end of the annular member is sealed to the second panel. The first device passes through the second through hole and is fixedly connected to the second panel, but not to the first panel. In this implementation, the annular member and the second through hole can accommodate the first device, the annular member seals the first cavity, allowing the first device to pass through the first panel and be fixedly connected to the second panel with less deformation. The second panel serves as the mounting reference for the device, improving the operational accuracy of the device.

[0012] In conjunction with the first aspect, in one possible implementation, the first panel has a second through hole. The second panel has a third through hole opposite to the second through hole. The housing device also includes an annular member. One axial end of the annular member is sealed to the contour of the second through hole for a complete circle, and the remaining axial end of the annular member is sealed to the contour of the third through hole for a complete circle. The first device extends out of the first cavity through the annular member, the second through hole, and the third through hole. The first device is sealed to the contour of the third through hole for a complete circle, and the first device is not fixedly connected to the first panel. Alternatively, the first device is sealed to the contour of the second through hole for a complete circle, and the first device is not fixedly connected to the second panel. In this implementation, the second through hole, the third through hole, and the annular member can accommodate the first device. The annular member seals the first cavity, allowing the device to pass through the first and second panels. This not only allows the first or second panel to serve as a mounting reference for the device, improving the device's operational accuracy, but also enables the device to pass through the first and second panels, achieving through-mounting of the device and broadening the application scenarios of the housing device.

[0013] In conjunction with the first aspect, in one possible implementation, the annular component is airtight and elastic along the axial direction. Thus, when the first or second panel is subjected to air pressure impact due to a pressure difference, the annular component can utilize its elasticity to reduce the tensile stress exerted by one of the first or second panels on the other, thereby reducing the deformation of the first or second panel and ensuring the stability of the mounting reference of the first device.

[0014] In conjunction with the first aspect, in one possible implementation, the fourth panel includes a first annular portion and a second annular portion, the first annular portion enclosing a first cavity, and the second annular portion enclosing a second cavity. The first annular portion and the first panel are an integral structure. Alternatively, the first annular portion and the third panel are an integral structure. Alternatively, the first annular portion and the second annular portion are an integral structure. Alternatively, the second annular portion and the second panel are an integral structure. In this implementation, the fourth panel is disassembled, allowing the first and second annular portions to be selectively combined or integrated with the first, second, and third panels according to actual assembly and transportation needs, which helps improve the ease of assembly of the housing device and ensures the airtight performance of the housing device.

[0015] In conjunction with the first aspect, in one possible implementation, the housing device further includes a fifth panel and a second device. The fifth panel and the third panel are spaced apart and opposite each other along the thickness direction. The fourth panel intersects with and is sealed to the fifth panel. The second device is disposed within the first cavity and is fixedly connected to either the third or fifth panel. The third, fourth, and fifth panels enclose a third cavity, and the fourth or fifth panel is provided with a fourth through hole communicating with the third cavity. In this implementation, the third cavity and the second cavity are located on opposite sides of the first cavity, which can mutually improve the deformation of the housing. For example, by using the first and third panels located on opposite sides of the first cavity as mounting references for the first and second devices respectively, the relative accuracy between the first and second devices is guaranteed. For instance, mounting a worktable on the first panel and an electron beam lens on the third panel can effectively improve the accuracy of electron beam measurement.

[0016] Secondly, embodiments of this application provide a housing panel, which includes a first panel, a second panel, and a fourth panel. The second panel and the first panel are spaced apart and opposite each other along the thickness direction. The fourth panel is an annular panel, which is sealed and connected to the first panel and the second panel in a ring, forming a second cavity. The second panel or the fourth panel is provided with a first through hole, which communicates with the second cavity.

[0017] Thirdly, embodiments of this application provide a housing panel, which includes a first panel, a second panel, a fourth panel, and an annular member. The second panel and the first panel are spaced apart and opposite each other along the thickness direction. The fourth panel is an annular panel, which is sealed and connected to the first panel and the second panel in a ring, forming a second cavity. The second panel or the fourth panel is provided with a first through hole, and the first panel has a second through hole, which communicate with the second cavity. One end of the annular member along the axial direction is sealed and connected to the contour of the second through hole in a ring, and the remaining end of the annular member along the axial direction is sealed and connected to the second panel in a ring.

[0018] Fourthly, embodiments of this application provide a housing panel, which includes a first panel, a second panel, a fourth panel, and an annular member. The second panel and the first panel are spaced apart and opposite each other along the thickness direction. The fourth panel is an annular panel, which is sealed and connected to the first panel and the second panel in a ring, forming a second cavity. The second panel or the fourth panel is provided with a first through hole, the first panel has a second through hole, and the second panel has a third through hole, which communicate with the second cavity. One end of the annular member along the axial direction is sealed and connected to the contour of the second through hole in a ring, and the remaining end of the annular member along the axial direction is sealed and connected to the contour of the third through hole in a ring.

[0019] Unless otherwise specified, the technical effects of any of the design methods in the second to fourth aspects can be found in the technical effects of different design methods in the first aspect, and will not be repeated here. Attached Figure Description

[0020] Figure 1 This is a structural diagram of a housing device provided in an embodiment of this application;

[0021] Figure 2 This is another structural diagram of the housing device provided in the embodiments of this application;

[0022] Figure 3 yes Figure 2 A schematic diagram of the force distribution principle of the housing device shown;

[0023] Figure 4 yes Figure 2 Another force diagram of the housing device shown;

[0024] Figure 5 This is another structural diagram of the housing device provided in the embodiments of this application;

[0025] Figure 6 This is another structural diagram of the housing device provided in the embodiments of this application;

[0026] Figure 7 This is a partial cross-sectional view of the housing device provided in an embodiment of this application;

[0027] Figure 8 yes Figure 7 A magnified view of the detail of the letter "A";

[0028] Figure 9 yes Figure 7 A magnified view of the detail of the character "B";

[0029] Figure 10 This is a structural diagram of a housing panel provided in an embodiment of this application;

[0030] Figure 11 This is another structural diagram of the housing panel provided in the embodiments of this application;

[0031] Figure 12 This is another structural diagram of the housing panel provided in the embodiments of this application;

[0032] Figure 13 This is another structural diagram of the housing panel provided in the embodiments of this application.

