Position adjustment mechanism of feature marks in focusing and leveling optical system

Abstract

This application provides a position adjustment mechanism for a feature mark in a focusing and leveling optical system, belonging to the field of semiconductor technology. Addressing the issues of low reliability and large size in feature mark position adjustment within focusing and leveling optical systems, this application provides a feature mark position adjustment mechanism, including a reference base; a first movable base located within the reference base, with its two ends in the Z-axis direction connected to both ends of the reference base via a drive assembly and a guide assembly, respectively; a second movable base located within the first movable base, with its two ends in the X-axis direction connected to both ends of the first movable base via a drive assembly and a guide assembly, respectively; and a receiving cavity for accommodating the feature mark, extending through the second movable base along the Y-axis direction, and containing an axial adjustment ring and an axial elastic element for clamping the feature mark along the Y-axis direction. This application features a compact structure, reducing volume, and enables real-time locking, improving adjustment reliability.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a position adjustment mechanism for feature marks in a focusing and leveling optical system. Background Technology

[0002] The focusing and leveling sensor is an optical system that uses optical triangulation to measure the defocusing of a silicon wafer. It is an essential subsystem of a lithography machine. It is used for high-precision focusing and leveling of the silicon wafer during the exposure of mask patterns in the lithography machine.

[0003] The feature marks in a focusing and leveling optical system are the objects in the object-image relationship of the optical system. These feature marks are specific patterns or structures. When a light source illuminates the feature marks, the image is projected onto the silicon wafer under test after passing through the focusing and leveling optical system. The distribution of the pattern on the feature marks corresponds to the image at different positions on the silicon wafer. The sharpness and accuracy of the image are used to detect whether the position of the silicon wafer in the height and tilt directions is within the range that meets the exposure conditions. The image sharpness varies at different height positions of the silicon wafer, i.e., the light intensity varies. Therefore, height information can be obtained based on the light intensity. The tilt of the silicon wafer can be obtained by measuring the height information at multiple positions on the silicon wafer.

[0004] Because there is a strict object-image relationship between feature markers and imaging on the silicon wafer, the physical position of feature markers in the optical system must also be guaranteed to be within a certain size range. Feature markers are usually components of the system's optical path, physically located within the optical path structure, and their placement space is constrained by the optical path. With the increasing trend of miniaturization, how to achieve precise and reliable installation and layout of the various components in the optical path has become a crucial aspect of improving the performance of the optical system.

[0005] Currently, the positional accuracy of feature markers is typically ensured by the machining precision of their fixed components, or by adjusting them using a displacement-adjustable mechanism. However, in practice, relying solely on machining processes cannot guarantee high-precision positioning of feature markers. While displacement-adjustable mechanisms can be adjusted to the target position, the adjustment drive and locking device are separate, preventing self-locking. Locking after adjustment causes positional shifts, and these mechanisms are usually bulky, significantly occupying system space, and may even be unsuitable for compact optical systems. Summary of the Invention

[0006] The purpose of this application is to address the problems of low reliability and large structural volume in the position adjustment of feature marks in existing focusing and leveling optical systems. Therefore, this application provides a position adjustment mechanism for feature marks in a focusing and leveling optical system. By circumferentially arranging an axial adjustment ring, a second moving seat, a first moving seat, and a reference seat around the feature mark, the structural compactness is improved, the volume is reduced, and real-time locking is achieved, thereby improving adjustment reliability.

