A three-dimensional hall sensor

Abstract

This invention provides a three-dimensional Hall sensor, comprising: a Hall functional layer parallel to a plane defined by the X and Y axes; a first electrode, a third electrode, a fifth electrode, and a seventh electrode formed at the four corners of the Hall functional layer; a second electrode, a fourth electrode, a sixth electrode, and an eighth electrode formed on the four sides of the Hall functional layer; a ninth electrode formed at the center of the Hall functional layer; and a magnetic flux concentrator located on one side of the Hall functional layer and spaced at a predetermined distance L4 from the Hall functional layer along the Z-axis; wherein the Z-axis, X-axis, and Y-axis form a spatial rectangular coordinate system. Compared with the prior art, this invention can achieve three-dimensional magnetic field detection using only a single nine-electrode horizontal Hall structure + IMC, which has advantages such as small size, high integration, and simple manufacturing process compared to the traditional multi-electrode horizontal Hall + IMC solution.

Description

Technical Field

[0001] This invention relates to the field of magnetic sensor technology, and more particularly to a three-dimensional Hall sensor. Background Technology

[0002] Hall element three-dimensional magnetic field detection solutions offer advantages such as low cost, wide detection range, and high compatibility. To achieve three-dimensional magnetic field detection using a single-axis Hall element, several approaches are typically employed: 1. Directly integrating the single-axis Hall element along three axes in XYZ space to directly detect the three-dimensional magnetic field. 2. Achieving three-dimensional magnetic field detection through a combination of horizontal and vertical Hall elements. 3. Converting the three-dimensional magnetic field into a detectable magnetic field by using a horizontal Hall element and an magnetic flux concentrator (IMC). Among these, the horizontal Hall element + IMC approach is widely used due to its simple manufacturing process and high sensitivity; however, traditional solutions usually require multiple Hall elements, resulting in large size and low integration density.

[0003] Therefore, it is necessary to propose a new technical solution to overcome the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide a three-dimensional Hall sensor that can achieve three-dimensional magnetic field detection using only one horizontal Hall structure + IMC. Compared with the traditional solution of multiple horizontal Hall structures + IMC, it has advantages such as small size, high integration and simple process.

[0005] To achieve the objective of the invention, according to one aspect of the present invention, a three-dimensional Hall sensor is provided, comprising: a Hall functional layer parallel to a plane defined by the X-axis and Y-axis; a first electrode, a third electrode, a fifth electrode, and a seventh electrode formed at the four corners of the Hall functional layer; a second electrode, a fourth electrode, a sixth electrode, and an eighth electrode formed on the four sides of the Hall functional layer, wherein the second electrode is located between the first electrode and the third electrode; the fourth electrode is located between the third electrode and the fifth electrode; the sixth electrode is located between the fifth electrode and the seventh electrode; the eighth electrode is located between the seventh electrode and the first electrode; a ninth electrode formed at the center of the Hall functional layer; and a flux concentrator located on one side of the Hall functional layer and spaced at a predetermined distance L4 from the Hall functional layer along the Z-axis; wherein the Z-axis, X-axis, and Y-axis constitute a spatial rectangular coordinate system.

[0006] Compared with existing technologies, this invention can achieve three-dimensional magnetic field detection using only one horizontal Hall structure + IMC. Compared with the traditional solution of multiple horizontal Hall structures + IMC, it has advantages such as small size, high integration and simple process. Attached Figure Description

[0007] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0008] Figure 1 This is a top view of a three-dimensional Hall sensor according to one embodiment of the present invention;

[0009] Figure 2 This is a side view of a three-dimensional Hall sensor according to one embodiment of the present invention;

[0010] Figure 3 For example, in one embodiment of the present invention Figure 1 and Figure 2 The first top view of the horizontal Hall structure 100 shown is labeled with dimensional parameters;

[0011] Figure 4 For example, in one embodiment of the present invention Figure 1 and Figure 2 A side view of the horizontal Hall structure 100 shown;

[0012] Figure 5 For example, in one embodiment of the present invention Figure 1 and Figure 2 The second top view of the horizontal Hall structure 100 shown is labeled with electrode numbers;

[0013] Figure 6 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows the path of current flow inside the horizontal Hall structure 100 when the three-dimensional Hall sensor is tested using the dark electrode connection method shown in the table above.

