Scanning electron microscope objective table

Abstract

The utility model discloses an objective table of a scanning electron microscope, which relates to the technical field of microscopes and comprises a bearing turntable. A rotating shaft of the bearing rotating disc is connected with a plummer block installed on a bearing shell in a matched mode, the bearing shell is connected to a transverse sliding frame in a sliding mode, and the transverse sliding frame is connected to a longitudinal sliding frame in a sliding mode. A plurality of through grooves facilitating sliding connection of the clamping plates are formed in the bearing rotary disc, a connecting block is welded to the middle of the bearing rotary disc, and the connecting block is flush with the upper surface of the bearing rotary disc. According to the utility model, the rotating shaft of the bearing turntable can rotate on the bearing shell, so that the detection position can be conveniently adjusted, secondly, the bearing shell is in sliding connection with the transverse sliding frame, and the transverse sliding frame is in sliding connection with the longitudinal sliding frame, so that bidirectional movement adjustment is provided, samples at different positions can be detected, the use is more convenient, and when the sample carrier plate is clamped, the detection accuracy is improved. And the multiple clamping plates move along the through groove of the bearing rotary disc for clamping, and use is more convenient.

Description

Technical Field

[0001] The utility model specifically relates to the technical field of microscopes, in particular to a scanning electron microscope stage. Background Art

[0002] Scanning electron microscope is an observation method between transmission electron microscope and optical microscope. It uses a narrow focused high-energy electron beam to scan the sample, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material. During the inspection, the sample needs to be mounted on the stage.

[0003] Chinese utility model publication number CN 216117404 U discloses a sample stage of a scanning electron microscope, which is arranged on the sample chamber base of the scanning electron microscope to carry samples to be tested, wherein the sample stage comprises a table top and an assembly column arranged at the bottom of the table top, wherein the assembly column is fixedly mounted in the sample chamber base, wherein a plurality of nail table holes for inserting nail tables are arranged at intervals on the table top, and each of the nail table holes is provided with a locking structure for locking the nail table in the nail table hole;

[0004] The above-mentioned sample stage of the scanning electron microscope fixes a nail stage on the sample stage for holding the sample, and uses a locking structure to fasten the nail stage. However, when the above-mentioned sample platform is used for testing, it is necessary to manually adjust the detection position of the sample, which is more troublesome to use. For this reason, we provide a scanning electron microscope stage, which adjusts the position of the sample by rotating the carrying turntable. Secondly, it can move in both directions to increase the position selectivity of the detection. In terms of sample fixation, multiple clamps clamp the sample carrier at the same time, which is more convenient to use. Utility Model Content

[0005] The utility model aims to provide a scanning electron microscope stage to solve the problems raised in the background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A scanning electron microscope stage comprises a carrying turntable; the rotating shaft of the carrying turntable is cooperatively connected with a bearing seat installed on a carrying shell, the carrying shell is slidably connected to a transverse slide, and the transverse slide is slidably connected to a longitudinal slide; the carrying turntable is provided with a plurality of through grooves for facilitating the sliding connection of a clamping plate, and a connecting block is welded in the middle of the carrying turntable, and the connecting block is flush with the upper surface of the carrying turntable.

[0008] As a further technical solution of the utility model, a guide rod is welded on the supporting turntable, and the guide rod is slidably connected to the inner side of the corresponding guide tube, and the guide tube is welded to the connecting block; a spring is sleeved on the outer side of the guide rod and the corresponding guide tube, and the two ends of the spring are respectively welded to the corresponding splint and the connecting block.

[0009] As a further technical solution of the utility model, the outer side of the rotating shaft at the bottom of the supporting turntable is cooperatively connected with a linkage gear ring, and the linkage gear ring is meshedly connected with the transmission gear.

[0010] As a further technical solution of the utility model, the inner side of the bearing shell is hollow, a driving motor is fixed to the inner side of the bearing shell by bolts, and a driving shaft of the driving motor is cooperatively connected with a transmission gear.

[0011] As a further technical solution of the utility model, the bottom of the bearing shell is connected to the transverse screw rod through a nut seat, the transverse screw rod is connected to the seat bearing installed on the transverse slide, and one end of the transverse screw rod is connected to the driving shaft of the transverse drive motor; the transverse drive motor is fixed to the transverse slide by bolts.

[0012] As a further technical solution of the utility model, the transverse slide is connected to the longitudinal screw rod through a nut seat, the longitudinal screw rod is connected to the seat bearing installed on the longitudinal slide, and one end of the longitudinal screw rod is connected to the driving shaft of the longitudinal drive motor; the longitudinal drive motor is fixed to the longitudinal slide by bolts, and a fixing ear is welded on the longitudinal slide for easy fixation.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. In the utility model, the rotating shaft of the carrying turntable can rotate on the carrying shell, so that the detection position can be conveniently adjusted. Secondly, the carrying shell is slidably connected to the transverse slide, and the transverse slide is slidably connected to the longitudinal slide, so as to provide two-way movement adjustment, and samples at different positions can be detected, which is more convenient to use. When clamping the sample carrier, multiple clamping plates move along the through slots of the carrying turntable for clamping, which is more convenient to use.

