Machine tool and machining method using the machine tool

Abstract

Provided is a machine tool and a machining method using the machine tool, capable of performing dressing and reducing labor when performing dressing. The machine tool of the present disclosure includes: a first table having a first placement surface; a second table having a second placement surface opposite the first placement surface; a workpiece fixing portion provided on the first placement surface for fixing a workpiece; a workpiece machining device provided on the second placement surface, having a tool, and machining the workpiece; a first measuring device provided on the first placement surface for measuring the shape of the tool; a dressing device provided on the first placement surface for adjusting the shape of the tool; and a moving device moving at least one of the first table and the second table. The first table and the second table are capable of relative movement in a plane direction parallel to the first placement surface and a vertical direction perpendicular to the first placement surface by the moving device.

Description

Technical Field

[0001] This disclosure relates to machine tools and machining methods using machine tools. Background Technology

[0002] As a type of machine tool, machine tools are known to perform cutting, grinding, and other processing on workpieces such as semiconductor wafers. Such machine tools require high-precision machining. Therefore, if the shape of the tool used for cutting or other processing is damaged, this requirement cannot be met. Based on this situation, the machine tool in Patent Document 1 described below is equipped with a dressing device for adjusting the shape of the tool. Hereinafter, the adjustment of the tool's shape will be referred to as dressing.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2018-47518

[0004] However, in the machine tool described in Patent Document 1, when tool dressing is being performed, the dressing device, which is located in a different place from the machine tool, is moved to the worktable where the workpiece is being processed. Then, the dressing device is fixed to the worktable for dressing. Once dressing is complete, the fixing is released, and the dressing device is removed from the worktable. This requires the disassembly and reassembly of the dressing device, necessitating a significant amount of labor. Summary of the Invention

[0005] This disclosure was made in view of the following problems, with the aim of providing machine tools capable of being repaired and reducing the labor required for repair, and processing methods using the machine tools.

[0006] The machine tool disclosed herein includes: a first worktable having a first mounting surface; a second worktable having a second mounting surface facing the first mounting surface; a workpiece fixing part disposed on the first mounting surface for fixing a workpiece; a workpiece processing device disposed on the second mounting surface, having a tool and processing the workpiece; a first measuring device disposed on the first mounting surface for measuring the shape of the tool; a dressing device disposed on the first mounting surface for adjusting the shape of the tool; and a moving device for moving at least one of the first worktable and the second worktable. The moving device enables the first worktable and the second worktable to move relative to each other in a planar direction parallel to the first mounting surface and in a vertical direction perpendicular to the first mounting surface.

[0007] Furthermore, in one aspect of the machining method using a machine tool disclosed herein, the machine tool includes: a first worktable having a first mounting surface; a second worktable having a second mounting surface facing the first mounting surface; a workpiece fixing part disposed on the first mounting surface for fixing a workpiece; a workpiece machining device disposed on the second mounting surface, having a tool, and machining the workpiece; a first measuring device disposed on the first mounting surface for measuring the shape of the tool; a dressing device disposed on the first mounting surface for adjusting the shape of the tool; and a moving device for moving at least one of the first worktable and the second worktable. The moving device enables the first worktable and the second worktable to move relative to each other in a planar direction parallel to the first mounting surface and in a vertical direction perpendicular to the first mounting surface. The machining method includes: a tool inspection step, in which the tool is inspected; and a workpiece machining step, in which the workpiece is machined. The tool inspection process includes: a tool measurement process, in which the shape of the tool is measured using the first measuring device and tool shape data is acquired; a tool confirmation process, in which the tool shape data is used to confirm that the tool has reached the specified shape; a trimming process, in which, if the tool is determined not to have the specified shape in the tool confirmation process, the tool is trimmed using the trimming device; a tool re-measurement process, in which the shape of the trimmed tool is measured again using the first measuring device and tool shape re-measurement data is acquired; and a tool re-confirmation process, in which the tool shape re-measurement data is used to confirm that the tool has reached the specified shape. When the tool is determined to have reached the specified shape in both the tool confirmation process and the tool re-confirmation process, the workpiece processing process begins.

[0008] The machine tool disclosed herein is capable of being dressed. Furthermore, the dressing device is installed on the first worktable. Therefore, there is no need to disassemble or assemble the dressing device, reducing labor during dressing. Attached Figure Description

[0009] Figure 1 This is a schematic diagram showing the overall structure of the machine tool involved in Embodiment 1.

[0010] Figure 2 This is a schematic diagram showing the state of the imaging tool of the first measuring device in Embodiment 1.

[0011] Figure 3 This is a schematic diagram of the state being adjusted in Implementation Method 1.

[0012] Figure 4This is a schematic diagram of the state of the workpiece being processed in Implementation Method 1.

[0013] Figure 5 This is a schematic diagram of the state in which the shape of the workpiece is measured by the second measuring device in Embodiment 1.

[0014] Figure 6 This is a schematic diagram showing the state in which the shape of the grinding wheel is modified in Embodiment 1.

[0015] Figure 7 This is a flowchart illustrating that the processing method of Embodiment 1 includes a tool inspection step.

[0016] Figure 8 This is a flowchart showing that the processing method in Implementation Method 1 includes a number of times confirmation process and a grinding wheel inspection process.