[0033] Explanation of reference numerals in the attached figures:

[0034] 100-Housing assembly; 200-Housing panel; 1-First cavity; 2-Second cavity; 3-Third cavity; 11-First component; 12-Second component; 21-First panel; 22-Second panel; 23-Third panel; 24-Fourth panel; 25-Fifth panel; 31-First through hole; 32-Second through hole; 33-Third through hole; 41-Annular component; 42-Sealing flange; 51-Air pump; 52-Vacuum pump; 61-Pressure regulating valve; 62-Vacuum gauge; 71-First pressure regulating flange; 72-Second pressure regulating flange; 81-Gasket. Detailed Implementation

[0035] The technical solutions in the embodiments of this application will now be described with reference to the accompanying drawings.

[0036] In the description of the embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0037] Furthermore, to facilitate a clear description of the technical solutions in the embodiments of this application, the terms "first" and "second" are used in the embodiments of this application to distinguish identical or similar items with substantially the same function and effect. Those skilled in the art will understand that the terms "first" and "second" do not limit the quantity or execution order, and the terms "first" and "second" are not necessarily different.

[0038] In describing some embodiments, the term "connection" and its derivative expressions are used. Unless otherwise specified, the term "connection" should be interpreted broadly; for example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0039] As used herein, “parallel,” “perpendicular,” and “equal” include the described situation and situations that are similar to the described situation, within an acceptable range of deviation, which is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, “parallel” includes absolute parallelism and approximate parallelism, where an acceptable range of deviation for approximate parallelism may be, for example, within 5°; “perpendicular” includes absolute perpendicularity and approximate perpendicularity, where an acceptable range of deviation for approximate perpendicularity may also be, for example, within 5°; “equal” includes absolute equality and approximate equality, where an acceptable range of deviation for approximate equality may be, for example, a difference between the two equals being less than or equal to 5% of either one.

[0040] In the accompanying drawings, the thickness of layers and regions is exaggerated for clarity, and the dimensional proportions between the parts shown do not reflect actual dimensional proportions. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to show the actual shapes of the regions of the device, nor are they intended to limit the scope of the exemplary embodiments.

[0041] To reduce the impact of external factors such as air and dust on equipment operation, many precision instruments need to operate in a vacuum environment. Taking semiconductor equipment as an example, to reduce absorption of light sources or electron beams, avoid impurity introduction, and improve yield, equipment such as lithography machines and electron beam measurement instruments need to operate in a high-vacuum environment. The vacuum chambers of these devices are large, and the panels of the housing need to withstand differential pressure stresses, such as those on the order of hundreds of tons, causing the housing to deform. Since semiconductor devices are often fixedly mounted on the opposite side of the housing, especially for precision instruments sensitive to housing deformation (such as high-precision displacement stages, electron beam mirrors, and interferometers), housing deformation means a shift in the mounting reference, leading to a decrease in the accuracy of the precision instrument's operation.

[0042] Taking semiconductor manufacturing as an example, in order to improve the adverse effects caused by casing deformation, the usual practice is to introduce additional adjustments, alignments and compensations. However, this not only affects the reduction of manufacturing efficiency, but also has limitations in improving process accuracy. In fact, if the casing deformation exceeds the adjustable range of the instrument, problems such as instrument failure and equipment shutdown may occur.

[0043] Therefore, technicians need to provide more efficient means to mitigate the adverse effects of shell deformation on equipment operation.

[0044] Figure 1 and Figure 2 These are some structural diagrams of the housing device provided in the embodiments of this application.

[0045] In view of this, such as Figure 1 and Figure 2 As shown in the figure, this application provides a housing device 100, which includes a first device 11 and a housing. The housing includes a first panel 21, a second panel 22, a third panel 23, and a fourth panel 24.

[0046] In one alternative embodiment, the material of the housing includes, but is not limited to, one or more of metal, acrylic, and glass. For example, the material of the housing refers to the material of any one of the first panel 21, the second panel 22, the third panel 23, and the fourth panel 24.

[0047] In one optional embodiment, the device (including the first device 11) includes, but is not limited to, processing instruments, measuring instruments, worktables, sample stages, motion stages, etc. For example, the first device 11 includes, but is not limited to, a high-precision displacement stage, an exposure system, an electron beam mirror, and an interferometer. The exposure system includes a light source system and an objective lens system for performing photolithography operations.

[0048] In one alternative embodiment, the housing device 100 includes, but is not limited to, semiconductor equipment. For example, the housing device 100 includes, but is not limited to, semiconductor manufacturing equipment and semiconductor testing equipment.

[0049] In some examples, the housing device 100 is a lithography machine, and the device is a stage or exposure system. In still other examples, the housing device 100 is an electron beam measurement device, and the device is a stage or electron beam lens system.

[0050] In this embodiment, the first panel 21, the second panel 22, and the third panel 23 are spaced apart from each other along the thickness direction. Exemplarily, the first panel 21, the second panel 22, and the third panel 23 are parallel to each other. Exemplarily, the distance between the first panel 21 and the second panel 22 is smaller than the distance between the first panel 21 and the third panel 23, so that devices can be placed between the first panel 21 and the third panel 23, and ensuring that the housing device 100 occupies a small volume.

[0051] In one alternative embodiment, the first panel 21 includes an arc panel or a flat panel. Optionally, the second panel 22 or the third panel 23 has the same or similar shape as the first panel 21.

[0052] In some examples, such as Figure 1 As shown, the first panel 21 is a flat panel, and the shape of the first panel 21 includes, but is not limited to, a circle, a rectangle, an ellipse, etc. In some other examples, the first panel 21 is an arc panel, and the outline shape of the first panel 21 is a circle.

[0053] In some examples, the second panel 22 or the third panel 23 is the same size as the first panel 21, and the edge of the orthographic projection of the first panel 21 onto the second panel 22 overlaps with the edge of the second panel 22.

[0054] In this embodiment, the fourth panel 24 is an annular panel, which intersects and is sealed to the first panel 21, the second panel 22, and the third panel 23. Thus, the sealing at the joints between the panels helps to form a sealed cavity; for example, the sealing of the first cavity 1 provides a vacuum environment for the operation of the first device 11.

