Substrate vacuum drying device and processing system

Abstract

The utility model relates to a vacuum drying device for a substrate and a processing system. The vacuum drying device for the substrate comprises a supporting piece, a vacuum drying device and a processing device, the conveying assembly is installed on the supporting piece, and the conveying assembly is used for supporting and conveying the substrate; the cover body is located above the supporting piece, and an opening is formed in the lower portion of the cover body; the lifting driving assembly is in driving connection with the supporting piece and / or the cover body to drive the supporting piece or the cover body to do lifting motion, so that the cover body is suitable for being buckled to the supporting piece, the cover body and the supporting piece are suitable for forming a sealing cavity, and the conveying assembly is located in the sealing cavity; the negative pressure device, the cover body and / or the supporting piece are / is provided with an air extraction opening, and the air extraction end of the negative pressure device is communicated with the air extraction opening. The conveying assembly is used for feeding and discharging the substrates, the lifting driving assembly is arranged for separating or buckling the supporting piece and the cover body, the feeding and discharging process of the substrates is optimized, the drying processing efficiency is improved, and the substrate drying device is suitable for large-scale drying treatment of the substrates.

Description

Technical Field

[0001] The present application relates to the field of drying technology, and in particular to a vacuum drying device and processing system for a substrate. Background Art

[0002] Perovskite solar cells are gaining more and more attention due to their high conversion efficiency, low cost, and environmental friendliness. Moreover, the photoelectric conversion efficiency of perovskite solar cells has increased several times in just a few years, showing very excellent photoelectric performance.

[0003] When forming a perovskite solar cell, multiple film layers need to be formed on a substrate. Generally, the film layers are formed by scraping, spraying, etc. The film layers then need to be vacuum dried to remove the solvent.

[0004] In the related art, a vacuum box is provided, and a substrate covered with a film layer is sent into the vacuum box, and a negative pressure device is used to evacuate the vacuum box to complete the drying process of the substrate in the vacuum box.

[0005] Generally, the vacuum box has a loading and unloading port. When drying, the substrate needs to be sent into the vacuum box, and the door of the vacuum box is closed, and then the drying process is carried out. After drying, the substrate is taken out, and then the next substrate is loaded into the vacuum box.

[0006] In the process of loading and unloading substrates, not only an external robot is required to deliver the substrates to the vacuum box, but also the dried substrates need to be taken out before the substrates to be dried are delivered to the vacuum box. Therefore, when loading and unloading substrates, more additional auxiliary equipment is required, and the efficiency of loading and unloading substrates is slow, which is difficult to meet the processing needs of large quantities of substrates. Utility Model Content

[0007] The embodiments of the present application provide a vacuum drying device and processing system for a substrate to solve the technical problems in the related art that a large number of additional auxiliary equipment are required when loading and unloading substrates, and the loading and unloading efficiency is slow, making it difficult to meet the processing needs of large quantities of substrates.

[0008] In a first aspect, a vacuum drying device for a substrate is provided, comprising:

[0009] Supports;

[0010] A conveying assembly, the conveying assembly is mounted on the supporting member, and the conveying assembly is used to support and convey the substrate;

[0011] A cover body, the cover body is located above the support member, and an opening is arranged below the cover body;

[0012] A lifting drive assembly, the lifting drive assembly is drivingly connected to the support member and / or the cover body to drive the support member or the cover body to move up and down, so that the cover body is suitable for buckling with the support member, the cover body and the support member are suitable for forming a sealed cavity, and the conveying assembly is located in the sealed cavity;

[0013] The negative pressure device, the cover body, and / or the support member are provided with an air suction port, and the air suction end of the negative pressure device is connected to the air suction port.

[0014] In some embodiments, the delivery assembly comprises:

[0015] A conveying frame, the conveying frame is mounted on the supporting member;

[0016] A conveying wheel group, the conveying wheel group includes a plurality of conveying rods and a plurality of conveying wheels, the plurality of conveying rods are rotatably connected to the conveying frame, and the plurality of conveying rods are spaced apart along the radial direction thereof, and each of the conveying rods is coaxially fixedly sleeved with a plurality of the conveying wheels, and the plurality of the conveying wheels are used to support the substrate;

[0017] A conveying driving member is drivingly connected to the plurality of conveying rods to drive the plurality of conveying rods to rotate synchronously.

