A measurement system and method for phase distribution-based inversion of thin film material cross-scale thermal diffusivity

Abstract

The application discloses a kind of measurement system and method based on phase distribution inversion thin film material cross-scale thermal diffusivity, through unified time base and unified reference phase condition, the cooperative acquisition of macroscopic full-field lock-in observation and microscale scanning observation is realized, and the joint inversion framework of phase distribution matching and scale consistency is established, form the measurement process that can be checked, can be closed loop, to realize the thermal diffusivity of thin film material from micron to millimeter scale range in the same experimental system, efficient, stable characterization, improve cross-scale data consistency and inversion reliability, reduce the error and cost caused by repeated measurement, and enhance the adaptability to interface effect and non-uniform structure influence.For and improve the existing method, it is difficult to consider full-field positioning and microscale effect identification in the same measurement framework, the cross-scale data is not comparable due to the non-uniformity of phase reference, and the inversion stability is insufficient.

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