Local absorption cover glass

By introducing cover glass designs with absorption and transparency regions in the waveguide combiner, the visual blurring problem of the grating region in the waveguide combiner is solved, achieving a more uniform appearance and a clearer virtual image overlay effect.

CN121969978APending Publication Date: 2026-05-01APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2024-09-24
Publication Date
2026-05-01

AI Technical Summary

Technical Problem

Existing waveguide combiners produce blurred areas when superimposing virtual images, resulting in poor visual effects.

Method used

The waveguide assembly design employs a substrate with a top surface and a cover glass with an absorption region and a transparent region on the cover glass. The absorption region contains absorbing material to compensate for the differences in transmission and reflection in the grating region, achieving a uniform appearance.

Benefits of technology

By designing the absorption and transparency regions, the waveguide combiner achieves a more uniform appearance and better aesthetics, reduces visual differences in the grating area, and improves the clarity of virtual image overlay.

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Abstract

The invention provides a waveguide combiner. The waveguide combiner includes a substrate having a top surface. The waveguide combiner includes a plurality of structures disposed over the top surface. The waveguide combiner includes a cover glass disposed over the top surface. The cover glass comprises an absorption area and a transparent area. The absorbent region includes an absorbent material.
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Description

Technical Field

[0001] Embodiments of this disclosure generally relate to waveguide combiners for enhanced, hybrid, and virtual reality applications. Background Technology

[0002] Virtual reality is generally considered to be a computer-generated simulated environment in which the user has a distinct physical presence. Virtual reality experiences can be generated in 3D and viewed using head-mounted displays (HMDs), such as glasses or other wearable display devices with near-eye display panels as lenses, to display a virtual reality environment that replaces the real environment.

[0003] However, augmented reality (AR) allows users to still see their surroundings through glasses or other HMD devices' display lenses, while also seeing virtual objects generated for the display as part of the environment. AR can include any type of input, such as audio and haptic input, as well as virtual images, graphics, and videos that amplify or enhance the user's experience of the environment. As an emerging technology, AR faces many challenges and design limitations.

[0004] One challenge is displaying virtual images superimposed on the surrounding environment. Waveguide combiners (such as augmented reality waveguide combiners) are used to assist in overlaying graphics. The generated light propagates through the waveguide combiner until it leaves the combiner and is superimposed on the surrounding environment. Unfortunately, waveguide combiners contain visually distinct raster and non-raster areas.

[0005] Therefore, there is a need to improve waveguide combiners with ambiguous regions. Summary of the Invention

[0006] This disclosure provides a waveguide assembler. The waveguide assembler includes a substrate having a top surface. The waveguide assembler includes a plurality of structures disposed above the top surface. The waveguide assembler includes a cover glass disposed above the top surface. The cover glass includes an absorbing region and a transparent region. The absorbing region includes an absorbing material.

[0007] This disclosure also provides a waveguide assembler. The waveguide assembler includes a substrate having a top surface. The waveguide assembler includes multiple structures disposed above the top surface. The multiple structures include a first grating, a second grating, and a third grating. The waveguide assembler includes a cover glass disposed above the top surface. The cover glass includes an absorbing region and a transparent region. The absorbing region includes an absorbing material.

[0008] This disclosure also provides a method for forming a waveguide combiner. The method includes disposing of a plurality of structures on a substrate having a top surface. A cover glass is disposed above the top surface of the substrate. The cover glass includes an absorbing region and a transparent region. The transparent region is disposed above each of the plurality of structures. The cover glass and the substrate are coupled using an edge material. Attached Figure Description

[0009] To gain a more detailed understanding of the features described above, reference can be made to the embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the drawings illustrate only exemplary embodiments and should not be construed as limiting the scope of the invention, and other embodiments with equivalent effects may be permitted.

[0010] Figure 1 This is a front perspective view of a waveguide combiner according to the embodiments described herein.

[0011] Figure 2 This is a front view of the cover glass according to the embodiments described herein.

[0012] Figure 3A This is a front perspective view of a waveguide assembly with a locally absorbing cover glass disposed on the top surface of a substrate, according to an embodiment described herein.

[0013] Figure 3B This is a cross-sectional view of a waveguide assembly with a locally absorbing cover glass disposed on the top surface of a substrate, according to an embodiment described herein.

