Projection exposure illumination structure and projection system
By adding collimation lenses, reflectors and convergence lenses between the optical fiber and the optical rod, forming a sealed optical path, and through the two-dimensional angle adjustment component, the problem of dust introduction in the assembly and shim adjustment of the optical fiber and the optical rod is solved, and the problem of dust introduction in the assembly and shim adjustment of the optical fiber and the optical rod is realized. Efficient beam transmission and stable light source output.
Patent Information
- Application Number
- CN202420276118.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-05
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-02-05
AI Technical Summary
In LDI-laser direct writing and laser DLP-3D printing, dust is easily introduced during the assembly and shim adjustment of optical fibers and light rods, resulting in burning of the end surfaces of optical fibers and light rods, especially in industrial applications with high light power, which is more prominent .
A projection exposure illumination structure is designed to form a sealed optical path by adding collimation lenses, mirrors and convergence lenses between the optical fiber and the light rod, ensuring complete sealing between the optical fiber and the convergence lenses, and implementing the reflectors by adjusting the components. The two-dimensional angle adjustment reduces the light energy density and prevents damage caused by dust.
It effectively prevents dust from entering, avoids damage to the end surface of the optical fiber and the optical rod, improves the safety and efficiency of assembly and adjustment, ensures the purity and stability of the light beam, and is suitable for industrial applications with high light power.
Smart Images
Figure CN222145388U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of projection, in particular to a projection exposure lighting structure and a projection system. Background Art
[0002] In LDI-laser direct writing exposure, laser DLP-3D printing and other solutions, the main structure is divided into four parts: laser light source, illumination optical path structure, DMD chip, and imaging lens. The laser light source is connected to the illumination optical path through optical fiber transmission. The illumination optical path is composed of a uniform field device light rod and a relay lens group.
[0003] In the above scheme, if Figure 1-4 As shown, the conventional optical fiber 4 is directly connected to the light rod 5 of the illumination light path and is locked by the connecting flange 1. There is no other protection at the connection. When assembling the optical fiber and the light rod, the flange protection must be removed and then they must be manually inserted and the flange nut 2 must be tightened to lock them. When adjusting the uniform field, the relative position of the optical fiber and the light rod 5 must be manually moved to adjust the light uniformity of the exposure surface. Both of these operations will expose the light output end face to the external air, causing dust to enter. The optical fiber 4 outlet and the light rod 5 inlet are both places where light energy is most concentrated. It is very easy to introduce dust during the assembly and uniform field adjustment process, causing the optical fiber and the light rod end face to burn. Especially in current industrial applications, in order to improve efficiency and production capacity, the optical power is getting higher and higher, and this problem is more prominent. Utility Model Content
[0004] To this end, the technical problem to be solved by the utility model is to overcome the problem in the prior art that dust is easily introduced during the assembly and uniform field adjustment of optical fibers and light rods, resulting in burning of the end faces of the optical fibers and light rods, thereby providing a projection exposure lighting structure.
[0005] In order to solve the above technical problems, the utility model provides a projection exposure lighting structure, comprising:
[0006] A housing mechanism, which is respectively provided with a light beam inlet and a light beam outlet;
[0007] The incident mechanism is sealed and connected to the light beam inlet, and comprises: a collimating lens and a reflector which are sequentially arranged on the incident light beam path of the light source assembly, and a diffuser which is arranged on the light beam path reflected by the reflector;
[0008] The emitting mechanism is movably sealed and connected to the light beam outlet, and comprises a light rod and a converging lens arranged between the diffuser and the light rod, wherein the light spot area of the converging lens is larger than the cross-sectional area of the connection between the light rod and the optical fiber to be connected.
[0009] In one embodiment of the utility model, a closed space is provided in the shell mechanism, and the end of the incident mechanism and the exit mechanism close to each other is accommodated in the closed space. The closed space is connected to the outside light path through the light beam inlet and the light beam outlet.
[0010] In one embodiment of the present invention, the optical axis of the incident mechanism and the optical axis of the output mechanism are not in the same straight line.
[0011] In one embodiment of the present invention, the optical axis of the incident mechanism and the optical axis of the exit mechanism are perpendicular to each other, and the reflector is arranged at the intersection of the optical axes of the incident mechanism and the exit mechanism.
[0012] In one embodiment of the present invention, the diffuser is arranged between the reflector and the optical path of the converging lens.
[0013] In one embodiment of the utility model, an adjustment component is also included to make the angle of the plane where the reflector is located two-dimensionally adjustable, and the adjustment component includes: a support platform opened on the shell mechanism, an adjustment frame arranged around the reflector for fixing the reflector, an elastic member arranged between the adjustment frame and the support platform, and a locking member that passes through the adjustment frame and extends to the support platform.