[0017] Figure 9 This is a flowchart illustrating that the processing method in Embodiment 1 includes a workpiece processing step and a workpiece inspection step.

[0018] Figure 10 This is a schematic diagram showing the overall structure of the machine tool involved in Embodiment 2.

[0019] Figure 11 This is a flowchart of the processing method in Implementation Method 2.

[0020] Figure 12 This is a schematic diagram showing the overall structure of the machine tool involved in Embodiment 3.

[0021] Explanation of reference numerals in the attached figures

[0022] 1, 1A, 1B... Machine tool; 10... First worktable; 10a... First setting surface; 11... Workpiece fixing part; 12... First measuring device; 13... Dressing device; 14... Grinding wheel; 15... Drive device; 15a... Rotary axis; 16... Workpiece; 20... Second worktable; 20a... Second setting surface; 20c... Moving device; 21... Workpiece processing device; 22... Main body; 23... Tool; 24... Second measuring device; 25... Correction part; 30... Control unit; 50... AE sensor. Detailed Implementation

[0023] The present disclosure will now be described in detail with reference to the accompanying drawings. However, this disclosure is not limited to the forms used to implement the invention described below (hereinafter referred to as embodiments). Furthermore, the structural elements of the embodiments described below include elements readily conceived by those skilled in the art, substantially identical elements, and elements of so-called equivalent scope. Moreover, the structural elements disclosed in the embodiments described below can be appropriately combined.

[0024] (First Embodiment)

[0025] Figure 1 This is a schematic diagram showing the overall structure of the machine tool involved in Embodiment 1. For example... Figure 1 As shown, the machine tool 1 of Embodiment 1 includes a first worktable 10, a second worktable 20, a moving device 20c, a workpiece fixing part 11, a first measuring device 12, a dressing device 13, a workpiece processing device 21, a second measuring device 24, a correction part 25, and a control part 30.

[0026] like Figure 1 As shown, the first worktable 10 and the second worktable 20 are each composed of a plate-shaped component. In this embodiment, the first worktable 10 and the second worktable 20 are arranged horizontally relative to each other. One surface of the first worktable 10 faces upward (X1) and serves as a first mounting surface 10a for placing the workpiece 16. Furthermore, the other surface 10b of the first worktable 10 faces downward (X2) and is supported by a fixed platform 10c. Therefore, the first worktable 10 cannot be moved.

[0027] A second worktable 20 is disposed above the first worktable 10 by X1. One surface of the second worktable 20 is designated as a second mounting surface 20a. The second mounting surface 20a faces downwards by X2 and is opposite to the first mounting surface 10a. The other surface 20b of the second worktable 20 is supported by a moving device 20c. The moving device 20c receives control signals from the control unit 30, causing the second worktable 20 to move in both vertical and horizontal directions. Furthermore, when the second worktable 20 moves, the relative position between the first worktable 10 and the second worktable 20 changes.

[0028] In this embodiment, the moving device 20c is disposed on the second worktable 20, but in this disclosure, the moving device 20c may also be disposed on the first worktable 10. In other words, the moving device 20c may be disposed on at least one of the first worktable 10 and the second worktable 20. Furthermore, in this disclosure, the moving device 20c may be disposed on both the first worktable 10 and the second worktable 20. Moreover, when the moving device 20c is disposed on both the first worktable 10 and the second worktable 20, both the first worktable 10 and the second worktable 20 may be able to move in both the vertical and horizontal directions. Alternatively, the first worktable 10 may only be able to move in the horizontal direction, and the second worktable 20 may only be able to move in the vertical direction.

[0029] Furthermore, in this embodiment, the direction parallel to the first mounting surface 10a (the second mounting surface 20a) (planar direction) is arranged horizontally, and the direction perpendicular to the first mounting surface 10a (the second mounting surface 20a) (vertical direction) is arranged vertically (up-down direction). However, this disclosure is not limited to such a configuration. For example, the direction perpendicular to the first mounting surface 10a (the second mounting surface 20a) (vertical direction) may also be horizontal, and there is no particular limitation on the orientation of the first mounting surface 10a (the second mounting surface 20a).

[0030] Next, the structures provided on the first setting surface 10a and the second setting surface 20a will be described, but the structure provided on the first setting surface 10a will be described first, and the structure provided on the second setting surface 20a will be described later.

[0031] A workpiece fixing part 11, a first measuring device 12, and a trimming device 13 are provided on the first setting surface 10a.

[0032] The workpiece fixing part 11 is used to fix the workpiece 16, which is the object to be processed. In this embodiment, the workpiece fixing part 11 is a vise that clamps the workpiece 16 in the horizontal direction. In addition, as long as the workpiece fixing part 11 can fix the workpiece 16, the device disclosed in this disclosure may be other than a vise.

[0033] The first measuring device 12 is a device for measuring the shape of the tool 23 of the workpiece processing device 21. In this embodiment, the first measuring device 12 is an imaging device that measures the shape of the object being measured by taking a picture. In other words, the first measuring device 12 measures the shape of the tool 23 without contacting the object being measured.

