A mass transfer processing apparatus and a mass transfer processing method
Patent Information
- Application Number
- CN202611094114.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-22
- Publication Date
- 2026-11-03
AI Technical Summary
In existing mass transfer processing equipment, the arrangement of three independent upper adsorption platforms results in excessively long spans between the crossbeams or carriers, making it difficult to maintain micron-level motion accuracy at high speeds. Furthermore, the control logic is complex, reducing processing efficiency.
The first, second, and third upper adsorption platforms share a single carrier and are integrated into a unified linkage structure through a processing moving platform. Combined with the first and second download platforms, alternating feeding is achieved, simplifying the control logic and shortening the span to ensure micron-level motion accuracy.
It improves the stability and motion accuracy of processing equipment under high-speed conditions, reduces the difficulty of program development and debugging, reduces non-processing waiting time, and significantly improves overall processing efficiency.
Smart Images
Figure CN123035795A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more particularly to a mass transfer processing apparatus and a mass transfer processing method. Background Technology
[0002] In the field of semiconductor processing, molecules are a special type of molecule that exists only briefly in the excited state and cannot exist stably in the ground state. When they spontaneously disintegrate, they can emit high-energy deep ultraviolet light. Mass transfer, as the core micro-assembly process for the mass production of micron-scale semiconductor chips such as Micro-LEDs, refers to the key technical step of transferring a massive number of micron-scale chips or dies from the native substrate to the target driving substrate and precisely arranging them to form a two-dimensional periodic array.
[0003] To fully leverage the parallel processing advantages of excimer laser-assisted mass transfer and achieve array-level synchronous transfer operations, this process imposes stringent technical requirements on the motion synchronization and positioning accuracy between the upper adsorption stage and the lower stage in the mass transfer processing equipment. Currently, most mainstream mass transfer processing equipment employs an architecture with three independently moving upper adsorption stages. This type of equipment has significant inherent technical drawbacks: firstly, the arrangement of three independent upper adsorption stages significantly increases the effective span of the crossbeam or carrier, making it difficult for the mass transfer processing equipment to maintain stable micron-level motion accuracy over long periods under high-speed conditions; secondly, the completely independent motion mode of the three upper adsorption stages requires the addition of complex interference avoidance mechanisms in the control logic to coordinate the timing of the actions of each upper adsorption stage throughout the entire process of loading, processing, and unloading. This not only significantly increases the difficulty of developing and debugging the control program but also significantly extends non-processing waiting time, directly reducing the overall processing efficiency of the mass transfer processing equipment. Summary of the Invention
[0004] The purpose of this invention is to provide a mass transfer processing device and a mass transfer processing method that can solve the above-mentioned problems existing in the prior art.
[0005] To achieve the above objectives, this application adopts the following technical solution: On the one hand, a mass transfer processing device is provided, comprising: The machine base is equipped with a first material storage area, a second material storage area, a first waiting area, a second waiting area, and a processing area; The first robotic arm can move between the first storage area and the first waiting area; The conveyor platform can move between the first waiting area and the processing area; The second robotic arm can move between the second storage area and the second waiting area; A processing mobile platform is installed in the processing area; the processing mobile platform has a carrier that can move along a first horizontal direction and a second horizontal direction that are perpendicular to each other; The first upper adsorption stage, the second upper adsorption stage, and the third upper adsorption stage are all used to adsorb the upper substrate; the first upper adsorption stage, the second upper adsorption stage, and the third upper adsorption stage are all rotatably mounted on the carrier. The first and second downloading stages are used to carry the lower substrate; the first and second downloading stages can move between the second waiting area and the processing area. as well as A transfer device is mounted on the base and is used to transfer the die of the upper substrate to the lower substrate.
[0006] Preferably, the first storage area is provided with a first material warehouse, a second material warehouse, and a third material warehouse for storing the upper substrate; the second storage area is provided with a fourth material warehouse and a fifth material warehouse for storing the lower substrate.
[0007] Preferably, the first storage area is also equipped with a spare material warehouse.
[0008] Preferably, the conveying platform includes a conveying platform that can move along three mutually perpendicular linear directions and an adjustment platform that is rotatably mounted on the conveying platform; the adjustment platform is provided with a preset station for placing the upper substrate.
[0009] Preferably, there are six preset workstations arranged at intervals.
[0010] Preferably, the mass transfer processing equipment further includes a first camera for positioning and angle adjustment of the upper substrate; the first camera is mounted on the base and located on the moving path of the conveyor platform.
[0011] Preferably, the mass transfer processing equipment further includes a second camera for positioning the lower substrate; the second camera is located on the movement path of the second robot arm.
