Multifunctional polishing and grinding clamp

Abstract

The multifunctional polishing and grinding clamp comprises a clamp body, an angle block assembly and an upper disc base, the clamp body is fixed to the upper disc base, a fixing groove is formed in the clamp body, the angle block assembly is installed in the fixing groove, a metal pressing strip is further fixed to one inclined face of the clamp body, and the angle block assembly is installed in the metal pressing strip. The metal pressing strip corresponds to the fixing groove, a threaded hole is formed in the metal pressing strip, and an inclined included angle is formed between the central axis of the threaded hole and the horizontal plane of the fixing groove. According to the grinding and polishing device, the grinding and polishing requirements of different end face angles of chips and optical fiber arrays of different sizes are met by replacing different angle block assemblies. For new grinding and polishing samples, only proper angle block assemblies need to be designed and machined, manufacturing of a large number of grinding and polishing clamps of complex structures is avoided, the design and machining cost can be greatly reduced, waste is avoided, universality is high, operability is high, and the end face grinding and polishing requirements of chips and optical fiber arrays can be met.

Description

Technical Field

[0001] The present application belongs to the technical field of chemical mechanical grinding and polishing, and specifically relates to a multifunctional grinding and polishing fixture. Background Art

[0002] In recent years, planar optical waveguide chips, especially silicon photonic chips, have developed rapidly. Silicon photonic chips combine the excellent properties of electrons and light waves and can be applied to industries such as optical communications, smart driving, consumer electronics, and photonic computing. Optical chips require the input and output of optical signals. There are two methods: surface grating coupling and end-face coupling. The most commonly used method is end-face coupling with optical fiber arrays. Before the end-face coupling of optical chips and optical fiber arrays, the end faces of the chips and optical fibers need to be chemically mechanically polished (CMP) to reduce the surface roughness and polish the end faces to an optimal coupling angle as required, thereby reducing end-face coupling losses. In traditional semiconductor processes, CMP is usually used to grind and polish the upper and lower surfaces of chips, but grinding and polishing the end faces of optical chips and optical fiber arrays requires the design and manufacture of special grinding and polishing fixtures.

[0003] The existing optical chip and fiber array end face polishing fixtures must be adapted to the polishing equipment. Due to the different chip sizes and required polishing angles, different polishing fixtures are usually designed and manufactured for different types of chips or fiber arrays, as well as their different sizes and different end face polishing angle requirements. Since the chip end faces require polishing angles of 0° / 7° / 8° / 10° / 16.7°, etc., and the fiber array has different channel numbers of 1 to 96ch, in order to achieve the end face polishing requirements of all angles and sizes, it is often necessary to manufacture a large number of different polishing fixtures, which will cost a lot of money and time, and easily cause waste. Utility Model Content

[0004] In view of the above-mentioned shortcomings or deficiencies of the prior art, the technical problem to be solved by the present application is to provide a multifunctional polishing fixture.

[0005] To solve the above technical problems, this application is implemented through the following technical solutions:

[0006] The present application proposes a multifunctional polishing fixture, comprising: a fixture body, an angle block assembly and an upper plate base, wherein the fixture body is fixed on the upper plate base, the fixture body is provided with a fixing groove, the angle block assembly is installed in the fixing groove, a metal strip is also fixed on an inclined surface of the fixture body, the metal strip corresponds to the fixing groove, and a threaded hole is provided on the metal strip, and the central axis of the threaded hole forms an inclined angle with the horizontal plane of the fixing groove.

[0007] Furthermore, the fixing groove is configured as a T-shaped groove, and the two surfaces of the T-shaped groove are respectively a horizontal reference surface and a vertical reference surface, and the vertical reference surface is provided with two threaded holes for fixing the angle block assembly.

[0008] Furthermore, the fixture body is provided with a step structure and a slide groove structure which are slidably connected to the grinding and polishing equipment.

[0009] Furthermore, a cylindrical hole fixedly connected to the upper plate base is provided at the center of the clamp body.

[0010] Furthermore, the angle block assembly is configured as a T-shaped structure that matches and connects to the T-shaped groove, and the T-shaped structure is fixedly installed in the T-shaped groove.