[0007] This application provides a position adjustment mechanism for feature markers in a focusing and leveling optical system, including:

[0008] Reference base;

[0009] The first movable seat is located inside the reference seat, and its two ends in the Z-axis direction are respectively connected to the two ends of the reference seat through a drive component and a guide component;

[0010] The second movable seat is located inside the first movable seat, and its two ends in the X-axis direction are respectively connected to the two ends of the first movable seat through the drive component and the guide component;

[0011] A receiving cavity for accommodating the feature mark is disposed through the second movable seat along the Y-axis direction, and an axial adjusting ring and an axial elastic element for clamping the feature mark are disposed within the receiving cavity along the Y-axis direction; furthermore,

[0012] The axial adjustment ring can move along the Y-axis and lock with the receiving cavity;

[0013] The driving assembly includes a driving rod and a first spring sleeved on the driving rod. The guiding assembly includes a guide rod and a second spring sleeved on the guide rod. The axes of the first spring and the second spring coincide, and the preload of the first spring is 2-4 times the preload of the second spring, so that the corresponding first moving seat and the second moving seat can move under the push of the first spring, or the corresponding first moving seat and the second moving seat can move in opposite directions under the drive of the driving rod.

[0014] In some embodiments, the drive rod includes, in sequence along its axial direction, a limiting portion, a sliding portion, and a screw portion;

[0015] The first movable seat is slidably connected to the reference seat on both sides in the Z-axis direction;

[0016] When the drive assembly connects the reference base and the first movable base, the drive rod passes through one end of the reference base along the Z-axis direction, and the limiting part abuts against the end face of the reference base. The screw part is threadedly connected to the first movable base and can slide within the reference base via the sliding rod part. The first spring is located between the reference base and the first movable base.

[0017] The screw part rotates away from the first movable seat, causing the first spring to push the first movable seat to move along the Z-axis;

[0018] The screw rotates toward the first movable seat, causing the first movable seat to move in the opposite direction along the Z-axis.

[0019] In some embodiments, the second movable seat is slidably connected to the first movable seat on both sides in the X-axis direction;

[0020] When the drive assembly connects the first movable seat and the second movable seat, the drive rod passes through one side of the first movable seat along the X-axis direction, and the limiting part abuts against the side of the first movable seat. The screw part is threadedly connected to the second movable seat and can slide within the first movable seat via the sliding rod part. The first spring is located between the first movable seat and the second movable seat.

[0021] The screw part rotates away from the first movable seat, causing the first spring to push the second movable seat to move along the X-axis;

[0022] The screw rotates toward the second movable seat, causing the second movable seat to move in the opposite direction along the X-axis.

[0023] In some embodiments, the limiting part has a connecting structure for connecting with a driving member to achieve rotation.

[0024] In some embodiments, the guide rod includes a fixed portion and a sliding portion;

[0025] When the guide assembly connects the reference base and the first movable base, the guide rod passes through the other end of the reference base along the Z-axis direction, and the fixed part is fixedly connected to the first movable base. The sliding part can slide within the reference base, and the second spring is located between the reference base and the first movable base.

[0026] In some embodiments, when the guide assembly connects the first movable seat and the second movable seat, the guide rod passes through the other side of the first movable seat along the X-axis direction, and the fixing part is fixedly connected to the second movable seat, the sliding part can slide within the first movable seat, and the second spring is located between the first movable seat and the second movable seat.

[0027] In some embodiments, the fixing part is threadedly connected to the corresponding first movable seat and second movable seat.

[0028] In some embodiments, the axial adjusting ring is threadedly connected to the receiving cavity.

[0029] Beneficial effects:

[0030] This application allows for the adjustment of the position of the feature mark on the X, Y, and Z axes via a first movable base, a second movable base, and an axial adjustment ring. Furthermore, the reference base, the first movable base, the second movable base, and the axial adjustment ring are nested sequentially around the feature mark in the circumferential direction, resulting in a compact structure and small size, which can be arranged in a space-constrained focusing and leveling optical system. At the same time, the cooperation between the drive assembly and the guide assembly, and the cooperation between the axial adjustment ring and the axial elastic element, enables simultaneous adjustment and locking, i.e., real-time locking, thereby improving the reliability of the adjustment.

[0031] Other features and corresponding beneficial effects of this application will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in this application. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of this application;

[0033] Figure 2 This is a structural schematic diagram from another angle of this application;

[0034] Figure 3 This is a cross-sectional view of the present application;

[0035] Figure 4 This is another cross-sectional view of this application.