[0012] Preferably, the mass transfer processing equipment further includes a first optical inspection device and a second optical inspection device; the first optical inspection device is located above the moving path of the first download stage, and the second optical inspection device is located above the moving path of the second download stage.
[0013] Preferably, the mass transfer processing equipment further includes a first alignment camera for aligning the upper substrate and a second alignment camera for aligning the lower substrate; both the first alignment camera and the second alignment camera are located in the processing area.
[0014] On the other hand, a mass transfer processing method is provided, applied to the aforementioned mass transfer processing equipment; the mass transfer processing method includes: S100: The first robotic arm moves to the first storage area, grabs the first upper substrate, the second upper substrate, and the third upper substrate, and places them on the conveyor platform located in the first waiting area; S110: The conveying platform moves the first upper substrate, the second upper substrate, and the third upper substrate to below the carrier. The first upper adsorption platform adsorbs the first upper substrate, the second upper adsorption platform adsorbs the second upper substrate, and the third upper adsorption platform adsorbs the third upper substrate. S120: The conveyor platform returns to the first waiting area and repeats the above steps S100 to S110; S200: The second robotic arm moves to the second storage area to grab the first lower substrate and the second lower substrate and moves to the second waiting area. The second robotic arm places the first lower substrate on the first downloading table and the second robotic arm places the second lower substrate on the second downloading table. S210: The first download stage moves the first lower substrate to below the first upper adsorption stage, the second upper adsorption stage, and the third upper adsorption stage; S210: The carrier of the processing mobile platform moves in coordination with the first download platform, and at the same time the transfer device is activated. The transfer device transfers the grains of the first upper substrate on the first upper adsorption platform, the grains of the second upper substrate on the second upper adsorption platform, and the grains of the third upper substrate on the third upper adsorption platform to the first lower substrate. S220: After the first substrate is processed, the first downloading station moves the processed first substrate to the second waiting area, the second robot takes away the processed first substrate, and the second robot places the next unprocessed first substrate on the first downloading station. S230: The second download stage moves the second lower substrate to below the first upper adsorption stage, the second upper adsorption stage, and the third upper adsorption stage; S240: The carrier of the processing mobile platform moves in coordination with the second download platform, and at the same time the transfer device is activated. The transfer device transfers the grains of the first upper substrate on the first upper adsorption platform, the grains of the second upper substrate on the second upper adsorption platform, and the grains of the third upper substrate on the third upper adsorption platform to the second lower substrate. S250: After the second substrate is processed, the second download stage moves the processed second substrate to the second waiting area, the second robot takes away the processed second substrate, and the second robot places the next unprocessed second substrate on the second download stage. S260: Repeat steps S210 to S250 above; S300: After the transfer of the grains of the first upper substrate on the first upper adsorption platform, the grains of the second upper substrate on the second upper adsorption platform, and the grains of the third upper substrate on the third upper adsorption platform is completed, the conveying platform moves to the bottom of the carrier and carries the first upper substrate, the second upper substrate, and the third upper substrate. S310: The conveying platform conveys the next set of unprocessed first upper substrate, second upper substrate, and third upper substrate to the first upper adsorption platform, the second upper adsorption platform, and the third upper adsorption platform, respectively. S320: The conveying platform transfers the first upper substrate, the second upper substrate, and the third upper substrate that have completed the transfer to the first waiting area, and the first robotic arm takes away the first upper substrate, the second upper substrate, and the third upper substrate that have completed the transfer.
[0015] The beneficial effects of this application are as follows: The three adsorption platforms of the mass transfer processing equipment of this application are a first upper adsorption platform, a second upper adsorption platform, and a third upper adsorption platform. The first upper adsorption platform, the second upper adsorption platform, and the third upper adsorption platform are installed on the carrier of the processing moving platform. The carrier integrates the original three independently moving upper adsorption platforms into an integrated linkage structure, which greatly shortens the carrier span to ensure long-term stable micron-level motion accuracy under high-speed conditions. At the same time, it eliminates the complex multi-platform interference avoidance control logic, reduces the difficulty of program development and debugging, and reduces non-processing waiting time. In addition, by setting up a first download platform and a second download platform to realize the alternating feeding of the lower substrate, the non-processing waiting time is further reduced, and finally the overall processing efficiency of the equipment is significantly improved.
[0016] The mass transfer processing method of this application can improve the processing efficiency during mass transfer by using the aforementioned mass transfer processing equipment. Attached Figure Description
[0017] The present application will now be described in further detail with reference to the accompanying drawings and embodiments.