[0014] Figure 7 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows a longitudinal cross-sectional view of the magnetic field distribution of a three-dimensional Hall sensor under a given X magnetic field.

[0015] Figure 8 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows the distribution of BZ magnetic induction intensity on the Hall functional layer 110 when a given X magnetic field is applied by the three-dimensional Hall sensor.

[0016] Figure 9 For example, in one embodiment of the present invention Figure 1 and Figure 2The diagram shows a longitudinal cross-sectional view of the magnetic field distribution of a three-dimensional Hall sensor under a given Z magnetic field.

[0017] Figure 10 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows the distribution of BZ magnetic induction intensity on the Hall functional layer 110 when a given Z magnetic field is applied by the three-dimensional Hall sensor.

[0018] Figure 11 For example, in one embodiment of the present invention Figure 1 and Figure 2 The output characteristic curve of the three-dimensional Hall sensor under the XYZ magnetic field is shown. Detailed Implementation

[0019] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] The term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the invention. The phrase "in one embodiment" appearing in different places throughout this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments. Unless otherwise specified, the terms coupling, connection, linking, and interconnection used herein to indicate electrical connection mean direct or indirect connection. For example, A being connected to B includes both a direct electrical connection between A and B and a connection between A and B via electrical components or circuits.

[0021] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "back", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0022] Please refer to Figure 1 As shown, it is a top view of a three-dimensional Hall sensor according to one embodiment of the present invention; please refer to... Figure 2 As shown, it is a side view of a three-dimensional Hall sensor according to one embodiment of the present invention. Figure 1 and Figure 2 The three-dimensional Hall sensor shown includes a horizontal Hall structure 100 and a flux concentrator (IMC) 200. For ease of description, in Figure 1The Cartesian coordinate system is defined in the equation, where the Z-axis, X-axis, and Y-axis form a spatial rectangular coordinate system.

[0023] Please refer to Figure 3 As shown, this is one embodiment of the present invention. Figure 1 and Figure 2 The first top view of the horizontal Hall structure 100 shown is labeled with dimensional parameters; please refer to... Figure 4 As shown, this is one embodiment of the present invention. Figure 1 and Figure 2 The side view of the horizontal Hall structure 100 shown is provided; please refer to... Figure 5 As shown, this is one embodiment of the present invention. Figure 1 and Figure 2 The second top view of the horizontal Hall structure 100 shown is labeled with electrode numbers.

[0024] exist Figures 1-5 In the illustrated embodiment, the horizontal Hall structure 100 includes: a Hall functional layer 110 parallel to a plane defined by the X and Y axes; a first electrode 1, a third electrode 3, a fifth electrode 5, and a seventh electrode 7 formed at the four corners of the Hall functional layer 110; a second electrode 2, a fourth electrode 4, a sixth electrode 6, and an eighth electrode 8 formed on the four sides of the Hall functional layer 110, wherein the second electrode 2 is located between the first electrode 1 and the third electrode 3; the fourth electrode 4 is located between the third electrode 3 and the fifth electrode 5; the sixth electrode 6 is located between the fifth electrode 5 and the seventh electrode 7; the eighth electrode 8 is located between the seventh electrode 7 and the first electrode 1; and a ninth electrode 9 formed at the center of the Hall functional layer 110. A flux concentrator (IMC) 200 is located on one side of the Hall functional layer 110 and spaced at a predetermined distance L4 from the Hall functional layer 110 along the Z-axis.

[0025] exist Figures 1-5 In the specific embodiment shown, the first electrode 1 and the fifth electrode 5 are spaced apart along the X-axis, and the third electrode 3 and the seventh electrode 7 are spaced apart along the Y-axis.

[0026] It should be noted that the X-axis, Y-axis, and Z-axis in this paper can be defined by the user. Here, the plane where the Hall function layer 110 is located is defined as the plane of the X-axis and Y-axis. Within this plane, the X-axis and Y-axis can be interchanged. The Z-axis is the axis perpendicular to the plane where the Hall function layer 110 is located. In other embodiments, each axis can be defined as needed.

