Ammonia gas analysis device and semiconductor process system

Abstract

The utility model relates to an ammonia gas analysis device and a semiconductor process system. The ammonia gas analysis device comprises a carrier gas supply module, a standard gas supply module, a raw material gas supply module, a purity analysis module, a recovery module and a gas treatment module. The device has the advantages that the standard gas supply module is arranged and is communicated with the purity analysis module, so that the standard gas supply module can supply standard gas to the purity analysis module, and whether the purity analysis module can operate normally or not can be judged according to a first analysis result of the purity analysis module on the standard gas; therefore, the condition that the analysis result is wrong due to the damage of the purity analysis module can be avoided; the gas treatment module is arranged and is respectively communicated with the purity analysis module, the carrier gas supply module and the standard gas supply module, so that waste gas can be recycled and treated; the recycling module is arranged and is communicated with the standard gas supply module, so that recycling and secondary utilization of resources can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of purity analysis process in ultrapure NH3 purification process, in particular to an ammonia analysis device and a semiconductor process system. Background Art

[0002] High-purity ammonia is used in the solar industry to provide nitrogen sources for silicon nitride films, as well as to provide clean process gas ammonia for integrated circuit manufacturing, compound semiconductors, liquid crystal displays, and better cleaning of silicon wafers. As a raw material for the electronics industry, the quality of high-purity ammonia is of vital importance and is directly related to the yield of the final product. The quality and cost of raw materials are closely related to the development of the industry.

[0003] In the prior art, a Chinese utility model patent (CN214097300U) discloses an ultra-pure ammonia online analysis device, comprising a gas source component, a gas source access component, an analysis control component and a detection component connected in sequence. The main principle is to control a series of valves to transport helium and finished ultra-pure ammonia into a helium ionization detector for ultra-pure ammonia purity detection; another control is used to transport the gas from each distillation tower to a micro-moisture analyzer; at the same time, a nitrogen system is used to purge the ultra-pure ammonia analysis pipeline of the equipment (after MV04 and MV10) to remove the original special gas. This device is an online detection device, mainly to avoid contamination caused by sampling.

[0004] However, in the prior art, the same pipeline is used to transport ammonia from each distillation tower to the analyzer, which poses a risk of gas mixing and may lead to analysis errors. In addition, the prior art has no reference standard for ammonia detection results, which may easily lead to errors. Furthermore, in the prior art, there is no gas recovery system, which may cause waste of resources and environmental pollution.

[0005] At present, there is no effective solution to the problems existing in the relevant technology, such as the use of the same pipeline to transport ammonia from each distillation tower to the analyzer, which leads to gas mixing, the lack of a reference standard for ammonia detection results, which is prone to errors, and the lack of a gas recovery system, which may cause waste of resources and environmental pollution. Utility Model Content

[0006] The purpose of the utility model is to provide an ammonia analysis device and a semiconductor process system in view of the deficiencies in the prior art, so as to solve the problems existing in the related art, such as the use of the same pipeline to transport ammonia from each distillation tower to the analyzer resulting in mixed gas, the lack of a reference standard for ammonia detection results prone to errors, and the lack of a gas recovery system that may cause waste of resources and environmental pollution.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] In a first aspect, the utility model provides an ammonia analysis device, comprising:

[0009] A carrier gas supply module, wherein the carrier gas supply module is used to input carrier gas;

[0010] A standard gas supply module, the standard gas supply module is used to input standard gas and mix it with carrier gas to obtain reference gas;

[0011] A raw material gas supply module, the raw material gas supply module is used to input raw material gas and mix it with carrier gas to obtain a gas to be tested;

[0012] a purity analysis module, the purity analysis module being connected to the carrier gas supply module, the standard gas supply module, and the raw gas supply module, respectively, and being used for analyzing the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result, judging whether the purity analysis module works normally according to the first analysis result, and judging whether the purity of the gas to be tested meets the standard according to the first analysis result and the second analysis result;

[0013] A recovery module, the recovery module is connected to the standard gas supply module and the purity analysis module, and is used to recover gas;

[0014] A gas processing module is connected to the carrier gas supply module, the standard gas supply module and the purity analysis module respectively, and is used for outputting waste gas.

[0015] In some embodiments, the carrier gas supply module includes:

[0016] A carrier gas tank, wherein the carrier gas tank is used to store carrier gas;

[0017] A carrier gas pipeline, the carrier gas pipeline is respectively connected to the carrier gas tank and the purity analysis module, and is used for conveying carrier gas;

[0018] A first valve assembly is provided in the carrier gas pipeline and is used to control the communication between the carrier gas tank and the purity analysis module.

[0019] In some of the embodiments, the carrier gas supply module further comprises:

[0020] a first pressure gauge, the first pressure gauge being in communication with the carrier gas pipeline and being used for monitoring the pressure at the connection point between the carrier gas pipeline and the carrier gas tank;

[0021] a first pressure sensor, the first pressure sensor being in communication with the carrier gas pipeline and being used to monitor the pressure at a point where the carrier gas pipeline is in communication with the carrier gas tank;

[0022] A second pressure gauge is connected to the carrier gas pipeline and is located upstream of the first valve assembly, and is used to monitor the pressure at the connection point between the carrier gas pipeline and the purity analysis module.

[0023] In some of the embodiments, the calibration gas supply module comprises:

[0024] At least one second gas supply assembly is connected to the purity analysis module and is used for inputting a standard gas and mixing it with a carrier gas to obtain a reference gas.

[0025] In some of the embodiments, the calibration gas supply module comprises:

[0026] A first standard gas tank, wherein the first standard gas tank is used to store standard gas;

[0027] A first standard gas pipeline, the first standard gas pipeline is connected to the first standard gas tank and the purity analysis module respectively, and is used for inputting standard gas and mixing it with carrier gas to obtain reference gas;

[0028] A second valve assembly, wherein the second valve assembly is arranged on the first standard gas pipeline and is used to control the communication between the first standard gas tank and the purity analysis module.

[0029] In some of the embodiments, the standard gas supply module further comprises:

[0030] a second standard gas tank, the second standard gas tank being used to store standard gas;

[0031] A second standard gas pipeline, the second standard gas pipeline is connected to the second standard gas tank and the purity analysis module respectively, and is used for inputting standard gas and mixing it with the carrier gas to obtain a reference gas;

[0032] A third valve assembly is provided on the second standard gas pipeline, and is used to control the communication between the second standard gas pipeline and the purity analysis module.

[0033] In some of the embodiments, the standard gas supply module further comprises:

[0034] A weight monitoring component is disposed below the first standard gas tank and the second standard gas tank, and is used to monitor the weight of the first standard gas tank and the second standard gas tank.

[0035] In some embodiments, the raw gas supply module includes:

[0036] A raw material gas pipeline is connected to the raw material gas supply device and the purity analysis module respectively, and is used to input the raw material gas and mix it with the carrier gas to obtain the gas to be tested.

[0037] In some of the embodiments, the purity analysis module includes:

[0038] A first analysis component, which is connected to the carrier gas supply module, the standard gas supply module, and the raw gas supply module, respectively, and is used to analyze the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result;

[0039] The second analysis component is connected to the first analysis component and is used to determine whether the purity analysis module works normally according to the first analysis result, and to determine whether the purity of the gas to be tested meets the standard according to the first analysis result and the second analysis result.

[0040] In some of the embodiments, the recovery module comprises:

[0041] A condensation component, the condensation component is communicated with the standard gas supply module and the purity analysis module respectively, and is used to recover the recoverable raw gas in the purity analysis module and the standard gas in the raw gas supply module;

[0042] A gas recovery pipeline, the gas recovery pipeline is respectively connected to the condensing element and the standard gas supply module, and is used for conveying ammonia;

[0043] A fourth valve assembly is provided in the gas recovery pipeline and is used to control the communication between the condensation element and the standard gas supply module.