[0015] 2. The utility model, the guide rod and the guide tube cooperate to guide the clamping plate, and the spring plays a pulling role, which can clamp the bearing glass slides of different sizes, making it more convenient to use;

[0016] 3. In the present utility model, the driving shaft of the driving motor drives the connected transmission gear to rotate, and when the transmission gear is meshed with the linkage gear ring, power is provided for the rotation of the bearing turntable. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1It is a three-dimensional structural schematic diagram of the utility model.

[0018] Figure 2 This utility model Figure 1 Top view of the .

[0019] Figure 3 This utility model Figure 2 A partial enlarged view of point A.

[0020] Figure 4 This utility model Figure 1 Left view of .

[0021] Figure 5 This utility model Figure 4 Cross-sectional view at BB.

[0022] In the figure: 1-bearing turntable, 2-connecting block, 3-clamp, 4-guide tube, 5-guide rod, 6-spring, 7-transmission gear, 8-linked gear ring, 9-drive motor, 10-bearing shell, 11-transverse slide, 12-transverse screw rod, 13-transverse drive motor, 14-longitudinal slide, 15-longitudinal drive motor, 16-longitudinal screw rod, 17-fixing ear. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-5 In an embodiment of the utility model, a scanning electron microscope stage includes a carrying turntable 1; the rotating shaft of the carrying turntable 1 is matched and connected with a bearing seat installed on a carrying shell 10, the carrying shell 10 is slidably connected to a transverse slide 11, and the transverse slide 11 is slidably connected to a longitudinal slide 14; the carrying turntable 1 is provided with a plurality of through grooves for slidably connecting a clamping plate 3, and a connecting block 2 is welded in the middle of the carrying turntable 1, and the connecting block 2 is flush with the upper surface of the carrying turntable 1.

[0025] By adopting the above technical solution, the rotating shaft of the carrying turntable 1 can rotate on the carrying shell 10, so that the detection position can be easily adjusted. Secondly, the carrying shell 10 is slidably connected to the transverse slide 11, and the transverse slide 11 is slidably connected to the longitudinal slide 14, thereby providing two-way movement adjustment, and samples at different positions can be detected, which is more convenient to use. When clamping the sample carrier, multiple clamps 3 move along the through groove of the carrying turntable 1 for clamping, which is more convenient to use.

[0026] In this embodiment, a guide rod 5 is welded on the supporting turntable 1, and the guide rod 5 is slidably connected to the inner side of the corresponding guide tube 4, and the guide tube 4 is welded to the connecting block 2; the guide rod 5 and the outer side of the corresponding guide tube 4 are sleeved with a spring 6, and the two ends of the spring 6 are respectively welded to the corresponding clamping plate 3 and the connecting block 2.

[0027] By adopting the above technical solution, the guide rod 5 cooperates with the guide tube 4 to guide the clamping plate 3, and the spring 6 plays a pulling role, which can clamp the supporting glass slides of different sizes and is more convenient to use.

[0028] In this embodiment, a linkage gear ring 8 is connected to the outer side of the rotating shaft at the bottom of the supporting rotating disk 1 , and the linkage gear ring 8 is meshedly connected to the transmission gear 7 .

[0029] Furthermore, the inner side of the bearing shell 10 is hollow, and a driving motor 9 is fixed to the inner side of the bearing shell 10 by bolts, and a driving shaft of the driving motor 9 is cooperatively connected with the transmission gear 7 .

[0030] By adopting the above technical solution, the driving shaft of the driving motor 9 drives the connected transmission gear 7 to rotate, and when the transmission gear 7 is meshed with the linkage gear ring 8, power is provided for the rotation of the supporting turntable 1.

[0031] In this embodiment, the bottom of the supporting shell 10 is connected to the transverse screw rod 12 through a nut seat, the transverse screw rod 12 is connected to the seat bearing installed on the transverse slide 11, and one end of the transverse screw rod 12 is connected to the driving shaft of the transverse drive motor 13; the transverse drive motor 13 is fixed to the transverse slide 11 by bolts.

[0032] Furthermore, the transverse slide 11 is connected to the longitudinal screw rod 16 through a nut seat, the longitudinal screw rod 16 is connected to the seat bearing installed on the longitudinal slide 14, and one end of the longitudinal screw rod 16 is connected to the driving shaft of the longitudinal drive motor 15; the longitudinal drive motor 15 is fixed to the longitudinal slide 14 by bolts, and a fixing ear 17 is welded on the longitudinal slide 14 for easy fixation.