[0055] In some examples, the first panel 21 is perpendicular to the fourth panel 24, the second panel 22 is perpendicular to the fourth panel 24, and the third panel 23 is perpendicular to the fourth panel 24.

[0056] like Figure 1 As shown, in one optional embodiment, the first panel 21, the second panel 22 and the third panel 23 are respectively fixedly connected to the fourth panel 24 so that the fourth panel 24 provides fixed support for the first panel 21, the second panel 22 and the third panel 23. The fourth panel 24 can provide fixed support for the panel used as the mounting reference of the device, thereby ensuring that the first device 11 has a stable mounting reference.

[0057] Through the above embodiments, the fourth panel 24 can provide fixed support for the first panel 21 and the second panel 22 respectively, and the deformation of the first panel 21 or the second panel 22 does not affect each other. For example, when the first panel 21 is deformed, the second panel 22 is supported by the fourth panel 24, and the deformation of the first panel 21 is basically not transmitted to the second panel 22, so that the second panel 22 is not affected by the deformation of the first panel 21 and maintains a small deformation. The first device 11 is fixedly connected to the panel with the smaller deformation of the first panel 21 or the second panel 22, which not only ensures the overall frame rigidity of the housing, but also provides a supporting foundation for the mounting reference, ensuring the stability and reliability of the mounting reference of the first device 11, and reducing the impact of housing deformation on the position and adjustment status of the internal instruments.

[0058] In one alternative embodiment, the shape of the annular outline of the fourth panel 24 is the same as or similar to the shape of the first panel 21. Exemplarily, the annular outline of the fourth panel 24 includes, but is not limited to, a circle, a rectangle, or an ellipse.

[0059] like Figure 1 As shown in the embodiment of this application, the first panel 21, the third panel 23 and the fourth panel 24 form a first cavity 1, and the first device 11 is disposed in the first cavity 1.

[0060] In one alternative embodiment, the first cavity 1 is used to accommodate all or part of the structure of the first device 11. For example, the first device 11 can extend through the first panel 21 and the second panel 22 to the outside of the first cavity 1.

[0061] In this embodiment of the application, the first cavity 1 is a sealed cavity.

[0062] In one optional embodiment, the first cavity 1 can be sealed as a vacuum cavity. Exemplarily, the housing device 100 also includes a vacuum pump, to which the first cavity 1 is connected. The vacuum pump extracts gas from the first cavity 1, enabling the first cavity 1 to be a vacuum environment or a low-pressure environment to meet the operational requirements of the devices within the housing device 100.

[0063] In this embodiment, the first panel 21, the second panel 22, and the fourth panel 24 form a second cavity 2. The second panel 22 or the fourth panel 24 is provided with a first through hole 31, which communicates with the second cavity 2.

[0064] In one optional embodiment, the shape of the first through hole 31 includes, but is not limited to, a circle, a rectangle, an ellipse, etc., and the number of the first through holes 31 is one or more.

[0065] like Figure 1 As shown, in some optional embodiments, the first device 11 is fixedly connected to the second panel 22. For example, the first device 11 passes through the first panel 21 and is fixedly connected to the side of the second panel 22 facing the first cavity 1.

[0066] like Figure 1 As shown, in some examples, the first through hole 31 connects the second cavity 2 to the external environment of the housing device 100, and the air pressure of the first cavity 1 is the same as the air pressure of the external environment of the housing device 100.

[0067] In some other examples, the first through hole 31 connects the second cavity 2 to the air pump, and the air pump transmits gas to the first cavity 1 through the first through hole 31 to increase the air pressure in the first cavity 1.

[0068] Figure 3 yes Figure 1 The diagram shows a force-bearing principle diagram of the housing device.

[0069] like Figure 3 As shown, the first device is fixedly connected to the second panel 22. The first panel 21 serves as a deformable panel of the housing and bears the pressure of the external environment of the housing device. The second panel 22 is the main panel and serves as the mounting reference for the first device.

[0070] like Figure 3 As shown, the pressure difference force is calculated using the formula F = ΔpS, where F is the pressure, Δp is the pressure difference, and S is the pressure-bearing area. Taking the first cavity 1 as a vacuum cavity as an example, by adjusting the pressure difference Δp in the above formula as a variable, the pressure F on the first panel 21 and the second panel 22 can be controlled.

[0071] For example, if the second panel 22 serves as the mounting reference for the first device 11, and both sides of the second panel 22 are at atmospheric pressure (e.g., 0.101 MPa), while the air pressure in the first cavity 1 is 0, the pressure difference Δp between the two sides of the second panel 22 is zero or close to zero, thus making the second panel 22 essentially unaffected by pressure. Alternatively, by depressurizing or pressurizing the second cavity 2, the pressure difference Δp between the two sides of the second panel 22 can be adjusted, thereby enabling active adjustment of the position and orientation of the second panel 22 and the first device 11.

[0072] like Figure 1 As shown, in some examples, it is assumed that the housing device 100 is in an atmospheric environment, the thickness of the first panel 21 and the second panel 22 is 30 mm, the material of the first panel 21 and the second panel 22 is aluminum alloy, the diameter of the annular member 41 is 200 mm, the first cavity 1 is a vacuum, and the second cavity 2 is connected to the atmospheric environment through the first through hole 31. The panel dimensions are 1 mm... 2 2.25m 2 and 4m 2 In the case of the first panel 21, the center deformation of the second panel 22 is 0.04 mm, 0.09 mm and 0.17 mm respectively. Compared with the case of the first panel 21 not being set, the deformation of the second panel 22 is reduced by 91.1%, 95.7% and 97.9% respectively.

[0073] When the second cavity 2 is connected to the air pump through the first through hole 31, the deformation of the second panel 22 can be further compensated by making the air pressure inside the second cavity 2 greater than that of the external environment, so that the center deformation of the second panel 22 is close to 0.

