Adsorption type loading mechanism and exposure machine

Abstract

The utility model relates to the technical field of exposure machine loading mechanisms, in particular to an adsorption type loading mechanism and an exposure machine. And the to-be-exposed part is fixed in an adsorption manner. When the to-be-exposed piece is placed on the loading mechanism, negative pressure is formed in the adsorption holes through the negative pressure device, and then the to-be-exposed piece is fixed to the loading mechanism through atmospheric pressure. The adsorption holes in the area of the to-be-exposed part mainly bear the atmospheric pressure by the to-be-exposed part, so that the atmospheric pressure borne by the sealing part is small, and the elastic part enables the sealing part to release the sealing of the adsorption holes. And no to-be-exposed piece bears atmospheric pressure in the adsorption hole outside the to-be-exposed piece area, so that the sealing piece bears most atmospheric pressure, the sealing piece is tightly attached to the loading table assembly, the adsorption hole is blocked, the air leakage phenomenon is prevented, the effectiveness of adsorbing the to-be-exposed piece by the loading mechanism is ensured, the power of the negative pressure device is reduced, and the exposure efficiency is improved. And the energy consumption of the exposure equipment is reduced. Therefore, the reliability of the loading mechanism is improved, and the energy consumption of exposure equipment is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of exposure machine loading mechanisms, and in particular to an adsorption-type loading mechanism and an exposure machine. Background Art

[0002] The current market competition is becoming increasingly fierce. In order to enhance the competitiveness of enterprises, enterprises are increasingly inclined to choose low-energy consumption and high-reliability equipment.

[0003] During the exposure process of the workpiece to be exposed, the loading mechanism is usually used to fix the workpiece to be exposed by vacuum adsorption. During the fixation of the workpiece to be exposed, since it is difficult for the adsorption holes to form an effective seal, the energy consumption of the exposure equipment is increased and the reliability of the loading mechanism in adsorbing the workpiece to be exposed is reduced.

[0004] It can be seen that how to improve the reliability of the loading mechanism and reduce the energy consumption of the exposure equipment are technical problems that need to be solved urgently. Utility Model Content

[0005] The present application provides an adsorption-type loading mechanism and an exposure machine, which are intended to solve the technical problems in the prior art of how to improve the reliability of the loading mechanism and reduce the energy consumption of the exposure equipment.

[0006] The present application provides an adsorption type loading mechanism, comprising:

[0007] A loading platform assembly, the loading platform assembly is used to load the workpiece to be exposed, the loading platform assembly is provided with a plurality of adsorption holes, the adsorption holes are used to adsorb the workpiece to be exposed;

[0008] An elastic member, wherein the elastic member is disposed in the adsorption hole;

[0009] A sealing member, the sealing member is connected to the elastic member, and the sealing member is used to seal the adsorption hole;

[0010] Wherein, if the adsorption hole does not adsorb the to-be-exposed object, the sealing member seals the adsorption hole and causes the elastic member to undergo elastic deformation;

[0011] If the adsorption hole adsorbs the to-be-exposed member, the elastic member moves the sealing member, thereby releasing the sealing of the adsorption hole.

[0012] Furthermore, the adsorption type loading mechanism provided by the present application also includes:

[0013] A lower sealing plate connected to the loading platform assembly and forming a seal;

[0014] The lower sealing plate is provided with a connecting groove, and the connecting groove is used to connect at least two of the adsorption holes.

[0015] Furthermore, a sealing ring is provided between the lower sealing plate and the loading platform assembly;

[0016] All of the adsorption holes and all of the communication grooves are within the inner ring range of the sealing ring.

[0017] Furthermore, the lower sealing plate is provided with an air extraction hole, and the air extraction hole is communicated with the communicating groove.

[0018] Furthermore, the adsorption type loading mechanism provided by the present application also includes:

[0019] An adapter is installed on the lower sealing plate, the position of the adapter corresponds to the position of the air extraction hole, and the adapter is used for connecting an external negative pressure device with the air extraction hole.