[0014] Figure 4 This is a flowchart of a method for forming a waveguide combiner according to certain embodiments.

[0015] Figures 5A to 5C This is a schematic cross-sectional view of a portion of a substrate during a method for forming a waveguide combiner, according to certain embodiments.

[0016] For ease of understanding, the same component symbols are used as much as possible to represent the same components in the drawings. It should be understood that components and features of one embodiment can be advantageously incorporated into other embodiments without further explanation. Detailed Implementation

[0017] Embodiments of this disclosure generally relate to film stacks for electronic components and methods of forming the same. The film stacks described herein can exhibit component performance superior to conventional techniques. The methods described herein are repeatable and can produce a uniform passivation layer with reduced impedance. Furthermore, compared to conventional techniques, the embodiments described herein enable simplified material handling and integration, and extend the shelf life of the passivation film stack (passivation film roll).

[0018] Figure 1 A perspective front view of the waveguide combiner 100 is shown. It should be understood that the waveguide combiner 100 described below is an exemplary waveguide combiner. The waveguide combiner 100 may be an augmented reality waveguide combiner. The waveguide combiner 100 includes a plurality of element structures 102 disposed in or on a substrate 101.

[0019] The substrate 101 can be any substrate used in the art, and depending on its use as a waveguide substrate, it can be opaque or transparent to light of a selected wavelength. Substrate selection can include substrates of any suitable material, including but not limited to amorphous dielectrics, non-amorphous dielectrics, crystalline dielectrics, polymers, or combinations thereof. In some embodiments, the substrate 101 includes, but is not limited to, silicon-containing materials, silicon and oxygen-containing compounds, germanium-containing materials, indium and phosphide-containing compounds, gallium and arsenic-containing compounds, gallium and nitrogen-containing compounds, carbon-containing materials, silicon and carbon-containing compounds, silicon, carbon and oxygen-containing compounds, silicon and nitrogen-containing compounds, silicon, oxygen and nitrogen-containing compounds, niobium and oxygen-containing compounds, lithium, niobium and oxygen-containing compounds, aluminum and oxygen-containing compounds, indium, tin and oxygen-containing compounds, titanium and oxygen-containing compounds, lanthanum and oxygen-containing compounds, gadolinium and oxygen-containing compounds, zinc and oxygen-containing compounds, yttrium and oxygen-containing compounds, tungsten and oxygen-containing compounds, potassium and oxygen-containing compounds, phosphorus and oxygen-containing compounds, barium and oxygen-containing compounds, sodium and oxygen-containing compounds, or combinations thereof. In other embodiments that may be combined with other embodiments described herein, substrate 101 includes an oxide comprising one or more materials containing gadolinium, silicon, sodium, barium, potassium, tungsten, phosphorus, zinc, calcium, titanium, tantalum, niobium, lanthanum, zirconium, lithium, or yttrium. Example materials for substrate 101 include silicon (Si), silicon monoxide (SiO), silicon dioxide (SiO2), silicon carbide (SiC), fused silica, diamond, quartz germanium (Ge), silicon germanium (SiGe), indium phosphide (InP), gallium arsenide (GaAs), gallium nitride (GaN), sapphire, sapphire (Al2O3), lithium niobate (LiNbO3), indium tin oxide (ITO), lanthanum oxide (La2O3), gadolinium oxide (Gd2O5), zinc oxide (ZnO), yttrium oxide (Y2O3), tungsten oxide (WO3), titanium oxide (TiO2), zirconium oxide (ZrO3), sodium oxide (Na2O), niobium oxide (Nb2O5), barium oxide (BaO), potassium oxide (K2O), phosphorus pentoxide (P2O5), calcium oxide (CaO), or combinations thereof.

[0020] Substrate 101 has substrate transmittance (T) NG Substrate transmittance (T) NG This represents the amount of light passing through substrate 101. Substrate 101 has a substrate reflectivity (R0). NG Substrate reflectivity (R)NG () represents the amount of light reflected from the outer surface of substrate 101. The sum of substrate transmittance and substrate reflectance is 1, for example, T NG +R NG =1. The substrate 101 can be selected to transmit an appropriate amount of light of the desired wavelength or wavelength range, for example, T NG Greater than R NG In embodiments, the wavelength range includes one or more wavelengths from about 100 to about 3000 nanometers. In some embodiments, substrate 101 is configured such that the infrared to ultraviolet region of the transmission spectrum of substrate 101 is greater than or equal to about 50% to about 100%. The refractive index of substrate 101 may be greater than about 1.8. For example, the substrate may include silicon carbide, lithium niobium oxide, and glass with a refractive index greater than 1.8.