[0074] In some other examples, it is assumed that the housing device 100 is in an atmospheric environment, the thickness of the first panel 21 and the second panel 22 is 30 mm, the material of the first panel 21 and the second panel 22 is aluminum alloy, the diameter of the annular part 41 is 200 mm, the first cavity 1 is a vacuum, and the second cavity 2 is connected to the air pump through the first through hole 31. The panel size is 4 mm. 2In this case, gas is pumped into the second cavity 2 using an air pump, making the air pressure inside the second cavity 2 higher than the atmospheric pressure outside the housing device 100. This pressure difference causes the second panel 22 to experience compressive stress towards the outside of the second cavity 2, thereby actively compensating for the deformation of the second panel 22 towards the inside of the second cavity 2 in the aforementioned example. For example, by controlling the flow rate of gas pumped into the second cavity 2, the pressure inside the second cavity 2 is controlled to 0.103 MPa, 0.105 MPa, and 0.11 MPa, respectively. The corresponding center deformation of the second panel 22 is -0.47 mm, -0.15 mm, and -0.02 mm, respectively. The negative sign of the center deformation indicates that the second panel 22 deforms towards the outside of the second cavity 2. Compared to the case without the first panel 21, the reduction in deformation of the second panel 22 reaches 94.2%, 98.1%, and 99.8%, respectively.

[0075] like Figure 2 As shown, in some alternative embodiments, the first device 11 is fixedly connected to the first panel 21. For example, the first device 11 is fixedly connected to the side of the first panel 21 facing the first cavity 1.

[0076] like Figure 2 As shown, in some optional embodiments, the first through hole 31 connects the second cavity 2 and the vacuum pump. The vacuum pump draws gas from the first cavity 1 through the first through hole 31 to reduce the gas pressure in the first cavity 1.

[0077] Figure 4 yes Figure 2 Another force diagram of the housing device shown.

[0078] like Figure 4 As shown, air is drawn from the second chamber 2 by the vacuum pump 52 to reduce the pressure in the second chamber 2, or even to create a vacuum in the second chamber 2. The second panel 22, as a deformable panel of the housing, withstands the pressure of the external environment of the housing device. The first device is fixedly connected to the first panel 21, which is the main panel and serves as the mounting reference for the first device.

[0079] In the above embodiments, the first through hole 31 connects to the second cavity 2, thereby allowing adjustment of the air pressure within the second cavity 2. This enables control of the pressure difference between the second cavity 2 and the external environment of the housing, thereby controlling the pressure exerted on the first panel 21 or the second panel 22 from the outside of the housing. This achieves adaptive adjustment to the external environmental pressure and even allows for precise control and compensation of housing deformation by controlling the air pressure within the second cavity 2. For example, if the first through hole 31 connects to the external environment of the housing, the pressure generated by the pressure difference between the external environment and the second cavity 2 acts on the first panel 21, while the second panel 22 is unaffected by the deformation of the first panel 21. By fixing the first device 11 to the second panel 22, the stability of the mounting reference of the first device 11 can be ensured. Thus, the second cavity 2 distinguishes between the easily deformable parts of the housing and the parts that serve as the mounting reference for the first device 11, mitigating the adverse effects of housing deformation on equipment operation and improving the operational accuracy of the housing device 100.

[0080] The housing device 100 provided in the above embodiments can be applied to semiconductor equipment, as well as to other types of operating equipment or transportation vehicles, such as spacecraft and submersibles, to improve the adverse effects of housing deformation on equipment operation.

[0081] like Figure 1 As shown, in some optional embodiments, the first device 11 is fixedly connected to the second panel 22, and the rigidity of the first panel 21 is less than that of the second panel 22.

[0082] like Figure 2 As shown, in some alternative embodiments, the first device 11 is fixedly connected to the first panel 21, and the rigidity of the first panel 21 is greater than that of the second panel 22.

[0083] Through the above embodiments, the panel serving as the mounting reference for the device has high rigidity, which helps to improve the stability of the device's mounting reference. Conversely, the panel that deforms under pressure differential has lower rigidity, which can buffer the stress exerted by the deformed panel on the panel serving as the mounting reference, also improving the stability of the device's mounting reference.

[0084] like Figure 1 As shown, in some optional embodiments, the first device 11 is fixedly connected to the second panel 22, and the first through hole 31 connects the second cavity 2 to the external environment of the housing device 100. Wherein, Figure 1 An exemplary illustration shows a first through-hole 31 disposed on a second panel 22.

[0085] In the above embodiments, the second cavity 2 is connected to the external environment of the housing device 100, and the air pressure of the second cavity 2 is the same as that of the external environment of the housing device 100. A pressure difference exists between the first cavity 1 and the second cavity 2. The pressure generated by this pressure difference compresses the first panel 21 against the first cavity 1, while the second panel 22 is not subjected to pressure. Under the support of the fourth panel 24, the second panel 22 exhibits a small amount of deformation. Therefore, the second panel 22 can serve as a mounting reference for components within the housing device 100, mitigating the adverse effects of housing deformation on the operation of the housing device 100.

[0086] Figure 5 This is another structural diagram of the housing device 100 provided in the embodiments of this application.

[0087] like Figure 5 As shown, in some optional embodiments, the first panel 21 has a second through hole 32. The housing device 100 also includes an annular member 41. One axial end of the annular member 41 is sealed to the contour of the second through hole 32, and the remaining axial end of the annular member 41 is sealed to the second panel 22. The first device 11 is fixedly connected to the second panel 22 through the second through hole 32, but not fixedly connected to the first panel 21.

[0088] In one optional embodiment, the shape of the second through hole 32 includes, but is not limited to, a closed shape such as a circle, rectangle, ellipse, or ring, and the number of second through holes 32 is one or more. In some specific examples, the shape of the second through hole 32 is determined according to the shape of the base of the first device 11 used for fixed connection with the second panel 22.

[0089] Through the above embodiments, the annular part 41 and the second through hole 32 can accommodate the first device 11. The annular part 41 seals the first cavity 1, allowing the first device 11 to pass through the first panel 21 and be fixedly connected to the second panel 22 with less deformation. The second panel 22 is used as the mounting reference for the device, thereby improving the operating accuracy of the device.

[0090] In some alternative embodiments, such as Figure 5 As shown, the first device 11 is fixedly connected to the second panel 22. The housing device 100 also includes an air pump 51. The air pump 51 is connected to the second cavity 2 through the first through hole 31, and the air pump 51 is used to transfer gas into the second cavity 2.