[0033] By adopting the above technical solution, the driving shaft of the transverse driving motor 13 drives the connected transverse screw rod 12 to rotate, and the bearing shell 10 is slidably connected to the transverse slide 11, and the bearing shell 10 is connected to the transverse screw rod 12 through the nut seat, and the bearing shell 10 moves along the transverse slide 11; the driving shaft of the longitudinal driving motor 15 drives the connected longitudinal screw rod 16 to rotate, and the transverse slide 11 is slidably connected to the longitudinal slide 14, and the transverse slide 11 is connected to the longitudinal screw rod 16 through the nut seat, and the transverse slide 11 moves along the longitudinal slide 14; thereby providing power for bidirectional movement; the driving shaft of the driving motor 9 drives the connected transmission gear 7 to rotate, and when the transmission gear 7 is connected When the linkage gear ring 8 is engaged, it provides power for the rotation of the carrying turntable 1; the guide rod 5 cooperates with the guide tube 4 to guide the clamping plate 3, and the spring 6 plays a pulling role, which can clamp the carrying glass slides of different sizes, making it more convenient to use; the rotating shaft of the carrying turntable 1 can rotate on the carrying shell 10, so that the detection position can be easily adjusted. Secondly, the carrying shell 10 is slidably connected to the transverse slide 11, and the transverse slide 11 is slidably connected to the longitudinal slide 14, thereby providing two-way movement adjustment, which can detect samples at different positions and is more convenient to use. When clamping the sample carrier, multiple clamping plates 3 move along the through grooves of the carrying turntable 1 for clamping, which is more convenient to use.

[0034] The working principle of the utility model is: when in use, the driving shaft of the transverse driving motor 13 drives the connected transverse screw rod 12 to rotate, and the bearing shell 10 is slidably connected to the transverse slide 11, and the bearing shell 10 is connected to the transverse screw rod 12 through the nut seat, and the bearing shell 10 moves along the transverse slide 11; the driving shaft of the longitudinal driving motor 15 drives the connected longitudinal screw rod 16 to rotate, and the transverse slide 11 is slidably connected to the longitudinal slide 14, and the transverse slide 11 is connected to the longitudinal screw rod 16 through the nut seat, and the transverse slide 11 moves along the longitudinal slide 14; thereby providing power for bidirectional movement;.

[0035] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0036] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A scanning electron microscope stage, characterized in that: The invention comprises a bearing turntable (1); the rotating shaft of the bearing turntable (1) is connected with a bearing seat installed on a bearing shell (10); the bearing shell (10) is slidably connected to a transverse slide (11), and the transverse slide (11) is slidably connected to a longitudinal slide (14); the bearing turntable (1) is provided with a plurality of through grooves for slidably connecting a clamping plate (3); a connecting block (2) is welded in the middle of the bearing turntable (1); the connecting block (2) is flush with the upper surface of the bearing turntable (1).

2. A scanning electron microscope stage according to claim 1, characterized in that: A guide rod (5) is welded on the bearing turntable (1), and the guide rod (5) is slidably connected to the inner side of the corresponding guide tube (4), and the guide tube (4) is welded to the connecting block (2); a spring (6) is sleeved on the outer side of the guide rod (5) and the corresponding guide tube (4), and the two ends of the spring (6) are respectively welded to the corresponding clamping plate (3) and the connecting block (2).

3. A scanning electron microscope stage according to claim 1, characterized in that: The outer side of the rotating shaft at the bottom of the supporting rotating disk (1) is cooperatively connected with a linkage gear ring (8), and the linkage gear ring (8) is meshingly connected with the transmission gear (7).

4. A scanning electron microscope stage according to claim 1, characterized in that: The inner side of the bearing shell (10) is hollow, a driving motor (9) is fixed to the inner side of the bearing shell (10) by bolts, and a driving shaft of the driving motor (9) is connected in cooperation with a transmission gear (7).

5. A scanning electron microscope stage according to claim 1, characterized in that: The bottom of the bearing shell (10) is connected to the transverse screw rod (12) through a nut seat, and the transverse screw rod (12) is connected to the bearing seat installed on the transverse slide (11), and one end of the transverse screw rod (12) is connected to the driving shaft of the transverse drive motor (13); the transverse drive motor (13) is fixed to the transverse slide (11) by bolts.

6. A scanning electron microscope stage according to claim 1, characterized in that: The transverse slide (11) is connected to the longitudinal screw rod (16) through a nut seat, and the longitudinal screw rod (16) is connected to the bearing seat installed on the longitudinal slide (14), and one end of the longitudinal screw rod (16) is connected to the driving shaft of the longitudinal drive motor (15); the longitudinal drive motor (15) is fixed to the longitudinal slide (14) by bolts, and a fixing ear (17) is welded on the longitudinal slide (14) for easy fixing.

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