Butterfly valve control system

Abstract

The utility model discloses a butterfly valve control system which comprises a butterfly valve, a cavity, a control unit and a vacuum sensor. The vacuum sensor is used for collecting the vacuum degree in the cavity and transmitting the vacuum degree to the control unit; the control unit is used for collecting and controlling the valve opening degree of the butterfly valve. The control unit is arranged, the vacuum degree of the cavity is collected by the control unit through the vacuum sensor, the valve opening degree of the butterfly valve is collected at the same time, and the butterfly valve can be controlled in real time according to the vacuum degree of the cavity and the valve opening degree.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing equipment, in particular to the field of thin film deposition equipment, and specifically is a butterfly valve control system. Background Art

[0002] In recent years, with the development of semiconductor equipment, butterfly valve control technology has also been widely used.

[0003] Although there are some butterfly valve control systems, the original control systems can no longer meet the current needs as the equipment and process requirements continue to increase. In the original control system, the vacuum sensor must be connected to the butterfly valve by wiring, which has great limitations and lacks universality and interchangeability; and the valve opening can only be controlled by the control method provided by the butterfly valve. The control methods of butterfly valves of different brands are different, lacking universality, and the control method of butterfly valves is relatively fixed and has a low degree of freedom. Utility Model Content

[0004] The utility model provides a butterfly valve control system to solve the problems raised in the background technology. In order to achieve the above purpose, the utility model is implemented through the following technical solutions:

[0005] A butterfly valve control system comprises a butterfly valve, a cavity, a control unit and a vacuum sensor;

[0006] The vacuum sensor is used to collect the vacuum degree in the cavity and transmit it to the control unit;

[0007] The control unit is used to collect and control the valve opening of the butterfly valve.

[0008] Preferably, the vacuum sensor is connected to the control unit by wiring.

[0009] Preferably, the vacuum sensor is connected to the control unit via a communication protocol.

[0010] Preferably, the communication protocol includes EtherCat bus communication.

[0011] Preferably, the butterfly valve is connected to the control unit by wiring.

[0012] Preferably, the butterfly valve is connected to the control unit via a communication protocol.

[0013] Preferably, the communication protocol includes EtherCat bus communication.

[0014] Preferably, it is characterized in that the butterfly valve includes a butterfly valve and a butterfly valve controller, the butterfly valve is arranged on the connecting passage between the vacuum pump and the cavity, the butterfly valve controller is used to control the valve opening of the butterfly valve, and the butterfly valve controller transmits the valve opening to the control unit.

[0015] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0016] 1. The utility model is provided with a control unit, which collects the vacuum degree of the cavity through a vacuum sensor, and at the same time collects the valve opening of the butterfly valve, and can control the butterfly valve in real time according to the vacuum degree of the cavity and the valve opening.

[0017] 2. The vacuum sensor can be connected to the control unit through wiring or communication protocol, and the butterfly valve can also be connected to the control unit through wiring or communication protocol. There are more connection methods to choose from, and the optional model range of hardware such as vacuum sensors and butterfly valves is also larger.

[0018] 3. The control unit is set up separately, which is more convenient for debugging for complex or special process requirements. There is no need to replace hardware such as vacuum sensors and butterfly valves. Only the control method of the control unit needs to be changed to meet the process requirements. It is more efficient for the research and development of semiconductor equipment and can better cope with the exploration of new processes for semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the utility model, the following is a brief introduction to the drawings required for the description. Obviously, the drawings described below are an embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:

[0020] Figure 1 It is a connection block diagram of the butterfly valve control system disclosed in the embodiment of the utility model;

[0021] Figure 2 It is a data transmission schematic diagram of a butterfly valve control system disclosed in an embodiment of the utility model.

[0022] In the figure: cavity 1, vacuum pump 2, butterfly valve 3, butterfly valve 31, butterfly valve controller 32, vacuum sensor 4, control unit 5, air inlet 6. DETAILED DESCRIPTION

[0023] The scheme proposed by the utility model is further described in detail below in combination with the accompanying drawings and specific implementation methods. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the accompanying drawings adopt a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the implementation method of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. illustrated by the accompanying drawings of this specification are only used to match the content disclosed in the specification, so that people familiar with this technology can understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so it has no technical substantive significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effect that the utility model can produce and the purpose that can be achieved, should still fall within the scope of the technical content disclosed by the utility model.