[0027] exist Figures 1-5In the illustrated embodiment, the Hall functional layer 110 can be any functional material used to fabricate the Hall element, such as Si, GaAs, InAs, InSb, etc. To ensure sensitivity and offset performance, the overall structure of the effective functional region of the Hall functional layer 110 (or the main structure of the Hall functional layer 110) must be a left-right symmetrical and top-bottom symmetrical shape; the second electrode 2, the fourth electrode 4, the sixth electrode 6, and the eighth electrode 8 are respectively located at the center of the four sides of the Hall functional layer 110. Preferably, the overall structure of the effective functional region of the Hall functional layer 110 (or the main structure of the Hall functional layer 110) is square.

[0028] exist Figures 1-5 In the illustrated embodiment, the materials of the first electrode 1 to the ninth electrode 9 are metal connecting electrodes adapted to the functional material. To ensure sensitivity and offset performance, the shape and size of the first electrode 1 to the ninth electrode 9 must be consistent; the first electrode 1 to the ninth electrode 9 must be evenly distributed at nine orthogonal positions on the Hall functional layer 110; the first electrode 1 to the ninth electrode 9 can be a regular square, polygon, or circle; the distance between opposite sides of the overall structure of the effective functional area of ​​the Hall functional layer 110 (or the main structure of the Hall functional layer 110) is L1, and the size L2 of a single electrode (i.e., the distance between opposite sides or the diameter L2 of a single electrode) should be less than 1 / 5 of the size L1 of the functional layer 110; each of the first electrode 1 to the ninth electrode 9 is located on one side surface of the Hall functional layer 110.

[0029] exist Figure 1 and Figure 2 In the illustrated embodiment, the flux concentrator (IMC) 200 can be any soft magnetic material with magnetic permeability / magnetic focusing function, typically possessing high permeability and low coercivity, such as permalloy, nanocrystals, and ferrites. To ensure sensitivity and offset performance, the flux concentrator (IMC) 200 structure must be a horizontally symmetrical and vertically symmetrical shape (e.g., a regular square, a polygon with a multiple of 4, or a circle), and the center of the flux concentrator (IMC) 200 must be aligned with the center of the Hall functional layer 110 along the Z-axis (i.e., the center of the flux concentrator (IMC) 200 must be directly opposite the center of the Hall functional layer 110). The dimension L3 of the flux concentrator (IMC) 200 (i.e., the distance between opposite sides or the diameter L3 of the flux concentrator 200) is related to the distance L1 between opposite sides of the main structure of the Hall functional layer 110. Specifically, the relationship between L3 and L1 should be... .

[0030] exist Figure 1 and Figure 2In the illustrated embodiment, the flux concentrator (IMC) 200 and the Hall functional layer 110 can be isolated and protected by non-magnetic layers such as passivation layers and adhesive layers. In other words, the three-dimensional Hall sensor provided by this invention also includes a non-magnetic isolation layer (not shown) located between the flux concentrator (IMC) 200 and the Hall functional layer 110. Since the predetermined distance L4 between the flux concentrator (IMC) 200 and the Hall functional layer 110 along the Z-axis and the thickness of the flux concentrator (IMC) 200 affect sensitivity and offset, L4 should be <100 μm (micrometers).

[0031] The following table illustrates one embodiment of the present invention. Figures 1-5 Explanation of one electrode connection method for the shown three-dimensional Hall sensor:

[0032]

[0033] As shown in the table above regarding electrode connections, when the 3D Hall sensor is used to detect the magnetic field along the X-axis, the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode, the connected second electrode 2 and fourth electrode 4 form one differential output electrode in the differential output electrode pair, and the connected sixth electrode 6 and eighth electrode 8 form the other differential output electrode in the differential output electrode pair. When the 3D Hall sensor is used to detect the magnetic field along the Y-axis, the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode, the connected fourth electrode 4 and sixth electrode 6 form one differential output electrode in the differential output electrode pair, and the connected second electrode 2 and eighth electrode 8 form the other differential output electrode in the differential output electrode pair. When the 3D Hall sensor is used to detect the magnetic field along the Z-axis, the first electrode 1 serves as a power supply electrode, the fifth electrode 5 serves as a ground electrode, and the third electrode 3 and the seventh electrode 7 form a differential output electrode pair; or the second electrode 2 serves as a power supply electrode, the sixth electrode 6 serves as a ground electrode, and the fourth electrode 4 and the eighth electrode 8 form a differential output electrode pair.