[0018] Figure 1 A top view of a mass transfer processing equipment; Figure 2 A bottom view of a mass transfer processing equipment; Figure 3 This is a top view of the machine base, material storage, and download platform; Figure 4 This is a layout diagram of a mass transfer processing equipment.
[0019] Explanation of reference numerals in the attached figures: 11. Base; 12. First robotic arm; 13. Conveying platform; 14. Second robotic arm; 15. Processing moving platform; 16. First upper adsorption platform; 17. Second upper adsorption platform; 18. Third upper adsorption platform; 19. First downloading platform; 20. Second downloading platform; 21. Transfer device; 22. First material storage bin; 23. Second material storage bin; 24. Third material storage bin; 25. Fourth material storage bin; 26. Fifth material storage bin; 27. Spare material storage bin; 28. First camera; 29. Second camera; 30. First optical inspection device; 31. Second optical inspection device; 32. First alignment camera; 33. Second alignment camera; 111. First storage area; 112. Second storage area; 113. First waiting area; 114. Second waiting area; 115. Processing area; 131. Preset workstations; 151. Carrier; 152. First slide; 153. Second slide. Detailed Implementation
[0020] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this application are further described in detail below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0021] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "fixed," "linked," "communicated," "abutting," "clamping," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0022] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0023] Before discussing the exemplary embodiments in more detail, it should be noted that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe the operations (or steps) as sequential processes, many of these operations can be performed in parallel, concurrently, or simultaneously. Furthermore, the order of the operations can be rearranged. The process can be terminated when its operation is completed, but it may also have additional steps not included in the figures. The process may correspond to a method, function, procedure, subroutine, subroutine, etc.
[0024] Unless otherwise stated or defined, the term "and / or" as used in this invention includes any and all combinations of one or more of the associated listed items.
[0025] For ease of description, the horizontal direction mentioned below is the same as... Figure 1 Its vertical and horizontal directions are consistent; the vertical direction described below is the same as... Figure 1 Their projection directions are consistent.
[0026] like Figures 1 to 4 As shown, this embodiment provides a mass transfer processing apparatus, mainly used to transfer the die from an upper substrate to a lower substrate. The upper substrate is a native substrate, and the lower substrate is a target driving substrate.
[0027] The mass transfer processing equipment includes a base 11, a first robotic arm 12, a conveyor platform 13, a second robotic arm 14, a processing moving platform 15, a first upper adsorption platform 16, a second upper adsorption platform 17, a third upper adsorption platform 18, a first download platform 19, a second download platform 20, and a transfer device 21.
[0028] For ease of distinction, in this application, the upper substrate used for placement on the first upper adsorption stage 16 is called the first upper substrate, the upper substrate used for placement on the second upper adsorption stage 17 is called the second upper substrate, and the upper substrate used for placement on the third upper adsorption stage 18 is called the third upper substrate. Similarly, the lower substrate used for placement on the first download stage 19 is called the first lower substrate, and the lower substrate used for placement on the second download stage 20 is called the second lower substrate. In actual production, the first upper substrate corresponds to an R-type upper substrate, the second upper substrate corresponds to a G-type upper substrate, and the third upper substrate corresponds to a B-type upper substrate.
[0029] The machine base 11 is provided with a first storage area 111, a second storage area 112, a first waiting area 113, a second waiting area 114, and a processing area 115. The first storage area 111, the second storage area 112, the first waiting area 113, the second waiting area 114, and the processing area 115 are spatial areas defined on the machine base 11, so that different processing steps can be performed in each spatial area. Through the combination of various processing steps, the entire processing steps from loading to unloading are completed.
[0030] The first robotic arm 12 can move between the first storage area 111 and the first waiting area 113. The first robotic arm 12 can be mounted on a track to move between the first storage area 111 and the first waiting area 113, or the gripper at the end of the first robotic arm 12 can move between the first storage area 111 and the first waiting area 113. The first robotic arm 12 can be used to place the upper substrate stored in the first storage area 111 onto the conveyor platform 13 in the first waiting area 113, and can also be used to return the transferred upper substrate to the first storage area 111 or other recycling areas.
[0031] The transport stage 13 can move between the first waiting area 113 and the processing area 115. The transport stage 13 can deliver the upper substrate to the processing area 115.
[0032] The second robotic arm 14 can move between the second storage area 112 and the second waiting area 114. The second robotic arm 14 can be mounted on a track to move between the second storage area 112 and the second waiting area 114, or the gripper at the end of the second robotic arm 14 can move between the second storage area 112 and the second waiting area 114. Using the second robotic arm 14, the lower substrate stored in the second storage area 112 can be placed on the first download stage 19 or the second download stage 20 in the second waiting area 114.