[0011] Furthermore, the upper and lower surfaces of the angle block assembly are horizontal planes, the back surface is a vertical surface, and the front surface is a sample mounting surface. The angle between the sample mounting surface and the horizontal plane is processed to be 0°, 7°, 8°, 10°, or 16.7°.

[0012] Furthermore, the angle block assembly includes a chip angle block assembly and a fiber array angle block assembly.

[0013] Furthermore, the chip angle block assembly includes: two first through holes adapted to the T-shaped grooves, a first groove surface for mounting the sample, two metal pins and a plastic partition, on which two second through holes adapted to the metal pins are arranged.

[0014] Furthermore, the optical fiber array angle block assembly includes: two girdled through holes, a plurality of second groove surfaces for mounting samples, edges are provided on both sides of the second groove surfaces, the edges are greater than or equal to 90° from the lower edge of the sample mounting surface, and the optical fiber array angle block assembly moves left and right in the T-shaped groove through the girdled through holes.

[0015] Furthermore, the upper plate base includes: a base, a first cylindrical step and a second cylindrical step, the bottom surface of the clamp body is placed on the first cylindrical step, there is a threaded hole on the second cylindrical step, and the clamp body is fixed on the second cylindrical step.

[0016] Compared with the prior art, this application has the following technical effects:

[0017] This application achieves the grinding and polishing requirements of different end face angles of chips and optical fiber arrays of different sizes by replacing different angle block components. For new grinding and polishing samples, only the appropriate angle block components need to be designed and processed, avoiding the production of a large number of complex grinding and polishing fixtures, which can greatly reduce the design and processing costs and avoid waste. The fixture has high versatility and strong operability, and can meet the end face grinding and polishing requirements of chips and optical fiber arrays. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0019] Figure 1 : A schematic structural diagram of a multifunctional polishing fixture according to an embodiment of the present application;

[0020] Figure 2 : An exploded view of a multifunctional polishing fixture according to an embodiment of the present application;

[0021] Figure 3 : A schematic structural diagram of a clamp body according to an embodiment of the present application;

[0022] Figure 4 : A schematic diagram of the structure of the connection between the clamp body and the upper plate base in one embodiment of the present application;

[0023] Figure 5 : A schematic diagram of the structure of an angle block assembly according to an embodiment of the present application;

[0024] Figure 6 : An exploded view of a multi-chip angle block assembly according to an embodiment of the present application.

[0025] In the figure: 1—clamp body, 11—slide groove structure, 12—step structure, 13—T-shaped groove, 14—cylindrical hole, 2—angle block assembly, 21—chip angle block assembly, 211—plastic partition, 2111—second through hole, 212—metal pin, 213—first groove surface, 214—first through hole, 215—sample, 22—optical fiber array angle block assembly, 221—second groove surface, 222—waist through hole, 223—side, 23—metal strip, 3—upper plate base, 31—base, 32—second cylindrical step, 33—first cylindrical step, 34—threaded hole. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] like Figure 1 to Figure 2As shown, in one of the embodiments of the present application, the present application proposes a multifunctional polishing fixture, including: a fixture body 1, an angle block assembly 2 and an upper plate base 3, wherein the fixture body 1 is fixed on the upper plate base 3, the fixture body 1 is provided with a fixing groove, the angle block assembly 2 is installed in the fixing groove, and a metal pressure strip 23 is also fixed on an inclined surface of the fixture body 1, the metal pressure strip 23 corresponds to the fixing groove, and a threaded hole is provided on the metal pressure strip 23, and the center axis of the threaded hole forms an inclined angle with the horizontal plane of the fixing groove. The metal pressure strip 23 is fixed to the fixing groove by passing a screw through the threaded hole, and in order to prevent the chip installed on the angle block assembly 2 from being damaged during the installation process of the angle block assembly 2, the screw used in the threaded hole is a set screw with a plastic head.

[0028] Preferably, in this embodiment, the metal strip 23 is fixed on an inclined surface of the fixture body 2 so that the central axis of the threaded hole on the metal strip 23 forms an angle of about 8° with the horizontal plane of the fixing groove. Through the above arrangement, it is easier to clamp samples to be polished at different angles.