[0021] The component structure 102 is formed of a structural material formed on and / or above a substrate 101. The structural material and substrate 101 include various materials. Structural materials include, but are not limited to, one or more oxides, carbides, or nitrides of silicon, aluminum, zirconium, tin, tantalum, zirconium, barium, titanium, hafnium, lithium, lanthanum, cadmium, niobium, or combinations thereof. Examples of structural materials include silicon carbide, silicon carbide, titanium oxide, silicon oxide, vanadium oxide, aluminum oxide, aluminum-doped zinc oxide, indium tin oxide, tin oxide, zinc oxide, tantalum oxide, silicon nitride, zirconium oxide, niobium oxide, cadmium stannate, silicon oxynitride, barium titanate, diamond-like carbon, hafnium oxide, lithium niobate, silicon carbonitride, silver, cadmium selenide, mercury telluride, zinc selenide, silver indium gallium sulfide, silver indium sulfide, indium phosphide, gallium phosphide, lead sulfide, lead selenide, zinc sulfide, molybdenum sulfide, tungsten sulfide, or combinations thereof.

[0022] The element structure 102 can be a nanostructure with submicron dimensions, such as nanometer dimensions, for example, a critical size less than 1 μm. A region of the element structure 102 can correspond to one or more gratings 104, such as a first grating 104a, a second grating 104b, and a third grating 104c. The waveguide combiner 100 includes at least a first grating 104a corresponding to the input coupling grating and a third grating 104c corresponding to the output coupling grating. The waveguide combiner may include a second grating 104b corresponding to an intermediate grating.

[0023] Component structure 102 has a structural transmittance (T) G Structural transmittance (T) G This represents the amount of light passing through the element structure 102. The element structure 102 has a structural reflectivity (R0). G Structural reflectivity (R) G This represents the amount of light reflected from the outer surface of element structure 102. Element structure 102 has at least one diffraction order (D). G,n), where n is any non-zero integer. The diffraction order represents the amount of light entering the outer surface of the element structure 102 and diffracted within the element structure 102. The structural transmittance, structural reflectance, and diffraction order total 1, for example, T. G +R G +D G,n =1. In an embodiment, the element structure includes a first diffraction order (D... G,+1 ) and the second diffraction order (D G,-1 ), where T G +R G +D G,+1 +D G,-1 =1.

[0024] In the operation of waveguide combiner 100, a virtual image is projected from a near-eye display (e.g., a microdisplay) onto a first grating 104a. The element structure 102 of the first grating 104a couples the incident beam of the virtual image and diffracts the incident beam with a diffraction order D. G,n The diffracted beam is directed to the second grating 104b. The diffracted beam undergoes total internal reflection (TIR) ​​through the waveguide combiner 100 until it contacts the element structure 102 of the second grating 104b. In this embodiment, the diffracted beam can be determined according to the diffraction order D. G,n The beam is split to generate a first, second, and third partial beam. The first partial beam may be refracted back or lost in the waveguide combiner 100. The second partial beam may contact the structure of the element structure 102, including the second grating 104b. The third partial beam may contact the structure of the element structure 102, including the third grating 104c. Each partial beam (e.g., the first, second, or third partial beam) may continue to contact the structure of the element structure 102 until the intensity of the beam refracted through the waveguide combiner 100 to the element structure 102 is exhausted, or a portion of the beam refracted through the element structure 102 reaches the end of the second grating 104b or the third grating 104c. The beam of the virtual image propagates from the second grating 104b or the third grating 104c to superimpose the virtual image onto the surrounding environment.

[0025] Figure 2A front view of the cover glass 200 is shown. It should be understood that the cover glass 200 described below is an exemplary cover glass. The cover glass 200 may include any protective material protecting the substrate 101. For example, the cover glass 200 may include amorphous dielectrics, non-amorphous dielectrics, crystalline dielectrics, silicon oxide, polymers, and combinations thereof. The cover glass 200 is a transparent material. In some embodiments, the cover glass 200 is transparent and has an absorption coefficient of less than 0.001. Suitable examples of the cover glass 200 may include silicon (Si), silicon dioxide (SiO2), fused silica, quartz, silicon carbide (SiC), germanium (Ge), silicon germanium (SiGe), indium phosphide (InP), gallium arsenide (GaAs), gallium nitride (GaN), sapphire, or combinations thereof.