[0033] A processing mobile platform 15 is installed in the processing area 115. The processing mobile platform 15 has a carrier 151 that can move along a first horizontal direction and a second horizontal direction that are perpendicular to each other. The carrier 151 moves by being installed at the output end of a two-dimensional or three-dimensional mobile module. The carrier 151 of this application mainly moves in the horizontal plane along the first horizontal straight line and the second horizontal straight line that are perpendicular to each other, thereby moving the first upper adsorption platform 16, the second upper adsorption platform 17, and the third upper adsorption platform 18 above the first download platform 19 or the second download platform 20.
[0034] The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 are all used to adsorb the upper substrate. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 can adsorb the upper substrate located below them. In this application, the first upper adsorption stage 16 is used to adsorb R-type upper substrates, the second upper adsorption stage 17 is used to adsorb G-type upper substrates, and the third upper adsorption stage 18 is used to adsorb B-type upper substrates. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 are all rotatably mounted on the carrier 151. Driven by the carrier 151, the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 can move in the horizontal plane, thereby adjusting to a suitable position to pick up or release the upper substrate.
[0035] The first download stage 19 and the second download stage 20 are used to carry the lower substrate. The first download stage 19 and the second download stage 20 can move between the second waiting area 114 and the processing area 115. The first download stage 19 and the second download stage 20 can work alternately to alternately transport the lower substrate to the processing area 115.
[0036] The transfer device 21 is mounted on the base 11 and is used to transfer the die from the upper substrate to the lower substrate. The transfer device 21 can be disassembled independently for easy assembly. The transfer device 21 can use a laser device such as an excimer laser. The processing output end of the excimer laser is located in the processing area 115 to realize the transfer of the die from the upper substrate. Excimer laser mass transfer uses the photochemical dissociation effect. The high photon energy output by the excimer laser directly cuts the chemical bonds of the sacrificial layer material, achieving a chip peeling and transfer process with no or extremely low thermal damage from the root cause. At the same time, the excimer laser has the characteristics of uniform spot energy distribution and high position control precision. Combined with the mask projection large spot parallel processing mode, the synchronous transfer of an entire array of chips can be completed in one go, which has higher throughput and better product consistency in array-level batch processing scenarios.
[0037] In this application, the movement of the first robotic arm 12, the conveying platform 13, the second robotic arm 14, the processing moving platform 15, the first upper adsorption platform 16, the second upper adsorption platform 17, the third upper adsorption platform 18, the first downloading platform 19, and the second downloading platform 20 can all be achieved using two-dimensional or three-dimensional linear modules.
[0038] In this application, the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 are all mounted on the carrier 151 of the processing moving platform 15. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 are integrated with the carrier 151 into an integrated linkage structure. The carrier 151 can drive the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 to move simultaneously. Compared with the prior art, where the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 can be independently moved and mounted on a fixed platform, this method is more efficient. By using the carrier 151 or crossbeam, this application can significantly shorten the span of the carrier 151 to ensure long-term stable micron-level motion accuracy of the mass transfer processing equipment under high-speed conditions. At the same time, it eliminates the complex motion interference avoidance control logic of the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18, reducing the difficulty of program development and debugging, and compressing non-processing waiting time. In addition, by setting the first download stage 19 and the second download stage 20 to realize the alternating loading of the lower substrate, the non-processing waiting time is further compressed, ultimately achieving a significant improvement in the overall processing efficiency of the equipment.
[0039] In one embodiment, the first storage area 111 is provided with a first material storage chamber 22, a second material storage chamber 23, and a third material storage chamber 24 for storing upper substrates. The first material storage chamber 22 stores R-type upper substrates, the second material storage chamber 23 stores G-type upper substrates, and the third material storage chamber 24 stores B-type upper substrates. The second storage area 112 is provided with a fourth material storage chamber 25 and a fifth material storage chamber 26 for storing lower substrates.
[0040] Optionally, the first storage area 111 is also equipped with a spare material warehouse 27. The spare material warehouse 27 can be selected to hold upper substrates that have not completed die transfer, including R-type upper substrates, G-type upper substrates, or B-type upper substrates, as needed; it can also be selected to hold upper substrates that have completed die transfer, including G-type upper substrates or B-type upper substrates, to achieve fully automated loading and unloading.
[0041] The first material storage 22, the second material storage 23, the third material storage 24, the fourth material storage 25, the fifth material storage 26, and the spare material storage 27 can all be disassembled independently for easy assembly.