[0029] Furthermore, in this embodiment, the fixing groove is configured as a T-shaped groove 13 , and the two surfaces of the T-shaped groove 13 are respectively a horizontal reference plane and a vertical reference plane, and the vertical reference plane is provided with two threaded holes for fixing the angle block assembly 2 .

[0030] Furthermore, in this embodiment, the fixture body 2 is provided with a step structure 12 and a slide groove structure 11 which are slidably connected to the grinding and polishing equipment.

[0031] Furthermore, if Figure 3 As shown, in this embodiment, a cylindrical hole 14 fixedly connected to the upper plate base 3 is provided at the center of the clamp body 2 .

[0032] Furthermore, in this embodiment, the upper plate base 3 includes: a base 31, a first cylindrical step 33 and a second cylindrical step 32, the bottom surface of the clamp body 1 is placed on the first cylindrical step 33, the second cylindrical step 32 has a threaded hole 34, and the clamp body 1 is fixed on the second cylindrical step 32.

[0033] Furthermore, in this embodiment, the angle block assembly 2 is configured as a T-shaped structure that matches and connects to the T-shaped groove 13 , and the T-shaped structure is fixedly installed in the T-shaped groove 13 .

[0034] Furthermore, in this embodiment, the upper and lower surfaces of the angle block assembly 2 are horizontal planes, the back surface is a vertical surface, and the front surface is a sample mounting surface. The angle between the sample mounting surface and the horizontal plane is processed to be 0°, 7°, 8°, 10° or 16.7°.

[0035] Furthermore, if Figure 5 and Figure 6 As shown, in this embodiment, the angle block assembly 2 includes a chip angle block assembly 21 and a fiber array angle block assembly 22.

[0036] Furthermore, in this embodiment, the chip angle block assembly 21 includes: two first through holes 214 adapted to the T-shaped groove 13, a first groove surface 213 for mounting a sample 215, two metal pins 212 and a plastic partition 211, and the plastic partition 211 is provided with two second through holes 21111 adapted to the metal pins 212.

[0037] Furthermore, in the present embodiment, the optical fiber array angle block assembly 22 includes: two circumferential through holes 222, a plurality of second groove surfaces 221 for mounting samples, and edges 223 are provided on both sides of the second groove surfaces 221, and the angle between the edges 223 and the lower edge of the sample mounting surface is greater than or equal to 90°, and the optical fiber array angle block assembly 22 moves left and right in the T-shaped groove 13 through the circumferential through holes 222.

[0038] Furthermore, in the present embodiment, the optical fiber array angle block assembly 22 can be moved left and right in the T-groove 13 of the fixture body 1 through the waist through hole 222. For optical fiber arrays with different numbers of channels (different widths), the optical fiber array angle block assembly 22 can be moved horizontally to allow the fixing screws in the metal strip 23 of the fixture body 1 to be aligned with the center of the optical fiber array to prevent the optical fiber array from moving during the grinding and polishing process. The optical fiber array angle block can clamp optical fiber array samples with different numbers of channels of 1 to 96ch.

[0039] This application proposes a method for using a multifunctional polishing fixture:

[0040] First, according to the type of sample to be ground and polished and the end face angle to be polished, select the corresponding angle block assembly 2.

[0041] Furthermore, the angle block assembly 2 is placed in the T-groove 13 of the fixture body 1, the upper plane of the angle block assembly 2 is tightly attached to the horizontal reference plane of the T-groove 13, the back side of the angle block assembly 2 is tightly attached to the vertical reference plane of the T-groove 13, and the two fixing screws are tightened.

[0042] Furthermore, the fixture body 1 is placed on the first cylindrical step 33 of the upper plate base 3 and is fixed to the threaded hole 34 of the second cylindrical step 32 by screws passing through the cylindrical hole 14 of the fixture body 1 .

[0043] Furthermore, the chip or fiber array sample is placed with its end face facing downward into the sample groove surface of the chip angle block assembly 21 or the fiber array angle block assembly 22, with one edge or one surface of the end face in contact and close contact with the upper surface of the large disc of the upper plate base, and the fixing screws in the metal strip 23 are tightened, with the plastic head at the front end of the fixing screws pressing against the plastic partition of the chip or the surface of the fiber array.