[0034] Figure 2 This is a schematic diagram showing the state of the imaging tool in the first measuring device in Embodiment 1. (As shown) Figure 2As shown, when the first measuring device 12 captures the tool 23, the second worktable 20 is moved so that the tool 23 is positioned within range that can be captured by the first measuring device 12. Furthermore, if the first measuring device 12 receives a control signal from the control unit 30, it captures the tool 23. Thus, the first measuring device 12 acquires image data (tool shape data). Moreover, the first measuring device 12 transmits the image data (tool shape data) to the control unit 30.

[0035] like Figure 1 As shown, the dressing device 13 is a device for dressing the tool 23. The dressing device 13 has a grinding wheel 14 and a drive device 15. The drive device 15 is fixed to the first mounting surface 10a. The drive device 15 has a rotating shaft 15a parallel to the first mounting surface 10a. The grinding wheel 14 is mounted on the rotating shaft 15a. If the dressing device 13 receives a control signal from the control unit 30, the rotating shaft of the drive device 15 is driven, and the grinding wheel 14 rotates.

[0036] Figure 3 This is a schematic diagram showing the state during the adjustment process in Implementation Method 1. (Example) Figure 3 As shown, when dressing tool 23 using dressing device 13, the second worktable 20 is moved so that tool 23 contacts the outer circumferential surface of the rotating grinding wheel 14. Thus, tool 23 is ground. Furthermore, the second worktable 20 continues to move after tool 23 contacts the grinding wheel 14. In other words, the contact point of tool 23 relative to the grinding wheel 14 is changed, adjusting tool 23 to a predetermined shape. Moreover, once the contact point of tool 23 has been changed, dressing is complete.

[0037] like Figure 1 As shown, a workpiece processing device 21, a second measuring device 24, and a correction component 25 are provided on the second setting surface 20a.

[0038] The workpiece processing apparatus 21 is an apparatus for processing the workpiece 16. The workpiece processing apparatus 21 includes a main body 22 disposed at a second mounting surface 20a and a tool 23 supported by the main body 22. In this embodiment, the tool 23 is an end mill. However, other tools besides end mills may also be used. The main body 22 supports the tool 23 and directs the tool 23 downwards (X2). Therefore, the central axis of the tool 23 extends in the vertical direction. If the main body 22 receives a control signal from the control unit 30, it rotates the tool 23 about its central axis.

[0039] Figure 4 This is a schematic diagram showing the state of the workpiece being processed in Embodiment 1. For example... Figure 4As shown, when machining workpiece 16, the second worktable 20 is moved so that the rotating tool 23 comes into contact with workpiece 16. This causes cutting of workpiece 16. Furthermore, the second worktable 20 continues to move after the tool 23 contacts workpiece 16. In other words, the cutting area of ​​workpiece 16 is changed, and workpiece 16 is machined into a predetermined shape. Moreover, once the cutting area of ​​workpiece 16 has been changed, the machining of the workpiece is complete.

[0040] The second measuring device 24 is a device for measuring the shape of the workpiece 16. In this embodiment, the second measuring device 24 is a contact probe. The second measuring device 24 measures the shape of the workpiece 16 or the position of the workpiece 16 on the first setting surface 10a by contacting the workpiece 16.

[0041] Figure 5 This is a schematic diagram illustrating the state of the workpiece shape being measured using the second measuring device in Embodiment 1. (Example) Figure 5 As shown, when measuring the shape of workpiece 16 or its position on the first mounting surface 10a, the second worktable 20 is moved, bringing the second measuring device 24 into contact with the workpiece 16. Furthermore, the second worktable 20 continues to move after the second measuring device 24 contacts the workpiece 16. In other words, by changing the contact point between the second measuring device 24 and the workpiece 16, the second measuring device 24 measures the overall shape of the workpiece 16 or its position on the first mounting surface 10a. Moreover, the second measuring device 24 sends the acquired measurement results (workpiece shape data or workpiece position data) to the control unit 30. Furthermore, although not specifically illustrated, the second measuring device 24 can measure the shape of the grinding wheel 14 by contacting it. In other words, not limited to measuring the workpiece 16, the second measuring device 24 can also measure the shape of objects positioned on the first mounting surface 11a. Alternatively, a space for housing the second measuring device 24 may be provided within the second worktable 20. Accordingly, the second measuring device 24 does not protrude from the second mounting surface 20a. Alternatively, the amount of protrusion of the second measuring device 24 from the second mounting surface 20a can be made shorter. As a result, it is possible to prevent the end of the second measuring device 24 from colliding with the first measuring device 12, the dressing device 13, etc., provided on the first worktable 10 during workpiece processing, thus preventing processing from being hindered.

[0042] Figure 6 This is a schematic diagram showing the state where the shape of the grinding wheel is corrected in Embodiment 1. The corrector 25 is a component used to correct the shape of the grinding wheel 14 and is formed of tantalum. Furthermore, the corrector 25 is provided on the second mounting surface 20a. Figure 6As shown, when the grinding wheel 14 is being corrected, the drive device 15 is driven to rotate the grinding wheel 14. Furthermore, the second worktable 20 is moved, bringing the corrector 25 into contact with the grinding wheel 14. Thus, the grinding wheel 14 is ground. Moreover, the second worktable 20 continues to move after the corrector 25 has contacted the grinding wheel 14. In other words, by changing the contact area between the grinding wheel 14 and the corrector 25, the grinding wheel 14 is corrected to a predetermined shape. Once the contact area of ​​the grinding wheel 14 has been changed, the correction of the grinding wheel 14 is complete.