[0042] In one embodiment, the transport platform 13 includes a transport platform movable along three mutually perpendicular linear directions and an adjustment platform rotatably mounted on the transport platform. The adjustment platform has a preset station 131 for placing the upper substrate. The transport platform can be mounted on a three-dimensional linkage module to achieve linkage in the up-down, left-right, and forward directions. The adjustment platform is rotatably mounted on the transport platform via a motor or other drive. The position and angle of the upper substrate are adjusted by the three-dimensional movement of the transport platform and the rotation of the adjustment platform, thereby achieving alignment and straightening of the upper substrate. Straightening is an angle pre-alignment correction operation in the transfer process, which refers to eliminating the relative torsion angle between the upper and / or lower substrates by rotating them, so that the crystal orientation and pattern array of the upper substrate's grains are completely parallel and aligned with the corresponding features of the lower substrate.
[0043] After the transport platform 13 aligns and straightens the upper substrate, it lifts the upper substrate onto the first upper adsorption platform 16, the second upper adsorption platform 17, and the third upper adsorption platform 18 on the carrier 151 by lifting.
[0044] Furthermore, there are six preset workstations 131 arranged at intervals. Since there are three types of upper substrates in the actual processing, this application has six preset workstations 131. Three of these preset workstations 131 can serve as transfer workstations for three upper substrates ready to be transported to the processing area 115, and the other three preset workstations 131 can serve as transfer workstations for three upper substrates that have completed processing. After the three upper substrates in the processing area 115 have completed processing, the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 can place these three upper substrates on three of the preset workstations 131 on the transport stage 13. At this time, the other three workstations on the transport stage 13 still hold three upper substrates ready for processing. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 can directly adsorb the three upper substrates ready for processing, reducing the waiting time of the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18, and improving processing efficiency.
[0045] Optionally, the mass transfer processing equipment also includes a first camera 28 for positioning and angle adjustment of the upper substrate. The first camera 28 is mounted on the base 11 and located on the moving path of the transport stage 13. After the first robot arm 12 places the upper substrate on the transport stage 13, the transport stage 13 moves to the position of the first camera 28. The first camera 28 is used to identify the position and placement angle of the upper substrate, thereby facilitating the alignment and straightening of the adjustment table of the transport stage 13, improving the efficiency and quality of subsequent processing.
[0046] In one embodiment, the mass transfer processing equipment further includes a second camera 29 for positioning the lower substrate. The second camera 29 is located on the movement path of the second robot arm 14. The second camera 29 is a coarse positioning camera or a wide-angle camera. After the second robot arm 14 picks up the lower substrate from the second storage area 112, it is transported to the second camera 29 for preliminary positioning. After preliminary positioning, the second robot arm 14 places the lower substrate on the first download stage 19 or the second download stage 20. The first download stage 19 and the second download stage 20 move alternately to transport the lower substrate to the processing area 115.
[0047] Optionally, the mass transfer processing equipment also includes a first optical inspection device 30 and a second optical inspection device 31. Both the first optical inspection device 30 and the second optical inspection device 31 are optical inspection devices (AOI inspection devices). The first optical inspection device 30 is located above the movement path of the first download stage 19, and the second optical inspection device 31 is located above the movement path of the second download stage 20. In this application, the first optical inspection device 30 can inspect the lower substrate on the first download stage 19 before and / or after processing, as needed; the second optical inspection device 31 can inspect the lower substrate on the second download stage 20 before and / or after processing, as needed.
[0048] Furthermore, the mass transfer processing equipment also includes a first alignment camera 32 for aligning the upper substrate and a second alignment camera 33 for aligning the lower substrate. Both the first alignment camera 32 and the second alignment camera 33 are located in the processing area 115. Both the first alignment camera 32 and the second alignment camera 33 are precision alignment cameras; before die transfer, the upper and lower substrates need to be precisely aligned to avoid misalignment after die transfer. When the first download stage 19 or the second download stage 20 moves to below the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 located in the processing area 115, the first alignment camera 32 confirms the positioning of the upper substrate, and the second alignment camera 33 confirms the positioning of the lower substrate. During the confirmation process, the positions of the first upper adsorption stage 16, the second upper adsorption stage 17, the third upper adsorption stage 18, and the first download stage 19 or the second download stage 20 can be coordinated to achieve alignment.
[0049] Optionally, in this application, the carrier 151 includes a first slide 152 that can be slidably mounted along the X direction and a second slide 153 that is slidably mounted on the first slide 152 along the Y direction. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 are all rotatably mounted on the second slide 153. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 are all mounted on the second slide 153 and move along the X and Y axes with the first slide 152 and the second slide 153. The first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18 can rotate independently, enabling the upper substrate to be straightened before processing, thereby compensating for angular errors.