[0091] like Figure 5 As shown, in some optional embodiments, the housing device 100 further includes a pressure regulating valve 61, the two ends of which are respectively connected to the air pump 51 and the second chamber 2. The pressure regulating valve 61 can adjust the flow rate and pressure of the gas transmitted from the air pump 51 to the second chamber 2 by adjusting its own opening, thereby regulating the pressure within the second chamber 2.

[0092] like Figure 5 As shown, in some alternative embodiments, the housing assembly 100 further includes a first pressure regulating flange 71. The first pressure regulating flange 71 is an air-filling flange, which is used to connect an air pump 51 so that the air pump 51 pressurizes the second chamber 2.

[0093] Through the above embodiments, the air pressure inside the second cavity 2 is increased by the air pump 51. If the first cavity 1 is in a vacuum state, the air pressure inside the second cavity 2 is greater than the air pressure in the first cavity 1, causing the first panel 21 to be deformed by compression. However, if the air pressure inside the second cavity 2 is equal to the air pressure of the external environment of the housing, the second panel 22 is not subjected to air pressure. The first device 11 uses the second panel 22 as a mounting reference, which can improve the operating accuracy of the housing device 100. Furthermore, if the air pressure inside the second cavity 2 is greater than or less than the air pressure of the external environment of the housing, the shape and position of the second panel 22 can be adjusted, thereby adjusting the mounting reference of the first device 11, which helps to further improve the operating accuracy of the housing device 100.

[0094] Figure 6 This is another structural diagram of the housing device 100 provided in the embodiments of this application.

[0095] In some alternative embodiments, such as Figure 6 As shown, the first device 11 is fixedly connected to the first panel 21. The housing device 100 also includes a vacuum pump 52. The vacuum pump 52 is connected to the second chamber 2 through the first through hole 31, and the vacuum pump 52 is used to extract gas from the second chamber 2.

[0096] like Figure 6 As shown, in some optional embodiments, the housing device 100 further includes a vacuum gauge 62, the two ends of which are respectively connected to the vacuum pump 52 and the second chamber 2. The vacuum gauge 62 can adjust the flow rate and pressure of the gas transmitted from the vacuum pump 52 to the second chamber 2 by adjusting its own opening, thereby regulating the pressure within the second chamber 2.

[0097] like Figure 6 As shown, in some optional embodiments, the housing assembly 100 further includes a second pressure regulating flange 72. The second pressure regulating flange 72 is an extraction flange, which is used to connect to a vacuum gauge 62, so that the vacuum gauge 62 reduces the pressure of the second cavity 2.

[0098] Through the above embodiments, the gas in the second chamber 2 is extracted by the vacuum pump 52, reducing the gas pressure in the second chamber 2. If the first chamber 1 is in a vacuum state, the second chamber 2 is also in a vacuum state. The first panel 21 is not subjected to gas pressure. The gas pressure in the external environment of the housing is greater than the gas pressure in the second chamber 2, causing the second panel 22 to be deformed by compression, while the first panel 21 remains unaffected. The first device 11 uses the first panel 21 as a mounting reference, which can improve the operating accuracy of the housing device 100. Furthermore, if the gas pressure in the second chamber 2 is greater than the gas pressure in the first chamber 1 but less than the gas pressure in the external environment of the housing, the shape and position of the first panel 21 can be adjusted, thereby adjusting the mounting reference of the first device 11, which helps to further improve the operating accuracy of the housing device 100.

[0099] like Figure 6 As shown, in some optional embodiments, the fourth panel 24 includes a first annular portion and a second annular portion, the first annular portion surrounding the first cavity 1 and the second annular portion surrounding the second cavity 2.

[0100] In this embodiment, the first annular portion and the first panel 21 are an integral structure. Alternatively, the first annular portion and the third panel 23 are an integral structure. Alternatively, the first annular portion and the second annular portion are an integral structure. Alternatively, the second annular portion and the second panel 22 are an integral structure.

[0101] For example, the first annular portion, the second annular portion, the first panel 21, and the third panel 23 are an integral structure, which is fixedly connected to the second panel 22. By assembling the outer panel with the integral structure, the ease of assembly of the housing device is improved.

[0102] Through the above embodiments, the fourth panel 24 can be disassembled, and can be selectively combined or integrated with the first panel 21, the second panel 22, and the third panel 23 according to the actual needs of assembly and transportation. This helps to improve the ease of assembly of the housing device 100 and ensure the airtight performance of the housing device 100.

[0103] Regarding the connection positions and mating relationships between the fourth panel 24 and the first panel 21, the second panel 22, and the third panel 23, this application also provides some examples.

[0104] In the first example, the fourth panel 24 is located between the second panel 22 and the third panel 23, and the two opposing surfaces of the first panel 21 and the third panel 23 are respectively sealed to the two opposing end faces of the fourth panel 24 along the axial direction. Exemplarily, the distance between the first panel 21 and the third panel 23 is equal to the axial dimension of the fourth panel 24.

[0105] In the second example, the first panel 21, the surface opposite to the second panel 22, is sealed to one end face of the fourth panel 24 along the axial direction. The side surface of the second panel 22 is sealed to the inner surface of the fourth panel 24.

[0106] In the third example, the second panel 22, which is the surface opposite to the first panel 21, is sealed to one end face of the fourth panel 24 along the axial direction. The side surface of the first panel 21 is sealed to the inner surface of the fourth panel 24.

[0107] In the fourth example, the side of the first panel 21 is sealed to the inner surface of the fourth panel 24 in a ring, and the side of the second panel 22 is sealed to the inner surface of the fourth panel 24 in a ring.

[0108] like Figure 6 As shown, in some optional embodiments, the housing device 100 further includes a fifth panel 25 and a second device 12. The fifth panel 25 and the third panel 23 are spaced apart from each other along the thickness direction. The fourth panel 24 intersects with and is sealed to the fifth panel 25. The second device 12 is disposed within the first cavity 1 and is fixedly connected to the third panel 23 or the fifth panel 25. The third panel 23, the fourth panel 24, and the fifth panel 25 form a third cavity 3, and the fourth panel 24 or the fifth panel 25 is provided with a fourth through hole, which communicates with the third cavity 3.