[0036] Explanation of reference numerals in the attached figures:

[0037] 1. Base plate; 11. Stepped surface; 12. Mounting hole;

[0038] 2. First movable seat; 21. Limiting surface;

[0039] 3. Second movable seat; 31. Receiving cavity; 32. Limiting ring;

[0040] 4. Axial adjusting ring; 41. Axial elastic element;

[0041] 5. Drive rod; 51. Limiting part; 52. Slide rod part; 53. Screw part;

[0042] 6. The first spring;

[0043] 7. Guide rod; 71. Fixed part; 72. Sliding part;

[0044] 8. The second spring;

[0045] 9. Feature markers. Detailed Implementation

[0046] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many specific details will be included in the following description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0047] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0048] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more. Unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or a connection within two elements. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0049] Please see Figures 1-4 , Figure 1 This is a schematic diagram of the structure of this application; Figure 2 This is a structural schematic diagram from another angle of this application; Figure 3 This is a cross-sectional view of the present application; Figure 4 This is another cross-sectional view of this application.

[0050] This application provides a position adjustment mechanism for feature markers in a focusing and leveling optical system, including:

[0051] Reference mount 1 is used to fix the mounting structure in the focusing and leveling optical system, so as to fix the entire position adjustment mechanism in the system.

[0052] The first movable seat 2 is located inside the reference seat 1, and its two ends in the Z-axis direction are connected to the two ends of the reference seat 1 through a drive component and a guide component, respectively.

[0053] The second movable seat 3 is located inside the first movable seat 2, and its two ends in the X-axis direction are connected to the two ends of the first movable seat 2 through a drive component and a guide component, respectively.

[0054] The receiving cavity 31 for accommodating the feature mark 9 is disposed through the second movable seat 3 along the Y-axis direction, and the receiving cavity 31 is provided with an axial adjusting ring 4 and an axial elastic member 41 for clamping the feature mark 9 along the Y-axis direction.

[0055] Furthermore, the axial adjustment ring 4 can move along the Y-axis and lock with the receiving cavity 31, thereby cooperating with the axial elastic element 41 to allow the feature mark 9 located in the receiving cavity 31 to move back and forth along the Y-axis and be locked in the current position in real time. This eliminates the need for adjustment and locking operations, which would cause the feature mark 9 to move again, thus ensuring the accuracy and reliability of the Y-axis position adjustment.

[0056] The drive assembly includes a drive rod 5 and a first spring 6 sleeved on the drive rod 5.

[0057] The guide assembly includes a guide rod 7 and a second spring 8 sleeved on the guide rod 7.

[0058] Furthermore, the axes of the first spring 6 and the second spring 8 coincide, and the preload of the first spring 6 is greater than that of the second spring 8, so that the corresponding first movable seat 2 and the second movable seat 3 can move under the push of the first spring 6, or the corresponding first movable seat 2 and the second movable seat 3 can move in the opposite direction under the drive of the drive rod 5.

[0059] That is, the feature mark 9 can move and lock in real time on the Z-axis through the reference seat 1, the first moving seat 2 and the corresponding drive component and guide component, and can move and lock in real time on the X-axis through the first moving seat 2, the second moving seat 3 and the corresponding drive component and guide component, thereby ensuring the accuracy and reliability of the Z and X axis position adjustment.

[0060] In summary, this method allows the position of the feature mark 9 on the X, Y, and Z axes to be adjusted respectively via the first movable seat 2, the second movable seat 3, and the axial adjustment ring 4, thereby achieving the adjustment of the position of the feature mark 9 in the optical path.

[0061] Furthermore, the reference base 1, the first movable base 2, the second movable base 3, and the axial adjustment ring 4 are nested sequentially in the circumferential direction of the feature mark 9, resulting in a compact structure and small volume. In particular, its flatness along the axial direction (Y-axis) greatly reduces the axial volume, making it easy to place in optical paths of limited length. It can support not only frontal incidence of the beam but also oblique incidence, and the extremely small axial dimension avoids beam obstruction.