[0050] This application also provides a mass transfer processing method, applied to the mass transfer processing equipment of any of the above embodiments. In the mass transfer processing method, some steps can be performed simultaneously or sequentially. For example, the loading process of the upper substrate, the loading process of the lower substrate, and the die transfer process can be performed simultaneously or sequentially. The mass transfer processing method includes the following steps: S100: The first robotic arm 12 moves to the first storage area 111, grabs the first upper substrate, the second upper substrate, and the third upper substrate, and places them on the conveyor platform 13 located in the first waiting area 113. The first storage bin 22, the second storage bin 23, and the third storage bin 24 in the first storage area 111 store the first upper substrate, the second upper substrate, and the third upper substrate, respectively. Among them, the first upper substrate, the second upper substrate, and the third upper substrate are R-type upper substrates, G-type upper substrates, and B-type upper substrates, respectively.
[0051] S101: The conveyor platform 13 moves to the bottom of the first camera 28, and the first camera 28 cooperates with the conveyor platform 13 to position and straighten the conveyor platform 13.
[0052] S110: The conveying stage 13 moves the first upper substrate, the second upper substrate, and the third upper substrate to below the carrier 151 of the processing area 115. Then the conveying stage 13 lifts the first upper substrate, the second upper substrate, and the third upper substrate. Finally, the first upper adsorption stage 16 adsorbs the first upper substrate, the second upper adsorption stage 17 adsorbs the second upper substrate, and the third upper adsorption stage 18 adsorbs the third upper substrate.
[0053] S120: The conveyor platform 13 returns to the first waiting area 113 and repeats the above steps S100 to S110 to perform buffer material preparation.
[0054] The above process is the loading process of the upper substrate.
[0055] S200: The second robotic arm 14 moves to the second storage area 112 to pick up the first and second lower substrates and moves them to the second waiting area 114. The second robotic arm 14 places the first lower substrate on the first download stage 19 and the second lower substrate on the second download stage 20. One second robotic arm 14 can be configured to alternately or simultaneously pick up the first and second lower substrates from the fourth and fifth material storage bins 25 and 26, or two second robotic arms 14 can be configured to alternately or simultaneously pick up the first and second lower substrates from the fourth and fifth material storage bins 25 and 26. This application uses one second robotic arm 14 to alternately pick up the first and second lower substrates from the fourth and fifth material storage bins 25 and 26, and then the placement of the first lower substrate on the first download stage 19 and the placement of the second lower substrate on the second download stage 20 are also performed alternately, saving costs while improving efficiency.
[0056] S201: After the second robotic arm 14 picks up the first lower substrate and the second lower substrate and places them in front of the first download stage 19 and the second download stage 20, the second robotic arm 14 moves the first lower substrate and the second lower substrate to the second camera 29 for initial positioning.
[0057] S202: The first download stage 19 moves the first lower substrate to the first optical inspection device 30 for inspection, and the second download stage 20 moves the second lower substrate to the second optical inspection device 31 for inspection. After inspection, the first and second lower substrates can be positioned and straightened according to the inspection results.
[0058] S210: The first download stage 19 moves the first lower substrate to below the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18. At this time, the first alignment camera 32 can be used to accurately position and confirm the first upper substrate, the second upper substrate, and the third upper substrate, and the second alignment camera 33 can be used to accurately position and confirm the first lower substrate, ensuring that the upper and lower substrates to be processed are aligned.
[0059] S210: The carrier 151 of the processing mobile platform 15 moves in coordination with the first download stage 19, and at the same time the transfer device 21 is activated. The transfer device 21 transfers the grains of the first upper substrate on the first upper adsorption stage 16, the grains of the second upper substrate on the second upper adsorption stage 17, and the grains of the third upper substrate on the third upper adsorption stage 18 to the first lower substrate.
[0060] S220: After the first substrate is processed, the first download stage 19 moves the processed first substrate to the second waiting area 114 and places it on the first download stage 19. The second robot arm 14 removes the processed first substrate and places the next unprocessed first substrate on the first download stage 19. After the processed first substrate is placed on the first download stage 19, it can be moved to the first optical inspection device 30 for inspection as needed.
[0061] S230: The second download stage 20 moves the second lower substrate to below the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18. At this time, the second alignment camera 33 is used to accurately position and confirm the second lower substrate, ensuring that the upper and lower substrates to be processed are aligned.
[0062] S240: The carrier 151 of the processing mobile platform 15 moves in coordination with the second download stage 20, and at the same time the transfer device 21 is activated. The transfer device 21 transfers the grains of the first upper substrate on the first upper adsorption stage 16, the grains of the second upper substrate on the second upper adsorption stage 17, and the grains of the third upper substrate on the third upper adsorption stage 18 to the second lower substrate.