[0026] The cover glass 200 includes multiple transparent regions 202. Each transparent region is located above a corresponding element structure. Each transparent region includes a region transmittance (T0). C Regional transmittance (T) C This represents the amount of light passing through the transparent region of the cover glass covering each of the multiple element structures. In an embodiment, the cover glass 200 includes a first transparent region 202a, a second transparent region 202b, and a third transparent region 202c. The first transparent region 202a may correspond to a first grating 104a. The second transparent region 202b may correspond to a second grating 104b. The third transparent region 202c may correspond to a third grating 104c.

[0027] The coverslip 200 includes an absorption region 204. The absorption region 204 represents the absorption transmittance (T). A Absorption transmittance (T) A The amount of light passing through the absorption region 204 of the cover glass, which does not cover the element structure of the waveguide combiner 100, is represented by the absorption transmittance (T). In an embodiment, the absorption transmittance (T) is... A It may be less than the regional transmittance (T) C This indicates that less light passes through the absorption region than through the transparent region. The absorption region 204 of the cover glass does not cover the element structure of the waveguide combiner 100. For example, the absorption region 204 may be oriented and / or shaped such that the absorption region is complementary to the waveguide grating regions (e.g., the first grating 104a, the second grating 104b, and / or the third grating 104c).

[0028] Absorbing region 204 includes an absorbing material. The absorbing material may include at least one of one or more types of particles, one or more dyes or pigments, and a polymer matrix of one or more binders coated on or embedded in the absorbing region 204. In some embodiments, the absorbing material includes at least one metal film. The at least one metal film may include a stack of metal films. One or more metal films include, but are not limited to, chromium-containing films and titanium-containing films. One or more metal films may be configured to absorb light of one or more wavelengths in the absorbing region 204. In some embodiments, the absorbing material may include one or more filler dispersions, one or more photoinitiators, one or more epoxy resins, one or more additives, one or more silanes, one or more isocyanates, one or more acids, one or more phosphine oxides, or combinations thereof. Examples of filler dispersions include acrylates or methacrylates. Examples of additives include amines or amides. Examples of dyes include organic dyes. One or more pigments include, but are not limited to, carbon black, carbon nanotubes, iron oxide black, black pigments, or combinations thereof. One or more binders may be radiation-cured to form a polymer matrix. One or more types of particles are arranged in the polymer matrix. One or more adhesives include, but are not limited to, UV-curable adhesives, LED-curable adhesives, thermosetting adhesives, infrared-curable adhesives, or combinations thereof.

[0029] One or more types of particles include, but are not limited to, titanium, titanium oxide (TiO2), chromium, Si, zirconium oxide (ZrO2), zinc oxide (ZnO), iron(II,III) oxide (Fe3O4), germanium (Ge), SiC, diamond, dopants thereof, or any combination thereof. One or more types of particles include at least one nanoparticle or microparticle. Each nanoparticle (NP) or microparticle (MP) may be a coated particle, such as one, two, or more shells arranged around a core. In some examples, the NP or MP may contain one or more types of ligands coupled to the outer surface of the NP or MP (e.g., coordinated NPs or stabilized NPs). The NP or MP may have one or more different shapes or geometries, such as spherical, elliptical, rod-shaped, cubic, linear, cylindrical, rectangular, or combinations thereof. The size or diameter of the NP may be from about 2 nm to about 200 nm.

[0030] One or more types of particles have a particle refractive index greater than 2.0. In some embodiments that may be combined with other embodiments described herein, one or more types of particles have a particle refractive index of about 2.4 or greater. A particle refractive index greater than 2.0 results in an absorption region with a refractive index of about 1.7 or greater. The optical density of the absorption region of about 2.0 or greater is provided by at least one of one or more dyes or one or more pigments. The refractive index of the absorption region 204 of about 1.7 or greater matches that of a high refractive index substrate (i.e., substrate 101 with a refractive index greater than about 1.8).