[0044] In some embodiments, the gas processing module comprises:

[0045] A first exhaust gas output pipeline, the first exhaust gas output pipeline is connected to the carrier gas supply module and the exhaust gas treatment tank respectively, and is used to transport the exhaust gas;

[0046] a fifth valve assembly, the fifth valve assembly being disposed in the first exhaust gas output pipeline and being used to control the communication between the carrier gas supply module and the exhaust gas treatment tank;

[0047] A second exhaust gas output pipeline, the second exhaust gas output pipeline is connected to the standard gas supply module and the exhaust gas treatment tank respectively, and is used to transport the exhaust gas;

[0048] a sixth valve assembly, the sixth valve assembly being disposed in the second exhaust gas output pipeline and being used for controlling the communication between the standard gas supply module and the exhaust gas treatment tank;

[0049] A third exhaust gas output pipeline is connected to the purity analysis module and the exhaust gas treatment tank respectively, and is used for conveying exhaust gas.

[0050] In some of the embodiments, it also includes:

[0051] a purge module, the purge module being communicated with the second gas supply module and the analysis module respectively, and being used for purge;

[0052] a pressure-maintaining module, the pressure-maintaining module being respectively connected to the second gas supply module and the analysis module for maintaining pressure; and / or

[0053] A pressure relief module is connected to the second gas supply module and the exhaust gas treatment module respectively for pressure relief.

[0054] In some embodiments, the purge module includes:

[0055] a first purge gas supply pipeline, the first purge gas supply pipeline being connected to a purge gas source and the standard gas supply module respectively, and being used for supplying purge gas to the pipeline;

[0056] a second purge gas supply pipeline, the second purge gas supply pipeline being connected to a purge gas source and the purity analysis module respectively, and being used for supplying purge gas to the purity analysis module;

[0057] a seventh valve assembly, the seventh valve assembly being arranged in the first purge gas supply pipeline and being used for controlling the communication between the purge gas source and the standard gas supply module;

[0058] A second pressure sensor is connected to the first purge gas supply pipeline and is used to monitor the pressure in the first purge gas supply pipeline.

[0059] In some embodiments, the pressure maintaining module includes:

[0060] a first pressure-maintaining gas supply pipeline, the first pressure-maintaining gas supply pipeline being connected to a pressure-maintaining gas source and the standard gas supply module, respectively, and being used for supplying pressure-maintaining gas to the pipeline;

[0061] a second pressure-maintaining gas supply pipeline, the second pressure-maintaining gas supply pipeline being connected to a pressure-maintaining gas source and the purity analysis module, respectively, and being used for supplying pressure-maintaining gas to the purity analysis module;

[0062] an eighth valve assembly, the eighth valve assembly being disposed in the first pressure-maintaining gas supply pipeline and being used for controlling the communication between the pressure-maintaining gas source and the standard gas supply module;

[0063] A third pressure sensor is connected to the first pressure-maintaining gas supply pipeline and is used to monitor the pressure in the first pressure-maintaining gas supply pipeline.

[0064] In some embodiments, the pressure relief module includes:

[0065] A pressure relief pipeline, the pressure relief pipeline is respectively connected to the standard gas supply module and the gas processing module for pressure relief;

[0066] A safety valve, which is arranged on the pressure relief pipeline and is used for automatically releasing pressure when the pressure in the pressure relief pipeline is too high;

[0067] A pressure relief valve, which is arranged in the pressure relief pipeline and located downstream of the safety valve for pressure relief;

[0068] a ninth valve assembly, the ninth valve assembly being disposed in the pressure relief pipeline and being used for controlling the communication between the standard gas supply module and the gas processing module;

[0069] A third pressure gauge is connected to the pressure relief pipeline and is used to monitor the pressure in the pressure relief pipeline.

[0070] In a second aspect, the utility model provides a semiconductor process system, comprising:

[0071] An ammonia analysis device as described in the first aspect.

[0072] The utility model adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0073] An ammonia analysis device and a semiconductor process system of the utility model are provided with a standard gas supply module and connected with a purity analysis module, so that the standard gas supply module can supply standard gas to the purity analysis module, and can judge whether the purity analysis module can operate normally through the first analysis result of the reference gas by the purity analysis module, thereby avoiding the occurrence of errors in the analysis result due to damage to the purity analysis module; by providing a gas processing module and connecting the gas processing module with the purity analysis module, the carrier gas supply module and the standard gas supply module, the waste gas in the purity analysis module and the pipeline can be recovered and the waste gas can be treated; by providing a recovery module and connecting the recovery module with the standard gas supply module, the recovery and secondary utilization of resources can be realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] Figure 1 1 is a schematic diagram of a framework of an ammonia analysis device according to an embodiment of the present utility model (I);

[0075] Figure 2 It is a schematic diagram of a carrier gas supply module, a standard gas supply module, a raw gas supply module and a purity analysis module according to an embodiment of the utility model;

[0076] Figure 3 is a schematic diagram of a recovery module and a gas processing module according to an embodiment of the utility model;

[0077] Figure 42 is a schematic diagram of the framework of the ammonia analysis device according to an embodiment of the utility model;

[0078] Figure 5 is a schematic diagram of a purge module and a pressure-maintaining module according to an embodiment of the utility model;

[0079] Figure 6 is a schematic diagram of a pressure relief module according to an embodiment of the utility model;

[0080] Figure 7 This is a specific embodiment of the ammonia analysis device according to the embodiment of the utility model.

[0081] The reference numerals are: 100, carrier gas supply module; 110, carrier gas tank; 120, carrier gas pipeline; 130, first valve assembly; 140, first pressure gauge; 150, first pressure sensor; 160, second pressure gauge;

[0082] 200, standard gas supply module; 210, first standard gas tank; 220, first standard gas pipeline; 230, second valve assembly; 240, second standard gas tank; 250, second standard gas pipeline; 260, third valve assembly; 270, weight monitoring component;

[0083] 300. Raw gas supply module; 310. Raw gas pipeline;

[0084] 400, purity analysis module; 410, first analysis unit; 420, second analysis unit;

[0085] 500, recovery module; 510, condensation element; 520, gas recovery pipeline; 530, fourth valve assembly;

[0086] 600, gas processing module; 610, first exhaust gas output pipeline; 620, fifth valve assembly; 630, second exhaust gas output pipeline; 640, sixth valve assembly; 650, third exhaust gas output pipeline;

[0087] 700, purge module; 710, first purge gas supply pipeline; 720, second purge gas supply pipeline; 730, seventh valve assembly; 740, second pressure sensor;

[0088] 800, pressure maintaining module; 810, first pressure maintaining gas supply pipeline; 820, second pressure maintaining gas supply pipeline; 830, eighth valve assembly; 840, third pressure sensor;

[0089] 900, pressure relief module; 910, pressure relief pipeline; 920, safety valve; 930, pressure relief valve; 940, ninth valve assembly; 950, third pressure gauge. DETAILED DESCRIPTION

[0090] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0091] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0092] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0093] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (components) is not limited to the listed steps or components, but may also include steps or components that are not listed, or may also include other steps or components inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there can be three relationships, for example, "A and / or B" can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0094] Example 1

[0095] This embodiment relates to an ammonia analysis device in the utility model.

[0096] An illustrative embodiment of the present utility model is as follows: Figure 1As shown, an ammonia analysis device includes a carrier gas supply module 100, a standard gas supply module 200, a raw gas supply module 300, a purity analysis module 400, a recovery module 500, a gas processing module 600, a purge module 700, a pressure maintaining module 800 and a pressure relief module 900. Among them, the carrier gas supply module 100 is used to input carrier gas; the standard gas supply module 200 is used to input standard gas and mix it with the carrier gas to obtain a reference gas; the raw gas supply module 300 is used to input raw gas and mix it with the carrier gas to obtain a gas to be tested; the purity analysis module 400 is connected to the carrier gas supply module 100, the standard gas supply module 200, and the raw gas supply module 300, respectively, and is used to analyze the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result, and judge whether the purity analysis module 400 is working normally according to the first analysis result, and judge whether the purity of the gas to be tested meets the standard according to the first analysis result and the second analysis result; the recovery module 500 is connected to the standard gas supply module 200 and the purity analysis module 400, and is used to recover gas; the gas processing module 600 is connected to the carrier gas supply module 100, the standard gas supply module 200, and the purity analysis module 400, respectively, and is used to output waste gas.

[0097] like Figure 2 As shown, the carrier gas supply module 100 includes a carrier gas tank 110, a carrier gas pipeline 120 and a first valve assembly 130. The carrier gas tank 110 is used to store carrier gas; the carrier gas pipeline 120 is respectively connected to the carrier gas tank 110 and the purity analysis module 400 for conveying carrier gas; the first valve assembly 130 is arranged on the carrier gas pipeline 120 for controlling the connection between the carrier gas tank 110 and the purity analysis module 400.