[0063] S250: After the second lower substrate is processed, the second download stage 20 moves the processed second lower substrate to the second waiting area 114 and places it on the second download stage 20. The second robot arm 14 picks up the processed second lower substrate and places the next unprocessed second lower substrate on the second download stage 20. After the processed second lower substrate is delivered to the second download stage 20, it can be moved to the second optical inspection device 31 for inspection as needed.
[0064] S260: Repeat steps S210 to S250 above.
[0065] The above process refers to the substrate loading process and the grain transfer process.
[0066] S300: After the transfer of the first upper substrate grain on the first upper adsorption stage 16, the second upper substrate grain on the second upper adsorption stage 17, and the third upper substrate grain on the third upper adsorption stage 18 is completed, the transport stage 13 moves to the underside of the carrier 151 and carries the first upper substrate, the second upper substrate, and the third upper substrate.
[0067] The completion of die transfer includes the complete transfer of all dies on the first upper substrate, the second upper substrate, and the third upper substrate, as well as the transfer of dies that still remain on the first upper substrate, the second upper substrate, and the third upper substrate but do not require further processing.
[0068] S310: The conveying stage 13 conveys the next set of unprocessed first upper substrate, second upper substrate, and third upper substrate to the first upper adsorption stage 16, the second upper adsorption stage 17, and the third upper adsorption stage 18, respectively.
[0069] S320: The conveyor platform 13 transfers the first upper substrate, the second upper substrate, and the third upper substrate that have completed the transfer to the first waiting area 113. The first robot arm 12 takes away the first upper substrate, the second upper substrate, and the third upper substrate that have completed the transfer, and then puts them back into the corresponding storage box.
[0070] The above process is the unloading process of the upper substrate.
[0071] All of the above steps can be performed in combination.
[0072] The mass transfer processing equipment and method of this application have the following advantages: 1. The first, second, and third upper adsorption stages share a single carrier, while the first and second download stages can operate independently. This eliminates the need for frequent loading and unloading of the upper and lower substrates during processing, improving processing efficiency. The first and second download stages work alternately, allowing one lower substrate to be processed while the other can be inspected and loaded / unloaded, thus improving processing interaction efficiency.
[0073] 2. The conveyor stage has six preset stations, which can simultaneously load and unload two sets of native substrates, each containing three types of upper substrates, which can greatly reduce loading and unloading time.
[0074] 3. The first, second, and third upper adsorption stages can achieve X-axis and Y-axis movement by sharing a single carrier, which simplifies the control program and avoids the problem of interference between the first, second, and third upper adsorption stages that may be caused by complex independent movements.
[0075] The technical principles of this application have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this application without inventive effort, and these embodiments will all fall within the scope of protection of this application.
Claims
1. A mass transfer processing device, characterized in that, include: The machine base (11) is provided with a first storage area (111), a second storage area (112), a first waiting area (113), a second waiting area (114), and a processing area (115). The first robotic arm (12) can move between the first storage area (111) and the first waiting area (113); The conveyor platform (13) can move between the first waiting area (113) and the processing area (115); The second robotic arm (14) can move between the second storage area (112) and the second waiting area (114); A processing mobile platform (15) is installed in the processing area (115); the processing mobile platform (15) has a carrier (151) that can move along a first horizontal direction and a second horizontal direction that are perpendicular to each other. The first upper adsorption stage (16), the second upper adsorption stage (17), and the third upper adsorption stage (18) are all used to adsorb the upper substrate; the first upper adsorption stage (16), the second upper adsorption stage (17), and the third upper adsorption stage (18) are all rotatably mounted on the carrier (151). The first download station (19) and the second download station (20) are used to carry the lower substrate; the first download station (19) and the second download station (20) can move between the second waiting area (114) and the processing area (115); as well as A transfer device (21) is mounted on the base (11) and is used to transfer the die of the upper substrate to the lower substrate.
2. The mass transfer processing equipment according to claim 1, characterized in that, The first storage area (111) is provided with a first material warehouse (22), a second material warehouse (23), and a third material warehouse (24) for storing the upper substrate; the second storage area (112) is provided with a fourth material warehouse (25) and a fifth material warehouse (26) for storing the lower substrate.
3. The mass transfer processing equipment according to claim 2, characterized in that, The first storage area (111) is also equipped with a spare material warehouse (27).
4. The mass transfer processing equipment according to claim 1, characterized in that, The conveying platform (13) includes a conveying platform that can move along three mutually perpendicular straight lines and an adjustment platform that is rotatably mounted on the conveying platform; the adjustment platform is provided with a preset station (131) for placing the upper substrate.