[0031] Figure 3A A perspective front view of a waveguide assembly 300 is shown, the waveguide assembly 300 having an absorbing cover glass 200 disposed on the top surface of a substrate 101. In some embodiments, the absorbing glass 200 is disposed on the top surface of the substrate 101. The waveguide assembly 300 has a uniform appearance due to matching or similar transmittance and reflectance in areas of the waveguide assembly 100 where element structures 102 are present or absent. By overlapping the cover glass 200 with the waveguide assembly 100, the element structures 102 on the waveguide assembly 100 have the same appearance, or have an appearance within an error range of about 0.1% to about 2% in areas of the waveguide assembly 100 where element structures 102 are absent, for example, about 0.1% to about 1%, about 0.5% to about 1.5%, or about 1% to about 2%.

[0032] In one embodiment, the waveguide combiner 300 can achieve a uniform appearance, wherein the substrate transmittance multiplied by the absorbed transmittance equals the structural transmittance multiplied by the regional transmittance, as shown in Equation 1:

[0033] Furthermore, the waveguide combiner 300 can achieve a uniform appearance, wherein the substrate reflectivity plus the reflectivity (RA) of the absorbing region 204 is equal to the structural reflectivity plus the reflectivity (RC) of the transparent region 202, as shown in Equation 2:

[0034] Furthermore, the waveguide combiner 300 achieves a uniform appearance, wherein the absorption region 204 has a high absorbance (A). A The value is equal to one minus the structural transmittance minus the structural reflectance, as shown in Equation 3:

[0035] Figure 3B A cross-sectional view of a waveguide assemblies 300 is shown, the waveguide assemblies 300 having a partially absorbing cover glass 200 disposed above the top surface of a substrate 101. In some embodiments, the waveguide assemblies 300 may include the cover glass 200, which includes an absorbing region 302 and a transparent region 303 corresponding to the element structure 102 of the waveguide assemblies 300. In some embodiments that can be combined with other embodiments, an edge material 305 is included. The edge material 305 may include an inner surface 306 having an adhesive material. The adhesive material may include a polymer adhesive, epoxy resin, acrylate, or a combination thereof. The inner surface 306 of the edge material 305 may be coupled to a side surface 307 of the substrate 101 and a side surface 308 of the cover glass 200.

[0036] Edge material 305 may include silicon-containing materials, silicon- and oxygen-containing compounds, germanium-containing materials, indium- and phosphide-containing compounds, gallium- and arsenic-containing compounds, gallium- and nitrogen-containing compounds, carbon-containing materials, silicon- and carbon-containing compounds, silicon-, carbon- and oxygen-containing compounds, silicon- and nitrogen-containing compounds, silicon-, oxygen- and nitrogen-containing compounds, niobium- and oxygen-containing compounds, lithium-, niobium- and oxygen-containing compounds, aluminum- and oxygen-containing compounds, indium-, tin- and oxygen-containing compounds, titanium- and oxygen-containing compounds, lanthanum- and oxygen-containing compounds, gadolinium- and oxygen-containing compounds, zinc- and oxygen-containing compounds, yttrium- and oxygen-containing compounds, tungsten- and oxygen-containing compounds, potassium- and oxygen-containing compounds, phosphorus- and oxygen-containing compounds, barium- and oxygen-containing compounds, sodium- and oxygen-containing compounds, or combinations thereof. Edge material 305 may have an absorption coefficient of less than 0.001. Suitable examples of edge material 305 may include silicon (Si), silicon dioxide (SiO2), fused silica, quartz, silicon carbide (SiC), germanium (Ge), silicon germanium (SiGe), indium phosphide (InP), gallium arsenide (GaAs), gallium nitride (GaN), sapphire, or combinations thereof.

[0037] Edge material 305 may define cavity 310. Cavity 310 may be filled with a material having a refractive index of about 1 to about 1.3, such as air or aerogel material. For example, cavity 310 may include air material with a refractive index of about 1.0. As a further example, cavity 310 may be filled with aerogel material with a refractive index of about 1.1 to about 1.3. In some embodiments that may be combined with other embodiments, the aerogel material may be coupled to substrate 101 and / or cover glass 200 by one or more adhesives disposed on the top surface of substrate 101 or the bottom surface of cover glass 200. The adhesive may include one or more of polymeric adhesives, epoxy resins, acrylates, or combinations thereof.

