A quick-type electrode transmission electron microscope sample rod head

Abstract

The application relates to a quick electrode transmission electron microscope sample rod head, which comprises a rod head main body connected with a sample rod body, a chip carrier arranged at the front end of the rod head main body, and a printed circuit board. The chip carrier comprises a carrier fixed part, a carrier movable part and an adjusting bolt. A chip capable of carrying a sample to be measured is arranged on the carrier movable part. The adjusting bolt is arranged to pass through the carrier movable part in a direction parallel to the upper surface and is threadedly fixed with the carrier fixed part. The printed circuit board comprises a circuit board main body and a gold finger on the circuit board main body. The gold finger is suspended above the chip carrier and is configured to be connected with a contact electrode on the chip. Compared with the prior art, the application can realize accurate adjustment of the vertical height of the chip, optimize the electrode contact performance, reduce the contact resistance, improve the stability and accuracy of the electrical performance test and the like.

Description

Technical Field

[0001] This invention belongs to the field of electron microscope sample holder technology, and relates to a quick-access electrode transmission electron microscope sample holder tip. Background Technology

[0002] Transmission electron microscopy (TEM), with its superior high-resolution imaging capabilities, plays an indispensable role in many key fields such as materials science, nanotechnology, biology, and medicine. In recent years, with the deepening of research into the electrical properties of materials, the demand for TEM in in-situ testing of electrical properties has shown a significant upward trend. However, traditional TEM sample holders have revealed numerous technical bottlenecks in in-situ electrical property testing. These problems not only severely restrict testing efficiency but also significantly reduce data accuracy, thus greatly limiting the further expansion and application of TEM technology in related fields.

[0003] Traditional TEM sample holders face several pressing issues in in-situ electrical performance testing, requiring solutions to the following problems: (1) The operation process is complex. When conducting electrical performance tests, the traditional sample rod assembly and adjustment process is extremely cumbersome and time-consuming. Operators need to fix the sample on the sample rod with extremely high precision and ensure that the electrode and the external circuit can achieve a stable and reliable connection. This process requires a high level of professional skills, and multiple adjustments are often required in the sample fixing and electrode connection stages. During the operation, poor electrode contact or short circuit can easily occur, which will affect the accuracy of the test results and may even cause the entire test process to fail in severe cases.

[0004] (2) Poor electrical contact stability: During the test, the electrical contact points of the sample rod are easily affected by various external factors, such as vibration and temperature changes, which can lead to electrical contact drift. This electrical contact drift directly and adversely affects the accuracy and repeatability of the test data, making the experimental results difficult to reproduce and greatly reducing the reliability of the test data. In addition, the traditional sample rod has obvious structural design defects and generally lacks sufficient fault tolerance. Once the electrical contact has a problem, it is difficult to restore the normal test state through simple adjustments. For example, during long-term testing, temperature changes may cause the electrode material to expand or contract, thereby changing the stability of the electrical contact, causing deviations in the test data, and seriously affecting the reliability of the test results.

[0005] (3) Samples are susceptible to external interference. Traditional TEM sample holders have significant design deficiencies and lack effective protection measures for the samples. During testing, samples are highly susceptible to various factors such as external vibration and electromagnetic interference, leading to unstable test results or even errors. When conducting high-precision electrical performance tests, external vibration may cause minute displacements of the sample, resulting in fluctuations in the electrical signal. In addition, electromagnetic interference may also interfere with the transmission and measurement of electrical signals, causing deviations in the test data. These problems not only increase the uncertainty of the experiment and the frequency of repeated experiments but also significantly increase the experimental cost, seriously affecting the smooth progress of the research. Summary of the Invention

[0006] The purpose of this invention is to provide a quick-access electrode transmission electron microscope sample rod tip to achieve precise adjustment of the chip's vertical height, optimize electrode contact performance, reduce contact resistance, and improve the stability and accuracy of electrical performance testing.

[0007] The objective of this invention can be achieved through the following technical solutions: A quick-access electrode transmission electron microscope sample rod tip, comprising: The rod head body is connected to the sample rod body; The chip stage disposed at the front end of the rod head body includes a stage fixing part, a stage movable part, and an adjusting bolt. The stage fixing part is fixed to the rod head body. The stage movable part slides in contact with the stage fixing part, and the sliding contact interface between the stage movable part and the stage fixing part is sloped, so that the height position of the stage movable part is adjustable in the direction perpendicular to the upper surface. A chip capable of carrying the sample to be tested is disposed on the stage movable part. The adjusting bolt is configured to pass through the stage movable part in the direction parallel to the upper surface and is threadedly fixed to the stage fixing part. And a printed circuit board, including a circuit board body and gold fingers located on the circuit board body, the gold fingers being suspended above the chip stage and configured to be connected to contact electrodes on the chip.