[0018] In some embodiments, the conveying drive comprises:

[0019] A plurality of first magnetic wheels, wherein the plurality of first magnetic wheels are coaxially fixed to the plurality of conveying rods respectively;

[0020] A transmission rod, the transmission rod being rotatably connected to the conveying frame;

[0021] A plurality of second magnetic wheels, wherein the plurality of second magnetic wheels are coaxially fixed to the transmission rod, the rotation axis of the second magnetic wheels is orthogonal to the rotation axis of the first magnetic wheel, and the plurality of second magnetic wheels are respectively in transmission cooperation with the plurality of first magnetic wheels;

[0022] a third magnetic wheel, the third magnetic wheel being rotatably connected to the conveying frame, the rotation axis of the third magnetic wheel being orthogonal to the rotation axis of the second magnetic wheel, and the third magnetic wheel being in transmission cooperation with one of the second magnetic wheels;

[0023] The conveying rotating driving member is installed on the conveying frame, and the conveying rotating driving member is drivingly connected to the third magnetic wheel to drive the third magnetic wheel to rotate.

[0024] In some embodiments, the vacuum drying device for substrates further comprises a positioning assembly, wherein the positioning assembly comprises two sets of positioning wheel assemblies, wherein the positioning wheel assemblies are mounted on the supporting member, and the positioning wheel assemblies comprise a plurality of positioning wheels arranged along the conveying direction of the conveying assembly;

[0025] The two groups of positioning wheel sets are spaced apart in a direction perpendicular to the conveying direction, and the two groups of positioning wheel sets are respectively used to contact two opposite sides of the substrate.

[0026] In some embodiments, the lifting drive assembly includes:

[0027] Lifting frame;

[0028] A lifting drive member, wherein the lifting drive member is installed on the lifting frame, and the lifting drive member is drivingly connected to the cover body and / or the support member to drive the cover body or the support member to move up and down.

[0029] In some embodiments, the negative pressure device includes a negative pressure generator, a connecting tube and a flexible tube, the two ends of the connecting tube are respectively connected to the exhaust end of the negative pressure generator and the flexible tube, and the end of the flexible tube away from the connecting tube is connected to the exhaust port.

[0030] In some embodiments, the vacuum drying device for the substrate further comprises a flow guide component, the flow guide component is installed on the inner side of the support member or the cover body, and the flow guide component is arranged opposite to the air extraction port, and the flow guide component comprises:

[0031] A plurality of guide plates are provided with a plurality of guide holes, the guide plates are arranged at intervals, and the guide holes on the guide plates are arranged in a staggered manner.

[0032] In some embodiments, the support member includes a support box, the top of the support box is open, and the conveying end of the conveying assembly is higher than the top of the support box.

[0033] In some embodiments, the vacuum drying device for the substrate also includes a protective cover, wherein the support member, the cover body, and the lifting drive assembly are all located inside the protective cover, and material ports are provided on two opposite sides of the protective cover, and the connecting direction of the two material ports is consistent with the conveying direction of the conveying assembly.

[0034] The beneficial effects of the technical solution provided by this application include:

[0035] The embodiment of the present application provides a vacuum drying device for substrates. When the substrate is dried, the cover is separated from the support, and the substrate is sent to the starting end of the conveying assembly. The conveying assembly transfers the substrate to the top of the support, and then the lifting drive assembly makes the cover and the support buckle to place the substrate in the sealed cavity, and then the negative pressure device vacuumizes the sealed cavity to dry the substrate. After the substrate is dried, the lifting drive assembly separates the support and the cover, and then the conveying assembly conveys the dried substrate to the end to feed the substrate, and the starting section of the conveying assembly can synchronously convey the substrate to the top of the support to prepare for drying the substrate. Therefore, when loading and unloading the substrate, there is no need for an additional manipulator to pick up and deliver the substrate from the support, and the connection of batch loading and unloading of substrates is more reasonable, the processing rhythm is better, and the processing efficiency is higher, which is suitable for the drying processing needs of large batches of substrates.

[0036] In a second aspect, a substrate processing system is provided, comprising the substrate vacuum drying device as described above.