[0024] Figure 1 The butterfly valve control system of the embodiment of the utility model is shown, comprising a cavity 1, a vacuum pump 2, a butterfly valve 3, a vacuum sensor 4 and a control unit 5. The vacuum pump 2 is connected to the cavity 1, an air inlet 6 is provided at the rear end of the cavity 1, and the butterfly valve 3 is provided on the connection passage between the vacuum pump 2 and the cavity 1, and is used to control the vacuum degree of the cavity 1.

[0025] In this embodiment, if Figure 2 As shown, the vacuum sensor 4 is connected to the cavity 1 and the control unit 5 respectively, and the vacuum sensor 4 collects the vacuum degree of the cavity 1 and transmits it to the control unit 5. The vacuum sensor 4 can be connected to the control unit 5 by wiring or communication protocol. The diversity of connection methods can expand the optional model range of the vacuum sensor 4. In a preferred embodiment, the vacuum sensor 4 is connected to the control unit 5 by EtherCat bus communication. The EtherCat bus communication method has efficient and stable communication quality, does not need to rely on additional equipment such as cascade switches or hubs, and can simplify the system architecture.

[0026] The control unit 5 is connected to the butterfly valve 3, such as Figure 2 As shown, the control unit 5 collects the valve opening of the butterfly valve 3, and can control the butterfly valve 3 in real time according to the valve opening and the vacuum degree of the cavity 1. The butterfly valve 3 can also be connected to the control unit 5 by wiring or communication protocol. The diversity of connection methods can expand the optional model range of the butterfly valve 3. In a preferred embodiment, the butterfly valve 3 is connected to the control unit 5 by EtherCat bus communication. The EtherCat bus communication method has efficient and stable communication quality, does not need to rely on additional equipment such as cascade switches or hubs, and can simplify the system architecture.

[0027] The control unit 5 of this embodiment is set separately, which is more convenient for debugging for complex or special process requirements. There is no need to replace hardware such as the vacuum sensor 4 and the butterfly valve 3. Only the control method of the control unit 5 needs to be changed to meet the process requirements. It is more efficient for the research and development of semiconductor equipment and can better cope with the exploration of new processes for semiconductor equipment. The control unit 5 in this embodiment includes but is not limited to control devices such as PLC that can customize the control method.

[0028] In a preferred embodiment, the butterfly valve 3 includes a butterfly valve 31 and a butterfly valve controller 32. The butterfly valve 31 is arranged on the connection passage between the vacuum pump 2 and the chamber 1. The butterfly valve controller 32 is used to control and collect the valve opening of the butterfly valve 31. The butterfly valve controller 32 transmits the valve opening to the control unit 5. The butterfly valve 3 in this embodiment is provided with a separate butterfly valve controller 32, which can transmit the valve opening to the control unit 5 in real time, and can also receive the control command of the control unit 5 in real time to control the valve body of the butterfly valve 3, and the control is more accurate.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements. In addition, the term "connection" herein means that A and B are directly connected, or that A and B are indirectly connected, such as A and B are connected through C, or even through more components such as C and D, and A and B can be connected in one piece, or in separate pieces, or removable, or fixed. The term "optional" herein means that the technical feature can be combined or not combined with any feature in the text.

[0030] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A butterfly valve control system, characterized in that: It includes a butterfly valve, a cavity, a control unit and a vacuum sensor; The vacuum sensor is used to collect the vacuum degree in the cavity and transmit it to the control unit; The control unit is used to collect and control the valve opening of the butterfly valve.

2. The butterfly valve control system according to claim 1, characterized in that: The vacuum sensor is connected to the control unit in a wiring manner.

3. The butterfly valve control system according to claim 1, characterized in that: The vacuum sensor is connected to the control unit in a communication protocol manner.

4. The butterfly valve control system according to claim 3, characterized in that: The communication protocol includes EtherCat bus communication.

5. The butterfly valve control system according to claim 1, characterized in that: The butterfly valve is connected to the control unit in a wiring manner.

6. The butterfly valve control system according to claim 1, characterized in that: The butterfly valve is connected to the control unit in a communication protocol manner.

7. The butterfly valve control system according to claim 6, characterized in that: The communication protocol includes EtherCat bus communication.

8. The butterfly valve control system according to any one of claims 1 to 7, characterized in that: The butterfly valve includes a butterfly valve and a butterfly valve controller. The butterfly valve is arranged on the connection passage between the vacuum pump and the cavity. The butterfly valve controller is used to control the valve opening of the butterfly valve. The butterfly valve controller transmits the valve opening to the control unit.

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