[0008] Furthermore, the platform fixing part is provided with guide bosses on both sides of the sliding contact interface. The two guide bosses cooperate to guide and constrain the platform movable part to move back and forth only along the direction of the sliding contact interface.

[0009] Furthermore, the cross-section of the guide boss is inverted L-shaped.

[0010] Furthermore, the printed circuit board is disposed on the guide boss.

[0011] More preferably, the gold fingers are inverted L-shaped and multiple of them are arranged side by side.

[0012] Furthermore, the printed circuit board is fixed to the guide boss by bolts.

[0013] Furthermore, the fixed part of the platform is provided with a threaded track that can be threadedly engaged with the adjusting bolt, and the movable part of the platform is provided with a large through hole that runs through the front and back. During operation, one end of the adjusting bolt passes through the large through hole and is threadedly fixed to the threaded track, while the other end abuts against the movable part of the platform, so that the movable part of the platform slides along the sliding contact interface until the chip is fixed.

[0014] Furthermore, the end of the movable part of the stage that is away from the threaded track protrudes upward and forms a groove that can hold and clamp the sample to be tested.

[0015] Furthermore, the diameter of the large through hole is larger than that of the adjusting bolt.

[0016] More preferably, the difference between the inner diameter of the large through hole and the outer diameter of the adjusting bolt is 0.3~0.5mm. In addition, the adjusting bolt can move freely within the large through hole, and can be adjusted 0-0.4mm vertically and 0-3mm horizontally.

[0017] Compared with the prior art, the present invention has the following advantages: (1) The integrated solution of fast positioning, self-calibration and high-stability electrical connection significantly simplifies the operation process, reduces the difficulty of operation and improves the testing efficiency.

[0018] (2) The unique sloping bolt fixing structure can precisely adjust the vertical height of the chip, optimize the electrode contact performance, reduce the contact resistance, and significantly improve the stability and accuracy of electrical performance testing.

[0019] (3) The mechanical locking structure design of bolts effectively reduces the impact of external vibration and electromagnetic interference on the sample, ensuring the stability and reliability of the test results.

[0020] (4) The highly integrated design enables the sample rod head to be compatible with a variety of TEM devices, and has broad application prospects. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the sample rod head of the present invention; Figure 2 This is a schematic diagram of the chip stage structure; Figure 3 This is a top view of the sample rod head; Figure 4 for Figure 3 CC section view diagram; Figure 5This is a schematic diagram of the sample rod head when it is not clamped. Figure 6 This is a schematic diagram of the sample rod head when it is clamped. Figure 7 This is a top view of the sample rod head when it is clamped. Figure 8 for Figure 7 AA section view in the middle; Explanation of markings in the diagram: 1-Pole head body, 2-Stage fixing part, 3-Stage movable part, 4-Printed circuit board, 5-Gold finger, 6-Guide boss, 7-Threaded rail, 8-Large through hole, 9-Groove, 10-Sliding contact interface, 11-Electron beam observation area, 12-Adjusting bolt, 13-Chip. Detailed Implementation

[0022] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. These embodiments are implemented based on the technical solution of the present invention, providing detailed implementation methods and specific operating procedures. However, the scope of protection of the present invention is not limited to the following embodiments.

[0023] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] Unless otherwise specified, the functional components or structures in the following embodiments or examples are conventional components or structures used in the art to achieve the corresponding functions.

[0026] To improve the stability and accuracy of electrical performance testing, this invention provides a quick-access electrode transmission electron microscope sample rod tip. Please refer to [link to relevant documentation]. Figures 1 to 8 As shown, including: Rod head body 1, which is connected to the sample rod body; The chip carrier set at the front end of the rod head body 1 includes a carrier fixing part 2, a carrier movable part 3, and an adjusting bolt 12. The carrier fixing part 2 is fixed on the rod head body 1. The carrier movable part 3 is in sliding contact with the carrier fixing part 2, and the sliding contact interface 10 between the carrier movable part 3 and the carrier fixing part 2 is sloped, so that the height position of the carrier movable part 3 is adjustable in the direction perpendicular to the upper surface. A chip 13 capable of carrying the sample to be tested is set on the carrier movable part 3. The adjusting bolt 12 is configured to pass through the carrier movable part 3 in the direction parallel to the upper surface and is threadedly fixed to the carrier fixing part 2. And a printed circuit board 4, which includes a circuit board body and gold fingers 5 located on the circuit board body, the gold fingers 5 being suspended above the chip stage and configured to be connected to contact electrodes on the chip.