[0034] In this embodiment, the power supply and ground can be interchanged, and the Z-axis test exhibits rotational symmetry. That is, in another embodiment:

[0035] When a three-dimensional Hall sensor is used to detect the magnetic field along the X-axis, the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as either power supply electrodes or ground electrodes, and the ninth electrode 9 serves as either a ground electrode or a power supply electrode. The connected second electrode 2 and fourth electrode 4 form one of the differential output electrode pairs, and the connected sixth electrode 6 and eighth electrode 8 form the other differential output electrode in the same pair. Specifically, when the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode; conversely, when the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as ground electrodes, the ninth electrode 9 serves as a power supply electrode.

[0036] When a three-dimensional Hall sensor is used to detect the magnetic field along the Y-axis, the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as either power supply electrodes or ground electrodes, and the ninth electrode 9 serves as either a ground electrode or a power supply electrode. The connected fourth electrode 4 and the sixth electrode 6 serve as one of the differential output electrodes in a differential output electrode pair, and the connected second electrode 2 and the eighth electrode 8 serve as the other differential output electrode in the same pair. Specifically, when the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode; conversely, when the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as ground electrodes, the ninth electrode 9 serves as a power supply electrode.

[0037] When a three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, one pair of opposing electrodes among the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serves as the power supply electrode and the ground electrode, and the other pair of opposing electrodes serves as the differential output electrode pair, wherein the first electrode 1 is opposite to the fifth electrode 5, and the third electrode 3 is opposite to the seventh electrode 7; or, one pair of opposing electrodes among the second electrode 2, the fourth electrode 4, the sixth electrode 6, and the eighth electrode 8 serves as the power supply electrode and the ground electrode, and the other pair of opposing electrodes serves as the differential output electrode pair, wherein the second electrode 2 is opposite to the sixth electrode 6, and the fourth electrode 4 is opposite to the eighth electrode 8.

[0038] Furthermore, when detecting the magnetic field of the Z-axis, the magnetic field of the X-axis, and the magnetic field of the Y-axis, if the same electrode among the first electrode 1 to the ninth electrode 9 has multiple different uses, the electrode can be controlled to be used for different purposes in different applications by means of a conditioning switch circuit (i.e., the same electrode can be switched by means of a conditioning switch circuit).

[0039] The following is based on the electrode connection method in the table above and Figures 1-5 This paper details the working process of the three-dimensional Hall sensor provided by the present invention.

[0040] Please refer to Figure 6 As shown, this is one embodiment of the present invention. Figure 1The diagram shown illustrates the current flow path within the horizontal Hall structure 100 when the three-dimensional Hall sensor is tested using the dark electrode connection method indicated in the table above. Figure 6 (a) indicates the path through which the current flows inside the horizontal Hall structure 100 during the XY test; Figure 6 (b) indicates the path through which the internal current of the horizontal Hall structure 100 flows during the Z test.

[0041] When a given magnetic field X is applied, due to the presence of the flux concentrator (IMC) 200, the horizontal magnetic field will be deflected into a vertical magnetic field, such as... Figure 7 As shown; the vertical magnetic field will act on the sensing regions ① and ③ of the Hall functional layer 110 respectively, and the vertical magnetic fields of the two regions are opposite to each other, as shown. Figure 8 As shown. Among them, Figure 7 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows a longitudinal cross-sectional view of the magnetic field distribution of a three-dimensional Hall sensor under a given X magnetic field. Figure 8 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows the BZ magnetic flux density distribution of the three-dimensional Hall sensor acting on the Hall functional layer 110 under a given X magnetic field. Since the currents inside sensing regions ① and ③ are reversed, Hall voltages are generated between electrodes 2 and 8 and electrodes 4 and 6 based on the Hall effect. By differentially shorting electrodes 2-4 and 6-8 respectively, differential Hall voltages can be obtained between electrodes 2-4 and 6-8, thus achieving X-axis magnetic field detection. Furthermore, due to the symmetry of the magnetic flux concentrator (IMC) 200 with respect to magnetic field deflection, the perpendicular magnetic flux density inside sensing regions ② and ④ is equivalent to 0. Therefore, no Hall voltage is generated between electrodes 2 and 4 and electrodes 6 and 8 of the Y-axis Hall sensor, resulting in no Y-axis output. For the Z-axis Hall sensor, sensing is mainly achieved through the equivalent magnetic flux density inside sensing regions ①②③④. Similarly, the perpendicular magnetic flux density inside sensing regions ①②③④ is also equivalent to 0, so no Hall voltage is generated between electrodes 3 and 7 of the Z-axis Hall sensor. This achieves X and YZ isolation.