[0037] Another embodiment of the present application provides a substrate processing system. Since the substrate processing system includes the above-mentioned vacuum drying device for the substrate, the beneficial effects of the substrate processing system are consistent with the beneficial effects of the above-mentioned vacuum drying device for the substrate, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 An overall schematic diagram of a vacuum drying device for a substrate provided in an embodiment of the present application;

[0040] Figure 2 A schematic diagram of the interior of a protective cover provided in an embodiment of the present application;

[0041] Figure 3 A partial schematic diagram of a vacuum drying device for a substrate provided in an embodiment of the present application;

[0042] Figure 4 A partial exploded schematic diagram of a support member and a cover body provided in an embodiment of the present application;

[0043] Figure 5 A schematic diagram of a conveying assembly provided in an embodiment of the present application;

[0044] Figure 6 A schematic diagram of a cover body provided in an embodiment of the present application;

[0045] Figure 7 A schematic diagram of a flow guide assembly provided in an embodiment of the present application.

[0046] In the figure: 1, support member; 2, conveying assembly; 21, conveying frame; 22, conveying wheel group; 221, conveying rod; 222, conveying wheel; 23, conveying drive member; 231, first magnetic wheel; 232, transmission rod; 233, second magnetic wheel; 234, third magnetic wheel; 235, conveying rotation drive member; 3, cover body; 3a, exhaust port; 4, lifting drive assembly; 41, lifting frame; 42, lifting drive member; 5, negative pressure device; 51, negative pressure generator; 52, connecting pipe; 53, flexible pipe; 61, positioning wheel group; 7, guide assembly; 71, guide plate; 71a, guide hole; 8, protective cover; 8a, material port; 9, sealing ring; a, substrate. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0048] The embodiment of the present application provides a vacuum drying device and processing system for substrates, wherein the vacuum drying device for substrates uses a conveying assembly to load and unload substrates, and a lifting drive assembly is provided to separate or engage a support member and a cover body, thereby optimizing the loading and unloading process of substrates, improving the drying processing efficiency, and being suitable for large-scale drying of substrates. The present application solves the technical problem in the related art that when loading and unloading substrates, a large number of additional auxiliary equipment are required, and the loading and unloading efficiency is slow, making it difficult to meet the processing requirements of large quantities of substrates.

[0049] Reference Figure 3 and Figure 4 A vacuum drying device for substrates includes a support 1, a conveying assembly 2, a cover 3, a lifting drive assembly 4 and a negative pressure device 5. The conveying assembly 2 is arranged on the support 1 and is used to support and convey the substrate a. The cover 3 is located above the support 1, and the lifting drive assembly 4 separates or fastens the cover 3 and the support 1. When the cover 3 and the support 1 are in the fastening state, a sealed cavity is formed, and the conveying assembly 2 is located in the sealed cavity. The negative pressure device 5 is connected to the sealed cavity to dry the substrate a in the sealed cavity.

[0050] With this arrangement, when the substrate is loaded, the support 1 and the cover 3 are in a separated state, the substrate is delivered to the top of the support 1 by the conveying assembly 2, and then the support 1 and the cover 3 are buckled, and the substrate a in the sealed cavity is dried. After the substrate processing is completed, the support 1 and the cover 3 are separated, and the conveying assembly 2 conveys the processed substrate to the unloading, and at the same time, the new substrate is synchronously loaded to the top of the support 1 by the conveying assembly 2. Therefore, when the substrate is unloaded, there is no need for an additional manipulator to pick up and deliver the substrate from the support 1, the connection between the loading and unloading of batch substrates is more reasonable, the processing rhythm is better, and the processing efficiency is higher, which is suitable for the drying processing needs of large batches of substrates.

[0051] Reference Figure 3 and Figure 4 Specifically, the cover 3 is located above the support 1, and the lower part of the cover 3 is opened. The support 1 and the cover 3 can be relatively lifted and lowered so that the cover 3 is buckled on the support 1. At this time, the cover 3 and the support 1 form a sealed cavity, and the conveying assembly 2 is located in the sealed cavity. When the substrate a is dried, the substrate a is supported by the conveying assembly 2 and is located in the sealed cavity.

