Semiconductor flat-plate bin automatic insertion structure

Abstract

The application discloses a semiconductor flat-plate warehouse inserting and taking structure, which comprises an inserting and taking connecting frame, an inserting and taking arm and a self-adapting locking mechanism arranged on the inserting and taking arm. The self-adapting locking mechanism mainly comprises a straight-line transmission rod, a scissor type lifting amplification mechanism, a limiting pressing plate and a guiding reset unit. The core of the application is that the self-weight load generated during the inserting and taking of the flat-plate warehouse is used as a driving force. When the inserting and taking arm supports the flat-plate warehouse, the weight presses the straight-line transmission rod, forces the scissor type lifting mechanism to expand and drives the limiting pressing plate to stably move downwards, so that the positioning pin on the limiting pressing plate is inserted into the pin hole of the flat-plate warehouse, automatic locking and positioning are realized. After unloading, the mechanism is automatically reset under the action of the reset spring. The application does not need external power, realizes "inserting and taking to locking", can effectively inhibit the inertial swing and vibration during the carrying process, prevents the wafers in the warehouse from being damaged due to knocking and has the advantages of simple structure, reliability, safety and high positioning precision.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing automation technology, specifically an automatic positioning and locking insertion structure for semiconductor flat-pack storage in an automated material handling system. Background Technology

[0002] In the semiconductor manufacturing process, brittle and high-value substrates such as wafers and glass substrates are usually stored in dedicated flat silos (hereinafter referred to as flat silos) and moved between storage racks and process equipment by automated equipment such as stacker cranes and overhead cranes.

[0003] Currently, common flatbed hopper insertion methods mostly employ simple cantilever or fork structures, using photoelectric sensors or mechanical stops for coarse positioning. These structures have significant drawbacks: during high-speed operation, sudden stops, or reversals of the stacker crane, considerable inertia is generated; simultaneously, environmental vibrations from the factory area are also transmitted to the equipment. These inertial forces and vibrations can cause the inserted flatbed hopper to sway or slip. More seriously, this swaying can be transmitted into the hopper's interior, causing relative displacement or high-frequency micro-vibrations in the precisely stacked wafers. This can easily lead to the wafer edges colliding with the hopper's inner walls or adjacent wafers, resulting in edge chips, micro-cracks, or surface scratches, directly causing product scrap and significant economic losses.

[0004] To enhance stability, some solutions employ independent electric or pneumatic drive units to operate the locking pins or grippers, enabling active locking after insertion or removal. However, this increases system complexity, cost, and control difficulty, reduces reliability, and poses safety hazards in the event of power failure.

[0005] Therefore, there is an urgent need for a semiconductor flat-panel bay insertion structure that can automatically trigger locking using the natural load during the insertion process, has a simple and reliable structure, can effectively suppress the effects of inertia and vibration, and protect the wafers inside the bay. Summary of the Invention

[0006] To address the problems of existing flatbed wafer insertion structures, such as wafer swaying due to inertia and vibration, and the complexity of additional drive and locking mechanisms, this invention aims to provide a passive, adaptive insertion structure. This structure utilizes the self-weight load generated during flatbed wafer insertion as the sole driving force, automatically and reliably achieving precise positioning and mechanical locking of the flatbed wafer, fundamentally preventing swaying during handling.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A semiconductor flat-panel interlocking structure includes:

[0009] Supporting unit: includes a storage flat silo, on which a flat silo lifting frame is fixedly installed at the center of the upper end face;

[0010] Connection and insertion unit: includes an insertion connection frame for connecting to the lifting mechanism of external handling equipment, and at least one insertion arm fixedly installed on the insertion connection frame; the insertion arm has a snap-fit ​​part at one end for supporting the flatbed hoisting frame;

[0011] Adaptive triggering and transmission unit: mounted on the insertion arm, including a vertically movable linear transmission rod; the upper end of the linear transmission rod is provided with a pressure-bearing part for contacting the flatbed hoisting frame, and the lower end acts on the upper part of a scissor-type lifting and amplifying mechanism; the lower part of the scissor-type lifting and amplifying mechanism is connected to a limiting pressure plate;

[0012] Automatic locking unit: includes at least one positioning pin disposed on the lower surface of the limiting pressure plate, and a corresponding pin hole disposed on the upper surface of the storage flat compartment;

[0013] Guiding and resetting unit: including a linear guiding mechanism disposed on the insertion arm for constraining the unfolding direction of the scissor lift amplification mechanism, and an elastic element that provides a resetting force;

[0014] When the insertion arm supports the storage flat hopper, the weight of the storage flat hopper presses down on the pressure-bearing part of the linear transmission rod through the hopper lifting frame, driving the linear transmission rod to move downward. The downward movement of the linear transmission rod forces the scissor lift amplification mechanism to unfold laterally. The unfolding movement of the scissor lift amplification mechanism is converted into a stable downward linear movement of the limiting pressure plate through the linear guide mechanism until the positioning pin on the limiting pressure plate is inserted into the pin hole of the storage flat hopper, achieving automatic locking and positioning. When the storage flat hopper is lowered and its own weight load disappears, under the restoring force of the elastic element, the scissor lift amplification mechanism retracts, driving the limiting pressure plate and positioning pin to rise and reset.