[0043] The control unit 30 includes hardware resources such as an arithmetic processing unit with a microprocessor (CPU, etc.), a memory (ROM, read-only memory) or RAM (random access memory), a storage unit, and input / output interface devices. The functions of the control unit 30 are implemented by the arithmetic processing unit executing a predetermined program stored in the storage unit. The control unit 30 is electrically connected, via wired or wireless means, to the moving device 20c that moves the second worktable, the first measuring device 12, the dressing device 13, the workpiece processing device 21, and the second measuring device 24. Furthermore, the control unit 30 sends various control signals to each of the first measuring device 12, the dressing device 13, the workpiece processing device 21, and the second measuring device 24.

[0044] Next, the machining method using the machine tool of Embodiment 1 will be described.

[0045] Figure 7 This is a flowchart illustrating the portion of the processing method in Embodiment 1 that includes a tool inspection step. For example... Figure 7 As shown, the machining method of workpiece 16 using machine tool 1 is as follows: when workpiece 16 is set on workpiece fixing part 11 on the first setting surface 10a, the process begins (Start). Then, the tool inspection process S100 is entered.

[0046] The tool inspection process S100 includes the tool measurement process S101, the tool verification process S102, the trimming process S103, the tool re-measurement process S104, and the tool re-verification process S105. The tool inspection process S100 begins with the tool measurement process S101.

[0047] The tool measuring process S101 is a process in which the shape of the tool 23 is measured by the first measuring device 12. Specifically, in the tool measuring process S101, the control unit 30 sends a drive signal to the moving device 20c, and the second worktable 20 moves. As a result, the tool 23 is positioned above the first measuring device 12 at an angle X1 (see reference). Figure 2In addition, the control unit 30 sends a control signal to the first measuring device 12, which then takes a picture of the tool 23. The first measuring device 12 sends the tool shape data to the control unit 30, and the tool measuring process S101 ends. If the tool measuring process S101 ends, the tool confirmation process S102 begins.

[0048] The tool verification process S102 is a process that verifies whether the shape of the tool 23 has reached the specified shape. Specifically, in the tool verification process S102, the control unit 30 compares the tool shape data with pre-stored data to determine whether the tool 23 has reached the specified shape.

[0049] On the one hand, when it is determined in the tool confirmation process S102 that the tool 23 has reached the specified shape (the case where "yes" is in S102), the process proceeds to the workpiece machining process S130. Figure 9 (Refer to). Furthermore, the workpiece machining process S130 will be described below. On the other hand, if it is determined in the tool verification process S102 that the tool 23 has not reached the specified shape (the case of "No" in S102), the dressing process S103 is entered.

[0050] Dressing process S103 is a process for dressing tool 23. Specifically, in dressing process S103, control unit 30 sends a drive signal to dressing device 13. As a result, drive device 15 is driven, and grinding wheel 14 rotates. In addition, control unit 30 sends a drive signal to moving device 20c. As a result, second worktable 20 moves, tool 23 contacts the outer peripheral surface of grinding wheel, and tool 23 is ground. Furthermore, after tool 23 contacts grinding wheel 14, second worktable 20 continues to move, and the contact point of tool 23 relative to grinding wheel 14 changes. Moreover, once the contact point of tool 23 has changed completely, dressing process S103 ends. After dressing process S103 ends, tool re-measurement process S104 begins.

[0051] The tool re-measurement process S104 is a process in which the shape of the tool 23 is measured by the first measuring device 12, and the same operation as the tool measurement process S101 is performed. In other words, in the tool re-measurement process S104, the second worktable 20 moves, and the tool 23 is positioned above the first measuring device 12 by X1. The first measuring device 12 takes a picture of the tool 23 and sends the tool shape re-measurement data to the control unit 30, at which point the tool re-measurement process S104 ends. If the tool re-measurement process S104 ends, the process proceeds to the tool re-confirmation process S105.

[0052] The tool reconfirmation process S105 is a process that confirms whether the shape of tool 23 has reached the specified shape, and it performs the same operation as the tool confirmation process S102. In other words, the control unit 30 compares the tool shape remeasurement data with the pre-stored data to determine whether the shape of tool 23 has reached the specified shape.

[0053] On the one hand, if the tool 23 is determined to be of the specified shape in the tool reconfirmation process S105 (the case where "yes" is indicated in S105), the workpiece machining process S130 is entered (refer to...). Figure 9 On the other hand, if in the tool reconfirmation step S105 it is determined that tool 23 has not reached the specified shape (the case of "No" in S105), the process proceeds to the count confirmation step S110 (see reference). Figure 8 ).

[0054] Figure 8 This is a flowchart illustrating the process in Implementation Method 1, which includes a count verification step and a grinding wheel inspection step. For example... Figure 8 As shown, in the count verification step S110, the control unit 30 determines whether the number of times the tool re-verification step S105 has been performed exceeds the prescribed number. In the tool inspection step S100, the dressing step S103 is performed only the same number of times as the tool re-verification step S105. Moreover, if the tool 23 does not reach the prescribed shape despite the prescribed number of dressing operations, it is determined that there is a high probability that the grinding wheel 14 has not maintained the prescribed shape.

