Quartz Dome auxiliary clamping, taking and placing tool

Abstract

The utility model relates to the technical field of semiconductor production equipment, in particular to a quartz Dome auxiliary clamping, taking and placing tool which comprises a lifting connecting plate, a vacuum suction cup piece is installed in the lifting connecting plate through a connecting installation piece and comprises a silica gel suction cup and a manual air pump column, lifting supporting shafts are arranged in support supporting feet, and the silica gel suction cup and the manual air pump column are arranged on the lifting supporting shafts. The two sides of the lifting connecting plate are both in threaded connection with hand screwing bolts. According to the tool provided by the utility model, the quartz Dome can be moved away from equipment more safely and more conveniently; the mounting position of the positioning stud can be adjusted from the opening position of the side wall of the supporting leg of the bracket, so that the positioning stud can be more smoothly and quickly pressed and mounted in a corresponding positioning hole in equipment; due to the diversity of position installation of the vacuum chuck piece, the vacuum chuck piece can be flexibly used in the working process of breaking vacuum and improving quartz Dome separation equipment; the mounting groove can play a role in limiting the lifting support shaft; and the arranged wear-resistant cover can play a role in reducing wear, so that the use is facilitated.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production equipment, and in particular relates to a quartz Dome auxiliary clamping and placing tool. Background Art

[0002] Semiconductor CVD equipment generally uses quartz as the material of the reaction chamber. During the maintenance of the equipment, the equipment engineer needs to first destroy the seal between the quartz upper dome and the base ring, then carefully remove the quartz upper cover (Dome) and perform periodic maintenance on the chamber. Considering the fragility of the quartz material and the inconvenience of destroying the seal between the quartz upper dome and the base ring, the traditional method is to use general tools to break the seal along the edge of the quartz dome and remove the dome. This method has great risks (the fragility of the quartz dome and the easy destruction of the sealing ring) and is not convenient to use. Utility Model Content

[0003] The utility model aims to provide a quartz Dome auxiliary clamping and placing tool to solve the problems raised in the above background technology.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A quartz Dome auxiliary clamping and placing tool, comprising:

[0006] The lifting connecting plate is provided with a vacuum suction cup component installed inside the lifting connecting plate through a connecting mounting part, which is used to suck up the quartz upper Dome. The vacuum suction cup component includes a silicone suction cup and a manual air pump column. The lower end of the manual air pump column is connected to the silicone suction cup, which is convenient for sucking up the quartz upper Dome. The bottom ends of both sides of the lifting connecting plate are provided with bracket legs for supporting. The interior of the bracket legs is provided with a lifting support shaft. The interior of the bracket legs is provided with a mounting groove that matches the lifting support shaft. Both sides of the lifting connecting plate are threadedly connected with hand screw bolts, and the lower end of the hand screw bolt extends into the interior of the mounting groove. When in use, the hand screw bolt is twisted to make the end of the hand screw bolt rotate downward and push the lower end of the lifting support shaft to extend out of the interior of the bracket legs. Through the action force and reaction force, the bracket legs and the lifting connecting plate can be lifted up, and then the quartz upper Dome sucked by the silicone suction cup can be lifted up, so that the quartz Dome can be safely separated from the base ring Base-ri ng, and slowly lift it to a position, the quartz dome and the tooling can be separated from the equipment as a whole.

[0007] Preferably, the lifting support shaft is set to a T-shape, so that when the end of the lifting support shaft contacts the mounting groove, it can be restricted by the mounting groove matched therewith, preventing the lifting support shaft from escaping from the inside of the bracket support foot, and in the process of the quartz dome being lifted, when the lower end surface of the bracket support foot mounting groove contacts the upper end surface of the lifting support shaft, a mechanical limit is generated and the quartz dome cannot be lifted further. Here, the position protection in the process of destroying the seal to lift the dome is considered, so that the dome cannot continue to rise after being lifted to the mechanical limit position to avoid contact and collision with the lifting connecting plate and cause danger. In addition, the bracket support foot can also be made of non-metallic material to prevent the quartz dome from shaking left and right during the lifting process to cause collision risk.