[0014] In one embodiment of the present invention, the locking member is a latch pin or a bolt, and the support platform is provided with a socket or a threaded hole adapted for the locking member.
[0015] In one embodiment of the present invention, the collimating lens can be adjusted along the optical path direction of the incident light beam.
[0016] In one embodiment of the present invention, the light source assembly includes: a laser light source, and an optical fiber with one end connected to the laser light source and the other end being a light beam inlet.
[0017] The utility model also provides a projection system, which utilizes the above-mentioned projection to seal and protect the light path.
[0018] The above technical solution of the utility model has the following advantages compared with the prior art:
[0019] The utility model discloses a projection exposure lighting structure, wherein a collimating lens, a reflector, a diffuser, and a converging lens are added between the optical fiber and the light rod, the optical fiber is connected together with the collimating lens, the reflector, and the diffuser in advance and ensures that the optical fiber end face and the converging lens are completely sealed. The incident mechanism is used as the first part, and the light rod and the converging lens are assembled in advance and sealed into an output mechanism as the second part. During the overall assembly, the first part and the second part are connected. The first part and the second part are respectively connected to the light beam inlet and the light beam outlet of the shell mechanism. Since the light spot at the connection is much larger than that of the light rod and the optical fiber end, the energy density is reduced, and even if dust enters, it will not cause damage to the components, and it is convenient to clean the mirror surface. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein
[0021] Figure 1 It is a schematic diagram of a lighting structure in the prior art;
[0022] Figure 2 It is a structural schematic diagram of a connecting flange in the prior art;
[0023] Figure 3 It is a structural schematic diagram of a light rod in the prior art;
[0024] Figure 4 It is a schematic diagram of the picture adjustment direction in the prior art;
[0025] Figure 5 It is a cross-sectional view of the optical path structure of the utility model;
[0026] Figure 6 It is a schematic diagram of the optical path of the relay lens of the utility model;
[0027] Figure 7 It is a schematic diagram of the adjustment direction of the reflector of the utility model.
[0028] Explanation of the reference numerals in the specification: 1. connecting flange; 2. flange nut; 3. optical path structure; 4. light rod; 5. optical fiber; 6. collimating lens; 7. diffuser; 8. converging lens; 9. adjustment assembly; 10. protective cover; 11. reflector; 12. housing mechanism. DETAILED DESCRIPTION
[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention. Example 1
[0030] Reference Figure 5-7 As shown, a projection exposure lighting structure of the utility model includes:
[0031] A housing mechanism 12, which is provided with a light beam inlet and a light beam outlet;
[0032] The incident mechanism is sealed and connected to the light beam inlet, and includes: a collimating lens 6 and a reflector 11 which are sequentially arranged on the incident light beam path of the light source assembly, and a diffuser which is arranged on the light beam path reflected by the reflector 11;
[0033] The emitting mechanism is movably sealed and connected to the light beam outlet, and comprises: a light rod 4 and a converging lens 8 arranged between the diffuser and the light rod 4, wherein the light spot area of the converging lens 8 is larger than the cross-sectional area of the connection between the light rod 4 and the optical fiber 5 to be connected.
[0034] A projection exposure lighting structure described in the utility model is provided with a collimating lens 6, a reflector 11, a diffuser 7, and a converging lens 8 between the optical fiber 5 and the light rod 4. The optical fiber 5 is connected with the collimating lens 6, the reflector 11, and the diffuser 7 in advance and ensures that the end face of the optical fiber 5 and the converging lens 8 are completely sealed. The incident mechanism is used as the first part, and the light rod 4 and the converging lens 8 are assembled in advance and sealed into an exit mechanism as the second part. When the whole is assembled, the first part is connected to the second part. The first part and the second part are respectively connected to the light beam inlet and the light beam outlet of the shell mechanism 12. Because the light spot at the connection is much larger than that of the light rod 4 and the end of the optical fiber 5, the energy density is reduced. Even if dust enters, it will not cause damage to the components and can be cleaned.
[0035] Among them, the sealing connection method of the first part and the second part includes flange or flange sealing connection, and / or sealing ring sealing connection, as well as sealing methods such as labyrinth sealing and threaded sealing, which are not specifically described in this embodiment. In this embodiment, the collimating lens 6 and the converging lens 8 use the same lens or different lenses, which are respectively used to achieve the adjustment of the light spot size and angle at the end of the light rod 4.
[0036] By replacing the flange nut 2 of the optical fiber 5 and grafting the lighting structure of this solution between the optical fiber 5 and the light rod 4, the purpose of improving stability and adapting to more usage scenarios can be achieved. It can be applied to maskless laser direct writing exposure, DLP-3D printing, and laser projection.
