Lifting head of single crystal furnace

Abstract

The utility model discloses a single crystal furnace lifting head which comprises a mounting plate, a leveling device, a force transducer, a first linear guide rail, a balancing weight and a shifting device, and the leveling device is positioned below the mounting plate; the force measuring sensor is positioned between the leveling device and the mounting plate, is positioned on the radial outer side of the central axis of the mounting plate, and is used for detecting the force of the centrifugal force acting on the force measuring sensor when the mounting plate rotates; the balancing weight is in sliding connection with the first linear guide rail; the first linear guide rail is arranged on the mounting plate in a relative movement mode through a shifting device. Therefore, the lifting head of the single crystal furnace slides on the first linear guide rail along the length direction through the force transducer and the balancing weight, and meanwhile, the position of the first linear guide rail can be adjusted by the shifting device, so that the movement of the balancing weight is not limited to the length direction of the first linear guide rail, and the multidirectional movement of the balancing weight can be realized; the mass center position can be quickly adjusted to the rotation center, and the quality of single crystals can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace equipment, in particular to a single crystal furnace pulling head. Background Art

[0002] The seed crystal lifting device of the single crystal furnace is an actuator that realizes the seed crystal to be pulled upward at an extremely slow speed. It plays a key role in the growth process of single crystal silicon and is the core equipment of the single crystal silicon growth furnace. Put polycrystalline silicon into the quartz crucible, and use the heater to melt the silicon raw material in the single crystal furnace; then lift it up through the lifting chamber, and the wire wheel in the lifting chamber runs to wind the tungsten wire rope and lift the lifting head. The lifting head will slowly lift the seed crystal with a fixed crystal direction inserted into the surface of the melt upward, and the crystal will grow at the lower end of the seed crystal, and finally produce a crystal column. However, when the lifting head is running, the centrifugal force will cause periodic disturbances to the lifting head and the base, affecting the smooth operation. The dynamic balancing test is usually performed when the winding wheel is stationary, but during actual operation, the winding wheel will move horizontally (the winding wheel is a part of the pulling head, and a tungsten wire rope is wound on the winding wheel. The lower end of the tungsten wire rope is connected to the seed crystal. When the winding wheel rotates, it drives the tungsten wire rope to move up and down, causing the seed crystal to move up and down synchronously), causing the center of mass position to change accordingly, reducing the dynamic balancing accuracy, increasing the centrifugal force, and increasing the disturbance to the operation of the pulling head, thereby affecting the quality of the single crystal.

[0003] Therefore, how to quickly adjust the center of mass of the pulling head to the rotation center is a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0004] In view of this, an object of the present invention is to provide a single crystal furnace pulling head, which can quickly adjust the center of mass of the pulling head to the rotation center.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A single crystal furnace pulling head, comprising:

[0007] Mounting plate;

[0008] a leveling device, located below the mounting plate;

[0009] a force sensor, located between the leveling device and the mounting plate and radially outward of the central axis of the mounting plate, for detecting the force of the centrifugal force acting on the force sensor when the mounting plate rotates;

[0010] A first linear guide;

[0011] A counterweight block, slidably connected to the first linear guide rail;

[0012] A shifting device, wherein the first linear guide rail is relatively movably arranged on the mounting plate through the shifting device.

[0013] Optionally, in the above-mentioned single crystal furnace pulling head, the shifting device includes a second linear guide rail;

[0014] The first linear guide is slidably connected to the second linear guide;

[0015] An angle between a sliding direction of the second linear guide rail and a sliding direction of the first linear guide rail is greater than 0 degrees and less than or equal to 90 degrees.

[0016] Optionally, in the above-mentioned single crystal furnace pulling head, the shifting device includes a turntable;

[0017] The turntable is rotatably connected to the mounting plate;

[0018] The first linear guide rail is mounted on the turntable.

[0019] Optionally, the above-mentioned single crystal furnace pulling head further includes a first driving device for driving the counterweight block to slide along the first linear guide rail.

[0020] Optionally, in the above-mentioned single crystal furnace pulling head, the first driving device includes:

[0021] a first lead screw, wherein a central axis of the first lead screw is parallel to a sliding direction of the first linear guide rail, and the counterweight is mounted on the first lead screw;

[0022] The first motor is used to drive the first lead screw to rotate around its own axis.

[0023] Optionally, in the above-mentioned single crystal furnace pulling head, the shifting device includes a second driving device for driving the first linear guide rail to slide along the second linear guide rail.

[0024] Optionally, in the above-mentioned single crystal furnace pulling head, the second driving device includes:

[0025] a second lead screw, wherein a central axis of the second lead screw is parallel to a sliding direction of the second linear guide rail, and the first linear guide rail is mounted on the second lead screw;

[0026] The second motor is used to drive the second lead screw to rotate around its own axis.