[0008] Preferably, a wear-resistant cover is provided at the upper end of the lifting support shaft, and a stud is connected to the lower end of the wear-resistant cover. A matching hole matching the stud is opened inside the upper end of the lifting support shaft to facilitate the installation of the wear-resistant cover. The wear-resistant cover is rotatably connected to the lifting support shaft through the stud. Considering the rotation of the hand-tightening bolt, if the bottom surface of its lower end is in direct contact with the lifting support shaft during its downward rotation, it is easy to cause wear and damage during long-term use. Therefore, the wear-resistant cover is designed so that its upper end surface and the lower end of the hand-tightening bolt rotate and rub against each other during the downward rotation, thereby reducing wear.

[0009] Preferably, an opening is provided on one side of the bracket leg, and a chord length of the opening is smaller than a diameter of an upper end of the lifting support shaft.

[0010] Preferably, a positioning stud is installed at the bottom end of the lifting support shaft to facilitate cooperation with the corresponding positioning hole on the equipment to achieve installation and positioning.

[0011] Preferably, the connecting mounting member includes an installing clamping plate, a matching groove matching with the installing clamping plate is formed on one side of the lifting connecting plate, the installing clamping plate is connected to the lifting connecting plate by bolts, and the installing clamping plate and the lifting connecting plate have corresponding sides each having a plurality of clamping grooves matching with the manual air pump column, the clamping groove is arranged in an arc shape, and the manual air pump column can be clamped and fixed by placing the manual air pump column between the clamping grooves of the installing clamping plate and the lifting connecting plate, thereby playing an installation and fixing role.

[0012] Preferably, the clamping grooves are arranged in three groups, the manual air pump column is located inside the clamping grooves of the middle group, and the clamping grooves of the middle group are located in the middle of the lifting connecting plate, that is, the vacuum suction cup is installed in the middle position of the lifting connecting plate. When in use, by simultaneously turning the hand bolts on both sides to make them rotate downward, the lifting connecting plate and the bracket legs fixed on both sides will rise upward to resist the force and elongation of the hand bolts acting on the wear-resistant cover, and at this time, the vacuum suction cup will also be subjected to a uniform upward lifting force on the left and right due to the clamping force of the installation clamping plate and the lifting connecting plate, so that the quartz dome can be safely separated from the seal between the base ring and the base ring as the hand bolts on both sides rotate, and after being slowly lifted to a position, the quartz dome and the tooling can be separated from the equipment as a whole.

[0013] Preferably, the clamping grooves are arranged in three groups, the manual air pump column is located inside the outer group of clamping grooves, the middle group of clamping grooves is located in the middle of the lifting connecting plate, and the outer group of clamping grooves is located outside the middle group of clamping grooves.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. Compared with the method of using tools to bend along the edge of the quartz dome to destroy the seal with the base ring of the equipment, considering the fragility of quartz and the vulnerability of the sealing ring, the tool of the present application can more safely and conveniently remove the quartz dome from the equipment, thereby facilitating equipment maintenance;

[0016] 2. The installation position of the positioning stud can be adjusted from the opening position of the side wall of the bracket support leg, so that it can be pressed and installed inside the corresponding positioning hole on the equipment more smoothly and quickly, and the chord length of the opening is smaller than the diameter of the upper end of the lifting support shaft, so the wear-resistant cover, lifting support shaft and positioning stud fixed as a whole will not fall out from the opening position, fully considering the convenience and integrity of the tooling design;

[0017] 3. The variety of vacuum cup installation positions allows for flexible use in the process of breaking the vacuum and lifting the quartz dome out of the equipment, allowing the tooling to adapt to a variety of application scenarios and taking into account the diversity of use;