[0038] In one embodiment, the absorption region 302 and the transparent region 303 may correspond to alternating gradients of the waveguide combiner 100, wherein each alternating gradient has an independent transmittance or reflectance (not shown). In some embodiments, the waveguide combiner 300 may include a cover glass 200 comprising an absorption region 302 and a transparent region 303, the transparent region corresponding to a spatially varying grating of the waveguide combiner 100 or a spatially varying region of a waveguide combiner without element structure 102. A spatially varying grating is a grating having transmittance or reflectance that varies within a lateral (e.g., x, y) position of the grating. In one embodiment, the waveguide combiner 100 may have spatially varying transmittance or reflectance that varies at one or more locations of the waveguide combiner 100. In one embodiment, when comprising one or more overlapping cover glasses 200 or waveguide combiners 100, the waveguide combiner 300 may include uniform transmittance or reflectance.

[0039] For example, the transmittance of waveguide combiner 300 can be represented by the transmittance of the nth sheet (e.g., cover glass 200 or waveguide combiner 100), which is a function of x and y positions, such as T. n (x, y), where n is a non-zero integer. The transmittance of the waveguide combiner 300 can then be determined by multiplying the transmittance of all the thin slices, as expressed in Equation 4:

[0040] Alternatively, the reflectivity of waveguide combiner 300 can be represented by the reflectivity of the nth sheet (e.g., cover glass 200 or waveguide combiner 100), as a function of x and y positions, for example, R. n (x, y), where n is a non-zero integer. The reflectivity of the waveguide combiner 300 can then be determined by summing the reflectivities of each of all the thin sheets, as expressed in Equation 5:

[0041] In one embodiment, when each of the n sheets is uniform at position x, y, the transmittance T and reflectance R may have constant values. Alternatively, when each of the n sheets is not uniform at position x, y, the cover glass 200 can exclude certain areas. For example, when the transmittance at a certain location of the waveguide combiner 100 is 0, such as at the coupler, the black edge coating, or other forms of marking on the surface, the cover glass 200 can exclude these objects from the absorption region 204.

[0042] In one embodiment, waveguide combiner 300 may include waveguide combiner 100 and cover glass 200 aligned with a wavelength (λ). The wavelength (λ) may correspond to a color shift in the transmission or reflection of waveguide combiner 100 or cover glass 200. The wavelength (λ) may be adjusted to a visible wavelength, for example, about 380 nm to about 700 nm, about 400 nm to about 600 nm, about 450 nm to about 700 nm, about 500 nm to about 600 nm, about 380 nm to about 500 nm, etc. The transmission and reflectivity of waveguide 300 can then be calculated according to Equations 6 and 7.

[0043] Now for reference Figure 4 A method 400 for forming a waveguide combiner 100. Figures 5A-5C A portion of the substrate 101 is shown. In one embodiment, the portion corresponds to the first grating 104a of the waveguide combiner 100 to be formed.

[0044] In operation 402, such as Figure 5AAs shown, a plurality of component structures 102 are disposed on and / or above the substrate 101. The component structures 102 may be disposed on and / or above the top surface of the substrate 101. The component structures 102 may be disposed on and / or above the top surface of the substrate 101 according to one or more deposition processes. In operation 404, as... Figure 5B As shown, a cover glass 200 is disposed on the top surface of the substrate. The cover glass 200 includes an absorption region 204 and a transparent region 202. The absorption region 204 of the cover glass 200 is disposed above the substrate 101 such that the absorption region 204 does not cover the component structure of the waveguide combiner 100. The transparent region 202 is disposed above the corresponding component structure.

[0045] In operation 406, such as Figure 5C As shown, the cover glass 200 and the substrate 101 are coupled using an edge material 305. The edge material 305 includes an inner surface 306 on which an adhesive material is bonded. The adhesive material may be configured to bond and / or couple the side surfaces 307 of the substrate 101 and / or the side surfaces 308 of the cover glass 200.

[0046] In some embodiments that can be combined with other embodiments, coupling the coverslip 200 to the substrate 101 further includes forming a cavity 310 between the coverslip 200 and the substrate 101. The cavity 310 may be filled with a material having a refractive index of about 1 to about 1.3, such as air or an aerogel material. For example, the cavity 310 may include an air material with a refractive index of about 1.0. As a further example, the cavity 310 may be filled with an aerogel material with a refractive index of about 1.1 to about 1.3. In some embodiments that can be combined with other embodiments, the aerogel material may be coupled to the substrate 101 and / or the coverslip 200 by one or more adhesives disposed on the top surface of the substrate 101 or the bottom surface of the coverslip 200. The adhesive may include one or more of polymeric adhesives, epoxy resins, acrylates, or combinations thereof.