[0042] Similarly, when a Y magnetic field is given, the situation is the same as that of the X magnetic field, and isolation between Y and XZ can be achieved.

[0043] When a Z magnetic field is given, such as Figure 9 As shown, due to the magnetic focusing effect of the flux concentrator (IMC) 200, induction zones ①②③④ all generate magnetic fields in the same direction and perpendicular to each other, such as... Figure 10 As shown. Among them, Figure 9 For example, in one embodiment of the present invention Figure 1 and Figure 2The diagram shows a longitudinal cross-sectional view of the magnetic field distribution of a three-dimensional Hall sensor under a given Z magnetic field. Figure 10 For example, in one embodiment of the present invention Figure 1 and Figure 2 The diagram shows the BZ magnetic flux density distribution of the three-dimensional Hall sensor acting on the Hall functional layer 110 under a given Z magnetic field. Since the currents inside the X-axis Hall sensing regions ① and ③ are reversed, and the currents inside the Y-axis Hall sensing regions ② and ④ are also reversed, there is no XY output. The Z-axis Hall sensor senses the signal through sensing regions ①②③④, with the internal current flowing from electrode 1 to electrode 5, thus generating a Hall voltage between electrode 3 and electrode 7. This achieves isolation between Z and XY.

[0044] In this way, XYZ isolation can be achieved separately, thus enabling linear output of the XYZ axes under the XYZ magnetic field, such as... Figure 11 As shown, this is one embodiment of the present invention. Figure 1 and Figure 2 The output characteristic curves of the three-dimensional Hall sensor under the XYZ magnetic field are shown. Since the XY axis senses the horizontal magnetic field by deflecting it using an IMC, while the Z axis focuses the vertical magnetic field using an IMC, the amplification factors of the actual magnetic field differ between the XY and Z axes. Therefore, under the same IMC, the sensitivity of the XY axis Hall sensor will be lower than that of the Z axis Hall sensor.

[0045] The following table illustrates one embodiment of the present invention. Figures 1-5 The three-dimensional Hall sensor shown exhibits the output voltage of the XYZ Hall under different combined magnetic field conditions. In this embodiment, the functional material of the Hall functional layer 100 of the three-dimensional Hall sensor is Si.

[0046]

[0047] The data in this chart are simulation results, in G-µV units.

[0048] The following table illustrates one embodiment of the present invention. Figures 1-5 Another electrode connection method for the three-dimensional Hall sensor shown is illustrated below:

[0049]

[0050] As shown in the table above regarding electrode connections, when the three-dimensional Hall sensor is used to detect the magnetic field along the X-axis, the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode, the connected second electrode 2 and fourth electrode 4 form one differential output electrode in the differential output electrode pair, and the connected sixth electrode 6 and eighth electrode 8 form the other differential output electrode in the differential output electrode pair. When the three-dimensional Hall sensor is used to detect the magnetic field along the Y-axis, the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode, the connected fourth electrode 4 and sixth electrode 6 form one differential output electrode in the differential output electrode pair, and the connected second electrode 2 and eighth electrode 8 form the other differential output electrode in the differential output electrode pair. When a three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, the first electrode 1 and the fifth electrode 5 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode, the connected second electrode 2 and the sixth electrode 6 serve as one of the differential output electrodes in the differential output electrode pair, and the connected fourth electrode 4 and the eighth electrode 8 serve as the other differential output electrode in the differential output electrode pair; or the third electrode 3 and the seventh electrode 7 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode, the connected second electrode 2 and the sixth electrode 6 serve as one of the differential output electrodes in the differential output electrode pair, and the connected fourth electrode 4 and the eighth electrode 8 serve as the other differential output electrode in the differential output electrode pair.

[0051] This method uses only the inverse differential voltage of sensing areas ①③ or ②④ to obtain the Z-axis signal when detecting the Z-axis, where the power supply and ground can also be interchanged.