[0020] Furthermore, an adsorption-type loading mechanism provided in the present application also includes a limiting plate, the limiting plate is provided with a plurality of limiting holes, the positions of the limiting holes correspond to the positions of the adsorption holes, and the diameter of the limiting holes is smaller than the diameter of the sealing member.

[0021] Furthermore, the adsorption hole includes a first hole and a second hole, the first hole is connected to the second hole, and the diameter of the first hole is greater than the diameter of the second hole;

[0022] The elastic member is located in the second hole and partially extends into the first hole, and the sealing member is located in the first hole.

[0023] Furthermore, a sealing slope is provided between the first hole and the second hole, and the sealing member is matched with the sealing slope.

[0024] Furthermore, the sealing member comprises a spherical surface, and the first hole and the second hole both comprise cylindrical holes;

[0025] The spherical surface faces the second hole;

[0026] The diameter of the spherical surface is smaller than the diameter of the first hole, and the diameter of the sealing member is larger than the diameter of the second hole.

[0027] On the other hand, the present application also provides an exposure machine, comprising the above-mentioned adsorption type loading mechanism.

[0028] The beneficial effects achieved by this application are:

[0029] The present application proposes an adsorption type loading mechanism, which fixes the workpiece to be exposed by adsorption. When the workpiece to be exposed is placed on the loading mechanism, the workpiece to be exposed blocks the adsorption hole, and a negative pressure is formed in the adsorption hole through a negative pressure device, and then the workpiece to be exposed is fixed to the loading mechanism by atmospheric pressure. Since the adsorption holes in the area of ​​the workpiece to be exposed are mainly subjected to atmospheric pressure by the workpiece to be exposed, the atmospheric pressure on the sealing member is relatively small. At this time, the elastic member releases the sealing member from sealing the adsorption holes. The adsorption holes outside the area of ​​the workpiece to be exposed are not subjected to atmospheric pressure by the workpiece to be exposed. Therefore, the sealing member bears most of the atmospheric pressure, and then the sealing member is tightly attached to the loading platform assembly, and then the adsorption holes are blocked to prevent leakage, thereby ensuring the effectiveness of the loading mechanism in adsorbing the workpiece to be exposed, and reducing the power of the negative pressure device, thereby reducing the energy consumption of the exposure equipment. In this way, the reliability of the loading mechanism is improved and the energy consumption of the exposure equipment is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a schematic diagram of the three-dimensional structure of the loading mechanism in an embodiment of the present invention;

[0031] Figure 2 is an exploded view of a loading mechanism in an embodiment of the present invention;

[0032] Figure 3 is a cross-sectional view of a loading mechanism in an embodiment of the present invention;

[0033] Figure 4 The embodiment of the present invention Figure 3 Magnified view at A in the middle.

[0034] Description of main component symbols:

[0035] 10. Loading mechanism; 11. Loading platform assembly; 111. Adsorption hole; 112. First hole; 113. Second hole; 114. Sealing slope; 12. Elastic member; 13. Sealing member; 14. Lower sealing plate; 141. Connecting groove; 142. Exhaust hole; 15. Adapter; 16. Sealing ring; 17. Limiting plate; 171. Limiting hole; 80. Part to be exposed. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. In addition, it should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.

[0037] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0039] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the utility model. In addition, the utility model can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various embodiments and / or settings discussed in itself. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0042] See also Figure 1 to Figure 2 In some embodiments of the present application, the present application provides an adsorption type loading mechanism 10, comprising a loading platform assembly 11, an elastic member 12 and a sealing member 13. The loading platform assembly 11 is used to load the part to be exposed 80, and the loading platform assembly 11 is provided with a plurality of adsorption holes 111, and the adsorption holes 111 are used to adsorb the part to be exposed 80. The elastic member 12 is provided in the adsorption hole 111. The sealing member 13 is connected to the elastic member 12, and the sealing member 13 is used to seal the adsorption hole 111. Among them, if the adsorption hole 111 does not adsorb the part to be exposed 80, the sealing member 13 seals the adsorption hole 111 and causes the elastic member 12 to undergo elastic deformation. If the adsorption hole 111 adsorbs the part to be exposed 80, the elastic member 12 moves the sealing member 13, thereby releasing the seal of the adsorption hole 111.

