Inflation sealing structure for pressing air bag of silicon chip mounter
By designing the inflatable sealing structure of the cylinder connecting disk, upper airbag disk, lower airbag disk and diaphragm fixing ring in the silicon wafer patch machine, the problem of uneven gas action is solved, and the silicon wafer and ceramic plate are realized Even fit reduces the defective rate of patches and improves product quality.
Patent Information
- Application Number
- CN202420723812.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-09
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-04-09
AI Technical Summary
The structure of the underpressure airbag of the traditional silicon wafer patch machine leads to uneven gas action, affecting the uniform fit between the silicon wafer and the ceramic plate, resulting in poor bonding and cracking and scratches during the polishing process, affecting product quality.
An inflatable sealing structure including cylinder connecting disk, upper airbag disc, lower airbag disc and diaphragm fixing ring was designed. Through the design of gas transmission pipe and ventilation holes, the gas is evenly distributed on the airbag diaphragm to ensure that The gas has a larger and more uniform surface.
It effectively reduces the defect rate of the patch, improves the geometric parameter level of the silicon wafer and the stability of the polishing process, and significantly improves product quality and production efficiency.
Smart Images
Figure CN222146150U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor processing and is an inflatable sealing structure for a downward pressure airbag of a silicon chip mounter. Background Art
[0002] Semiconductor silicon wafers are key materials for producing integrated circuits, discrete devices, sensors and other semiconductor products, and are in the key material link of the upstream of the semiconductor industry chain. Currently, as the most used silicon wafer product, the surface geometric parameter level and edge roughness of silicon polishing wafers have become important factors in determining the yield of downstream device processing. Before chemical mechanical polishing, the downward pressure airbag structure of the placement machine is required to make the silicon wafer pass through the liquid wax and be closely adsorbed to the ceramic plate.
[0003] In the traditional downward pressure airbag structure of the placement machine, the gas directly fills the entire airbag, and the airbag volume is small. During the downward pressure of the airbag, it can only act on a small area in the middle of the silicon wafer. Therefore, once the force is uneven, the liquid wax between the silicon wafer and the ceramic plate cannot be spread evenly, and the bubbles cannot dissipate immediately, resulting in a crescent shape of poor bonding, or even bonding failure, which seriously affects the entire polishing process. The uneven bonding of silicon wafers can affect the geometric parameter level of a single wafer, or cause the silicon wafer to crack during polishing, scratch the polishing table, and affect the product quality of the entire tray of silicon wafers.
[0004] Therefore, improving the downward pressure airbag structure of the silicon wafer mounter, ensuring the airtightness of the airbag structure, allowing the gas to act on the silicon wafer surface over a larger area through the airbag, and making the force on the entire surface of the silicon wafer more uniform, so that the silicon wafer can be more evenly and stably adsorbed on the ceramic plate through liquid wax, is an important solution to reduce the defective rate of wafer mounting and improve the geometric parameters of silicon wafers, and is a problem that needs to be urgently solved by technical personnel in this field. Utility Model Content
[0005] The purpose of the utility model is to provide an inflatable sealing structure for a downward pressure airbag of a silicon wafer mounter, which can effectively assist the downward pressure airbag of the mounter to act evenly on the silicon wafer, thereby making the silicon wafer pass through liquid wax and fit the ceramic plate more evenly and tightly, reducing the defective rate of the patch and greatly improving product quality and production efficiency.
[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0007] An inflatable sealing structure for a downward pressure airbag of a silicon chip mounter, comprising a cylinder connecting plate, an upper airbag disc, a lower airbag disc and a diaphragm fixing ring;
[0008] The cylinder connection plate is fixedly connected to the upper airbag disc by bolts, a gas transmission pipeline is arranged in the cylinder connection plate, and a gas through hole corresponding to one end of the gas transmission pipeline and having the same diameter as that of the upper airbag disc is arranged;
[0009] The upper airbag disc is provided with a plurality of connecting through holes at equal diameter positions near the edge, and the lower airbag disc is provided with fixing holes corresponding to the connecting through holes, and each connecting through hole is connected to the fixing hole by a countersunk bolt;
[0010] The lower airbag disc and the diaphragm fixing ring are respectively provided with a plurality of countersunk bolt through holes at equal diameter positions. During assembly, the airbag diaphragm is clamped between the lower airbag disc and the diaphragm fixing ring and assembled through the countersunk bolts.