[0018] 4. When the quartz dome is lifted, the mounting groove can limit the lifting support shaft 6. At this time, a mechanical limit occurs and the quartz dome cannot be lifted further. Here, the position protection is considered in the process of breaking the seal to lift the quartz dome, so that the quartz dome cannot continue to rise after being lifted to the mechanical limit position to avoid contact and collision with the lifting connection plate, which may cause danger. Here, the safety characteristics of the tooling are fully considered;

[0019] 5. The wear-resistant cover can reduce wear and avoid direct contact between the hand-tightened bolts and the lifting support shaft, which may cause wear and damage. The service life and durability of the tooling are taken into consideration here, which is conducive to its use. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is another perspective schematic diagram of the utility model;

[0022] Figure 3 It is a partial cross-sectional view of the utility model;

[0023] In the figure: 1. Lifting connecting plate; 2. Installing clamping plate; 3. Vacuum suction cup; 31. Manual air pump column; 32. Silicone suction cup; 4. Hand-tightening bolts; 5. Wear-resistant cover; 6. Lifting support shaft; 7. Bracket support foot; 8. Positioning stud. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Embodiment 1:

[0026] See also Figure 1-Figure 3 As shown, a quartz Dome auxiliary clamping and placing tooling includes:

[0027] The lifting connecting plate 1 is provided with a vacuum suction cup 3 installed inside the lifting connecting plate 1 through a connecting mounting part, which is used to suck up the quartz upper Dome. The vacuum suction cup 3 includes a silicone suction cup 32 and a manual air pump column 31. The lower end of the manual air pump column 31 is connected with a silicone suction cup 32, which is convenient for sucking up the quartz upper Dome. The bottom ends of both sides of the lifting connecting plate 1 are provided with support legs 7 to play a supporting role. The interior of the support legs 7 is provided with a lifting support shaft 6. The interior of the support legs 7 is provided with a mounting groove that matches the lifting support shaft 6. Both sides of the lifting connecting plate 1 are threadedly connected with a hand screw 4, and the lower end of the hand screw 4 extends to the interior of the mounting groove. When in use, by twisting the hand screw 4, the end of the hand screw 4 is rotated downward and the lower end of the lifting support shaft 6 is pushed out of the interior of the support legs 7. Through the action force and reaction force, the support legs 7 and the lifting connecting plate 1 can be lifted up, and then the quartz upper Dome sucked by the silicone suction cup 32 can be lifted, so that the quartz Dome can be safely separated from the base ring Base-r After the seal between the two pieces is tightened and slowly lifted to a certain position, the Quartz Dome and the tooling can be separated from the equipment as a whole.

[0028] refer to Figure 1-Figure 3 As shown, the lifting support shaft 6 is set to a T shape, and the mounting groove is set to a T shape that matches the lifting support shaft 6 (that is, the upper end of the T-shaped mounting groove can match the upper end of the lifting support shaft 6, and the lower end of the T-shaped mounting groove can match the lower end of the lifting support shaft 6, and the opening position hereinafter is also set at the upper end position of the mounting groove), which can play a limiting role, so that when the end of the lifting support shaft 6 contacts the mounting groove, it can be restricted by the mounting groove that matches it, preventing the lifting support shaft 6 from escaping from the inside of the bracket support foot 7, and in the process of the quartz dome being lifted, when the lower end surface of the mounting groove of the bracket support foot 7 contacts the upper end surface of the lifting support shaft 6, a mechanical limit is generated at this time, and the quartz dome cannot be lifted further. Here, the position protection in the process of destroying the seal to lift the dome is considered, so that the dome cannot continue to rise after being lifted to the mechanical limit position to avoid contact and collision with the lifting connecting plate 1 to cause danger. In addition, the bracket support foot 7 can also be made of non-metallic material to prevent the quartz dome from shaking left and right during the lifting process to cause collision risks.