5. The mass transfer processing equipment according to claim 4, characterized in that, There are six preset workstations (131) arranged at intervals.
6. The mass transfer processing equipment according to claim 4, characterized in that, It also includes a first camera (28) for positioning and angle adjustment of the upper substrate; the first camera (28) is mounted on the base (11) and located on the moving path of the transport platform (13).
7. The mass transfer processing equipment according to any one of claims 1 to 6, characterized in that, It also includes a second camera (29) for positioning the lower substrate; the second camera (29) is located on the movement path of the second robot (14).
8. The mass transfer processing equipment according to any one of claims 1 to 6, characterized in that, It also includes a first optical detection device (30) and a second optical detection device (31); the first optical detection device (30) is located above the movement path of the first download station (19), and the second optical detection device (31) is located above the movement path of the second download station (20).
9. The mass transfer processing equipment according to any one of claims 1 to 6, characterized in that, It also includes a first alignment camera (32) for aligning the upper substrate and a second alignment camera (33) for aligning the lower substrate; both the first alignment camera (32) and the second alignment camera (33) are located in the processing area (115).
10. A mass transfer processing method, characterized in that, The mass transfer processing equipment is applied to any one of claims 1 to 9; the mass transfer processing method includes: S100: The first robotic arm (12) moves to the first storage area (111) to grab the first upper substrate, the second upper substrate, and the third upper substrate and place them on the conveyor platform (13) located in the first waiting area (113); S110: The conveying platform (13) moves the first upper substrate, the second upper substrate, and the third upper substrate to below the carrier (151). The first upper adsorption platform (16) adsorbs the first upper substrate, the second upper adsorption platform (17) adsorbs the second upper substrate, and the third upper adsorption platform (18) adsorbs the third upper substrate. S120: The conveyor platform (13) returns to the first waiting area (113) and repeats the above steps S100 to S110; S200: The second robotic arm (14) moves to the second storage area (112) to grab the first lower substrate and the second lower substrate and moves to the second waiting area (114). The second robotic arm (14) places the first lower substrate on the first downloading station (19) and the second robotic arm (14) places the second lower substrate on the second downloading station (20). S210: The first download stage (19) drives the first lower substrate to move below the first upper adsorption stage (16), the second upper adsorption stage (17), and the third upper adsorption stage (18); S210: The carrier (151) of the processing moving platform (15) moves in coordination with the first download stage (19), and at the same time, the transfer device (21) is activated. The transfer device (21) transfers the grains of the first upper substrate on the first upper adsorption stage (16), the grains of the second upper substrate on the second upper adsorption stage (17), and the grains of the third upper substrate on the third upper adsorption stage (18) to the first lower substrate. S220: After the first substrate is processed, the first download stage (19) moves the processed first substrate to the second waiting area (114), the second robot (14) takes away the processed first substrate, and the second robot (14) places the next unprocessed first substrate on the first download stage (19). S230: The second download stage (20) drives the second lower substrate to move below the first upper adsorption stage (16), the second upper adsorption stage (17), and the third upper adsorption stage (18); S240: The carrier (151) of the processing moving platform (15) moves in coordination with the second download stage (20), and at the same time, the transfer device (21) is activated. The transfer device (21) transfers the grains of the first upper substrate on the first upper adsorption stage (16), the grains of the second upper substrate on the second upper adsorption stage (17), and the grains of the third upper substrate on the third upper adsorption stage (18) to the second lower substrate. S250: After the second lower substrate is processed, the second download stage (20) moves the processed second lower substrate to the second waiting area (114), the second robot (14) takes away the processed second lower substrate, and the second robot (14) places the next unprocessed second lower substrate on the second download stage (20). S260: Repeat steps S210 to S250 above; S300: After the transfer of the first upper substrate grain on the first upper adsorption stage (16), the second upper substrate grain on the second upper adsorption stage (17), and the third upper substrate grain on the third upper adsorption stage (18) is completed, the transport stage (13) moves to the underside of the carrier (151) and carries the first upper substrate, the second upper substrate, and the third upper substrate. S310: The conveying platform (13) conveys the next set of unprocessed first upper substrate, second upper substrate and third upper substrate to the first upper adsorption platform (16), the second upper adsorption platform (17) and the third upper adsorption platform (18) respectively. S320: The conveying platform (13) transfers the first upper substrate, the second upper substrate, and the third upper substrate that have completed the transfer to the first waiting area (113), and the first robot (12) takes away the first upper substrate, the second upper substrate, and the third upper substrate that have completed the transfer.