[0011] A plurality of vent holes are evenly distributed on the surface of the lower airbag disc, and the gas from the gas through holes of the upper airbag disc is evenly transmitted downward to the airbag membrane through these vent holes.
[0012] Furthermore, the outer diameters of the upper airbag disc, the lower airbag disc and the diaphragm fixing ring are consistent, and the diameters are larger than the diameter of the cylinder connecting disc.
[0013] Furthermore, a concave gas buffer zone is formed in the area of the surface of the lower airbag disc corresponding to the plurality of vent holes.
[0014] Further, the vent holes arranged on the surface of the lower airbag disc have the same diameter and are arranged in equal rows and intervals. Preferably, the surface of the lower airbag disc is provided with 13 rows and 13 columns, a total of 145 vent holes of the same diameter.
[0015] Furthermore, a plurality of assembly through holes are evenly arranged along the circumference of the cylinder connection plate, a plurality of assembly blind holes are arranged at corresponding positions of the upper airbag disc, and the cylinder connection plate and the upper airbag disc are connected by bolts.
[0016] Preferably, the number of the assembly through holes and the number of the assembly blind holes are 6 respectively.
[0017] Furthermore, the upper airbag disc and the lower airbag disc are respectively provided with 36 through holes symmetrically at positions of equal diameters near the edges.
[0018] The beneficial effects of the utility model are:
[0019] The inflatable sealing structure of the downward pressure airbag for the silicon wafer mounter provided by the utility model is simple in composition, low in cost, and has high versatility. It can effectively assist the downward pressure airbag of the mounter to act evenly on the silicon wafer, thereby making the silicon wafer pass through the liquid wax and fit the ceramic plate more evenly and tightly, thereby reducing the defective rate of the patch and greatly improving product quality and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1It is a front view of the cylinder connecting plate in the inflatable sealing structure of the utility model.
[0021] Figure 2 It is a top view of the cylinder connecting plate in the inflatable sealing structure of the utility model.
[0022] Figure 3 It is a cross-sectional view of the cylinder connecting plate in the inflatable sealing structure of the utility model.
[0023] Figure 4 It is a front view of the upper airbag disc in the inflatable sealing structure of the utility model.
[0024] Figure 5 It is a top view of the upper airbag disc in the inflatable sealing structure of the utility model.
[0025] Figure 6 It is a cross-sectional view of the upper airbag disc in the inflatable sealing structure of the utility model.
[0026] Figure 7 It is a front view of the lower airbag disc in the inflatable sealing structure of the utility model.
[0027] Figure 8 It is a top view of the lower airbag disc in the inflatable sealing structure of the utility model.
[0028] Fig. 9 It is a cross-sectional view of the lower airbag disc in the inflatable sealing structure of the utility model.
[0029] Fig.10 It is a top view of the diaphragm fixing ring in the inflatable sealing structure of the utility model.
[0030] Fig.11 It is a cross-sectional view of the diaphragm fixing ring in the inflatable sealing structure of the utility model.
[0031] Fig.12 It is a cross-sectional view of the overall assembly of the inflatable sealing structure of the utility model.
[0032] Reference numerals:
[0033] 1 cylinder connecting plate, 11 assembly through hole, 12 external cylinder fixing hole, 13 threaded quick plug hole, 14 gas transmission pipeline, 2 upper air bag disc, 21 assembly blind hole, 22 gas through hole, 23 connecting through hole, 3 lower air bag disc, 31 fixing hole, 32 vent hole, 33 countersunk bolt through hole, 34 gas buffer zone, 4 diaphragm fixing ring, 41 countersunk bolt through hole, 5 air bag diaphragm, 6 external cylinder, 7 gas source quick plug. DETAILED DESCRIPTION
[0034] The present invention will be described in detail below in conjunction with the accompanying drawings, but the embodiments described are only used to explain the present invention and are not used to limit the scope of the present invention.