[0098] Specifically, the number of the carrier gas tanks 110 is two, and the two carrier gas tanks 110 are respectively connected to the purity analysis module 400 , that is, the two carrier gas tanks 110 are arranged in parallel.

[0099] It should be noted that the number of the carrier gas tanks 110 can also be 1, 3, etc., that is, the number of the carrier gas tanks 110 can be set according to actual needs, and no excessive restrictions are made here.

[0100] In some embodiments, the carrier gas tank 110 includes, but is not limited to, a cylinder.

[0101] Specifically, a first end of the carrier gas pipeline 120 is connected to the carrier gas tank 110 , and a second end of the carrier gas pipeline 120 is connected to the purity analysis module 400 , so that the carrier gas in the carrier gas tank 110 can be subjected to the purity analysis module 400 through the carrier gas pipeline 120 .

[0102] It should be noted that the first end and the second end of the carrier gas pipeline 120 are respectively two ends in the length direction thereof.

[0103] In some of the embodiments, the carrier gas line 120 includes but is not limited to a stainless steel tube.

[0104] Specifically, the first valve assembly 130 includes a first manual diaphragm valve, a second manual diaphragm valve, a first pneumatic diaphragm valve, a pressure regulating valve and a first non-return valve. The first manual diaphragm valve is arranged at the gas outlet port of the carrier gas tank 110, and the first manual diaphragm valve is used to control whether the carrier gas in the carrier gas tank 110 enters the carrier gas pipeline 120; the second manual diaphragm valve is arranged in the pipeline connecting the first pressure gauge 140, the first pressure sensor 150 and the carrier gas pipeline 120, and the first pressure gauge 140 and the first pressure sensor 150 can monitor and observe the pressure in the carrier gas tank 110 by opening the second manual diaphragm valve; the first pneumatic diaphragm valve is arranged in the carrier gas pipeline 120, and is located The second pressure gauge 160 is upstream of the carrier gas and is used to control whether the carrier gas flows to the purity analysis module 400. The pressure regulating valve is arranged on the carrier gas pipeline 120 and is located upstream of the second pressure gauge 160 and downstream of the first pneumatic diaphragm valve. It is used to adjust the pressure in the carrier gas pipeline 120 and observe through the second pressure gauge 160 whether the pressure in the carrier gas pipeline 120 meets the standard. The first one-way valve is arranged on the carrier gas pipeline 120 and is located downstream of the second pressure gauge 160. It is used to prevent the backflow of the carrier gas to the purity analysis module 400.

[0105] In some embodiments, the first valve assembly 130 includes but is not limited to a diaphragm valve, a regulating valve, and a one-way valve.

[0106] More specifically, the number of the first manual diaphragm valves is two, and the two first manual diaphragm valves are respectively disposed at the gas outlet ports of the corresponding carrier gas tanks 110 .

[0107] It should be noted that the number of the first manual diaphragm valves matches the number of the carrier gas tanks 110. Generally, the number of the first manual diaphragm valves is the same as the number of the carrier gas tanks 110, that is, the first manual diaphragm valves correspond to the carrier gas tanks 110 one by one.

[0108] Furthermore, the carrier gas supply module 100 further includes a first pressure gauge 140, a first pressure sensor 150, and a second pressure gauge 160. The first pressure gauge 140 is in communication with the carrier gas pipeline 120, and is used to monitor the pressure at the connection point between the carrier gas pipeline 120 and the carrier gas tank 110; the first pressure sensor 150 is in communication with the carrier gas pipeline 120, and is used to monitor the pressure at the connection point between the carrier gas pipeline 120 and the carrier gas tank 110; the second pressure gauge 160 is in communication with the carrier gas pipeline 120, and is located upstream of the first valve assembly 130, and is used to monitor the pressure at the connection point between the carrier gas pipeline 120 and the purity analysis module 400.

[0109] Specifically, the first pressure gauge 140 is disposed on the carrier gas pipeline 120 and is located at a position of the carrier gas pipeline 120 close to the carrier gas tank 110 .

[0110] In some of the embodiments, the first pressure gauge 140 includes but is not limited to an electronic pressure gauge.

[0111] Specifically, the first pressure sensor 150 is disposed on the carrier gas pipeline 120 and is located at a position of the carrier gas pipeline 120 close to the carrier gas tank 110 .

[0112] In some of the embodiments, the first pressure sensor 150 includes, but is not limited to, a pressure sensor.

[0113] Specifically, the second pressure gauge 160 is disposed on the carrier gas pipeline 120 and is located at a position of the carrier gas pipeline 120 close to the purity analysis module 400 .

[0114] In some of the embodiments, the second pressure gauge 160 includes but is not limited to an electronic pressure gauge.

[0115] like Figure 2 As shown, the standard gas supply module 200 includes a first standard gas tank 210, a first standard gas pipeline 220 and a second valve assembly 230. The first standard gas tank 210 is used to store standard gas; the first standard gas pipeline 220 is connected to the first standard gas tank 210 and the purity analysis module 400, respectively, and is used to input standard gas and mix it with carrier gas to obtain reference gas; the second valve assembly 230 is arranged on the first standard gas pipeline 220, and is used to control the communication between the first standard gas tank 210 and the purity analysis module 400.

[0116] Specifically, the number of the first standard gas tanks 210 is 5, and the 5 first standard gas tanks 210 are respectively connected to the purity analysis module 400, that is, the 5 first standard gas tanks 210 are arranged in parallel.

[0117] In some embodiments, the first calibration gas tank 210 includes but is not limited to a steel cylinder.

[0118] It should be noted that the number of the first standard gas tanks 210 can also be 4, 6, etc., that is, the number of the first standard gas tanks 210 can be set according to actual needs, and no excessive restrictions are made here.

[0119] Specifically, the first end of the first standard gas pipeline 220 is connected to the first standard gas tank 210 , and the second end of the first standard gas pipeline 220 is connected to the purity analysis module 400 , so that the standard gas in the first standard gas tank 210 can enter the purity analysis module 400 through the first standard gas pipeline 220 .

[0120] In some embodiments, the first standard gas pipeline 220 includes but is not limited to a stainless steel pipe.

[0121] It should be noted that the first end and the second end of the first standard gas pipeline 220 are respectively two ends in the length direction thereof.

[0122] In addition, in order to increase the efficiency of the first standard gas tank 210 supplying standard gas to the purity analysis module 400, there can be multiple first standard gas pipelines 220, and the multiple first standard gas pipelines 220 are respectively connected to the first standard gas tank 210 and the purity analysis module 400, that is, the multiple first standard gas pipelines 220 are arranged in parallel.

[0123] Specifically, the second valve assembly 230 includes a second pneumatic diaphragm valve, a third pneumatic diaphragm valve and a second one-way valve. The second pneumatic diaphragm valve is disposed at the gas outlet port of the first standard gas tank 210, and the second manual diaphragm valve is used to control whether the standard gas in the first standard gas tank 210 enters the first standard gas pipeline 220; the third pneumatic diaphragm valve is disposed in the first standard gas pipeline 220, and is used to control whether the standard gas in the first standard gas tank 210 flows to the purity analysis module 400; the second one-way valve is disposed in the first standard gas pipeline 220, and is located downstream of the third pneumatic diaphragm valve, and is used to prevent the standard gas from flowing back to the purity analysis module 400.

[0124] In some of the embodiments, the second valve assembly 230 includes a diaphragm valve and a one-way valve.

[0125] More specifically, the number of the second manual diaphragm valves is five, and the five second manual diaphragm valves are respectively disposed at the gas outlets of the corresponding first standard gas tanks 210 .

[0126] It should be noted that the number of the second manual diaphragm valves matches the number of the first calibration gas tanks 210. Generally, the number of the second manual diaphragm valves is the same as the number of the first calibration gas tanks 210, that is, the second manual diaphragm valves correspond to the first calibration gas tanks 210 one by one.

[0127] Furthermore, the standard gas supply module 200 further includes a second standard gas tank 240, a second standard gas pipeline 250 and a third valve assembly 260. The second standard gas tank 240 is used to store the standard gas; the second standard gas pipeline 250 is respectively connected to the second standard gas tank 240 and the purity analysis module 400, and is used to input the standard gas and mix it with the carrier gas to obtain the reference gas; the third valve assembly 260 is arranged on the second standard gas pipeline 250, and is used to control the communication between the second standard gas pipeline 250 and the purity analysis module 400.

