PEEK cleaning flower basket

Abstract

The PEEK cleaning flower basket comprises a cleaning flower basket structure, the cleaning flower basket structure comprises a main body plate, a first baffle and a second baffle are arranged at the connecting position of the main body plate, a bottom plate is arranged at the bottom of the main body plate, side plates are arranged at the top of the bottom plate, a wafer is arranged between the side plates, and groove tooth plates are arranged at the connecting positions of the side plates and the wafer. The groove tooth plate structure comprises a containing groove located in the groove tooth plate, the bottom plate is in a sawtooth shape, and the main body plate, the first baffle, the second baffle, the bottom plate, the side plates and the groove tooth plate are all made of PEEK. According to the utility model, through the PEEK material, the overall change of the wafer flower basket is small when the wafer flower basket is used at 260 DEG C; the structure is more stable through the PEEK material, the wafer circuit is better protected and particle adsorption is reduced through the good anti-static performance of the PEEK material, the PEEK material can tolerate acid and alkali, and the cleaning basket is 6 inches and can adapt to a 6-inch wafer.

Description

Technical Field

[0001] The utility model belongs to the field of cleaning flower baskets, in particular to a PEEK cleaning flower basket. Background Art

[0002] Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Because of its round shape, it is called a wafer. Various circuit component structures can be processed on the silicon wafer to become IC products with specific electrical functions. The raw material of the wafer is silicon, and there is an inexhaustible supply of silicon dioxide on the surface of the earth's crust. Silicon dioxide ore is refined in an electric arc furnace, chlorinated with hydrochloric acid, and distilled to produce high-purity polysilicon with a purity of up to 99.999999999%.

[0003] The wafer cleaning baskets currently on the market are baskets for cleaning wafers. The cleaning baskets currently on the market are not resistant to high temperatures and have an unstable overall structure. They can produce static electricity effects and adsorption of attached particles, which can damage the wafer's circuit and cause the wafer to be scrapped. They also have low tolerance to acidity and alkali. Utility Model Content

[0004] The purpose of the utility model is to provide a PEEK cleaning flower basket, aiming to solve the problems existing in the background technology. To achieve the above purpose, the technical solution adopted by the utility model is:

[0005] A PEEK cleaning basket comprises a cleaning basket structure, wherein the cleaning basket structure comprises a main body plate, a first baffle plate and a second baffle plate are arranged at the connection of the main body plate, a bottom plate is arranged at the bottom of the main body plate, a side plate is arranged at the top of the bottom plate, a wafer is arranged between the side plates, and a groove tooth plate is arranged at the connection between the side plate and the wafer;

[0006] The grooved plate structure includes a receiving groove on the grooved plate, the bottom plate is serrated, and the main plate, the first baffle plate, the second baffle plate, the bottom plate, the side plate and the grooved plate are all made of PEEK. PEEK (polyetheretherketone) is a special engineering plastic with a series of excellent performance characteristics, which makes it widely used in engineering and medicine. PEEK has the following characteristics:

[0007] High temperature resistance: PEEK can maintain stable performance in high temperature environment and has excellent heat resistance;

[0008] Chemical corrosion resistance: It has excellent stability to a variety of chemicals and can resist chemical corrosion;

[0009] High mechanical strength: high strength, high hardness and wear resistance;

[0010] Biocompatibility: suitable for medical device manufacturing, such as bone implants, stents, etc.;

[0011] Electrical insulation: Applicable to electrical and electronic fields, such as connectors, insulators, etc.

[0012] Lightweight: suitable for sports equipment, such as advanced bicycle parts;

[0013] Radiation resistance: suitable for nuclear energy field;

[0014] Hydrolysis resistance: suitable for marine engineering field.

[0015] Preferably, hanging ears are provided on the left and right sides of the top of the main body plate, and jacks are provided inside the hanging ears. The hanging ears are connected to the top of the main body plate in a snap-fit ​​manner.

[0016] Preferably, the baffle is connected to the main body plate in a snap-fit ​​manner.

[0017] Preferably, the main plate is fixedly connected to the top of the bottom plate, the side plate is fixedly connected between the front and rear main plates, and the wafer is placed on the grooved plate inside the side plate.

[0018] Preferably, the grooved tooth plates on the left and right sides are symmetrically designed, and a total of three rows of accommodating grooves are provided on the grooved tooth plates, and the vertical length of the accommodating grooves at the bottom is greater than the two rows of accommodating grooves at the top.

[0019] Preferably, the size of the cleaning basket structure is 6 inches.

[0020] The beneficial effects of the utility model are as follows: the PEEK material allows the overall change of the wafer flower basket to be small when used at 260°C; the PEEK material has a more stable structure, the PEEK material has good anti-static performance, better protects the wafer circuit and reduces particle adsorption, the PEEK material can tolerate acid and alkali, and the 6-inch cleaning flower basket can adapt to 6-inch wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 An overall schematic diagram provided for an embodiment of the utility model;

[0022] Figure 2 A schematic diagram of a cross-sectional structure provided for an embodiment of the utility model;

[0023] Among them, the reference numerals in the figure are:

[0024] 1. Main plate; 2. First baffle plate; 3. Bottom plate; 4. Side plate; 5. Wafer; 6. Grooved plate; 7. Accommodating groove; 8. Hanging ear; 9. Second baffle plate. DETAILED DESCRIPTION

[0025] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively with reference to the relevant drawings. The drawings provide preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thoroughly and comprehensively understood.