[0035] like Figures 1 to 12 As shown, the inflatable sealing structure for the downward pressure airbag of the silicon wafer mounter provided by the utility model (hereinafter referred to as the inflatable sealing structure) includes a cylinder connection plate 1, an upper airbag disc 2, a lower airbag disc 3 and a diaphragm fixing ring 4. The upper airbag disc 2, the lower airbag disc 3 and the diaphragm fixing ring 4 have the same outer diameter, and the diameter is larger than the diameter of the cylinder connection plate 1.
[0036] The upper part of the cylinder connection plate 1 is connected to the external cylinder 6 through the external cylinder fixing hole 12. The cylinder connection plate 1 is provided with a plurality of assembly through holes 11. The upper airbag disc 2 is provided with a plurality of assembly blind holes 21 corresponding to the assembly through holes 11. Each assembly through hole 11 is connected to the corresponding assembly blind hole 21 by bolts, so that the cylinder connection plate 1 and the upper airbag disc 2 are fixedly connected by bolts. Figure 2 As shown, the number of assembly through holes 11 and assembly blind holes 21 are 6 respectively. A gas transmission pipeline 14 is provided in the cylinder connection plate 1, and a gas through hole 22 corresponding to the gas transmission pipeline 14 and having the same diameter as the gas transmission pipeline 14 is provided on the upper airbag disc 2; the gas transmission pipeline 14 is connected to the gas source through the threaded quick plug hole 13 and the gas source quick plug plug 7. The gas is transmitted downward through the gas transmission pipeline 14 and the gas through hole 22 of the upper airbag disc.
[0037] The upper airbag disc 2 is provided with a plurality of connecting through holes 23 at equal diameter positions near the edge, and the lower airbag disc 3 is provided with a plurality of fixing holes 31 corresponding to the connecting through holes 23 at equal diameter positions near the edge. Each connecting through hole 23 is connected to the corresponding fixing hole 31 by a countersunk bolt. Figure 5 , 8 As shown, the upper airbag disc 2 and the lower airbag disc 3 are symmetrically provided with 36 connecting through holes 23 and fixing holes 31 at equal diameter positions near the edges.
[0038] like Figures 8 to 12 As shown, the lower airbag disc 3 and the diaphragm fixing ring 4 are respectively provided with a plurality of countersunk bolt through holes 33 and 41 at equal diameter positions. During assembly, the airbag diaphragm 5 is clamped between the lower airbag disc 3 and the diaphragm fixing ring 4 and assembled by countersunk bolts.
[0039] like Figure 8 As shown, the surface of the lower airbag disc is evenly distributed with a plurality of vent holes 32, the plurality of vent holes 32 have the same diameter, and are arranged in rows with equal spacing. For example, the surface of the lower airbag disc is provided with 13 rows and 13 columns, a total of 145 vent holes 32 of the same diameter. Fig. 9 As shown, a concave gas buffer zone 34 is formed on the surface of the lower airbag disc in an area corresponding to the multiple vents 32, and the gas from the gas through holes of the upper airbag disc is uniformly transmitted downward to the airbag membrane 5 via the gas buffer zone 34 and through the multiple vents 32.
[0040] In the inflation sealing structure of the utility model, the outer diameters of the upper airbag disc, the lower airbag disc and the diaphragm fixing ring are consistent, and the diameters are larger than the diameter of the cylinder connecting disc and larger than the size of conventional silicon wafers, thereby ensuring universality.
[0041] In the inflatable sealing structure of the utility model, a plurality of assembly through holes are provided on the cylinder connecting disk, and a plurality of assembly blind holes are provided at corresponding positions of the upper airbag disc, so as to ensure the airtightness of gas transmission.
[0042] In the inflation sealing structure of the utility model, the upper airbag disc and the lower airbag disc are respectively provided with 36 through holes at equal diameter positions near the edge, thereby the upper airbag disc and the lower airbag disc are connected by small diameter through holes, which can ensure the airtightness of gas transmission.
[0043] In the inflation sealing structure of the utility model, the lower airbag disc and the diaphragm fixing ring are assembled by countersunk bolts, which can ensure the airtightness of gas transmission.
[0044] In the inflation sealing structure of the utility model, a plurality of gas through holes are evenly distributed on the lower airbag disc, so that when the gas is transmitted to the airbag, the action surface is larger and the action force is more uniform.