[0043] The exposed member 80 is fixed by adsorption. When the exposed member 80 is placed on the loading mechanism 10, the exposed member 80 blocks the adsorption hole 111, and the negative pressure device forms a negative pressure on the adsorption hole 111, and then the exposed member 80 is fixed to the loading mechanism 10 by the atmospheric pressure. Since the adsorption holes 111 in the area of ​​the exposed member 80 are mainly subjected to the atmospheric pressure by the exposed member 80, the atmospheric pressure on the sealing member 13 is relatively small. At this time, the elastic member 12 releases the sealing member 13 from sealing the adsorption holes 111. The adsorption holes 111 outside the area of ​​the exposed member 80 are not subjected to the atmospheric pressure by the exposed member 80, and therefore, the sealing member 13 bears most of the atmospheric pressure, and then the sealing member 13 is closely attached to the loading platform assembly 11, and then the adsorption holes 111 are blocked to prevent the occurrence of air leakage, thereby ensuring the effectiveness of the loading mechanism 10 in adsorbing the exposed member 80, and reducing the power of the negative pressure device, thereby reducing the energy consumption of the exposure equipment. In this way, the reliability of the loading mechanism 10 is improved and the energy consumption of the exposure equipment is reduced.

[0044] See also Figures 2 to 3In some embodiments of the present application, the adsorption type loading mechanism 10 provided by the present application further includes a lower sealing plate 14. The lower sealing plate 14 is connected to the loading platform assembly 11 and forms a seal. The lower sealing plate 14 is provided with a connecting groove 141, and the connecting groove 141 is used to connect at least two adsorption holes 111.

[0045] At least two adsorption holes 111 are connected through the connecting groove 141, so when an external negative pressure device evacuates the loading mechanism 10, negative pressure can be generated in multiple adsorption holes 111 through a small number of exhaust holes 142, thereby reducing the setting of the exhaust pipeline, thereby reducing the complexity of the air circuit system and facilitating disassembly, assembly and maintenance.

[0046] Since the adsorption holes 111 are interconnected, if there is air leakage in some of the adsorption holes 111, it will affect the fixing effect of the loading mechanism 10 on the to-be-exposed member 80. The inoperative adsorption holes 111 are sealed by the sealing member 13, thereby preventing air leakage in the adsorption holes 111 and ensuring the reliability of the loading mechanism 10 fixing the to-be-exposed member 80.

[0047] In some embodiments of the present application, a sealing ring 16 is disposed between the lower sealing plate 14 and the loading platform assembly 11. All the adsorption holes 111 and all the connecting grooves 141 are within the inner circle of the sealing ring 16.

[0048] The sealing ring 16 is used to improve the sealing performance between the lower sealing plate 14 and the loading platform assembly 11, thereby preventing air leakage from the connecting groove 141 and the adsorption hole 111, thereby ensuring the reliability of the loading mechanism 10 in fixing the to-be-exposed object 80.

[0049] In some embodiments of the present application, the lower sealing plate 14 is provided with an air extraction hole 142 , and the air extraction hole 142 is connected to the connecting groove 141 .

[0050] The negative pressure device evacuates the connecting groove 141 through the exhaust hole 142, thereby generating negative pressure in the adsorption holes 111. When the to-be-exposed member 80 is placed on the loading mechanism 10, the adsorption holes 111 in the area of ​​the to-be-exposed member 80 fix the to-be-exposed member 80 through negative pressure, and the adsorption holes 111 outside the area of ​​the to-be-exposed member 80 block the adsorption holes 111 outside the area of ​​the to-be-exposed member 80 through negative pressure by the sealing member 13, thereby preventing the adsorption holes 111 outside the area of ​​the to-be-exposed member 80 from leaking air and affecting the working performance of the adsorption holes 111 in the area of ​​the to-be-exposed member 80. In this way, the reliability of the loading mechanism 10 in fixing the to-be-exposed member 80 is ensured.