[0015] Furthermore, the snap-fit ​​part is a snap-fit ​​groove opened on the upper end face of the insertion arm, the pressure-bearing part is a lifting connecting plate located at the bottom of the snap-fit ​​groove, and the upper end of the linear transmission rod is fixedly connected to the lifting connecting plate.

[0016] Furthermore, the two upper hinge points of the scissor-type lifting and amplifying mechanism are respectively connected to the insertion arm through the first limiting sliding member, and the two lower hinge points are respectively connected to the limiting pressure plate through the second limiting sliding member.

[0017] Furthermore, the linear guide mechanism includes limiting guide plates symmetrically arranged on both sides of the scissor lift amplification mechanism, and the limiting guide plates are provided with vertical straight guide grooves; a sliding connector is provided on the cross hinge shaft of the scissor lift amplification mechanism, and the sliding connector is slidably disposed in the straight guide groove.

[0018] Furthermore, the elastic element includes a first return spring and a second return spring; the first return spring is disposed in the snap-fit ​​groove and acts on the lifting connecting plate to provide the upward return force of the linear transmission rod; the second return spring acts between the sliding connector and the insertion arm to provide the retraction return force of the scissor lift amplification mechanism.

[0019] Furthermore, the number of the positioning pins is two or more, and they are arranged at intervals along the lower surface of the limiting pressure plate.

[0020] Furthermore, a friction-reducing component is provided between the lower end face of the linear transmission rod and the contact surface of the scissor-type lifting and amplifying mechanism.

[0021] Compared with the prior art, the present invention has the following significant advantages:

[0022] Fully passive adaptive locking: Innovatively using the weight of the flatbed compartment itself as the driving force, the mechanical conversion of a "linear transmission rod - scissor-type amplification mechanism" automatically triggers the insertion and locking of the positioning pin. It requires no external power source or sensor control, boasts an extremely simple structure, high reliability, and low cost, achieving true "plug-and-play locking".

[0023] Excellent anti-sway and anti-vibration performance: In the locked state, the positioning pin and the pin hole form a firm over-positioning fit. Combined with the downward pressure of the limit plate, the flatbed and the insertion arm are rigidly connected into a whole, which can effectively resist the inertial forces and external vibrations in all directions during the handling process, and fundamentally eliminate the sway of the flatbed itself.

[0024] Multiple layers of protection for the wafers: Through the aforementioned anti-shake mechanism, the relative movement and vibration of the wafers within the wafer chute are indirectly but crucially suppressed, greatly reducing the risk of wafer edge damage due to impacts. Simultaneously, the purely mechanical soft-contact triggering and spring reset process is smooth and impact-free, further protecting sensitive materials.

[0025] Precise positioning and automatic alignment: The insertion process of the positioning pin itself is a precise secondary positioning, correcting any minor deviations that may exist during the initial insertion and improving the repeatability of the positioning. The guiding mechanism ensures the linearity and consistency of the locking action.

[0026] High safety and reliability: The locked state coexists with the load, and it automatically unlocks when the load disappears, avoiding dangerous situations such as "locking with the chamber" or "unlocking in mid-air" that may be caused by misoperation or malfunction of traditional active locking mechanisms, making it inherently safe.

[0027] Excellent compatibility and maintainability: The modular structure makes it easy to install on existing stacker cranes. Major moving parts can be made of standard components, facilitating maintenance. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the embodiment of the present invention after assembly with the flatbed compartment.

[0029] Figure 2 for Figure 1 After removing the storage flat compartment, a three-dimensional schematic diagram of the insertion structure body is displayed.

[0030] Figure 3 for Figure 2 The right side view of the insertion structure shown.

[0031] Figure 4 for Figure 2 The diagram shows a top view of the insertion structure mechanism.