[0027] Optionally, in the above-mentioned single crystal furnace pulling head, the shifting device includes a second driving device for driving the first linear guide rail to move relative to the mounting plate.

[0028] Optionally, in the above-mentioned single crystal furnace pulling head, the second driving device includes:

[0029] A rotating shaft, through which the turntable is connected to the mounting plate;

[0030] The third motor is used to drive the turntable to rotate around the axis of the rotating shaft.

[0031] Optionally, the above-mentioned single crystal furnace pulling head further includes:

[0032] a third driving device, used for driving the counterweight to move relative to the first linear guide rail, and for driving the first linear guide rail to move relative to the displacement device;

[0033] The controller, the force sensor and the third driving device are respectively connected to the controller signal, and are used to control the action of the driving device according to the detection result of the force sensor.

[0034] It can be seen from the above technical scheme that a force sensor for detecting the force of the centrifugal force acting on the force sensor when the mounting plate rotates is installed between the leveling device and the mounting plate of the utility model, which can detect the operating state of the lifting head in real time, and can make adaptive adjustments to the position of the counterweight block according to the value sensed by the force sensor, so that the center of mass position of the lifting head is always maintained on the rotation center of the lifting head (that is, the force sensor detects the change of the centrifugal force when the lifting head rotates, and judges the change position of the center of mass of the lifting head based on this, and the system automatically adjusts the position of the counterweight block so that the center of mass of the lifting head returns to the rotation center), thereby improving the stability of operation and the quality of single crystals. The counterweight block can adjust the position of the counterweight block in the length direction of the first linear guide rail, and the shifting device can adjust the position of the first linear guide rail, so that the movement of the position of the counterweight block is not limited to the length direction of the first linear guide rail, and the multi-directional movement of the counterweight block can be realized, which can ensure that the center of mass position is adjusted to the rotation center more quickly, which is beneficial to improving the quality of single crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 A schematic diagram of the structure of a single crystal furnace pulling head provided in an embodiment of the utility model;

[0037] Figure 2 A schematic diagram of the structure of a counterweight block provided in Embodiment 1 of the present utility model;

[0038] Figure 3 This is a schematic diagram of the structure of the counterweight block provided in Example 2 of the utility model.

[0039] in:

[0040] 1-Mounting plate, 2-Leveling device, 3-Force sensor, 4-First linear guide rail, 5-Counterweight block,

[0041] 61-second linear guide rail, 611-second lead screw, 612-second motor,

[0042] 62-turntable, 621-rotating shaft, 622-third motor,

[0043] 71-first screw, 72-first motor. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0045] In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the utility model product is usually placed when in use, and are only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0046] Example 1

[0047] like Figure 1 to Figure 2 As shown, an embodiment of the utility model provides a single crystal furnace pulling head.

[0048] First, the single crystal furnace pulling head includes a mounting plate 1, a leveling device 2, a force sensor 3, a first linear guide rail 4 and a counterweight 5, wherein the leveling device 2 is located below the mounting plate 1; the force sensor 3 is located between the leveling device 2 and the mounting plate 1, and is located radially outside the central axis of the mounting plate 1, and is used to detect the force of the centrifugal force acting on the force sensor 3 when the mounting plate 1 rotates; the counterweight 5 is slidably connected to the first linear guide rail 4. It should be noted that the force sensor 3 can be one, two or more, and the specific number of force sensors 3 can be specifically designed by those skilled in the art according to actual needs. In addition, the first linear guide rail 4 can be formed by a rod or a groove or a strip-shaped through hole opened in a component, and those skilled in the art can design it specifically according to actual needs.

[0049] It can be seen that a force sensor 3 for detecting the force of the centrifugal force acting on the force sensor 3 when the mounting plate 1 rotates is installed between the leveling device 2 of the single crystal furnace pulling head provided by the embodiment of the utility model and the mounting plate 1. The force sensor 3 can detect the operating state of the pulling head in real time, and can adaptively adjust the position of the counterweight 5 according to the value sensed by the force sensor 3, so that the center of mass position of the pulling head is always maintained on the rotation center of the pulling head (that is, the force sensor 3 detects the change of the centrifugal force when the pulling head rotates, and judges the changed position of the center of mass of the pulling head based on this, and the system automatically adjusts the position of the counterweight 5 to make the center of mass of the pulling head return to the rotation center), thereby improving the stability of operation and the quality of single crystals. The position of the counterweight block 5 can be adjusted in the length direction of the first linear guide rail 4, and the shifting device can adjust the position of the first linear guide rail 4, so that the movement of the position of the counterweight block 5 is not limited to the length direction of the first linear guide rail 4, and the multi-directional movement of the counterweight block 5 can be realized, and the center of mass position can be adjusted to the rotation center more quickly, which is beneficial to improving the quality of single crystals.