[0026] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be a centered element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centered element at the same time. On the contrary, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method. The terms "upper end", "lower end", "left side", "right side", "front end", "rear end" and similar expressions used herein are positional relationships with reference to the accompanying drawings.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0028] The technical solution of this patent is further described in detail below in conjunction with specific implementation methods.

[0029] like Figures 1-2 As shown, the embodiment of the utility model provides a PEEK cleaning basket, including a cleaning basket structure, the cleaning basket structure includes a main body plate 1, a first baffle plate 2 and a second baffle plate 9 are provided at the connection of the main body plate 1, a bottom plate 3 is provided at the bottom of the main body plate 1, a side plate 4 is provided at the top of the bottom plate 3, a wafer 5 is provided between the side plates 4, and a groove tooth plate 6 is provided at the connection between the side plate 4 and the wafer 5;

[0030] The grooved plate 6 structure includes a receiving groove 7 located on the grooved plate 6, the bottom plate 3 is serrated, and the main plate 1, the first baffle plate 2, the second baffle plate 9, the bottom plate 3, the side plate 4 and the grooved plate 6 are all made of PEEK. PEEK (polyetheretherketone) is a special engineering plastic with a series of excellent performance characteristics, which makes it widely used in engineering and medicine. PEEK has the following characteristics:

[0031] High temperature resistance: PEEK can maintain stable performance in high temperature environment and has excellent heat resistance;

[0032] Chemical corrosion resistance: It has excellent stability to a variety of chemicals and can resist chemical corrosion;

[0033] High mechanical strength: high strength, high hardness and wear resistance;

[0034] Biocompatibility: suitable for medical device manufacturing, such as bone implants, stents, etc.;

[0035] Electrical insulation: Applicable to electrical and electronic fields, such as connectors, insulators, etc.

[0036] Lightweight: suitable for sports equipment, such as advanced bicycle parts;

[0037] Radiation resistance: suitable for nuclear energy field;

[0038] Hydrolysis resistance: suitable for marine engineering field.

[0039] In the embodiment, hanging ears 8 are provided on the left and right sides of the top of the main body plate 1 , and jacks are provided inside the hanging ears 8 . The hanging ears 8 are connected to the top of the main body plate 1 in a snap-fit ​​manner.

[0040] In the embodiment, the baffle is connected to the main plate 1 by a snap-fitting manner.

[0041] In the embodiment, the main plate 1 is fixedly connected to the top of the bottom plate 3 , the side plate 4 is fixedly connected between the front and rear main plates 1 , and the wafer 5 is placed on the grooved plate 6 inside the side plate 4 .

[0042] In the embodiment, the grooved plates 6 on the left and right sides are symmetrically designed, and three rows of accommodating grooves 7 are provided on the grooved plates 6 . The vertical length of the accommodating grooves 7 at the bottom is greater than that of the two rows of accommodating grooves 7 at the top.

[0043] In the embodiment, the size of the cleaning basket structure is 6 inches.

[0044] The above implementation modes are only used to illustrate the present invention, but not to limit the present invention. Ordinary technicians in the relevant technical field can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions also belong to the scope of the present invention. The scope of patent protection of the present invention should be limited by the claims.

Claims

1. A PEEK cleaning flower basket, It is characterized in that It comprises a cleaning basket structure, the cleaning basket structure comprises a main body plate, a first baffle plate and a second baffle plate are provided at the connection of the main body plate, a bottom plate is provided at the bottom of the main body plate, a side plate is provided at the top of the bottom plate, wafers are provided between the side plates, and a groove tooth plate is provided at the connection between the side plate and the wafer; The grooved plate structure comprises a receiving groove on the grooved plate, the bottom plate is sawtooth-shaped, and the main plate, the first baffle plate, the second baffle plate, the bottom plate, the side plate and the grooved plate are all made of PEEK.

2. A PEEK cleaning flower basket according to claim 1, It is characterized in that The left and right sides of the top of the main body plate are provided with hanging ears, the inside of the hanging ears is provided with a plug hole, and the hanging ears are connected to the top of the main body plate in a snap-on manner.

3. A PEEK cleaning flower basket according to claim 1, It is characterized in that The baffle is connected to the main body plate in a clamping manner.

4. A PEEK cleaning flower basket according to claim 1, It is characterized in that The main body plate is fixedly connected to the top of the bottom plate, the side plate is fixedly connected between the front and rear main body plates, and the wafer is placed on the grooved plate inside the side plate.

5. A PEEK cleaning flower basket according to claim 1, It is characterized in that The grooved tooth plates on the left and right sides are symmetrically designed, and a total of three rows of accommodating grooves are arranged on the grooved tooth plates, and the vertical length of the accommodating grooves at the bottom is greater than the two rows of accommodating grooves at the top.

6. A PEEK cleaning flower basket according to claim 1, It is characterized in that The size of the cleaning basket structure is 6 inches.

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