[0062] In one embodiment, the preload of the first spring 6 is 2-4 times the preload of the second spring 8, thereby ensuring that the first movable seat 2 or the second movable seat 3, held by the first spring 6 and the second spring 8, can move under the action of the first spring 6.

[0063] Preferably, both the first spring 6 and the second spring 8 are cylindrical compression springs.

[0064] In one embodiment, the drive rod 5 includes, in sequence along its axial direction, a limiting part 51, a sliding part 52, and a screw part 53.

[0065] The first movable seat 2 is slidably connected to the reference seat 1 on both sides in the Z-axis direction, thereby preventing the first movable seat 2 from rotating around the Z-axis.

[0066] When the drive assembly connects the reference base 1 and the first movable base 2, the drive rod 5 passes through one end of the reference base 1 along the Z-axis direction, and the limiting part 51 abuts against the end face of the reference base 1. The screw part 53 is threadedly connected to the first movable base 2 and can slide in the reference base 1 through the sliding rod part 52. The first spring 6 is located between the reference base 1 and the first movable base 2.

[0067] Furthermore, the screw portion 53 rotates away from the first movable seat 2, causing the first spring 6 to push the first movable seat 2 to move along the Z-axis. That is, the drive rod 5 reverses and exits the threaded hole of the first movable seat 2. At this time, it moves with the drive rod 5, and the drive rod 5 is movably connected to the reference seat 1 through the slide portion 52 and the limiting portion 51, so that the drive rod 5 and the first movable seat 2 can move along the Z-axis under the action of the first spring 6, that is, move in the negative Z-axis direction as shown in the figure.

[0068] The screw part 53 rotates toward the first movable seat 2, causing the first movable seat 2 to move in the opposite direction along the Z-axis. That is, the drive rod 5 rotates clockwise and screws into the threaded hole of the first movable seat 2. At this time, as the drive rod 5 moves, the screw part 53 of the drive rod 5 causes the first movable seat 2 to compress the first spring 6 and move along the Z-axis direction, that is, move in the positive Z-axis direction as shown in the figure.

[0069] Furthermore, the drive displacement is achieved through a threaded connection, enabling precise fine-tuning and improving the accuracy of position adjustment.

[0070] Meanwhile, by setting springs at both ends of the movement direction, the movement of the first moving seat 2 and the second moving seat 3 can maintain stability when the drive rod 5 is driven in any direction, and can absorb vibration in both directions during use, thus improving the stability of the feature mark 9.

[0071] In one embodiment, the second movable seat 3 is slidably connected to the first movable seat 2 on both sides in the X-axis direction, thereby preventing the second movable seat 3 from rotating around the X-axis.

[0072] When the drive assembly is connected to the first movable seat 2 and the second movable seat 3, the drive rod 5 passes through one side of the first movable seat 2 along the X-axis direction, and the limiting part 51 abuts against the side of the first movable seat 2. The screw part 53 is threadedly connected to the second movable seat 3 and can slide inside the first movable seat 2 through the sliding rod part 52. The first spring 6 is located between the first movable seat 2 and the second movable seat 3.

[0073] Furthermore, the screw portion 53 rotates away from the first movable seat 2, causing the first spring 6 to push the second movable seat 3 to move along the X-axis. That is, the drive rod 5 reverses and exits the threaded hole of the second movable seat 3. At this time, it moves with the drive rod 5, and the drive rod 5 is movably connected to the first movable seat 2 through the slide portion 52 and the limiting portion 51, so that the drive rod 5 and the second movable seat 3 can move along the X-axis under the action of the first spring 6, that is, move in the negative X-axis direction as shown in the figure.

[0074] The screw part 53 rotates toward the second movable seat 3, causing the second movable seat 3 to move in the opposite direction along the X-axis. That is, the drive rod 5 rotates clockwise and screws into the threaded hole of the second movable seat 3. At this time, as the drive rod 5 moves, the screw part 53 of the drive rod 5 causes the second movable seat 3 to compress the first spring 6 and move along the X-axis direction, that is, to move in the positive X-axis direction as shown in the figure.