[0045] In the inflatable sealing structure of the utility model, the upper airbag disc and the lower airbag disc are made of aviation aluminum alloy material, and the diaphragm fixing ring is made of 316 stainless steel material.
[0046] In the inflatable sealing structure of the utility model, the upper airbag disc, the lower airbag disc and the fixed ring must not have any defects, so as to ensure the airtightness of the assembly and prevent the silicon wafer or other processing devices from being scratched.
[0047] The inflatable sealing structure of the utility model is suitable for improving the downward pressure of the airbag of the placement machine on the force-bearing surface of the silicon wafer, and making the pressure more uniform, which can effectively improve the placement qualification rate of the placement machine and prepare silicon wafers with better geometric parameters. The inflatable sealing structure of the utility model can cover silicon wafers with diameters of 125mm, 150mm, and 200mm.
[0048] The utility model has the advantages of simple structure, convenient operation and high versatility, and can effectively assist the downward pressure airbag of the placement machine to cover the surface of the silicon wafer as a whole, making the force more uniform, thereby making the silicon wafer pass through the liquid wax and fit the ceramic plate more evenly and tightly, reducing the defective rate of the patch and greatly improving product quality and production efficiency.
[0049] The present invention is defined by the claims, but based on this, a person skilled in the art can make various obvious changes or modifications, which should be within the main spirit and protection scope of the present invention.
Claims
1. An inflatable sealing structure for a downward pressure airbag of a silicon wafer mounter, It is characterized in that It includes a cylinder connecting plate, an upper airbag disc, a lower airbag disc and a diaphragm fixing ring; The cylinder connection plate is fixedly connected to the upper airbag disc by bolts, a gas transmission pipeline is arranged in the cylinder connection plate, and a gas through hole corresponding to one end of the gas transmission pipeline and having the same diameter as that of the upper airbag disc is arranged; The upper airbag disc is provided with a plurality of connecting through holes at equal diameter positions near the edge, and the lower airbag disc is provided with fixing holes corresponding to the connecting through holes, and each connecting through hole is connected to the fixing hole by a countersunk bolt; The lower airbag disc and the diaphragm fixing ring are respectively provided with a plurality of countersunk bolt through holes at equal diameter positions. During assembly, the airbag diaphragm is clamped between the lower airbag disc and the diaphragm fixing ring and assembled through the countersunk bolts. A plurality of vent holes are evenly distributed on the surface of the lower airbag disc, and the gas from the gas through holes of the upper airbag disc is evenly transmitted downward to the airbag membrane through these vent holes.
2. The inflatable sealing structure for the downward pressure airbag of the silicon wafer mounter according to claim 1, It is characterized in that The outer diameters of the upper airbag disc, the lower airbag disc and the diaphragm fixing ring are consistent, and the diameters are larger than the diameter of the cylinder connecting disc.
3. The inflatable sealing structure for the downward pressure airbag of a silicon wafer mounter according to claim 1 or 2, It is characterized in that A concave gas buffer area is formed in the area corresponding to the plurality of vent holes on the surface of the lower airbag disc.
4. The inflatable sealing structure for the downward pressure airbag of a silicon wafer mounter according to claim 1 or 2, It is characterized in that The vent holes arranged on the surface of the lower airbag disc have the same diameter and are arranged in rows with equal spacing.
5. The inflatable sealing structure for the downward pressure airbag of the silicon wafer mounter according to claim 4, It is characterized in that The surface of the lower airbag disc is provided with 13 rows and 13 columns, with a total of 145 ventilation holes of the same diameter.
6. The inflatable sealing structure for the downward pressure airbag of a silicon wafer mounter according to claim 1 or 2, It is characterized in that A plurality of assembly through holes are evenly arranged along the circumference of the cylinder connection plate, a plurality of assembly blind holes are arranged at corresponding positions of the upper airbag disc, and the cylinder connection plate and the upper airbag disc are connected by bolts.
7. The inflatable sealing structure for the downward pressure airbag of the silicon wafer mounter according to claim 6, It is characterized in that The number of assembly through holes and assembly blind holes is 6 respectively.
8. The inflatable sealing structure for the downward pressure airbag of the silicon wafer mounter according to claim 1, It is characterized in that The upper airbag disc and the lower airbag disc are respectively provided with 36 through holes symmetrically at positions of equal diameters close to the edges.