[0029] refer to Figure 1-Figure 3As shown, a wear-resistant cover 5 is provided at the upper end of the lifting support shaft 6, and a stud is connected to the lower end of the wear-resistant cover 5. A matching hole matching the stud is opened inside the upper end of the lifting support shaft 6 to facilitate the installation of the wear-resistant cover 5. The wear-resistant cover 5 is rotatably connected to the lifting support shaft 6 through the stud. Considering the rotation of the hand-tightening bolt 4, if the bottom surface of its lower end is in direct contact with the lifting support shaft 6 during its downward rotation, it is easy to cause long-term wear and damage. Therefore, the wear-resistant cover 5 is designed so that its upper end surface and the lower end of the hand-tightening bolt 4 rotate and rub against each other during the downward rotation, thereby reducing wear.

[0030] refer to Figure 1-Figure 3 As shown, an opening is provided on one side of the bracket foot 7, and the chord length of the opening is smaller than the diameter of the upper end of the lifting support shaft 6, so that the wear-resistant cover 5 and the lifting support shaft 6 will not fall out from the opening position when moving inside the installation groove, and the convenience and integrity (integration) of the tooling design are fully considered. The installation position of the positioning stud 8 can also be adjusted from the opening position of the side wall of the bracket foot 7, so that it can be pressed and installed in the corresponding positioning slot hole on the equipment more smoothly and quickly.

[0031] In this embodiment, the wear-resistant cover 5 and the lifting support shaft 6 are configured as cylindrical structures that match the installation groove. Furthermore, the wear-resistant cover 5 and the lifting support shaft 6 can also be configured as rectangular structures that match the installation groove. At this time, setting the opening at the end angle position of the installation groove can also prevent the wear-resistant cover 5 and the lifting support shaft 6 from falling out from the opening position.

[0032] refer to Figure 1-Figure 3 As shown, a positioning stud 8 is installed at the bottom end of the lifting support shaft 6, which is convenient for cooperating with the corresponding positioning hole on the equipment to achieve installation positioning. When in use, use your fingers or other tools to fine-tune the angle and press it smoothly into the corresponding positioning hole on the equipment where the Dome to be removed is located. (The main function of the positioning stud 8 here is to provide installation positioning function for the use of the tooling. In actual use, the positioning stud 8 may not be used according to the equipment conditions, and the use function of the tooling will not be affected).

[0033] refer to Figure 1-Figure 3 As shown, the connecting mounting part includes an installing clamping plate 2, and a matching groove matching with the installing clamping plate 2 is opened on one side of the lifting connecting plate 1. The installing clamping plate 2 is connected to the lifting connecting plate 1 by bolts. The installing clamping plate 2 and the lifting connecting plate 1 have corresponding sides. There are several groups of clamping grooves matching with the manual air pump column 31, and the clamping grooves are arranged in an arc shape. By placing the manual air pump column 31 between the clamping grooves of the installing clamping plate 2 and the lifting connecting plate 1, the manual air pump column 31 can be clamped and fixed, thereby playing an installation and fixing role.

[0034] refer to Figure 1-Figure 3As shown, the clamping grooves are arranged in three groups, the manual air pump column 31 is located inside the middle group of clamping grooves, and the middle group of clamping grooves is located in the middle of the lifting connecting plate 1, that is, the vacuum suction cup component 3 is installed in the middle position of the lifting connecting plate 1. When in use, by simultaneously screwing the hand screws 4 on both sides to make them rotate downward, the lifting connecting plate 1 and the bracket legs 7 fixed on both sides will rise upward to resist the force and elongation of the hand screws 4 acting on the wear-resistant cover 5. At this time, the vacuum suction cup will also be subjected to a uniform upward lifting force on the left and right due to the clamping force of the installation clamping plate 2 and the lifting connecting plate 1, so that the quartz dome can be safely separated from the seal between the base ring Base-ring as the hand screws 4 on both sides rotate, and after being slowly lifted to a position, the quartz dome and the tooling can be separated from the equipment as a whole.