[0075] In one embodiment, the limiting part 51 has a connecting structure for connecting with the driving member to achieve rotation. For example, a hexagonal hole is provided at the end of the limiting part 51.

[0076] In one embodiment, the guide rod 7 includes a fixed part 71 and a sliding part 72.

[0077] When the guide assembly connects the reference base 1 and the first movable base 2, the guide rod 7 passes through the other end of the reference base 1 along the Z-axis direction, and the fixed part 71 is fixedly connected to the first movable base 2. The sliding part 72 can slide inside the reference base 1. The second spring 8 is located between the reference base 1 and the first movable base 2, thereby preventing the guide rod 7 from falling off. The structure is simple and the connection is reliable.

[0078] In one embodiment, when the guide assembly connects the first movable seat 2 and the second movable seat 3, the guide rod 7 passes through the other side of the first movable seat 2 along the X-axis direction, and the fixing part 71 is fixedly connected to the second movable seat 3, the sliding part 72 can slide inside the first movable seat 2, and the second spring 8 is located between the first movable seat 2 and the second movable seat 3.

[0079] In one embodiment, the fixing part 71 is threadedly connected to the corresponding first movable seat 2 and second movable seat 3, which is simple in structure and easy to maintain. That is, when the guide assembly is connected to the reference seat 1 and the first movable seat 2, the fixing part 71 of the guide rod 7 is threadedly connected to the first movable seat 2; when the guide assembly is connected to the first movable seat 2 and the second movable seat 3, the fixing part 71 of the guide rod 7 is threadedly connected to the second movable seat 3.

[0080] In one embodiment, the axial adjustment ring 4 is threadedly connected to the receiving cavity 31, that is, the drive displacement is realized through the threaded connection, which can realize precise fine adjustment and improve the accuracy of position adjustment.

[0081] In one embodiment, the axial elastic element 41 is a wave spring. Wave springs have a small thickness, which significantly reduces the axial installation space and the overall size of the mechanism compared to conventional springs, and also simplifies installation.

[0082] At this point, it can be understood that the end of the cavity 31 where the axial elastic member 41 is provided is provided with a limiting ring 32, and the axial elastic member 41 abuts against the limiting ring 32.

[0083] In one embodiment, the wave spring has at least three protrusions at both ends in the axial direction to achieve bidirectional planar positioning, thereby improving the installation stability of the wave spring, which in turn improves the stability of the force applied to the feature mark 9 and the positional stability of the feature mark 9.

[0084] In one embodiment, the reference base 1 is a rectangular frame, and its two ends in the Z-axis direction extend along the Y-axis direction to form connecting parts. One end connecting part is used to connect with the first movable base 2 through a drive component, and the other end connecting part is used to connect with the first movable base 2 through a guide component. Preferably, the end connecting part is also provided with a mounting hole 12 for fixing with the mounting structure in the focusing and leveling optical system.

[0085] Furthermore, the reference seat 1 is provided with stepped surfaces 11 on both sides in the Z-axis direction. The first movable seat 2 is slidably connected to the stepped surface 11, which can improve the sliding stability of the first movable seat 2 along the Z-axis.

[0086] In one embodiment, the first movable seat 2 is a rectangular frame, which facilitates assembly with the reference seat 1 and the second movable seat 3. That is, the first movable seat 2 has surfaces on both sides in the Z-axis direction that are adapted to the stepped surface 11 of the reference seat 1, and the two inner sides on both sides in the X-axis direction are set as limiting surfaces 21 to contact the second movable seat 3.