[0055] Therefore, on the one hand, if the number of times the tool reconfirmation step S105 is determined to be less than the specified number in the number confirmation step S110 (the case of "No" in S110), it is determined that the grinding wheel 14 maintains the specified shape, and the process returns to the dressing step S103 to dress the tool 23 again.

[0056] On the other hand, if it is determined in the number of times that the tool reconfirmation process S105 has been performed in the number of times confirmed in the number of times (the case where "yes" is in S110), the grinding wheel inspection process S120 is entered in order to confirm the shape of the grinding wheel 14.

[0057] The grinding wheel inspection process S120 includes the grinding wheel measurement process S121, the grinding wheel confirmation process S122, the grinding wheel dressing process S123, the grinding wheel re-measurement process S124, and the grinding wheel re-confirmation process S125. The grinding wheel inspection process S120 begins with the grinding wheel measurement process S121.

[0058] The grinding wheel measurement process S121 is a process for measuring the shape of the grinding wheel 14. Specifically, in the grinding wheel measurement process S121, the control unit 30 sends a drive signal to the moving device 20c, and the second worktable 20 moves. Furthermore, the second measuring device 24 contacts the grinding wheel 14 and measures the overall shape of the grinding wheel 14. The second measuring device 24 sends the acquired measurement result data (grind wheel shape data) to the control unit 30, and the grinding wheel measurement process S121 ends. If the grinding wheel measurement process S121 ends, the grinding wheel confirmation process S122 begins.

[0059] The grinding wheel verification process S122 is a process that verifies whether the grinding wheel 14 has reached the specified shape. Specifically, the grinding wheel verification process S122 compares the grinding wheel shape data with pre-stored data, and the control unit 30 determines whether the shape of the grinding wheel 14 has reached the specified shape.

[0060] On the one hand, if the grinding wheel 14 is determined to be in the specified shape in the grinding wheel confirmation process S122 (the case where "yes" is indicated in S122), no correction of the grinding wheel 14 is required. Therefore, the process returns to the dressing process S103 to dress the tool 23 again. On the other hand, if the grinding wheel 14 is determined to be not in the specified shape in the grinding wheel confirmation process S122 (the case where "no" is indicated in S122), the process proceeds to the grinding wheel dressing process S123.

[0061] The grinding wheel dressing process S123 is a process for correcting the shape of the grinding wheel 14. Specifically, in the grinding wheel dressing process S123, the control unit 30 sends a drive signal to the dressing device 13, causing the grinding wheel 14 to rotate. Furthermore, the control unit 30 sends a drive signal to the moving device 20c, causing the second worktable 20 to move. Moreover, the dressing member 25 contacts the grinding wheel 14, and the grinding wheel 14 is ground (see reference). Figure 6 Furthermore, the second worktable 20 moves to change the contact area where the grinding wheel 14 contacts the dressing member 25. Moreover, once the contact area where the grinding wheel 14 contacts the dressing member 25 has been changed, the grinding wheel dressing process S123 ends, and the grinding wheel re-measurement process S124 begins.

[0062] The grinding wheel re-measurement process S124 is the same as the grinding wheel measurement process S121, which involves measuring the shape of the grinding wheel 14 using the second measuring device 24. In other words, in the grinding wheel re-measurement process S124, the second worktable 20 moves, bringing the second measuring device 24 into contact with the grinding wheel 14 to measure its overall shape. Then, the second measuring device 24 sends the re-measured grinding wheel shape data to the control unit 30, and the grinding wheel re-measurement process S124 ends. If the grinding wheel re-measurement process S124 ends, the grinding wheel re-confirmation process S125 begins.

[0063] The grinding wheel reconfirmation process S125 is a process to confirm whether the shape of the grinding wheel 14 has reached the specified shape, and it is performed in the same way as the grinding wheel confirmation process S122. In other words, the control unit 30 compares the data of the re-measurement of the grinding wheel shape with the pre-stored data to determine whether the shape of the grinding wheel 14 has reached the specified shape.

[0064] On one hand, if the grinding wheel 14 is determined not to be in the specified shape during the grinding wheel reconfirmation process S125 (if S125 is "No"), the process returns to the grinding wheel dressing process S123. Furthermore, the process sequentially proceeds to the grinding wheel dressing process S123, the grinding wheel re-measurement process S124, and the grinding wheel reconfirmation process S125. Then, in the grinding wheel reconfirmation process S125, it is confirmed whether the grinding wheel 14 has reached the specified shape. If it is again determined that the grinding wheel 14 has not reached the specified shape (if S125 is "No"), the process returns to the grinding wheel dressing process S123. Therefore, the grinding wheel dressing process S123, the grinding wheel re-measurement process S124, and the grinding wheel reconfirmation process S125 are repeated until the grinding wheel 14 reaches the specified shape.

[0065] On the other hand, if it is determined in the grinding wheel reconfirmation process S125 that the grinding wheel 14 is of the specified shape (S125 is "yes"), dressing can be performed, and therefore, the process returns to the dressing process S103.