[0037] See also Figure 4As shown, a closed space is provided in the housing mechanism 12, and the end of the light source mechanism and the lighting mechanism close to each other is accommodated in the closed space, and the closed space is connected to the outside light path through the light beam inlet and the light beam outlet. Through the setting of the closed space, the light source mechanism and the lighting mechanism can work under the condition of being disturbed by the outside world. The end of the light source mechanism and the lighting mechanism close to each other is accommodated in the closed space, and the light beam inlet and the light beam outlet are connected to the outside light path, which can prevent dust and impurities from entering the mirror surface or dispersing in the closed space, and ensure the purity and stability of the light beam.
[0038] See also Figure 6 As shown, the optical axis of the light source mechanism and the optical axis of the lighting mechanism are perpendicular to each other, and the reflector 11 is arranged at the intersection of the optical axes of the light source mechanism and the lighting mechanism. After the light beam is emitted from the laser light source, its propagation direction needs to undergo a 90-degree turn and propagate along the optical axis of the lighting mechanism. By arranging a reflector 11 at the intersection of the two optical axes, when the light is emitted from the light source mechanism, it first moves along the optical axis of the light source, and then encounters the reflector 11 at the intersection. The reflector 11 reflects the light by 90 degrees, so that it propagates in a direction perpendicular to the original optical axis, that is, in the direction of the optical axis of the lighting mechanism.
[0039] See also Figure 6 , Figure 7 As shown, the diffuser 7 is used to increase the angle of the light, thereby improving the uniformity. It can be placed at any position between the outlet of the optical fiber 5 and the light rod 4, and can be designed to be easily replaceable and pluggable. By replacing the diffusers 7 with different diffusion angles, various scenarios requiring high uniformity can be applied. In this embodiment, the diffuser 7 is arranged between the reflector 11 and the optical path of the converging lens 8, so that the light beam is diffused evenly before entering the diffuser 7, thereby increasing the spot area of the incident surface of the converging lens 8 and improving the quality of the incident light.
[0040] Limited by the traditional light rod and optical fiber connection structure, the picture adjustment direction is single and the uniform field adjustment efficiency is low. After the x1 position is manually adjusted, the flange is tightened by the flange fastening cap. In order to facilitate the operability of manual adjustment, the design only has the adjustment amount in the x1 direction, and the y1 direction cannot be adjusted. This results in the uniformity of the final picture being adjustable in only one direction, and only the uniformity in the x1 direction of the picture can be adjusted, so that the relative sizes of 1-3, 4-6, 7-9 are adjustable, while the relative sizes of 1-7, 2-8, and 3-9 in the y1 direction are not adjustable.
[0041] In this embodiment, see Figure 5As shown, it also includes an adjustment component 9 to make the angle of the plane where the reflector 11 is located two-dimensionally adjustable. A protective cover 10 is provided on one side of the shell mechanism 12, and the reflector 11 is located in the protective cover 10. The adjustment component 9 includes: a support platform opened in the shell mechanism 12, an adjustment frame arranged around the reflector 11 for fixing the reflector 11, an elastic member arranged between the adjustment frame and the support platform, and a locking member that penetrates the adjustment frame and extends to the support platform. The elastic member is selected to be a spring and is sleeved on the locking member. The locking member and the elastic member are arranged around the adjustment frame. By adjusting the height of the locking member, the angle of the reflector 11 can be adjusted to change the propagation direction of the light to ensure that the light can be accurately aligned with the optical axis of the lighting mechanism. The position and angle of the end face light spot of the light rod 4 can be adjusted to achieve uniform field adjustment. The reflector 11 can be rotated along the two central axes, specifically, it can be flipped along the X2 and Y2 directions. The light spots on the diffuser 7 and the converging lens 8 can be adjusted accordingly in the two-dimensional plane, that is, they can be adjusted separately. Figure 4 The uniformity of the left and right and up and down of the middle screen can achieve a more precise lighting effect compared to the traditional one which can only be moved along the X1 direction but cannot be adjusted along the Y1 direction. This design allows the user to fine-tune the angle of the reflector 11 when necessary to adapt to different lighting needs and environmental conditions.