[0035] Embodiment 2:

[0036] See also Figure 1-Figure 3 As shown, the difference from the previous embodiment is that:

[0037] The clamping grooves are arranged in three groups, the manual air pump column 31 is located inside the outer group of clamping grooves, the middle group of clamping grooves is located in the middle of the lifting connecting plate 1, and the outer group of clamping grooves is located outside the middle group of clamping grooves, that is, the outer group of clamping grooves are not in the middle position of the lifting connecting plate 1. When the vacuum suction cup component 3 is installed inside the outer group of clamping grooves on one side of the middle group of clamping grooves, that is, when the vacuum suction cup is installed inside the clamping groove on the left or right side of the middle position, the installation position is clamped and installed by the clamping plate 2. After the hand-tightening bolts 4 on both sides are rotated downward and the bottom ends of the hand-tightening bolts 4 are in contact with the wear-resistant cover 5, the position farthest from the clamping vacuum suction cup is selected at this time. If the hand bolt 4 on one side of the position continues to rotate (i.e., the hand bolt 4 on the side away from the clamping vacuum suction cup is turned), the hand bolt 4 on the other side (i.e., the hand bolt 4 on the side close to the clamping vacuum suction cup) is fixed. Compared with selecting the hand bolt 4 on the side closest to the clamping vacuum suction cup to continue rotating (i.e., turning the hand bolt 4 on the side close to the clamping vacuum suction cup), the hand bolt 4 on the other side (i.e., the hand bolt 4 on the side away from the clamping vacuum suction cup) is fixed, which effectively reduces the resistance arm of the quartz Dome rising, reduces the force of the hand bolt 4 that needs to continue to rotate, and thus makes it easier to destroy the seal between the quartz Dome and the base ring Base-ring. After the destruction, the hand bolt 4 on the other side can be turned to slightly adjust the position of the quartz Dome after the seal is separated to a horizontal position, and detach it from the equipment together with the tooling, thereby saving more effort.

[0038] The main usage of this tooling:

[0039] 1. Move the entire tooling (except the installation clamping plate 2) to the top of the quartz dome to be removed;

[0040] 2. Pass the positioning stud 8 installed at the bottom end of the lifting support shaft 6 through the side wall opening of the bracket support foot 7, use your fingers or other tools to fine-tune its angle and press it smoothly into the corresponding positioning slot on the device where the Dome to be removed is located.

[0041] 3. Stick the cylindrical section of the vacuum suction cup 3 inside a clamping groove in the middle of the lifting connecting plate 1, and slide the vacuum suction cup 3 down along the semicircular hole wall in the middle so that the silicone suction cup 31 at the bottom of the vacuum suction cup 3 contacts the quartz upper Dome, and fix the mounting clamping plate 2 and the lifting connecting plate 1 with bolts and clamp the vacuum suction cup 3 to fix its position;

[0042] 4. Repeatedly press the manual air pump column 32 on the top of the vacuum suction cup 3 several times to fully suck and connect the quartz Dome and the silicone suction cup 31;

[0043] 5. Manually rotate the top of the hand-tightening bolts 4 installed on both sides of the lifting connecting plate 1 to make the hand-tightening bolts 4 on both sides rotate downward synchronously. When the bottom end of the hand-tightening bolts 4 contacts the upper surface of the wear-resistant cover 5 rotatably connected to the lifting support shaft 6, continue to rotate the hand-tightening bolts 4 on both sides synchronously. Since the bottom end of the hand-tightening bolts 4 is against the upper end of the wear-resistant cover 5, and the bottom end of the lifting support shaft 6 contacts the supporting surface of the equipment on which the tooling is installed, when the hand-tightening bolts 4 on both sides continue to rotate, the lifting connecting plate 1 and the bracket legs 7 fixed on both sides will rise upward to resist the force and elongation of the hand-tightening bolts 4 acting on the wear-resistant cover 5. At this time, the vacuum suction cup 3 will also be subjected to a uniform upward lifting force on the left and right due to the clamping force of the installation clamping plate 2 and the lifting connecting plate 1. Therefore, as the hand-tightening bolts 4 on both sides rotate, the quartz dome can be safely separated from the seal between the base ring and the base ring. After slowly lifting to a position, the quartz dome and the tooling can be separated from the equipment as a whole.