[0047] In general, waveguide assemblies with cover glass can compensate for transmission and reflection differences between multiple component structures. For example, this paper describes a waveguide assembly region with multiple gratings and regions without component structures. The glass cover can cover the area, giving the waveguide assembly a uniform appearance, rather than the appearance of regions with both multiple component structures and regions without component structures. Compared with waveguide assemblies without cover glass, the waveguide assemblies of this disclosure will have better aesthetics.

[0048] Although the foregoing is directed to examples of this disclosure, other and further examples of this disclosure may be devised without departing from the basic scope of this disclosure, and the scope of this disclosure is defined by the appended claims.

Claims

1. A waveguide combiner, comprising: A substrate having a top surface; Multiple structures, said multiple structures being disposed above the top surface; and A cover glass, disposed above the top surface, the cover glass comprising an absorbing region and a transparent region, wherein the absorbing region comprises an absorbing material.

2. The waveguide combiner according to claim 1, wherein the transparent region is disposed above each of the plurality of structures.

3. The waveguide assembly according to claim 1, wherein the substrate has a substrate transmittance (T) NG ) and substrate reflectivity (R NG ), wherein the substrate transmittance (ti) is greater than the substrate reflectance (R). NG ).

4. The waveguide assembly of claim 3, wherein the substrate further has a structural transmittance (T0). G ) and structural reflectivity (R G ), and diffraction order (D G,n ), where n is a non-zero integer.

5. The waveguide assembly according to claim 4, wherein the substrate transmittance (T) NG and the substrate reflectivity (R) NG The sum of the values ​​of the structures is greater than the transmittance of the structure (T). G and the reflectivity (R) of the structure G The sum of ).

6. The waveguide assembly according to claim 4, wherein the cover glass has an absorption transmittance (T) A ) and regional transmittance (T C ).

7. The waveguide combiner according to claim 6, wherein the structural transmittance (T) G ) and the absorption transmittance (T) A The product of ) is equal to the transmittance of the substrate (T) NG ) and the regional transmittance (T) C The product of ).

8. The waveguide combiner according to claim 1, wherein the absorbing material comprises titanium, titanium oxide (TiO2), silicon (Si), zirconium oxide (ZrO2), chromium, zinc oxide (ZnO), iron tetroxide (Fe3O4), germanium (Ge), silicon carbide (SiC), diamond, dopants thereof, or any combination thereof.

9. The waveguide combiner of claim 1, wherein the absorbing material comprises one or more metal films.

10. The waveguide combiner of claim 9, wherein the absorbing material comprises one or more metal films.

11. The waveguide combiner of claim 1, wherein the absorption region has a refractive index of about 1.7 or greater and an optical density of about 2.0 or greater.

12. The waveguide combiner of claim 1, wherein the absorbing material comprises at least one of one or more dyes or one or more pigments.

13. The waveguide assembly of claim 1, wherein the absorbing material comprises a polymer matrix of one or more binders.

14. A waveguide combiner, comprising: A substrate having a top surface; Multiple structures, each disposed above the top surface, including a first grating, a second grating, and a third grating; and A cover glass, disposed above the top surface, the cover glass comprising an absorbing region and a transparent region, wherein the absorbing region comprises an absorbing material.

15. The waveguide combiner of claim 14, wherein the first grating comprises a spatially variable grating.

16. The waveguide combiner of claim 14, wherein the second grating comprises a spatially variable grating.

17. The waveguide combiner of claim 14, wherein the third grating comprises a spatially variable grating.

18. A method comprising the steps of: Multiple structures are disposed on a substrate, the substrate having a top surface; A cover glass sheet is disposed above the top surface of the substrate, wherein the cover glass sheet includes an absorption region and a transparent region, the transparent region being disposed above each of the plurality of structures; and The cover glass and the substrate are coupled using an edge material.

19. The method of claim 17, further comprising the step of: disposing an aerogel material between the substrate and the cover glass.

20. The method of claim 17, wherein the step of coupling the cover glass and the substrate further comprises the steps of: providing an adhesive material on the inner surface of the edge material, and coupling the cover glass and the substrate using the adhesive material.