[0052] In other words, when the three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, one pair of opposite electrodes among the first electrode 1, the third electrode 3, the fifth electrode 5, and the seventh electrode 7 serves as a power supply electrode or a ground electrode, and the ninth electrode serves as a ground electrode or a power supply electrode. The connected second electrode 2 and the sixth electrode 6 serve as one of the differential output electrodes in the differential output electrode pair, and the connected fourth electrode 4 and the eighth electrode 8 serve as the other differential output electrode in the differential output electrode pair. Specifically, the first electrode 1 and the fifth electrode 5 are opposite each other, and the third electrode 3 and the seventh electrode 7 are opposite each other. That is, when the three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, when the first electrode 1 and the fifth electrode 5 serve as power supply electrodes, the ninth electrode 9 serves as a ground electrode; when the third electrode 3 and the seventh electrode 7 serve as ground electrodes, the ninth electrode 9 serves as a power supply electrode.

[0053] In summary, the three-dimensional Hall sensor provided by this invention has the following beneficial effects:

[0054] 1) The three-dimensional Hall sensor provided by the present invention has an overall structure of a single-layer Hall functional layer + nine electrodes + IMC.

[0055] 2) The material, structure and size of the Hall functional layer of the three-dimensional Hall sensor provided by the present invention: The Hall functional layer is divided into 4 sensing regions and integrated into a whole, which respectively sense the XYZ magnetic field.

[0056] 3) The material, structure, and dimensions of the nine electrodes of the three-dimensional Hall sensor provided by this invention: the four corner electrodes and the center electrode are mainly used as power grounding ports, and the four side electrodes are used as output ports.

[0057] 4) The material, structure and size of the IMC of the three-dimensional Hall sensor provided by the present invention, and the magnetic flux concentrator provided by the present invention are configured to deflect the magnetic field of the X / Y axis into the magnetic field of the Z axis, and the magnetic flux concentrator is configured to concentrate the magnetic field of the Z axis.

[0058] 5) Electrode connection method and testing method of the three-dimensional Hall sensor provided by this invention: For XY axis testing, the currents in sensing areas ①③ and ②④ need to be opposite to each other, and the output signals of XY are evenly divided into differential signals. For Z axis testing, sensing areas ①②③④ can be used for direct output, or only sensing areas ①③ or ②④ can be used for inverse differential signal output.

[0059] In summary, compared with the traditional three-dimensional magnetic field detection scheme of multiple horizontal Hall effect sensors + IMC, the present invention can achieve three-dimensional magnetic field detection with a single planar integrated nine-electrode horizontal Hall effect sensor + IMC. The manufacturing process is simple, with nine electrodes fabricated on a Hall effect functional layer and then combined with an IMC layer. The size can be made very small and the integration is very high.

[0060] In this invention, terms such as “connection,” “linked,” “connected,” and “joined” that indicate electrical connection, unless otherwise specified, indicate direct or indirect electrical connection.

[0061] The above description is only a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. Any equivalent modifications or changes made by those skilled in the art based on the disclosure of the present invention should be included within the scope of protection set forth in the claims.

Claims

1. A three-dimensional Hall sensor, characterized in that, It includes: A Hall effect layer parallel to the plane defined by the X and Y axes; The first electrode, the third electrode, the fifth electrode, and the seventh electrode are respectively formed at the four corners of the Hall functional layer; A second electrode, a fourth electrode, a sixth electrode, and an eighth electrode are respectively formed on the four sides of the Hall functional layer. The second electrode is located between the first electrode and the third electrode; the fourth electrode is located between the third electrode and the fifth electrode; the sixth electrode is located between the fifth electrode and the seventh electrode; and the eighth electrode is located between the seventh electrode and the first electrode. The ninth electrode is formed at the center of the Hall functional layer; A flux concentrator is located on one side of the Hall functional layer and is spaced from the Hall functional layer by a predetermined distance L4 along the Z-axis; The Z-axis, X-axis, and Y-axis form a spatial rectangular coordinate system.

2. The three-dimensional Hall sensor according to claim 1, characterized in that, The first electrode and the fifth electrode are spaced apart along the X-axis; The third and seventh electrodes are spaced apart along the Y-axis.