[0128] Specifically, the number of the second standard gas tanks 240 is three, and the three second standard gas tanks 240 are respectively connected to the purity analysis module 400 , that is, the three second standard gas tanks 240 are arranged in parallel.

[0129] It should be noted that the number of the second standard gas tanks 240 can also be 2, 4, etc., that is, the number of the second standard gas tanks 240 can be set according to actual needs, and no excessive restrictions are made here.

[0130] In some embodiments, the second calibration gas tank 240 includes but is not limited to a steel cylinder.

[0131] Specifically, the first end of the second standard gas pipeline 250 is connected to the second standard gas tank 240, and the second end of the second standard gas pipeline 250 is connected to the first standard gas pipeline 220, so that the standard gas in the second standard gas tank 240 can enter the purity analysis module 400 through the second standard gas pipeline 250 and the first standard gas pipeline 220.

[0132] In some embodiments, the second standard gas pipeline 250 includes but is not limited to a stainless steel pipe.

[0133] It should be noted that the first end and the second end of the second standard gas pipeline 250 are respectively two ends in the length direction thereof.

[0134] In addition, in order to increase the efficiency of the second standard gas tank 240 supplying standard gas to the purity analysis module 400, there can be several second standard gas pipelines 250, and the several second standard gas pipelines 250 are respectively connected to the second standard gas tank 240 and the purity analysis module 400, that is, the several second standard gas pipelines 250 are arranged in parallel.

[0135] Specifically, the third valve assembly 260 includes a fourth pneumatic diaphragm valve, which is disposed at the gas outlet of the second calibration gas tank 240 and is used to open or close the communication between the second calibration gas tank 240 and the second calibration gas pipeline 250 .

[0136] More specifically, the number of the fourth pneumatic diaphragm valves is three, and the three fourth pneumatic diaphragm valves are respectively disposed at the gas outlet ports of the corresponding second standard gas tanks 240 .

[0137] In some of the embodiments, the third valve assembly 260 includes, but is not limited to, a diaphragm valve.

[0138] It should be noted that the number of the fourth pneumatic diaphragm valves matches the number of the second calibration gas tanks 240. Generally, the number of the fourth pneumatic diaphragm valves is the same as the number of the second calibration gas tanks 240, that is, the fourth pneumatic diaphragm valves correspond to the second calibration gas tanks 240 one by one.

[0139] Furthermore, the standard gas supply module 200 further includes a weight monitoring component 270 , which is disposed below the first standard gas tank 210 and the second standard gas tank 240 to monitor the weight of the first standard gas tank 210 and the second standard gas tank 240 .

[0140] Specifically, the weight monitoring component 270 is disposed at the bottom of the first standard gas tank 210 and the second standard gas tank 240 , and abuts against the first standard gas tank 210 and the second standard gas tank 240 .

[0141] It should be noted that the weight monitoring parts 270 match the number of the first standard gas tank 210 and the second standard gas tank 240. Generally, the weight monitoring parts 270 are the same as the number of the first standard gas tank 210 and the second standard gas tank 240, that is, the weight monitoring parts 270 correspond to the first standard gas tank 210 and the second standard gas tank 240 one by one.

[0142] like Figure 2 As shown, the raw material gas supply module 300 includes a raw material gas pipeline 310. The raw material gas pipeline 310 is connected to the raw material gas supply device and the purity analysis module 400 respectively, and is used to input the raw material gas and mix it with the carrier gas to obtain the gas to be tested.

[0143] Specifically, the first end of the raw gas pipeline 310 is connected to the purity analysis module 400, and the second end of the raw gas pipeline 310 is connected to the gas source of each stage; it should be noted that the first end and the second end of the raw gas pipeline 310 are respectively the two ends in its length direction.

[0144] It should be noted that the gas sources at each stage include the He purification area, NH3 raw material tank, the first reboiler area, the absorber packaging area, the product tank area, the filling area, etc.

[0145] In addition, when there is one raw gas pipeline 310, the raw gas pipeline 310 is connected to the gas source of each stage respectively; when there are several raw gas pipelines 310, the several raw gas pipelines 310 correspond one-to-one to the gas source of each stage, and the several raw gas pipelines 310 are connected to the purity analysis module 400 respectively.

[0146] By delivering the gas from each stage of the gas source to the purity analysis module 400 through a separate pipeline, gas mixing can be avoided and the accuracy of gas analysis can be improved.

[0147] like Figure 2 As shown, the purity analysis module 400 includes a first analysis component 410 and a second analysis component 420. The first analysis component 410 is connected to the carrier gas supply module 100, the standard gas supply module 200, and the raw gas supply module 300, respectively, and is used to analyze the reference gas and the gas to be tested to obtain the first analysis result and the second analysis result; the second analysis component 420 is connected to the first analysis component 410, and is used to determine whether the purity analysis module 400 is working normally according to the first analysis result, and to determine whether the purity of the gas to be tested meets the standard according to the first analysis result and the second analysis result.

[0148] Specifically, the first analysis element 410 is connected to the carrier gas pipeline 120, the first standard gas pipeline 220, and the raw material gas pipeline 310 through pipelines.

[0149] In some of the embodiments, the first analysis component 410 includes but is not limited to a gas analyzer.

[0150] Specifically, the second analysis component 420 is connected to the first analysis component 410 for communication, and is used to compare the first analysis result and the second analysis result, so as to determine whether the purity of the gas to be tested meets the standard.

[0151] In some of the embodiments, the second analysis component 420 includes but is not limited to an MCU, a Raspberry Pi, and a single-chip microcomputer.

[0152] like Figure 3 As shown, the recovery module 500 includes a condensation element 510, a gas recovery pipeline 520 and a fourth valve assembly 530. The condensation element 510 is respectively connected to the standard gas supply module 200 and the purity analysis module 400, and is used to recover the recoverable raw gas in the purity analysis module 400 and the standard gas in the raw gas supply module 300; the gas recovery pipeline 520 is respectively connected to the condensation element 510 and the standard gas supply module 200, and is used to transport ammonia; the fourth valve assembly 530 is arranged on the gas recovery pipeline 520, and is used to control the connection between the condensation element 510 and the standard gas supply module 200.

[0153] Specifically, the condensing element 510 is connected with the standard gas supply module 200 and the purity analysis module 400 through pipelines.

[0154] In some of the embodiments, the condensing element 510 includes but is not limited to a condenser.

[0155] Specifically, the first end of the gas recovery pipeline 520 is connected to the second standard gas pipeline 250, and the second end of the gas recovery pipeline 520 is connected to the condensation element 510; it should be noted that the first end and the second end of the gas recovery pipeline 520 are respectively the two ends in its length direction.

[0156] In some of the embodiments, the gas recovery line 520 includes, but is not limited to, a stainless steel pipe.

[0157] Specifically, the fourth valve assembly 530 includes a fifth pneumatic diaphragm valve and a third one-way valve. The fifth pneumatic diaphragm valve is disposed in the gas recovery pipeline 520 to open or close the connection between the gas recovery pipeline 520 and the second standard gas pipeline 250; the third one-way valve is disposed in the gas recovery pipeline 520 and is located downstream of the fifth pneumatic diaphragm valve to prevent the gas entering the gas recovery pipeline 520 from flowing back.

[0158] like Figure 3As shown, the gas processing module 600 includes a first exhaust gas output pipeline 610, a fifth valve assembly 620, a second exhaust gas output pipeline 630, a sixth valve assembly 640 and a third exhaust gas output pipeline 650. Among them, the first exhaust gas output pipeline 610 is respectively connected to the carrier gas supply module 100 and the exhaust gas treatment tank for conveying exhaust gas; the fifth valve assembly 620 is arranged on the first exhaust gas output pipeline 610, and is used to control the communication between the carrier gas supply module 100 and the exhaust gas treatment tank; the second exhaust gas output pipeline 630 is respectively connected to the standard gas supply module 200 and the exhaust gas treatment tank for conveying exhaust gas; the sixth valve assembly 640 is arranged on the second exhaust gas output pipeline 630, and is used to control the communication between the standard gas supply module 200 and the exhaust gas treatment tank; the third exhaust gas output pipeline 650 is respectively connected to the purity analysis module 400 and the exhaust gas treatment tank for conveying exhaust gas.