[0087] In one embodiment, the second movable seat 3 is a rectangular block whose dimensions in the Z-axis direction are adapted to the first movable seat 2, and the second movable seat 3 can slide along the limiting surface 21 of the first movable seat 2 in the X-axis direction. Since the second movable seat 3 has a certain thickness (Y-axis direction), the rotation of the second movable seat 3 around the X-axis can be restricted.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A position adjustment mechanism for a feature mark in a focusing and leveling optical system, characterized in that, include: Reference base; The first movable seat is located inside the reference seat, and its two ends in the Z-axis direction are respectively connected to the two ends of the reference seat through a drive component and a guide component; The second movable seat is located inside the first movable seat, and its two ends in the X-axis direction are respectively connected to the two ends of the first movable seat through the drive component and the guide component; A receiving cavity for accommodating the feature mark is disposed through the second movable seat along the Y-axis direction, and an axial adjusting ring and an axial elastic element for clamping the feature mark are disposed within the receiving cavity along the Y-axis direction; furthermore, The axial adjustment ring can move along the Y-axis and lock with the receiving cavity; The driving assembly includes a driving rod and a first spring sleeved on the driving rod. The guiding assembly includes a guide rod and a second spring sleeved on the guide rod. The axes of the first spring and the second spring coincide, and the preload of the first spring is 2-4 times the preload of the second spring, so that the corresponding first moving seat and the second moving seat can move under the push of the first spring, or the corresponding first moving seat and the second moving seat can move in opposite directions under the drive of the driving rod.

2. The position adjustment mechanism of the feature mark in the focusing and leveling optical system according to claim 1, characterized in that, The drive rod includes, in sequence along its axial direction, a limiting part, a sliding part, and a screw part; The first movable seat is slidably connected to the reference seat on both sides in the Z-axis direction; When the drive assembly connects the reference base and the first movable base, the drive rod passes through one end of the reference base along the Z-axis direction, and the limiting part abuts against the end face of the reference base. The screw part is threadedly connected to the first movable base and can slide within the reference base via the sliding rod part. The first spring is located between the reference base and the first movable base. The screw part rotates away from the first movable seat, causing the first spring to push the first movable seat to move along the Z-axis; The screw rotates toward the first movable seat, causing the first movable seat to move in the opposite direction along the Z-axis.

3. The position adjustment mechanism of the feature mark in the focusing and leveling optical system according to claim 2, characterized in that, The second movable seat is slidably connected to the first movable seat on both sides in the X-axis direction; When the drive assembly connects the first movable seat and the second movable seat, the drive rod passes through one side of the first movable seat along the X-axis direction, and the limiting part abuts against the side of the first movable seat. The screw part is threadedly connected to the second movable seat and can slide within the first movable seat via the sliding rod part. The first spring is located between the first movable seat and the second movable seat. The screw part rotates away from the first movable seat, causing the first spring to push the second movable seat to move along the X-axis; The screw rotates toward the second movable seat, causing the second movable seat to move in the opposite direction along the X-axis.

4. The position adjustment mechanism of the feature mark in the focusing and leveling optical system according to claim 3, characterized in that, The limiting part has a connecting structure for connecting with the driving component to achieve rotation.

5. The position adjustment mechanism for feature marks in the focusing and leveling optical system according to claim 1, characterized in that, The guide rod includes a fixed part and a sliding part; When the guide assembly connects the reference base and the first movable base, the guide rod passes through the other end of the reference base along the Z-axis direction, and the fixed part is fixedly connected to the first movable base. The sliding part can slide within the reference base, and the second spring is located between the reference base and the first movable base.

6. The position adjustment mechanism for the feature mark in the focusing and leveling optical system according to claim 5, characterized in that, When the guide assembly connects the first movable seat and the second movable seat, the guide rod passes through the other side of the first movable seat along the X-axis direction, and the fixing part is fixedly connected to the second movable seat. The sliding part can slide inside the first movable seat, and the second spring is located between the first movable seat and the second movable seat.

7. The position adjustment mechanism for feature marks in the focusing and leveling optical system according to claim 6, characterized in that, The fixing part is threadedly connected to the corresponding first movable seat and second movable seat.

8. The position adjustment mechanism for feature marks in the focusing and leveling optical system according to claim 1, characterized in that, The axial adjusting ring is threadedly connected to the receiving cavity.

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