[0032] Explanation of the main component labels in the diagram:

[0033] 1. Flatbed storage silo; 2. Flatbed storage silo lifting frame; 3. Insertion and removal connection frame; 4. Insertion and removal arm;

[0034] 5. Limiting components; 6. Limiting pressure plate; 7. Lifting connecting plate;

[0035] 41. Snap-fit ​​groove; 42. Countersunk hole; 43. Sliding connection hole;

[0036] 51. Scissor lift structure; 52. Limiting guide plate; 53. Sliding connector; 54. Limiting sliding component;

[0037] 61. Positioning pin. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention.

[0039] The core of this invention lies in providing a passive insertion structure that utilizes the weight of a load to trigger mechanical locking. For example... Figures 1 to 4 As shown, a preferred embodiment includes:

[0040] The storage flat hopper 1 is used to hold wafers, and a flat hopper lifting frame 2 is fixed on its top. The insertion and removal connecting frame 3 is used to connect to the lifting mechanism of the stacker crane. Two insertion and removal arms 4 are symmetrically fixed below the insertion and removal connecting frame 3, and their front upper surfaces are provided with locking grooves 41 for accommodating the lifting frame 2.

[0041] The adaptive triggering and transmission unit is integrated inside the insertion arm 4. A countersunk hole 42 is provided at the bottom of the locking groove 41, with a vertical sliding connection hole 43 at the center of the countersunk hole 42. A linear transmission rod (shown as a single unit of the lifting connecting plate 7 and its lower rod body in the figure) passes through this hole. The lifting connecting plate 7, acting as a pressure-bearing part, is located within the countersunk hole 42, its lower surface contacting the upper end of the first return spring (not shown in the figure), with the lower end of the spring abutting against the bottom wall of the countersunk hole 42. The lower end of the linear transmission rod directly abuts against the center of the horizontal connecting rod at the very top of the scissor-type lifting structure 51.

[0042] The scissor lift structure 51 is composed of multiple sets of connecting rods that are cross-hinged to form a motion amplification mechanism. Its two upper hinge shafts are respectively connected to a limiting slider 54 (such as a slider) serving as a first limiting slider, which is embedded in a transverse linear groove machined on the lower surface of the insertion arm 4. Its two lower hinge shafts are also connected to sliders (second limiting sliders), which are embedded in corresponding transverse grooves on the upper surface of the limiting pressure plate 6.

[0043] The limiting pressure plate 6 is located below the scissor lift structure 51, and two conical positioning pins 61 are installed on its lower surface. Precise pin holes are machined at corresponding positions on the upper surface of the storage flat compartment 1.

[0044] The key component of the guiding and resetting unit is the two limiting guide plates 52. These are vertically fixed to the sides of the insertion arm 4 and the limiting pressure plate 6. Each guide plate 52 has a precise vertical straight guide groove. A sliding connector 53 (such as a pin) is fixed to a cross hinge shaft in the middle of the scissor lift structure 51. Both ends of this pin extend into the straight guide grooves on both sides, allowing it to slide up and down along the grooves. A second reset spring (not shown in the figure) is installed between the insertion arm 4 and the sliding connector 53 to provide a retraction restoring force for the scissor mechanism.

[0045] Working principle:

[0046] Insertion and Locking: The stacker crane drives the insertion arm 4 to be horizontally inserted below the flatbed silo lifting frame 2. During ascent, the lifting frame 2 enters the locking slot 41 and is supported by the lifting connecting plate 7, with the weight of the flatbed silo 1 (load F) acting on the lifting connecting plate 7. The load F presses down on the linear transmission rod, and the lower end of the rod pushes the top midpoint of the scissor-lift structure 51 downwards (displacement d1). Under the constraint of the side limit guide plates 52 (the sliding connector 53 can only move within the vertical slot), the scissor structure is forced to unfold to both sides, causing its lower end to move downwards. This process amplifies the smaller vertical displacement d1 at the top into a larger vertical displacement d2 at the bottom (d2 > d1). The downward-moving scissor structure pushes the limit pressure plate 6 downwards stably through the second limit sliding member until the positioning pin 61 is fully inserted into the pin hole of the flatbed silo 1. At this point, the flatbed silo 1 is supported vertically by the insertion arm 4, constrained horizontally by the positioning pin 61, and pressed tightly against the limit pressure plate 6, achieving all-around locking.

[0047] Anti-sway during handling: In the locked state, the rigidity of the entire system (insertion arm - positioning pin - flat compartment) is enhanced, which can effectively resist the inertial torque generated by handling acceleration and environmental vibration.

[0048] Release and Reset: After the flatbed warehouse is placed in the target position (such as a shelf), the load F disappears. The first reset spring pushes the lifting connecting plate 7 and the linear transmission rod to move upward and reset. At the same time, the second reset spring pulls the sliding connecting piece 53 upward, causing the scissor-type lifting structure 51 to retract, thereby raising the limit pressure plate 6, so that the positioning pin 61 can be smoothly pulled out from the pin hole, and the mechanism returns to the ready-to-insert state.