[0109] In one optional embodiment, the second device 12 and the first device 11 are mutually cooperating components. For example, the first device 11 is an electron beam lens, and the second device 12 is a stage. The second device 12 cooperates with the first device 11 to realize electron beam measurement.

[0110] In one alternative embodiment, the fit between the fifth panel 25 and the third panel 23 is similar to the fit between the first panel 21 and the second panel 22 in the above embodiments. In some examples, the structure of the third cavity 3 is the same as the structure of the first cavity 1 in any of the above embodiments.

[0111] In some examples, the structure of the third cavity 3 is the same as that of the first cavity 1 in the same housing device 100.

[0112] In some other examples, the structure of the third cavity 3 in the same housing device 100 is different from that of the first cavity 1.

[0113] In the above embodiments, the third cavity 3 and the second cavity 2 are located on opposite sides of the first cavity 1, which can complement each other in improving the deformation of the shell. For example, by using the first panel 21 and the third panel 23 located on opposite sides of the first cavity 1 as mounting references for the first device 11 and the second device 12 respectively, the relative accuracy between the first device 11 and the second device 12 is guaranteed. For instance, mounting a worktable on the first panel 21 and an electron beam lens on the third panel 23 can effectively improve the accuracy of electron beam measurement.

[0114] like Figure 6 As shown, in some optional embodiments, the first panel 21 has a second through hole 32. The second panel 22 has a third through hole 33, which is opposite to the second through hole 32.

[0115] Figure 7 This is a partial cross-sectional view of the housing device provided in the embodiment of this application.

[0116] like Figure 7 As shown in the embodiment of this application, the housing device 100 further includes an annular member 41. One end of the annular member 41 along the axial direction is sealed to the contour of the second through hole 32, and the remaining end of the annular member 41 along the axial direction is sealed to the contour of the third through hole 33. The first device 11 extends through the annular member 41, the second through hole 32, and the third through hole 33 to the outside of the first cavity 1.

[0117] like Figure 5 As shown, in one alternative embodiment, the first through-hole 31 connects to the external environment of the housing device 100 or the air pump 51. For example... Figure 5 As shown, the first device 11 is connected to the outline of the third through hole 33 in a sealed manner, and the first device 11 is not fixedly connected to the first panel 21.

[0118] like Figure 6 As shown, in another optional embodiment, the first through-hole 31 connects to the vacuum pump 52 of the housing device 100. As... Figure 6 As shown, the first device 11 is connected to the outline of the second through hole 32 in a sealed manner, and the first device 11 is not fixedly connected to the second panel 22.

[0119] like Figure 6 As shown, in one optional embodiment, the third through hole 33 and the second through hole 32 have the same or similar shapes. For example, both the third through hole 33 and the second through hole 32 are circular.

[0120] In one optional embodiment, the number of third through holes 33 in the housing device 100 does not exceed the number of second through holes 32. For example, in the housing device 100, there are two third through holes 33 and three second through holes 32.

[0121] In one alternative embodiment, the first device 11 achieves a sealed connection with the contour of the second through hole 32 or the third through hole 33 via a gasket. Exemplarily, the gasket is a flexible sealing ring to achieve a structural seal.

[0122] Through the above embodiments, the second through hole 32, the third through hole 33 and the annular member 41 can accommodate the first device 11. The annular member 41 seals the first cavity 1, allowing the device to pass through the first panel 21 and the second panel 22. This not only allows the first panel 21 or the second panel 22 to be used as the mounting reference for the device, improving the working accuracy of the device, but also allows the device to pass through the first panel 21 and the second panel 22, realizing through-mounting of the device and broadening the application scenarios of the housing device 100.

[0123] Figure 8 yes Figure 7 A magnified view of the detail of the letter "A".

[0124] like Figure 8 As shown, in some optional embodiments, the annular member 41 is elastic along the axial direction. Thus, when the first panel 21 or the second panel 22 is subjected to air pressure impact due to pressure difference, the annular member 41 can use its own elasticity to reduce the tensile stress of one of the first panel 21 and the second panel 22 on the other, thereby reducing the deformation of the first panel 21 or the second panel 22 and ensuring the stability of the mounting reference of the first device 11.

[0125] In some alternative embodiments, the annular member 41 is airtight. Thus, by sealing the annular member 41 with the first panel 21 and the second panel 22 respectively, the airtightness of the sidewalls of the second cavity 2 can be ensured.

[0126] like Figure 8 As shown, in some examples, the annular component 41 includes a bellows. The bellows is both elastic and serves as a sealing connection.

[0127] like Figure 8 As shown, in some optional embodiments, the housing assembly further includes a sealing flange 42.

[0128] like Figure 8 As shown, in some examples, the annular member 41 is sealed to the contour of the second through hole 32 and the sealing flange 42, respectively, and the sealing flange 42 is sealed to the annular member 41 and the contour of the third through hole 33, respectively.

[0129] In some other examples, the annular member 41 is sealed to the contour of the third through hole 33 and the sealing flange 42, respectively, and the sealing flange 42 is sealed to the annular member 41 and the contour of the second through hole 32, respectively.

[0130] Taking the connection between the first device 11 and the second panel 22 as an example, such as Figure 8 As shown, the second panel 22 has a first groove M1 on its surface for sealing connection with the first device 11. A flexible gasket is provided in the first groove M1. The first device 11 and the second panel 22 are locked together by screws or bolts, so that the first device 11 and the second panel 22 achieve a sealed connection under the pressure of the gasket.

[0131] For example, the third through hole 33 is circular, the part connecting the first device 11 and the second panel 22 is a columnar structure, and the surfaces where the first device 11 and the second panel 22 are connected are provided with mutually cooperating threads, thereby realizing the locking and fixing of the first device 11 and the second panel 22.

[0132] like Figure 8 As shown, in one optional embodiment, the second panel 22 further extends along the thickness direction at the third through hole 33 and extends to the second through hole 32, so as to facilitate the connection between the second panel 22 and the first device 11. Figure 8 (Not shown) Connection.