[0044] 6. When the quartz dome is being lifted, when the lower end surface of the upper end of the lifting support shaft 6 contacts the mounting groove inside the bracket support foot 7, a mechanical limit is generated and the quartz dome cannot be lifted further. At this time, the quartz dome and the tooling can be removed from the equipment to a safe area, making it easier to remove the quartz dome.

[0045] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz Dome auxiliary clamping and placing tool, characterized in that: include: A lifting connection plate (1), wherein a vacuum suction cup component (3) is installed inside the lifting connection plate (1) through a connecting mounting component, wherein the vacuum suction cup component (3) includes a silicone suction cup (32) and a manual air pump column (31), wherein the lower end of the manual air pump column (31) is connected to the silicone suction cup (32), wherein the bottom ends of both sides of the lifting connection plate (1) are provided with support legs (7), wherein the interior of the support legs (7) is provided with a lifting support shaft (6), wherein the interior of the support legs (7) is provided with a mounting groove matching the lifting support shaft (6), and both sides of the lifting connection plate (1) are threadedly connected with hand bolts (4), wherein the lower ends of the hand bolts (4) extend to the interior of the mounting grooves.

2. The quartz Dome auxiliary clamping and placing tool according to claim 1, characterized in that: The lifting support shaft (6) is arranged in a T-shape, and the mounting groove is arranged in a T-shape matching with the lifting support shaft (6).

3. The quartz Dome auxiliary clamping and placing tool according to claim 2, characterized in that: The upper end of the lifting support shaft (6) is provided with a wear-resistant cover (5), the lower end of the wear-resistant cover (5) is connected with a stud, and a matching hole matching with the stud is opened inside the upper end of the lifting support shaft (6), and the wear-resistant cover (5) is rotatably connected to the lifting support shaft (6) through the stud.

4. The quartz dome auxiliary clamping and placing tool according to claim 3, characterized in that: An opening is provided on one side of the support leg (7), and the chord length of the opening is smaller than the diameter of the upper end of the lifting support shaft (6).

5. The quartz dome auxiliary clamping and placing tool according to claim 4, characterized in that: A positioning stud (8) is installed at the bottom end of the lifting support shaft (6).

6. The quartz dome auxiliary clamping and placing tool according to claim 1, characterized in that: The connecting mounting part comprises a mounting clamping plate (2), one side of the lifting connecting plate (1) is provided with a matching groove matching with the mounting clamping plate (2), the mounting clamping plate (2) is connected to the lifting connecting plate (1) by bolts, and the mounting clamping plate (2) and the lifting connecting plate (1) are provided with a plurality of groups of clamping grooves matching with the manual air pump column (31) on the corresponding sides, and the clamping grooves are arranged in an arc shape.

7. The quartz dome auxiliary clamping and placing tool according to claim 6, characterized in that: The clamping grooves are arranged in three groups, the manual air pump column (31) is located inside the clamping grooves of the middle group, and the clamping grooves of the middle group are located in the middle of the lifting connecting plate (1).

8. The quartz dome auxiliary clamping and placing tool according to claim 6, characterized in that: The clamping grooves are arranged in three groups, the manual air pump column (31) is located inside the clamping grooves of the outer group, the clamping grooves of the middle group are located in the middle of the lifting connecting plate (1), and the clamping grooves of the outer group are located outside the clamping grooves of the middle group.

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