[0050] In specific implementation, the shifting device includes a second linear guide 61; the first linear guide 4 is slidably connected to the second linear guide 61; the angle between the sliding direction of the second linear guide 61 and the sliding direction of the first linear guide 4 is greater than 0 degrees and less than or equal to 90 degrees, that is, the counterweight 5 can be moved to any position in a plane. It should be noted that as long as the sliding direction of the first linear guide 4 and the sliding direction of the second linear guide 61 are not parallel, the specific value of the angle between the sliding direction of the second linear guide 61 and the sliding direction of the first linear guide 4 can improve the accuracy of the movement of the counterweight 5.

[0051] In specific implementation, it also includes a first driving device for driving the counterweight 5 to slide along the first linear guide rail 4. The first driving device can be manual or automatic, but compared with manual driving, automatic driving has faster response and higher precision.

[0052] In specific implementation, the first drive device includes a first screw 71 and a first motor 72, wherein the central axis of the first screw 71 is parallel to the sliding direction of the first linear guide 4, and the counterweight 5 is installed on the first screw 71; the first motor 72 is used to drive the first screw 71 to rotate around its own axis. The accuracy of the movement of the counterweight 5 can be improved. The first drive device can also include a telescopic rod, and the two ends of the telescopic rod are respectively connected to the counterweight 5 and the shifting device; the first drive device can also be a mechanical transmission structure such as a gear rack or a synchronous belt, but is not limited thereto. The specific structure of the first drive device can be specifically designed by those skilled in the art according to actual needs.

[0053] During the specific implementation, it also includes a first reducer, and the first motor 72, the first reducer, and the first lead screw 71 are sequentially connected in transmission. The first reducer converts the high-speed rotational kinetic energy generated by the first motor 72 into an appropriate speed and torque suitable for the first lead screw 71. It should be noted that the reducer converts the high speed of the power source of the high-speed rotation of the motor into a lower speed through gears or other transmission mechanisms, and significantly improves the output torque, so that a large-load counterweight 5 can be driven by a small-power motor. At the same time, the reducer can match a motor of appropriate power, avoiding the high energy consumption caused by the use of a high-power motor, thereby saving electricity and reducing operating costs. The reducer has a high transmission efficiency, less energy loss, and a more economical and efficient transmission.

[0054] In specific implementation, the shifting device includes a second driving device for driving the first linear guide rail 4 to slide along the second linear guide rail 61. The second driving device can be manual or automatic, but compared with manual driving, automatic driving has faster response and higher precision.

[0055] In specific implementation, the second drive device includes a second lead screw 611 and a second motor 612, wherein the central axis of the second lead screw 611 is parallel to the sliding direction of the second linear guide 61, and the first linear guide 4 is installed on the second lead screw 611; the second motor 612 is used to drive the second lead screw 611 to rotate around its own axis. The accuracy of the movement of the counterweight 5 can be improved. The second drive device can also include a telescopic rod, and the two ends of the telescopic rod are respectively connected to the counterweight 5 and the first linear guide 4. The second drive device can also be a mechanical transmission structure such as a gear rack or a synchronous belt, but is not limited thereto. The specific structure of the second drive device can be specifically designed by those skilled in the art according to actual needs.

[0056] In a specific implementation, a second reducer is also included, and the second motor 612, the second reducer, and the second lead screw 611 are sequentially connected in transmission. The second reducer converts the high-speed rotational kinetic energy generated by the second motor 612 into an appropriate speed and torque suitable for the second lead screw 611.

[0057] In a specific implementation, a third driving device and a controller are also included, wherein the third driving device is used to drive the counterweight 5 to move relative to the first linear guide 4, and to drive the first linear guide 4 to move relative to the displacement device; the force sensor 3 and the third driving device are respectively connected to the controller signal, and are used to control the action of the driving device according to the detection result of the force sensor 3. Through the signal connection between the controller and the force sensor 3 and the third driving device, the automatic adjustment of the counterweight 5 is realized, and the response is faster and the adjustment accuracy is higher.

[0058] In a specific implementation, the first motor 72 and / or the second motor 612 may be a servo motor with closed-loop control or a stepper motor with open-loop control.

[0059] In specific implementation, the force sensor 3 can issue an alarm when it detects that the centroid position deviates too much, so as to warn the staff to make a correct response in time, or control the single crystal furnace pulling head to stop working or make corrections through the controller signal.