[0052] Reference Figure 4 and Figure 5 , wherein the conveying assembly 2 is installed on the support 1, and the conveying assembly 2 is used to support and convey the substrate a. The conveying of the substrate a by the conveying assembly 2 facilitates the transfer of the substrate a to the top of the support 1, and ensures that the substrate a moves to the bottom of the cover body 3, and ensures that the substrate a is in the sealed cavity when the cover body 3 and the support 1 are buckled. In addition, the conveying assembly 2 can send away the processed substrate a, and simultaneously transfer the substrate a to be processed to the top of the support 1. This makes the loading and unloading process of the substrate a more reasonable, and the drying process more efficient.

[0053] Reference Figure 4 and Figure 5 Specifically, the conveying assembly 2 includes a conveying frame 21, a conveying wheel 222 group 22 and a conveying driving member 23. The conveying frame 21 is installed on the support member 1. The conveying wheel 222 group 22 includes a plurality of conveying rods 221 and a plurality of conveying wheels 222. The plurality of conveying rods 221 are all rotatably connected to the conveying frame 21, and the plurality of conveying rods 221 are arranged at intervals along the radial direction thereof, and the conveying rods 221 are arranged at intervals in the conveying direction of the conveying assembly 2, and the length direction of the conveying rods 221 is arranged perpendicular to the conveying direction. A plurality of conveying wheels 222 are coaxially fixedly sleeved on each conveying rod 221, and the plurality of conveying wheels 222 are used to support the substrate a. The conveying driving member 23 is drivingly connected to the plurality of conveying rods 221 to drive the plurality of conveying rods 221 to rotate synchronously.

[0054] With such arrangement, as the multiple conveying rods 221 rotate, the multiple conveying wheels 222 rotate synchronously to drive the substrates a on the conveying wheels 222 to move in the conveying direction, thereby realizing loading and unloading of substrates.

[0055] Reference Figure 4 and Figure 5 , wherein the conveying driving member 23 includes a plurality of first magnetic wheels 231, a transmission rod 232, a plurality of second magnetic wheels 233, a third magnetic wheel 234 and a conveying rotating driving member 235. The plurality of first magnetic wheels 231 are coaxially fixed to the plurality of conveying rods 221, respectively. The transmission rod 232 is rotatably connected to the conveying frame 21. The plurality of second magnetic wheels 233 are coaxially fixed to the transmission rod 232, the rotation axis of the second magnetic wheel 233 is orthogonal to the rotation axis of the first magnetic wheel 231, and the plurality of second magnetic wheels 233 are respectively transmission-coordinated with the plurality of first magnetic wheels 231. The third magnetic wheel 234 is rotationally connected to the conveying frame 21, the rotation axis of the third magnetic wheel 234 is orthogonal to the rotation axis of the second magnetic wheel 233, and the third magnetic wheel 234 is transmission-coordinated with a second magnetic wheel 233. The conveying rotation driving member 235 is installed on the conveying frame 21 , and the conveying rotation driving member 235 is drivingly connected to the third magnetic wheel 234 to drive the third magnetic wheel 234 to rotate.

[0056] In this arrangement, the conveying rotation driving member 235 drives the third magnetic wheel 234 to rotate, and the third magnetic wheel 234 transmits power to the second magnetic wheel 233, so that the transmission rod 232 rotates, and all the second magnetic wheels 233 rotate synchronously, and the second magnetic wheel 233 transmits power to the first magnetic wheel 231, so that the first magnetic wheel 231 rotates, and the conveying rod 221 rotates synchronously. Therefore, multiple conveying rods 221 and multiple conveying wheels 222 rotate synchronously, and the rotation speed is consistent. When transferring substrate a, the substrate movement is more stable.

[0057] In addition, since the conveying drive member 23 adopts a magnetic wheel transmission mode, its operation noise is small, the transmission accuracy is high and the transmission is stable, which not only improves the transfer accuracy of the substrate, but also reduces the operation noise of the device.

[0058] In this embodiment, the conveying rotation driving member 235 includes a servo motor.

[0059] In some embodiments, the conveyor drive 23 may include a chain mechanism.

[0060] In some embodiments, the transport assembly 2 may include a conveyor belt mechanism.

[0061] Reference Figure 4 and Figure 5Further, the vacuum drying device for substrates further comprises a positioning assembly, the positioning assembly comprises two sets of positioning wheel sets 61, the positioning wheel sets 61 are mounted on the support member 1, and in this embodiment, the positioning wheel sets 61 are mounted on the conveying frame 21. The positioning wheel sets 61 comprise a plurality of positioning wheels arranged along the conveying direction of the conveying assembly 2. The two sets of positioning wheel sets 61 are spaced apart perpendicular to the conveying direction, and the two sets of positioning wheel sets 61 are respectively used to contact the opposite two sides of the substrate a.