[0051] In some embodiments of the present application, the adsorption type loading mechanism 10 provided by the present application further includes an adapter 15. The adapter 15 is installed on the lower sealing plate 14, and the position of the adapter 15 corresponds to the position of the air extraction hole 142. The adapter 15 is used to connect the external negative pressure device with the air extraction hole 142.

[0052] The negative pressure device is connected to the exhaust hole 142 through the adapter 15, and then the connecting groove 141 is exhausted, and the adsorption hole 111 generates negative pressure through the connecting groove 141, so that the loading mechanism 10 can effectively fix the to-be-exposed workpiece 80. The negative pressure device can be effectively connected to the loading mechanism 10 through the adapter 15, and the reliability of the loading mechanism 10 fixing the to-be-exposed workpiece 80 is improved.

[0053] See also Figure 2 In some embodiments of the present application, an adsorption-type loading mechanism 10 provided in the present application also includes a limiting plate 17, and the limiting plate 17 is provided with a plurality of limiting holes 171, and the positions of the limiting holes 171 correspond to the positions of the adsorption holes 111, and the diameter of the limiting holes 171 is smaller than the diameter of the sealing member 13.

[0054] The opening of the adsorption hole 111 is limited by the limiting plate 17 , thereby preventing the sealing member 13 and the elastic member 12 from falling out of the adsorption hole 111 , thereby improving the reliability of the loading mechanism 10 structure.

[0055] In some embodiments of the present application, the adsorption hole 111 includes a first hole 112 and a second hole 113, the first hole 112 is connected to the second hole 113, and the diameter of the first hole 112 is greater than the diameter of the second hole 113. The elastic member 12 is located in the second hole 113 and partially extends into the first hole 112, and the sealing member 13 is located in the first hole 112.

[0056] When the object to be exposed 80 is placed on the loading mechanism 10, the object to be exposed 80 blocks the adsorption hole 111, and the adsorption hole 111 is formed with negative pressure by the negative pressure device, and then the object to be exposed 80 is fixed to the loading mechanism 10 by the atmospheric pressure. Since the adsorption holes 111 in the area of ​​the object to be exposed 80 are mainly subjected to the atmospheric pressure by the object to be exposed 80, the atmospheric pressure on the sealing member 13 is relatively small. At this time, the elastic member 12 causes the sealing member 13 to release the sealing of the adsorption holes 111. The adsorption holes 111 outside the area of ​​the object to be exposed 80 are not subjected to the atmospheric pressure by the object to be exposed 80, and therefore, the sealing member 13 bears most of the atmospheric pressure, and then the sealing member 13 is closely attached to the loading platform assembly 11, and then the adsorption holes 111 are blocked to prevent the occurrence of air leakage, and then the loading mechanism 10 is effective in adsorbing the object to be exposed 80.

[0057] When the negative pressure device evacuates the adsorption hole 111, the sealing member 13 in the adsorption hole 111 outside the area of ​​the to-be-exposed member 80 moves along the hole wall of the first hole 112 toward the direction of the second hole 113 under the action of the airflow. During the movement of the sealing member 13, the elastic force of the elastic member 12 is overcome, causing the elastic member 12 to undergo elastic deformation. When the sealing member 13 reaches the opening of the second hole 113, the opening of the second hole 113 is blocked, thereby completing the sealing of the adsorption hole 111. After the sealing member 13 blocks the opening of the second hole 113, due to the pressure difference between the second hole 113 and the first hole 112, the sealing member 13 can stably stay at the opening of the second hole 113, thereby forming a stable seal for the adsorption hole 111.