[0066] Figure 9 This is a flowchart illustrating the part of the processing method in Embodiment 1 that includes a workpiece processing step and a workpiece inspection step. For example... Figure 9 As shown, if the tool 23 is determined to be of the specified shape in the tool confirmation process S102 and the tool reconfirmation process S105 (the case where "yes" is in S102 and S105), the workpiece machining process S130 is entered. The workpiece machining process S130 is the process of machining the workpiece 16 into the specified shape.

[0067] Specifically, in workpiece machining step S130, the control unit 30 sends a drive signal to the moving device 20c, causing the second worktable 20 to move. Furthermore, the second measuring device 24 contacts the workpiece 16 and measures its position on the first setting surface 10a. The second measuring device 24 sends the acquired measurement result data (workpiece position data) to the control unit 30. The control unit 30 determines the machining start position based on the data and sends a drive signal to the workpiece machining device 21. As a result, the workpiece machining device 21 is driven, and the tool 23 rotates. Additionally, the control unit 30 sends a drive signal to the moving device 20c. As a result, the second worktable 20 moves, and the tool 23 contacts the workpiece 16 (see reference). Figure 4Thus, cutting of workpiece 16 begins. Furthermore, after tool 23 contacts workpiece 16, the second worktable 20 continues to move, changing the cutting position of workpiece 16. Moreover, once the cutting position of workpiece 16 has changed, workpiece machining step S130 ends, and workpiece inspection step S140 begins.

[0068] The workpiece inspection process S140 includes the workpiece measurement process S141 and the workpiece confirmation process S142.

[0069] The workpiece measurement process S141 is a process for measuring the shape of the machined workpiece 16. Specifically, the workpiece measurement process S141 sends a control signal from the control unit 30 to the moving device 20c, causing the second worktable 20 to move. As a result, the second measuring device 24 comes into contact with the workpiece 16 (see reference). Figure 5 Furthermore, the second measuring device 24 moves while changing the contact point that forms contact with the workpiece 16, measuring the overall shape of the workpiece 16. The second measuring device 24 then sends the workpiece shape data as the measurement result to the control unit 30, and the workpiece measurement process S141 ends. If the workpiece measurement process S141 ends, the workpiece confirmation process S142 begins.

[0070] The workpiece confirmation process S142 is a process that confirms whether the processed workpiece 16 has reached the specified shape. Specifically, in the workpiece confirmation process S142, the control unit 30 compares the workpiece shape data with the pre-stored data to determine whether the shape of the workpiece 16 has reached the specified shape.

[0071] On the one hand, when it is determined in the workpiece confirmation process S142 that the workpiece 16 has become the specified shape (when S142 is "yes"), the processing method of this embodiment ends.

[0072] On the other hand, if it is determined in the workpiece confirmation step S142 that the workpiece 16 has not reached the specified shape (S142 is "No"), the process returns to the tool inspection step S100. In other words, this is because the tool 23 has not reached the specified shape, so there is a possibility that the workpiece 16 has not been sufficiently processed. Moreover, the process returns to the tool inspection step S100, and if it is determined in the tool confirmation step S102 and the tool reconfirmation step S105 that the tool 23 has reached the specified shape (S102 and S105 are "Yes"), the process proceeds to the workpiece processing step S130. Furthermore, after the workpiece processing step S130, if it is determined in the workpiece confirmation step S142 that the workpiece 16 has reached the specified shape (S142 is "Yes"), the processing method of this embodiment ends.

[0073] According to Embodiment 1, the machine tool 1 includes a dressing device 13. Therefore, the tool 23 can be dressed. Furthermore, since the dressing device 13 is located on the first mounting surface 10a, it does not require disassembly or reassembly. Therefore, labor is reduced during dressing.

[0074] Furthermore, assuming that the dressing device 13 can be detached from the first mounting surface 10a, there is a possibility that the installation position of the dressing device 13 may be misaligned from the intended position, thus reducing the machining accuracy of the tool 23. On the other hand, in this embodiment, the dressing device 13 is mounted on the first worktable 10, and there is no misalignment of the dressing device 13. Therefore, the dressing device 13 provides high machining accuracy for the tool 23.

[0075] Furthermore, the machine tool according to Embodiment 1 includes a dressing member 25. Therefore, the grinding wheel 14 can be dressed. Thus, dressing the grinding wheel 14 becomes easier.

[0076] Next, implementation method 2 will be described.

[0077] (Implementation Method 2)

[0078] Figure 10 This is a schematic diagram showing the overall structure of the machine tool involved in Embodiment 2. For example... Figure 10 As shown, the difference between Embodiment 1 and Embodiment 2 is that the machine tool 1A in Embodiment 2 does not have the second measuring device 24 and the correction component 25. Therefore, in the machine tool 1A according to Embodiment 2, the shapes of the grinding wheel 14 and the workpiece 16 cannot be measured. Furthermore, the grinding wheel 14 cannot be corrected.

[0079] Next, the machining method using the machine tool 1A according to Embodiment 2 will be described. Furthermore, in the description of the machining method of Embodiment 2, aspects common to the machining method of Embodiment 1 will be briefly explained.

[0080] Figure 11 This is a flowchart of the processing method of Embodiment 2. The processing method of Embodiment 2 begins when the workpiece 16 is placed on the workpiece fixing part 11, and enters the tool inspection process S200.