3. The three-dimensional Hall sensor according to claim 1, characterized in that, When a three-dimensional Hall sensor is used to detect the magnetic field along the X-axis, the first, third, fifth, and seventh electrodes serve as power supply electrodes or ground electrodes, the ninth electrode serves as a ground electrode or power supply electrode, the connected second and fourth electrodes serve as one of the differential output electrodes in a differential output electrode pair, and the connected sixth and eighth electrodes serve as the other differential output electrode in a differential output electrode pair. When a three-dimensional Hall sensor is used to detect the magnetic field along the Y-axis, the first, third, fifth, and seventh electrodes serve as power supply electrodes or ground electrodes, the ninth electrode serves as a ground electrode or power supply electrode, the connected fourth and sixth electrodes serve as one of the differential output electrodes in a differential output electrode pair, and the connected second and eighth electrodes serve as the other differential output electrode in a differential output electrode pair. When a three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, one pair of opposing electrodes among the first, third, fifth, and seventh electrodes serves as a power supply electrode and a ground electrode, and the other pair of opposing electrodes serves as a differential output electrode pair, wherein the first electrode is opposite to the fifth electrode, and the third electrode is opposite to the seventh electrode; or, when a three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, one pair of opposing electrodes among the second, fourth, sixth, and eighth electrodes serves as a power supply electrode and a ground electrode, and the other pair of opposing electrodes serves as a differential output electrode pair, wherein the second electrode is opposite to the sixth electrode, and the fourth electrode is opposite to the eighth electrode; or, when a three-dimensional Hall sensor is used to detect the magnetic field along the Z-axis, one pair of opposing electrodes among the first, third, fifth, and seventh electrodes serves as a power supply electrode or a ground electrode, the ninth electrode serves as a ground electrode or a power supply electrode, the connected second and sixth electrodes serve as one differential output electrode in the differential output electrode pair, and the connected fourth and eighth electrodes serve as the other differential output electrode in the differential output electrode pair, wherein the first electrode is opposite to the fifth electrode, and the third electrode is opposite to the seventh electrode.

4. The three-dimensional Hall sensor according to claim 3, characterized in that, When detecting the magnetic field along the Z-axis, X-axis, and Y-axis, if the same electrode among the first to ninth electrodes has different uses, the electrode can be controlled to be used for different purposes in different applications by means of a conditioning switch circuit.

5. The three-dimensional Hall sensor according to claim 1, characterized in that, It also includes a non-magnetic isolation layer located between the Hall functional layer and the flux concentrator. The L4 is less than 100 micrometers; The main structure of the Hall effect layer is square.

6. The three-dimensional Hall sensor according to claim 1, characterized in that, The magnetic flux concentrator has a left-right symmetrical shape and a top-bottom symmetrical shape. The flux concentrator is a soft magnetic material with magnetic conduction / concentration functions. The center of the flux concentrator is aligned with the center of the Hall functional layer along the Z-axis.

7. The three-dimensional Hall sensor according to claim 6, characterized in that, The flux concentrator is square, a polygon with a multiple of 4, or circular; The distance or diameter of the opposite side of the flux concentrator is L3, and L3 is related to the distance L1 of the opposite side of the main structure of the Hall functional layer.

8. The three-dimensional Hall sensor according to claim 7, characterized in that, The relationship between L3 and L1 is as follows: 。 9. The three-dimensional Hall sensor according to claim 1, characterized in that, The Hall functional layer is a functional material used to prepare Hall elements; The main structure of the Hall functional layer is a left-right symmetrical figure and a top-bottom symmetrical figure; The second electrode, the fourth electrode, the sixth electrode, and the eighth electrode are located at the center of the four sides of the Hall functional layer, respectively.

10. The three-dimensional Hall sensor according to claim 9, characterized in that, The distance between opposite sides of the main structure of the Hall functional layer is L1; The first to ninth electrodes have the same shape and size; The distance or diameter between opposite sides of a single electrode in the first to ninth electrodes is L2, where L2 is less than 1 / 5 of L1.

11. The three-dimensional Hall sensor according to claim 9, characterized in that, The first to ninth electrodes need to be evenly distributed at nine orthogonal positions in the Hall functional layer; The first to ninth electrodes are square, polygonal, or circular. Each of the first to ninth electrodes is located on one side surface of the Hall functional layer.

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