[0044] Furthermore, the fixing screws on the second cylindrical step 32 are loosened to remove the clamp body 1 from the upper plate base 3 .

[0045] Furthermore, the fixture body 1 is fixed by means of the step structure 12 and the slide groove structure 11 which are slidably connected to the grinding and polishing equipment, and the end surface of the sample is ground and polished.

[0046] Furthermore, after polishing is completed, the set screws in the metal pressure strip 23 are loosened and the sample is removed.

[0047] Compared with the prior art, this application has the following technical effects:

[0048] This application achieves the grinding and polishing requirements of different end face angles of chips and optical fiber arrays of different sizes by replacing different angle block components. For new grinding and polishing samples, only the appropriate angle block components need to be designed and processed, avoiding the production of a large number of complex grinding and polishing fixtures, which can greatly reduce the design and processing costs and avoid waste. The fixture has high versatility and strong operability, and can meet the end face grinding and polishing requirements of chips and optical fiber arrays.

[0049] The manufacturing methods involved in the above embodiments are only examples for illustration and do not limit the protection scope of the present application.

[0050] In the description of this application, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0051] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0052] In the description of this embodiment, the terms "upper", "lower", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present application. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0053] The above embodiments are only used to illustrate the technical solution of the present application but not to limit it. The present application is described in detail with reference to the preferred embodiments. It should be understood by those skilled in the art that the technical solution of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application, and should be included in the scope of the claims of the present application.

Claims

1. A multifunctional polishing fixture, characterized in that: include: A clamp body, an angle block assembly and an upper plate base, wherein the clamp body is fixed on the upper plate base, the clamp body is provided with a fixing groove, the angle block assembly is installed in the fixing groove, a metal strip is also fixed on an inclined surface of the clamp body, the metal strip corresponds to the fixing groove, and a threaded hole is provided on the metal strip, and the central axis of the threaded hole forms an inclined angle with the horizontal plane of the fixing groove.

2. The multifunctional polishing fixture according to claim 1, characterized in that: The fixing groove is configured as a T-shaped groove, and the two surfaces of the T-shaped groove are respectively a horizontal reference surface and a vertical reference surface, and the vertical reference surface is provided with two threaded holes for fixing the angle block assembly.

3. The multifunctional polishing fixture according to claim 1, characterized in that: The fixture body is provided with a step structure and a slide groove structure which are slidably connected with the grinding and polishing equipment.

4. The multifunctional polishing fixture according to claim 1, characterized in that: The center of the clamp body is provided with a cylindrical hole fixedly connected to the upper plate base.

5. The multifunctional polishing fixture according to claim 2, characterized in that: The angle block assembly is configured as a T-shaped structure that matches and connects to the T-shaped groove, and the T-shaped structure is fixedly installed in the T-shaped groove.

6. The multifunctional polishing fixture according to claim 1, characterized in that: The upper and lower surfaces of the angle block assembly are horizontal surfaces, the back surface is a vertical surface, and the front surface is a sample mounting surface. The angle between the sample mounting surface and the horizontal surface is processed to be 0°, 7°, 8°, 10°, or 16.7°.

7. The multifunctional polishing fixture according to claim 1, characterized in that: The angle block assembly includes a chip angle block assembly and a fiber array angle block assembly.

8. The multifunctional polishing fixture according to claim 7, characterized in that: The chip angle block assembly includes: two first through holes adapted to the T-shaped grooves, a first groove surface for mounting the sample, two metal pins and a plastic partition, on which two second through holes adapted to the metal pins are arranged.

9. The multifunctional polishing fixture according to claim 8, characterized in that: The optical fiber array angle block assembly includes: two waisted through holes, a plurality of second groove surfaces for mounting samples, and edges are arranged on both sides of the second groove surfaces, and the angle between the edges and the lower edge of the sample mounting surface is greater than or equal to 90°. The optical fiber array angle block assembly moves left and right in the T-shaped groove through the waisted through holes.

10. The multifunctional polishing fixture according to any one of claims 1 to 7, characterized in that: The upper plate base includes: a base, a first cylindrical step and a second cylindrical step, the bottom surface of the clamp body is placed on the first cylindrical step, there is a threaded hole on the second cylindrical step, and the clamp body is fixed on the second cylindrical step.

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