[0081] The tool inspection process S200 includes the tool measurement process S201, the tool verification process S202, the trimming process S203, the tool re-measurement process S204, the tool re-verification process S205, and the count verification process S210. The tool inspection process S200 begins with the tool measurement process S201.

[0082] In the tool measurement process S201, the first measuring device 12 photographs the tool 23 and sends the tool shape data to the control unit 30. Thus, the tool measurement process S201 ends, and the process proceeds to the tool confirmation process S202.

[0083] In the tool confirmation process S202, the control unit 30 compares the tool shape data with the pre-stored data to determine whether the tool 23 has reached the specified shape. If the tool confirmation process S202 determines that the tool 23 has not reached the specified shape (the case of "no" in S202), the process proceeds to the trimming process S203.

[0084] In the trimming process S203, the tool 23 is trimmed by the trimming device 13. After the trimming process S203, the tool re-measurement process S204 begins. In the tool re-measurement process S204, the first measuring device 12 takes a picture of the tool 23 and sends the re-measured tool shape data to the control unit 30. Thus, the tool re-measurement process S204 ends, and the tool re-confirmation process S205 begins.

[0085] In the tool reconfirmation process S205, the control unit 30 compares the tool shape remeasurement data with the pre-stored data to determine whether the shape of the tool 23 has become the specified shape. If the tool 23 is determined not to have become the specified shape in the tool reconfirmation process S205 (the case of "No" in S205), the process proceeds to the count confirmation process S210.

[0086] On the one hand, if the number of times the tool reconfirmation step S205 has been performed is less than the specified number (the case of "No" in S210), the number of times the tool 23 is reconfirmed in the verification step S210 of Implementation 2 is determined to be less than the specified number (the case of "No" in S210), the grinding wheel 14 is determined to be in the specified shape, and the process returns to the dressing step S203 to dress the tool 23 again.

[0087] On the other hand, if the number of times the tool re-verification step S205 has been performed exceeds the predetermined number in the verification step S210 (the case where "Yes" is in S210), there is a high probability that the grinding wheel 14 will not maintain the predetermined shape. Furthermore, the machine tool 1A of Embodiment 2 does not have a correction part 25 and cannot correct the grinding wheel 14. Therefore, the machine tool 1A cannot process the workpiece 16 under the current condition, and thus, the process ends.

[0088] When it is determined in the tool confirmation step S202 and the tool reconfirmation step S205 that the tool 23 has reached the specified shape (the case where "yes" is indicated in S202 and S205), the workpiece machining step S230 is entered. The workpiece machining step S230 of Embodiment 2 is the same as the workpiece machining step S130 of Embodiment 1. In the workpiece machining step S230, the workpiece 16 is machined by cutting it with the tool 23. If the workpiece machining step S230 ends, the machining method of this embodiment ends.

[0089] As described above, according to Embodiment 2, similar to Embodiment 1, the labor required for trimming is reduced. Furthermore, the trimming device 13 provides high precision machining of the tool 23.

[0090] Next, implementation method 3 will be described.

[0091] (Implementation Method 3)

[0092] Figure 12 This is a schematic diagram showing the overall structure of the machine tool involved in Embodiment 3. For example... Figure 12 As shown, the machine tool 1B of Embodiment 3 differs from Embodiment 1 in that it has an acoustic emission sensor (hereinafter referred to as AE sensor 50).

[0093] The AE sensor 50 is a sensor that detects elastic waves and converts them into electrical signals. In this embodiment, it includes a first AE sensor 51 disposed on the side of the first worktable 10 and a second AE sensor 52 disposed on the side of the second worktable 20. The first AE sensor 51 is mounted on the workpiece fixing part 11. The second AE sensor 52 is mounted on the main body 22 of the workpiece processing device 21.

[0094] According to this embodiment, during the machining of workpiece 16 (workpiece machining steps S130 and S230), the impact of tool 23 failure is transmitted to workpiece fixing part 11 and main body part 22. Furthermore, the first AE sensor 51 detects the shock wave transmitted to workpiece fixing part 11 and sends the result to control unit 30. Additionally, the second AE sensor 52 detects the shock wave transmitted to main body part 22 and sends the result to control unit 30.

[0095] Furthermore, in this embodiment, the control unit 30 stops the processing of the workpiece 16 when it receives a signal indicating that a shock wave has been detected from at least one of the first AE sensor 51 and the second AE sensor 52. Therefore, according to Embodiment 3, damage to the tool 23 can be detected, and the processing of the workpiece 16 can be stopped in advance.

[0096] In addition, in embodiment 3, AE sensors 50 are provided on both the first worktable 10 side and the second worktable 20 side, but it is also possible to provide AE ​​sensors 50 on only one of the first worktable 10 side and the second worktable 20 side. Furthermore, although AE sensors 50 are mounted on the workpiece fixing part 11 and the main body part 22, AE sensors 50 can also be mounted on other parts.

[0097] The embodiments have been described above, but this disclosure is not limited to the examples described above. For example, machine tools 1, 1A, and 1B in each embodiment are equipped with a control unit 30, but this disclosure may also omit the control unit 30. Alternatively, the control unit 30 may be replaced by a manager or other person who manages the machine tools 1, 1A, and 1B, or the control unit 30 may be replaced by a person who makes a decision. Alternatively, the manager or other person may perform some of the functions of the control unit 30.