[0049] Extension of the Implementation Example:

[0050] The locating pin 61 and the corresponding pin hole can be tapered, which has both guiding and self-centering functions.

[0051] Ball bearings or engineering plastic gaskets can be added at the contact point between the lower end of the linear drive rod and the scissor mechanism to reduce friction and wear.

[0052] The magnification of the scissor lift mechanism and the stiffness of the return spring can be adjusted according to the size and weight of the flatbed compartment.

[0053] The technical scope of this invention is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this invention, and all such modifications and variations should fall within the protection scope of this invention.

Claims

1. A semiconductor flat-panel insert structure, characterized in that, include: A flat storage silo (1) has a flat storage lifting frame (2) fixedly installed at the center of its upper end face. Insert the connecting bracket (3) for connecting to the lifting structure of the stacker crane; Two insertion arms (4) are fixedly installed on the insertion connecting frame (3) for inserting and removing the storage flat compartment (1). The upper end face of the insertion arm (4) is provided with a snap-fit ​​groove (41), and a countersunk hole (42) is provided in the snap-fit ​​groove (41). A sliding connection hole (43) is provided at the center of the countersunk hole (42) that penetrates the insertion arm (4). The linear transmission rod is slidably connected in the sliding connection hole (43), with a lifting connection plate (7) fixedly connected to its upper end and a scissor-type lifting structure (51) in contact with its lower end; The lower end face of the insertion arm (4) is provided with a sliding connection groove, in which two first limiting sliding parts (54) are slidably installed. The two first limiting sliding parts (54) are respectively hinged to the upper end of the scissor lift structure (51). The limiting pressure plate (6) is located below the scissor lift structure (51), and its lower end face is provided with a positioning pin (61). The upper end face of the storage flat compartment (1) is provided with a pin hole corresponding to the positioning pin (61). The lower end of the scissor lift structure (51) is connected to two second limiting sliding parts, which are slidably installed on the upper end face of the limiting pressure plate (6). When the insertion arm (4) inserts into the storage flat compartment (1), the weight of the storage flat compartment (1) presses down on the linear transmission rod through the lifting connecting plate (7), thereby driving the scissor lifting structure (51) to unfold, causing the two first limiting sliding parts (54) to move relative to each other, and causing the limiting pressure plate (6) to move down, so that the positioning pin (61) is inserted into the pin hole.

2. The semiconductor flat-plate insert structure according to claim 1, characterized in that, The scissor lift structure (51) has limiting guide plates (52) on both sides of the unfolding direction. The limiting guide plates (52) have straight guide grooves. A sliding connector (53) is slidably connected in the straight guide grooves. The axis of the sliding connector (53) is collinear with the axis of the cross hinge axis of the scissor lift structure (51).

3. The semiconductor flat-plate insert structure according to claim 1, characterized in that, The countersunk hole (42) is provided with a first reset spring, which acts on the lifting connecting plate (7) to reset the linear transmission rod after the storage flat compartment (1) is unloaded.

4. The semiconductor flat panel insert structure according to claim 2, characterized in that, A second reset spring is provided between the sliding connector (53) and the insertion arm (4) to reset the scissor lift structure (51) and drive the limiting pressure plate (6) to rise after unloading the storage flat compartment (1), so that the positioning pin (61) is pulled out from the pin hole.

5. The semiconductor flat panel insert structure according to claim 1, characterized in that, The sliding connection groove is a straight guide groove, and its guiding direction is consistent with the unfolding direction of the scissor lift structure (51).

6. The semiconductor flat-panel insert structure according to claim 1, characterized in that, The limiting pressure plate (6) and the insertion arm (4) are both provided with limiting guide plates (52).

7. The semiconductor flat panel insert structure according to claim 1, characterized in that, The number of the positioning pins (61) is at least two, and correspondingly, the number and position of the pin holes on the storage flat compartment (1) match the positioning pins (61).

8. The semiconductor flat panel insert structure according to claim 1, characterized in that, The inner wall of the snap-fit ​​groove (41) is an inclined surface or an arc surface, forming a guide structure to facilitate docking with the flatbed hoisting frame (2).

9. The semiconductor flat panel insert structure according to claim 1, characterized in that, The lower end face of the linear transmission rod is provided with a wear-resistant pad or ball bearing, which makes rolling or sliding contact with the upper surface of the scissor lift structure (51).

10. The semiconductor flat-plate insert structure according to claim 1, characterized in that, The first limiting slider (54) and the second limiting slider are one or a combination of slider and roller.

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