[0133] In another optional embodiment, the first panel 21 further extends along the thickness direction at the second through hole 32 and extends to the third through hole 33 to facilitate connection between the first panel 21 and the first device 11.

[0134] Figure 9 yes Figure 7 A magnified view of the detail of the "B".

[0135] like Figure 9 As shown, in one optional embodiment, the fourth panel 24 is sealed to the first panel 21 or the second panel 22 via a gasket. Exemplarily, the gasket is a flexible sealing ring to achieve a structural seal.

[0136] like Figure 9 As shown, taking the connection between the fourth panel 24 and the second panel 22 as an example, the surface of the fourth panel 24 used for sealing connection with the second panel 22 is provided with a second groove M2, and a flexible sealing ring is provided in the second groove M2. The fourth panel 24 and the second panel 22 are locked by screws or bolts, so that the fourth panel 24 and the second panel 22 achieve a sealed connection under the pressure sealing action of the gasket.

[0137] In some optional embodiments, the fourth panel 24 is further provided with a fifth through hole, which communicates with the first cavity 1. The fifth through hole is used to accommodate the wiring or other components of the device, thereby enabling the device to be connected to the outside of the housing device 100.

[0138] For example, a through-wall flange is provided in the fifth through hole. The device is a moving table, and the line between the moving table and the power supply outside the housing device 100 passes through the fifth through hole to realize the electrical connection between the device and the outside of the housing device 100. Furthermore, the through-wall flange can ensure the sealing of the first cavity 1.

[0139] Figure 10 This is a structural diagram of a housing panel provided in an embodiment of this application.

[0140] like Figure 10 As shown, this application embodiment also provides a housing panel 200, which includes a first panel 21, a second panel 22 and a fourth panel 24.

[0141] In this embodiment, the second panel 22 and the first panel 21 are spaced apart and opposite each other along the thickness direction. The fourth panel 24 is an annular panel, which is sealed and connected to the first panel 21 and the second panel 22 in a ring, forming a second cavity 2.

[0142] The second panel 22 or the fourth panel 24 is provided with a first through hole 31, which is connected to the second cavity 2.

[0143] Figure 10 The first device 11 and vacuum pump 52 shown are used to illustrate the function of the housing panel 200. Alternatively, the housing panel 200 may not include the first device 11 and vacuum pump 52. Figure 10 As shown, in the above embodiment, the first panel 21 can be used to fix and connect to the first device 11 and serve as a mounting reference for the device. The first through hole 31 can be used to connect to the vacuum pump 52, allowing the vacuum pump 52 to draw air from the second chamber 2.

[0144] Figure 11 This is another structural diagram of the housing panel provided in the embodiments of this application.

[0145] like Figure 11 As shown, this application embodiment also provides a housing panel 200, which includes a first panel 21, a second panel 22, a fourth panel 24 and an annular member 41.

[0146] In this embodiment, the second panel 22 and the first panel 21 are spaced apart and opposite each other along the thickness direction. The fourth panel 24 is an annular panel, which is sealed and connected to the first panel 21 and the second panel 22 in a ring, forming a second cavity 2.

[0147] The second panel 22 or the fourth panel 24 is provided with a first through hole 31, and the first panel 21 has a second through hole 32. The first through hole 31 and the second through hole 32 are respectively connected to the second cavity 2. One end of the annular member 41 along the axial direction is sealed to the contour of the second through hole 32 for a circle, and the other end of the annular member 41 along the axial direction is sealed to the second panel 22 for a circle.

[0148] Figure 11 The first device 11 and the air pump 51 shown are used to illustrate the function of the housing panel 200. Optionally, the housing panel 200 may not include the first device 11 and the air pump 51. Figure 11 As shown, in the above embodiment, the second panel 22 can be used to fix the first device 11 and serve as a mounting reference for the device. The first through hole 31 can be used to connect to the air pump 51, so that the air pump 51 can inflate the second cavity 2.

[0149] Figure 12 and Figure 13 These are further structural diagrams of the housing panel provided in the embodiments of this application.

[0150] like Figure 12 and Figure 13 As shown, this application embodiment also provides a housing panel 200, which includes a first panel 21, a second panel 22, a fourth panel 24 and an annular member 41.

[0151] In this embodiment, the second panel 22 and the first panel 21 are spaced apart and opposite each other along the thickness direction. The fourth panel 24 is an annular panel, which is sealed and connected to the first panel 21 and the second panel 22 in a ring, forming a second cavity 2.

[0152] The second panel 22 or the fourth panel 24 is provided with a first through hole 31, the first panel 21 has a second through hole 32, and the second panel 22 has a third through hole 33. The first through hole 31, the second through hole 32, and the third through hole 33 are respectively connected to the second cavity 2. One end of the annular member 41 along the axial direction is sealed to the contour of the second through hole 32 for one ring, and the remaining end of the annular member 41 along the axial direction is sealed to the contour of the third through hole 33 for one ring.

[0153] Figure 12 The first device 11 and the air pump 51 shown are used to illustrate the function of the housing panel 200. Optionally, the housing panel 200 may not include the first device 11 and the air pump 51. Figure 12 As shown, in the above embodiment, the second panel 22 can be used to fix the first device 11 and serve as a mounting reference for the device. The first through hole 31 can be used to connect to the air pump 51, so that the air pump 51 can inflate the second cavity 2.

[0154] Figure 13The first device 11 and vacuum pump 52 shown are used to illustrate the function of the housing panel 200. Alternatively, the housing panel 200 may not include the first device 11 and vacuum pump 52. Figure 13 As shown, in the above embodiment, the first panel 21 can be used to fix and connect to the first device 11 and serve as a mounting reference for the device. The first through hole 31 can be used to connect to the vacuum pump 52, allowing the vacuum pump 52 to draw air from the second chamber 2.

[0155] like Figures 10-13 As shown, in some optional embodiments, the housing panel 200 further includes a gasket 81, and the fourth panel 24 is sealed to the first panel 21 or the second panel 22 through the gasket 81.

[0156] This application also provides a housing, which includes the housing panel 200 from any of the above embodiments. The housing panel 200 serves as a panel on any side of the housing.