Claims

1. A machine tool, characterized in that, have: The first workbench has a first mounting surface; The second workbench has a second mounting surface facing the first mounting surface; A workpiece fixing part is disposed on the first setting surface and is used to fix the workpiece; A workpiece processing device, disposed on the second mounting surface, having a tool, and processing the workpiece; A first measuring device is disposed on the first setting surface and is used to measure the shape of the tool; A trimming device, disposed on the first setting surface, is used to adjust the shape of the tool; as well as A moving device that moves at least one of the first worktable and the second worktable. The moving device enables the first worktable and the second worktable to move relative to each other in a planar direction parallel to the first mounting surface and in a vertical direction perpendicular to the first mounting surface.

2. The machine tool according to claim 1, characterized in that, The device includes a second measuring device disposed on the second setting surface, which is used to measure the shape of an object disposed on the first setting surface.

3. The machine tool according to claim 1 or 2, characterized in that, The dressing device includes: a grinding wheel and a drive device for rotating the grinding wheel. The machine tool includes a correction component, which is disposed on the second setting surface and is used to correct the shape of the grinding wheel.

4. The machine tool according to any one of claims 1 to 3, characterized in that, It is equipped with an AE sensor to detect defects in the tool.

5. A machining method using a machine tool, The machine tool includes: The first workbench has a first mounting surface; The second workbench has a second mounting surface facing the first mounting surface; A workpiece fixing part is disposed on the first setting surface and is used to fix the workpiece; A workpiece processing device, disposed on the second mounting surface, having a tool, and processing the workpiece; A first measuring device is disposed on the first setting surface and is used to measure the shape of the tool; A trimming device, disposed on the first setting surface, is used to adjust the shape of the tool; as well as A moving device that moves at least one of the first worktable and the second worktable. The moving device enables the first worktable and the second worktable to move relative to each other in a planar direction parallel to the first mounting surface and in a vertical direction perpendicular to the first mounting surface. The machining method using a machine tool is characterized by including: A tool inspection process, in which the tool is inspected; and The workpiece processing step involves machining the workpiece. The tool inspection process includes: The tool measurement process involves measuring the shape of the tool using the first measuring device and acquiring tool shape data. The tool verification process uses the tool shape data to verify that the tool has reached a specified shape. In the trimming process, when it is determined in the tool confirmation process that the tool is not of the specified shape, the tool is trimmed by the trimming device. The tool re-measurement process involves re-measuring the shape of the trimmed tool using the first measuring device and acquiring tool shape re-measurement data; and The tool is then re-confirmed, in which the tool shape measurement data is used to confirm that the tool has reached the specified shape. When the tool is determined to be in the specified shape during the tool confirmation process and the tool reconfirmation process, the workpiece processing process begins.

6. The machining method using a machine tool according to claim 5, characterized in that, The machine tool includes a second measuring device disposed on the second mounting surface, which is used to measure the shape of an object disposed on the first mounting surface. The processing method includes a workpiece inspection step that inspects the workpiece after the workpiece processing step. The workpiece inspection process includes: A workpiece measurement process, in which the shape of the workpiece is measured by a second measuring device to obtain workpiece shape data; and The workpiece confirmation process uses the workpiece shape data to confirm that the workpiece has reached a specified shape. When the workpiece is determined to have reached the specified shape during the workpiece confirmation process, the processing of the workpiece is terminated. If, during the workpiece confirmation process, it is determined that the workpiece has not reached the specified shape, the process proceeds to the tool inspection process.

7. The machining method using a machine tool according to claim 6, characterized in that, The machine tool includes a correction element disposed on the second mounting surface. The dressing device includes: a grinding wheel and a drive device for rotating the grinding wheel. The processing method includes: a number confirmation step for confirming the number of times the tool reconfirmation step has been performed when it is determined in the tool reconfirmation step that the tool has not reached the specified shape. If the number of times the tool re-verification process has been performed in the verification process is less than a predetermined number, the process proceeds to the trimming process. If the number of times the tool re-verification process is determined to have been performed exceeds the specified number during the verification process, the grinding wheel inspection process begins. The grinding wheel inspection process includes: The grinding wheel measurement process involves measuring the shape of the grinding wheel using the second measuring device and acquiring grinding wheel shape data. The grinding wheel verification process uses the grinding wheel shape data to verify that the grinding wheel has reached the specified shape. In the grinding wheel dressing process, if it is determined in the grinding wheel confirmation process that the grinding wheel has not reached the specified shape, the shape of the grinding wheel is adjusted by the dressing component. The grinding wheel re-measurement process involves re-measuring the shape of the grinding wheel, which was adjusted in the grinding wheel correction process, using the second measuring device, and acquiring the re-measurement data of the grinding wheel shape; and The grinding wheel re-verification process involves using data from a renewed measurement of the grinding wheel shape to confirm that the grinding wheel has reached the specified shape. If the grinding wheel is determined to be of a specified shape during the grinding wheel confirmation process and the grinding wheel reconfirmation process, the dressing process is then initiated.

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