[0058] The opening of the first hole 112 in the suction hole 111 in the area of ​​the to-be-exposed member 80 is blocked by the to-be-exposed member 80, so the air pressure difference between the second hole 113 and the first hole 112 is small, and then under the action of the elastic member 12, the sealing member 13 is moved away from the opening of the second hole 113, so that the first hole 112 is connected with the second hole 113. In addition, the opening of the first hole 112 is blocked by the to-be-exposed member 80, so there is an operating air pressure difference between the inside of the suction hole 111 and the outside of the suction hole 111, and the air pressure inside the suction hole 111 is lower than the air pressure outside the suction hole 111, and then the to-be-exposed member 80 is fixed to the loading mechanism 10 by the atmospheric pressure.

[0059] See also Figure 3 to Figure 4 In some embodiments of the present application, a sealing slope 114 is provided between the first hole 112 and the second hole 113 , and the sealing member 13 is adapted to the sealing slope 114 .

[0060] By forming a seal between the sealing slope 114 and the sealing member 13 , the sealing performance of the sealing member 13 to the adsorption hole 111 is improved, thereby ensuring the reliability of the loading mechanism 10 in fixing the object to be exposed 80 .

[0061] In some embodiments of the present application, the sealing member 13 includes a spherical surface, and the first hole 112 and the second hole 113 both include cylindrical holes. The spherical surface faces the second hole 113. The diameter of the spherical surface is smaller than the diameter of the first hole 112, and the diameter of the sealing member 13 is larger than the diameter of the second hole 113.

[0062] The opening of the second hole 113 is blocked by the spherical surface, thereby improving the reliability of the sealing member 13 blocking the adsorption hole 111, thereby ensuring the reliability of the loading mechanism 10 fixing the to-be-exposed member 80.

[0063] In some embodiments of the present application, the elastic member 12 includes a spring.

[0064] When the negative pressure device evacuates the adsorption hole 111, the sealing member 13 in the adsorption hole 111 outside the area of ​​the to-be-exposed member 80 moves along the hole wall of the first hole 112 toward the direction of the second hole 113 under the action of the airflow. During the movement of the sealing member 13, the elastic force of the elastic member 12 is overcome, causing the elastic member 12 to undergo elastic deformation. When the sealing member 13 reaches the opening of the second hole 113, the opening of the second hole 113 is blocked, thereby completing the sealing of the adsorption hole 111. After the sealing member 13 blocks the opening of the second hole 113, due to the pressure difference between the second hole 113 and the first hole 112, the sealing member 13 can stably stay at the opening of the second hole 113, thereby forming a stable seal for the adsorption hole 111.

[0065] The opening of the first hole 112 in the suction hole 111 in the area of ​​the to-be-exposed member 80 is blocked by the to-be-exposed member 80, so the air pressure difference between the second hole 113 and the first hole 112 is small, and then under the action of the elastic member 12, the sealing member 13 is moved away from the opening of the second hole 113, so that the first hole 112 is connected with the second hole 113. In addition, the opening of the first hole 112 is blocked by the to-be-exposed member 80, so there is an operating air pressure difference between the inside of the suction hole 111 and the outside of the suction hole 111, and the air pressure inside the suction hole 111 is lower than the air pressure outside the suction hole 111, and then the to-be-exposed member 80 is fixed to the loading mechanism 10 by the atmospheric pressure.

[0066] On the other hand, in some embodiments of the present application, the present application also provides an exposure machine, including the above-mentioned adsorption type loading mechanism 10.