[0062] In this arrangement, when the substrate a moves on the conveying assembly 2, the two sets of positioning wheel groups 61 respectively limit the opposite sides of the substrate a, thereby ensuring the position of the substrate a and preventing the substrate a from being skewed. In addition, during the drying process, due to the arrangement of the positioning wheel group 61, the substrate a is not easily affected by the airflow and shakes at will, thereby ensuring the drying quality of the substrate a.

[0063] The lifting drive assembly 4 is drivingly connected to the support member 1 and / or the cover body 3 to drive the support member 1 or the cover body 3 to move up and down, so that the cover body 3 is suitable for buckling with the support member 1.

[0064] Reference Figure 3 and Figure 4 Specifically, the lifting drive assembly 4 includes a lifting frame 41 and a lifting drive member 42. The lifting drive member 42 is installed on the lifting frame 41, and the lifting drive member 42 is drivingly connected to the cover body 3 and / or the support member 1 to drive the cover body 3 or the support member 1 to move up and down. In this embodiment, a plurality of lifting drive members 42 may be provided, wherein the lifting drive member 42 includes a cylinder or a screw mechanism.

[0065] In this embodiment, the lifting drive assembly 4 also includes multiple guide rail groups, the cover body 3, and / or the support member 1 is slidably arranged on the lifting frame 41 through the guide rail group, so as to improve the lifting and lowering movement stability of the cover body 3 and the support member 1.

[0066] Reference Figure 3 and Figure 4 In this embodiment, the lifting drive assembly 4 is connected to the cover body 3, while the support member 1 is fixed. The cover body 3 is lifted and lowered to realize the buckling and separation of the cover body 3 and the support member 1.

[0067] In this arrangement, since the cover body 3 moves while the support member 1 does not move, the substrate a on the support member 1 is not likely to shake during the buckling process of the cover body 3 and the support member 1, ensuring that the position of the substrate a remains unchanged and facilitating the quality of the drying process.

[0068] The cover body 3 and / or the support member 1 is provided with an air suction port 3a, and the air suction end of the negative pressure device 5 is connected to the air suction port 3a.

[0069] Reference Figure 3 and Figure 4In this embodiment, an air extraction port 3 a is provided on the cover body 3 , and the air extraction port 3 a is opened on the top surface of the cover body 3 .

[0070] With this arrangement, after the cover body 3 and the support member 1 are buckled together, the air extraction port 3a is located at the top of the sealed cavity. By extracting air at the top of the sealed cavity, the air extraction is more uniform, the drying treatment of the substrate a is more uniform, and the drying effect is better.

[0071] Reference Figure 1 and Figure 2 Specifically, the negative pressure device 5 includes a negative pressure generator 51, a connecting tube 52 and a flexible tube 53. The two ends of the connecting tube 52 are respectively connected to the exhaust end of the negative pressure generator 51 and the flexible tube 53, and the end of the flexible tube 53 away from the connecting tube 52 is connected to the exhaust port 3a.

[0072] In this arrangement, the flexible tube 53 is connected to the air outlet 3a to support the lifting movement of the cover body 3. When the cover body 3 is lifted and lowered, the flexible tube 53 is deformed to ensure the sealing of the connection between the flexible tube 53 and the cover body 3 and avoid air leakage in the sealed cavity.

[0073] The flexible tube 53 includes a corrugated tube.

[0074] Reference Figure 6 and Figure 7 Optionally, the vacuum drying device for the substrate further comprises a flow guide component 7, which is installed on the inner side of the support member 1 or the cover body 3, and the flow guide component 7 is arranged opposite to the air extraction port 3a. In this embodiment, the flow guide component 7 is installed inside the cover body 3 and is arranged close to the inner top surface of the cover body 3.

[0075] Reference Figure 6 and Figure 7 The guide assembly 7 includes a plurality of guide plates 71, which are connected by bolts so that the guide plates 71 are arranged at intervals, and the guide plate 71 at the top is fixed to the inner top surface of the cover body 3 by bolts. The guide plates 71 are each provided with a plurality of guide holes 71a, and the guide holes 71a on the guide plates 71 are staggered.