[0159] Specifically, a first end of the first exhaust gas output pipeline 610 is communicated with the carrier gas pipeline 120 , and a second end of the first exhaust gas output pipeline 610 is communicated with the exhaust gas treatment tank.

[0160] It should be noted that the first end and the second end of the first exhaust gas output pipeline 610 are respectively the two ends of its length.

[0161] In some of the embodiments, the first exhaust gas output pipe 610 includes but is not limited to a stainless steel pipe.

[0162] Specifically, the fifth valve assembly 620 includes a sixth pneumatic diaphragm valve and a fourth one-way valve. The sixth pneumatic diaphragm valve is disposed in the first exhaust gas output pipeline 610, and is used to open or close the connection between the first exhaust gas output pipeline 610 and the carrier gas pipeline 120; the fourth one-way valve is disposed in the first exhaust gas output pipeline 610, and is located downstream of the fifth pneumatic diaphragm valve, and is used to prevent the gas entering the first exhaust gas output pipeline 610 from flowing back.

[0163] In some of the embodiments, the fifth valve assembly 620 includes but is not limited to a diaphragm valve and a one-way valve.

[0164] Specifically, a first end of the second exhaust gas output pipeline 630 is communicated with the second standard gas pipeline 250 , and a second end of the second exhaust gas output pipeline 630 is communicated with the exhaust gas treatment tank.

[0165] It should be noted that the first end and the second end of the second exhaust gas output pipeline 630 are respectively two ends in the length direction thereof.

[0166] In some of the embodiments, the second exhaust gas output pipe 630 includes but is not limited to a stainless steel pipe.

[0167] Specifically, the sixth valve assembly 640 includes a seventh pneumatic diaphragm valve and a fifth one-way valve. The seventh pneumatic diaphragm valve is disposed in the second exhaust gas output pipeline 630, and is used to open or close the connection between the second exhaust gas output pipeline 630 and the second standard gas pipeline 250; the fifth one-way valve is disposed in the second exhaust gas output pipeline 630, and is located downstream of the seventh pneumatic diaphragm valve, and is used to prevent the gas entering the second exhaust gas output pipeline 630 from flowing back.

[0168] In some of the embodiments, the sixth valve assembly 640 includes but is not limited to a diaphragm valve and a one-way valve.

[0169] Specifically, a first end of the third exhaust gas output pipeline 650 is connected to the first analysis component 410, and a second end of the third exhaust gas output pipeline 650 is connected to the carrier gas pipeline 120, for discharging the tested gas in the first analysis component 410 into the exhaust gas treatment pool.

[0170] In some of the embodiments, the third exhaust gas output pipe 650 includes but is not limited to a stainless steel pipe.

[0171] The method of using this embodiment is as follows:

[0172] (1) Gas supply

[0173] Manually open the first manual diaphragm valve and the second manual diaphragm valve to open the communication between the carrier gas tank 110 and the first pressure gauge 140 and the first pressure sensor 150. The pressure in the carrier gas tank 110 can be monitored and observed through the first pressure gauge 140 and the first pressure sensor 150.

[0174] When the pressure displayed on the first pressure gauge 140 meets the standard, the system opens the first pneumatic diaphragm valve and adjusts the pressure through the pressure regulating valve. When the pressure displayed on the second pressure gauge 160 is appropriate, the carrier gas in the carrier gas tank 110 can flow to the first analysis element 410.

[0175] The system opens the second pneumatic diaphragm valve and the third pneumatic diaphragm valve to open the communication between the first standard gas tank 210 and the first analysis component 410, so that the standard gas is mixed with the carrier gas in the first analysis component 410 to obtain the reference gas;

[0176] The system uses the raw gas pipeline 310 to allow the gas source of each stage to enter the first analysis component 410 and mix with the carrier gas to obtain the gas to be tested.

[0177] (II) Gas analysis

[0178] The system starts the first analysis component 410, and analyzes the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result, and determines whether the purity analysis module 400 is working normally based on the first analysis result, and determines whether the purity of the gas to be tested meets the standard based on the first analysis result and the second analysis result.

[0179] (III) Waste gas treatment

[0180] The system opens the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, and the seventh pneumatic diaphragm valve to open the first analysis component 410, the carrier gas pipeline 120, the first standard gas pipeline 220 and the first exhaust gas output pipeline 610, the second exhaust gas output pipeline 630 and the third exhaust gas output pipeline 650, so that the exhaust gas in the first analysis component 410 and the carrier gas pipeline 120 and the first standard gas pipeline 220 can be discharged to the exhaust gas treatment pool.

[0181] (IV) Gas Recovery

[0182] The system opens the fourth pneumatic diaphragm valve to open the second standard gas pipeline 250 and connect it to the gas recovery pipeline 520, so that the ammonia in the first analysis component 410 and the first standard gas pipeline 220 can be transported to the condensation component 510 for condensation, and the condensed gas can be recovered.

[0183] The advantage of this embodiment is that by setting up a first standard gas tank and connecting it with the first analysis component, the first standard gas tank can supply standard gas to the first analysis component, and the first analysis result of the reference gas by the first analysis component can be used to judge whether the first analysis component can operate normally, thereby avoiding the occurrence of erroneous analysis results due to damage to the first analysis component; by setting up a first exhaust gas output pipeline, a second exhaust gas output pipeline, and a third exhaust gas output pipeline and connecting the exhaust gas treatment group pool with the first analysis component, the carrier gas tank, and the first standard gas tank, the exhaust gas in the first analysis component and the pipeline can be recovered and the exhaust gas can be treated; by setting up a first gas recovery pipeline and connecting the condensing component with the second standard gas pipeline, the recycling of resources can be realized for secondary utilization.

[0184] Example 2

[0185] This embodiment is a variation of the embodiment 1. The main difference between this embodiment 1 and the embodiment 1 is that the structure of the standard gas supply module 200 is different.

[0186] like Figure 4As shown, the ammonia analysis device further includes a purge module 700, a pressure maintaining module 800 and a pressure relief module 900. The purge module 700 is respectively connected to the standard gas supply module 200 and the purity analysis module 400 for purge; the pressure maintaining module 800 is respectively connected to the standard gas supply module 200 and the purity analysis module 400 for pressure maintenance; the pressure relief module 900 is respectively connected to the standard gas supply module 200 and the gas processing module 600 for pressure relief.

[0187] like Figure 5 As shown, the purge module 700 includes a first purge gas supply pipeline 710, a second purge gas supply pipeline 720, a seventh valve assembly 730 and a second pressure sensor 740. The first purge gas supply pipeline 710 is respectively connected to the purge gas source and the standard gas supply module 200, and is used to supply purge gas to the pipeline; the second purge gas supply pipeline 720 is respectively connected to the purge gas source and the purity analysis module 400, and is used to supply purge gas to the purity analysis module 400; the seventh valve assembly 730 is arranged on the first purge gas supply pipeline 710, and is used to control the connection between the purge gas source and the standard gas supply module 200; the second pressure sensor 740 is connected to the first purge gas supply pipeline 710, and is used to monitor the pressure in the first purge gas supply pipeline 710.

[0188] It should be noted that the purge gas source includes but is not limited to N2.

[0189] Specifically, the first end of the first purge gas supply pipeline 710 is connected to the purge gas source, and the second end of the first purge gas supply pipeline 710 is connected to the first standard gas pipeline 220; it should be noted that the first end and the second end of the first purge gas supply pipeline 710 are respectively the two ends in its length direction.

[0190] In some embodiments, the first purge gas supply line 710 includes, but is not limited to, a stainless steel pipe.

[0191] Specifically, the first end of the second purge gas supply pipeline 720 is connected to the purge gas source, and the second end of the second purge gas supply pipeline 720 is connected to the first analysis component 410; it should be noted that the first end and the second end of the second purge gas supply pipeline 720 are respectively the two ends in its length direction.

[0192] In some embodiments, the second purge gas supply line 720 includes, but is not limited to, a stainless steel pipe.