[0060] Example 2

[0061] like Figure 3 As shown, the second embodiment of the present invention provides a single crystal furnace pulling head. The difference between the second embodiment of the present invention and the first embodiment is that:

[0062] In specific implementation, the shifting device includes a turntable 62; the turntable 62 is rotatably connected to the mounting plate 1; and the first linear guide rail 4 is mounted on the turntable 62. The shifting device can rotate in the plane of the turntable 62, can move on a circumference line with a fixed radius, and can adjust the counterweight 5 to any position within the circumference in combination with the sliding of the counterweight 5 along the first linear guide rail 4.

[0063] In specific implementation, the shifting device includes a second driving device for driving the first linear guide rail 4 to move relative to the mounting plate 1. The second driving device can be manual or automatic, but compared with manual driving, automatic driving has faster response and higher precision.

[0064] In specific implementation, the second driving device includes a rotating shaft 621 and a third motor 622, wherein the turntable 62 is connected to the mounting plate 1 through the rotating shaft 621; the third motor 622 is used to drive the turntable 62 to rotate around the axis of the rotating shaft 621. The precision of the movement of the counterweight 5 can be improved. However, it is not limited to this, and the specific structure of the second driving device can be specifically designed by those skilled in the art according to actual needs.

[0065] In a specific implementation, a third reducer is also included, and the third motor 622, the third reducer, and the rotating shaft 621 are sequentially connected in transmission. The third reducer converts the high-speed rotational kinetic energy generated by the third motor 622 into an appropriate speed and torque suitable for the rotating shaft 621.

[0066] In a specific implementation, the third motor 622 can be a servo motor with closed-loop control or a stepper motor with open-loop control.

[0067] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0068] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0069] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A single crystal furnace pulling head, characterized in that: include; Mounting plate (1); A leveling device (2) located below the mounting plate (1); a force sensor (3) located between the leveling device (2) and the mounting plate (1) and radially outward of the central axis of the mounting plate (1), and used for detecting the force of the centrifugal force acting on the force sensor (3) when the mounting plate (1) rotates; A first linear guide rail (4); A counterweight block (5) slidably connected to the first linear guide rail (4); A displacement device, wherein the first linear guide rail (4) is relatively movably arranged on the mounting plate (1) via the displacement device.

2. The single crystal furnace pulling head according to claim 1, characterized in that: The displacement device comprises a second linear guide rail (61); The first linear guide rail (4) is slidably connected to the second linear guide rail (61); The included angle between the sliding direction of the second linear guide rail (61) and the sliding direction of the first linear guide rail (4) is greater than 0 degrees and less than or equal to 90 degrees.

3. The single crystal furnace pulling head according to claim 1, characterized in that: The shifting device comprises a turntable (62); The turntable (62) is rotatably connected to the mounting plate (1); The first linear guide rail (4) is mounted on the turntable (62).

4. The single crystal furnace pulling head according to claim 1, characterized in that: It also comprises a first driving device, which is used to drive the counterweight block (5) to slide along the first linear guide rail (4).

5. The single crystal furnace pulling head according to claim 4, characterized in that: The first driving device comprises: A first lead screw (71), wherein the central axis of the first lead screw (71) is parallel to the sliding direction of the first linear guide rail (4), and the counterweight (5) is mounted on the first lead screw (71); The first motor (72) is used to drive the first lead screw (71) to rotate around its own axis.

6. The single crystal furnace pulling head according to claim 2, characterized in that: The displacement device comprises a second driving device, which is used to drive the first linear guide rail (4) to slide along the second linear guide rail (61).

7. The single crystal furnace pulling head according to claim 6, characterized in that: The second driving device comprises: a second lead screw (611), wherein the central axis of the second lead screw (611) is parallel to the sliding direction of the second linear guide rail (61), and the first linear guide rail (4) is mounted on the second lead screw (611); The second motor (612) is used to drive the second lead screw (611) to rotate around its own axis.

8. The single crystal furnace pulling head according to claim 3, characterized in that: The displacement device comprises a second driving device for driving the first linear guide rail (4) to move relative to the mounting plate (1).

9. The single crystal furnace pulling head according to claim 8, characterized in that: The second driving device comprises: A rotating shaft (621), wherein the turntable (62) is connected to the mounting plate (1) via the rotating shaft (621); The third motor (622) is used to drive the turntable (62) to rotate around the axis of the rotating shaft (621).

10. The single crystal furnace pulling head according to claim 1, characterized in that: Also includes: a third driving device, used for driving the counterweight (5) to move relative to the first linear guide rail (4), and for driving the first linear guide rail (4) to move relative to the displacement device; The controller, the force sensor (3) and the third drive device are respectively connected to the controller signal, and are used to control the action of the drive device according to the detection result of the force sensor (3).

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