[0076] In this way, by setting the guide plate 71, when the air in the sealed chamber is evacuated, the airflow at each position of the substrate a is more uniform, so the drying treatment of the substrate a is more uniform and the drying effect is better.

[0077] Reference Figure 3 and Figure 4 The support member 1 is preferably a support box, the top of the support box is open, the conveying assembly 2 is installed inside the support box, and the conveying end of the conveying assembly 2 is higher than the top surface of the support box. In this embodiment, the conveying wheel 222 is arranged beyond the top surface of the support box.

[0078] In this arrangement, when the conveying assembly 2 supports and conveys the substrate a, the substrate a is located above the support box, and the support box does not interfere with the movement path of the substrate a, which facilitates the loading and unloading of the substrate a. Furthermore, since most of the conveying assembly 2 is located in the support box, the portion of the conveying assembly 2 protruding from the support box is small, so when the cover body 3 is buckled on the support box, the movement stroke of the support box or the cover body 3 is shorter, and the drying device can be designed in a miniaturized manner, and the buckling efficiency is improved.

[0079] Reference Figure 3 and Figure 4 Furthermore, a sealing ring 9 is embedded near the edge of the top surface of the support member 1 and / or near the edge of the bottom surface of the cover body 3, and the sealing ring 9 is protrudingly arranged.

[0080] With such arrangement, when the cover body 3 and the support member 1 are buckled together, due to the arrangement of the sealing ring 9, the contact point between the cover body 3 and the support member 1 is sealed by the sealing ring 9, thereby preventing air leakage at the joint between the cover body 3 and the support member 1.

[0081] In this embodiment, the sealing ring 9 is arranged on the top surface of the supporting box.

[0082] Reference Figure 1 and Figure 2 Optionally, the vacuum drying device for substrates further comprises a protective cover 8, wherein the support member 1, the cover body 3, and the lifting drive assembly 4 are all located in the protective cover 8. Two opposite sides of the protective cover 8 are provided with material ports 8a, and the connection direction of the two material ports 8a is consistent with the conveying direction of the conveying assembly 2.

[0083] In this way, by providing the protective cover 8, the support member 1 and the cover body 3 are protected to prevent external debris from falling onto the support member 1, thereby ensuring the fastening of the support member 1 and the cover body 3. In addition, by providing the material port 8a, it is convenient for the substrate a to be directly delivered to the conveying assembly 2 through the material port 8a, and the dried substrate a can also be conveniently directly removed from the protective cover 8 from the material port 8a.

[0084] The embodiment of the present application provides a vacuum drying device for substrates. When the substrate is dried, the cover body 3 is separated from the support 1, and the substrate a is sent to the starting end of the conveying assembly 2. The conveying assembly 2 transfers the substrate a to the top of the support 1, and then the lifting drive assembly 4 makes the cover body 3 and the support 1 buckle to place the substrate a in the sealed cavity, and then the negative pressure device 5 vacuumizes the sealed cavity to dry the substrate a. After the substrate a is dried, the lifting drive assembly 4 separates the support 1 and the cover body 3, and then the conveying assembly 2 conveys the dried substrate a to the end to feed the substrate a, and the starting section of the conveying assembly 2 can synchronously convey the substrate a to the top of the support 1 to prepare for the substrate a to be dried. Therefore, when the substrate a is loaded and unloaded, there is no need for an additional manipulator to pick up and deliver the substrate a from the support 1, and the batch substrate loading and unloading connection is more reasonable, the processing rhythm is better, and the processing efficiency is higher, which is suitable for the drying treatment requirements of large batches of substrates.

[0085] Another embodiment of the present application provides a substrate processing system, including the vacuum drying device for the substrate as described above.

[0086] Another embodiment of the present application provides a substrate processing system. Since the substrate processing system includes the above-mentioned vacuum drying device for the substrate, the beneficial effects of the substrate processing system are consistent with the beneficial effects of the above-mentioned vacuum drying device for the substrate, which will not be repeated here.