[0042] Continue to see Figure 5 As shown, the locking member is a latch or a bolt, and the support platform is provided with a socket or a threaded hole adapted to the locking member, which is used to fix the angle of the reflector 11. The locking member can be a latch or a bolt, depending on the locking strength and operational convenience to be achieved. The locking member passes through the adjustment frame and extends to the support platform, matching with the adapter hole on the support platform. When the locking member is a latch, a socket is provided on the support platform; when the locking member is a bolt, a threaded hole is provided on the support platform. When adjusting the angle of the reflector 11, the operator can release or fix the adjustment frame by loosening or tightening the locking member, thereby adjusting the position of the reflector 11. The elastic member provides a certain elastic force between the adjustment frame and the support platform, allowing the adjustment frame to have a certain amount of movement when adjusting, so as to facilitate fine adjustment of the angle of the reflector 11. Once the reflector 11 is adjusted to the desired position, the locking member can be re-locked to fix the angle of the reflector 11 and maintain the stability of the optical path.
[0043] The collimating lens 6 can be adjusted along the optical path direction of the incident light beam to better collimate the light beam. With the needs of different light sources or different application scenarios, the adjustability of the collimating lens 6 enables the lighting structure to adapt to a variety of situations. Even if the light beam emitted by the light source is divergent, the collimating lens 6 can adjust it to parallel light to improve the quality of the light beam and the accuracy of lighting.
[0044] The light source assembly includes: a laser light source, an optical fiber 5 connected to the laser light source at one end and a light beam inlet at the other end. The laser light source generates a laser light beam with high brightness, good monochromaticity and strong directionality. This light beam is directly input into the optical fiber 5 connected to the laser light source at one end. As a light-conducting transmission medium, the optical fiber 5 can effectively transmit the laser light beam from the laser light source to the light beam inlet at the other end. The use of the optical fiber 5 can make the connection between the light source assembly and the lighting mechanism more flexible, and can also protect the laser source, because the laser source can be placed at a distance from the lighting point, thereby reducing the influence of the heat of the laser source on the lighting target. By utilizing the high transmission efficiency and flexibility of the optical fiber 5, the light beam can be safely and accurately transmitted to other components of the lighting system without sacrificing the quality of the light beam. Example 2
[0045] This embodiment provides a projection system, including a projection exposure lighting structure described in Example 1. By accurately controlling the light path of the light source assembly and the lighting mechanism, the system can achieve high-precision image projection. The closed shell mechanism 12 and the sealed light path design protect the system from dust and other environmental factors, while improving the safety of operation. In this system, each connection is sealed to prevent dust from entering during application.
[0046] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the present utility model.
Claims
1. A projection exposure lighting structure, characterized in that: include: A housing mechanism, which is respectively provided with a light beam inlet and a light beam outlet; The incident mechanism is sealed and connected to the light beam inlet, and comprises: a collimating lens and a reflector which are sequentially arranged on the incident light beam path of the light source assembly, and a diffuser which is arranged on the light beam path reflected by the reflector; The emitting mechanism is movably sealed and connected to the light beam outlet, and comprises a light rod and a converging lens arranged between the diffuser and the light rod, wherein the light spot area of the converging lens is larger than the cross-sectional area of the connection between the light rod and the optical fiber to be connected.
2. A projection exposure lighting structure according to claim 1, characterized in that: A closed space is arranged in the shell mechanism, and the end of the incident mechanism and the exit mechanism close to each other is accommodated in the closed space. The closed space is connected to the outside light path through the light beam inlet and the light beam outlet.
3. A projection exposure lighting structure according to claim 2, characterized in that: The optical axis of the incident mechanism and the optical axis of the emission mechanism are not in the same straight line.
4. The projection exposure lighting structure according to claim 1, characterized in that: The optical axis of the incident mechanism and the optical axis of the emission mechanism are perpendicular to each other, and the reflector is arranged at the intersection of the optical axes of the incident mechanism and the emission mechanism.
5. The projection exposure lighting structure according to claim 1, characterized in that: The diffusion mirror is arranged between the light path of the reflection mirror and the focusing lens.
6. The projection exposure lighting structure according to claim 1, characterized in that: It also includes an adjustment component to make the angle of the plane where the reflector is located two-dimensionally adjustable. The adjustment component includes: a support platform opened on the shell mechanism, an adjustment frame arranged around the reflector for fixing the reflector, an elastic member arranged between the adjustment frame and the support platform, and a locking member that penetrates the adjustment frame and extends to the support platform.
7. A projection exposure lighting structure according to claim 6, characterized in that: The locking piece is a latch pin or a bolt, and the supporting platform is provided with a socket or a threaded hole adapted for the locking piece.
8. The projection exposure lighting structure according to claim 1, characterized in that: The collimating lens can be adjusted along the optical path direction of the incident light beam.
9. The projection exposure lighting structure according to claim 1, characterized in that: The light source assembly comprises: a laser light source, and an optical fiber with one end connected to the laser light source and the other end being a light beam inlet.
10. A projection system, characterized in that: It comprises a projection exposure lighting structure according to any one of claims 1-9.