[0157] This application also provides a housing device 100, which includes a component and the housing described in the above embodiments. The component is fixedly connected to the inner side of the housing, and the housing serves as a mounting reference for the component.

[0158] The housing device 100 in the above embodiments has a simple overall structure, significantly reducing the structural rigidity requirements of the panel and eliminating the need for complex attitude adjustment structures. Furthermore, the housing device 100 in the above embodiments has a high degree of structural integration, is independent of the external installation environment, and allows for flexible selection of the structural type based on the installation requirements, deformation sensitivity, and attitude adjustment requirements of the precision instrument. For example, if the precision instrument has low deformation sensitivity and can tolerate a certain degree of deformation, then a suitable structural type can be selected. Figure 1 The housing device 100 in the illustrated embodiment does not require an external pump; the first cavity 1 is connected to the external environment through the first through hole 31. If the precision instrument is highly sensitive to deformation or requires attitude adjustment, then this option can be selected. Figures 10-13 In the illustrated embodiment, the housing panel 200 is used to fabricate the housing device 100, which achieves active compensation by adjusting the air pressure in the first cavity 1. If there are other requirements such as high cleanliness and ease of maintenance, then [the following options can be selected]. Figure 13 In the embodiment shown, the housing panel 200 is used to manufacture the housing device 100, and the second panel 22, which is used to withstand pressure, is located on the outward side of the housing, which protects the first panel 21, which serves as the mounting reference.

[0159] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Furthermore, with the evolution of architectures and the emergence of new scenarios, the technical solutions provided in the embodiments of this application are also applicable to similar technical problems.

Claims

1. A housing device, characterized in that, The housing device includes a first component, a first panel, a second panel, a third panel, and a fourth panel; the first panel, the second panel, and the third panel are spaced apart from each other along the thickness direction; the fourth panel is an annular panel, and the fourth panel intersects and is sealed to the first panel, the second panel, and the third panel respectively; The first panel, the third panel, and the fourth panel form a first cavity, which is a sealed cavity. The first device is disposed in the first cavity and is fixedly connected to the first panel or the second panel. The first panel, the second panel, and the fourth panel form a second cavity; the second panel or the fourth panel is provided with a first through hole, which communicates with the second cavity.

2. The housing device according to claim 1, characterized in that, The first device is fixedly connected to the second panel, and the first through hole connects the second cavity to the external environment of the housing device.

3. The housing device according to claim 2, characterized in that, The first device is fixedly connected to the second panel; the housing device also includes an air pump; The air pump is connected to the second cavity through the first through hole, and the air pump is used to transfer gas into the second cavity.

4. The housing device according to claim 1, characterized in that, The first device is fixedly connected to the first panel; the housing device also includes a vacuum pump; The vacuum pump is connected to the second cavity through the first through hole, and the vacuum pump is used to extract gas from the second cavity.

5. The housing device according to any one of claims 1 to 3, characterized in that, The first panel has a second through hole; the housing device further includes an annular component; One end of the annular component along the axial direction is sealed to the contour of the second through hole for one ring, and the remaining end of the annular component along the axial direction is sealed to the second panel for one ring. The first device is fixedly connected to the second panel through the second through hole, but not fixedly connected to the first panel.

6. The housing device according to any one of claims 1 to 5, characterized in that, The first panel has a second through hole; the second panel has a third through hole opposite to the second through hole; the housing device further includes an annular component; One end of the annular component along the axial direction is sealed to the contour of the second through hole for one ring, and the remaining end of the annular component along the axial direction is sealed to the contour of the third through hole for one ring. The first device extends through the annular member, the second through hole, and the third through hole to the outside of the housing; The first device is sealed to the outline of the third through hole for one ring, and the first device is not fixedly connected to the first panel; or, the first device is sealed to the outline of the second through hole for one ring, and the first device is not fixedly connected to the second panel.

7. The housing device according to claim 5 or 6, characterized in that, The annular component is airtight and elastic along the axial direction.

8. The housing device according to any one of claims 1 to 7, characterized in that, The fourth panel includes a first annular portion and a second annular portion, the first annular portion surrounding the first cavity, and the second annular portion surrounding the second cavity; The first annular portion and the first panel are an integral structure; or, The first annular portion and the second annular portion are an integral structure; or, The second annular portion and the second panel are an integral structure.

9. The housing device according to any one of claims 1 to 8, characterized in that, The housing also includes a fifth panel and a second component; The fifth panel and the third panel are spaced apart from each other along the thickness direction; the fourth panel intersects with the fifth panel and is sealed together. The second device is disposed within the first cavity, and the second device is fixedly connected to the third panel or the fifth panel; The third panel, the fourth panel, and the fifth panel form a third cavity. The fourth panel or the fifth panel is provided with a fourth through hole, which communicates with the third cavity.

10. A housing panel, characterized in that, The housing panel includes: First panel; The second panel is spaced apart from the first panel along the thickness direction; The fourth panel is an annular panel, which is sealed and connected to the first panel and the second panel in a ring, forming a second cavity; The second panel or the fourth panel is provided with a first through hole, which communicates with the second cavity.

11. A housing panel, characterized in that, The housing panel includes: First panel; The second panel is spaced apart from the first panel along the thickness direction; The fourth panel is an annular panel, which is sealed and connected to the first panel and the second panel in a ring, forming a second cavity; the second panel or the fourth panel is provided with a first through hole, and the first panel has a second through hole, which are respectively connected to the second cavity; An annular component, one end of which is axially sealed to the contour of the second through hole for one ring, and the remaining end of which is axially sealed to the second panel for one ring.

12. A housing panel, characterized in that, The housing panel includes: First panel; The second panel is spaced apart from the first panel along the thickness direction; The fourth panel is an annular panel, which is sealed and connected to the first panel and the second panel in a ring, forming a second cavity; the second panel or the fourth panel is provided with a first through hole, the first panel has a second through hole, and the second panel has a third through hole, and the first through hole, the second through hole and the third through hole are respectively connected to the second cavity; An annular component, one end of which is axially sealed to the contour of the second through hole for one ring, and the remaining end of which is axially sealed to the contour of the third through hole for one ring.

Images