[0193] Specifically, the seventh valve assembly 730 includes an eighth pneumatic diaphragm valve, a seventh one-way valve and a ninth pneumatic diaphragm valve. The eighth pneumatic diaphragm valve is arranged on the first purge gas supply pipeline 710, and is used to open or close the connection between the purge gas source and the pipeline; the seventh one-way valve is arranged on the first purge gas supply pipeline 710, and is located downstream of the eighth pneumatic diaphragm valve, and is used to prevent the purge gas entering the first purge gas supply pipeline 710 from backflowing; the ninth pneumatic diaphragm valve is arranged on the first purge gas supply pipeline 710, and is located downstream of the seventh one-way valve, and is used to open or close the connection between the first purge gas supply pipeline 710 and the first standard gas pipeline 220, so that the purge gas can purge the pipeline and the first analysis element 410.

[0194] In some of the embodiments, the seventh valve assembly 730 includes but is not limited to a diaphragm valve and a one-way valve.

[0195] Specifically, the second pressure sensor 740 is disposed in the first purge gas supply pipeline 710 and is located between the seventh one-way valve and the ninth pneumatic diaphragm valve, and is used to monitor the pressure in the first purge gas supply pipeline 710 .

[0196] In some of these embodiments, the second pressure sensor 740 includes, but is not limited to, a gas pressure sensor.

[0197] like Figure 5 As shown, the pressure-maintaining module 800 includes a first pressure-maintaining gas supply pipeline 810, a second pressure-maintaining gas supply pipeline 820, an eighth valve assembly 830 and a third pressure sensor 840. The first pressure-maintaining gas supply pipeline 810 is respectively connected to the pressure-maintaining gas source and the standard gas supply module 200, and is used to supply pressure-maintaining gas to the pipeline; the second pressure-maintaining gas supply pipeline 820 is respectively connected to the pressure-maintaining gas source and the purity analysis module 400, and is used to supply pressure-maintaining gas to the purity analysis module 400; the eighth valve assembly 830 is arranged on the first pressure-maintaining gas supply pipeline 810, and is used to control the connection between the pressure-maintaining gas source and the standard gas supply module 200; the third pressure sensor 840 is connected to the first pressure-maintaining gas supply pipeline 810, and is used to monitor the pressure in the first pressure-maintaining gas supply pipeline 810.

[0198] It should be noted that the pressure-maintaining gas source includes but is not limited to He.

[0199] Specifically, a first end of the first pressure-maintaining gas supply pipeline 810 is in communication with a pressure-maintaining gas source, and a second end of the first pressure-maintaining gas supply pipeline 810 is in communication with the first standard gas pipeline 220 .

[0200] It should be noted that the first end and the second end of the first pressure-maintaining gas supply pipeline 810 are respectively two ends in the length direction thereof.

[0201] In some of the embodiments, the first pressure maintaining gas supply pipeline 810 includes but is not limited to a stainless steel pipe.

[0202] Specifically, a first end of the second pressure-maintaining gas supply pipeline 820 is in communication with a pressure-maintaining gas source, and a second end of the second pressure-maintaining gas supply pipeline 820 is in communication with the first analysis component 410 .

[0203] It should be noted that the first end and the second end of the second pressure-maintaining gas supply pipeline 820 are respectively two ends in the length direction thereof.

[0204] In some of the embodiments, the second pressure maintaining gas supply pipeline 820 includes but is not limited to a stainless steel pipe.

[0205] Specifically, the eighth valve assembly 830 includes a tenth pneumatic diaphragm valve, an eighth one-way valve, and an eleventh pneumatic diaphragm valve. The tenth pneumatic diaphragm valve is arranged in the first pressure-maintaining gas supply pipeline 810, and is used to open or close the connection between the pressure-maintaining gas source and the pipeline; the eighth one-way valve is arranged in the first pressure-maintaining gas supply pipeline 810, and is located downstream of the tenth pneumatic diaphragm valve, and is used to prevent the pressure-maintaining gas entering the first pressure-maintaining gas supply pipeline 810 from backflowing; the eleventh pneumatic diaphragm valve is arranged in the first pressure-maintaining gas supply pipeline 810, and is located downstream of the eighth one-way valve, and is used to open or close the connection between the first pressure-maintaining gas supply pipeline 810 and the first standard gas pipeline 220, so that the pressure-maintaining gas can maintain pressure on the first standard gas pipeline 220 and the first analysis component 410.

[0206] In some of the embodiments, the eighth valve assembly 830 includes but is not limited to a diaphragm valve and a one-way valve.

[0207] Specifically, the third pressure sensor 840 is disposed in the first pressure-maintaining gas supply pipeline 810 and is located between the eighth one-way valve and the eleventh pneumatic diaphragm valve, and is used to monitor the pressure in the first pressure-maintaining gas supply pipeline 810 .

[0208] In some of these embodiments, the third pressure sensor 840 includes, but is not limited to, a pressure sensor.

[0209] like Figure 6As shown, the pressure relief module 900 includes a pressure relief pipeline 910, a safety valve 920, a pressure relief valve 930, a ninth valve assembly 940 and a third pressure gauge 950. The pressure relief pipeline 910 is respectively connected to the standard gas supply module 200 and the gas processing module 600 for pressure relief; the safety valve 920 is arranged on the pressure relief pipeline 910 for automatically releasing pressure when the pressure in the pressure relief pipeline 910 is too high; the pressure relief valve 930 is arranged on the pressure relief pipeline 910 and is located downstream of the safety valve 920 for pressure relief; the ninth valve assembly 940 is arranged on the pressure relief pipeline 910 for controlling the connection between the standard gas supply module 200 and the gas processing module 600; the third pressure gauge 950 is connected to the pressure relief pipeline 910 for monitoring the pressure in the pressure relief pipeline 910.

[0210] Specifically, a first end of the pressure relief pipeline 910 is in communication with the first standard gas pipeline 220 , and a second end of the pressure relief pipeline 910 is in communication with the second exhaust gas output pipeline 630 .

[0211] It should be noted that the first end and the second end of the pressure relief pipeline 910 are respectively two ends in the length direction thereof.

[0212] In some of the embodiments, the pressure relief line 910 includes but is not limited to a stainless steel pipe.

[0213] Specifically, the safety valve 920 is disposed in the pressure relief pipeline 910 , and when the pressure in the pressure relief pipeline 910 is too high, the safety valve 920 can be automatically opened.

[0214] In some of these embodiments, the safety valve 920 includes, but is not limited to, an open safety valve.

[0215] Specifically, the pressure relief valve 930 is disposed in the pressure relief pipeline 910 and is located downstream of the safety valve 920. The gas in the pressure relief pipeline 910 can enter the second exhaust gas output pipeline 630 through the pressure relief valve 930, thereby relieving the pressure in the pipeline.

[0216] In some of the embodiments, the pressure relief valve 930 includes, but is not limited to, a spring-loaded safety valve.

[0217] Specifically, the ninth valve assembly 940 includes a third manual diaphragm valve and a ninth one-way valve. The third manual diaphragm valve is arranged on the pressure relief pipeline 910 and is located upstream of the safety valve 920, and is used to open or close the connection between the pressure relief pipeline 910 and the first standard gas pipeline 220; the ninth one-way valve is arranged on the pressure relief pipeline 910 and is located downstream of the pressure relief valve 930, and is used to prevent the gas in the pressure relief pipeline 910 from backflowing.

[0218] In some of the embodiments, the ninth valve assembly 940 includes but is not limited to a diaphragm valve and a one-way valve.

[0219] Specifically, the third pressure gauge 950 is disposed in the pressure relief pipeline 910 and is located between the safety valve 920 and the pressure relief valve 930 , and is used to monitor the pressure in the pressure relief pipeline 910 .

[0220] In some of these embodiments, the third pressure gauge 950 includes, but is not limited to, a gas pressure gauge.

[0221] The method of using this embodiment is as follows:

[0222] (I) Pipeline inspection before reaction

[0223] The system opens the third pneumatic diaphragm valve, the tenth pneumatic diaphragm valve and the eleventh pneumatic diaphragm valve to allow the pressure-maintaining gas to flow into the first analysis component 410 and the pipeline, and continuously observes the third pressure sensor 840. When the value of the third pressure sensor 840 does not change, the entire pipeline is normal.