[0067] When the object to be exposed 80 is placed on the loading mechanism 10, the object to be exposed 80 blocks the adsorption hole 111, and the adsorption hole 111 is formed with negative pressure by the negative pressure device, and then the object to be exposed 80 is fixed to the loading mechanism 10 by atmospheric pressure. Since the adsorption holes 111 in the area of ​​the object to be exposed 80 are mainly subjected to atmospheric pressure by the object to be exposed 80, the atmospheric pressure on the sealing member 13 is relatively small. At this time, the elastic member 12 causes the sealing member 13 to release the sealing of the adsorption holes 111. The adsorption holes 111 outside the area of ​​the object to be exposed 80 are not subjected to atmospheric pressure by the object to be exposed 80, so the sealing member 13 bears most of the atmospheric pressure, and then the sealing member 13 is closely attached to the loading platform assembly 11, and then the adsorption holes 111 are blocked to prevent the occurrence of air leakage, thereby ensuring the effectiveness of the loading mechanism 10 in adsorbing the object to be exposed 80, and reducing the power of the negative pressure device, thereby reducing the energy consumption of the exposure equipment. In this way, the energy consumption of the exposure machine is reduced.

[0068] In the description of this specification, the description with reference to the terms "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0069] In addition, the above description is only a preferred embodiment of the utility model, and is not intended to limit the utility model. Any modifications, equivalent replacements and improvements made within the spirit and principle of the utility model shall be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.

Claims

1. An adsorption type loading mechanism, characterized in that: include: A loading platform assembly, the loading platform assembly is used to load the workpiece to be exposed, the loading platform assembly is provided with a plurality of adsorption holes, the adsorption holes are used to adsorb the workpiece to be exposed; An elastic member, wherein the elastic member is disposed in the adsorption hole; A sealing member, the sealing member is connected to the elastic member, and the sealing member is used to seal the adsorption hole; Wherein, if the adsorption hole does not adsorb the to-be-exposed object, the sealing member seals the adsorption hole and causes the elastic member to undergo elastic deformation; If the adsorption hole adsorbs the to-be-exposed member, the elastic member moves the sealing member, thereby releasing the sealing of the adsorption hole.

2. The adsorption type loading mechanism according to claim 1, characterized in that: Also includes: A lower sealing plate connected to the loading platform assembly and forming a seal; The lower sealing plate is provided with a connecting groove, and the connecting groove is used to connect at least two of the adsorption holes.

3. The adsorption type loading mechanism according to claim 2, characterized in that: A sealing ring is provided between the lower sealing plate and the loading platform assembly; All of the adsorption holes and all of the communication grooves are within the inner ring range of the sealing ring.

4. The adsorption type loading mechanism according to claim 2, characterized in that: The lower sealing plate is provided with an air extraction hole, and the air extraction hole is communicated with the communicating groove.

5. The adsorption type loading mechanism according to claim 4, characterized in that: Also includes: An adapter is installed on the lower sealing plate, the position of the adapter corresponds to the position of the air extraction hole, and the adapter is used for connecting an external negative pressure device with the air extraction hole.

6. The adsorption type loading mechanism according to claim 1, characterized in that: It also includes a limiting plate, which is provided with a plurality of limiting holes. The positions of the limiting holes correspond to the positions of the adsorption holes, and the diameter of the limiting holes is smaller than the diameter of the sealing member.

7. The adsorption type loading mechanism according to claim 1, characterized in that: The adsorption hole comprises a first hole and a second hole, the first hole is connected to the second hole, and the diameter of the first hole is greater than the diameter of the second hole; The elastic member is located in the second hole and partially extends into the first hole, and the sealing member is located in the first hole.

8. The adsorption type loading mechanism according to claim 7, characterized in that: A sealing slope is provided between the first hole and the second hole, and the sealing member is matched with the sealing slope.

9. The adsorption type loading mechanism according to claim 7, characterized in that: The seal comprises a spherical surface, and the first hole and the second hole each comprise a cylindrical hole; The spherical surface faces the second hole; The diameter of the spherical surface is smaller than the diameter of the first hole, and the diameter of the sealing member is larger than the diameter of the second hole.

10. An exposure machine, characterized in that: It comprises an adsorption-type loading mechanism as described in any one of claims 1 to 9.

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