[0087] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0088] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0089] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A vacuum drying device for a substrate, characterized in that: It includes: Supports; A conveying assembly, the conveying assembly is mounted on the supporting member, and the conveying assembly is used to support and convey the substrate; A cover body, the cover body is located above the support member, and an opening is arranged below the cover body; A lifting drive assembly, the lifting drive assembly is drivingly connected to the support member and / or the cover body to drive the support member or the cover body to move up and down, so that the cover body is suitable for buckling with the support member, the cover body and the support member are suitable for forming a sealed cavity, and the conveying assembly is located in the sealed cavity; The negative pressure device, the cover body, and / or the support member are provided with an air suction port, and the air suction end of the negative pressure device is connected to the air suction port.

2. The vacuum drying device for substrate according to claim 1, characterized in that: The conveying assembly comprises: A conveying frame, the conveying frame is mounted on the supporting member; A conveying wheel group, the conveying wheel group includes a plurality of conveying rods and a plurality of conveying wheels, the plurality of conveying rods are rotatably connected to the conveying frame, and the plurality of conveying rods are spaced apart along the radial direction thereof, and each of the conveying rods is coaxially fixedly sleeved with a plurality of the conveying wheels, and the plurality of the conveying wheels are used to support the substrate; A conveying driving member is drivingly connected to the plurality of conveying rods to drive the plurality of conveying rods to rotate synchronously.

3. The vacuum drying device for substrate according to claim 2, characterized in that: The conveying drive member comprises: A plurality of first magnetic wheels, wherein the plurality of first magnetic wheels are coaxially fixed to the plurality of conveying rods respectively; A transmission rod, the transmission rod being rotatably connected to the conveying frame; A plurality of second magnetic wheels, wherein the plurality of second magnetic wheels are coaxially fixed to the transmission rod, the rotation axis of the second magnetic wheels is orthogonal to the rotation axis of the first magnetic wheel, and the plurality of second magnetic wheels are respectively in transmission cooperation with the plurality of first magnetic wheels; a third magnetic wheel, the third magnetic wheel being rotatably connected to the conveying frame, the rotation axis of the third magnetic wheel being orthogonal to the rotation axis of the second magnetic wheel, and the third magnetic wheel being in transmission cooperation with one of the second magnetic wheels; The conveying rotating driving member is installed on the conveying frame, and the conveying rotating driving member is drivingly connected to the third magnetic wheel to drive the third magnetic wheel to rotate.

4. The vacuum drying device for substrate according to claim 1, characterized in that: It also includes a positioning assembly, the positioning assembly includes two groups of positioning wheel groups, the positioning wheel groups are installed on the support member, and the positioning wheel groups include a plurality of positioning wheels arranged along the conveying direction of the conveying assembly; The two groups of positioning wheel sets are spaced apart in a direction perpendicular to the conveying direction, and the two groups of positioning wheel sets are respectively used to contact two opposite sides of the substrate.

5. The vacuum drying device for substrate according to claim 1, characterized in that: The lifting drive assembly comprises: Lifting frame; A lifting drive member, wherein the lifting drive member is installed on the lifting frame, and the lifting drive member is drivingly connected to the cover body and / or the support member to drive the cover body or the support member to move up and down.

6. The vacuum drying device for substrate according to claim 1, characterized in that: The negative pressure device includes a negative pressure generator, a connecting pipe and a flexible pipe. The two ends of the connecting pipe are respectively connected to the air extraction end of the negative pressure generator and the flexible pipe. The end of the flexible pipe away from the connecting pipe is connected to the air extraction port.

7. The vacuum drying device for substrate according to claim 1 or 6, characterized in that: It also includes a flow guide component, which is installed on the inner side of the support member or the cover body, and the flow guide component is arranged directly opposite to the air extraction port, and the flow guide component includes: A plurality of guide plates are provided with a plurality of guide holes, the guide plates are arranged at intervals, and the guide holes on the guide plates are arranged in a staggered manner.

8. The vacuum drying device for substrates according to any one of claims 1 to 6, characterized in that: The support member comprises a support box, the top of the support box is opened, and the conveying end of the conveying assembly is higher than the top of the support box.

9. The vacuum drying device for substrate according to claim 1, characterized in that: It also includes a protective cover, wherein the support member, the cover body, and the lifting drive assembly are all located inside the protective cover, and material openings are opened on two opposite sides of the protective cover, and the connection direction of the two material openings is consistent with the conveying direction of the conveying assembly.

10. A substrate processing system, characterized in that: A vacuum drying device comprising a substrate as claimed in any one of claims 1 to 9.

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