[0027] The core component of the sample rod head in this invention is a chip stage. During operation, due to the sliding contact between the movable part 3 and the fixed part 2 of the stage, and under the constraint of structures such as the adjusting bolt 12, the vertical height of the movable part 3 is adjustable, thereby achieving precise control of the chip position on its upper surface. Combined with the elasticity of the gold fingers 5 suspended on the printed circuit board 4, the adjustment of the adjusting bolt 12 can accommodate chip samples of different sizes, precisely adjusting the contact between the chip and the contact electrodes, reducing unnecessary resistance, and increasing the reliability of the experiment. Figure 7 As shown, when the movable part 3 of the stage and the fixed part 2 of the stage are clamped together, an electron beam observation area 11 that runs vertically through the center of the two is formed.

[0028] In some specific embodiments, the platform fixing part 2 is provided with guide protrusions 6 on both sides of the sliding contact interface 10. The two guide protrusions 6 cooperate to guide and constrain the platform movable part 3 to move back and forth only along the direction of the sliding contact interface 10.

[0029] In a more specific embodiment, the cross-section of the guide boss 6 is inverted L-shaped. In this way, since the edge of the guide boss 6 extends beyond the movable part 3 of the platform, it can play a limiting role in the vertical direction.

[0030] In a more specific embodiment, the printed circuit board 4 is disposed on the guide boss 6.

[0031] In a further preferred embodiment, the gold fingers 5 are inverted L-shaped and multiple of them are arranged side by side.

[0032] In a more specific embodiment, the printed circuit board 4 is fixed to the guide boss 6 by bolts.

[0033] In some specific embodiments, the platform fixing part 2 is provided with a threaded track 7 that can be threadedly engaged with the adjusting bolt 12, and the platform movable part 3 is provided with a large through hole 8 that runs through the front and back. During operation, one end of the adjusting bolt 12 passes through the large through hole 8 and is threadedly fixed to the threaded track 7, while the other end abuts against the platform movable part 3, so that the platform movable part 3 slides along the sliding contact interface 10 until the chip is fixed.

[0034] In a more specific embodiment, the end of the movable part 3 of the stage that is away from the threaded track 7 also protrudes upward and forms a groove 9 that can abut against and clamp the sample to be tested.

[0035] In a more specific embodiment, the diameter of the large through hole 8 is larger than that of the adjusting bolt 12. In this way, for test samples of different sizes, the slope has a height difference by utilizing the gap between the large through hole 8 and the adjusting bolt 12. The movable part of the platform can be adjusted by sliding on the slope through the bolt adjustment, thereby realizing the adjustment of the vertical height of the movable part 3 of the platform.

[0036] In a more preferred embodiment, the difference between the inner diameter of the large through hole 8 and the outer diameter of the adjusting bolt 12 is 0.3~0.5mm. Furthermore, the adjusting bolt 12 can move freely within the large through hole 8, adjustable vertically by 0-0.4mm and horizontally by 0-3mm.

[0037] Each of the above implementation methods can be implemented individually, or in any combination of two or more.

[0038] The above implementation methods will be described in more detail below with reference to specific embodiments.

[0039] Example 1: To improve the stability and accuracy of electrical performance testing, this embodiment provides a quick-access electrode transmission electron microscope sample rod tip, comprising: Rod head body 1, which is connected to the sample rod body; The chip carrier set at the front end of the rod head body 1 includes a carrier fixing part 2, a carrier movable part 3, and an adjusting bolt 12. The carrier fixing part 2 is fixed on the rod head body 1. The carrier movable part 3 is in sliding contact with the carrier fixing part 2, and the sliding contact interface 10 between the carrier movable part 3 and the carrier fixing part 2 is sloped, so that the height position of the carrier movable part 3 is adjustable in the direction perpendicular to the upper surface. A chip 13 capable of carrying the sample to be tested is set on the carrier movable part 3. The adjusting bolt 12 is configured to pass through the carrier movable part 3 in the direction parallel to the upper surface and is threadedly fixed to the carrier fixing part 2. And a printed circuit board 4, which includes a circuit board body and gold fingers 5 located on the circuit board body, the gold fingers 5 being suspended above the chip stage and configured to be connected to contact electrodes on the chip.

[0040] Please see again. Figure 1 As shown, the platform fixing part 2 is provided with guide protrusions 6 on both sides of the sliding contact interface 10. The two guide protrusions 6 cooperate to guide and constrain the movable part 3 of the platform, allowing it to move back and forth only along the direction of the sliding contact interface 10. The cross-section of the guide protrusion 6 is inverted L-shaped, so that since the edge of the guide protrusion 6 extends beyond the movable part 3 of the platform, it can play a limiting role in the vertical direction. The printed circuit board 4 is disposed on the guide protrusion 6. The gold fingers 5 are inverted L-shaped and multiple are arranged side by side. The printed circuit board 4 is fixed to the guide protrusion 6 by bolts.