[0224] (II) Pipeline cleaning before reaction

[0225] The system opens the third pneumatic diaphragm valve, the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the seventh pneumatic diaphragm valve, the eighth pneumatic diaphragm valve, and the ninth pneumatic diaphragm valve, so that the purge gas can purge the first analysis component 410, the carrier gas pipeline 120, and the first standard gas pipeline 220, and the gas in the first analysis component 410, the carrier gas pipeline 120, and the first standard gas pipeline 220 can be discharged through the first exhaust gas output pipeline 610, the second exhaust gas output pipeline 630, and the third exhaust gas output pipeline 650, respectively.

[0226] (III) Pressure relief

[0227] When the pressure in the pipeline of the overall device is too high, the system opens the twelfth pneumatic diaphragm valve to open the connection between the second standard gas pipeline 250 and the pressure relief pipeline 910, and transports the gas in the pipeline to the second exhaust gas output pipeline 630 through the pressure relief pipeline 910, thereby achieving pressure relief operation on the overall pipeline;

[0228] When the air pressure in the pressure relief pipeline 910 is too high, the safety valve 920 may be punctured to achieve automatic pressure relief.

[0229] (IV) Prepare gas

[0230] When the calibration gas in the first calibration gas tank 210 is exhausted, the system opens the third valve assembly 260 to open the communication between the second calibration gas tank 240 and the first analysis component 410 , so that the calibration gas in the second calibration gas tank 240 can flow to the first analysis component 410 .

[0231] The advantage of this embodiment is that by providing a pressure relief pipeline and connecting it with the second exhaust gas output pipeline and the first standard gas pipeline, when the pressure in the pipeline of the entire device is too high, the pressure of the entire pipeline can be relieved through the pressure relief pipeline to ensure the safety of the device; and by providing a second standard gas tank, when the standard gas in the first standard gas tank is exhausted, the second standard gas tank can be opened, thereby avoiding the situation where the entire device stops operating due to the need to replace the first standard gas tank, thereby ensuring the working efficiency of the device.

[0232] Example 3

[0233] This embodiment relates to a semiconductor process system of the utility model.

[0234] An illustrative embodiment of the present invention is a semiconductor process system, comprising an ammonia analysis device as described in any one of Embodiments 1 to 3.

[0235] Furthermore, the semiconductor process system also includes a plurality of process chambers, and the plurality of process chambers are respectively connected to the ammonia analysis device.

[0236] Specifically, several process chambers are respectively communicated with the purity analysis modules 400 .

[0237] Furthermore, several process chambers are also connected to the purge modules 700 respectively.

[0238] Example 4

[0239] This embodiment is a specific implementation of the present utility model, corresponding to Embodiment 1 to Embodiment 3.

[0240] like Figure 7 As shown, a purity analysis system includes a first gas supply module, a second gas supply module, a third gas supply module, an analysis module, a gas recovery module, a waste gas treatment module, a purge module, a pressure maintaining module and a pressure relief module.

[0241] Among them, the first gas supply module includes two carrier gas storage tanks, a manual diaphragm valve MV1, a manual diaphragm valve MV2, a manual diaphragm valve MV3, a pressure gauge PG2, a pressure sensor PT1, a pneumatic diaphragm valve PV1, a regulating valve REG1, a pressure gauge PG1, and a one-way valve CV1.

[0242] Among them, the second gas supply module includes five standard gas storage tanks, pneumatic diaphragm valve PV10, pneumatic diaphragm valve PV11, pneumatic diaphragm valve PV12, pneumatic diaphragm valve PV13, pneumatic diaphragm valve PV14, pneumatic diaphragm valve PV15, pneumatic diaphragm valve PV15, one-way valve CV8, and one-way valve CV9.

[0243] Among them, the third gas supply module includes He PURIFIER ZONE He purification zone, NH3 RAW TANK NH3 raw material tank, 1ST REBOILER ZONE first reboiler zone, ABSORBER PACKAGE absorber packaging zone, PRODUCT TANKZONE product tank zone, and FILLING ZONE filling zone.

[0244] Wherein, the analysis module includes an analyzer.

[0245] Among them, the gas recovery module includes 1ST CONDENSER first condenser, pneumatic diaphragm valve PV9, and one-way valve CV7.

[0246] Among them, the exhaust gas treatment module includes NH3 WET SCRUBBER NH3 wet scrubber, pneumatic diaphragm valve PV2, one-way valve CV2, pneumatic diaphragm valve PV3, one-way valve CV3, pneumatic diaphragm valve PV8, and one-way valve CV6.

[0247] Among them, the purge module includes N2 PURIFIER ZONE N2 purification zone, pneumatic diaphragm valve PV6, one-way valve CV5, pressure sensor PT3, and pneumatic diaphragm valve PV7.

[0248] Among them, pressure maintaining module He PURIFIER ZONE He purification zone, pneumatic diaphragm valve PV4, check valve CV4, pressure sensor PT2, pneumatic diaphragm valve PV5.

[0249] Among them, the pressure relief module includes a manual diaphragm valve MV4, a safety valve PRD, a pressure relief valve SV, and a one-way valve CV10.

[0250] The method of using this embodiment is as follows:

[0251] (1) The system starts the He PURIFIER ZONE and opens PV4, PV4, PV10, and PV11 to open the interconnecting pipes between the first pressure-maintaining gas supply pipeline, the first standard gas pipeline, and the analyzer;

[0252] Subsequently, the pressure-maintaining gas passes through CV4, CV8, and CV9, so that the pressure-maintaining gas can enter the analyzer and the pipeline, and PT2 is continuously observed. When the number of PT2 does not change, the entire pipeline is normal.

[0253] (2) The system turns on N2 PURIFIER ZONE, and opens PV2, PV3, PV6, PV8, PV9, PV10, and PV11 to open the interconnection between the first purge gas supply pipeline, the first standard gas pipeline, the analyzer, and the second exhaust gas output pipeline, and the interconnection between the analyzer, the first exhaust gas output pipeline, and the third exhaust gas output pipeline, so that the purge gas can enter the analyzer, the carrier gas pipeline, and the first standard gas pipeline through CV2, CV3, CV5, CV8, and CV9, and the gases in the first analysis unit, the carrier gas pipeline, and the first standard gas pipeline are discharged through the first exhaust gas output pipeline, the second exhaust gas output pipeline, and the third exhaust gas output pipeline, respectively.

[0254] (3) The system opens MV1, MV2, and MV3 to open the connection between the carrier gas storage tank and PG2, and the pressure in the carrier gas tank can be monitored and observed through PG2;

[0255] When the pressure displayed on PG2 meets the standard, the system opens PV1 and adjusts the pressure through REG1. When the pressure displayed on PG1 is appropriate, the carrier gas in the carrier tank can flow to the analyzer through CV1.

[0256] (4) The system opens PV10, PV11, PV12, PV13, PV14, PV15, and PV16 to open the connection between the first standard gas tank and the analyzer, so that the standard gas is mixed with the carrier gas in the analyzer to obtain the reference gas.

[0257] (5) The system starts He PURIFIER ZONE, NH3 RAW TANK, 1ST REBOILER ZONE, ABSORBERPACKAGE, PRODUCT TANK ZONE, and FILLING ZONE, so that the gas sources of each stage enter the analyzer and mix with the carrier gas to obtain the gas to be tested.

[0258] (6) The system starts the analyzer and analyzes the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result, and determines whether the analyzer is working normally based on the first analysis result, and determines whether the purity of the gas to be tested meets the standard based on the first analysis result and the second analysis result.

[0259] (7) The system opens PV2, PV3, and PV8 to open the analyzer, the carrier gas pipeline, the first standard gas pipeline, and the first exhaust gas output pipeline, the second exhaust gas output pipeline, and the third exhaust gas output pipeline, so that the exhaust gas in the analyzer, the carrier gas pipeline, and the first standard gas pipeline can be discharged to the exhaust gas treatment pool through CV2, CV3, and CV6.

[0260] (8) The system opens PV9 to open the first standard gas pipeline and connect it to the 1ST CONDENSER, so that the ammonia in the analyzer, the standard gas tank and the first standard gas pipeline can be transported to the 1ST CONDENSER through CV7 for condensation, and the condensed gas can be recovered.

[0261] (9) In case the pressure in the pipeline of the whole device is too high, manually open MV4 to open the connection between the first standard gas pipeline and the pressure relief valve;

[0262] When the air pressure in the pressure relief pipeline is too high, the PRD can be punctured, and then the system opens the SV to connect the pressure relief pipeline with the second exhaust gas output pipeline. The gas in the entire system pipeline can be transported to the second exhaust gas output pipeline through CV10, thereby achieving pressure relief operation on the entire pipeline.

[0263] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0264] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. An ammonia analysis device, characterized in that: include: A carrier gas supply module, wherein the carrier gas supply module is used to input carrier gas; A standard gas supply module, the standard gas supply module is used to input standard gas and mix it with carrier gas to obtain reference gas; A raw material gas supply module, the raw material gas supply module is used to input raw material gas and mix it with carrier gas to obtain a gas to be tested; a purity analysis module, the purity analysis module being connected to the carrier gas supply module, the standard gas supply module, and the raw gas supply module, respectively, and being used for analyzing the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result, judging whether the purity analysis module works normally according to the first analysis result, and judging whether the purity of the gas to be tested meets the standard according to the first analysis result and the second analysis result; A recovery module, the recovery module is connected to the standard gas supply module and the purity analysis module, and is used to recover the gas; A gas processing module is connected to the carrier gas supply module, the standard gas supply module and the purity analysis module respectively, and is used for outputting waste gas.

2. The ammonia analysis device according to claim 1, characterized in that: The carrier gas supply module comprises: A carrier gas tank, the carrier gas tank being used to store carrier gas; A carrier gas pipeline, the carrier gas pipeline is respectively connected to the carrier gas tank and the purity analysis module, and is used for conveying carrier gas; a first valve assembly, the first valve assembly being disposed in the carrier gas pipeline and being used to control the communication between the carrier gas tank and the purity analysis module; and / or The standard gas supply module comprises: A first standard gas tank, wherein the first standard gas tank is used to store standard gas; A first standard gas pipeline, the first standard gas pipeline is connected to the first standard gas tank and the purity analysis module respectively, and is used for inputting standard gas and mixing it with carrier gas to obtain reference gas; a second valve assembly, the second valve assembly being disposed in the first standard gas pipeline and being used for controlling the communication between the first standard gas tank and the purity analysis module; and / or The raw gas supply module comprises: A raw material gas pipeline is connected to the raw material gas supply device and the purity analysis module respectively, and is used to input the raw material gas and mix it with the carrier gas to obtain the gas to be tested.

3. The ammonia analysis device according to claim 2, characterized in that: The carrier gas supply module also includes: a first pressure gauge, the first pressure gauge being in communication with the carrier gas pipeline and being used for monitoring the pressure at the connection point between the carrier gas pipeline and the carrier gas tank; a first pressure sensor, the first pressure sensor being in communication with the carrier gas pipeline and being used to monitor the pressure at a point where the carrier gas pipeline is in communication with the carrier gas tank; a second pressure gauge, the second pressure gauge being connected to the carrier gas pipeline and being located upstream of the first valve assembly, and being used to monitor the pressure at the connection point between the carrier gas pipeline and the purity analysis module; and / or The standard gas supply module also includes: a second standard gas tank, the second standard gas tank being used to store standard gas; A second standard gas pipeline, the second standard gas pipeline is connected to the second standard gas tank and the purity analysis module respectively, and is used for inputting standard gas and mixing it with carrier gas to obtain reference gas; a third valve assembly, the third valve assembly being disposed on the second standard gas pipeline and being used for controlling the communication between the second standard gas pipeline and the purity analysis module; and / or The standard gas supply module also includes: A weight monitoring component is disposed below the first standard gas tank and the second standard gas tank, and is used to monitor the weight of the first standard gas tank and the second standard gas tank.

4. The ammonia analysis device according to claim 1, characterized in that: The purity analysis module comprises: A first analysis component, which is connected to the carrier gas supply module, the standard gas supply module, and the raw gas supply module, respectively, and is used to analyze the reference gas and the gas to be tested to obtain a first analysis result and a second analysis result; The second analysis component is connected to the first analysis component and is used to determine whether the purity analysis module works normally according to the first analysis result, and to determine whether the purity of the gas to be tested meets the standard according to the first analysis result and the second analysis result.

5. The ammonia analysis device according to claim 1, characterized in that: The recovery module comprises: A condensation component, the condensation component is communicated with the standard gas supply module and the purity analysis module respectively, and is used to recover the recoverable raw gas in the purity analysis module and the standard gas in the raw gas supply module; A gas recovery pipeline, the gas recovery pipeline is respectively connected to the condensing element and the standard gas supply module, and is used for conveying ammonia; A fourth valve assembly is provided in the gas recovery pipeline and is used to control the communication between the condensation element and the standard gas supply module.

6. The ammonia analysis device according to claim 1, characterized in that: The gas processing module comprises: A first exhaust gas output pipeline, the first exhaust gas output pipeline is connected to the carrier gas supply module and the exhaust gas treatment tank respectively, and is used to transport the exhaust gas; a fifth valve assembly, the fifth valve assembly being disposed in the first exhaust gas output pipeline and being used to control the communication between the carrier gas supply module and the exhaust gas treatment tank; A second exhaust gas output pipeline, the second exhaust gas output pipeline is connected to the standard gas supply module and the exhaust gas treatment tank respectively, and is used to transport the exhaust gas; a sixth valve assembly, the sixth valve assembly being disposed in the second exhaust gas output pipeline and being used for controlling the communication between the standard gas supply module and the exhaust gas treatment tank; A third exhaust gas output pipeline is connected to the purity analysis module and the exhaust gas treatment tank respectively, and is used for conveying exhaust gas.

7. The ammonia analysis device according to claim 1, characterized in that: Also includes: a purge module, the purge module being communicated with the second gas supply module and the analysis module respectively, and being used for purge; a pressure-maintaining module, the pressure-maintaining module being respectively connected to the second gas supply module and the analysis module for maintaining pressure; and / or A pressure relief module is connected to the second gas supply module and the exhaust gas treatment module respectively for pressure relief.

8. The ammonia analysis device according to claim 7, characterized in that: The purge module comprises: a first purge gas supply pipeline, the first purge gas supply pipeline being connected to a purge gas source and the standard gas supply module respectively, and being used for supplying purge gas to the pipeline; a second purge gas supply pipeline, the second purge gas supply pipeline being connected to a purge gas source and the purity analysis module respectively, and being used for supplying purge gas to the purity analysis module; a seventh valve assembly, the seventh valve assembly being arranged in the first purge gas supply pipeline and being used for controlling the communication between the purge gas source and the standard gas supply module; a second pressure sensor, the second pressure sensor being in communication with the first purge gas supply pipeline and configured to monitor the pressure in the first purge gas supply pipeline; and / or The pressure maintaining module comprises: a first pressure-maintaining gas supply pipeline, the first pressure-maintaining gas supply pipeline being connected to a pressure-maintaining gas source and the standard gas supply module, respectively, and being used for supplying pressure-maintaining gas to the pipeline; a second pressure-maintaining gas supply pipeline, the second pressure-maintaining gas supply pipeline being connected to a pressure-maintaining gas source and the purity analysis module, respectively, and being used for supplying pressure-maintaining gas to the purity analysis module; an eighth valve assembly, the eighth valve assembly being disposed in the first pressure-maintaining gas supply pipeline and being used for controlling the communication between the pressure-maintaining gas source and the standard gas supply module; A third pressure sensor is connected to the first pressure-maintaining gas supply pipeline and is used to monitor the pressure in the first pressure-maintaining gas supply pipeline.

9. The ammonia analysis device according to claim 7, characterized in that: The pressure relief module comprises: A pressure relief pipeline, the pressure relief pipeline is respectively connected to the standard gas supply module and the gas processing module for pressure relief; A safety valve, which is arranged on the pressure relief pipeline and is used for automatically releasing pressure when the pressure in the pressure relief pipeline is too high; A pressure relief valve, which is arranged in the pressure relief pipeline and located downstream of the safety valve for pressure relief; a ninth valve assembly, the ninth valve assembly being disposed in the pressure relief pipeline and being used for controlling the communication between the standard gas supply module and the gas processing module; A third pressure gauge is connected to the pressure relief pipeline and is used to monitor the pressure in the pressure relief pipeline.

10. A semiconductor process system, characterized in that: include: An ammonia analysis device as claimed in any one of claims 1 to 9.

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