[0041] Please see again. Figure 1 and Figure 3 As shown, the stage fixing part 2 is provided with a threaded track 7 that can be threadedly engaged with the adjusting bolt 12. The stage movable part 3 is provided with a large through hole 8 that extends from front to back. During operation, one end of the adjusting bolt 12 passes through the large through hole 8 and is threadedly fixed to the threaded track 7, while the other end abuts against the stage movable part 3, causing the stage movable part 3 to slide along the sliding contact interface 10 until the chip is fixed. The end of the stage movable part 3 away from the threaded track 7 also protrudes upward and forms a groove 9 that can abut against and clamp the sample to be tested. The diameter of the large through hole 8 is larger than that of the adjusting bolt 12. Thus, for samples of different sizes, the slope has a height difference due to the gap between the large through hole 8 and the adjusting bolt 12. By adjusting the movable part of the bolt to slide on the slope, the vertical height of the stage movable part 3 can be adjusted. The difference between the inner diameter of the large through hole 8 and the outer diameter of the adjusting bolt 12 is 0.4 mm. Within the large through hole 8, the adjusting bolt 12 can move freely, adjustable from 0-0.4mm vertically and from 0-3mm horizontally.

[0042] The core component of the sample rod head of this invention is the chip stage. During operation, due to the sliding contact between the movable part 3 and the fixed part 2 of the stage, the movable part 3 will slide on the fixed part 2 of the stage as the adjusting bolt 12 is screwed in. When the groove 9 is engaged with the edge of the sample to be tested or the gold finger 5 is in contact with the contact electrode on the chip to a suitable degree, the fixed relationship between the adjusting bolt 12 and the threaded track 7 can achieve precise adjustment of the longitudinal height of the chip. The gold finger 5 has a downward part and achieves electrode contact through its own elasticity, which can also make the chip fit the sample stage better, thereby optimizing the electrode contact performance, reducing contact resistance, and improving the accuracy and reliability of electrical performance testing.

[0043] The above description of the embodiments is provided to enable those skilled in the art to understand and use the invention. It will be apparent to those skilled in the art that various modifications can be made to these embodiments, and the general principles described herein can be applied to other embodiments without inventive effort. Therefore, the present invention is not limited to the above embodiments, and any improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the invention should be within the protection scope of the present invention.

Claims

1. A quick-access electrode transmission electron microscope sample rod tip, characterized in that, include: The rod head body is connected to the sample rod body; The chip stage disposed at the front end of the rod head body includes a stage fixing part, a stage movable part, and an adjusting bolt. The stage fixing part is fixed to the rod head body. The stage movable part slides in contact with the stage fixing part, and the sliding contact interface between the stage movable part and the stage fixing part is sloped, so that the height position of the stage movable part is adjustable in the direction perpendicular to the upper surface. A chip capable of carrying the sample to be tested is disposed on the stage movable part. The adjusting bolt is configured to pass through the stage movable part in the direction parallel to the upper surface and is threadedly fixed to the stage fixing part. And a printed circuit board, including a circuit board body and gold fingers located on the circuit board body, the gold fingers being suspended above the chip stage and configured to be connected to contact electrodes on the chip.

2. The sample rod tip for a quick-access transmission electron microscope according to claim 1, characterized in that, The platform fixing part is provided with guide bosses on both sides of the sliding contact interface. The two guide bosses cooperate to guide and constrain the platform movable part to move back and forth only along the direction of the sliding contact interface.

3. The sample rod tip for a quick-access transmission electron microscope according to claim 2, characterized in that, The cross-section of the guide boss is inverted L-shaped.

4. The sample rod tip for a quick-access transmission electron microscope according to claim 2, characterized in that, The printed circuit board is mounted on the guide boss.

5. The sample rod tip for a quick-access transmission electron microscope according to claim 4, characterized in that, The gold fingers are inverted L-shaped and multiple of them are arranged side by side.

6. The sample rod tip for a quick-access transmission electron microscope according to claim 2, characterized in that, The printed circuit board is fixed to the guide boss by bolts.

7. The sample rod tip for a quick-access transmission electron microscope according to claim 1, characterized in that, The fixed part of the platform is provided with a threaded track that can be threadedly engaged with the adjusting bolt. The movable part of the platform is provided with a large through hole that runs through the front and back. During operation, one end of the adjusting bolt passes through the large through hole and is threadedly fixed to the threaded track, while the other end abuts against the movable part of the platform, so that the movable part of the platform slides along the sliding contact interface until the chip is fixed.

8. The sample rod tip for a quick-access transmission electron microscope according to claim 7, characterized in that, The movable part of the stage, away from the threaded track, also protrudes upward and forms a groove that can hold and clamp the sample to be tested.

9. A quick-access electrode transmission electron microscope sample rod tip according to claim 7, characterized in that, The diameter of the large through hole is larger than that of the adjusting bolt.

10. A quick-access electrode transmission electron microscope sample rod tip according to claim 9, characterized in that, The difference between the inner diameter of the large through hole and the outer diameter of the adjusting bolt is 0.3~0.5 mm.

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